Double-side exposure machine and double-side exposure method

A technology of double-sided exposure and exposure area, which is applied in the direction of photomechanical equipment, microlithography exposure equipment, photolithography exposure device, etc., and can solve the problems of alignment accuracy affecting exposure accuracy, affecting exposure effect, increasing exposure process, etc.

Active Publication Date: 2018-11-23
ZHONGSHAN AISCENT TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, when the laser direct writing exposure machine performs double-sided exposure, it needs to perform flipping operation, and the flipping operation will inevitably cause the problem of alignment after flipping, which not only increases the exposure process, but also affects the exposure accuracy due to the alignment accuracy problem. thus affecting the final exposure effect

Method used

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  • Double-side exposure machine and double-side exposure method
  • Double-side exposure machine and double-side exposure method
  • Double-side exposure machine and double-side exposure method

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Embodiment Construction

[0032] Embodiments of the present invention are described in detail below in conjunction with accompanying drawings:

[0033] It should be noted that when an element is “fixed” to another element, it may be directly on the other element or there may be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The terms "vertical," "horizontal," "left," "right," and similar expressions are used herein for purposes of illustration only and are not intended to represent the only embodiments.

[0034] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field of the invention. The terminology used herein in the descrip...

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PUM

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Abstract

The invention relates to a double-side exposure machine and a double-side exposure method, wherein the double-side exposure machine comprises a mounting frame, a first exposure assembly and a second exposure assembly arranged on two sides of the mounting frame respectively, a first loading platform and a second loading platform, and a driving mechanism. The driving mechanism comprises a driving assembly, and the first loading platform and the second loading platform pass through the exposure area in a first motion state and a second motion state respectively. When exposed, the first loading platform moves in a first circular track and passes through the exposure area in the first motion state to expose a first to-be-exposed part; and the second loading platform moves in a second circular track and passes through the exposure area in the second motion state to expose a second to-be-exposed part. The first loading platform and the second loading platform are in circular motion, and whenthe second to-be-exposed part is exposed, unloading of a first exposure finished product or loading of the next first to-be-exposed part can be carried out; the exposure efficiency is higher, and theexposure precision is higher compared with a traditional mode adopting overturning double-side exposure.

Description

technical field [0001] The invention relates to the technical field of double-side exposure, in particular to a double-side exposure machine and a double-side exposure method. Background technique [0002] Traditional double-sided exposure machines usually use film transfer printing to expose double-sided circuit boards. Before exposure, it is necessary to make the film with the pattern to be transferred; then, fix the film with the pattern on both sides on the upper and lower glass respectively; then, sandwich the circuit board with the pattern to be transferred between the upper and lower glass, use The blue-violet high-brightness light source is used for exposure, and the circuit pattern is transferred to the circuit board to complete the double-sided exposure. For laser direct writing exposure machines, single-side exposure is usually used. Firstly expose one side of the circuit board, turn it over after the exposure is completed, then expose the other side of the circ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70716G03F7/70725G03F7/70758
Inventor 汪孝军廖平强张胜
Owner ZHONGSHAN AISCENT TECH
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