A manufacturing device for a quartz crucible capable of pulling multiple single crystal silicon

Abstract

The present invention belongs to the technical field of inorganic non-metallic material manufacturing, and in particular, relates to a manufacturing device for a quartz crucible capable of pulling multiple single crystal silicon, including a base, and also including: a supporting mechanism, a pressurized drainage mechanism, a drainage volume calculation mechanism, a drainage rate feedback control mechanism, a drainage timing trigger mechanism, a pressure adjustment mechanism, and a deformation size monitoring and display mechanism. The present invention can quickly drain the water in the crucible embryo, and provide different pressures to meet the needs of water discharge of crucible embryos with different water contents, thereby effectively improving the compactness of the crucible, and can automatically control the size of the drainage pressure based on the drainage rate. Under the premise of ensuring stable drainage, it can also avoid the problem that excessive pressure directly causes damage to the crucible, and can monitor the degree of pressurized deformation of the final crucible embryo, and then feedback accurate information to the technicians.

Description

Technical Field

[0001] The invention belongs to the technical field of inorganic non-metallic material manufacturing, and in particular relates to a manufacturing device for a quartz crucible capable of pulling a plurality of single crystal silicon. Background Art

[0002] The main component of quartz is silicon dioxide, which is a typical inorganic non-metallic compound. Inorganic non-metallic materials usually have the characteristics of high temperature resistance, corrosion resistance, high hardness, and good insulation. Quartz crucibles have these excellent properties. They can work stably in high temperature environments and do not react with most chemical substances. They are often used in chemical experiments, high-temperature smelting and chemical reactions in industrial production.

[0003] Single crystal silicon is widely used in semiconductor devices and solar cells. In current technology, it is mainly prepared by the Czochralski method. According to the Czochralski method, the growth of single crystal silicon is carried out in a crystal pulling furnace. The initial polysilicon raw material is loaded into a quartz crucible and melted by a heater surrounding the quartz crucible. The seed crystal is then immersed in the molten silicon liquid, and then slowly pulled upward and rotated relative to each other to achieve the growth of single crystal silicon. In this growth process, the quartz crucible plays an extremely critical role. It is not only a carrying container, but also has to withstand continuous high temperature and erosion by molten silicon liquid.

[0004] In the actual preparation process of quartz crucible, quartz sand and other additives are first mixed into slurry in a certain proportion, and then the mixed slurry is formed into the shape of a crucible through mold grouting, and then the formed crucible embryo is placed in a high-temperature furnace to melt it into a liquid at high temperature, and the molten quartz liquid is cooled and solidified to form a quartz crucible. During the grouting process, in order to ensure that the slurry has good fluidity and filling properties, a certain amount of water needs to be added as a solvent, and in the process of stirring and mixing the slurry, moisture in the ambient air will be introduced. The presence of moisture will affect the density of the crucible. If there is moisture in the slurry, in the subsequent firing process, the evaporation of moisture will form pores and reduce the structural strength and density of the crucible. , affecting the molding quality of the crucible, and moisture will affect the chemical stability of the crucible. Excessive moisture will cause the crucible to react unnecessary with chemical substances during use, reducing its corrosion resistance. Therefore, in order to improve the compactness of the crucible, it is necessary to discharge the moisture in the crucible embryo by applying static pressure, so that the internal structure of the crucible is denser, thereby improving the heat resistance and corrosion resistance of the crucible, and thus meeting the better single crystal silicon production requirements. The static pressure setting value in the existing static pressure treatment is usually set based on the work experience of the technicians. Directly excessive static pressure is likely to cause the crucible to rupture and damage, while excessive static pressure may lead to incomplete discharge of moisture in the crucible, which greatly affects the preparation quality of the crucible. Summary of the invention

[0005] The object of the present invention is to provide a manufacturing device for a quartz crucible capable of pulling a plurality of single crystal silicon in view of the above problems.

[0006] To achieve the above object, the present invention adopts the following technical solution: a manufacturing device for a quartz crucible capable of pulling multiple single crystal silicon, comprising a base and also comprising:

[0007] A supporting mechanism, fixedly mounted on the base;

[0008] A pressurized drainage mechanism, fixedly mounted on the supporting mechanism, for providing pressurized pressure;

[0009] A displacement calculation mechanism is fixedly installed between the base and the supporting mechanism;

[0010] A drainage rate feedback control mechanism is fixedly mounted on the upper end of the base and is drivingly connected to the drainage volume calculation mechanism;

[0011] A drainage timing trigger mechanism, fixedly mounted on the supporting mechanism, is used to control the interval starting action of the drainage calculation mechanism;

[0012] A pressure regulating mechanism, fixedly mounted outside the pressure drainage mechanism, for automatically regulating the pressure of the pressure drainage mechanism;

[0013] The deformation size monitoring and display mechanism is fixedly mounted on the pressurized drainage mechanism and is used to monitor and display the deformation degree of the crucible during the pressurization process.

