Integrated vacuum system

Abstract

The utility model discloses an integrated vacuum system which is characterized in that the integrated vacuum system comprises a box body, a first vacuum pump and a second vacuum pump, the first vacuum pump and the second vacuum pump are arranged in the box body, the top of the second vacuum pump is connected with the bottom of the first vacuum pump through a mounting plate, and two sides of the box body are respectively provided with a cross beam. Two sides of the first vacuum pump are respectively connected with the cross beam through supporting legs; a connecting port is formed in the mounting plate, and an air inlet in the top of the second vacuum pump is communicated with an air outlet in the bottom of the first vacuum pump through the connecting port. According to the utility model, the convenience of installation and debugging is improved, and the vacuum effect is also improved.

Description

Technical Field

[0001] The utility model relates to a vacuum pump system, in particular to an integrated vacuum system. Background Art

[0002] In many vacuum application fields, relying solely on a vacuum pump cannot fully meet the actual process requirements. Different types of vacuum pumps can achieve completely different cost-effective ultimate vacuum or exhaust capacities. Different types of vacuum pumps also have different adaptability to different process media. Different vacuum processes also require various auxiliary systems to ensure that the vacuum pump or vacuum pump group can operate stably and reliably.

[0003] Among them, as in the prior art, the application number is: 202210470415.X, and the patent name is: A highly integrated vacuum integration system, which has the following shortcomings:

[0004] 1. The bottom fixing method is adopted. At the same time, it is restricted by the box body during installation and disassembly. When installing and disassembling, the vacuum pumps are installed or disassembled one by one, which is very inconvenient. At the same time, when installing the vacuum pump, it will also be restricted by the box body, which makes the installation inconvenient;

[0005] 2. The two vacuum pumps used are Roots vacuum pump and dry vacuum pump. The vacuuming effect of these two vacuum pumps is not very good, and it is difficult to meet the occasions that require a higher vacuum degree;

[0006] 3. Dust or working impurities are easily accumulated at the connection between the two vacuum pumps, resulting in a high maintenance rate and short service life of the vacuum pumps;

[0007] 4. The outlet and inlet positions of the two vacuum pumps need to be adjusted or aligned. Using pipes to connect them will increase the space occupied, resulting in a large equipment size and space occupation. Summary of the invention

[0008] The utility model aims to provide an integrated vacuum system, which improves the convenience of disassembly and assembly of the vacuum pump, prolongs its service life, and can also improve the vacuum efficiency and vacuum effect by using the structure.

[0009] To achieve the above object, the technical solution adopted by the utility model is: an integrated vacuum system, including a box body, a first vacuum pump and a second vacuum pump arranged in the box body, the top of the second vacuum pump is connected to the bottom of the first vacuum pump via a mounting plate, a beam is respectively arranged on both sides of the box body, and both sides of the first vacuum pump are respectively connected to the beam via supporting feet;

[0010] The mounting plate is provided with a connecting port, and the air inlet at the top of the second vacuum pump is connected to the air outlet at the bottom of the first vacuum pump through the connecting port.

[0011] In the above technical solution, at least one supporting foot extending outward is respectively provided on both sides of the first vacuum pump, and each supporting foot is respectively provided directly above the corresponding crossbeam;

[0012] An elastic buffer component is provided between the support foot and the cross beam, and the support foot is connected to the corresponding cross beam through the elastic buffer component via bolts;

[0013] And / or, the first vacuum pump and the second vacuum pump are arranged between the beams on both sides.

[0014] In the above technical solution, at least one nitrogen purge inlet and at least one nitrogen purge outlet are provided on the outer wall of the mounting plate and are connected to the connecting port;

[0015] A purge mechanism is provided in the box, and the purge mechanism includes a purge plate, and a purge channel and a reflux channel are provided in the purge plate, and the purge channel and the reflux channel are connected to a nitrogen source and a reflux source respectively;

[0016] The nitrogen purge inlet is connected to the purge channel via a pipeline, and the nitrogen purge outlet is connected to the reflux channel via a pipeline;

[0017] And / or, the nitrogen source delivers nitrogen into the connecting port through the purge channel, and the nitrogen refluxes into the reflux source from the nitrogen purge outlet and the reflux channel.

[0018] In the above technical solution, the box body includes a bracket and an outer cover installed outside the bracket;

[0019] The bracket includes two groups of stand frames and two cross beams arranged at intervals, the cross beams are arranged between the two groups of stand frames, the two ends of one cross beam are respectively connected to one side of the two groups of stand frames, and the two ends of another cross beam are respectively connected to the other side of the two groups of stand frames; the first vacuum pump and the second vacuum pump are arranged between the two groups of stand frames and the two groups of cross beams, the outer cover is arranged outside the first vacuum pump, the second vacuum pump and the bracket, the distance between the stand frames on both sides is greater than the length of the first vacuum pump and the second vacuum pump, and the distance between the two cross beams is greater than the width of the second vacuum pump;

[0020] And / or, a bottom plate is provided directly below each of the cross beams, and two ends of the bottom plate are respectively connected to the vertical frames on both sides;

[0021] And / or, each of the bottom plates is further provided with at least one vertical plate, and two ends of the vertical plate are respectively vertically connected to the bottom plate and the crossbeam;

[0022] And / or, at least one bottom support plate is further provided below the second vacuum pump, the two ends of the bottom support plate are respectively connected to the bottom plates at two sides, and the bottom of the second vacuum pump is close to or against the bottom support plate.

[0023] In the above technical solution, the first vacuum pump is a two-stage Roots vacuum pump, which includes a first Roots pump body having a first Roots pump body cavity therein, two first connecting shafts rotatably mounted in the first Roots pump body cavity and parallel to each other, and a first driving component driving the two first connecting shafts to rotate simultaneously, and two first Roots rotor components meshing with each other are arranged in the first Roots pump body cavity, and each of the first Roots rotor components is respectively mounted on one of the first connecting shafts;

[0024] A first partition is provided in the first Roots pump body cavity, and the first partition divides the first Roots pump body cavity into two independent first-stage first Roots pump body cavities and second-stage first Roots pump body cavities;

[0025] The first Roots rotor component comprises a first-stage first Roots rotor component and a second-stage first Roots rotor component which are arranged at intervals, the two first-stage first Roots rotor components are meshed in the first-stage first Roots pump body cavity, and the two second-stage first Roots rotor components are meshed in the second-stage first Roots pump body cavity;

[0026] And / or, the first Roots pump body is provided with a first air inlet, a first air outlet and a first connecting air channel, the first air inlet connects the first-stage first Roots pump body cavity with the top outer wall of the first Roots pump body, the first connecting air channel connects the bottom of the first-stage first Roots pump body cavity with the top of the second-stage first Roots pump body cavity, the first air outlet connects the bottom of the second-stage first Roots pump body cavity with the bottom outer wall of the first Roots pump body, and the bottom of the first air outlet is connected to the top of the connecting port;

[0027] And / or, when the first-stage first Roots rotor component rotates, the fluid entering from the first air inlet is sent into the second-stage first Roots pump body cavity through the first connecting air channel; when the second-stage first Roots rotor component rotates, the fluid sent into the second-stage first Roots pump body cavity by the first connecting air channel is sent into the connecting port.

[0028] In the above technical solution, the second vacuum pump is a hybrid vacuum pump, which includes a second pump body, a second driving component and at least two second connecting shafts parallel to each other, the second pump body is provided with a second Roots pump body cavity and a second screw pump body cavity which are independent of each other, a plurality of the second connecting shafts are rotatably installed in the second pump body, and the second driving component drives the plurality of the second connecting shafts to rotate simultaneously;

[0029] Two mutually meshing screw rotor components are arranged in the second screw pump body cavity, and each of the screw rotor components is respectively mounted on one of the second connecting shafts;

[0030] At least one second Roots rotor assembly is disposed in the second Roots pump body cavity, the second Roots rotor assembly comprises two second Roots rotor components meshing with each other, each of the second Roots rotor components is respectively mounted on one of the second connecting shafts;

[0031] And / or, the second pump body is provided with a second air inlet, a second air outlet and a second connecting air passage, the second air inlet connects the second Roots pump body cavity with the top outer wall of the second pump body, and the top of the second air inlet connects with the bottom of the connecting port; the second connecting air passage connects the second Roots pump body cavity with the second screw pump body cavity, and the second air outlet connects the second screw pump body cavity with the outer wall of the first pump body;

[0032] And / or, when the second Roots rotor assembly rotates, the fluid delivered from the connecting port to the second air inlet is delivered to the second connecting air channel, and when the screw rotor component rotates, the fluid delivered from the second connecting air channel to the second screw pump body cavity is discharged from the second air outlet.

