A lifting chip detection device and method

Abstract

The present invention discloses a lifting chip detection device and method, wherein the detection device comprises a frame and a dual-axis moving module, a detection probe module, and an integrating sphere lifting module installed on the frame, the dual-axis moving module is provided with a chip lifting module, the detection probe module is provided with multiple groups of detection probes, the chip lifting module is used to carry the chip to be detected and lift the chip to a preset position and make the chip electrode and the detection probe electrically conductive, the dual-axis moving module is used to move the chip lifting module and the chip to be detected to a preset position, and the integrating sphere lifting module includes an integrating sphere device. The lifting chip detection device and method have advantages that the prior art does not have, such as high detection efficiency, simple structure, low implementation cost, and convenient maintenance.

Description

Technical Field

[0001] The present invention relates to the field of chip detection, and in particular to a lifting type chip detection device and method. Background Art

[0002] In the field of chip detection, in the existing chip detection equipment, the chip is generally turned on by a probe module during chip detection. Specifically, after the chip reaches the preset position, the probe module needs to drop a certain distance to contact the electrode of the chip. During the entire chip detection process, the probe module needs to be lifted and lowered back and forth. This type of chip detection prevents the structure of the probe module from being complex and occupying a large space. Due to the limited internal space of the detection equipment and the chip size and other conditions, the existing chip detection equipment can only use a small number of probe modules, which leads to a limited number of chips that can be detected at the same time, seriously affecting the chip detection efficiency; and the overly complex structure will lead to high equipment costs, difficulties in equipment installation and debugging, and other problems. The difficulty of later maintenance of the equipment is also high, further reducing the production efficiency of the chip.

[0003] Therefore, the purpose of the present invention is to provide a new technical solution to solve the existing technical defects. Summary of the invention

[0004] In order to overcome the deficiencies of the prior art, the present invention provides a lifting chip detection device and method, which solves the technical defects of the prior art such as complex structure, low detection efficiency, and difficult maintenance.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] A lifting chip detection device comprises a frame and a dual-axis moving module, a detection probe module and an integrating sphere lifting module installed on the frame, wherein the dual-axis moving module is provided with a chip lifting module, and the detection probe module is provided with multiple groups of detection probes. The chip lifting module is used to carry a chip to be detected and lift the chip to a preset position and make the chip electrode electrically conductive with the detection probe, the dual-axis moving module is used to move the chip lifting module and the detected chip on the chip lifting module to a preset position along the X-axis and Y-axis directions, and the integrating sphere lifting module comprises an integrating sphere device and can lift the integrating sphere device to a position close to the chip.

[0007] As an improvement of the above technical solution, the chip lifting module includes a lifting module base plate fixed on the dual-axis moving module and a chip lifting drive motor, a chip lifting screw nut pair, and a chip lifting guide rail pair installed on the lifting module base plate; a chip lifting platform that can be lifted and lowered is provided on the chip lifting guide rail pair; the screw nut of the chip lifting screw nut pair is rotatably installed on the lifting module base plate; the upper end of the screw of the chip lifting screw nut pair is fixedly connected to the bottom of the chip lifting platform; the lower end of the screw nut of the chip lifting screw nut pair is provided with a chip lifting driven synchronous wheel; the output end of the chip lifting drive motor is provided with a chip lifting active synchronous wheel; a chip lifting synchronous belt is wound between the chip lifting active synchronous wheel and the chip lifting driven synchronous wheel; a chip carrier for carrying a detection chip is provided on the chip lifting platform; the chip lifting drive motor can be driven by a chip lifting main The dynamic synchronous wheel, the chip lifting driven synchronous wheel and the chip lifting synchronous belt drive the chip lifting platform and the chip carrier to rise or fall along the guiding direction of the chip lifting guide rail pair. A chip rotation module is arranged on the side of the chip lifting platform, and the chip rotation module comprises a chip rotation guide rail fixed on the side of the chip lifting platform, a chip rotation drive motor and a chip rotation lead screw nut pair. A chip rotation slide is installed on the chip rotation guide rail, one end of the lead screw of the chip rotation lead screw nut pair is connected to the output end of the chip rotation drive motor, and the lead screw nut of the chip rotation lead screw nut pair is fixedly connected to the chip rotation slide. The chip rotation drive motor can drive the chip rotation slide to slide on the chip rotation guide rail through the chip rotation lead screw nut pair. The chip rotation slide is movably connected to the chip carrier and can drive the chip carrier to rotate on the chip lifting platform to synchronously drive the chip device on the chip carrier to rotate.

[0008] As a further improvement of the above technical solution, a connecting slide is provided on the chip rotating slide, a carrier connecting block is provided on the side of the chip carrier, and the inner side of the connecting slide is hingedly connected to the carrier connecting block;

[0009] As a further improvement of the above technical solution, the connecting slide is installed on the chip rotating slide through a guide rail device, and the sliding direction of the connecting slide is perpendicular to the sliding direction of the chip rotating slide.

