A new type of temporary storage platform for silicon wafer edge removal machine

Abstract

The present invention provides a novel temporary storage platform for a silicon wafer edge removal machine, comprising a mounting seat and a tabletop, wherein the mounting seat is fixedly mounted on the tabletop of the edge removal machine; the support platform is mounted above the mounting seat by means of lifting columns, wherein the lifting columns are multiple and arranged at equal intervals, and the height and levelness of the tabletop are adjusted by means of the multiple lifting columns. The novel temporary storage platform for the silicon wafer edge removal machine described in the present invention can display the pressure values ​​at different positions of the temporary storage platform when the suction cup absorbs the silicon wafer, and the inclination angle of the temporary storage platform can be adjusted according to the pressure values, so that the adjustment process is visualized and digitized, and the adjustment can also be made more accurate.

Description

Technical Field

[0001] The invention belongs to the technical field of temporary storage platforms for silicon wafer edge removal machines, and in particular relates to a novel temporary storage platform for silicon wafer edge removal machines. Background Art

[0002] Working principle of the temporary storage table of the edge removal machine: the wafer-taking robot moves the silicon wafer from the parameter finder to the temporary storage table, and then the suction cup sucks the silicon wafer on the temporary storage table away. Because different edge removal processes require different suction cups to match them, the edge removal machine needs to replace the suction cups frequently. After replacing the suction cups, it is necessary to readjust the position and horizontal inclination of the temporary storage table so that the suction cups are concentric and relatively parallel to the temporary storage table to avoid uneven force when sucking the silicon wafer, crushing the silicon wafer or causing unstable edge removal. The existing temporary storage table cannot adjust the position and horizontal inclination. Summary of the invention

[0003] In view of this, the present invention aims to provide a novel temporary storage table for a silicon wafer edge removal machine to solve the problem that the existing temporary storage table cannot adjust the position and horizontal inclination angle.

[0004] To achieve the above object, the technical solution of the present invention is achieved as follows:

[0005] A novel temporary storage table for a silicon wafer edge removal machine comprises a mounting seat and a table plate, wherein the mounting seat is fixedly mounted on the table surface of the edge removal machine;

[0006] The support platform is installed above the mounting seat through lifting columns. There are multiple lifting columns that are arranged at equal intervals. The height and levelness of the platform can be adjusted through the multiple lifting columns.

[0007] Furthermore, the mounting seat includes a bottom plate and a middle plate, and the bottom plate is fixedly mounted on the edge removal machine table through a fixing member;

[0008] The middle plate is installed above the bottom plate through a support member, and the lifting column is installed on the middle plate.

[0009] Furthermore, the lifting column is an adjusting stud, and the adjusting stud is a double-headed stud, the upper and lower threads of the double-headed stud are arranged in opposite directions, and threaded holes corresponding to the adjusting stud are opened on the middle plate and the table plate.

[0010] Furthermore, the number of the adjusting studs is three, which are arranged at equal intervals at the bottom of the platform.

[0011] Furthermore, the support member is a pressure sensor, the number of which is the same as the number of the adjusting studs, and the pressure sensors are arranged directly below the adjusting studs. The pressure sensors are used to measure pressure values ​​at different positions when the table plate is working.

[0012] Furthermore, the fixing member is a fastening bolt;

[0013] The base plate is provided with transverse strip holes corresponding to the fastening bolts and used to adjust the transverse position of the base plate. The table top of the deeding machine is provided with longitudinal strip holes corresponding to the fastening bolts and used to adjust the longitudinal position of the base plate. The transverse strip holes are perpendicular to the longitudinal strip holes. The fastening bolts penetrate the base plate and the table top of the deeding machine and are threadedly connected with the locking nuts arranged under the table top of the deeding machine.

[0014] Furthermore, a tightening screw is correspondingly provided on the bottom plate, and a threaded hole corresponding to the tightening screw is opened on the bottom plate. The lower end of the tightening screw abuts against the upper surface of the deburring machine table to prevent relative movement between the bottom plate and the deburring machine table.

