Air injection structure and etching machine

Abstract

The invention discloses an air injection structure which comprises an air injection head. The jet head is provided with a circumferential air channel, one end of the circumferential air channel is used for being connected with the air inlet pipe set, the other end of the circumferential air channel faces the cavity wall of the reaction cavity, and the circumferential air channel is arc-shaped. Compared with an air channel with a right-angle corner, the circumferential air channel of the air injection structure is arc-shaped, has the characteristics of small flow resistance, far air injection direction and large momentum, and is easier to change the etching uniformity by adjusting the air flow; furthermore, gas is sprayed in a spiral gas spraying mode, the gas is sprayed to the inner surface of the cavity in a non-vertical mode, and a non-vertical inclination angle exists between the direction of spraying the gas to the inner surface of the cavity and the tangential direction of the inner surface of the cavity, so that attachments on the surface of the cavity can be removed more easily, and loss of the surface of the cavity is reduced. The invention further discloses an etching machine applying the air injection structure.

Description

Technical Field

[0001] The invention relates to the technical field of etching machines, and in particular to an air jet structure and an etching machine. Background Art

[0002] Plasma etcher, also known as plasma plane etcher, plasma etcher, plasma surface treatment instrument, plasma cleaning system, etc., is used in the semiconductor industry. Inductively coupled plasma etching is the result of the combined action of chemical and physical processes. Its basic principle is that under vacuum and low pressure, the radio frequency generated by the ICP radio frequency power supply is output to the annular coupling coil, and a certain proportion of mixed etching gas is coupled to glow discharge to generate high-density plasma. Under the action of the RF radio frequency of the lower electrode, these plasmas bombard the surface of the substrate, and the chemical bonds of the semiconductor in the graphic area of ​​the substrate are broken, and volatile substances are generated with the etching gas, which are separated from the substrate in the form of gas and are extracted from the vacuum pipeline.

[0003] On etching equipment, it is necessary to spray air toward the wafer during the process. The jet component directly above the wafer generally has jet heads pointing downward and at a certain angle to spray toward different areas.

[0004] The existing jet head tilted at a certain angle has a straight corner in the air passage connected thereto. Since the straight corner is a dead angle, it is easy to generate eddy currents and lose kinetic energy of airflow, and also generate deposition. Summary of the invention

[0005] In view of this, the present invention provides an injection structure, which solves the technical problem of airway blind spots by setting a circumferential airway, and the circumferential airway is arc-shaped.

[0006] The present invention also provides an etcher comprising the above-mentioned air jet structure.

[0007] To achieve the above object, the present invention provides the following technical solutions:

[0008] An air jet structure includes: an air jet head;

[0009] The nozzle is provided with a circumferential air channel, one end of which is used to connect to the air inlet pipe group, and the other end is used to face the cavity wall of the reaction chamber, and the circumferential air channel is arc-shaped.

[0010] Preferably, the jet head comprises: a jet head body and a jet head covering sleeve, wherein the jet head covering sleeve covers the jet head body;

[0011] The circumferential air passage is formed between the spray head body and the spray head covering sleeve.

[0012] Preferably, a main air passage is formed on the outer peripheral wall of the spray head main body, and the main air passage and the inner peripheral wall of the spray head covering sleeve form the circumferential air passage.

[0013] Preferably, the main body air channel is a spiral air channel, which is arranged around the central axis of the jet head body.

[0014] Preferably, there are a plurality of main body air passages, and the spiral directions of the plurality of main body air passages are the same and are evenly distributed along the circumference of the nozzle body.

[0015] Preferably, a covering sleeve air channel is opened on the inner wall of the nozzle covering sleeve, and the main body air channel and the covering sleeve air channel form the circumferential air channel.

[0016] Preferably, the air passage of the covering sleeve is a cylindrical surface coaxial with the main body of the spray head.

[0017] Preferably, the air outlet end of the main airway is provided with an airway outlet;

[0018] The inner wall of the nozzle covering sleeve is provided with a covering sleeve air hole penetrating the inner and outer peripheral walls, the air inlet side of the covering sleeve air hole is connected to the airway outlet, and the air hole opening on the air outlet side of the covering sleeve air hole is connected to the reaction chamber.

[0019] Preferably, the air holes of the covering sleeve are straight pipes and are arranged along the tangent direction of the outer circle of the nozzle body.