[0010] As a further improvement of the above technical solution, a synchronous belt guide wheel is also provided on the bottom plate of the lifting module, the chip lifting synchronous belt passes around the synchronous belt guide wheel, and the synchronous belt guide wheel is installed on the bottom plate of the lifting module through the guide wheel mounting shaft;

[0011] As a further improvement of the above technical solution, the chip lifting screw nut pairs are provided in four pieces and are distributed at four diagonal positions at the bottom of the lifting module bottom plate, and the chip lifting guide rail pairs are provided in four pieces and are distributed at four corners at the bottom of the lifting module bottom plate;

[0012] As a further improvement of the above technical solution, the chip lifting guide pair is a ball guide, the fixed end of the chip lifting guide pair is fixedly installed at the bottom of the lifting module base plate, and the movable end of the chip lifting guide pair is fixedly connected to the bottom of the chip lifting platform.

[0013] As a further improvement of the above technical solution, the chip lifting drive motor is installed at the bottom of the lifting module bottom plate through a chip lifting motor seat, and the chip lifting drive motor is a synchronous motor;

[0014] As a further improvement of the above technical solution, the lifting module bottom plate and the chip lifting platform are both provided with through holes matching the chip carrier;

[0015] As a further improvement of the above technical solution, the chip carrier is rotatably mounted on the chip lifting platform; the chip carrier is provided with a chip negative pressure air hole;

[0016] As a further improvement of the above technical solution, a platform cover is provided on the upper part of the chip lifting platform, a space-avoiding groove is opened in the middle of the platform cover, and the chip carrier is located in the space-avoiding groove in the middle of the platform cover.

[0017] As a further improvement of the above technical solution, the integrating sphere lifting module includes an integrating sphere module mounting frame fixed to the bottom of the fixed frame, an integrating sphere lifting drive motor, an integrating sphere lifting screw nut pair, and an integrating sphere lifting guide rail fixedly installed on the integrating sphere module mounting frame, an integrating sphere lifting mounting plate is provided on the integrating sphere lifting guide rail, the output end of the integrating sphere lifting drive motor is connected to one end of the screw of the integrating sphere lifting screw nut pair, the nut of the integrating sphere lifting screw nut pair is fixedly connected to the integrating sphere lifting mounting plate, and the integrating sphere lifting drive motor can be driven by the integrating sphere lifting screw nut pair The integrating sphere lifting and mounting plate slides on the integrating sphere lifting and mounting rail, and an integrating sphere mounting seat is provided at the upper end of the integrating sphere lifting and mounting plate, and the integrating sphere device is mounted on the integrating sphere mounting seat, and a rotatable lens rotating plate is also provided between the integrating sphere mounting seat and the integrating sphere device, and a plurality of integrating sphere lenses distributed in a ring shape are provided on the lens rotating plate, and a lens conversion motor is also provided on the integrating sphere lifting and mounting plate or the integrating sphere mounting seat, and the output shaft of the lens conversion motor is fixedly connected to the lens rotating plate and can drive the lens rotating plate to rotate to switch different integrating sphere lenses on the lens rotating plate.

[0018] As a further improvement of the above technical solution, the two sides of the integrating sphere device are fixedly mounted on the integrating sphere mounting seat by two integrating sphere mounting blocks respectively, and the lens rotating plate is provided with a plurality of lens mounting through grooves, and a plurality of integrating sphere lenses are mounted in the plurality of lens mounting through grooves one by one;

[0019] As a further improvement of the above technical solution, the integrating sphere mounting seat has a stepped mounting position, a lens rotating plate mounting seat is arranged on the stepped mounting position, the lens rotating plate mounting seat has a circular recess, a through hole is provided in the middle position of the circular recess, the lens rotating plate is rotatably arranged in the circular recess of the lens rotating plate mounting seat, and the upper end of the output shaft of the lens conversion motor passes through the through hole in the middle position of the circular recess and is fixedly connected to the lens rotating plate.

[0020] As a further improvement of the above technical solution, the integrating sphere lifting mounting plate is fixedly connected to the screw nut of the integrating sphere lifting screw nut pair through a connecting block, a through hole is provided on the integrating sphere module mounting frame for facilitating the passage of the connecting block, the integrating sphere lifting guide rails have two, and the integrating sphere lifting mounting plate is installed on the integrating sphere lifting guide rails through an integrating sphere lifting guide rail slide;

[0021] The lens conversion motor is fixedly connected to the bottom of the integrating sphere mounting seat through a motor mounting rod, and the integrating sphere lifting drive motor is fixedly installed on the integrating sphere module mounting frame through an integrating sphere lifting drive motor seat.

[0022] As a further improvement of the above technical solution, a rotating plate cover is provided on the upper part of the lens rotating plate;

[0023] As a further improvement of the above technical solution, an integrating sphere lifting sensor is provided on the integrating sphere module mounting frame, and an integrating sphere lifting induction sheet cooperating with the integrating sphere lifting sensor is directly or indirectly installed on the integrating sphere lifting mounting plate;

[0024] As a further improvement of the above technical solution, a lens rotation sensing piece that rotates synchronously with its output shaft is provided at the bottom of the lens conversion motor, and a lens rotation sensor that cooperates with the lens rotation sensing piece is directly or indirectly installed on the integrating sphere lifting mounting plate.

[0025] As a further improvement of the above technical solution, the detection probe module includes a probe mounting plate directly or indirectly mounted on the frame, the detection probe is fixedly mounted on the probe mounting plate, a through groove is provided in the middle of the probe mounting plate, and the detection probe is mounted around the through groove.

