Independent autorotation system for coating, evaporation equipment and sputter coating equipment

Abstract

The utility model relates to an independent autorotation system for coating, evaporation equipment and sputter coating equipment, the independent autorotation system comprises a frame body, the inner side wall of a first opposite frame of the frame body is provided with a plurality of first through holes, the inner side wall of a second opposite frame of the frame body is provided with a plurality of second through holes, and the first through holes and the second through holes are oppositely arranged; a cavity is formed in at least part of the area of the frame body and communicates with the first through hole, and a transmission mechanism is arranged in the cavity; the first rotation shaft piece is arranged in the first through hole and is electrically connected with the transmission mechanism; the second rotation shaft piece is arranged in the second through hole; the workpieces to be plated are fixed in the middle area of the frame body through a first rotation shaft piece and a second rotation shaft piece; the driving device is arranged on the inner wall or in the frame body, is electrically connected with the transmission mechanism and drives the workpiece to be coated to rotate, and the system is simple in structure, suitable for various columnar coating requirements, universal for various sputtering devices, low in cost, detachable and high in coating efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of optical coating, in particular to an independent auto-propagation system, evaporation equipment and sputtering coating equipment for coating. Background Art

[0002] Currently, optical vapor deposition machines and sputtering coating equipment only have revolution mechanisms, or the self-rotation mechanism needs to be equipped with the revolution mechanism to start. Customized self-rotation mechanisms are generally expensive and time-consuming to modify. It is time-consuming and labor-intensive to change back to the original self-rotation mechanism, which is not conducive to switching coating for a small number of different types of products. At the same time, it is not suitable for multiple coating equipment.

[0003] Therefore, based on the above problems, there is an urgent need for a self-rotating system that can rotate independently and is applicable to a variety of coating equipment. Utility Model Content

[0004] In view of the problems existing in the prior art, the utility model provides an independent self-propagation system, evaporation equipment and sputtering coating equipment for coating, which can be independently self-propagated, and the workpiece to be coated can be disassembled and adjusted, which is conducive to the common use of various coating equipment.

[0005] The technical solution of the utility model is as follows:

[0006] The present application provides an independent autobiography system for coating, comprising:

[0007] A frame body, the frame body includes a middle area and an outer frame area surrounding the middle area, the outer frame area includes a first relative frame and a second relative frame, the inner side wall of the first relative frame is provided with a plurality of first through holes and a plurality of second through holes, the first through holes and the second through holes are arranged oppositely; at least part of the outer frame area is provided with a chamber, the chamber is connected to the first through holes, and a transmission mechanism is provided in the chamber;

[0008] At least one first self-rotating shaft member, the first self-rotating shaft member comprises a first end and a second end, the first end is adapted to the size of the first through hole, the first end is disposed in the first through hole, and is electrically connected to the transmission mechanism;

[0009] At least one second self-rotating shaft member, the second self-rotating shaft member includes a third end and a fourth end, the third end is adapted to the size of the second through hole, and the third end is fixedly disposed in the second through hole;

[0010] At least one workpiece to be plated is placed in the middle area, one end of the workpiece to be plated is detachably connected to the second end, and the other end of the workpiece to be plated is detachably connected to the fourth end;

[0011] The driving device is arranged on the inner wall of the second relative frame, or a accommodating cavity is arranged in the second relative frame. The driving device is arranged in the accommodating cavity and is arranged adjacent to the first through hole. The driving device is electrically connected to the transmission mechanism. The driving device is configured to drive the transmission mechanism to drive the second self-rotating shaft and the second self-rotating shaft to rotate, thereby driving the workpiece to be plated to rotate around the center axis of the workpiece to be plated.

[0012] As a preferred technical solution, the transmission mechanism at least includes a transmission wheel and a transmission chain.

[0013] As a preferred technical solution, the transmission wheel is a sprocket, and the transmission chain is a chain or a belt; or the transmission wheel is a gear, and the transmission chain is a transmission gear.

[0014] As a preferred technical solution, at least a portion of the surrounding area of ​​the outer wall of the frame body is provided with protruding blocks.

[0015] As a preferred technical solution, the second relative frames of the frame body are lifting frames arranged parallel to each other.

[0016] As a preferred technical solution, the plurality of first through holes are arranged at equal intervals, or are arranged at staggered intervals, or are arranged in a matrix.

[0017] As a preferred technical solution, the middle area is rectangular or trapezoidal; the workpiece to be plated is a polygonal column or a cylinder.

[0018] As a preferred technical solution, there are at least two workpieces to be plated, and the shapes of the at least two workpieces to be plated are the same or different.

