Heater and stage

Abstract

A heater comprises: a folded heater wire; a first insulator arranged on the heater wire; a metal sheath arranged to contact at least a portion of the first insulator; a first insulating component configured to be parallel to at least a portion of one side of the heater wire taken out from the first end of the metal sheath; a second insulating component configured to be parallel to at least a portion of the first insulating component and to be parallel to at least a portion of the other side of the heater wire taken out from the first end of the metal sheath; a second insulator contacting at least a portion of the metal sheath, the first insulating component, and the second insulating component; and a cover-shaped component covering a portion of the first insulating component, contacting at least a portion of the metal sheath, the first insulating component, and the second insulating component via the second insulator, and being parallel to at least a portion of the metal sheath, the first insulating component, and the second insulating component.

Description

Technical Field

[0001] Embodiments of the present invention relate to a heater and a stage having the heater. Background Art

[0002] Semiconductor devices are installed in almost all electronic devices and play an important role in the functions of electronic devices. Semiconductor devices are devices that utilize the semiconductor properties of silicon and the like. Semiconductor devices are constructed by stacking semiconductor films, insulating films, and conductive films on a substrate and patterning these films. These films are stacked using evaporation, sputtering, chemical vapor deposition (CVD), or chemical reactions of the substrate, and patterned using a photolithography process. The photolithography process includes: forming a resist film on a film for patterning; exposing the resist film; forming a resist mask by developing; removing a portion of the film by etching; and removing the resist mask.

[0003] The characteristics of the above-mentioned film largely depend on the conditions for forming the film or the conditions for patterning. One of the conditions is the temperature of the substrate. In most cases, the temperature of the substrate is controlled by adjusting the temperature of a stage (hereinafter referred to as a stage) for setting the substrate. In order to heat the substrate and suppress the temperature distribution in the substrate to be uniform, one of the heaters for heating the stage is a sheath heater. For example, Patent Document 1 discloses a stage having a plurality of sheath heaters, wherein a heating wire (heater wire) is arranged in a metal sheath.

[0004] (Prior art literature)

[0005] (Patent Document)

[0006] Patent Document 1: Japanese Patent Application Publication No. 2009-91660 Summary of the invention

[0007] (Problems to be solved by the invention)

[0008] In order to improve the uniformity of temperature distribution in the substrate, a stage with heaters having a high density is required. In addition, in order to arrange the heaters on the stage at a high density, the problem is to reduce the diameter of the heaters. Furthermore, the problem is to improve the reliability of the reduced-diameter heaters to prevent the heaters from being damaged or the heating wires in the heaters from being disconnected due to the reduced diameter of the heaters.

[0009] Therefore, one of the problems of the embodiments of the present invention is to provide a sheath heater with improved reliability and reduced diameter. In addition, a stage having a heater for accurately controlling the temperature of a substrate is provided.

[0010] (Measures taken to solve the problem)

[0011] One of the embodiments of the present invention is a heater, comprising: a folded heater wire; a first insulator arranged on the heater wire; a metal sheath arranged to contact at least a portion of the first insulator; a first insulating component configured to be parallel to at least a portion of one side of the heater wire taken out from the first end of the metal sheath; a second insulating component configured to be parallel to at least a portion of the first insulating component and to be parallel to at least a portion of the other side of the heater wire taken out from the first end of the metal sheath; a second insulator contacting at least a portion of the metal sheath, the first insulating component, and the second insulating component; and a cover-shaped component covering a portion of the first insulating component, contacting at least a portion of the metal sheath, the first insulating component, and the second insulating component via the second insulator, and being parallel to at least a portion of the metal sheath, the first insulating component, and the second insulating component.

[0012] In another embodiment, the cover member has a recessed portion and may be formed of one member having a predetermined thickness.

[0013] In another embodiment, the inner diameter of the cover-shaped member may be substantially the same as the outer diameter of the first insulating member, and the outer diameter of the cover-shaped member may be substantially the same as the outer diameter of the metal sheath.

[0014] In another embodiment, the inner diameter of the metal sheath is substantially the same as the outer diameter of the first insulating component, and the first insulating component can be inserted into the metal sheath.