[0014] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the supporting mechanism includes a bracket fixedly mounted on the upper end of the base, a hollow supporting seat is fixedly mounted on the upper end of the bracket, a plurality of water seepage micropores are evenly opened on the inner side of the hollow supporting seat, a drain pipe is fixedly connected to the center of the lower end of the hollow supporting seat, and a solenoid valve is installed on the drain pipe.

[0015] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the pressurized drainage mechanism includes two electric slide rails symmetrically fixedly installed on the upper end of the bracket, the electric slide rails are extended longitudinally, the upper ends of the sliding blocks in the two electric slide rails are fixedly connected to the same U-shaped vertical plate, the horizontal parts of the U-shaped vertical plate are symmetrically fixed with two electric push rods, the lower movable ends of the two electric push rods are fixedly connected to the same fixed plate, the surface of the fixed plate is symmetrically provided with a plurality of sockets, and the movable sockets in the corresponding sockets are provided with pressure rods, the lower ends of the plurality of pressure rods are fixedly connected to the same pressure block, the upper ends of the plurality of pressure rods are fixedly connected to the same pressure plate, the lower end of the pressure plate and the upper end of the fixed plate are fixedly connected with a plurality of push springs sleeved on the outside of the pressure rods, the upper end of the fixed plate is fixedly connected with a cover shell covering the outside of the pressure plate, the upper end of the pressure plate is fixedly connected with a force-bearing permanent magnet plate, and a pressure electromagnetic plate is fixedly installed on the top of the inner wall of the cover shell.

[0016] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the displacement calculation mechanism includes a plurality of guide slide rods symmetrically fixedly connected to the upper end of the base and the lower end of the hollow supporting seat, the plurality of guide slide rods are symmetrically arranged in two rows, and the plurality of guide slide rods in the same row are externally slidably sleeved with the same sliding seat, the upper end of the sliding seat and the lower end of the hollow supporting seat are fixedly connected with a plurality of pull-up springs sleeved outside the guide slide rods, a same water receiving shell is fixedly connected between the two sliding seats, a water outlet pipe is fixedly connected at the center of the lower end of the water receiving shell, a solenoid valve is installed on the water outlet pipe, and a water storage shell arranged at the lower end of the water receiving shell is fixedly installed at the upper end of the base.

[0017] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the drainage rate feedback control mechanism includes a control shell fixedly mounted on the upper end of the base, the control shell is opened as an open structure on the side close to the water receiving shell, the inner wall of the control shell is fixedly connected to a plurality of limit sliding rods arranged side by side front and back, the plurality of limit sliding rods are externally slidably sleeved with the same lifting seat, one end of the lifting seat is fixedly connected to the outer wall of the sliding seat, a vertically arranged feedback resistor rod is fixedly mounted on the inner wall of the control shell, a sleeve hole sleeved outside the feedback resistor rod is opened on the surface of the lifting seat, and a feedback conductive contact electrically contacting the feedback resistor rod is fixedly connected to the inner wall of the corresponding sleeve hole, a feedback switch is fixedly mounted on the upper side of the inner wall of the control shell, and a pressing round head located on the same vertical line as the feedback switch is fixedly connected to one end of the lifting seat.

[0018] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the drainage timing trigger mechanism includes a timing round shell fixedly mounted on a bracket, a rotating shaft is rotatably connected at the center of the inner wall of the timing round shell, a reduction motor for driving the rotating shaft to rotate is fixedly mounted on the outer wall of the timing round shell, a trigger switch is fixedly mounted on one side of the inner wall of the timing round shell, and an arc-shaped protrusion corresponding to the position of the trigger switch is fixedly connected to the shaft wall of the rotating shaft.

[0019] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the pressure adjustment mechanism includes an adjustment shell fixedly mounted outside the U-shaped vertical plate, the inner wall of the adjustment shell is rotatably connected to a vertically arranged adjustment screw, the upper end of the adjustment shell is fixedly mounted with an adjustment motor for driving the adjustment screw to rotate, the rod wall of the adjustment screw is threadedly sleeved with an adjustment block, an adjustment resistor rod is fixedly mounted on one side of the inner wall of the adjustment shell, and one end of the adjustment block is fixedly connected with an adjustment conductive contact piece that is in electrical contact with the adjustment resistor rod.