[0019] The present application also provides a vapor deposition device, which at least includes a coating umbrella frame, wherein the coating umbrella frame is provided with a plurality of coating areas, the plurality of coating areas are arranged at equal intervals in the circumferential direction, and the coating areas are fixed with the above-mentioned independent autotransmission system for coating.

[0020] The present application also provides a sputtering coating device, which comprises at least a carrier platform, and at least one of the above-mentioned independent self-propagating systems for coating is arranged on the carrier platform.

[0021] The beneficial effects achieved by the technical solution adopted by the utility model are:

[0022] The utility model provides an independent self-rotating system, evaporation equipment and sputtering coating equipment for coating. The self-rotating system has a simple structure, low cost and high coating efficiency. A variety of different columnar workpieces to be plated can be arranged thereon for easy disassembly. At the same time, the self-rotating system is applicable to various types of sputtering equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solution of the embodiment of the utility model, the following is a brief introduction to the drawings required for the description of the embodiment, which constitute a part of the utility model. The schematic embodiment of the utility model and its description explain the utility model and do not constitute an improper limitation of the utility model. In the drawings:

[0024] Figure 1 Schematic diagram of the independent autobiography system for coating disclosed in Example 1;

[0025] Figure 2 It is a schematic diagram of the independent autobiography system for coating disclosed in the embodiment 1;

[0026] Figure 3 Schematic diagram of the independent autobiography system for coating disclosed in Example 1;

[0027] Figure 4 It is a schematic diagram of the independent autobiography system for coating disclosed in the embodiment 1;

[0028] Figure 5 This is a schematic diagram of the independent autobiography system for coating disclosed in Example 1.

[0029] Description of reference numerals:

[0030] Frame body 100; first through hole 101; second through hole 102; first self-rotating shaft 103; second self-rotating shaft 104; chamber 105; driving device 106; workpiece to be plated 107; clamping block 108; first relative frame 109. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical solution and advantages of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in combination with the specific embodiments of the utility model and the corresponding drawings. In the description of the utility model, it should be noted that the term "or" is usually used in the sense of including "and / or", unless the content clearly indicates otherwise.

[0032] In the description of the present utility model, it should be understood that "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should be noted that, unless otherwise clearly specified and limited, "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through a medium. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to the specific circumstances.

[0033] In addition, those skilled in the art should understand that, in the disclosure of the present invention, the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms cannot be understood as limiting the present invention.

[0034] Obviously, the described embodiments are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0035] Example 1

[0036] according to Figure 1-Figure 2 , this embodiment provides an independent autobiography system for coating, comprising:

[0037] A frame body 100, the frame body 100 includes a middle area and an outer frame area surrounding the middle area, the outer frame area includes a first relative frame and a second relative frame, the inner side wall of the first relative frame is provided with a plurality of first through holes 101 and a plurality of second through holes 102, the first through holes 101 and the second through holes 102 are arranged opposite to each other; at least a part of the outer frame area is provided with a chamber 105, the chamber 105 is connected to the first through holes 101, and a transmission mechanism is provided in the chamber 105;

[0038] At least one first self-rotating shaft 103, the first self-rotating shaft 103 comprises a first end and a second end, the first end matches the size of the first through hole 101, the first end is disposed in the first through hole 101, and is electrically connected to the transmission mechanism;

[0039] At least one second self-rotating shaft member, the second self-rotating shaft member includes a third end and a fourth end, the third end matches the size of the second through hole 102, and the third end is fixedly disposed in the second through hole 102;

[0040] At least one workpiece 107 to be plated, the workpiece 107 to be plated is placed in the middle area, one end of the workpiece 107 to be plated is detachably connected to the second end, and the other end of the workpiece 107 to be plated is detachably connected to the fourth end;

[0041] The driving device 106 is arranged on the inner wall of the second relative frame, or a accommodating cavity is arranged in the second relative frame. The driving device 106 is arranged in the accommodating cavity and is arranged adjacent to the first through hole 101. The driving device 106 is electrically connected to the transmission mechanism. The driving device 106 is configured to drive the transmission mechanism to drive the second self-rotating shaft and the second self-rotating shaft to rotate, thereby driving the workpiece 107 to be plated to rotate around the center axis of the workpiece 107 to be plated.

