Ion implanter ion source filament support with cooling structure and method

Abstract

The invention discloses an ion source filament support with a cooling structure. The ion source filament support comprises a support body; the lamp filament is fixedly arranged on one side of the support body, and the cooling mechanism is assembled on the other side of the support body. According to the cooling mode, the cooling water pipe is welded to the support, the support is connected with the lamp filament through the screws, cooling water is injected into the cooling water pipe, the cooling water flows in the cooling water pipe, and heat of the support is taken away. The design is simple and effective, the design is unique in the field, the implementation effect is optimal in consideration of the special use site, the problem of water leakage caused by welding failure due to the fact that the temperature of the support is too high is solved, and safe operation of equipment is guaranteed.

Description

Technical Field

[0001] The invention relates to the field of hydrogen ion implanter accessories, in particular to an ion source filament support with a cooling structure for an ion implanter and a method thereof. Background Art

[0002] As one of the key components of the hydrogen ion implanter, the multi-sealed negative hydrogen ion source is a device used to generate accelerated charged particles. It provides a charged ion beam for the hydrogen ion implanter.

[0003] The type and functional status of the ion source system determine many performance indicators of the accelerator, such as beam intensity, emittance, energy divergence and ion types. Compared with the traditional positive ion source, the negative ion source has the characteristics of convenient ion extraction and low beam loss rate. At present, multi-sealed negative hydrogen ion sources have been applied to generate negative hydrogen ions and have been widely used as external sources of hydrogen ion implanters.

[0004] The multi-sealed negative hydrogen ion source uses metal filament heat to generate electrons. Under the action of electric and magnetic fields, the electrons collide with hydrogen to generate plasma containing H- ions.

[0005] In order to stimulate the filament to produce electrons, it is often necessary to energize the filament, with a current of up to 70A, a voltage of 11V, a heating power of up to 770W, and a filament temperature exceeding 3000°C. Therefore, the filament bracket must be cooled to prevent the bracket from melting and affecting the safe operation of the equipment.

[0006] Therefore, it is necessary to propose an ion source filament support with a cooling structure, which is a problem that needs to be solved at present. Summary of the invention

[0007] Purpose of the invention: To provide an ion implanter ion source filament support and method with a cooling structure to solve the above-mentioned problems existing in the prior art.

[0008] The technical solution of the present invention: An ion source filament support with a cooling structure is installed on a new hydrogen ion implanter. The ion source filament support comprises: a support body; a filament fixedly arranged on one side of the support body; and a cooling mechanism assembled on the other side of the support body. When the filament is heated, the cooling mechanism takes away the heat to prevent the support body from being overheated.

[0009] In a further embodiment, the cooling mechanism includes: an external cooling water pipe, welded to the bracket body; an internal cooling water pipe, sleeved inside the external cooling water pipe, and the internal cooling water pipe is welded to the bracket body; one or more through holes are opened on the side surface of the end of the internal cooling water pipe; cooling water flows from the internal cooling water pipe, through the through holes, into the cavity formed between the external cooling water pipe and the internal cooling water pipe, and flows out from the cavity to take away the heat.

[0010] In a further embodiment, the cooling mechanism includes: an external cooling water pipe, welded to the bracket body; an internal cooling water pipe, sleeved inside the external cooling water pipe, and the end of the internal cooling water pipe is close to but not in contact with the bracket body; cooling water enters from the internal cooling water pipe, flows out through the end of the internal cooling water pipe into the cavity formed between the external cooling water pipe and the internal cooling water pipe, and flows out from the cavity to take away the heat.

[0011] In a further embodiment, the end of the filament is mounted on the support body by a movable fixed connection.

[0012] In a further embodiment, the filament is mounted on the bracket body by screws, and the filament is made of tantalum.

[0013] In a further embodiment, the support body is made of tungsten-copper alloy.

[0014] In a further embodiment, the inner cooling water pipe and the outer cooling water pipe are made of oxygen-free copper.

