Regenerated nickel-platinum alloy target material and preparation method thereof

Abstract

The invention provides a regenerated nickel-platinum alloy target material and a preparation method thereof. The preparation method comprises the following steps: (1) pre-treating a nickel-platinum alloy residual target; (2) the pretreated nickel-platinum alloy residual target is subjected to suspension smelting, and a nickel-platinum alloy cast ingot is obtained after cooling; and (3) sequentially carrying out plastic processing, homogenizing annealing, hot rolling and recrystallization annealing on the nickel-platinum alloy cast ingot to obtain the regenerated nickel-platinum alloy target material. According to the method, a physical method is adopted, the nickel-platinum alloy residual target is prepared into the high-purity target material meeting the sputtering use requirement again under the condition that the basic components of the material are not changed, the process is simple, the production efficiency is high, rapid turnover of the material is facilitated, a large amount of acid does not need to be used, and the method is convenient to popularize in actual production.

Description

Technical Field

[0001] The invention belongs to the technical field of target material recycling and regeneration, and relates to a recycled nickel-platinum alloy target material and a preparation method thereof. Background Art

[0002] Nickel-platinum alloy targets are widely used in thin film sputtering processes for contact layers below 65nm process. Nickel-platinum alloy targets contain precious metal platinum, and their cost is very high. However, the actual sputtering usage of this type of target is less than 50%, and the remaining residual targets have a very large recycling value. The commonly used recycling method is to separate platinum from nickel by chemical methods to finally obtain crude platinum, but this method has a complex process and low efficiency, and a large amount of hazardous chemicals such as acid are required in the process, which is not conducive to industrial production.

[0003] Therefore, there is an urgent need to provide a solution for recycling nickel-platinum alloy residual targets, which has a simple process, high efficiency, does not use a large amount of acid, and can be used for industrial production. Summary of the invention

[0004] In view of the shortcomings of the prior art, the purpose of the present invention is to provide a regenerated nickel-platinum alloy target material and a preparation method thereof. The present invention adopts a physical method to re-prepare the nickel-platinum alloy residual target into a high-purity target material that meets the requirements of sputtering without changing the basic composition of the material. The process is simple, the production efficiency is high, it is conducive to the rapid turnover of materials, and no large amount of acid is required, which is convenient for promotion in actual production.

[0005] To achieve this object, the present invention adopts the following technical solutions:

[0006] In a first aspect, the present invention provides a method for preparing a recycled nickel-platinum alloy target, the preparation method comprising:

[0007] (1) Pre-treating the nickel-platinum alloy residual target;

[0008] (2) performing suspension melting on the pretreated nickel-platinum alloy residual target, and obtaining a nickel-platinum alloy ingot after cooling;

[0009] (3) The nickel-platinum alloy ingot is subjected to plastic working, homogenization annealing, hot rolling and recrystallization annealing in sequence to obtain the regenerated nickel-platinum alloy target.

[0010] The present invention provides a preparation method of a regenerated nickel-platinum alloy target material, wherein the nickel-platinum alloy residual target after pretreatment is remelted and purified by suspension smelting technology, and the suspension smelting metal is not polluted by the crucible and has high purity; then the obtained nickel-platinum alloy ingot is subjected to plastic processing, homogenization annealing, hot rolling and recrystallization annealing in sequence, wherein the homogenization annealing step can ensure the uniformity of the alloy composition, the hot rolling step can reduce the material deformation resistance, close the internal fine defects, break the coarse grains of the ingot, and make the internal structure uniform; the recrystallization annealing step causes the deformed structure after hot rolling to recrystallize and form a fine and uniform equiaxed crystal structure. Therefore, by adopting the preparation method of the present invention, a regenerated nickel-platinum alloy target material with uniform composition and structure, no internal defects, high purity and high magnetic permeability can be obtained. The present invention adopts a physical method to re-prepare the nickel-platinum alloy residual target into a high-purity target material that meets the requirements of sputtering without changing the basic composition of the material. Moreover, the method of the present invention has a simple process, high production efficiency, is conducive to the rapid turnover of materials, and does not require the use of a large amount of acid, which is convenient for promotion in actual production.