[0020] In the above-mentioned manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon, the deformation size monitoring and display mechanism includes a transmission shell fixedly mounted on the upper end of the cover shell, a transmission screw arranged laterally is rotatably connected in the transmission shell, a transmission seat is threadedly sleeved on the rod wall of the transmission screw, a pointer is fixedly connected to the upper end of the transmission seat, the upper end of the pointer passes through the upper end of the transmission shell through a strip opening opened at the upper end of the transmission shell, a deformation scale plate arranged at the rear side of the pointer is also fixedly mounted on the upper end of the transmission shell, a plurality of sockets are opened at the rear end of the transmission shell, and compensation rods are movably sleeved in the corresponding sockets, and a plurality of the compensation rods are One end of the rod located in the transmission housing is fixedly connected to the same warning switch, and a plurality of compensation springs sleeved on the outside of the compensation rod are fixedly connected between the warning switch and the transmission housing. A warning device electrically connected to the warning switch is fixedly installed at the lower end of the transmission housing, and a transmission rack is fixedly connected to one side of the upper end of the pressure plate, and the upper end of the transmission rack passes through the upper end of the cover shell, and a speed-increasing gear box located between the transmission rack and the transmission housing is fixedly installed on the upper end of the cover shell, and a transmission gear meshing with the transmission rack is fixedly connected to the input end of the speed-increasing gear box, and the output end of the speed-increasing gear box is fixedly connected to one end of the transmission screw.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. Through the supporting mechanism, pressurized drainage mechanism and pressure regulating mechanism, the water in the crucible embryo can be quickly discharged, and different pressures can be provided to meet the needs of water discharge from crucible embryos with different water contents, thereby effectively improving the density of the crucible and the structural strength of the crucible, so that the produced quartz crucible can better meet the production needs of single crystal silicon drawing.

[0023] 2. Through the set drainage calculation mechanism, drainage rate feedback control mechanism, and drainage timing trigger mechanism, the water discharge rate of the crucible embryo can be effectively calculated, and the drainage pressure can be automatically controlled based on the drainage rate. Under the premise of ensuring stable drainage, it can also avoid the problem of damage to the crucible caused by direct excessive pressure, thereby improving the production quality of the crucible.

[0024] 3. Through the deformation size monitoring and display mechanism, the degree of pressurized deformation of the final crucible embryo can be monitored, and then accurate information can be fed back to the technical staff, so that the technical staff can adjust the initial ratio of the crucible to ensure the thickness quality of the final crucible, avoid the problem that the thickness of the crucible embryo changes too much after pressurized drainage, which will affect the quality of use, and when the deformation degree of the crucible embryo exceeds the threshold, the staff will be reminded to scrap it in time.

[0025] In summary: the present invention can quickly drain the moisture in the crucible embryo, and provide different pressures to meet the needs of draining moisture from crucible embryos with different water contents, thereby effectively improving the density of the crucible and the structural strength of the crucible, so that the produced quartz crucible can better meet the production needs of single crystal silicon drawing, and can automatically adjust the size of the drainage pressure based on the drainage rate. Under the premise of ensuring stable drainage, it can also avoid the problem of direct excessive pressure causing damage to the crucible, and can monitor the degree of pressurized deformation of the final crucible embryo, and then feedback accurate information to technical personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a cross-sectional structural schematic diagram of the present invention;

[0027] Figure 2 It is a cross-sectional structural schematic diagram of the supporting mechanism of the present invention;

[0028] Figure 3 It is a structural schematic diagram of the pressurized drainage mechanism of the present invention;

[0029] Figure 4 It is a structural schematic diagram of the displacement calculation mechanism of the present invention;

[0030] Figure 5 It is a cross-sectional structural schematic diagram of the drainage rate feedback control mechanism of the present invention;

[0031] Figure 6 It is a cross-sectional structural schematic diagram of the drainage timing trigger mechanism of the present invention;

[0032] Figure 7 It is a cross-sectional structural schematic diagram of the pressure regulating mechanism of the present invention;

[0033] Figure 8It is a schematic cross-sectional structural diagram of the deformation size monitoring and display mechanism of the present invention.

[0034] In the figure: 1 base, 2 supporting mechanism, 21 bracket, 22 hollow supporting seat, 23 water seepage micropores, 24 drainage pipe, 3 pressurized drainage mechanism, 31 electric slide rail, 32 U-shaped vertical plate, 33 electric push rod, 34 fixed plate, 35 pressurized rod, 36 pressurized block, 37 pressurized plate, 38 push spring, 39 cover shell, 310 force permanent magnetic plate, 311 pressurized electromagnetic plate, 4 drainage volume calculation mechanism, 41 guide slide rod, 42 sliding seat, 43 pull-up spring, 44 water receiving shell, 45 water outlet pipe, 46 water storage shell, 5 drainage rate feedback control mechanism, 51 control shell, 52 limit slide rod, 53 lifting seat, 54 feedback resistor rod, 55 feedback conductive contact piece, 56 feedback switch, 57 press round head, 6 drainage timing trigger Mechanism, 61 timing round shell, 62 rotating shaft, 63 reduction motor, 64 trigger switch, 65 arc-shaped protrusion, 7 pressure adjustment mechanism, 71 adjustment shell, 72 adjustment screw, 73 adjustment motor, 74 adjustment block, 75 adjustment resistance rod, 76 adjustment conductive contact, 8 deformation size monitoring and display mechanism, 81 transmission shell, 82 transmission screw, 83 transmission seat, 84 pointer, 85 deformation scale plate, 86 compensation rod, 87 warning switch, 88 compensation spring, 89 warning device, 810 transmission rack, 811 speed increasing gear box, 812 transmission gear. DETAILED DESCRIPTION