[0033] In the above technical solution, the second Roots pump body cavity includes a first-stage second Roots pump body cavity and a second-stage second Roots pump body cavity which are independent of each other, and the second Roots rotor assembly is divided into two groups, and the two groups of the second Roots rotor assemblies are respectively installed in the first-stage second Roots pump body cavity and the second-stage second Roots pump body cavity;

[0034] The second air inlet is communicated with the top of the first-stage second Roots pump body cavity, and a middle connecting air passage is provided in the second pump body, which connects the bottom of the first-stage second Roots pump body cavity with the top of the second-stage second Roots pump body cavity.

[0035] In the above technical solution, there are two second connecting shafts, and the middle parts of the two second connecting shafts are rotatably connected to the second pump body;

[0036] Each of the second connecting shafts is provided with two second Roots rotor components which are spaced apart from each other;

[0037] And / or, there is a distance between the second connecting shaft end away from the second Roots pump body cavity and the second screw pump body cavity, one end of the screw rotor component is arranged close to the end surface of the second screw pump body cavity on the side of the second Roots pump body cavity, and there is a distance between the other end of the screw rotor component and the other end of the second screw pump body cavity.

[0038] In the above technical solution, there are three second connecting shafts, and the three second connecting shafts include a middle connecting shaft, a first side connecting shaft and a second side connecting shaft respectively arranged in parallel on both sides of the middle connecting shaft;

[0039] The two screw rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft;

[0040] The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly, the first-stage second Roots rotor assembly is arranged in the first-stage second Roots pump body cavity, the second-stage second Roots rotor assembly is arranged in the second-stage second Roots pump body cavity, the first-stage second Roots rotor assembly includes two first-stage second Roots rotor components, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor components;

[0041] The two first-stage second Roots rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft;

[0042] The two second-stage Roots rotor components are respectively mounted on the middle connecting shaft and the second side connecting shaft.

[0043] In the above technical solution, a notch communicating with the second connecting air channel is provided on the outer wall of the second pump body, and a sealing component for sealing the notch is installed on the second pump body;

[0044] And / or, a fluid processing component can be detachably installed in the second connecting airway at the notch. Due to the application of the above technical solution, the utility model has the following advantages compared with the prior art:

[0045] 1. In the utility model, two vacuum pumps are connected through a mounting plate, and a connecting hole is arranged on the mounting plate to connect the air outlets and air inlets of the two vacuum pumps. In this way, there is no need to adjust the air outlet positions of the two vacuum pumps, and the distance between the two vacuum pumps can be shortened, making the entire vacuum system flatter, reducing the volume of the vacuum system, and reducing space occupation;

[0046] 2. In the utility model, the first vacuum pump is directly connected to the crossbeam of the box through the supporting feet, so that the second vacuum pump is a suspended structure, which improves the convenience of installation. The two vacuum pumps can be assembled outside the box, and finally directly hoisted into the box and connected to the crossbeam, which improves the convenience of installation;

[0047] 3. In the utility model, an elastic buffer component is arranged between the supporting foot and the crossbeam, so that the vibration of the vacuum pump during operation can be buffered and absorbed, the vibration of the box itself can be reduced as much as possible, and the rigid collision of the vacuum system installation position can be prevented;

[0048] 4. The utility model is provided with a purge mechanism, which is used to purge the connection port of the mounting plate, so as to purge out dust and other debris accumulated in the connection port and part of dust and other debris accumulated in the second vacuum pump, thereby extending the service life of the vacuum pump, reducing the maintenance rate, and ensuring the stability of the use of the vacuum pump;

[0049] 5. The first vacuum pump in the utility model adopts a two-stage Roots vacuum pump, which has a stronger vacuuming effect, thereby improving the vacuuming effect and vacuum degree of the vacuum system;

[0050] 6. The second vacuum pump in the utility model adopts a hybrid vacuum pump, which includes a Roots pump and a screw pump, and uses the same driving component to drive the Roots pump and the screw pump to work at the same time, which can reduce the setting of driving components, save energy consumption, reduce costs, and further improve the vacuum effect and vacuum degree;

[0051] 7. The hybrid vacuum pump in the utility model can adopt a double-axis structure or a three-axis structure. Regardless of the double-axis structure or the three-axis structure, it can be driven by the same driving component at the same time, effectively ensuring the vacuuming effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 This is a schematic diagram of the structure of an integrated vacuum system according to a first embodiment of the utility model;

[0053] Figure 2 This is a schematic diagram of the bottom structure of the integrated vacuum system in the first embodiment of the utility model;

[0054] Figure 3 This is a half-section three-dimensional structural schematic diagram of the integrated vacuum system in the first embodiment of the present utility model;

[0055] Figure 4 It is a schematic diagram of a half-section structure of the purge plate in the first embodiment of the utility model;

[0056] Figure 5 It is a partial cross-sectional structural schematic diagram of the connection port of the mounting plate in the first embodiment of the utility model;

[0057] Figure 6 It is a cross-sectional structural schematic diagram of the first vacuum pump in the first embodiment of the utility model (the first Roots rotor component is not shown);

[0058] Figure 7 It is a structural schematic diagram of the first Roots rotor component and the first connecting shaft in the first embodiment of the utility model;

[0059] Figure 8 This is a schematic diagram of the end cross-sectional structure of the first Roots pump body of the first stage in the first embodiment of the utility model;

[0060] Fig. 9 It is a schematic diagram of the end cross-sectional structure of the second-stage first Roots pump body in the first embodiment of the utility model;

[0061] Fig.10 It is a cross-sectional structural diagram of the second-stage first Roots pump body in the first embodiment of the utility model from another perspective;

[0062] Fig.11 It is a structural schematic diagram of a second vacuum pump in one embodiment of the utility model (using a two-third connecting shaft structure);

[0063] Fig.12 yes Fig.11 A schematic cross-sectional structure diagram of ;

[0064] Fig.13 yes Fig.11 A partial enlarged view of the connection between the second connecting shaft and the screw rotor component;

[0065] Fig.14 It is a schematic diagram of the structure of the gas flow in the second vacuum pump in one embodiment of the utility model (using two second connecting shaft structures and a double Roots pump body cavity structure);

[0066] Fig.15 It is a schematic diagram of the installation structure of the second Roots rotor component and the second connecting shaft in one embodiment of the utility model (using two second connecting shaft structures);

[0067] Fig.16 It is a structural schematic diagram of the gas flow in the second vacuum pump in another embodiment of the utility model (using two second connecting shaft structures and a single Roots pump body cavity structure);

[0068] Fig.17 It is a structural schematic diagram of a second vacuum pump in another embodiment of the utility model (using a three-third connecting shaft structure);

[0069] Fig.18 yes Fig.17 A top view of

[0070] Fig.19 yes Fig.17 Schematic diagram of the cross-sectional structure of AA;

[0071] Fig. 20 yes Fig.18 Schematic diagram of the FF cross-sectional structure;

[0072] Fig.21 yes Fig.17 Schematic diagram of the cross-sectional structure of the middle BB;

[0073] Fig. 22 yes Fig.17 Schematic diagram of the cross-sectional structure of the CC;

[0074] Fig.23 yes Fig.17 Schematic diagram of the cross-sectional structure of DD;

[0075] Fig.24 yes Fig.17 Schematic diagram of the cross-sectional structure of EE;

[0076] Fig.25 It is a partially enlarged cross-sectional view of the second connecting air passage of the second vacuum pump in the utility model.

