Electromagnetic-driven miniature two-dimensional scanning mirror device

Abstract

The invention discloses an electromagnetic-driven miniature two-dimensional scanning mirror device which belongs to the technical field of micro scanning and MEMS, is manufactured by adopting bulk silicon and surface micro machining technology and is actually a miniature two-dimensional scanning mirror device with two pairs of orthogonal magnetic poles. The scanning mirror device comprises a reflecting mirror surface, an inner baseplate, an outer baseplate, a base, inner torsion beams and outer torsion beams, wherein the reflecting mirror surface is integrally arranged on the inner baseplate; the inner baseplate is connected with the outer baseplate through a pair of opposite inner torsion beams; the outer baseplate is connected with the fixed base through the pair of opposite outer torsion beams; the inner torsion beams and the outer torsion beams are orthogonal. The scanning mirror device adopts a duralumin structure for encapsulation; two groups of magnet poles and magnetic yokes are arranged inside to form an orthogonal magnetic field; input signals are led in through the side wall of the encapsulating structure; a transparent glass seal cover is arranged at the top end of the encapsulating structure. The scanning mirror device has the advantages of high actuating efficiency, large torsion force and compact structure, and can realize two-dimensional scanning at larger angle.

Description

technical field [0001] The invention relates to an electromagnetically driven miniature two-dimensional scanning mirror device, which belongs to the fields of Micro Scanning technology and MEMS technology (Micro-Electro-Mechanical System). Background technique [0002] With the continuous development of MEMS technology, especially due to the needs of high-tech fields such as wireless sensor networks, various MEMS devices continue to emerge. The micro-mirror based on MEMS technology is a new type of scanning method, which has many advantages such as light weight, small size, low energy consumption, and high accuracy, and can replace the traditional complicated mechanical scanning mechanism. Micro-scanning mirrors can be applied in laser scanning systems as information sensing devices in wireless sensor networks and the Internet of Things. [0003] Laser scanning is a key technology for information sensing equipment, mainly used to scan and detect target objects in a certain ...

AI Technical Summary

Problems solved by technology

[0012] The purpose of the present invention is to solve the problems of complex mechanical structure of traditional scanning mirrors and low actuation efficiency of existing MEMS scanning mirrors, and realize high-reliability two-dimensional scanning

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