[0011] Preferably, the pretreatment specifically comprises the following steps:

[0012] (a) removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target to obtain a recovered nickel-platinum alloy target blank;

[0013] (b) The recovered nickel-platinum alloy target blank is divided, cleaned and dried in sequence.

[0014] In the present invention, the method for removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target is a physical method, including but not limited to turning, milling or grinding.

[0015] Preferably, in step (b), the recycled nickel-platinum alloy target block is obtained after the segmentation, and the length, width and thickness of the recycled nickel-platinum alloy target block are independently 40-80 mm, for example, it can be 40 mm, 45 mm, 50 mm, 55 mm, 60 mm, 65 mm, 70 mm or 75 mm, etc., but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0016] In the present invention, the term "independently" means that the length, width and thickness of the recovered nickel-platinum alloy target block are controlled to be 40-80 mm, 40-80 mm and 40-80 mm, and the specific values ​​of the three do not interfere with each other.

[0017] Preferably, the cleaning comprises acid cleaning and water cleaning performed sequentially.

[0018] In the present invention, stains on the surface of the recovered nickel-platinum alloy target blank are completely removed by pickling and water washing.

[0019] Preferably, the acid used for pickling includes any one of hydrochloric acid, nitric acid, sulfuric acid or hydrofluoric acid, or a combination of at least two thereof.

[0020] Preferably, the drying temperature is 100-150°C, for example, it can be 100°C, 110°C, 120°C, 130°C, 140°C or 150°C, and the drying time is 2-3h, for example, it can be 2h, 2.2h, 2.5h, 2.8h or 3h, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0021] Preferably, during the suspension smelting process in step (2), the absolute vacuum degree is less than 5×10 -2 Pa, for example, can be 4×10 -2 Pa, 3×10 -2 Pa, 1×10 -2 Pa or 5×10 -3 Pa, etc., but are not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0022] Preferably, the suspension smelting in step (2) comprises a melting stage and a refining stage performed sequentially.

[0023] In the present invention, the nickel-platinum alloy residual target is completely melted after pretreatment in the melting stage, and then enters the refining stage for refining, so that impurities and gases in the molten metal can fully float out or volatilize, so that the material is fully alloyed.

[0024] Preferably, the refining stage is a constant temperature process, the temperature of the constant temperature process is 1450-1500°C, for example, it can be 1450°C, 1460°C, 1470°C, 1480°C, 1490°C or 1500°C, and the time of the constant temperature process is 15-30min, for example, it can be 15min, 18min, 20min, 25min, 28min or 30min, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0025] In the present invention, during the refining stage, if the temperature of the constant temperature process is too low, the viscosity of the molten metal will be high, impurities will not easily float out, and the composition will be uneven; if the temperature of the constant temperature process is too high, the energy consumption will be large, and the molten metal will corrode the crucible.

[0026] Preferably, during the cooling process in step (2), the absolute vacuum degree is less than 5×10 -2 Pa, for example, can be 4×10 -2 Pa, 3×10 -2 Pa, 1×10 -2 Pa or 5×10 -3Pa, etc., but are not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0027] Preferably, the plastic processing in step (3) includes the following steps: peeling the nickel-platinum alloy ingot and removing the end portion of the peeled nickel-platinum alloy ingot.

[0028] In the present invention, the end portion of the nickel-platinum alloy ingot is enriched with impurities, so the end portion of the nickel-platinum alloy ingot after peeling needs to be removed.

[0029] Preferably, the temperature of the homogenization annealing is 700-900°C, for example, 700°C, 750°C, 800°C, 850°C or 900°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0030] In the present invention, the nickel-platinum alloy ingot after plastic processing is homogenized and annealed at a temperature of 700-900°C to ensure the uniformity of the alloy composition. If the homogenization annealing temperature is too low, the required holding time will be increased; if the homogenization annealing temperature is too low, the alloy elements cannot diffuse; if the homogenization annealing temperature is too high, the energy consumption is high, oxidation is serious, and the grains are coarse.