[0020] Preferably, the airway outlet is arranged along the tangent direction of the outer circle of the spray head body.

[0021] Preferably, an airway inlet is provided on the air inlet side outer end surface of the spray head body, one end of the airway inlet is used to connect to the air inlet pipe group, and the other end is connected to the air inlet end of the main body airway.

[0022] Preferably, the air duct inlet is arranged along the radial direction of the jet head body and cooperates with the diffuser of the air intake pipe group.

[0023] Preferably, a first positioning port is provided on the outer peripheral wall of the spray head body, and a second positioning port which cooperates with the first positioning port in a circumferential limiting manner is provided on the inner peripheral wall of the spray head covering sleeve.

[0024] Preferably, the first positioning port is opened on the outer peripheral wall of the air inlet side end of the shower head body, and the second positioning port is opened on the inner peripheral wall of the air inlet side end of the shower head covering sleeve.

[0025] Preferably, the first positioning port is provided with an air inlet groove, the first positioning port is provided with an air inlet groove, one end of the air inlet groove is connected to the air inlet pipe group, and the other end of the air inlet groove is connected to the air inlet end of the circumferential airway.

[0026] Preferably, the diameter of the air inlet end of the circumferential air channel is larger than the diameter of the air outlet end.

[0027] Preferably, the jet head is further provided with an axial air passage; the air inlet end of the axial air passage is connected to the second air inlet pipe of the air inlet pipe group, and the air outlet end of the axial air passage is provided with a central jet hole group.

[0028] Preferably, a sealing ring installation groove is provided on the outer peripheral wall of the nozzle covering sleeve.

[0029] Preferably, it further comprises: a fixing block; the jet head can be mounted on the medium window through the fixing block.

[0030] An etching machine includes: the jet structure as mentioned above.

[0031] It can be seen from the above technical solutions that the jet structure provided by the present invention solves the problem of vortex generation, loss of airflow kinetic energy and deposition at the dead corners of the airway by setting a circumferential airway, and the circumferential airway is arc-shaped;

[0032] Compared with the air channel with right-angle corners, the circumferential air channel is arc-shaped, which has the characteristics of small flow resistance, long jet direction and large momentum, and it is easier to change the etching uniformity by adjusting the gas flow rate;

[0033] The circumferential gas channel can be set to have a large inlet and a small outlet, which further accelerates the flow and suppresses the plasma from flowing back to the jet head due to the stronger jet force;

[0034] The gas is sprayed in a spiral jet manner, and the direction of the gas spray is not perpendicular to the inner surface of the cavity. The direction of the gas sprayed to the inner surface of the cavity has a non-perpendicular inclination angle with the tangent direction of the inner surface of the cavity, which can make it easier to remove the attachments on the surface of the cavity and reduce the loss to the surface of the cavity.

[0035] The present invention also provides an etcher, which has corresponding beneficial effects due to the adoption of the above-mentioned jet structure. The details can be referred to the above description, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 A schematic diagram of the structure of the main body of an etcher in which the jetting structure provided by an embodiment of the present invention is applied;

[0038] Figure 2 An overall schematic diagram of the jet structure provided by an embodiment of the present invention;

[0039] Figure 3 A cross-sectional schematic diagram of an injection structure provided by an embodiment of the present invention;

[0040] Figure 4 It is a partial enlarged schematic diagram of the cooperation between the nozzle body and the nozzle covering sleeve;

[0041] Figure 5 A schematic structural diagram of a nozzle cover sleeve of a nozzle structure provided by an embodiment of the present invention;

[0042] Figure 6 A schematic structural diagram of a nozzle head body of the nozzle structure provided by an embodiment of the present invention;

[0043] Figure 7 A three-dimensional schematic diagram of the cooperation between the nozzle body and the nozzle covering sleeve provided by an embodiment of the present invention;

[0044] Figure 8 The jet structure provided by the embodiment of the present invention is Figure 3 Schematic diagram of the cross-sectional structure of XX;

[0045] Fig. 9 A schematic diagram of the jet direction of the jet structure provided in an embodiment of the present invention.