[0015] In another embodiment, the first insulating member has a protrusion, and the cover member can be embedded in the protrusion via the second insulating member.

[0016] In another embodiment, the protrusion may protrude in a direction opposite to the direction in which the metal sheath is provided.

[0017] In another embodiment, the first insulating member has a through hole, and the second insulating member can be inserted into the through hole.

[0018] In another embodiment, the hole diameters of the through holes may be different between the upper portion and the lower portion of the first insulating member.

[0019] In another embodiment, the cross section of the through hole is stepped in the connecting portion of different apertures, and the second insulating member may be inserted into the connecting portion.

[0020] In another embodiment, the heater wire may be in the form of a ribbon.

[0021] In another embodiment, the heater wire may have a helical structure.

[0022] In another embodiment, the heater wire may have a double helix structure.

[0023] In another embodiment, the second insulator may be a sealant or an adhesive.

[0024] In another embodiment, the metal sheath may contain aluminum.

[0025] In another embodiment, the outer diameter of the metal sheath may be greater than or equal to 3.0 mm and less than or equal to 6.0 mm.

[0026] In another embodiment, the cover member may contain aluminum.

[0027] In another embodiment, the outer diameter of the cover member may be greater than or equal to 3.0 mm and less than or equal to 6.0 mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1A This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0029] Figure 1B This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0030] Figure 1C This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0031] Figure 1D This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0032] Figure 1E This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0033] Figure 1F This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0034] Figure 2A This is a cross-sectional view showing a method for manufacturing a heater according to one embodiment of the present invention.

[0035] Figure 2B This is a cross-sectional view showing a method for manufacturing a heater according to one embodiment of the present invention.

[0036] Figure 2C This is a cross-sectional view showing a method for manufacturing a heater according to one embodiment of the present invention.

[0037] Figure 2D This is a cross-sectional view showing a method for manufacturing a heater according to one embodiment of the present invention.

[0038] Figure 3 This is a flowchart for explaining a method for manufacturing a heater according to one embodiment of the present invention.

[0039] Figure 4A This is a cross-sectional view showing the structure of a heater and a method for manufacturing the heater according to one embodiment of the present invention.

[0040] Figure 4B This is a cross-sectional view showing the structure of a heater and a method for manufacturing the heater according to one embodiment of the present invention.

[0041] Figure 4C This is a cross-sectional view showing the structure of a heater and a method for manufacturing the heater according to one embodiment of the present invention.

[0042] Figure 4D This is a cross-sectional view showing the structure of a heater and a method for manufacturing the heater according to one embodiment of the present invention.

[0043] Figure 5 This is a flowchart for explaining a method for manufacturing a heater according to one embodiment of the present invention.

[0044] Fig. 6A It is a perspective view and a top view showing the structure of a stage according to one embodiment of the present invention.

[0045] Figure 6B It is a perspective view and a top view showing the structure of a stage according to one embodiment of the present invention.

[0046] Fig. 7A This is a cross-sectional view showing the structure of a stage according to one embodiment of the present invention.

[0047] Figure 7B This is a cross-sectional view showing the structure of a stage according to one embodiment of the present invention.

[0048] Fig. 8A This is a cross-sectional view showing the structure of a stage according to one embodiment of the present invention.

[0049] Figure 8B This is a cross-sectional view showing the structure of a stage according to one embodiment of the present invention.

[0050] Fig. 9 It is a top view showing the structure of a stage according to one embodiment of the present invention.

[0051] Fig. 10A This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0052] Fig. 10B This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0053] Fig.11A This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0054] Fig. 11B This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0055] Fig. 12A This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0056] Fig. 12B This is a cross-sectional view showing the structure of a heater according to one embodiment of the present invention.

[0057] Fig.13 It is a schematic cross-sectional view of a film processing apparatus having a stage according to an embodiment of the present invention.

[0058] Fig.14 It is a schematic cross-sectional view of a film forming apparatus having a stage according to an embodiment of the present invention.

[0059] Fig.15 It is a schematic cross-sectional view of a film forming apparatus having a stage according to an embodiment of the present invention.

