Double-side exposure machine with cantilever-type double-tables and double-side exposure method
A double-sided exposure and cantilever-type technology, which is applied in the direction of photomechanical equipment, microlithography exposure equipment, and photoplate-making process on patterned surfaces, etc., can solve the problem of increasing exposure process, alignment accuracy affecting exposure accuracy, and affecting exposure effect, etc. question
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[0030] Embodiments of the present invention are described in detail below in conjunction with accompanying drawings:
[0031] It should be noted that when an element is “fixed” to another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of illustration only and are not intended to represent the only embodiments.
[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein in the descrip...
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