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153results about How to "Improve exposure efficiency" patented technology

Dual platform switching system for mask aligner silicon slice platform using conveyer structure

The invention provides a double-platform exchanging system for a photoetching machine silicon chip platform with a conveyor belt and belongs to the technical field of the manufacturing equipment of a semiconductor. The invention comprises a silicon chip platform operated on a pretreatment station and a silicon chip platform operated on an exposure station; the pretreatment station and the exposure station are respectively provided with a H-typed driving unit and the H-typed driving unit consists of X-directional straight line motors on the two sides and a Y-directional straight line motor, both of which are used for driving the silicon chip platform to move along X direction and Y direction on the pretreatment station and the exposure station; the two sides of a base station are respectively provided with a conveyor belt in the system and a butt slide block is fixed on and connected with the lateral side of the conveyor belt; with the conveyor belt and the butt slide block, the transition of the silicon chip platform 1 from the pretreatment station to the exposure station can be realized. As the invention adopts the conveyor belt structure, the invention effectively avoids the problem of accurate abut joint of the guide rail of the patent ZL03156436.4 double-platform exchanging system and has the characteristics of simple operation and small size of outline, etc.
Owner:TSINGHUA UNIV

CMOS image sensor and exposure control method thereof

The invention discloses a CMOS (Complementary Metal Oxide Semiconductor) image sensor and an exposure control method thereof. The method comprises the following steps: aiming at a pixel array, first row-to-row exposure and second row-to-row exposure are executed to obtain first image data and second image data, the exposure time interval of the same row of the first row-to-row exposure and the second row-to-row exposure is longer than a half light intensity period of change by odd number times; and image data in the same row of the first image data and the second image data is compound to obtain an output image. The CMOS image sensor comprises an exposure time sequence control circuit, row selecting circuits, a pixel array, a reading circuit and an image compound circuit, wherein the row selecting circuit executes the first row-to-row exposure and the second row-to-row exposure for the pixel array, the exposure time interval of the same row of the first row-to-row exposure and the second row-to-row exposure is longer than a half light intensity period of change by odd number times, and the image compound circuit compounds the first image data and the second image data to form an output image. By adopting the CMOS image sensor and the exposure control method thereof, yellow bands or light and shade strips in an image are eliminated.
Owner:BRIGATES MICROELECTRONICS KUNSHAN

Exposure device and method

The invention discloses an exposure device and an exposure method. The device comprises a flexible substrate and a reel-to-reel transmission system, wherein the reel-to-reel transmission system is used for transmitting and fixing the flexible substrate; the exposure device also comprises a frontal-surface exposure system and a back-surface exposure system which are symmetrical about the axial direction of the flexible substrate, measurement systems which are corresponding to the frontal surface and the back surface of the flexible substrate respectively, and a master control system which is connected with the reel-to-reel transmission system, the frontal-surface exposure system, the back-surface exposure system and the measurement systems respectively. Through arranging the frontal-surfaceexposure system and the back-surface exposure system, the frontal surface and the back surface in the flexible substrate are exposed respectively; not only is the exposure efficiency improved; but also two different exposure systems are arranged respectively in the frontal-surface exposure system and the back-surface exposure system at the same time to realize the coarse exposure and the correction exposure on different exposed graphs on the flexible substrate; the exposure device can adapt to different deformation amounts and the exposure precision is greatly improved.
Owner:SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD

Double-sided exposure machine and double-sided exposure method

The invention relates to a double-sided exposure machine and a double-sided exposure method. The double-sided exposure machine comprises a worktable; the exposure machine comprises a first exposure component and a second exposure component each capable of movingalong the worktable, and forms an exposure area on the worktable; the loading machine comprises a loading platform; a first loading part and a second loading part are disposed on the loading platform, and the first loading part and the second loading part are disposed at a pitch; the loading platform is movable along the worktable and moves the first loading part or the second loading part to the exposure area. According to the arrangement of the movable first exposure component and second exposure component, the loading platform ismoved to the preset position during exposure, so that the first loading part or the second loading part is located in the exposure area, and then the first exposure component and the second exposurecomponent move toexpose the corresponding first component to be exposed or the second component to be exposed. Due to the simultaneous double-sided exposure, operations such as flippingare avoided, the exposure process and alignment are reduced, and the exposure efficiency and the exposure precision are improved.
Owner:ZHONGSHAN AISCENT TECH