[0026] As a further improvement of the above technical solution, the dual-axis moving module includes an X-axis moving module fixed on the frame and a Y-axis moving module arranged at the output end of the X-axis moving module.

[0027] As a further improvement of the above technical solution, the X-axis moving module includes an X-axis driving motor, an X-axis screw nut pair, an X-axis guide rail, and an X-axis sliding mounting plate installed on the X-axis guide rail, the output end of the X-axis driving motor is connected to one end of the screw of the X-axis screw nut pair, the screw nut of the X-axis screw nut pair is fixedly connected to the X-axis sliding mounting plate, and the X-axis driving motor can drive the X-axis sliding mounting plate to slide on the X-axis guide rail through the X-axis screw nut pair;

[0028] As a further improvement of the above technical solution, the Y-axis moving module includes a Y-axis drive motor, a Y-axis screw nut pair and a Y-axis guide rail fixedly mounted on the X-axis sliding mounting plate, the chip lifting module is mounted on the Y-axis guide rail, the output end of the Y-axis drive motor is connected to one end of the screw of the Y-axis screw nut pair, the screw nut of the Y-axis screw nut pair is fixedly connected to the chip lifting module, and the Y-axis drive motor can drive the chip lifting module to slide on the Y-axis guide rail through the Y-axis screw nut pair.

[0029] As a further improvement of the above technical solution, it also includes a matching positioning CCD camera module and a CCD scanning module, and the CCD camera module and the CCD scanning module are directly or indirectly installed on the frame.

[0030] The present invention also provides a lifting chip detection method, the method comprising:

[0031] The chip to be tested is carried by the chip lifting module;

[0032] Using a dual-axis moving module, the chip lifting module carrying the chip to be tested is moved to a preset position below the testing probe module;

[0033] Using a camera device to photograph and mark the chip to be tested, and record the marking information of the chip;

[0034] The chip lifting module lifts the chip to be tested to a preset height, so that the two electrodes of the chip to be tested contact with the detection probes on the detection probe module and achieve electrical conduction. The conducted chip to be tested emits light and is received by the integrating sphere device in the integrating sphere module to achieve the detection function of the chip to be tested.

[0035] The beneficial effects of the present invention are as follows: the present invention provides a lifting chip detection device and method, which lifts the detected chip by a certain distance through the chip lifting module and makes the chip electrode electrically contact and conduct with the detection probe of the detection probe module. The detection device and method can greatly simplify the structure of the detection probe module, and can install as many detection probes as possible in a limited equipment space, thereby greatly improving the chip detection efficiency, reducing equipment costs, and improving production efficiency.

[0036] In summary, this type of lifting chip detection equipment and method solves the technical defects of the prior art, such as complex structure, low detection efficiency, and difficult maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0038] Figure 1 It is an assembly schematic diagram of the present invention;

[0039] Figure 2 is another assembly schematic diagram of the present invention;

[0040] Figure 3 It is a schematic diagram of the assembly of the chip lifting module in the present invention;

[0041] Figure 4 It is a schematic diagram of the assembly of the chip lifting module in the present invention from another angle;

[0042] Figure 5 It is a schematic diagram of the assembly of the chip lifting module at the third angle in the present invention;

[0043] Figure 6 It is a schematic diagram of the assembly of the chip lifting module at a fourth angle in the present invention;

[0044] Figure 7 It is a schematic diagram of the assembly of the integrating sphere lifting module in the present invention;

[0045] Figure 8 It is a schematic diagram of the assembly of the integrating sphere lifting module of the present invention from another angle;

[0046] Fig. 9 It is a schematic diagram of the assembly of the integrating sphere lifting module at the third angle in the present invention;

[0047] Fig.10 It is a schematic diagram of the assembly of the integrating sphere lifting module at the fourth angle in the present invention;

[0048] Fig.11 yes Fig.10 Sectional view in the AA direction;

[0049] Fig.12 yes Fig.11 A partial enlarged view of M in the middle;

[0050] Fig.13 It is a schematic diagram of the assembly of the dual-axis moving module in the present invention. DETAILED DESCRIPTION

[0051] The following will clearly and completely describe the concept, specific structure and technical effects of the present invention in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the present invention. In addition, all the connection / connection relationships involved in the patent do not simply refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the invention can be combined and referenced interchangeably without conflicting with each other. Figure 1-13 .

[0052] A lifting chip detection device includes a frame 1 and a dual-axis moving module 2, a detection probe module 3, and an integrating sphere lifting module 4 installed on the frame 1. The dual-axis moving module 2 is provided with a chip lifting module 5, and the detection probe module 3 is provided with multiple groups of detection probes. The chip lifting module 5 is used to carry the chip to be detected and lift the chip to a preset position and make the chip electrode and the detection probe electrically conductive. The dual-axis moving module 2 is used to move the chip lifting module 5 and the detected chip 9 on the chip lifting module to the preset position along the X-axis and Y-axis directions. The integrating sphere lifting module 4 includes an integrating sphere device 47 and can lift the integrating sphere device to a position close to the chip.