[0031] Preferably, the homogenization annealing time is 5-10 h, for example, 5 h, 6 h, 7 h, 8 h, 9 h or 10 h, etc., but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0032] Preferably, the hot rolling temperature is 700-900°C, for example, 700°C, 750°C, 800°C, 850°C or 900°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0033] Preferably, the temperature of the hot rolling is the same as the temperature of the homogenization annealing.

[0034] In the present invention, the hot rolling temperature is the same as the homogenization annealing temperature, that is, the temperature is not lowered after the homogenization annealing, but hot rolling is performed directly, which can reduce energy consumption, and the direct rolling performance after the homogenization annealing is better.

[0035] Preferably, the deformation of each pass of the hot rolling is 5-10%, for example, it can be 5%, 6%, 7%, 8%, 9% or 10%, and the total deformation is 70-80%, for example, it can be 70%, 72%, 75%, 78% or 80%, but it is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0036] Preferably, the temperature of the recrystallization annealing is 1000-1200°C, for example, it can be 1000°C, 1020°C, 1050°C, 1080°C, 1100°C, 1150°C, 1150°C, 1180°C or 1200°C, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0037] Preferably, the recrystallization annealing time is 2-5 h, for example, it can be 2 h, 2.2 h, 2.5 h, 3 h, 3.5 h, 4 h, 4.5 h or 5 h, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0038] As a preferred technical solution of the present invention, the preparation method specifically comprises the following steps:

[0039] (I) removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target to obtain a recovered nickel-platinum alloy target blank, then dividing the recovered nickel-platinum alloy target blank to obtain a recovered nickel-platinum alloy target block having a length, a width and a thickness of 40-80 mm, respectively, and then successively acid-washing and water-washing the recovered nickel-platinum alloy target block, and drying at 100-150° C. for 2-3 hours to obtain a pretreated nickel-platinum alloy residual target;

[0040] (II) When the absolute vacuum is less than 5×10 -2 Pa, performing suspension melting on the pretreated nickel-platinum alloy residual target, and then cooling the target to obtain a nickel-platinum alloy ingot;

[0041] The suspension smelting includes a melting stage and a refining stage which are carried out in sequence. The refining stage is a constant temperature process. The temperature of the constant temperature process is 1450°C-1500°C and the time of the constant temperature process is 15-30 minutes. The absolute vacuum degree during the cooling process is less than 5×10 -2 Pa;

[0042] (III) peeling the nickel-platinum alloy ingot and removing the end portion of the peeled nickel-platinum alloy ingot, then performing homogenization annealing at 700-900°C for 5-10 hours, and directly performing hot rolling without cooling after the homogenization annealing, and then performing recrystallization annealing at 1000-1200°C for 2-5 hours after the hot rolling, to obtain the regenerated nickel-platinum alloy target.

[0043] In a second aspect, the present invention provides a regenerated nickel-platinum alloy target material, wherein the regenerated nickel-platinum alloy target material is prepared by the preparation method described in the first aspect.

[0044] Preferably, the purity of the recycled nickel-platinum alloy target is greater than 99.99%.

[0045] Preferably, the magnetic permeability of the recycled nickel-platinum alloy target is greater than 30%.

[0046] The numerical range described in the present invention not only includes the point values ​​listed above, but also includes any point values ​​between the above numerical ranges that are not listed. Due to space limitations and for the sake of simplicity, the present invention no longer exhaustively lists the specific point values ​​included in the range.

[0047] Compared with the prior art, the present invention has the following beneficial effects:

[0048] The present invention provides a preparation method of a regenerated nickel-platinum alloy target material, wherein the nickel-platinum alloy residual target after pretreatment is remelted and purified by suspension smelting technology, and the suspension smelting metal is not polluted by the crucible and has high purity; then the obtained nickel-platinum alloy ingot is subjected to plastic processing, homogenization annealing, hot rolling and recrystallization annealing in sequence, wherein the homogenization annealing step can ensure the uniformity of the alloy composition, the hot rolling step can reduce the material deformation resistance, close the internal fine defects, break the coarse grains of the ingot, and make the internal structure uniform; the recrystallization annealing step causes the deformed structure after hot rolling to recrystallize and form a fine and uniform equiaxed crystal structure. Therefore, by adopting the preparation method of the present invention, a regenerated nickel-platinum alloy target material with uniform composition and structure, no internal defects, high purity and high magnetic permeability can be obtained. The present invention adopts a physical method to re-prepare the nickel-platinum alloy residual target into a high-purity target material that meets the requirements of sputtering without changing the basic composition of the material. Moreover, the method of the present invention has a simple process, high production efficiency, is conducive to the rapid turnover of materials, and does not require the use of a large amount of acid, which is convenient for promotion in actual production. DETAILED DESCRIPTION

[0049] The technical solution of the present invention is further illustrated below through specific implementation methods.