[0046] Among them, 101-jet head body, 101a-airway inlet, 101b-central jet hole group, 101c-airway outlet, 101d-main airway, 101e-air inlet groove;

[0047] 102-jet head covering sleeve, 102b-covering sleeve air hole, 102c-air hole opening, 102d-covering sleeve air channel, 102e-second positioning port;

[0048] 103-ceramic medium window, 104-intake pipe group, 104a-first intake pipe, 104b-second intake pipe, 104c-diffuser, 105-fixed block, 106-second sealing ring, 107-third sealing ring, 108-first sealing ring, 109-central intake stop valve, 110-central intake pipe, 111-edge intake pipe, 112-total intake rear section pipe, 113-total intake front section pipe, 114-connecting bolt, 115 -reaction chamber, 116-pressure control valve, 117-vacuum pump, 118-bias matching network, 119-bias RF power supply, 120-coupling coil, 121-excitation source matching network, 122-gas source, 123-shielding cover, 124-bias electrode, 151-excitation source RF power supply, 152-substrate sheet, 153-plasma, 154-edge air inlet shut-off valve, 155-inner surface of chamber, 156-jet direction of spiral jet head. DETAILED DESCRIPTION

[0049] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0050] The jet structure provided by the embodiment of the present invention includes: a jet head, the structure of which can refer to Figure 1-Figure 8 As shown;

[0051] The nozzle is provided with a circumferential air passage, one end of which is used to connect to the air inlet pipe group 104, and the other end of which is used to face the cavity wall of the reaction chamber 115, and the circumferential air passage is arc-shaped.

[0052] It can be seen from the above technical solutions that the jet structure provided by the embodiment of the present invention has an arc-shaped circumferential airway without dead corners. In the process of jetting, there is no resistance from right-angle corners, which can solve the problems of vortex generation, loss of airflow kinetic energy and deposition at dead corners compared to the airway in the prior art; the circumferential airway is arc-shaped, which has the characteristics of small flow resistance, long jet direction and large momentum compared to the airway with right-angle corners, and it is easier to change the etching uniformity by adjusting the airflow rate.

[0053] Furthermore, the nozzle includes: a nozzle body 101 and a nozzle cover 102, and the nozzle cover 102 is covered on the outside of the nozzle body 101. The structure of the nozzle cover 102 can be referred to Figure 3 , Figure 4 and Figure 7 ;

[0054] A circumferential air passage is formed between the spray head body 101 and the spray head covering sleeve 102 .

[0055] This technical solution forms a circumferential air passage by covering the nozzle body 101 with the nozzle covering sleeve 102 , thereby ensuring the air tightness of the circumferential air passage, having a compact structure and low cost; in addition, the nozzle covering sleeve 102 protects the nozzle body 101 .

[0056] Furthermore, the outer peripheral wall of the nozzle body 101 is provided with a main air passage 101d, the structure of which can be referred to Figure 3 , Figure 4 and Figure 6 The main air channel 101d and the inner circumferential wall of the nozzle cover 102 form a circumferential air channel. Of course, the circumferential air channel can also be set on the inner circumferential wall of the nozzle cover 102, or simultaneously set at the corresponding positions of the outer circumferential wall of the main air channel 101d and the inner circumferential wall of the nozzle cover 102.

[0057] Specifically, the main airway 101d is a spiral airway, and its structure can be referred to Figure 6 , arranged around the central axis of the shower head body 101.

[0058] Furthermore, the main body airway 101d is multiple, and its structure can refer to Figure 6 The spiral directions of the plurality of main air passages 101d are the same and are evenly distributed along the circumference of the nozzle body 101. The above scheme is designed in this way so that the jet volume is sufficient and the gas can be jetted out in different directions at the same time. In addition, even if some of the main air passages 101d are blocked, the nozzle can still work.

[0059] like Figure 5 As shown, the inner wall of the nozzle cover 102 is provided with a cover air passage 102d, and the main body air passage 101d and the cover air passage 102d form the aforementioned circumferential air passage. Figure 5 and Figure 6 The upper part of the nozzle body 101 and the upper part of the nozzle covering sleeve 102 are positioned and installed in coordination, the main body air passage 101d is located at the lower part of the nozzle body 101, and the covering sleeve air passage 102d is located at the lower part of the nozzle covering sleeve 102.