[0015] The present invention also provides a cooling method for an ion source filament bracket of an ion implanter with a cooling structure. Based on the aforementioned ion source filament bracket, the method is characterized in that the cooling method is: cooling water flows from an external container into the interior of the internal cooling water pipe, reaches the end of the internal cooling water pipe, and flows out from the flow-out gap or the opened through hole, at which time the cooling water exchanges heat with the bracket body; the cooling water after the heat exchange flows out into the cavity formed between the external cooling water pipe and the internal cooling water pipe, flows out from the cavity into the external container, and finally takes away the heat on the bracket body.

[0016] Due to the adoption of the above technical solution, the beneficial effects of the present invention are: 1. The present invention discloses an ion source filament support with a cooling structure, which connects two cooling water pipes to the support and uses the heat exchange principle of cooling water to take away the heat on the support. The filament is movably mounted on the support through screws, etc., and the cooling water in the inner cooling water pipe flows into the outer cooling water pipe, so that the cooling water flows and takes away the heat of the support, effectively reducing the temperature of the support.

[0017] 2. The design of the present invention is simple and effective, and is an original design in this field. Considering the special place of use, the implementation effect is optimal, and the water leakage problem caused by welding failure due to excessively high bracket temperature is avoided, thereby ensuring the safe operation of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural schematic diagram of the present invention.

[0019] Figure 2 It is a side view schematic diagram of the present invention.

[0020] Figure 3 It is a schematic diagram of a cooling water pipe of the present invention.

[0021] The accompanying drawings are marked as follows: 1. Cooling mechanism; 2. Bracket body; 3. Filament. DETAILED DESCRIPTION

[0022] The present application relates to a novel hydrogen ion implanter ion source filament support and method with a cooling structure, which is explained in detail through a specific implementation method below. Example

[0023] like Figure 1 , Figure 2 , Figure 3 As shown, an ion source filament holder of an ion implanter with a cooling structure is installed on a new type of hydrogen ion implanter. The ion source filament holder includes a holder body 2, a filament 3 and a cooling mechanism 1.

[0024] The filament is fixed on one side of the support body 2 .

[0025] The cooling mechanism 1 is mounted on the other side of the support body. When the filament is heated, the cooling mechanism takes away the heat to prevent the support body 2 from being overheated.

[0026] The cooling mechanism 1 includes an outer cooling water pipe and an inner cooling water pipe, which are welded to the bracket body 2. The inner cooling water pipe is sleeved inside the outer cooling water pipe, and the inner cooling water pipe is welded to the bracket body 2. One or more through holes are opened on the side of the end of the inner cooling water pipe. Cooling water flows from the inner cooling water pipe through the through holes into the cavity formed between the outer cooling water pipe and the inner cooling water pipe, and flows out of the cavity to take away the heat.

[0027] In the actual manufacturing process, the end of the filament is installed on the support body by a movable fixed connection method, usually using screws. The filament 3 is made of tantalum. The support body 2 is made of tungsten copper alloy. The inner cooling water pipe and the outer cooling water pipe are made of oxygen-free copper. Example

[0028] like Figure 1 , Figure 2 , Figure 3 As shown, an ion source filament holder of an ion implanter with a cooling structure is installed on a new type of hydrogen ion implanter. The ion source filament holder includes a holder body 2, a filament 3 and a cooling mechanism 1.

[0029] The filament is fixed on one side of the support body 2 .

[0030] The cooling mechanism 1 is mounted on the other side of the support body. When the filament is heated, the cooling mechanism takes away the heat to prevent the support body 2 from being overheated.

[0031] The cooling mechanism 1 includes an outer cooling water pipe and an inner cooling water pipe, which are welded to the bracket body 2. The inner cooling water pipe is sleeved inside the outer cooling water pipe, and the end of the inner cooling water pipe is close to but not in contact with the bracket body 2. Cooling water enters from the inner cooling water pipe, flows out through the end of the inner cooling water pipe into the cavity formed between the outer cooling water pipe and the inner cooling water pipe, and flows out from the cavity to take away the heat.

