Resonance reinforcement transverse optically pumped device and method of metastable gas laser

Abstract

The invention discloses a resonance reinforcement transverse optically pumped device and method of a metastable gas laser. By resonance reinforcement technology, pumping light absorption can be expanded, so that the optical-to-optical efficiency and the electrical-to-optical efficiency of the whole system are improved. By separating pumping laser from emergent laser, the defects of laser extraction power reduction and corresponding insertion loss brought by a polarized device can be overcome, a dichroic mirror is prevented from being used, and the power of a single pumped laser module and the requirement of optical beam quality are reduced. The pumping scheme also can be expanded to a multi-path transverse pumping intrinsic excitation and seed injected master oscillator power amplifier (MOPA) structure, and the optically pumped metastable gas laser is favorably promoted, higher laser output and the application of resonance reinforcement transverse optically pumped device in the field of laser induced plasma are achieved. Moreover, the resonance reinforcement transverse optically pumped method is also suitably used for other optically pumped gas lasers such as an optically pumped oxygen-iodine laser.

Description

technical field [0001] The invention belongs to the field of laser technology, and more specifically relates to a resonance-enhanced transverse optical pumping device and method for a metastable gas laser. Background technique [0002] Laser-induced plasma (Laser Produced Plasma, LPP) extreme ultraviolet lithography light source is one of the core technologies of next-generation lithography. Currently, gas lasers especially CO 2 Lasers are used for laser driving of extreme ultraviolet lithography light sources. However, CO 2 The low electro-optical efficiency and large size of the laser lead to high energy consumption and large space occupation of the extreme ultraviolet lithography light source system, which limits the mass production and application of the extreme ultraviolet lithography light source. [0003] Optically Pumped Metastable Gas Laser (OPMGL) is a new type of gas laser that combines discharge excitation and optical pumping. It uses gas metastable particles ...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the defects of the prior art, the purpose of the present invention is to provide a resonance-enhanced transverse light pumping device for a metastable gas laser, aiming at solving the problem of the limited absorption path of the pump light due to the use of a polarizing prism in the prior art Technical issues leading to low laser output power and electro-optical efficiency

Images