Semi-automatic alignment and exposure device of printed circuit board (PCB)

The invention discloses a semi-automatic alignment and exposure device of a printed circuit board (PCB). The semi-automatic alignment and exposure device comprises an alignment chamber and an exposure chamber, wherein an upper slipway and a lower slipway are respectively arranged in the alignment chamber and the exposure chamber and are in parallel, an upper alignment platform is arranged in the upper slipway and comprises a first working table, a first upper cover and an alignment mechanism, the first working table can slide along the upper slipway, the first upper cover is hinged with the first working table, a signal acquisition device is arranged above the first working table and can slide along the alignment chamber, the exposure chamber comprises an exposure device, the exposure device can do vertical movement along the exposure chamber, a lower alignment platform comprises a second working table, a second upper cover and an alignment mechanism, the second working table can slide along the lower slipway, the second upper cover is hinged with the second working table, the first working table and the second working table do movement relative to each other by a driving device, the semi-automatic alignment and exposure device also comprises a control system, and the control system controls opening and closing of a partition plate, controls the first working table and the second working table to do movement relative to each other and controls the alignment mechanism to automatically align. The semi-automatic alignment and exposure device has the advantages of positioning accuracy and high positioning efficiency.
Owner:永天机械设备制造(深圳)有限公司

Double-side exposure machine with cantilever-type double-tables and double-side exposure method

Provided are a double-sided exposure machine and a double-sided exposure method. The double-sided exposure machine comprises: a mounting frame; a first exposure component (210) and a second exposure component (220) provided at two sides of the mounting frame, respectively; a first loading table (310) and a second loading table (320); and a driving mechanism, the driving mechanism comprising a driving assembly, the first loading table (310) and the second loading table (320) passing through an exposure area in a first motion state and a second motion state, respectively. During exposure, the first loading platform (310) moves along a first circular path and passes through the exposure area in the first motion state, so as to expose a first member to be exposed (410), and the second loading platform (320) moves along a second circular path and passes through the exposure area in the second motion state, so as to expose a second member to be exposed (420). Both the first loading platform (310) and the second loading platform (320) are in circular motion, and while said second member (420) is being exposed, the unloading of a first exposed finished product or the loading of a next first member to be exposed can also be performed, thereby having high exposure efficiency. Compared with the traditional double-sided exposure method by means of flipping, the present invention has high exposure precision.
Owner:ZHONGSHAN AISCENT TECH

Fabrication method of high-band surface acoustic wave device electrode

The invention discloses a fabrication method of a high-band surface acoustic wave device electrode. The fabrication method comprises the steps of S1, exposing a profile of an interdigital electrode inan electrode to be fabricated on a substrate of a piezoelectric functional material by employing negative glue; S2, performing metal deposition after exposure and developing to obtain a metal coatinglayer with an interdigital electrode profile pattern; S3, mechanically stripping a redundant metal layer outside the profile pattern to obtain a final intensive pattern corresponding to the interdigital electrode; S4, performing exposure and metal deposition on a convergence bar and a bonding pad in the electrode to be fabricated by employing positive glue; and S5, stripping the redundant metal layer from the metal layer after being deposited by employing a solution removal process to obtain an electrode pattern corresponding to the convergence bar and the bonding pad so as to complete electrode fabrication. By the fabrication method, a nanoscale SAW device electrode compatible with a high-resolution intensive pattern and a large-size pattern can be obtained, and the fabrication method has the advantages of low cost, high fabrication efficiency, high yield, high SAW electrode quality, good universality and the like and is simple to implement and operate.
Owner:NAT UNIV OF DEFENSE TECH