[0077] Among them: 1. Box body; 10. Crossbeam; 11. Support feet; 12. Elastic buffer components; 13. Positioning components; 14. Outer cover; 15. Stand; 16. Control panel; 17. Switch; 18. Bottom plate; 19. Stand; 101. Bottom support plate;

[0078] 2. Mounting plate; 21. Connecting port; 22. Nitrogen purge inlet; 23. Nitrogen purge outlet; 24. Purge plate; 25. Purge channel; 26. Reflux channel; 27. Pipeline;

[0079] 3. First vacuum pump; 31. First Roots pump body cavity; 310. First Roots pump body cavity of the first stage; 311. First Roots pump body cavity of the second stage; 32. First Roots pump body; 321. First Roots pump body of the first stage; 322. First Roots pump body of the second stage; 33. First connecting shaft; 34. First Roots rotor component; 340. First Roots rotor component of the first stage; 341. First Roots rotor component of the second stage; 35. First partition; 36. First air inlet; 37. First air outlet; 38. First connecting airway; 381. First connecting airway of the first stage; 382. First connecting airway of the second stage;

[0080] 6. Second vacuum pump; 61. Second pump body; 62. Second driving component; 63. Second connecting shaft; 64. Second Roots pump body cavity; 65. Second screw pump body cavity; 66. Screw rotor component; 67. Second Roots rotor component; 68. Middle connecting airway; 69. Second partition plate;

[0081] 610. Second Roots pump body; 611. Second screw pump body; 612. Connecting parts;

[0082] 621. second motor assembly; 622. gear;

[0083] 631, middle connecting shaft; 632, first side connecting shaft; 633, second side connecting shaft;

[0084] 641, first-stage second Roots pump body cavity; 642, second-stage second Roots pump body cavity;

[0085] 671, first-stage second Roots rotor component; 672, second-stage second Roots rotor component;

[0086] 681, first level middle connecting airway; 682, second level middle connecting airway;

[0087] 6101, first-stage second Roots pump body; 6102, second-stage second Roots pump body;

[0088] 81, second air inlet; 82, second air outlet; 83, second connecting air channel; 831, left second connecting air channel; 832, right second connecting air channel; 833, Roots connecting channel; 834, screw connecting channel;

[0089] 9. Sealing component; 91. Frame; 92. Sealing cover; 93. Connecting cavity; 94. Through groove. DETAILED DESCRIPTION

[0090] The utility model is further described below in conjunction with the accompanying drawings and embodiments:

[0091] Example 1: See Figure 1-25 As shown, an integrated vacuum system comprises a box body 1, a first vacuum pump 3 and a second vacuum pump 6 arranged in the box body 1, the top of the second vacuum pump 6 is connected to the bottom of the first vacuum pump 3 via a mounting plate 2, a crossbeam 10 is respectively arranged on both sides of the box body 1, and both sides of the first vacuum pump 3 are connected to the crossbeam 10 via supporting legs 11;

[0092] The mounting plate 2 is provided with a connecting port 21 , and the air inlet at the top of the second vacuum pump 6 is connected to the air outlet at the bottom of the first vacuum pump 3 through the connecting port 21 .

[0093] In this embodiment, the gas delivered by the first vacuum pump is sent into the connection port of the mounting plate, and then sent to the second vacuum pump through the connection port of the mounting plate, and then vacuumed again by the second vacuum pump. The vacuum effect is better after two vacuumings. In other words, the negative pressure generated during the operation of the second vacuum pump is transmitted to the first vacuum pump through the connection port, and then combined with the negative pressure generated by the first vacuum pump, the negative pressure at the air inlet of the first vacuum pump is greater, and the vacuum effect is better. In this way, the first vacuum pump and the second vacuum pump are directly connected through the mounting plate, and a connection port is opened on the mounting plate. The two ends of the connection port are respectively connected to the air outlet of the first vacuum pump and the air inlet of the second vacuum pump. In this way, no matter where the air outlet position of the first vacuum pump and the air inlet position of the second vacuum pump are, the airway connection of the two vacuum pumps can be realized, so that the entire vacuum system can be flatter, the size of the vacuum system can be smaller, and the space occupied can be effectively reduced. At the same time, the two vacuum pumps are connected through the supporting feet on the side of the first vacuum pump and the crossbeam of the box, so that the second vacuum pump is a suspended structure and its bottom does not directly rest against the bottom of the box, which makes it easy to adjust the position and levelness of the two vacuum pumps.

[0094] See also Figure 3 As shown, at least one supporting foot 11 extending outward is respectively provided on both sides of the first vacuum pump 3, and each supporting foot 11 is respectively provided directly above the corresponding cross beam 10; in this embodiment, two supporting feet 11 extending outward are respectively provided on the front and rear sides of the first vacuum pump 3, and two cross beams 10 are respectively provided on the front and rear sides of the first vacuum pump 3 and the second vacuum pump 6.

[0095] See also Figure 3 As shown, an elastic buffer component 12 is provided between the support foot 11 and the cross beam 10, and the support foot 11 is connected to the corresponding cross beam 10 through bolts passing through the elastic buffer component 12;

[0096] The first vacuum pump 3 and the second vacuum pump 6 are disposed between the cross beams 10 on both sides.

[0097] In this embodiment, the elastic buffer component is made of rubber, which plays a buffering role. In this way, when the two vacuum pumps generate vibration during operation, the elastic buffer component can buffer the vibration force, so that the vibration force is not transmitted to the box body as much as possible, and the vibration of the box body is prevented as much as possible, and the box body and the ground or the installation position of the box body are prevented from vibrating violently.

[0098] Furthermore, each crossbeam 10 is provided with a positioning component 13 matching the number of the corresponding elastic buffer components 12, and the middle part of the positioning component 13 is provided with a positioning groove penetrating the top and bottom of the positioning component 13, the elastic buffer component is placed in the positioning groove, and the top of the elastic buffer component is arranged above the top of the positioning groove, and the elastic buffer component is limited by the positioning groove, a screw hole is arranged on the crossbeam at the bottom of the positioning groove, a through hole is arranged on the support foot, and a through hole is also arranged on the elastic buffer component, the bottom of the bolt passes through the through hole and the through hole and the screw hole are screwed together, the support foot and the crossbeam are connected, and the elastic buffer component is limited, and the diameter of the through hole on the support foot will be slightly larger than the diameter of the bolt, but smaller than the diameter of the screw head at the top of the bolt. At the same time, when the elastic buffer component is used for a long time, after the elastic buffer component is pressed down, after it drops to a certain position, the bottom of the support foot will be against the positioning component, and it will be supported by the positioning component, playing a role of mechanical support and positioning.

[0099] See also Figure 1-3 As shown, the box body 1 includes a bracket and an outer cover 14 installed outside the bracket;

[0100] The bracket includes two groups of vertical frames 15 arranged at intervals and two horizontal beams 10 arranged at intervals, the horizontal beam 10 is arranged between the two groups of vertical frames 15, the two ends of one horizontal beam 10 are respectively connected to the front sides of the two groups of vertical frames 15, and the two ends of another horizontal beam 10 are respectively connected to the rear sides of the two groups of vertical frames 15; the first vacuum pump 3 and the second vacuum pump 6 are arranged between the two groups of vertical frames 15 and the two horizontal beams 10, the outer cover 14 is arranged on the outside of the first vacuum pump 3, the second vacuum pump 6 and the bracket, the distance between the vertical frames 15 on both sides is greater than the length of the first vacuum pump 3 and the second vacuum pump 6, and the distance between the two horizontal beams 10 is greater than the width of the second vacuum pump 6.