[0035] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0036] like Figure 1-Figure 8 As shown, a manufacturing device for a quartz crucible capable of pulling a plurality of single crystal silicon comprises a base 1 and also comprises:

[0037] The supporting mechanism 2 is fixedly mounted on the base 1, and includes a bracket 21 fixedly mounted on the upper end of the base 1, a hollow supporting seat 22 is fixedly mounted on the upper end of the bracket 21, a plurality of water seepage micropores 23 are evenly opened on the inner side of the hollow supporting seat 22, a drain pipe 24 is fixedly connected to the center of the lower end of the hollow supporting seat 22, and a solenoid valve is mounted on the drain pipe 24, which can bear the lower side pressure of the crucible embryo to be drained.

[0038] The pressurized drainage mechanism 3 is fixedly mounted on the supporting mechanism 2 and is used to provide a pressurizing force. The pressurized drainage mechanism 3 includes two electric slide rails 31 symmetrically fixedly mounted on the upper end of the bracket 21. The electric slide rails 31 are longitudinally extended. The upper ends of the sliders in the two electric slide rails 31 are fixedly connected to the same U-shaped vertical plate 32. The horizontal part of the U-shaped vertical plate 32 is symmetrically fixed with two electric push rods 33. The lower moving ends of the two electric push rods 33 are fixedly connected to the same fixed plate 34. The surface of the fixed plate 34 is symmetrically provided with a plurality of sockets, and the movable sockets in the corresponding sockets are provided with pressurizing rods 35. The lower ends of the plurality of pressurizing rods 35 are fixedly connected to the same A pressure block 36 and the upper ends of multiple pressure rods 35 are fixedly connected to the same pressure plate 37, the lower end of the pressure plate 37 and the upper end of the fixed plate 34 are fixedly connected to multiple push springs 38 sleeved on the outside of the pressure rods 35, the upper end of the fixed plate 34 is fixedly connected to a cover shell 39 sleeved on the outside of the pressure plate 37, the upper end of the pressure plate 37 is fixedly connected to a force-bearing permanent magnet plate 310, and a pressure electromagnetic plate 311 is fixedly installed on the top of the inner wall of the cover shell 39, which can quickly discharge moisture in the crucible embryo, thereby effectively improving the density of the crucible, and improving the structural strength of the crucible, so that the produced quartz crucible can better meet the production needs of single crystal silicon drawing.

[0039] The displacement calculation mechanism 4 is fixedly installed between the base 1 and the supporting mechanism 2. The displacement calculation mechanism 4 includes a plurality of guide slide bars 41 symmetrically fixedly connected to the upper end of the base 1 and the lower end of the hollow supporting seat 22. The plurality of guide slide bars 41 are symmetrically arranged in two rows. The same row of plurality of guide slide bars 41 are externally slidably sleeved with the same sliding seat 42. The upper end of the sliding seat 42 and the lower end of the hollow supporting seat 22 are fixedly connected with a plurality of pull-up springs 43 sleeved on the outside of the guide slide bars 41. A same water receiving shell 44 is fixedly connected between the two sliding seats 42. A water outlet pipe 45 is fixedly connected to the center of the lower end of the water receiving shell 44. An electromagnetic valve is installed on the water outlet pipe 45. A water storage shell 46 arranged at the lower end of the water receiving shell 44 is fixedly installed on the upper end of the base 1. The drainage degree can be calculated and fed back at intervals, so that the subsequent adjustment of the pressure applied to the crucible embryo body is more accurate and applicable.