[0015] Compared with the prior art, the novel temporary storage platform of the silicon wafer edge removal machine described in the present invention has the following advantages:

[0016] The novel temporary storage table of the silicon wafer de-edging machine described in the present invention can display the pressure values ​​at different positions of the temporary storage table when the suction cup absorbs the silicon wafer. The inclination angle of the temporary storage table can be adjusted according to the pressure values, so that the adjustment process is visualized and digitized, and the adjustment can also be made more accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the accompanying drawings:

[0018] Figure 1 This is an overall structural diagram of the temporary storage station according to an embodiment of the present invention;

[0019] Figure 2 This is a bottom structural diagram of the temporary storage table described in an embodiment of the present invention.

[0020] Description of reference numerals:

[0021] 1. Suction cup; 2. Table; 3. Adjustment stud; 4. Middle plate; 5. Pressure sensor; 6. Jack screw; 7. Fastening bolt; 8. Lock nut; 9. Deburring machine table; 91. Longitudinal strip hole; 10. Bottom plate. DETAILED DESCRIPTION

[0022] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0023] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and the like are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, features defined as "first", "second", and the like may explicitly or implicitly include one or more of the features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0024] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.

[0025] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with embodiments.

[0026] like Figure 1 As shown, a novel temporary storage table for a silicon wafer edge removal machine comprises a mounting seat and a table plate 2, wherein the mounting seat is fixedly mounted on a table surface 9 of the edge removal machine;

[0027] The support platform is installed above the mounting seat through lifting columns. There are multiple lifting columns that are arranged at equal intervals. The height and levelness of the platform 2 are adjusted through the multiple lifting columns.

[0028] The mounting base includes a bottom plate 10 and a middle plate 4 . The bottom plate 10 is fixedly mounted to the edge removal machine table 9 via a fixing member. The middle plate 4 is mounted above the bottom plate 10 via a supporting member, and the lifting column is mounted on the middle plate 4 .

[0029] The lifting column is an adjusting stud 3 , which is a double-headed stud. The upper and lower threads of the double-headed stud are arranged in opposite directions. The middle plate 4 and the table plate 2 are provided with threaded holes corresponding to the adjusting stud 3 .

[0030] The number of the adjusting studs 3 is three, which are arranged at equal intervals at the bottom of the table 2. The supporting member is a pressure sensor 5, the number of which is the same as the number of the adjusting studs 3, and is arranged directly below the adjusting studs 3. The pressure sensor 5 is used to measure the pressure values ​​at different positions of the table 2 when it is working. It should be noted that the pressure sensor 5 of the present application adopts the existing integrated detection and display pressure sensor 5, but the present application is not limited to this type of pressure sensor 5, and any pressure detection element with the same purpose as the present application is applicable to the present application.

[0031] like Figure 1 , Figure 2 As shown, the fixing part is a fastening bolt 7; the base plate 10 is provided with a transverse strip hole corresponding to the fastening bolt 7 and used to adjust the transverse position of the base plate 10, and the table top of the deeding machine is provided with a longitudinal strip hole 91 corresponding to the fastening bolt 7 and used to adjust the longitudinal position of the base plate 10, the transverse strip hole is perpendicular to the longitudinal strip hole 91, and the fastening bolt 7 passes through the base plate 10 and the deeding machine table top 9 and is threadedly connected with the locking nut 8 arranged under the deeding machine table top 9.

[0032] The bottom plate 10 is also provided with a corresponding tightening screw 6, and a threaded hole corresponding to the tightening screw 6 is opened on the bottom plate 10. The lower end of the tightening screw 6 abuts against the upper surface of the deburring machine table 9 to prevent the bottom plate 10 and the deburring machine table 9 from moving relative to each other.

[0033] When the temporary storage table is installed on the edge removal machine table 9, because the strip holes on the temporary storage table and the edge removal machine table 9 are placed perpendicular to each other, the temporary storage table can move freely in the X and Y directions relative to the edge removal machine table 9, and rotate in the R direction with the fastening bolt 7 as the axis. When the temporary storage table surface is adjusted to be concentric with the suction cup 1 and the notch on the temporary storage table surface is facing the direction of the film-taking robot, tighten the fastening bolt 7 and the locking nut 8 to firmly fasten the edge removal machine table 9 and the temporary storage table bottom plate 10 together. At the same time, tighten the set screw to prevent the temporary storage table and the edge removal machine table 9 from relative movement.