[0060] As a preferred embodiment, the sheath air passage 102d is a cylindrical surface coaxial with the nozzle body 101, and its structure can be referred to Figure 5 and Figure 6 As shown, the inner diameter of the sheath air passage 102d is smaller than the inner diameter of the upper portion of the nozzle sheath 102, and an annular step surface is formed therebetween for positioning and assembling the upper portion of the nozzle body 101.

[0061] Furthermore, the outlet end of the main airway 101d is provided with an airway outlet 101c, the structure of which can be referred to Figure 6 and Figure 8 ;

[0062] The inner wall of the nozzle sheath 102 is provided with a sheath air hole 102b penetrating the inner and outer peripheral walls. The air inlet side of the sheath air hole 102b is connected to the airway outlet 101c, and the air hole opening 102c on the air outlet side of the sheath air hole 102b is connected to the reaction chamber 115. The structure can be referred to Figure 4 and Figure 8 .

[0063] The scheme works as follows:

[0064] The gas is ejected from the gas outlet 101c of the main gas channel 101d, and is ejected from the gas hole 102c through the gas hole 102b of the sheath toward the reaction chamber 115.

[0065] Specifically, the sheath gas channel 102d is a straight pipe and is arranged along the tangent direction of the outer circle of the nozzle body 101. It should be noted that such a design can make the gas ejected from the sheath gas channel 102d non-vertically ejected to the inner surface of the cavity, making it easier to remove the attachments on the cavity surface and reducing the loss of the cavity surface. Fig. 9 shown.

[0066] Furthermore, the airway outlet 101c is arranged along the tangent direction of the outer circle of the nozzle body 101, and its structure can be referred to Figure 6 and Figure 8 It should be noted that, by such design, the directions of the airway outlet 101c and the airway 102d of the sheath are consistent. The airway 102d on the nozzle sheath 102 is aligned with the airway outlet 101c on the nozzle body 101 and is along the tangent direction of the outer circle of the nozzle body 101.

[0067] Furthermore, the air inlet 101a is provided on the air inlet side outer end surface of the spray head body 101, and its structure can be referred to Figure 6 One end of the airway inlet 101a is used to connect to the air intake pipe group 104, and the other end is connected to the air intake end of the main airway 101d. Through such a design, the airway inlet 101a plays the role of air intake, has a compact structure, and takes into account the working principle.

[0068] Furthermore, the airway inlet 101a is arranged along the radial direction of the nozzle body 101, and its structure can be referred to Figure 6 , and cooperates with the diffuser 104c of the intake pipe assembly 104. Through such a design, the airway inlet 101a is convenient for air intake from the diffuser 104c.

[0069] Specifically, the outer peripheral wall of the nozzle body 101 is provided with a first positioning port, which is arranged on the cross section of the nozzle body 101, and the inner peripheral wall of the nozzle covering sleeve 102 is provided with a second positioning port 102e which cooperates with the circumferential limit of the first positioning port, and the second positioning port 102e is arranged on the cross section of the nozzle covering sleeve 102. Figure 5 Such a design facilitates the limited cooperation between the nozzle body 101 and the nozzle covering sleeve 102 .

[0070] Furthermore, the first positioning port is provided on the outer peripheral wall of the air inlet side end of the nozzle body 101, and the second positioning port 102e is provided on the inner peripheral wall of the air inlet side end of the nozzle covering sleeve 102. Such a design has a compact structure and takes into account the working principle.

[0071] Furthermore, the first positioning port is provided with an air inlet groove 101e, the structure of which can be referred to Figure 6 One end of the air inlet groove is connected to the air inlet pipe group, and the other end of the air inlet groove is connected to the air inlet end of the circumferential airway. Through such a design, the air inlet groove 101e can also inlet air while limiting, ensuring sufficient air volume.

[0072] Specifically, the diameter of the air inlet end of the circumferential air channel is greater than the diameter of the air outlet end. Such a design further accelerates the gas during the flow process.

[0073] Furthermore, the nozzle is also provided with an axial airway; the air inlet end of the axial airway is connected to the second air inlet pipe 104b of the air inlet pipe group 104, and the air outlet end of the axial airway is provided with a central jet hole group 101b, and its structure can refer to Figure 3 It should be noted that the central jet hole group 101b can ensure sufficient gas volume, and the central jet hole group 101b blows vertically toward the substrate sheet 152 to ensure vertical jetting.