Double-side exposure machine and double-side exposure method

The invention relates to a double-side exposure machine and a double-side exposure method, wherein the double-side exposure machine comprises a mounting frame, a first exposure assembly and a second exposure assembly arranged on two sides of the mounting frame respectively, a first loading platform and a second loading platform, and a driving mechanism. The driving mechanism comprises a driving assembly, and the first loading platform and the second loading platform pass through the exposure area in a first motion state and a second motion state respectively. When exposed, the first loading platform moves in a first circular track and passes through the exposure area in the first motion state to expose a first to-be-exposed part; and the second loading platform moves in a second circular track and passes through the exposure area in the second motion state to expose a second to-be-exposed part. The first loading platform and the second loading platform are in circular motion, and whenthe second to-be-exposed part is exposed, unloading of a first exposure finished product or loading of the next first to-be-exposed part can be carried out; the exposure efficiency is higher, and theexposure precision is higher compared with a traditional mode adopting overturning double-side exposure.
Owner:ZHONGSHAN AISCENT TECH

Full-automatic exposure technology

The invention discloses a full-automatic exposure technology and belongs to the technical field of PCB exposure. The full-automatic exposure technology comprises the following steps: A, feeding a material: a PCB transfer vehicle conveys PCBs to be exposed; B, loading the material: a material loading manipulator grabs the PCBs on the PCB transfer vehicle to an automatic aligning area to be aligned;C, automatic alignment: a CCD camera and a visual aligning system can finish automatic alignment between an upper negative film and a lower negative film, and the negative films and the PCBs are automatically aligned; D, exposure preparation: a carrying manipulator can grab the aligned PCBs to an exposure preparation area, and overlapping between the PCBs and the upper and lower negative films isfinished and is checked by a CCD camera system; E exposure: the aligned and checked PCBs are sent into the exposure area to be exposed by a lead screw guide rail platform of the exposure preparationarea, and after exposure is finished, the PCBs are automatically returned to the exposure preparation area; F, discharging the material: a discharging manipulator grabs the exposed PCBs to the PCB transfer vehicle. The full-automatic exposure technology disclosed by the invention can achieve unmanned automatic processing in the whole process.
Owner:CHENGDU KAIJING INTELLIGENT EQUIP CO LTD

Light source module unit for exposure and exposure device having light source module unit

The present invention provides an integrated light source module unit for exposure and an exposure device having the light source module unit, which can ensure exposure performance capable of dramatically improving the microfabrication and the resolution of exposure patterns and, at the same time, has been improved so as to be economically substitutable for the light source of a conventional exposure device since low power consumption and, particularly, ultraviolet (UV) lights having a high-efficiency and high-output single wavelength and short wavelength are ensured by maximizing light outputpower by a combination of modules each comprising: a center light source part comprising a light source panel formed by mounting a plurality of unit UV light emitting diodes (LEDs) on a circuit boardin a matrix array structure, and an optical panel formed by providing a plurality of unit condensing lenses on the optical panels, which are arranged at light-emitting sides of the LEDs to face the light source panel, in a matrix array structure in a state in which the condensing lenses are eccentric toward a random reference center axial line, which passes the center of a UV LED array on the light source panel, with respect to a major optical axis at the positions respectively corresponding to the LEDs; and a plurality of peripheral light source parts radially and equally arranged in an inclined state so as to face a major light-emitting axis of the unit UV LED of the center light source part.
Owner:赵南稙

Virtual network service exposure method and device

The invention provides a virtual network service exposure method and device. The method comprises the steps that when a server sends a second access service request to a port of a virtual machine, source IP address information of an outer network terminal is taken as a mark and is added to the second access service request; the virtual machine is enabled to obtain a service data packet corresponding to the second access service request; the source IP address information is taken as the mark, is carried in the service data packet and is returned to the server; and the server sends the service data packet to the outer network terminal according to the source IP address information as the mark. According to the embodiment of the invention, the source IP address information of the outer network terminal is taken as the mark and is added to the second access service request and the corresponding service data packet, so a true IP mode is prevented from being employed when the IP and port ofthe physical server are mapped to or bridged with the port of the virtual machine, the true and available IP and port of the physical server are expanded, the demand of virtual network exposure service can be satisfied, and the virtual network service exposure efficiency is improved.
Owner:NEUSOFT CORP
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