[0040] The drainage rate feedback control mechanism 5 is fixedly installed on the upper end of the base 1 and is transmission-connected with the drainage volume calculation mechanism 4. The drainage rate feedback control mechanism 5 includes a control shell 51 fixedly installed on the upper end of the base 1. The side of the control shell 51 close to the water receiving shell 44 is opened as an open structure. The inner wall of the control shell 51 is fixedly connected to a plurality of limit slide bars 52 arranged side by side in front and back. The plurality of limit slide bars 52 are externally slidably sleeved with the same lifting seat 53. One end of the lifting seat 53 is fixedly connected to the outer wall of the sliding seat 42. The inner wall of the control shell 51 is fixedly provided with a vertically arranged feedback resistor rod 5 4. A sleeve hole is provided on the surface of the lifting seat 53 and sleeved outside the feedback resistor rod 54. A feedback conductive contact piece 55 which is in electrical contact with the feedback resistor rod 54 is fixedly connected to the inner wall of the corresponding sleeve hole. A feedback switch 56 is fixedly installed on the upper side of the inner wall of the regulating shell 51. A pressing round head 57 which is located on the same vertical line as the feedback switch 56 is fixedly connected to one end of the lifting seat 53. The drainage pressure can be automatically regulated based on the drainage rate. On the premise of ensuring stable drainage, the problem of damage to the crucible caused by excessive pressure can be avoided, thereby improving the production quality of the crucible.

[0041] The drainage timing trigger mechanism 6 is fixedly mounted on the supporting mechanism 2 and is used to control the interval starting action of the drainage calculation mechanism 4. The drainage timing trigger mechanism 6 includes a timing round shell 61 fixedly mounted on the bracket 21. A rotating shaft 62 is rotatably connected to the center of the inner wall of the timing round shell 61. A reduction motor 63 for driving the rotating shaft 62 to rotate is fixedly mounted on the outer wall of the timing round shell 61. A trigger switch 64 is fixedly mounted on one side of the inner wall of the timing round shell 61. An arc-shaped protrusion 65 corresponding to the position of the trigger switch 64 is fixedly connected to the shaft wall of the rotating shaft 62.

[0042] The pressure regulating mechanism 7 is fixedly installed outside the pressurized drainage mechanism 3, and is used for automatically regulating the pressure of the pressurized drainage mechanism 3. The pressure regulating mechanism 7 includes an adjusting shell 71 fixedly installed outside the U-shaped vertical plate 32. The inner wall of the adjusting shell 71 is rotatably connected with a vertically arranged adjusting screw 72. An adjusting motor 73 for driving the adjusting screw 72 to rotate is fixedly installed on the upper end of the adjusting shell 71. An adjusting block 74 is threadedly sleeved on the rod wall of the adjusting screw 72. An adjusting resistor rod 75 is fixedly installed on one side of the inner wall of the adjusting shell 71. One end of the adjusting block 74 is fixedly connected with an adjusting conductive contact piece 76 that is in electrical contact with the adjusting resistor rod 75, so that the adjustment of the pressure on the crucible embryo body is more precise and controllable, and has better applicability.

[0043] The deformation size monitoring and display mechanism 8 is fixedly mounted on the pressurized drainage mechanism 3, and is used to monitor and display the deformation degree of the crucible during pressurization. The deformation size monitoring and display mechanism 8 includes a transmission shell 81 fixedly mounted on the upper end of the cover shell 39, and a laterally arranged transmission screw 82 is rotatably connected in the transmission shell 81. The rod wall of the transmission screw 82 is threadedly sleeved with a transmission seat 83, and a pointer 84 is fixedly connected to the upper end of the transmission seat 83. The upper end of the pointer 84 passes through the upper end of the transmission shell 81 through a strip opening opened at the upper end of the transmission shell 81. A deformation scale plate 85 arranged at the rear side of the pointer 84 is also fixedly mounted on the upper end of the transmission shell 81. A plurality of sockets are opened at the rear end of the transmission shell 81, and compensation rods 86 are movably sleeved in the corresponding sockets. One end of the plurality of compensation rods 86 located in the transmission shell 81 is fixedly connected to the same warning switch 87, and a plurality of compensation springs 88 sleeved outside the compensation rods 86 are fixedly connected between the warning switch 87 and the transmission shell 81. A warning device 89 electrically connected to the warning switch 87 is fixedly installed at the lower end of the transmission shell 81, and a transmission rack 810 is fixedly connected to one side of the upper end of the pressure plate 37. The upper end of the transmission rack 810 passes through the upper end of the cover shell 39, and a speed increasing gear box 811 located between the transmission rack 810 and the transmission shell 81 is fixedly installed at the upper end of the cover shell 39. The input end of the speed increasing gear box 811 is fixedly connected to a transmission gear 812 meshing with the transmission rack 810, and the output end of the speed increasing gear box 811 is fixedly connected to one end of the transmission screw 82, so that the degree of pressurized deformation of the final crucible embryo can be monitored, and accurate information can be fed back to the technicians, so that the technicians can adjust the initial ratio of the crucible to ensure the thickness quality of the final crucible, avoid the problem that the thickness of the crucible embryo changes too much after pressurized drainage, which will affect the quality of use, and promptly remind the staff to scrap the crucible embryo after the deformation degree exceeds the threshold.