[0074] Furthermore, the outer wall of the nozzle cover 102 is provided with a sealing ring installation groove, and its structure can be referred to Figure 3 and Figure 4 With such a design, by installing the first sealing ring 108 in the sealing ring installation groove, the gas in the reaction chamber 115 is sealed to prevent it from escaping, thereby ensuring the airtightness of the reaction chamber 115 .

[0075] Specifically, it also includes: a fixing block 105; the jet head can be installed on the medium window 103 through the fixing block 105, and its structure can be referred to Figure 2 and Figure 3 It should be noted that the fixing block 105 plays a role in fixing the spray head.

[0076] The present invention further provides an etching machine, comprising: the above-mentioned jet structure. Since the present solution adopts the above-mentioned jet structure, it also has corresponding beneficial effects, which can be specifically referred to the above description and will not be repeated here.

[0077] The present invention is further described below in conjunction with specific embodiments:

[0078] To solve technical problems, we provide specific technical solutions: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 The present invention provides an injection structure for controlling the air inlet outlet and adjusting the air inlet height, comprising a reaction chamber 115, a coupling coil 120, a ceramic dielectric window 103, an excitation source radio frequency power supply 151, an excitation source matching network 121, a shielding cover 123, a gas source 122, a bias electrode 124, a bias radio frequency power supply 119, a bias matching network 118, a pressure control valve 116, a vacuum pump 117, an injection head body 101, an air inlet pipe group 104, a fixing block 105, and an injection head covering sleeve 102. , a second sealing ring 106, a third sealing ring 107, a first sealing ring 108, a central air intake pipe 110, an edge air intake pipe 111, a total air intake rear section pipe 112, a total air intake front section pipe 113, a central air intake stop valve 109, an edge air intake stop valve 154, a central jet hole group 101b, a second positioning port 102e and an air intake groove 101e; in addition, the air intake pipe group 104 includes a first air intake pipe 104a and a second air intake pipe 104b, and also includes a diffuser 104c.

[0079] The functions of the central air intake stop valve 109 and the edge air intake stop valve 154 are both stop valves to control the on and off of the air path.

[0080] The above-mentioned jet structure of a spiral air channel of the present invention is characterized in that the jet head is divided into two parts: a jet head body 101 and a jet head covering sleeve 102. The jet head body 101 is provided with a main air channel 101d, the covering sleeve 102 covers the outside of the spiral jet head, and the covering sleeve air channel 102d on the covering sleeve 102 is aligned with the air channel outlet 101c on the jet head body 101 and along the tangent direction of the outer circle of the jet head body 101. The gas enters the air channel inlet 101a on the jet head body 101 from 104c on the air inlet pipe group 104, passes through the main air channel 101d of the jet head body 101, passes through 101c, and then passes through the covering sleeve air hole 102b on the jet head covering sleeve 102 and is ejected from the air hole opening 102c.

[0081] like Figure 6The invention discloses a jet structure of a spiral airway, in which the airway is arc-shaped and has no corners, so that sediment is not easily generated and the generated sediment can be easily removed.

[0082] like Figure 6 The present invention provides a jet structure of a spiral air channel, in which the air channel is arc-shaped. Compared with a right-angle corner, the flow resistance is small, the jet direction is far, the momentum is large, and it is easier to change the etching uniformity by adjusting the air flow rate.

[0083] In the jet structure of the spiral airway of the present invention, the airway can be configured with a large inlet and a small outlet to further accelerate the airway.

[0084] The jet structure of the spiral air channel of the present invention has a stronger jet force and can suppress the plasma from flowing back to the jet head.

[0085] like Fig. 9 The present invention provides a jet structure of a spiral airway. Through spiral jetting, the gas is ejected in a non-vertical direction toward the inner surface of the cavity. The direction of the gas ejected to the inner surface of the cavity has a non-vertical inclination angle with the tangent direction of the inner surface of the cavity, which can make it easier to remove the attachments on the surface of the cavity and reduce the loss to the surface of the cavity.

[0086] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0087] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A jet structure, characterized in that: include: Jet head; The nozzle is provided with a circumferential air passage, one end of which is used to connect to the air inlet pipe group (104), and the other end of which is used to face the cavity wall of the reaction chamber (115), and the circumferential air passage is arc-shaped.