[0101] In this embodiment, since the distance between the two side frames is greater than the length of the first vacuum pump and the second vacuum pump, and the width between the two beams is greater than the width of the second vacuum pump, the first vacuum pump and the second vacuum pump are pre-assembled outside the box body, and are directly lowered from the top of the bracket by hoisting. The first vacuum pump and the second vacuum pump are located between the two beams and the two side frames, and the support feet on both sides are facing the beams. When the support feet are against the beams (each support foot is against the corresponding elastic buffer component), the support feet and the beams are connected by bolts, so that the first vacuum pump, the second vacuum pump and the bracket can be quickly installed and disassembled, which will not be limited by the size of the box body, and the first vacuum pump and the second vacuum pump can be quickly installed, disassembled and maintained. After the first vacuum pump, the second vacuum pump and other components are installed, the outer cover can be installed on the outside of the bracket, which is convenient and quick to install. Furthermore, a control panel 16 and a switch 17 are set on the outer cover 14 to be electrically connected to the first vacuum pump 3 and the second vacuum pump 6 for controlling the operation of the vacuum system.

[0102] See also Figure 2 , 3 As shown, a bottom plate 18 is provided directly below each of the cross beams 10, and both ends of the bottom plate 18 are respectively connected to the vertical frames 15 on both sides;

[0103] Each of the bottom plates 18 is also provided with at least one vertical plate 19, and the two ends of the vertical plate 19 are respectively vertically connected to the bottom plate 18 and the cross beam 10;

[0104] Among them, the arrangement of the bottom plate and the vertical plate can increase the strength of the entire bracket, increase the supporting strength of the beam, and effectively prevent the deformation of the beam.

[0105] See also Figure 2 As shown, at least one bottom support plate 101 is provided below the second vacuum pump 3 , and both ends of the bottom support plate 101 are respectively connected to the bottom plates 18 on both sides, and the bottom of the second vacuum pump 3 is close to or against the bottom support plate 101 .

[0106] In this embodiment, the bottom support plate may or may not be provided. Preferably, due to the provision of the elastic buffer component, in this embodiment, there is a gap between the bottom support plate and the bottom of the second vacuum pump, and a second elastic support component is provided between the bottom support plate and the second vacuum pump. The two ends of the second elastic support component are respectively in contact with the top surface of the bottom support plate and the bottom of the second vacuum pump. The cross beam is used to provide the main support for the first vacuum pump, and the addition of a bottom support plate can provide auxiliary support for the second vacuum pump, thereby ensuring the installation firmness and support strength of the two vacuum pumps and the box body.

[0107] For further information, see Figure 4 ,5 As shown, at least one nitrogen purge inlet 22 and at least one nitrogen purge outlet 23 are provided on the outer wall of the mounting plate 2 and are connected to the connecting port 21;

[0108] The box body is provided with a purge mechanism, the purge mechanism includes a purge plate 24, the purge plate 24 is provided with a purge channel 25 and a reflux channel 26, the purge channel 25 and the reflux channel 26 are connected to the nitrogen source and the reflux source respectively;

[0109] The nitrogen purge inlet 22 is connected to the purge channel 25 via a pipeline 27, and the nitrogen purge outlet 23 is connected to the reflux channel 26 via a pipeline 27;

[0110] The nitrogen source delivers nitrogen into the connecting port through the purge channel, and the nitrogen refluxes into the reflux source from the nitrogen purge outlet and the reflux channel.

[0111] In this embodiment, the nitrogen purge inlet, the nitrogen purge outlet and the connecting port are connected, and the nitrogen source delivers nitrogen into the connecting port. The dust and other debris in the connecting port during the vacuuming process can be purged by the nitrogen, and then blown out through the nitrogen purge outlet. At the same time, since the connecting port is connected to the first vacuum pump and the second vacuum pump, some dust, debris and the like in the first vacuum pump and the second vacuum pump at the connecting point can also be blown away, thereby extending the service life of the two vacuum pumps and ensuring the stability of the vacuum pump during operation (since the gap between the rotor components in the vacuum pump is small, and the gap between the rotor component and the inner wall of the vacuum pump is also relatively small, if there is a lot of dust or impurities, the rotor components and the pump casing of the vacuum pump will be damaged, resulting in poor operating stability, short service life and other problems).

[0112] Furthermore, by setting a purge plate, a purge channel and a reflux channel are set inside the purge plate, and the number of nitrogen purge inlets and nitrogen purge outlets will exceed one, and generally multiple ones will be arranged. Therefore, a corresponding number of holes are set on the purge plate and connected to the corresponding purge channels and reflux channels, which are respectively connected through pipelines to achieve synchronous nitrogen purge and synchronous reflux. Among them, the nitrogen source is used to provide nitrogen, and the reflux source can be a negative pressure mechanism. When the nitrogen source blows nitrogen into the connecting port for cleaning, the reflux source can synchronously suck away nitrogen and debris such as dust through negative pressure, thereby improving the cleaning efficiency and quality. When cleaning, cleaning is performed when the vacuum pump is not working. In this way, there is no need to disassemble the machine for cleaning.

[0113] Furthermore, a cooling chamber will be provided on the first vacuum pump and the second vacuum pump for cooling, and the purge channel and the reflux channel on the purge plate will also be cooled through the pipeline and the cooling chamber, thereby accelerating the cooling of the first vacuum pump and the second vacuum pump. More preferably, a solenoid valve can be provided on each pipeline to control the connectivity of the corresponding pipeline.

[0114] See also Figure 6-10 As shown, the first vacuum pump 3 is a two-stage Roots vacuum pump, which includes a first Roots pump body 32 having a first Roots pump body cavity 31 therein, two first connecting shafts 33 rotatably mounted in the first Roots pump body cavity 31 and parallel to each other, and a first driving component (the first driving component is not shown in the figure) driving the two first connecting shafts 33 to rotate simultaneously, and two first Roots rotor components 34 meshing with each other are arranged in the first Roots pump body cavity 31, and each of the first Roots rotor components 34 is respectively mounted on one of the first connecting shafts 33;

[0115] A first partition plate 35 is disposed in the first Roots pump body cavity 31, and the first partition plate 35 divides the first Roots pump body cavity 31 into two independent first-stage first Roots pump body cavity 310 and second-stage first Roots pump body cavity 311;

[0116] The first Roots rotor component 34 includes a first-stage first Roots rotor component 340 and a second-stage first Roots rotor component 341 which are arranged at intervals. The two first-stage first Roots rotor components 340 are meshed in the first-stage first Roots pump body cavity 310 , and the two second-stage first Roots rotor components 341 are meshed in the second-stage first Roots pump body cavity 311 .

[0117] The first Roots pump body 32 is provided with a first air inlet 36, a first air outlet 37 and a first connecting air passage 38, the first air inlet 36 connects the first-stage first Roots pump body cavity 310 with the top outer wall of the first Roots pump body 32, the first connecting air passage 38 connects the bottom of the first-stage first Roots pump body cavity 310 with the top of the second-stage first Roots pump body cavity 311, the first air outlet 37 connects the bottom of the second-stage first Roots pump body cavity 311 with the bottom outer wall of the first Roots pump body 32, and the bottom of the first air outlet 36 is connected to the top of the connecting port 21;

[0118] When the first-stage first Roots rotor component 340 rotates, the fluid entering the first-stage first Roots pump body cavity 310 through the first air inlet 37 is sent to the second-stage first Roots pump body cavity 311 through the first connecting air channel 38; when the second-stage first Roots rotor component 341 rotates, the fluid sent into the second-stage first Roots pump body cavity 311 by the first connecting air channel 38 is sent to the connecting port 21.