[0053] When the present invention is implemented specifically, after the chip 9 to be detected is placed on the chip lifting module 5, the dual-axis moving module 2 moves the chip lifting module 5 and the chip 9 to be detected to a preset detection position. After moving into position, the chip lifting module 5 lifts the chip 9 to be detected to a certain height, so that the two electrodes of the chip are in contact with the detection probes in the detection probe module 3 and are electrically conductive. In this process, the integrating sphere lifting module 4 lifts its integrating sphere device 47 to a position close to the chip 9 to be detected, and the conductive chip 9 to be detected emits light, and its light enters the integrating sphere device 47 to be received and detected, thereby realizing the detection function of the chip.

[0054] This type of detection equipment and detection method uses an active chip-lifting method to achieve electrical conductivity of the chip, which can greatly simplify the structure of the detection probe, and then install enough detection probes in a limited space, which can greatly improve the detection efficiency. At the same time, due to the structural simplification, it is conducive to reducing equipment costs, reducing the difficulty of equipment installation and maintenance, and improving the economic benefits of the enterprise.

[0055] Preferably, the chip lifting module 5 includes a lifting module base plate 51 fixed on the dual-axis moving module 2, and a chip lifting drive motor 511, a chip lifting screw nut pair 512, and a chip lifting guide rail pair 513 installed on the lifting module base plate 51. The chip lifting guide rail pair 513 is provided with a chip lifting platform 52 that can be lifted and lowered. The screw nut of the chip lifting screw nut pair 512 is rotatably installed on the lifting module base plate 51. The upper end of the screw of the chip lifting screw nut pair 512 is fixedly connected to the chip lifting platform. At the bottom of the platform 52, a chip lifting driven synchronous wheel 515 is arranged at the lower end of the screw nut of the chip lifting screw nut pair 512, and a chip lifting active synchronous wheel 514 is arranged at the output end of the chip lifting drive motor 511. A chip lifting synchronous belt 516 is wound between the chip lifting active synchronous wheel 514 and the chip lifting driven synchronous wheel 515. A chip carrier 53 for carrying a detection chip is arranged on the chip lifting platform 52. The chip lifting drive motor 511 can lift the chip through the chip lifting active synchronous wheel 514 and the chip lifting driven synchronous wheel 515. The lifting driven synchronous wheel 515 and the chip lifting synchronous belt 516 drive the chip lifting platform 52 and the chip carrier 53 to rise or fall along the guide direction of the chip lifting guide rail pair 513. The chip lifting platform 52 is provided with a chip rotating module on the side thereof. The chip rotating module comprises a chip rotating guide rail 551 fixed on the side of the chip lifting platform 52, a chip rotating driving motor 552 and a chip rotating lead screw nut pair 553. A chip rotating slide 554 is installed on the chip rotating guide rail 551. The chip rotating lead screw nut pair 553 is provided with a chip rotating slide 554. One end of the screw rod 53 is connected to the output end of the chip rotation driving motor 552, and the screw nut of the chip rotation screw nut pair 553 is fixedly connected to the chip rotation slide 554. The chip rotation driving motor 552 can drive the chip rotation slide 554 to slide on the chip rotation guide rail 551 through the chip rotation screw nut pair 553. The chip rotation slide 554 is movably connected to the chip carrier 53 and can drive the chip carrier 53 to rotate on the chip lifting platform 52 to synchronously drive the chip device on the chip carrier 53 to rotate.

[0056] Preferably, a connecting slide 555 is provided on the chip rotating slide 554, and a carrier connecting block 556 is provided on the side of the chip carrier 53, and the inner side of the connecting slide 555 is hingedly connected to the carrier connecting block 556;

[0057] Preferably, the connecting slide 555 is installed on the chip rotating slide 554 through a guide rail device, and the sliding direction of the connecting slide 555 and the sliding direction of the chip rotating slide 554 are perpendicular to each other.

[0058] Preferably, a synchronous belt guide wheel 517 is further provided on the lifting module bottom plate 51, and the chip lifting synchronous belt 516 passes around the synchronous belt guide wheel 517, and the synchronous belt guide wheel 517 is installed on the lifting module bottom plate 51 through the guide wheel installation shaft;

[0059] Preferably, there are four chip lifting screw nut pairs 512, which are distributed at four diagonal positions at the bottom of the lifting module bottom plate 51, and there are four chip lifting guide rail pairs 513, which are distributed at four corners at the bottom of the lifting module bottom plate 51;

[0060] Preferably, the chip lifting guide pair 513 is a ball guide, the fixed end of the chip lifting guide pair 513 is fixedly installed at the bottom of the lifting module bottom plate 51 , and the movable end of the chip lifting guide pair 513 is fixedly connected to the bottom of the chip lifting platform 52 .

[0061] Preferably, the chip lifting drive motor 511 is installed at the bottom of the lifting module bottom plate 51 through the chip lifting motor seat 518, and the chip lifting drive motor 511 is a synchronous motor;

[0062] Preferably, the lifting module bottom plate 51 and the chip lifting platform 52 are both provided with through holes matching the chip carrier 53;

[0063] Preferably, the chip carrier 53 is rotatably mounted on the chip lifting platform 52; the chip carrier 53 is provided with a chip negative pressure air hole;

[0064] Preferably, a platform cover 54 is provided on the upper part of the chip lifting platform 52 , a space-avoiding groove is opened in the middle of the platform cover 54 , and the chip carrier 53 is located in the space-avoiding groove in the middle of the platform cover 54 .