2. The jet structure according to claim 1, characterized in that: The jet head comprises: a jet head body (101) and a jet head covering sleeve (102), wherein the jet head covering sleeve (102) covers the jet head body (101); The circumferential air passage is formed between the spray head body (101) and the spray head covering sleeve (102).

3. The jet structure according to claim 2, characterized in that: The outer peripheral wall of the nozzle body (101) is provided with a main air passage (101d), and the main air passage (101d) and the inner peripheral wall of the nozzle covering sleeve (102) form the circumferential air passage.

4. The jet structure according to claim 3, characterized in that: The main body air passage (101d) is a spiral air passage, and is arranged around the central axis of the spray head main body (101).

5. The jet structure according to claim 4, characterized in that: There are a plurality of main body air passages (101d), and the spiral directions of the plurality of main body air passages (101d) are the same and are evenly distributed along the circumference of the spray head body (101).

6. The jet structure according to any one of claims 3 to 5, characterized in that: The inner wall of the nozzle covering sleeve (102) is provided with a covering sleeve air channel (102d), and the main body air channel (101d) and the covering sleeve air channel (102d) form the circumferential air channel.

7. The jet structure according to claim 6, characterized in that: The sheath air passage (102d) is a cylindrical surface coaxial with the spray head body (101).

8. The jet structure according to any one of claims 3 to 5, characterized in that: The air outlet end of the main airway (101d) is provided with an airway outlet (101c); The nozzle covering sleeve (102) is provided with a covering sleeve air hole (102b) penetrating the inner and outer peripheral walls; the air inlet side of the covering sleeve air hole (102b) is connected to the air duct outlet (101c); and the air hole opening (102c) on the air outlet side of the covering sleeve air hole (102b) is connected to the reaction chamber (115).

9. The jet structure according to claim 8, characterized in that: The cladding sleeve air hole (102b) is a straight pipe and is arranged along the tangent direction of the outer circle of the nozzle body (101).

10. The jetting structure according to claim 9, characterized in that: The airway outlet (101c) is arranged along the tangent direction of the outer circle of the spray head body (101).

11. The jetting structure according to any one of claims 3 to 5, characterized in that: An air duct inlet (101a) is provided on the air inlet side outer end surface of the spray head body (101), one end of the air duct inlet (101a) is used to connect to the air inlet pipe group (104), and the other end is connected to the air inlet end of the main body air duct (101d).

12. The jetting structure according to claim 11, characterized in that: The air passage inlet (101a) is arranged along the radial direction of the nozzle body (101) and cooperates with the diffuser (104c) of the air intake pipe group (104).

13. The jetting structure according to claim 2, characterized in that: The outer peripheral wall of the nozzle body (101) is provided with a first positioning port, and the inner peripheral wall of the nozzle covering sleeve (102) is provided with a second positioning port (102e) that cooperates with the first positioning port in a circumferential limiting manner.

14. The jetting structure according to claim 13, characterized in that: The first positioning port is opened on the outer peripheral wall of the air inlet side end of the nozzle body (101), and the second positioning port (102e) is opened on the inner peripheral wall of the air inlet side end of the nozzle covering sleeve (102).

15. The jetting structure according to claim 13, characterized in that: The first positioning port is provided with an air intake groove (101e), one end of the air intake groove (101e) is connected to the air intake pipe group (104), and the other end of the air intake groove (101e) is connected to the air intake end of the circumferential air passage.

16. The jetting structure according to claim 1, characterized in that: The diameter of the air inlet end of the circumferential air passage is greater than the diameter of the air outlet end.

17. The jetting structure according to claim 1, characterized in that: The spray head is also provided with an axial air passage; the air inlet end of the axial air passage is connected to the second air inlet pipe (104b) of the air inlet pipe group (104), and the air outlet end of the axial air passage is provided with a central spray hole group (101b).

18. The jetting structure according to claim 2, characterized in that: The outer peripheral wall of the nozzle covering sleeve (102) is provided with a sealing ring installation groove.

19. The jetting structure according to claim 1, characterized in that: Also includes: A fixing block (105); the jet head can be mounted on the medium window (103) through the fixing block (105).

20. An etching machine, characterized in that: include: The jet structure according to any one of claims 1 to 19.

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