Method based on evaporation, metering and regulation of steam flow
A steam flow and flow technology, applied in relative volume flow measurement, flow control, control/regulation systems, etc., can solve the problems of low operating temperature, poor reliability, and inability to control flow with small steam flow, and achieve high operating temperature. , to achieve the effect of control
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Embodiment 1
[0040] Such as figure 1 , figure 2 Shown, for NbCl 5 Evaporation, metering and adjustment of steam flow, 200g of NbCl 5 The powder is packed in the evaporation container 2, and then the evaporation container 2 is sealed and placed on an electronic balance 6 for weighing, and the total weight is 9830.91g. The sealed evaporation container 2 was installed in the heating box 1, and the electronic balance showed that the weight was 9847.83g. After using the protective gas to empty the evaporation container, turn on the display system 5 to display the flow value, the steam flow dm / dt time interval is 5s, NbCl 5 Flow plan control is 0.10g / s. Start the heating box to heat the evaporation container and the steam pipe, the temperature of the heating box with the evaporation container is set at 270°C, and the temperature of the heating box with the steam pipe is set at 270°C. The weight change of the evaporation container and the steam flow rate during the evaporation process are a...
Embodiment 2
[0042] Such as figure 1 , image 3 Shown, for TiCl 4 Evaporation, metering and adjustment of steam flow, 500g of TiCl 4 Put it into an evaporation container, then seal the evaporation container and place it on an electronic balance for weighing, the total weight is 10130.42g. The sealed evaporation container was installed in the heating box, and the electronic balance showed that the weight was 10146.03g. After using the protective gas to empty the evaporation container, turn on the display system 5 to display the flow value, the steam flow dm / dt time interval is 10s, TiCl 4 Flow plan control is 0.15g / s. Start the heating box to heat the evaporating container and the steam pipeline. The temperature of the evaporating container heating box is set at 160°C, and the temperature of the steam pipeline heating box is set at 160°C. The weight change of the evaporation container and the steam flow rate during the evaporation process are as follows: image 3 As shown, in the init...
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