[0119] In this embodiment, taking the illustrated direction as an example, the first Roots pump body 32 includes a first-stage first Roots pump body 321 and a second-stage first Roots pump body 322 of a split structure, the first-stage first Roots pump body cavity 310 is arranged in the first-stage first Roots pump body 321, and its right end is communicated with the right end surface of the first-stage first Roots pump body 321, the second-stage first Roots pump body cavity 311 is arranged in the second-stage first Roots pump body 322, and its left end is communicated with the left end surface of the second-stage first Roots pump body 322, the first partition plate 35 is arranged between the first-stage first Roots pump body 321 and the second-stage first Roots pump body 322, the top of the first air inlet 36 is communicated with the top surface of the first-stage first Roots pump body 321, and the bottom of the first air inlet 36 is communicated with the top left side of the first-stage first Roots pump body cavity 310. The first connecting air channel 38 includes a first-level connecting air channel 381 and a second-level connecting air channel 382. One end of the first-level connecting air channel 381 is connected to the bottom of the first-level Roots pump body cavity 310, and the other end of the first-level connecting air channel 381 is connected to the right end surface of the first-level Roots pump body 321. The second-level first connecting air channel 382 is arranged in the second-level first Roots pump body 322 outside the second-level first Roots pump body cavity 311. One end of the second-level first connecting air channel 382 is connected to the left end surface of the second-level first Roots pump body 322, and is arranged opposite to the right end of the first-level connecting air channel 381, and is connected. The other end of the second-level first connecting air channel 382 is connected to the top of the second-level first Roots pump body cavity 311, the top of the first air outlet 37 is connected to the right side of the bottom of the second-level first Roots pump body cavity 311, and the bottom of the first air outlet 37 is connected to the bottom surface of the second-level first Roots pump body 322.

[0120] When the first vacuum pump is working, the two first connecting shafts rotate, one first connecting shaft rotates clockwise, and the other first connecting shaft rotates counterclockwise, which will drive the first Roots rotor components installed thereon to rotate in meshing. When rotating, the two first-stage first Roots rotor components send the gas entering the first-stage first Roots pump body cavity above them through the first air inlet to the bottom of the first-stage first Roots rotor component, and then send it to the second-stage first Roots pump body cavity above the second-stage first Roots rotor component through the first-stage first connecting air channel and the second-stage first connecting air channel in sequence. In this process, since the second-stage first Roots rotor component will also rotate at the same time, the gas above the second-stage first Roots rotor component will be sent to the second-stage first Roots pump body cavity below it, and then sent out through the first air outlet, and sent into the second vacuum pump through the connecting port.

[0121] See also Figure 11-25As shown, the second vacuum pump 6 is a hybrid vacuum pump, which includes a second pump body 61, a second driving component 62 and at least two second connecting shafts 63 parallel to each other. The second pump body 61 is provided with a second Roots pump body cavity 64 and a second screw pump body cavity 65 that are independent of each other. A plurality of second connecting shafts 63 are rotatably installed in the second pump body 61, and the second driving component 62 drives the plurality of second connecting shafts 63 to rotate simultaneously; wherein, the second driving component 62 is a combination of a second motor assembly 621 and a gear 622. Taking the illustrated direction as an example, a gear 622 is provided at the left end of each second connecting shaft 63, and the gears on the plurality of second connecting shafts are meshed with each other. The second motor assembly is connected to one of the gears, so that when one of the gears is driven to rotate, the plurality of second connecting shafts are synchronously driven to rotate through the gears.

[0122] Two mutually meshing screw rotor components 66 are disposed in the second screw pump body cavity 65, and each of the screw rotor components 66 is respectively mounted on one of the second connecting shafts 63;

[0123] At least one second Roots rotor assembly is disposed in the second Roots pump body cavity 64. The second Roots rotor assembly includes two second Roots rotor components 67 meshing with each other. Each of the second Roots rotor components 67 is mounted on one of the second connecting shafts 63.

[0124] The second pump body 61 is provided with a second air inlet 81, a second air outlet 82 and a second connecting air passage 83. The second air inlet 82 connects the second Roots pump body cavity 64 with the top outer wall of the second pump body 61, and the top of the second air inlet 81 is connected with the bottom of the connecting port 21; the second connecting air passage 83 connects the second Roots pump body cavity 64 with the second screw pump body cavity 65, and the second air outlet 82 connects the second screw pump body cavity 65 with the outer wall of the second pump body 61;

[0125] When the second Roots rotor assembly rotates, the fluid delivered from the connecting port 21 to the second air inlet 81 is delivered to the second connecting air channel 83 . When the screw rotor component 66 rotates, the fluid delivered from the second connecting air channel 83 to the second screw pump body cavity 65 is discharged from the second air outlet 82 .

[0126] In the utility model, the screw rotor component and the second Roots rotor component are installed on the connecting shaft driven by the same second driving component, and the mixed pump is a mixed pump composed of a Roots vacuum pump and a screw vacuum pump. The same second driving component is used to drive the Roots pump and the screw pump to work at the same time. At the same time, the gas sent from the first vacuum pump will pass through the Roots pump, then through the screw pump, and finally discharged. In the utility model, the screw vacuum pump and the Roots vacuum pump in the second vacuum pump are driven to work at the same time by the same second driving mechanism, which has lower energy consumption, lower cost, and smaller space occupation.

[0127] In other words, in the present invention, since the screw pump is at the very end of the gas flow, in this process, when the screw pump rotates, the pitch of the screw rotor component gradually decreases from left to right. When the screw pump is working, during the rotation of the two screw rotor components, it will generate negative pressure on the left side, and the negative pressure will be given to the Roots vacuum pump at its left end, that is, to the second Roots pump body cavity at the left end, thereby increasing the negative pressure of the second Roots pump body cavity. At the same time, when the two second Roots rotor components rotate, a larger negative pressure will be given to the second air inlet, and the negative pressure will be transmitted to the first vacuum pump through the connecting port, thereby further increasing the negative pressure vacuuming effect of the first vacuum pump. Therefore, in the present invention, it is equivalent to three vacuum pumps working in connection to form a vacuum system, and the vacuum effect is good.

[0128] Among them, in the present utility model, the second pump body 61 includes a second Roots pump body 610 and a second screw pump body 611 connected to each other, the second Roots pump body cavity 64 is arranged in the second Roots pump body 610, the second screw pump body cavity 65 is arranged in the second screw pump body 611, the second air inlet 81 is arranged on the second Roots pump body 610, the top of the second air inlet 81 is connected to the top surface of the second Roots pump body 610, and the bottom is connected to the top of the second Roots pump body cavity 64. One end of the second air outlet 82 is connected to the right end of the second screw pump body cavity 65, and the other end of the second air outlet 82 is connected to the outer wall of the second screw pump body 611. The second connecting air channel 83 includes a left second connecting air channel 831 and a right second connecting air channel 832. The left second connecting air channel 831 is arranged on the second Roots pump body 610, the left end of the left second connecting air channel 831 is communicated with the second Roots pump body cavity 64, the right end of the left second connecting air channel 831 is communicated with the right end surface of the second Roots pump body 610, and the right end of the left second connecting air channel 831 is communicated with the left end of the right second connecting air channel 832. The right second connecting air channel 832 is arranged on the second screw pump body 611, one end of the right second connecting air channel 832 is communicated with the left end of the second screw pump body cavity 65, the left end of the right second connecting air channel 832 is communicated with the left end surface of the second screw pump body 611, and the left end of the right second connecting air channel is communicated with the right end of the left second connecting air channel. In the utility model, when the second vacuum pump is working, the second Roots rotor assembly rotates, and the gas at the second air inlet is sent into the second Roots pump body cavity below the second Roots rotor assembly, and then enters the second screw pump body cavity through the left second connecting air channel and the right second connecting air channel, and then the gas is discharged from the second air outlet after the screw rotor component rotates. In other words, the negative pressure when the screw rotor component rotates is transmitted to the second Roots pump body cavity through the second connecting air channel, and then the negative pressure is transmitted to the second air inlet when the second Roots rotor assembly rotates, and the negative pressure is transmitted to the first vacuum pump through the connecting port. Thereby, high-efficiency and high-quality vacuuming of the vacuum system can be achieved.

[0129] In one embodiment, the second Roots rotor assembly is a group, so the Roots pump is a single-stage Roots pump, see Fig.16 In this embodiment, the vacuum system is equivalent to four vacuum pumps, the first vacuum pump is a two-stage Roots vacuum pump, which is equivalent to two independent vacuum pumps, and the second vacuum pump includes a single-stage Roots pump and a screw pump. Therefore, the vacuum system is equivalent to four vacuum pumps, and the vacuum effect is strong.