[0065] When the present invention is specifically implemented, after placing the chip on the chip carrier 53, the chip lifting drive motor 511 drives the screw nut of the chip lifting screw nut pair 512 to rotate through the chip lifting active synchronous wheel 514, the chip lifting driven synchronous wheel 515 and the chip lifting synchronous belt 516, and further drives the chip lifting platform 52 to rise through the screw of the chip lifting screw nut pair 512, forcing the chip on the chip carrier 53 to be connected to the detection probe to realize chip detection. This lifting module can effectively simplify the detection equipment, save installation controls, improve the detection space utilization, reduce equipment costs and maintenance costs, and improve detection efficiency.

[0066] In addition, the chip rotation module can be used to drive the chip to rotate to a suitable angle to meet the chip detection requirements. Specifically, the chip rotation drive motor 552 drives the chip rotation slide 554 to slide on the chip rotation guide rail 551 through the chip rotation screw nut pair 553, and the chip rotation slide 554 drives the chip carrier 53 to rotate on the chip lifting platform 52 through the connecting slide 555 and the carrier connection block 556, thereby rotating the chip on the chip carrier 52 to a suitable angle to meet the chip detection requirements. The entire process is automatically controlled, improving control accuracy and reducing labor costs.

[0067] Preferably, the integrating sphere lifting module 4 includes an integrating sphere module mounting frame 41 fixed to the bottom of the fixed frame 1 and an integrating sphere lifting drive motor 42, an integrating sphere lifting screw nut pair 43, and an integrating sphere lifting guide rail 44 fixedly mounted on the integrating sphere module mounting frame 41, and an integrating sphere lifting mounting plate 45 is provided on the integrating sphere lifting guide rail 44, the output end of the integrating sphere lifting drive motor 42 is connected to one end of the screw of the integrating sphere lifting screw nut pair 43, and the nut of the integrating sphere lifting screw nut pair 43 is fixedly connected to the integrating sphere lifting mounting plate 45, and the integrating sphere lifting drive motor 42 can drive the integrating sphere lifting mounting plate 45 to move in the integrating sphere via the integrating sphere lifting screw nut pair 43 The integrating sphere lifting guide rail 44 is provided with an integrating sphere mounting seat 46 on the upper end of the integrating sphere lifting mounting plate 45, and the integrating sphere device 47 is mounted on the integrating sphere mounting seat 46. A rotatable lens rotating plate 48 is also provided between the integrating sphere mounting seat 46 and the integrating sphere device 47, and a plurality of integrating sphere lenses 481 distributed in a ring shape are provided on the lens rotating plate 48. A lens conversion motor 49 is also provided on the integrating sphere lifting mounting plate 45 or the integrating sphere mounting seat 46, and the output shaft 491 of the lens conversion motor 49 is fixedly connected to the lens rotating plate 48 and can drive the lens rotating plate 48 to rotate to switch different integrating sphere lenses 481 on the lens rotating plate 48.

[0068] Preferably, the two sides of the integrating sphere device 47 are fixedly mounted on the integrating sphere mounting seat 46 by two integrating sphere mounting blocks 471 respectively, and the lens rotating plate 48 is provided with a plurality of lens mounting through grooves, and a plurality of integrating sphere lenses 481 are mounted in the plurality of lens mounting through grooves in a one-to-one correspondence;

[0069] Preferably, the integrating sphere mounting seat 46 has a stepped mounting position, and a lens rotating plate mounting seat 480 is arranged on the stepped mounting position. The lens rotating plate mounting seat 480 has a circular recess, and a through hole is provided in the middle position of the circular recess. The lens rotating plate 48 is rotatably arranged in the circular recess of the lens rotating plate mounting seat 480, and the upper end of the output shaft 491 of the lens conversion motor 49 passes through the through hole in the middle position of the circular recess and is fixedly connected to the lens rotating plate 48.

[0070] Preferably, the integrating sphere lifting mounting plate 45 is fixedly connected to the screw nut of the integrating sphere lifting screw nut pair 43 through a connecting block 451, and a through hole is provided on the integrating sphere module mounting frame 41 for the connecting block 451 to pass through. The integrating sphere lifting guide rails 44 have two integrating sphere lifting guide rails, and the integrating sphere lifting mounting plate 45 is installed on the integrating sphere lifting guide rails 44 through an integrating sphere lifting guide rail slide.

[0071] Preferably, the lens conversion motor 49 is fixedly connected to the bottom of the integrating sphere mounting seat 46 via a motor mounting rod 492 , and the integrating sphere lifting drive motor 42 is fixedly mounted on the integrating sphere module mounting frame 41 via an integrating sphere lifting drive motor seat 421 .

[0072] Preferably, a rotating plate cover 482 is provided on the upper portion of the lens rotating plate 48;

[0073] Preferably, an integrating sphere lifting sensor 4101 is provided on the integrating sphere module mounting frame 41, and an integrating sphere lifting induction sheet 4102 cooperating with the integrating sphere lifting sensor 4101 is directly or indirectly installed on the integrating sphere lifting mounting plate 45;

[0074] A lens rotation sensing piece 4104 that rotates synchronously with the output shaft 491 of the lens conversion motor 49 is disposed at the bottom thereof, and a lens rotation sensor 4103 that cooperates with the lens rotation sensing piece 4104 is directly or indirectly mounted on the integrating sphere lifting mounting plate 45 .