[0050] Example 1

[0051] This embodiment provides a method for preparing a regenerated nickel-platinum alloy target, the preparation method comprising the following steps:

[0052] (1) removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target by a turning method to obtain a recovered nickel-platinum alloy target blank, and then dividing the recovered nickel-platinum alloy target blank to obtain a recovered nickel-platinum alloy target block with a length of 50 mm, a width of 50 mm and a thickness of 40 mm, and then pickling the recovered nickel-platinum alloy target block with hydrochloric acid, then washing with water, and drying at 120° C. for 2.5 hours to obtain a pretreated nickel-platinum alloy residual target;

[0053] (2) The pretreated nickel-platinum alloy residual target was placed in a water-cooled copper crucible for suspension smelting at a vacuum of 4×10 -2Pa, the temperature was raised to 1450℃, and the pretreated nickel-platinum alloy residual target was completely melted. Then, the refining was carried out at 1450℃ for 25min. After the refining was completed, the heating was stopped, and the molten metal was subsequently cooled. During the cooling process, the temperature was kept at 4×10 -2 Pa vacuum degree, and obtain nickel-platinum alloy ingot;

[0054] (3) The nickel-platinum alloy ingot is peeled, and the end portion of the peeled nickel-platinum alloy ingot is removed, and then homogenization annealing is performed at 750°C for 8 hours. After the homogenization annealing is completed, the temperature is not lowered, and hot rolling is directly performed at 750°C, and the deformation amount of each rolling pass is 8%, and the total deformation amount is 75%; after the hot rolling is completed, recrystallization annealing is performed at 1050°C for 4 hours to obtain a regenerated nickel-platinum alloy target.

[0055] Example 2

[0056] This embodiment provides a method for preparing a regenerated nickel-platinum alloy target, the preparation method comprising the following steps:

[0057] (1) removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target by a milling method to obtain a recovered nickel-platinum alloy target blank, and then dividing the recovered nickel-platinum alloy target blank to obtain a recovered nickel-platinum alloy target block with a length of 70 mm, a width of 60 mm and a thickness of 50 mm, and then pickling the recovered nickel-platinum alloy target block with nitric acid, and then washing it with water, and drying it at 120° C. for 2.5 hours to obtain a pretreated nickel-platinum alloy residual target;

[0058] (2) The pretreated nickel-platinum alloy residual target was placed in a water-cooled copper crucible for suspension smelting at a vacuum of 3×10 -2 Pa, the temperature was raised to 1500℃, and the pretreated nickel-platinum alloy residual target was completely melted. Then, the refining was carried out at 1500℃ for 15min. After the refining was completed, the heating was stopped, and the molten metal was subsequently cooled. During the cooling process, 3×10 -2 Pa vacuum degree, and obtain nickel-platinum alloy ingot;

[0059] (3) The nickel-platinum alloy ingot is peeled, and the end portion of the peeled nickel-platinum alloy ingot is removed, and then homogenization annealing is performed at 850°C for 6 hours. After the homogenization annealing is completed, the temperature is not lowered, and hot rolling is directly performed. The deformation amount of each rolling pass is 8%, and the total deformation amount is 75%; after the hot rolling is completed, recrystallization annealing is performed at 1150°C for 3 hours to obtain a regenerated nickel-platinum alloy target.

[0060] Example 3

[0061] The difference between this embodiment and embodiment 1 is that the refining temperature in step (2) is adjusted to 1400°C.

[0062] The remaining parameters remain the same as those in Example 1.

[0063] Example 4

[0064] The difference between this embodiment and embodiment 1 is that the refining temperature in step (2) is adjusted to 1550°C.