[0042] Based on the existing coating equipment, an independent self-rotating system is urgently needed, which is easy to disassemble and can adapt to the coating requirements of various different types of columnar products. An independent self-rotating system for coating is proposed, including a frame body 100, a first self-rotating shaft 103, a second self-rotating shaft 104, a workpiece 107 to be plated, and a driving device 106. The first self-rotating shaft 103 and the second self-rotating shaft 104 are arranged above and below the frame body 100 to fix the workpiece 107 to be plated. A chamber 105 is arranged in the frame body 100, and a transmission mechanism is arranged in the chamber 105. The driving device 106 is arranged on the left or right inner wall of the frame body 100. The transmission mechanism is driven by the driving device 106 to drive the first self-rotating shaft 103 and the second self-rotating shaft 104 to rotate, and further drive the workpiece 107 to be plated to do self-rotating motion around its central axis. The independent self-rotating system can be independently self-rotating, detachable, simple in structure, suitable for coating various different columnar workpieces 107 to be plated, high in coating efficiency, and widely applicable.

[0043] Preferably, the transmission mechanism at least includes a transmission wheel and a transmission chain.

[0044] Preferably, the transmission wheel is a sprocket, and the transmission chain is a chain or a belt; or the transmission wheel is a gear, and the transmission chain is a transmission gear.

[0045] Specifically, in this embodiment, the transmission mechanism can be a gear-belt transmission, or a gear-chain transmission, or a gear transmission, etc., wherein the belt or chain is an important component connecting various power transmission devices, which is adapted to be wound around the transmission wheel, and the specific winding method is not specifically limited here.

[0046] The transmission mechanism in this embodiment can also be other mechanical transmission forms, as long as it can achieve the transmission effect, and no specific limitation is made here. It is preferably a gear belt transmission method, which has the advantages of simple structure, stable transmission, high transmission efficiency, and low cost.

[0047] Preferably, at least a portion of the periphery of the outer wall of the frame body 100 is provided with a protruding block 108 .

[0048] Preferably, the middle area is rectangular or trapezoidal; the workpiece 107 to be plated is a polygonal column or a cylinder.

[0049] Specifically, the frame body 100 includes a central region and an outer frame region surrounding the central region. Among them, the central region is used to place the workpiece to be plated 107. The outer frame region is preferably made of aluminum, and can also be other materials. The frame body 100 is in an overall shape of a Chinese character 'hui', and its central region is preferably rectangular or trapezoidal, and can also be other shapes, which are all set by those skilled in the art according to actual needs. The workpiece to be plated 107 is the workpiece to be coated, preferably a columnar body, and its columnar body can be in different states, such as a cylinder, a triangular prism, a pentagonal prism, etc.

[0050] Around the outer wall of the frame body 100, especially in the regions near the four corners, at least one outwardly protruding clamping block 108 is provided. The clamping block 108 is used to fixedly install the self-rotation system into the coating equipment. The shape and size of the clamping block 108 need to match the clamping area of the fixed self-rotation system inside the actual coating equipment, with firm fixation and better coating uniformity. The coating equipment in this embodiment can be an evaporation coating equipment, a sputtering equipment, etc., and can also be other coating equipment. The specific setting of the clamping block 108 is selected by those skilled in the art according to the set area inside the actual coating equipment.

[0051] Preferably, the second opposite frames of the frame body 100 are lifting frames arranged in parallel.

[0052] Preferably, the multiple first through holes 101 are arranged at equal intervals, or arranged at different heights and intervals, or arranged in a matrix.

[0053] Preferably, there are at least two workpieces to be plated 107, and the shapes of the at least two workpieces to be plated 107 are the same or different.

[0054] Specifically, the frame body 100 includes a first opposite frame and a second opposite frame. The first opposite frame includes an upper frame and a lower frame. The upper frame is provided with multiple first through holes 101, and the lower frame is provided with multiple second through holes 102. The multiple first through holes 101 and the multiple second through holes 102 are arranged oppositely, that is, multiple through holes are arranged in the opposite regions of the upper frame and the lower frame. The first through holes 101 are used to pass through the first self-rotating shaft member 103 to limit the movement range of the first self-rotating shaft member 103, and the second through holes 102 are used to pass through the second self-rotating shaft member 104 to limit the movement range of the second self-rotating shaft member 104.

[0055] In a preferred embodiment, the number of the multiple first through holes 101 on the upper frame is the same as the number of the multiple second through holes 102 on the lower frame, and they are arranged in one-to-one correspondence. See Figure 3 It can also be that the multiple first through holes 101 are arranged at different heights on the inner side wall of the upper frame, and as a whole, they present a serrated shape after being connected. See Figure 4The plurality of second through holes 102 are arranged at different heights on the inner side wall of the lower frame, and the plurality of first through holes 101 and the plurality of second through holes 102 are arranged one by one in a one-to-one correspondence. The plurality of first through holes 101 of the upper frame can also be arranged in a matrix. Figure 5 , the multiple second through holes 102 of the lower frame are arranged in a matrix, and the matrix-type first through holes 101 and the matrix-type second through holes 102 are arranged one by one correspondingly, which effectively improves the output of the workpieces 107 to be plated and the coating efficiency. The first rotating shaft 103 and the second rotating shaft 104 are both perpendicular to the upper frame or the lower frame. The above method can be used to plate the same workpiece 107 to be plated, or a variety of different workpieces 107 to be plated can be plated in an alternating manner, for example, all are cylindrical workpieces 107 to be plated, or cylindrical workpieces 107 to be plated and triangular prism-shaped workpieces 107 to be plated are alternately arranged for coating, and so on.