[0075] Preferably, the detection probe module 3 includes a probe mounting plate 31 directly or indirectly mounted on the frame 1, the detection probe (not shown in the figure) is fixedly mounted on the probe mounting plate 31, the probe mounting plate 31 has a through groove in the middle position, and the detection probe is mounted on the periphery of the through groove.

[0076] In specific applications, the integrating sphere lifting drive motor 42 and the integrating sphere lifting screw nut pair 43 can drive the integrating sphere lifting mounting plate 45 to rise and fall on the integrating sphere lifting guide rail 44, further enabling the integrating sphere mounting seat 46 and the integrating sphere device 47 to achieve the lifting function.

[0077] When different chips need to be detected, the lens rotating plate 48 is driven to rotate by the lens conversion motor 49, and the rotation function is used to rotate the appropriate integrating sphere lens 481 on the lens rotating plate 48 to a position matching the integrating sphere device 47. This method of changing the integrating sphere lens 481 can meet the detection needs of different types of chips. It has the characteristics of high application flexibility and strong versatility. There is no need to replace the integrating sphere device, saving equipment modification time and cost.

[0078] Preferably, the dual-axis moving module 2 includes an X-axis moving module 21 fixed on the frame 1 and a Y-axis moving module 22 arranged at the output end of the X-axis moving module 21 .

[0079] Preferably, the X-axis moving module 21 comprises an X-axis driving motor 211, an X-axis screw nut pair 212, an X-axis guide rail 213, and an X-axis sliding mounting plate 214 mounted on the X-axis guide rail 213, the output end of the X-axis driving motor 211 is connected to one end of the screw of the X-axis screw nut pair 212, the screw nut of the X-axis screw nut pair 212 is fixedly connected to the X-axis sliding mounting plate 214, and the X-axis driving motor 211 can drive the X-axis sliding mounting plate 214 to slide on the X-axis guide rail 213 through the X-axis screw nut pair 212;

[0080] Preferably, the Y-axis moving module 22 includes a Y-axis driving motor 221, a Y-axis screw nut pair 222 and a Y-axis guide rail 223 fixedly mounted on the X-axis sliding mounting plate 214, the chip lifting module 5 is mounted on the Y-axis guide rail 223, the output end of the Y-axis driving motor 221 is connected to one end of the screw of the Y-axis screw nut pair 222, the screw nut of the Y-axis screw nut pair 222 is fixedly connected to the chip lifting module 5, and the Y-axis driving motor 221 can drive the chip lifting module 5 to slide on the Y-axis guide rail 223 through the Y-axis screw nut pair 222.

[0081] Preferably, it also includes a matching positioning CCD camera module 6 and a CCD scanning module 7, and the CCD camera module 6 and the CCD scanning module 7 are directly or indirectly installed on the frame 1.

[0082] The present invention also provides a lifting chip detection method, the method comprising:

[0083] The chip 9 to be tested is carried by the chip lifting module 5;

[0084] The chip lifting module 5 carrying the detected chip 9 is moved to a preset position below the detection probe module 3 by using the dual-axis moving module 2;

[0085] Using a camera device to photograph and mark the chip 9 to be tested, and record the marking information of the chip;

[0086] The chip lifting module 5 lifts the chip 9 to be tested to a preset height, so that the two electrodes of the chip 9 to be tested contact with the detection probes on the detection probe module 3 and achieve electrical conduction. The conducted chip 9 to be tested emits light and is received by the integrating sphere device 47 in the integrating sphere module 4 to achieve the detection function of the chip 9 to be tested.