[0065] The remaining parameters remain the same as those in Example 1.

[0066] Example 5

[0067] The difference between this embodiment and embodiment 1 is that the temperature of the homogenization annealing in step (3) is adjusted to 650°C.

[0068] The remaining parameters remain the same as those in Example 1.

[0069] Example 6

[0070] The difference between this embodiment and embodiment 1 is that in step (3), after homogenization annealing, the temperature is lowered to room temperature (25° C.) and then rolling is performed.

[0071] The remaining parameters remain the same as those in Example 1.

[0072] Comparing Example 1 and Example 6, it can be seen that if the temperature is lowered to room temperature after homogenization annealing and then rolling is performed, the rolling force will increase and the cracking tendency will increase.

[0073] Comparative Example 1

[0074] The difference between this comparative example and Example 1 is that the homogenization annealing step is omitted in step (3), and hot rolling is directly carried out at 750°C.

[0075] The remaining parameters remain the same as those in Example 1.

[0076] Comparative Example 2

[0077] The difference between this comparative example and Example 1 is that the suspension melting is replaced by electron beam melting.

[0078] The remaining parameters remain the same as those in Example 1.

[0079] By comparing Example 1 and Comparative Example 2, it can be seen that if the electron beam melting step is used instead of the suspension melting step, the electron beam may cause the material to volatilize, resulting in changes in the alloy ratio and a relatively low material yield.

[0080] Performance Testing

[0081] The following tests were performed on the recycled nickel-platinum alloy targets provided in Examples 1-5 and Comparative Example 1:

[0082] (1) Purity test:

[0083] The purity was checked by glow discharge mass spectrometry (GDMS).

[0084] (2) Magnetic permeability (PTF) test:

[0085] The magnetic permeability is tested according to the industry standard YS / T 1124-2016 "Magnetic Sputtering Target Permeability Test Method". The magnetic permeability is the ratio of the DC magnetic field from one side of the magnetic target to the other side.

[0086] (3) Component uniformity test:

[0087] X-ray fluorescence spectrometry (XRF) is used to detect the components of 7 points at equal intervals in the diameter direction of the target blank. If the difference between the maximum and minimum values ​​of the main component Pt content at the 7 points does not exceed 3%, the uniformity is considered to be qualified, otherwise it is considered to be unqualified.

[0088] The test results are shown in Table 1.

[0089] Table 1

[0090] purity Magnetic Permeability Composition uniformity Example 1 99.998％ 35％ qualified Example 2 99.999％ 36％ qualified Example 3 99.96％ 38％ Failure Example 4 99.91％ 33％ qualified Example 5 99.996％ 35％ Failure Comparative Example 1 99.993％ 34％ Failure

[0091] analyze:

[0092] It can be seen from the results of Example 1 and Example 2 in Table 1 that the regenerated nickel-platinum alloy target material prepared by the preparation method of the present invention has high purity and high magnetic permeability, uniform composition, and meets the requirements for sputtering use.

[0093] It can be seen from the results of Example 1 and Examples 3-4 that during the suspension smelting process, if the refining temperature is too low, the viscosity of the molten metal will be high, impurities will not be easy to float out, and the composition will be uneven; if the refining temperature is too high, the energy consumption will be large, the molten metal will corrode the crucible, and impurities on the crucible will be introduced, thereby reducing the purity.

[0094] It can be seen from the results of Example 1 and Example 5 that if the homogenization annealing temperature is too low, the alloy elements cannot diffuse, resulting in uneven composition of the regenerated nickel-platinum alloy target.

[0095] It can be seen from the results of Example 1 and Comparative Example 1 that if the homogenization annealing step is omitted, the composition of the regenerated nickel-platinum alloy target material will be uneven.

[0096] The above description is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention are within the protection scope and disclosure scope of the present invention.

Claims

1. A method for preparing a recycled nickel-platinum alloy target, characterized in that: The preparation method comprises: (1) Pre-treating the nickel-platinum alloy residual target; (2) performing suspension melting on the pretreated nickel-platinum alloy residual target, and obtaining a nickel-platinum alloy ingot after cooling; (3) The nickel-platinum alloy ingot is subjected to plastic working, homogenization annealing, hot rolling and recrystallization annealing in sequence to obtain the regenerated nickel-platinum alloy target.