[0056] Furthermore, the second through hole 102 may be arranged between two adjacent first through holes 101, and the first through hole 101 may be arranged between two adjacent second through holes 102; the plurality of first through holes 101 may also be divided into a plurality of first left through holes and a plurality of first right through holes starting from the center position of the upper frame, and the plurality of second through holes 102 may be divided into a plurality of second left through holes and a plurality of second right through holes starting from the center position of the lower frame, and the second left through hole may be located between two adjacent first left through holes, and the second right through hole may be located between two adjacent first right through holes; the shapes of the first through holes 101 and the second through holes 102 may be changed to adapt to the inclined arrangement of the first rotation axis 103 and the second rotation axis 104, so that the first rotation axis 103 on the left and the first rotation axis 103 on the right present an eight-shaped shape, and the second rotation axis 104 on the left and the second rotation axis 104 on the right present an eight-shaped shape. The shaft 104 also presents an eight-shaped shape, the first rotating shaft 103 on the left is parallel to the second rotating shaft 104 on the left, and the first rotating shaft 103 on the right is parallel to the second rotating shaft 104 on the right, that is to say, the first rotating shaft 103 and the second rotating shaft 104 both have an angle with the upper frame or the lower frame, and the angle is preferably 5°-30°. With this arrangement, the center position spacing of the upper frame will be greater than or less than the center position spacing of the lower frame. Furthermore, at least one first through hole 101 can be set at the center position spacing of the upper frame, and the position and number of the first through hole 101 correspond to the position of at least one second through hole 102 set at the center position of the lower frame, so as to adapt to the coating requirements of different types of workpieces 107 to be plated. For example, a pentagonal workpiece 107 to be plated is set at the center position, and cylindrical workpieces to be plated are set on the left and right sides, so as to more effectively improve the coating efficiency.

[0057] Among them, the shape and size of the first through hole 101 need to be compatible with the first rotating shaft 103, and the shape and size of the second through hole 102 need to be compatible with the second rotating shaft 104. The design of the through hole in the frame body 100 can also be other settings, which can limit the active area of ​​the rotating shaft and adapt to the coating requirements of different types of workpieces 107 to be plated. No specific limitations are made here.

[0058] A chamber 105 is provided in the upper frame of the frame body 100 to accommodate the transmission mechanism. The chamber 105 is connected to the first through hole 101. The first rotating shaft 103 and the second rotating shaft 104 are preferably cylindrical shafts, and can also be other forms, which are not specifically limited here. The first rotating shaft 103 includes a first end and a second end, and its first end passes through the first through hole 101 to be electrically connected to the transmission mechanism, and the second end is used to be detachably fixedly connected to one end of the workpiece 107 to be plated; the second rotating shaft 104 includes a third end and a fourth end, and its third end is preferably provided with a clamping sleeve, and the third end is firmly fixed in the second through hole 102 through the clamping sleeve, and the fourth end is used to be movably connected to the other end of the workpiece 107 to be plated. The above-mentioned electrical connection, detachable fixed connection and movable connection can all be any existing device form, and can be selected by those skilled in the art according to actual needs.

[0059] The second relative frame of the frame body 100, that is, the left frame and the right frame, is used to fix the driving device 106 on the inner side wall of the left frame or the right frame and close to at least part of the upper frame. It can also be that a receiving space is set inside the left frame or the right frame to accommodate the driving device 106, which can reduce the space in the middle area of ​​the frame body 100. In a preferred embodiment, both the left frame and the right frame use a lifting frame, which can increase or shorten the length of the frame body 100, so as to select different lengths of the workpiece 107 to be plated, save costs, and can be recycled.

[0060] The driving device 106 at least includes a driving mechanism and a power component. The driving device 106 drives the first self-rotating shaft to rotate through a sprocket chain transmission, and further drives the workpiece 107 to rotate around its central axis. The rotation speed of the workpiece 107 to be plated is controlled by adjusting the running speed of the motor. By keeping the workpiece 107 to be plated moving at a uniform speed and rotating the shaft continuously, the coating of the workpiece 107 to be plated is uniform, thereby improving the coating quality of the workpiece 107 to be plated.

