Electrochemical inertia sensor based on planar interdigital electrode structure
An inertial sensor and interdigital electrode technology, applied in the field of inertial sensing, to achieve the effects of simplifying the manufacturing process, eliminating the packaging process, and widening the application range
Patent Information
- Authority / Receiving Office
- CN · China
- Current Assignee / Owner
- Publication Date
- 2016-09-21
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
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Abstract
Description
technical field
[0001] The invention relates to the technical field of inertial sensing, in particular to an electrochemical inertial sensor with a planar interdigital electrode structure. Background technique
[0002] Inertial sensors are sensors that detect acceleration, tilt, shock, vibration, rotation, and multi-degree-of-freedom motion, including linear and angular acceleration sensors, and have important applications in the fields of navigation and positioning, motion control, and vibration measurement. Inertial sensors have always been the focus of research in the field of inertial technology in various countries, especially the use of various new materials and technologies in inertial sensors.
[0003] The mass-spring-damper resonant system is the simplest and commonly used inertial measurement system. Through a suitable electromechanical transducer device, the displacement, velocity and acceleration of the inertial mass body relative to the fixed frame can be conver...
Examples
Embodiment
[0039] see Figure 5 and Figure 6 As shown, the electrochemical inertial sensor of the planar interdigitated electrode structure described in this embodiment includes a U-shaped housing 2, an elastic rubber film 3, an interdigitated electrode plate composed of an interdigitated electrode 1 and a substrate 6, and an internal flow channel. The sensitive liquid contained; the interdigitated electrode plate is an insulating flat plate with two pairs of interdigitated electrodes symmetrically arranged on the surface, and the interdigitated electrodes are used as two pairs of cathode / anode electrodes for electrochemical reactions; the sensitive liquid is the solution ion in the cathode Electrolyte in which a reversible oxidation / reduction reaction occurs between the / anode and the electrode. The U-shaped housing 2 and the interdigitated electrode plates jointly form a channel for sensitive liquid, both ends of the channel are sealed by elastic rubber membranes, and the sensitive l...