[0044] A PLC controller is also fixedly installed on the upper end of the base 1, and the PLC controller is electrically connected to the supporting mechanism 2, the pressurized drainage mechanism 3, the drainage volume calculation mechanism 4, the drainage rate feedback control mechanism 5, the drainage timing trigger mechanism 6, the pressure adjustment mechanism 7 and the deformation size monitoring and display mechanism 8 respectively.

[0045] The operating principle of the present invention is described as follows: first, the crucible embryo is placed in the hollow supporting seat 22, and then the electric slide rail 31 is controlled by the PLC controller to drive the U-shaped vertical plate 32 to move, so that the pressure block 36 moves to the upper end of the hollow supporting seat 22, and the PLC controller controls the electric push rod 33 to push the pressure block 36 down to the processing position, and the PLC controller controls the power supply device to supply power to the pressure electromagnetic plate 311. The pressure electromagnetic plate 311 is energized to generate the same magnetism as the force-bearing permanent magnet plate 310, thereby exerting downward pressure on the pressure plate 37. The pressure plate 37 cooperates with the pressure rod 35 to push the pressure block 36 to pressurize the crucible embryo, and cooperates with the hollow support seat 22 to realize double-sided pressure on the crucible embryo, thereby squeezing out the residual water in the crucible embryo. The squeezed water flows into the hollow support seat 22 through a plurality of water seepage micropores 23 opened on the inner side of the hollow support seat 22, and is discharged into the water receiving shell 44 through the drain pipe 24 for storage. Under the action of the dead weight of the water, the water receiving shell 44 overcomes the elastic force of the pull-up spring 43 and moves downward through the sliding connection of the sliding seat 42 and the guide slide rod 41;

[0046] During the process of pressurized drainage, the PLC controller synchronously controls the action of the reduction motor 63, and the reduction motor 63 drives the rotating shaft 62 to drive the arc-shaped protrusion 65 to move slowly in the timing circular shell 61 until the arc-shaped protrusion 65 presses on the trigger switch 64. The time of this process is controlled to be 5 minutes. At this time, the PLC controller controls the solenoid valve on the drainage pipe 24 to close. The more water received in the water receiving shell 44, the greater the dead weight of the water receiving shell 44, and thus the greater the distance that the sliding seat 42 slides up and down on the guide slide bar 41, and thus the greater the distance that the sliding seat 42 drives the lifting seat 53 to slide down along the limit slide bar 52, and thus the greater the distance that the feedback conductive contact piece 55 slides on the feedback resistor rod 54, and the smaller the access resistance value of the feedback resistor rod 54;

[0047] First, when water flows into the water receiving shell 44, indicating that there is still water in the crucible embryo, the relative downward movement of the water receiving shell 44 will cause the pressing round head 57 to press on the feedback switch 56. At this time, the PLC controller controls the adjusting motor 73 to work for 5 seconds, and the adjusting motor 73 drives the adjusting screw 72 to rotate. Through the threaded sleeve effect of the adjusting screw 72 and the adjusting block 74, the adjusting conductive contact 76 slides on the adjusting resistor rod 75, thereby making the access resistance of the adjusting resistor rod 75 gradually decrease. The adjusting conductive contact 76 and the adjusting resistor rod 75 are connected in series to the power supply circuit of the pressurizing electromagnetic plate 311. As the access resistance of the adjusting resistor rod 75 decreases, the pressing force of the pressurizing electromagnetic plate 311 gradually increases, so that the pressurizing block 36 forms a greater pressurizing and drainage force on the crucible embryo.

[0048] The feedback conductive contact piece 55 and the feedback resistor rod 54 are connected in series to the power supply circuit of the regulating motor 73. When the water in the water receiving shell 44 is more in the previous stage, it means that the water content in the crucible embryo is still relatively large, and a greater pressure is needed to drain the water. At this time, since the access resistance of the feedback resistor rod 54 is smaller, the speed of the regulating motor 73 is faster. Within the fixed working time of 5s, the regulating motor 73 can drive the regulating block 74 to drive the regulating conductive contact piece 76 to slide a greater distance on the regulating resistor rod 75, so that the pressure of the pressure block 36 in the next stage is increased. After the pressure is adjusted, After completion, the PLC controller controls the solenoid valve on the water outlet pipe 45 at the lower end of the water receiving shell 44 to open, so that the water stored in the previous stage of the water receiving shell 44 flows into the water storage shell 46 for storage. After the water is completely discharged, the solenoid valve on the water outlet pipe 45 is closed, and the solenoid valve on the drain pipe 24 is opened to continue the calculation work of the next stage. The pressure adjustment speed of the crucible embryo body can be automatically regulated based on the drainage speed to improve the quality of pressurized drainage until there is no water in the crucible embryo body. At this time, there is no water in the water receiving shell 44, so that the pressing round head 57 can no longer act on the feedback switch 56, and the drainage work of the crucible embryo body is completed at this time;