[0034] The three micro pressure sensors 5 between the middle plate 4 and the bottom plate 10 can measure the dynamic and static tension and compression directions. When the suction cup 1 is pressed on the temporary storage table surface to absorb the silicon wafer, the three pressure sensors 5 can display the pressure in three directions. According to the pressure, by rotating the three adjustment studs 3 (the three adjustment studs 3 can be adjusted independently), adjust the level of the temporary storage table surface so that the temporary storage table and the suction cup 1 are relatively parallel (the pressure values ​​displayed by the three force sensors are equal and within the standard range). If the pressure value displayed by the pressure sensor 5 is too large, rotate the adjustment studs 3 to adjust the temporary storage table surface downward. Otherwise, adjust it upward.

[0035] The temporary storage table of the present application overcomes the drawback that the existing temporary storage tables are not convenient for horizontal and vertical adjustment. The pressure display function is added, and the horizontal adjustment method is optimized to make the parallelism adjustment between the temporary storage table and the suction cup more accurate. The horizontal and vertical adjustment functions are added to facilitate the concentric adjustment of the temporary storage table and the suction cup. The invention has a simple structure, is easy to manufacture, has a low failure rate, is safe and reliable, and is easy to operate.

[0036] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A novel temporary storage station for a silicon wafer edge removal machine, characterized in that: It includes a mounting seat and a table plate, wherein the mounting seat is fixedly mounted on the table surface of the edge removal machine; a support table is installed above the mounting seat through a lifting column; The lifting columns are multiple and arranged at equal intervals, and the height and levelness of the table plate are adjusted by the multiple lifting columns; the mounting base includes a bottom plate and a middle plate, and the bottom plate is fixedly mounted on the edge removal machine table through a fixing member; the middle plate is mounted above the bottom plate through a supporting member, and the lifting columns are mounted on the middle plate; The lifting column is an adjusting stud, and the adjusting stud is a double-headed stud, the upper and lower ends of the double-headed stud have threads arranged in opposite directions, and threaded holes corresponding to the adjusting stud are provided on the middle plate and the table plate; The fixing piece is a fastening bolt; the bottom plate is provided with a transverse strip hole corresponding to the fastening bolt and used to adjust the transverse position of the bottom plate, the table top of the deeding machine is provided with a longitudinal strip hole corresponding to the fastening bolt and used to adjust the longitudinal position of the bottom plate, the transverse strip hole is perpendicular to the longitudinal strip hole, the fastening bolt passes through the bottom plate and the table top of the deeding machine and is threadedly connected with a locking nut arranged under the table top of the deeding machine; The number of the adjusting studs is three, which are arranged at equal intervals at the bottom of the table; The support member is a pressure sensor. The number of the pressure sensors is the same as the number of the adjusting studs, and the pressure sensors are arranged directly below the adjusting studs. The pressure sensors are used to measure the pressure values ​​at different positions when the table plate is working.

2. The novel temporary storage station for silicon wafer edge removal machine according to claim 1, characterized in that: The fixing part is a fastening bolt; the base plate is provided with a transverse strip hole corresponding to the fastening bolt and used to adjust the transverse position of the base plate; the table top of the deeding machine is provided with a longitudinal strip hole corresponding to the fastening bolt and used to adjust the longitudinal position of the base plate; the transverse strip hole is perpendicular to the longitudinal strip hole; the fastening bolt passes through the base plate and the table top of the deeding machine and is threadedly connected with a locking nut arranged under the table top of the deeding machine.

3. The novel temporary storage station for silicon wafer edge removal machine according to claim 1, characterized in that: The bottom plate is also provided with a corresponding tightening screw, and a threaded hole corresponding to the tightening screw is opened on the bottom plate. The lower end of the tightening screw abuts against the upper surface of the deburring machine table to prevent the bottom plate and the deburring machine table from moving relative to each other.

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