Resonance-enhanced transverse optical pumping device and method for a metastable gas laser

Abstract

A resonance reinforced transverse optical pumping device and method for a metastable gas laser; by means of resonance reinforcement technology, absorption of pump light may be increased so as to improve the optical-to-optical efficiency and electrical-to-optical efficiency of the entire system. Separating a pumped laser from an emergent laser may overcome the drop in laser extraction power and the corresponding insertion loss brought about by using a polarized device, thus avoiding the use of a dichroic mirror, and lowering the requirements on the power and beam quality of each individual pumped laser module. The pumping scheme can also be expanded to a multi-channel transverse pumping intrinsic excitation and a seed-injection type master oscillator power amplifier structure, and is conducive to promoting an optical pump metastable gas laser to achieve a higher-power laser output, and an application thereof in fields such as laser-induced plasma. In addition, the resonance reinforced transverse pumping method is also suitable for other optically pumped gas lasers such as optically pumped oxygen-iodine lasers.

Description

technical field [0001] The invention belongs to the field of laser technology, and more specifically relates to a resonance-enhanced transverse optical pumping device and method for a metastable gas laser. Background technique [0002] Laser-induced plasma (Laser Produced Plasma, LPP) extreme ultraviolet lithography light source is one of the core technologies of next-generation lithography. Currently, gas lasers especially CO 2 Lasers are used for laser driving of extreme ultraviolet lithography light sources. However, CO 2 The low electro-optical efficiency and large size of the laser lead to high energy consumption and large space occupation of the extreme ultraviolet lithography light source system, which limits the mass production and application of the extreme ultraviolet lithography light source. [0003] Optically Pumped Metastable Gas Laser (OPMGL) is a new type of gas laser that combines discharge excitation and optical pumping. It uses gas metastable particles ...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a resonance-enhanced transverse light pumping device for a metastable gas laser, aiming at solving the problem of the limited absorption path of the pump light due to the use of a polarizing prism in the prior art Technical issues leading to low laser output power and electro-optical efficiency

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