[0130] In another embodiment, see Figure 11-15As shown, the second Roots pump body cavity 64 includes a first-stage second Roots pump body cavity 641 and a second-stage second Roots pump body cavity 642 which are independent of each other, and the second Roots rotor assembly is composed of two groups, and the two groups of the second Roots rotor assembly are respectively installed in the first-stage second Roots pump body cavity 641 and the second-stage second Roots pump body cavity 642;

[0131] The second air inlet 81 is connected to the top of the first-stage second Roots pump body cavity 641 , and a middle connecting air passage 68 is provided in the second pump body 61 to connect the bottom of the first-stage second Roots pump body cavity 641 with the top of the second-stage second Roots pump body cavity 642 .

[0132] The second vacuum pump adopts a two-stage Roots pump, which has two structures. In one embodiment, the first structure is: Figure 11-15 As shown, there are two second connecting shafts 63, and the middle parts of the two second connecting shafts 63 are rotatably connected to the second pump body 61;

[0133] Two second Roots rotor components 67 are mounted on each of the second connecting shafts 63 and are spaced apart from each other.

[0134] In this embodiment, the Roots vacuum pump is a two-stage Roots vacuum pump, which has a similar structure to the first vacuum pump. In this embodiment, the second Roots pump body 610 includes a split structure of a first-stage second Roots pump body 6101 and a second-stage second Roots pump body 6102. The first-stage second Roots pump body cavity 641 is arranged in the first-stage second Roots pump body 6101, and its right end is communicated with the right end surface of the first-stage second Roots pump body 641. The second-stage second Roots pump body cavity 6102 is arranged in the second-stage second Roots pump body 6102, and its left end is communicated with the left end surface of the second-stage second Roots pump body 6102. A second partition plate 69 is arranged between the first-stage second Roots pump body cavity 641 and the second-stage second Roots pump body cavity 642. The second partition plate 69 is arranged between the first-stage second Roots pump body 6101 and the second-stage second Roots pump body 6102. The top of the second air inlet 81 is communicated with the top surface of the first-stage second Roots pump body 6101, and the bottom of the second air inlet 81 is communicated with the left side of the top of the first-stage second Roots pump body cavity 641. This structure is convenient for assembling and debugging the two-stage Roots pump.

[0135] The middle connecting air channel 68 includes a primary middle connecting air channel 681 and a secondary middle connecting air channel 682, one end of the primary middle connecting air channel 681 is communicated with the bottom of the primary second Roots pump body cavity 641, and the other end of the primary middle connecting air channel 681 is communicated with the right end face of the primary second Roots pump body 6101. The secondary middle connecting air channel 682 is arranged in the secondary second Roots pump body 6102 outside the secondary second Roots pump body cavity 642, one end of the secondary middle connecting air channel 682 is communicated with the left end face of the secondary second Roots pump body cavity 642, and is arranged opposite to the right end of the primary middle connecting air channel 681, and is communicated with. The other end of the secondary middle connecting air channel 682 is connected to the top of the secondary second Roots pump body cavity 642, the left end of the second connecting air channel 83 is connected to the bottom right side of the secondary second Roots pump body cavity 642, and the right end of the second connecting air channel 83 is connected to the left end of the second screw pump body cavity 65.

[0136] When working, the second Roots rotor assembly in the first-stage second Roots pump body cavity delivers the gas from the second air inlet to the middle connecting air channel, and then enters the top of the second-stage second Roots pump body cavity. The second Roots rotor assembly inside it delivers the gas from the second connecting air channel into the second screw pump body cavity, and then passes through the screw rotor component to the second air outlet for discharge.

[0137] At the same time, in this embodiment, the two sides of the middle of the connecting shaft are respectively connected to the left end of the first-stage second Roots pump body and the right end of the second-stage second Roots pump body through the bearing, and two second Roots rotor components and a screw rotor component are respectively installed on each connecting shaft. The second driving mechanism includes a second motor assembly and two gears, and the two gears are respectively connected to the left ends of the two connecting shafts, and the two gears are meshed. The second motor assembly is connected to a gear. When the two connecting shafts are driven to rotate by the second motor assembly at the same time, the gas can be drawn into the first-stage second Roots pump body cavity from the second air inlet, and then sent to the second-stage second Roots pump body cavity through the middle connecting airway, and then sent to the second screw pump body cavity, and finally discharged from the second air outlet. In this embodiment, the vacuum system is equivalent to 5 connected vacuum pumps, the first vacuum pump is a two-stage Roots vacuum pump, which is equivalent to two vacuum pumps, and the mixing pump includes a two-stage Roots vacuum pump and a screw vacuum pump, that is, the second vacuum pump is equivalent to three vacuum pumps. Therefore, the vacuuming effect of the entire vacuum system is good and the vacuuming quality is good.

[0138] In this embodiment, the two-stage Roots vacuum pump comprises a first-stage second Roots pump body and a second Roots pump body of a split structure, which facilitates the installation and debugging of the second Roots rotor component inside.

[0139] At the same time, in the utility model, there is a distance between the second coupling end away from the second Roots pump body cavity and the second screw pump body cavity, one end of the screw rotor component is arranged close to the end surface of the second screw pump body cavity on the side of the second Roots pump body cavity, and there is a distance between the other end of the screw rotor component and the other end of the second screw pump body cavity. That is, the right end of the coupling shaft and the right end of the screw rotor component are not in contact with the right end of the second screw pump body cavity, the right end of the coupling shaft is a suspended structure, and the right end of the screw rotor component is also a suspended structure, that is, the screw rotor component is a cantilever screw rotor component. In this structure, it is convenient to debug during the assembly process and adjust the distance between the two screw rotor components to ensure the meshing between the two, wherein the two screw rotor components will not contact, but there is only a micro gap between the two, and they will not rub against each other, thereby ensuring the vacuum quality.

[0140] The second vacuum pump adopts a two-stage Roots pump, which has two structures. In another embodiment, the second structure is: Figure 17-25 As shown, there are three second connecting shafts 63, and the three second connecting shafts 63 include a middle connecting shaft 631, a first side connecting shaft 632 and a second side connecting shaft 633 respectively arranged in parallel on both sides of the middle connecting shaft 631;

[0141] The two screw rotor components 66 are respectively mounted on the intermediate connecting shaft 631 and the first side connecting shaft 632;

[0142] The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly, the first-stage second Roots rotor assembly is arranged in the first-stage second Roots pump body cavity 641, the second-stage second Roots rotor assembly is arranged in the second-stage second Roots pump body cavity 642, the first-stage second Roots rotor assembly includes two first-stage second Roots rotor components 671, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor components 672;

[0143] The two first-stage second Roots rotor components 671 are respectively mounted on the intermediate connecting shaft 631 and the first side connecting shaft 632;

[0144] The two second-stage Roots rotor components 672 are respectively mounted on the middle connecting shaft 631 and the second side connecting shaft 633 .

[0145] In this embodiment, the second pump body 61 includes a second Roots pump body 610, a second screw pump body 611 and two sets of connecting parts 612. The first-stage second Roots pump body cavity 641 and the second-stage second Roots pump body cavity 642 are respectively arranged in the second Roots pump body 610. The left end of the first-stage second Roots pump body cavity 641 is connected to the left end face of the second Roots pump body 610, and the right end of the second-stage second Roots pump body cavity 642 is connected to the right end face of the second Roots pump body 6410. The two sets of connecting parts 612 are respectively located at both ends of the second Roots pump body 610, respectively sealing the ends of the first-stage second Roots pump body cavity 641 and the second-stage second Roots pump body cavity 642, and also used for the corresponding rotation support of the second connecting shaft. In this embodiment, the intermediate connecting shaft is inserted into the first-stage second Roots pump body cavity and the second-stage second Roots pump body cavity. At the same time, the connecting parts have holes for installing the second connecting shaft, so that the connecting shaft can be inserted into the second Roots pump body and the second screw pump body. Among them, the three second connecting shafts are arranged on the same plane, a gear is installed on the left end of each second connecting shaft, the three gears are meshed with each other, and the second motor assembly is connected to a gear, so that when the middle connecting shaft rotates, the rotation direction of the first side connecting shaft and the second side connecting shaft is the same, and the rotation direction of the middle connecting shaft is opposite to the rotation direction of the first side connecting shaft and the second side connecting shaft.