[0061] Example 2

[0062] This embodiment provides a vapor deposition device, which at least includes a coating umbrella frame, wherein the coating umbrella frame is provided with a plurality of coating areas, and the plurality of coating areas are arranged at equal intervals in the circumferential direction, and the coating areas are fixed with the independent autotransmission system for coating in the embodiment 1.

[0063] This embodiment also provides a sputtering coating device, which includes at least a carrier table, on which is provided at least one independent auto-transmission system for coating in Embodiment 1. The sputtering coating device in this embodiment includes but is not limited to a barrel sputtering device, a vertical sputtering device, and a horizontal sputtering device.

[0064] The independent autopropagator system in Example 1 is arranged in the sputtering equipment, so that the coating of the workpiece 107 to be plated is uniform, and the coating quality of the workpiece 107 to be plated is improved. The system can be disassembled at any time and has a simple structure. It is suitable for the coating needs of various columnar workpieces 107 to be plated. The independent autopropagator system can also be recycled in multiple different coating equipment, effectively reducing the production cost.

[0065] The above is a detailed introduction to an independent autotransmission system, an evaporation device and a sputtering coating device for coating in an embodiment of the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method of the present application and its core idea; at the same time, for general technical personnel in this field, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. An independent autobiography system for coating, characterized in that: include: A frame body, the frame body comprising a middle area and an outer frame area surrounding the middle area, the outer frame area comprising a first relative frame and a second relative frame, the inner side wall of the first relative frame is provided with a plurality of first through holes and a plurality of second through holes, the first through holes and the second through holes are arranged oppositely; at least part of the outer frame area is provided with a chamber, the chamber is connected to the first through holes, and a transmission mechanism is provided in the chamber; At least one first self-rotating shaft, the first self-rotating shaft comprising a first end and a second end, the first end being adapted to the size of the first through hole, the first end being disposed in the first through hole and being electrically connected to the transmission mechanism; At least one second self-rotating shaft member, the second self-rotating shaft member includes a third end and a fourth end, the third end is adapted to the size of the second through hole, and the third end is fixedly disposed in the second through hole; At least one workpiece to be plated, the workpiece to be plated is placed in the middle area, one end of the workpiece to be plated is detachably connected to the second end, and the other end of the workpiece to be plated is detachably connected to the fourth end; A driving device, wherein the driving device is arranged on the inner side wall of the second relative frame, or a receiving cavity is arranged in the second relative frame, the driving device is arranged in the receiving cavity and is arranged adjacent to the first through hole, the driving device is electrically connected to the transmission mechanism, and the driving device is configured to drive the transmission mechanism to drive the second self-propagating shaft member and the second self-propagating shaft member to rotate, thereby driving the workpiece to be plated to rotate around the central axis of the workpiece to be plated.

2. The independent autobiography system for coating according to claim 1, characterized in that: The transmission mechanism at least includes a transmission wheel and a transmission chain.

3. The independent autobiography system for coating according to claim 2, characterized in that: The transmission wheel is a sprocket, and the transmission chain is a chain or a belt; or the transmission wheel is a gear, and the transmission chain is a transmission gear.

4. The independent auto-transmission system for coating according to claim 1, characterized in that: At least a portion of the area around the outer wall of the frame body is provided with protruding blocks.

5. The independent autobiography system for coating according to claim 1, characterized in that: The second relative frames of the frame body are lifting frames arranged in parallel with each other.

6. The independent auto-transmission system for coating according to claim 1, characterized in that: The plurality of first through holes are arranged at equal intervals, or arranged at staggered intervals, or arranged in a matrix.

7. The independent auto-transmission system for coating according to any one of claims 1 to 6, characterized in that: The middle area is rectangular or trapezoidal; the workpiece to be plated is a polygonal column or a cylinder.

8. The independent auto-transmission system for coating according to claim 7, characterized in that: There are at least two workpieces to be plated, and the shapes of the at least two workpieces to be plated are the same or different.

9. A vapor deposition device, characterized in that: At least it comprises a coated umbrella stand, the coated umbrella stand is provided with a plurality of coated areas, the plurality of coated areas are arranged at equal intervals in the circumferential direction, and the coated areas are fixed with the independent autotransmission system for coating according to any one of claims 1-8.

10. A sputtering coating device, characterized in that: The method comprises at least a carrier platform, on which is arranged at least one independent auto-propagation system for coating as claimed in any one of claims 1 to 8.

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