[0087] The above is a specific description of the preferred implementation of the present invention, but the invention is not limited to the embodiments. Those skilled in the art can make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A lifting chip detection device, characterized in that: The invention comprises a frame (1) and a dual-axis moving module (2), a detection probe module (3), and an integrating sphere lifting module (4) installed on the frame (1); the dual-axis moving module (2) is provided with a chip lifting module (5); the detection probe module (3) is provided with a plurality of detection probes; the chip lifting module (5) is used to carry a chip to be detected and to lift the chip to a preset position and to make the electrodes of the chip electrically conductive with the detection probes; the dual-axis moving module (2) is used to move the chip lifting module (5) and the detected chip (9) on the chip lifting module (5) to a preset position along the X-axis and Y-axis directions; the integrating sphere lifting module (4) comprises an integrating sphere device (47) and can lift the integrating sphere device to a position close to the chip; The chip lifting module (5) comprises a lifting module bottom plate (51) fixed on the dual-axis moving module (2), and a chip lifting drive motor (511), a chip lifting screw nut pair (512), and a chip lifting guide rail pair (513) installed on the lifting module bottom plate (51); a chip lifting platform (52) capable of lifting and lowering movement is arranged on the chip lifting guide rail pair (513); a screw nut of the chip lifting screw nut pair (512) is rotatably installed on the lifting module bottom plate (51); an upper end of a screw of the chip lifting screw nut pair (512) is fixedly connected to the chip lifting platform (511); 2) at the bottom, a chip lifting driven synchronous wheel (515) is arranged at the lower end of the screw nut of the chip lifting screw nut pair (512), a chip lifting active synchronous wheel (514) is arranged at the output end of the chip lifting drive motor (511), a chip lifting synchronous belt (516) is wound between the chip lifting active synchronous wheel (514) and the chip lifting driven synchronous wheel (515), a chip lifting platform (52) is provided with a chip carrier (53) for carrying a detection chip, and the chip lifting drive motor (511) can be used to lift the chip through the chip lifting active synchronous wheel (514) and the chip lifting driven synchronous wheel (515). The dynamic synchronous wheel (515) and the chip lifting synchronous belt (516) drive the chip lifting platform (52) and the chip carrier (53) to rise or fall along the guide direction of the chip lifting guide rail pair (513). A chip rotating module is arranged on the side of the chip lifting platform (52). The chip rotating module comprises a chip rotating guide rail (551) fixed on the side of the chip lifting platform (52), a chip rotating drive motor (552) and a chip rotating lead screw nut pair (553). A chip rotating slide seat (554) is installed on the chip rotating guide rail (551). The chip rotating lead screw nut pair (553) is provided with a chip rotating guide rail (552). 3) one end of the screw is connected to the output end of the chip rotation drive motor (552), the screw nut of the chip rotation screw nut pair (553) is fixedly connected to the chip rotation slide (554), the chip rotation drive motor (552) can drive the chip rotation slide (554) to slide on the chip rotation guide rail (551) through the chip rotation screw nut pair (553), the chip rotation slide (554) is movably connected to the chip carrier (53) and can drive the chip carrier (53) to rotate on the chip lifting platform (52) to synchronously drive the chip device on the chip carrier (53) to rotate; The integrating sphere lifting module (4) comprises an integrating sphere module mounting frame (41) fixed to the bottom of the fixed frame (1), an integrating sphere lifting drive motor (42), an integrating sphere lifting screw nut pair (43), and an integrating sphere lifting guide rail (44) fixedly mounted on the integrating sphere module mounting frame (41); an integrating sphere lifting installation plate (45) is arranged on the integrating sphere lifting guide rail (44); an output end of the integrating sphere lifting drive motor (42) is connected to one end of the screw of the integrating sphere lifting screw nut pair (43); a nut of the integrating sphere lifting screw nut pair (43) is fixedly connected to the integrating sphere lifting installation plate (45); the integrating sphere lifting drive motor (42) can drive the integrating sphere lifting installation plate (45) to move on the integrating sphere lifting guide rail via the integrating sphere lifting screw nut pair (43). (44), an integrating sphere mounting seat (46) is provided on the upper end of the integrating sphere lifting mounting plate (45), the integrating sphere device (47) is installed on the integrating sphere mounting seat (46), a rotatable lens rotating plate (48) is also provided between the integrating sphere mounting seat (46) and the integrating sphere device (47), a plurality of integrating sphere lenses (481) distributed in a ring shape are provided on the lens rotating plate (48), a lens switching motor (49) is also provided on the integrating sphere lifting mounting plate (45) or the integrating sphere mounting seat (46), an output shaft (491) of the lens switching motor (49) is fixedly connected to the lens rotating plate (48) and can drive the lens rotating plate (48) to rotate so as to switch different integrating sphere lenses (481) on the lens rotating plate (48).

2. The lifting chip detection device according to claim 1, characterized in that: The chip rotating slide (554) is provided with a connecting slide (555), the side of the chip carrier (53) is provided with a carrier connecting block (556), and the inner side of the connecting slide (555) is hingedly connected to the carrier connecting block (556); The connecting slide (555) is mounted on the chip rotating slide (554) via a guide rail device, and the sliding direction of the connecting slide (555) and the sliding direction of the chip rotating slide (554) are perpendicular to each other.

3. The lifting chip detection device according to claim 1, characterized in that: A synchronous belt guide wheel (517) is also provided on the lifting module bottom plate (51), the chip lifting synchronous belt (516) passes around the synchronous belt guide wheel (517), and the synchronous belt guide wheel (517) is installed on the lifting module bottom plate (51) via a guide wheel installation shaft; There are four chip lifting screw nut pairs (512) distributed at four diagonal positions at the bottom of the lifting module bottom plate (51); there are four chip lifting guide rail pairs (513) distributed at four corners at the bottom of the lifting module bottom plate (51); The chip lifting guide rail pair (513) is a ball guide rail, the fixed end of the chip lifting guide rail pair (513) is fixedly mounted on the bottom of the lifting module bottom plate (51), and the movable end of the chip lifting guide rail pair (513) is fixedly connected to the bottom of the chip lifting platform (52).

4. The lifting chip detection device according to claim 1, characterized in that: The chip lifting drive motor (511) is installed at the bottom of the lifting module bottom plate (51) via a chip lifting motor seat (518), and the chip lifting drive motor (511) is a synchronous motor; The lifting module bottom plate (51) and the chip lifting platform (52) are both provided with through holes matching the chip carrier (53); The chip carrier (53) is rotatably mounted on the chip lifting platform (52); the chip carrier (53) is provided with a chip negative pressure air hole; A platform cover plate (54) is arranged on the upper part of the chip lifting platform (52), a space-avoiding groove is provided in the middle of the platform cover plate (54), and the chip carrier (53) is located in the space-avoiding groove in the middle of the platform cover plate (54).