[0146] Taking the counterclockwise rotation of the middle connecting shaft as an example, the first side connecting shaft and the second side connecting shaft will rotate clockwise. Therefore, in this embodiment, the bottom of the middle connecting air channel connects the bottom cavity of the first-stage second Roots pump body with the bottom of the second-stage second Roots pump body cavity, and the second connecting air channel connects the top of the second-stage second Roots pump body cavity with the left end of the second screw pump body cavity. In this process, the two first-stage second Roots rotor components send the gas from the second air inlet downward into the middle connecting air channel, and then into the second-stage second Roots pump body cavity below the two second-stage second Roots rotor components. Since three second connecting shafts are used, the two second-stage second Roots rotor components will send the gas upward to the top of the second-stage second Roots pump body cavity, and then send it into the second screw pump body cavity through the second connecting air channel, and discharge the gas from the second air outlet through the screw rotor component.

[0147] In this embodiment, the first-stage second Roots pump body cavity and the second-stage second Roots pump body cavity are arranged in the same second Roots pump body, so that when processing the two Roots pump body cavities, the processing datum is unified and the processing precision is higher. At the same time, only two Roots rotor components and one screw rotor component are installed on the middle connecting shaft, only one Roots rotor component and one screw rotor component need to be installed on the first side connecting shaft, and only one Roots rotor component needs to be installed on the second side connecting shaft, so that during assembly and debugging, debugging is more convenient, thereby ensuring the accuracy and quality of assembly, and further ensuring the vacuum pumping effect and stability.

[0148] In the utility model, the second vacuum pump adopts a direct connection and combination of a Roots vacuum pump and a screw vacuum pump, and is driven by the same second driving mechanism, so that the Roots vacuum pump can be used to pressurize the screw vacuum pump first, thereby improving the vacuuming efficiency and effect. At the same time, the Roots pump in the second vacuum pump adopts a two-stage Roots vacuum pump, so that each stage will produce compression, and the heat will not be concentrated at the second air outlet of the screw pump, which can effectively prevent the exhaust temperature from being too high and causing the hydrocarbon mixture to coke and block, ensure the smoothness of vacuuming, and also prevent the screw pump from being damaged, reduce the maintenance rate, and extend the service life; at the same time, the second vacuum pump adopts a two-stage Roots vacuum pump to evacuate air first, which can effectively prevent dust and other impurities from entering the screw pump, prevent powder jamming, blockage and other phenomena, reduce the maintenance rate, and extend the service life. Furthermore, since the first vacuum pump also adopts a two-stage Roots vacuum pump, dust and other impurities are further separated to a limited extent, and the connecting port is purged by a purge mechanism, so as to purge the dust as much as possible, reduce the occurrence of blockages, reduce the maintenance rate, and extend the service life.

[0149] Also, see Fig.17 , 20 As shown in 25, a second vacuum pump with a three-axis structure is used. A notch is provided on the outer wall of the second pump body 61, which is connected to the second connecting air channel 83. A sealing component 9 is installed on the second pump body 61 to seal the notch. A fluid processing component (not shown in the figure) is also detachably installed in the second connecting air channel 83 at the notch. In this way, the second connecting air channel can connect the secondary second Roots pump body cavity with the second screw pump body cavity.

[0150] In this embodiment, the second connecting air channel 83 includes a Roots connecting channel 833 and a screw connecting channel 834. The bottom of the Roots connecting channel 833 is connected to the top of the secondary second Roots pump body cavity 642, and the top of the Roots connecting channel 833 is connected to the top of the second Roots pump body 610, and is arranged close to the second screw pump body 611. The bottom of the screw connecting channel 834 is connected to the second screw pump body cavity 65, and the top of the screw connecting channel 824 is connected to the top of the connecting component 612, so that the Roots connecting channel 833 and the top of the screw connecting channel 834 constitute the gap.

[0151] Among them, the sealing component 9 includes a frame 91 and a sealing cover 92. The frame 91 is a hollow structure with an opening at the top. A connecting cavity 93 is provided at the top of the frame 91. Two through grooves 94 are provided on the bottom surface of the frame 91 to communicate with the connecting cavity 93. The two through grooves 94 are respectively arranged opposite to the top 833 of the Roots connecting channel and the top of the screw connecting channel 834. The two ends of the frame are respectively installed on the top of the second Roots pump body and the connecting component, so that the two through grooves are respectively against the top of the Roots connecting channel and the screw connecting channel, so that the gas delivered in the Roots connecting channel will enter the connecting cavity through the corresponding through grooves, and the sealing cover will seal the top of the connecting cavity. In this way, the gas delivered from the secondary second Roots pump body cavity passes through the Roots connecting channel and the corresponding through groove into the connecting cavity, and then passes through the connecting cavity from another through groove into the screw connecting channel, thereby entering the second screw pump body cavity, so that the Roots connecting channel, the screw connecting channel and the connecting cavity constitute a complete second connecting airway. In this way, the operator can directly open the sealing cover and the frame to expose the Roots connection channel and the screw connection channel. The operator can observe the internal situation through the corresponding Roots connection channel and the screw connection channel, and can perform a simple inspection without disassembling the pump body, and then perform targeted disassembly and maintenance. There is no need to disassemble the second pump body for inspection, which improves the convenience of subsequent inspection. In addition, when assembling and debugging the mixing pump, the internal situation can also be observed through the Roots connection channel and the screw connection channel, and a caliper can be inserted into the interior to check the assembly clearance, which is convenient for debugging.

[0152] Furthermore, a filter screen can be arranged in the through groove to filter dust and other debris in the Roots connecting channel and the screw connecting channel. At the same time, during the assembly process, it can also prevent debris from entering the corresponding secondary Roots pump body cavity or the screw pump body cavity through the through groove.

[0153] Furthermore, a fluid treatment component (not shown in the figure of the fluid treatment component) can be detachably installed in the second connecting airway at the notch. Among them, the fluid treatment component can be directly placed in the connecting cavity to treat the fluid flowing through the second connecting airway. Among them, the fluid treatment component can be a filter, an alkali bag, a cooler or a heater. The filter can be used to filter dust and other debris flowing through the second connecting airway, and the alkali bag is used for the adsorption of water vapor to prevent the adjacent screw rotor components or the second screw pump body cavity from being blocked after the dust and water vapor are mixed. If the temperature of the secondary second Roots pump body cavity sent into the second screw pump body cavity is too high, a cooler can be set to cool the gas to prevent the coking of hydrocarbon mixtures. If the temperature of the secondary second Roots pump body cavity sent into the second screw pump body cavity is too low, the temperature of the gas entering the second screw pump body cavity is too low, and the problem of condensed water is prone to occur, so that dust and condensed water mix and block the second screw pump body cavity, then a heater can be used to heat the gas to prevent the occurrence of condensation. Of course, there are other situations, and you can choose according to different construction environments. This is scalable and has a wider range of applications. It can effectively ensure the vacuum effect of the mixing pump, extend its service life, and reduce the maintenance rate.

[0154] In the description of the present invention, it should be understood that the terms "upper", "lower", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined.

[0155] In the present utility model, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix" and the like should be understood in a broad sense, for example, it can be a fixed connection, or a detachable connection, or an integral one; it can be a mechanical connection, or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, for example, the two can form a mechanical abutment or abutment connection through abutment, contact, etc., the two can also be directly hung or hung through an intermediate medium, etc., or it can be the internal connection of the two elements or the interaction relationship between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present utility model can be understood according to the specific circumstances.

Claims

1. An integrated vacuum system, characterized in that: It comprises a box body, a first vacuum pump and a second vacuum pump arranged in the box body, the top of the second vacuum pump is connected to the bottom of the first vacuum pump via a mounting plate, two sides of the box body are respectively provided with a crossbeam, and two sides of the first vacuum pump are respectively connected to the crossbeam via supporting legs; The mounting plate is provided with a connecting port, and the air inlet at the top of the second vacuum pump is connected to the air outlet at the bottom of the first vacuum pump through the connecting port.

