Magnetron sputtering coating device

Abstract

The technology provides a magnetron sputtering coating device which is capable of effectively shortening the vacuumizing time, saving the energy and improving the effective utilization rate of equipment. The magnetron sputtering coating device comprises a plurality of vacuum cavities, wherein every two adjacent cavities are separated from each other by a clapboard; the two side walls of the clapboard are respectively provided with a v-shaped groove, and tops of the two v-shaped grooves are opposite to each other; a slab joint is arranged between the tops of the two v-shaped grooves; two isolating bars are arranged at each v-shaped groove and extend along the length direction of the v-shaped groove; the two isolating bars are respectively arranged at the two sides of the symmetry axis of each v-shaped groove; the surfaces of the isolating bars opposite to the inclined sides of the v-shaped grooves are inclined planes parallel to the inclined sides of the v-shaped grooves; the opposite planes of every two isolating bars are parallel to each other; along the length directions of the v-shaped grooves, the lengths of the slab joints are smaller than those of the isolating bars, and the lengths of the isolating bars are smaller than those of the v-shaped grooves; the isolating bars are connected with a driving device; the two isolating bars are driven to move by the driving device; the inclined planes of the isolating bars are contacted with the inclined sides of the v-shaped grooves, and the two isolating bars make relative motion under the guidance of the inclined sides; the opposite planes of the two isolating bars are contacted with each other.

Description

technical field [0001] The technology relates to a magnetron sputtering coating device. Background technique [0002] In the production process of flexible roll-to-roll magnetron sputtering coating, considering the requirements of the production process, two or more magnetron sputtering coating working chambers are usually set up. if figure 1 In the roll-to-roll magnetron sputtering coating device shown in the figure, from left to right in the housing 100, there are feeding storage chamber 4, magnetron sputtering working chamber 5, magnetron sputtering working chamber 6, and unloading storage chamber 7. , a total of 4 vacuum chambers. A partition 12 is arranged between two adjacent vacuum chambers, and a slit 13 is opened on the partition. A discharge roller 8 is arranged in the loading storage chamber 4 , a take-up roller 9 is arranged in the unloading storage chamber 7 , and a magnetron sputtering target machine 10 is arranged in the magnetron sputtering working chamber...

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