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Minisize two-dimension scan mirror with piezoresistance sensor

A piezoresistive sensor and two-dimensional scanning mirror technology, applied in the field of miniature two-dimensional scanning mirrors, can solve the problems of low actuation efficiency, complex structure, and inability to measure the deflection angle of the mirror, and achieve the effect of easy manufacturing and simple overall structure

Active Publication Date: 2009-01-14
江苏智能微系统工业技术股份有限公司
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0011] The purpose of the present invention is to solve the problems of low actuation efficiency, complex structure, difficult processing and inability to measure the deflection angle of the existing MOEMS two-dimensional scanning mirror.

Method used

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  • Minisize two-dimension scan mirror with piezoresistance sensor
  • Minisize two-dimension scan mirror with piezoresistance sensor
  • Minisize two-dimension scan mirror with piezoresistance sensor

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Embodiment Construction

[0027] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0028] 1. The overall structure of the miniature two-dimensional scanning mirror

[0029] figure 1 Shown is the overall structure of the miniature two-dimensional scanning mirror, which is composed of a mirror 1, an inertia generator 2, an excited block 3, a piezoelectric driver 4 and a flexible beam 5, wherein the mirror 1 and the inertia generator 2 form a whole, The stimulated block 3 is bonded to the piezoelectric driver 4 , and the upper and lower parts are connected by a flexible beam 5 .

[0030] The mirror 1 has two degrees of freedom of bending and twisting, figure 2 Shown is the bending deflection motion of a miniature 2D scanning mirror, image 3 Shown is the twisted deflection motion of a miniature 2D scanning mirror with different resonant frequencies in the two directions of vibration. When applying the sine wave driving voltage of the resonance fr...

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Abstract

The invention discloses a mini two-dimensional scanning telescope with piezoresistive transducer in the micro-scanning technical and MOEMS technical domain, which comprises the following parts: reflective lens integrated on the monocrystalline silicon, inertia generator, excited block, flexible beam and piezoelectric driver to bind the excited block, wherein the upper and lower ends of the flexible beam connect the reflecting lens and excited block; the sine DC pulse voltages with two different frequencies is superimposed on the piezoelectric driver to make the reflecting lens do deviation movement corresponding to bending shaft along axle x and twisting axle of axle y of the flexible beam; the bending deviation angle and twisting deviation angle are calculated by voltage VB and VT tested by two Histone bridges near top of the excited block and middle part of the flexible beam; each Histone bridge is composed of boron or phosphor doped piezoresistance.

Description

technical field [0001] The invention relates to a miniature two-dimensional scanning mirror, belonging to the fields of Micro Scanning technology (Micro Scanning) and MOEMS technology (Micro Optical-Electro-Mechanical System). Background technique [0002] Autonomous scanning is a key technology for space target detection. It is mainly used to scan and detect target spacecraft in a certain area of ​​space, and measure their relative distance and relative orientation. Autonomous scanning technology can be divided into satellite body scanning, pod tracking scanning, and mirror two-dimensional space scanning, among which satellite body scanning increases the complexity of satellite attitude control, and pod tracking scanning is more difficult in terms of weight, power consumption, and volume. Relatively large, not suitable for micro-satellites (mass less than 20kg) and nano / pico-satellites (mass less than 10kg). The mirror two-dimensional space scanning traditional mirror scan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B26/10G01D5/16
Inventor 尤政张弛张高飞于世洁
Owner 江苏智能微系统工业技术股份有限公司
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