2. The integrated vacuum system according to claim 1, characterized in that: At least one supporting foot extending outward is respectively disposed on both sides of the first vacuum pump, and each supporting foot is respectively disposed directly above the corresponding crossbeam; An elastic buffer component is provided between the supporting foot and the cross beam, and the supporting foot is connected to the corresponding cross beam through the elastic buffer component via bolts; And / or, the first vacuum pump and the second vacuum pump are arranged between the beams on both sides.

3. The integrated vacuum system according to claim 1, characterized in that: At least one nitrogen purge inlet and at least one nitrogen purge outlet are provided on the outer wall of the mounting plate and are connected to the connecting port; A purge mechanism is provided in the box, and the purge mechanism includes a purge plate, and a purge channel and a reflux channel are provided in the purge plate, and the purge channel and the reflux channel are connected to a nitrogen source and a reflux source respectively; The nitrogen purge inlet is connected to the purge channel via a pipeline, and the nitrogen purge outlet is connected to the reflux channel via a pipeline; And / or, the nitrogen source delivers nitrogen into the connecting port through the purge channel, and the nitrogen refluxes into the reflux source from the nitrogen purge outlet and the reflux channel.

4. The integrated vacuum system according to claim 1, characterized in that: The box body includes a bracket and an outer cover installed outside the bracket; The bracket includes two groups of stand frames and two cross beams arranged at intervals, the cross beams are arranged between the two groups of stand frames, the two ends of one cross beam are respectively connected to one side of the two groups of stand frames, and the two ends of another cross beam are respectively connected to the other side of the two groups of stand frames; the first vacuum pump and the second vacuum pump are arranged between the two groups of stand frames and the two groups of cross beams, the outer cover is arranged outside the first vacuum pump, the second vacuum pump and the bracket, the distance between the stand frames on both sides is greater than the length of the first vacuum pump and the second vacuum pump, and the distance between the two cross beams is greater than the width of the second vacuum pump; And / or, a bottom plate is provided directly below each of the cross beams, and two ends of the bottom plate are respectively connected to the vertical frames on both sides; And / or, each of the bottom plates is further provided with at least one vertical plate, and two ends of the vertical plate are respectively vertically connected to the bottom plate and the crossbeam; And / or, at least one bottom support plate is provided below the second vacuum pump, two ends of the bottom support plate are respectively connected to the bottom plates on both sides, and the bottom of the second vacuum pump is close to or against the bottom support plate.

5. The integrated vacuum system according to claim 1, characterized in that: The first vacuum pump is a two-stage Roots vacuum pump, comprising a first Roots pump body having a first Roots pump body cavity therein, two first connecting shafts rotatably mounted in the first Roots pump body cavity and parallel to each other, and a first driving component driving the two first connecting shafts to rotate simultaneously, two first Roots rotor components meshing with each other are arranged in the first Roots pump body cavity, and each of the first Roots rotor components is respectively mounted on one of the first connecting shafts; A first partition is provided in the first Roots pump body cavity, and the first partition divides the first Roots pump body cavity into two independent first-stage first Roots pump body cavities and second-stage first Roots pump body cavities; The first Roots rotor component comprises a first-stage first Roots rotor component and a second-stage first Roots rotor component which are arranged at intervals, the two first-stage first Roots rotor components are meshed in the first-stage first Roots pump body cavity, and the two second-stage first Roots rotor components are meshed in the second-stage first Roots pump body cavity; And / or, the first Roots pump body is provided with a first air inlet, a first air outlet and a first connecting air channel, the first air inlet connects the first-stage first Roots pump body cavity with the top outer wall of the first Roots pump body, the first connecting air channel connects the bottom of the first-stage first Roots pump body cavity with the top of the second-stage first Roots pump body cavity, the first air outlet connects the bottom of the second-stage first Roots pump body cavity with the bottom outer wall of the first Roots pump body, and the bottom of the first air outlet is connected to the top of the connecting port; And / or, when the first-stage first Roots rotor component rotates, the fluid entering from the first air inlet is sent into the second-stage first Roots pump body cavity through the first connecting air channel; when the second-stage first Roots rotor component rotates, the fluid sent into the second-stage first Roots pump body cavity by the first connecting air channel is sent into the connecting port.

6. The integrated vacuum system according to claim 1, characterized in that: The second vacuum pump is a hybrid vacuum pump, comprising a second pump body, a second driving component and at least two second connecting shafts parallel to each other, wherein the second pump body is provided with a second Roots pump body cavity and a second screw pump body cavity which are independent of each other, a plurality of the second connecting shafts are rotatably installed in the second pump body, and the second driving component drives the plurality of the second connecting shafts to rotate simultaneously; Two mutually meshing screw rotor components are arranged in the second screw pump body cavity, and each of the screw rotor components is respectively mounted on one of the second connecting shafts; At least one second Roots rotor assembly is disposed in the second Roots pump body cavity, the second Roots rotor assembly comprises two second Roots rotor components meshing with each other, each of the second Roots rotor components is respectively mounted on one of the second connecting shafts; And / or, the second pump body is provided with a second air inlet, a second air outlet and a second connecting air channel, the second air inlet connects the second Roots pump body cavity with the top outer wall of the second pump body, and the top of the second air inlet connects with the bottom of the connecting port; the second connecting air channel connects the second Roots pump body cavity with the second screw pump body cavity, and the second air outlet connects the second screw pump body cavity with the outer wall of the second pump body; And / or, when the second Roots rotor assembly rotates, the fluid delivered from the connecting port to the second air inlet is delivered to the second connecting air channel, and when the screw rotor component rotates, the fluid delivered from the second connecting air channel to the second screw pump body cavity is discharged from the second air outlet.

7. The integrated vacuum system according to claim 6, characterized in that: The second Roots pump body cavity comprises a first-stage second Roots pump body cavity and a second-stage second Roots pump body cavity which are independent of each other, and the second Roots rotor assembly comprises two groups, and the two groups of the second Roots rotor assemblies are respectively installed in the first-stage second Roots pump body cavity and the second-stage second Roots pump body cavity; The second air inlet is communicated with the top of the first-stage second Roots pump body cavity, and a middle connecting air passage is provided in the second pump body, which connects the bottom of the first-stage second Roots pump body cavity with the top of the second-stage second Roots pump body cavity.

8. The integrated vacuum system according to claim 7, characterized in that: There are two second connecting shafts, and the middle parts of the two second connecting shafts are rotatably connected to the second pump body; Each of the second connecting shafts is provided with two second Roots rotor components which are spaced apart from each other; And / or, there is a distance between the second connecting shaft end away from the second Roots pump body cavity and the second screw pump body cavity, one end of the screw rotor component is arranged close to the end surface of the second screw pump body cavity on the side of the second Roots pump body cavity, and there is a distance between the other end of the screw rotor component and the other end of the second screw pump body cavity.

9. The integrated vacuum system according to claim 7, characterized in that: There are three second connecting shafts, and the three second connecting shafts include a middle connecting shaft, a first side connecting shaft and a second side connecting shaft respectively arranged in parallel on both sides of the middle connecting shaft; The two screw rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft; The second Roots rotor assembly includes a first-stage second Roots rotor assembly and a second-stage second Roots rotor assembly, the first-stage second Roots rotor assembly is arranged in the first-stage second Roots pump body cavity, the second-stage second Roots rotor assembly is arranged in the second-stage second Roots pump body cavity, the first-stage second Roots rotor assembly includes two first-stage second Roots rotor components, and the second-stage second Roots rotor assembly includes two second-stage second Roots rotor components; The two first-stage second Roots rotor components are respectively mounted on the intermediate connecting shaft and the first side connecting shaft; The two second-stage Roots rotor components are respectively mounted on the middle connecting shaft and the second side connecting shaft.

10. The integrated vacuum system according to claim 6, characterized in that: A notch communicating with the second connecting air passage is provided on the outer wall of the second pump body, and a sealing component for sealing the notch is installed on the second pump body; And / or, a fluid processing component may be detachably installed in the second connecting air passage at the notch.

Images