2. The preparation method according to claim 1, characterized in that: The pretreatment specifically comprises the following steps: (a) removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target to obtain a recovered nickel-platinum alloy target blank; (b) The recovered nickel-platinum alloy target blank is divided, cleaned and dried in sequence.

3. The preparation method according to claim 2, characterized in that: In step (b), after the segmentation, a recovered nickel-platinum alloy target block is obtained, and the length, width and thickness of the recovered nickel-platinum alloy target block are independently 40-80 mm; Preferably, the cleaning comprises acid washing and water washing performed sequentially; Preferably, the acid used for pickling includes any one of hydrochloric acid, nitric acid, sulfuric acid or hydrofluoric acid, or a combination of at least two thereof; Preferably, the drying temperature is 100-150° C., and the drying time is 2-3 hours.

4. The preparation method according to any one of claims 1 to 3, characterized in that During the suspension smelting process in step (2), the absolute vacuum degree is less than 5×10 -2 Pa; Preferably, the suspension smelting in step (2) comprises a melting stage and a refining stage performed sequentially; Preferably, the refining stage is a constant temperature process, the temperature of the constant temperature process is 1450-1500°C, and the time of the constant temperature process is 15-30 minutes; Preferably, during the cooling process in step (2), the absolute vacuum degree is less than 5×10 -2 Pa.

5. The preparation method according to any one of claims 1 to 4, characterized in that: The plastic processing in step (3) comprises the following steps: peeling the nickel-platinum alloy ingot and removing the end portion of the peeled nickel-platinum alloy ingot; Preferably, the temperature of the homogenization annealing is 700-900°C; Preferably, the homogenization annealing time is 5-10 hours.

6. The preparation method according to any one of claims 1 to 5, characterized in that: The hot rolling temperature is 700-900°C; Preferably, the temperature of the hot rolling is the same as the temperature of the homogenization annealing; Preferably, the deformation amount of each hot rolling pass is 5-10%, and the total deformation amount is 70-80%.

7. The preparation method according to any one of claims 1 to 6, characterized in that: The temperature of the recrystallization annealing is 1000-1200°C; Preferably, the recrystallization annealing time is 2-5h.

8. The preparation method according to any one of claims 1 to 7, characterized in that: The preparation method specifically comprises the following steps: (I) removing the back plate and the surface sputtering layer of the nickel-platinum alloy residual target to obtain a recovered nickel-platinum alloy target blank, then dividing the recovered nickel-platinum alloy target blank to obtain a recovered nickel-platinum alloy target block having a length, a width and a thickness of 40-80 mm, respectively, and then successively acid-washing and water-washing the recovered nickel-platinum alloy target block, and drying at 100-150° C. for 2-3 hours to obtain a pretreated nickel-platinum alloy residual target; (II) When the absolute vacuum is less than 5×10 -2 Pa, performing suspension melting on the pretreated nickel-platinum alloy residual target, and then cooling the target to obtain a nickel-platinum alloy ingot; The suspension smelting includes a melting stage and a refining stage which are carried out in sequence. The refining stage is a constant temperature process. The temperature of the constant temperature process is 1450°C-1500°C and the time of the constant temperature process is 15-30 minutes. The absolute vacuum degree during the cooling process is less than 5×10 -2 Pa; (III) peeling the nickel-platinum alloy ingot and removing the end portion of the peeled nickel-platinum alloy ingot, then performing homogenization annealing at 700-900°C for 5-10 hours, and directly performing hot rolling without cooling after the homogenization annealing, and then performing recrystallization annealing at 1000-1200°C for 2-5 hours after the hot rolling, to obtain the regenerated nickel-platinum alloy target.

9. A recycled nickel-platinum alloy target, characterized in that: The recycled nickel-platinum alloy target is prepared by the preparation method described in any one of claims 1-8.

10. The recycled nickel-platinum alloy target according to claim 9, characterized in that: The purity of the recycled nickel-platinum alloy target material is greater than 99.99%; Preferably, the magnetic permeability of the recycled nickel-platinum alloy target is greater than 30%.