5. The lifting chip detection device according to claim 1, characterized in that: The two sides of the integrating sphere device (47) are fixedly mounted on the integrating sphere mounting seat (46) via two integrating sphere mounting blocks (471), the lens rotating plate (48) is provided with a plurality of lens mounting through grooves, and the plurality of integrating sphere lenses (481) are mounted in the plurality of lens mounting through grooves in a one-to-one correspondence; The integrating sphere mounting seat (46) has a stepped mounting position, a lens rotating plate mounting seat (480) is arranged on the stepped mounting position, the lens rotating plate mounting seat (480) has a circular recess, a through hole is arranged in the middle of the circular recess, the lens rotating plate (48) is rotatably arranged in the circular recess of the lens rotating plate mounting seat (480), and the upper end of the output shaft (491) of the lens conversion motor (49) passes through the through hole in the middle of the circular recess and is fixedly connected to the lens rotating plate (48).

6. The lifting chip detection device according to claim 1, characterized in that: The integrating sphere lifting installation plate (45) is fixedly connected to the screw nut of the integrating sphere lifting screw nut pair (43) via a connecting block (451); a through hole is provided on the integrating sphere module mounting frame (41) for facilitating the passage of the connecting block (451); the integrating sphere lifting guide rails (44) have two integrating sphere lifting guide rails (44); and the integrating sphere lifting installation plate (45) is mounted on the integrating sphere lifting guide rails (44) via an integrating sphere lifting guide rail slide; The lens conversion motor (49) is fixedly connected to the bottom of the integrating sphere mounting seat (46) via a motor mounting rod (492), and the integrating sphere lifting drive motor (42) is fixedly mounted on the integrating sphere module mounting frame (41) via an integrating sphere lifting drive motor seat (421).

7. The lifting chip detection device according to claim 1, characterized in that: A rotating plate covering cover (482) is provided on the upper portion of the lens rotating plate (48); An integrating sphere lifting sensor (4101) is provided on the integrating sphere module mounting frame (41), and an integrating sphere lifting induction sheet (4102) cooperating with the integrating sphere lifting sensor (4101) is directly or indirectly mounted on the integrating sphere lifting mounting plate (45); A lens rotation sensing plate (4104) that rotates synchronously with the output shaft (491) of the lens conversion motor (49) is disposed at the bottom thereof, and a lens rotation sensor (4103) that cooperates with the lens rotation sensing plate (4104) is directly or indirectly mounted on the integrating sphere lifting mounting plate (45).

8. The lifting chip detection device according to claim 1, characterized in that: The detection probe module (3) comprises a probe mounting plate (31) directly or indirectly mounted on the frame (1); the detection probe is fixedly mounted on the probe mounting plate (31); a through slot is provided in the middle of the probe mounting plate (31); and the detection probe is mounted on the periphery of the through slot.

9. The lifting chip detection device according to claim 1, characterized in that: The dual-axis moving module (2) comprises an X-axis moving module (21) fixed on the frame (1) and a Y-axis moving module (22) arranged at the output end of the X-axis moving module (21).

10. The lifting chip detection device according to claim 9, characterized in that: The X-axis moving module (21) comprises an X-axis driving motor (211) fixedly mounted on the frame (1), an X-axis screw nut pair (212), an X-axis guide rail (213), and an X-axis sliding mounting plate (214) mounted on the X-axis guide rail (213); the output end of the X-axis driving motor (211) is connected to one end of the screw of the X-axis screw nut pair (212); the screw nut of the X-axis screw nut pair (212) is fixedly connected to the X-axis sliding mounting plate (214); the X-axis driving motor (211) can drive the X-axis sliding mounting plate (214) to slide on the X-axis guide rail (213) through the X-axis screw nut pair (212); The Y-axis moving module (22) comprises a Y-axis driving motor (221), a Y-axis lead screw nut pair (222) and a Y-axis guide rail (223) fixedly mounted on an X-axis sliding mounting plate (214); the chip lifting module (5) is mounted on the Y-axis guide rail (223); the output end of the Y-axis driving motor (221) is connected to one end of the lead screw of the Y-axis lead screw nut pair (222); the lead screw nut of the Y-axis lead screw nut pair (222) is fixedly connected to the chip lifting module (5); the Y-axis driving motor (221) can drive the chip lifting module (5) to slide on the Y-axis guide rail (223) via the Y-axis lead screw nut pair (222).

11. A lifting chip detection device according to any one of claims 1 to 9, characterized in that: It also includes a matching positioning CCD camera module (6) and a CCD scanning module (7), wherein the CCD camera module (6) and the CCD scanning module (7) are directly or indirectly mounted on the frame (1).

12. A lifting chip detection method, characterized in that: The chip (9) is detected by using the lifting chip detection device described in any one of claims 1 to 11, specifically, The chip to be tested (9) is carried by a chip lifting module (5); Using a dual-axis moving module (2) to move a chip lifting module (5) carrying a chip to be tested (9) to a preset position below the testing probe module (3); Using a camera device to photograph and mark the chip (9) to be tested, and recording the marking information of the chip; The chip lifting module (5) lifts the detected chip (9) carried by it to a preset height, so that two electrodes of the detected chip (9) contact the detection probes on the detection probe module (3) and achieve electrical conduction, and the conducted detected chip (9) emits light and is received by the integrating sphere device (47) in the integrating sphere module (4) to achieve a detection function for the detected chip (9).

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