[0049] In the process of draining water, when the pressure exerted by the pressure block 36 causes the crucible embryo to deform, the pressure block 36 will also move downward, thereby driving the transmission rack 810 to move downward, and the meshing action of the transmission rack 810 and the transmission gear 812 causes the input end of the speed-increasing gear box 811 to rotate, thereby driving the output end of the speed-increasing gear box 811 to rotate more circles, thereby driving the transmission screw 82 to rotate, and the threaded sleeve action of the transmission screw 82 and the transmission seat 83 causes the transmission seat 83 to move relatively in the transmission housing 81, thereby driving the pointer 811 to rotate. 4 moves relative to the deformation scale plate 85. When the deformation of the crucible embryo is larger, the driving seat 83 drives the pointer 84 to move a larger distance, so that the pointer 84 indicates a position further back than the deformation scale plate 85, which allows the technician to intuitively judge the magnitude of the deformation of the current crucible embryo. When the deformation of the crucible embryo exceeds the threshold, the distance moved by the driving seat 83 can press the warning switch 87, thereby causing the alarm 89 to sound, reminding the staff that the quality of the current crucible embryo cannot meet the subsequent use requirements and is then discarded.

[0050] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A manufacturing device for a quartz crucible capable of pulling a plurality of single crystal silicon, comprising a base (1), characterized in that: Also includes: A supporting mechanism (2) fixedly mounted on the base (1); A pressurized drainage mechanism (3) is fixedly mounted on the supporting mechanism (2) and is used to provide a pressurizing force; A displacement calculation mechanism (4) is fixedly mounted between the base (1) and the supporting mechanism (2); A drainage rate feedback control mechanism (5) is fixedly mounted on the upper end of the base (1) and is drivingly connected to the drainage volume calculation mechanism (4); A drainage timing trigger mechanism (6) is fixedly mounted on the supporting mechanism (2) and is used to control the interval starting action of the drainage volume calculation mechanism (4); A pressure regulating mechanism (7) is fixedly mounted outside the pressure drainage mechanism (3) and is used to automatically regulate the pressure of the pressure drainage mechanism (3); A deformation size monitoring and display mechanism (8) is fixedly mounted on the pressurized drainage mechanism (3) and is used to monitor and display the degree of deformation of the crucible during the pressurization process; The supporting mechanism (2) comprises a bracket (21) fixedly mounted on the upper end of the base (1); a hollow supporting seat (22) is fixedly mounted on the upper end of the bracket (21); a plurality of water seepage micropores (23) are evenly arranged on the inner side of the hollow supporting seat (22); a drainage pipe (24) is fixedly connected to the center of the lower end of the hollow supporting seat (22); and a solenoid valve is mounted on the drainage pipe (24); The pressurized drainage mechanism (3) comprises two electric slide rails (31) symmetrically fixedly mounted on the upper end of the bracket (21), the electric slide rails (31) extending longitudinally, the upper ends of the sliders in the two electric slide rails (31) fixedly connected to the same U-shaped vertical plate (32), the horizontal part of the U-shaped vertical plate (32) symmetrically fixedly sleeved with two electric push rods (33), the lower movable ends of the two electric push rods (33) fixedly connected to the same fixed plate (34), the surface of the fixed plate (34) symmetrically provided with a plurality of sockets, and the movable sleeves in the corresponding sockets are provided with pressurized rods (35), and the plurality of push rods (35) are fixedly sleeved with the corresponding push rods (35). The lower end of the pressure rod (35) is fixedly connected to the same pressure block (36), the upper ends of the plurality of pressure rods (35) are fixedly connected to the same pressure plate (37), the lower end of the pressure plate (37) and the upper end of the fixed plate (34) are fixedly connected to a plurality of push springs (38) sleeved outside the pressure rod (35), the upper end of the fixed plate (34) is fixedly connected to a cover shell (39) sleeved outside the pressure plate (37), the upper end of the pressure plate (37) is fixedly connected to a force-bearing permanent magnet plate (310), and a pressure electromagnetic plate (311) is fixedly mounted on the top of the inner wall of the cover shell (39); The displacement calculation mechanism (4) comprises a plurality of guide slide bars (41) symmetrically fixedly connected to the upper end of the base (1) and the lower end of the hollow support seat (22), the plurality of guide slide bars (41) being symmetrically arranged in two rows, the plurality of guide slide bars (41) in the same row being slidably sleeved with the same sliding seat (42) outside, the upper end of the sliding seat (42) and the lower end of the hollow support seat (22) being fixedly connected with a plurality of pull-up springs (43) sleeved outside the guide slide bars (41), the two sliding seats (42) being fixedly connected with the same water receiving shell (44), the center of the lower end of the water receiving shell (44) being fixedly connected with a water outlet pipe (45), the water outlet pipe (45) being provided with a solenoid valve, and the upper end of the base (1) being fixedly provided with a water storage shell (46) arranged at the lower end of the water receiving shell (44); The drainage rate feedback control mechanism (5) comprises a control shell (51) fixedly mounted on the upper end of the base (1); a side of the control shell (51) close to the water receiving shell (44) is provided with an opening structure; the inner wall of the control shell (51) is fixedly connected to a plurality of limit slide bars (52) arranged side by side in front and back; the plurality of limit slide bars (52) are externally slidably sleeved with a same lifting seat (53); one end of the lifting seat (53) is fixedly connected to the outer wall of the sliding seat (42); 1) is fixedly mounted on the inner wall of the control housing (51) with a vertically arranged feedback resistance rod (54), the surface of the lifting seat (53) is provided with a sleeve hole which is sleeved outside the feedback resistance rod (54), and the inner wall corresponding to the sleeve hole is fixedly connected with a feedback conductive contact piece (55) which is in electrical contact with the feedback resistance rod (54), a feedback switch (56) is fixedly mounted on the upper side of the inner wall of the control housing (51), and one end of the lifting seat (53) is fixedly connected with a pressing round head (57) which is located on the same vertical line as the feedback switch (56); The pressure regulating mechanism (7) comprises an regulating shell (71) fixedly mounted outside the U-shaped vertical plate (32); the inner wall of the regulating shell (71) is rotatably connected to a vertically arranged regulating screw (72); an regulating motor (73) for driving the regulating screw (72) to rotate is fixedly mounted on the upper end of the regulating shell (71); an regulating block (74) is threadedly sleeved on the rod wall of the regulating screw (72); an regulating resistor rod (75) is fixedly mounted on one side of the inner wall of the regulating shell (71); and one end of the regulating block (74) is fixedly connected to an regulating conductive contact piece (76) in electrical contact with the regulating resistor rod (75); The regulating conductive contact (76) and the regulating resistor rod (75) are connected in series to the power supply circuit of the pressurized electromagnetic plate (311), and the feedback conductive contact (55) and the feedback resistor rod (54) are connected in series to the power supply circuit of the regulating motor (73).