[0032] In the actual manufacturing process, the end of the filament is installed on the support body by a movable fixed connection method, usually using screws. The filament 3 is made of tantalum. The support body 2 is made of tungsten copper alloy. The inner cooling water pipe and the outer cooling water pipe are made of oxygen-free copper. Example

[0033] This embodiment is a cooling method for an ion source filament support of an ion implanter with a cooling structure, which is based on the ion source filament support in Embodiment 1 or Embodiment 2.

[0034] The cooling method is: cooling water flows from the external container into the interior of the internal cooling water pipe, reaches the end of the internal cooling water pipe, and flows out from the flow-out gap or the opened through hole. At this time, the cooling water exchanges heat with the bracket body; the cooling water after the heat exchange flows out into the cavity formed between the external cooling water pipe and the internal cooling water pipe, flows out from the cavity into the external container, and finally takes away the heat on the bracket body.

[0035] Working principle description: Inject cooling water into the cooling water pipe so that the cooling water flows in the cooling water pipe and takes away the heat of the bracket.

[0036] The preferred specific embodiments of the present invention are described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the specific details in the above specific embodiments. Within the technical concept of the present invention, various equivalent transformations can be made to the technical scheme of the present invention, and these equivalent transformations all belong to the protection scope of the present invention.

Claims

1. An ion source filament support for an ion implanter with a cooling structure, installed on a new hydrogen ion implanter, the ion source filament support comprising: The bracket body; It is characterized in that The filament is fixed on one side of the support body. A cooling mechanism is mounted on the other side of the bracket body; When the filament generates heat, the cooling mechanism takes away the heat to prevent the temperature of the support body from being too high.

2. The ion source filament support of an ion implanter with a cooling structure according to claim 1, characterized in that: The cooling mechanism comprises: An external cooling water pipe is welded on the support body; An inner cooling water pipe is sleeved inside the outer cooling water pipe, and the inner cooling water pipe is welded to the bracket body; One or more through holes are provided on the side surface of the end of the inner cooling water pipe; The cooling water flows from the inner cooling water pipe through the through hole into the cavity formed between the outer cooling water pipe and the inner cooling water pipe, and flows out from the cavity to take away the heat.

3. The ion source filament support of an ion implanter with a cooling structure according to claim 1, characterized in that: The cooling mechanism comprises: An external cooling water pipe is welded on the support body; An inner cooling water pipe is sleeved inside the outer cooling water pipe, and the end of the inner cooling water pipe is close to but not in contact with the support body; Cooling water enters from the inner cooling water pipe, flows out through the end of the inner cooling water pipe into the cavity formed between the outer cooling water pipe and the inner cooling water pipe, and flows out from the cavity to take away the heat.

4. The ion source filament support of an ion implanter with a cooling structure according to claim 1, characterized in that: The end of the filament is mounted on the bracket body in a movable fixed connection manner.

5. The ion source filament support of an ion implanter with a cooling structure according to claim 3, characterized in that: The filament is mounted on the bracket body by screws, and the filament is made of tantalum.

6. The ion source filament support of an ion implanter with a cooling structure according to claim 1, characterized in that: The support body is made of tungsten-copper alloy.

7. The ion source filament support of an ion implanter with a cooling structure according to claim 2 or 3, characterized in that: The inner cooling water pipe and the outer cooling water pipe are made of oxygen-free copper.

8. A cooling method for an ion source filament support of an ion implanter with a cooling structure, based on the ion source filament support according to any one of claims 1 to 7, characterized in that: The cooling method is: The cooling water flows from the external container into the interior of the internal cooling water pipe, reaches the end of the internal cooling water pipe, and flows out from the flow-out gap or the opened through hole. At this time, the cooling water exchanges heat with the bracket body; the cooling water after the heat exchange flows out into the cavity formed between the external cooling water pipe and the internal cooling water pipe, and flows out from the cavity into the external container, finally taking away the heat on the bracket body.

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