2. The manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon according to claim 1, characterized in that: The drainage timing trigger mechanism (6) comprises a timing round shell (61) fixedly mounted on a bracket (21); a rotating shaft (62) is rotatably connected to the center of the inner wall of the timing round shell (61); a reduction motor (63) for driving the rotating shaft (62) to rotate is fixedly mounted on the outer wall of the timing round shell (61); a trigger switch (64) is fixedly mounted on one side of the inner wall of the timing round shell (61); and an arc-shaped protrusion (65) corresponding to the position of the trigger switch (64) is fixedly connected to the shaft wall of the rotating shaft (62).

3. The manufacturing device of a quartz crucible capable of pulling multiple single crystal silicon according to claim 1, characterized in that: The deformation size monitoring and display mechanism (8) comprises a transmission housing (81) fixedly mounted on the upper end of the cover housing (39), a transmission screw (82) arranged transversely being rotatably connected in the transmission housing (81), a transmission seat (83) being threadedly sleeved on the rod wall of the transmission screw (82), a pointer (84) being fixedly connected to the upper end of the transmission seat (83), the upper end of the pointer (84) passing through the upper end of the transmission housing (81) through a strip-shaped opening provided at the upper end of the transmission housing (81), a deformation scale plate (85) arranged at the rear side of the pointer (84) being fixedly mounted on the upper end of the transmission housing (81), a plurality of plug holes being provided at the rear end of the transmission housing (81), compensation rods (86) being movably sleeved in the corresponding plug holes, and a plurality of compensation rods (86) having one end located in the transmission housing (81) being fixedly connected to the same warning opening. A plurality of compensation springs (88) sleeved on the outside of the compensation rod (86) are fixedly connected between the warning switch (87) and the transmission housing (81); a warning device (89) electrically connected to the warning switch (87) is fixedly mounted on the lower end of the transmission housing (81); a transmission rack (810) is fixedly connected to one side of the upper end of the pressure plate (37); the upper end of the transmission rack (810) passes through the upper end of the cover housing (39); a speed increasing gear box (811) located between the transmission rack (810) and the transmission housing (81) is fixedly mounted on the upper end of the cover housing (39); a transmission gear (812) meshing with the transmission rack (810) is fixedly connected to the input end of the speed increasing gear box (811); and the output end of the speed increasing gear box (811) is fixedly connected to one end of the transmission screw (82).

Images