[0060] Fig.16 It is a schematic cross-sectional view of a film forming apparatus having a stage according to an embodiment of the present invention. DETAILED DESCRIPTION

[0061] Hereinafter, each embodiment of the invention disclosed in the present application will be described with reference to the drawings. However, the present invention can be implemented in various forms within the scope of the gist thereof, and should not be construed as being limited to the description of the embodiments shown below.

[0062] In order to make the description clearer, the drawings schematically show the width, thickness, shape, etc. of each component compared to the actual method, but the drawings are only examples and do not limit the interpretation of the present invention. In addition, in this specification and each of the drawings, there is the following situation: the same figure mark is given to the element having the same function as the element described in the existing drawings, and the repeated description is omitted. In addition, for the convenience of explanation, the words "above" or "below" are used for explanation, and "above" and "below" respectively indicate the direction when the heater unit is used (when the substrate is installed).

[0063] In the present specification and drawings, when a plurality of identical or similar structures are generally indicated, the same reference numerals are used, and when each of the plurality of structures is indicated distinctively, lower case letters are added for indication. When a plurality of parts in a structure are respectively indicated distinctively, the same reference numerals are used, and further hyphens and natural numbers are used.

[0064] 1. First Implementation

[0065] In this embodiment, a sheath heater 110 which is one embodiment of the present invention will be described.

[0066] 1-1. Structure of sheath heater

[0067] The cross-sectional view of the sheath heater 110 is as follows: Figures 1A to 1F shown. Figure 1A 1 is a cross-sectional view showing the structure of the sheath heater 110 . Figure 1B 2 is a cross-sectional view showing the structure along the dashed lines B1 and B2. Figure 1C 2 is a cross-sectional view showing the structure along the dashed lines C1 and C2. Figure 1D 2 is a cross-sectional view showing the structure along the dot-dash lines D1 and D2. Figure 1E 2 is a cross-sectional view showing the structure along the dot-dash lines E1 and E2. Figure 1F 2 is a cross-sectional view showing the structure along the dashed lines F1 and F2.

[0068] The sheath heater 110 has a function of generating heat by supplying electricity. The sheath heater 110 is used to heat the stage 100 (see Fig. 6A ) has a second support plate 104 (refer to Fig. 6A ) and the first support plate 102 (refer to Fig. 6A Thus, the substrate placed on the stage 100 can be heated.

[0069] like Figure 1A As shown, the sheath heater 110 includes a metal sheath 115 , a heater wire 118 , a first insulator 116 , a second insulator 136 , a first insulating member 122 , a cover member 124 , a second insulating member 128 , a pair of lead wires 112 , and a pair of terminals 114 . Figure 1A A so-called single-terminal sheath heater 110 is shown. In this specification, the structure of the sheath heater 110 of one embodiment of the present invention is described by taking the single-terminal sheath heater 110 as an example, but the same structure as the sheath heater 110 of one embodiment of the present invention can also be applied to a double-terminal sheath heater. Figure 1A In the cross section of , the right side is referred to as the upper part and the left side is referred to as the lower part.

[0070] The metal sheath 115 has a cylindrical shape with a first end (closed end) closed and a second end (open end) open. In this specification, etc., an example in which the shape of the front end of the metal sheath 115 is a semicircular shape is shown, but it is not limited to this example. For example, the shape of the front end of the metal sheath 115 can be a flat shape or a conical shape. As long as the heat generated by the sheath heater 110 can be used to heat the second support plate 104 (see Fig. 6A ) and the first support plate 102 (refer to Fig. 6A ) to heat the shape.

[0071] The heater wire 118 is configured to be folded in the metal sheath 115, reciprocate in the cylindrical axis direction of the metal sheath 115, and its two ends are taken out from the second end (open end) of the metal sheath 115. That is, one heater wire 118 is configured to become two axes (two cores) in most of the cylindrical axis direction of the metal sheath 115, and one of the two axes and the terminal of one, and the other of the two axes and the terminal of the other are taken out from the second end (open end) of the metal sheath 115. In addition, one of the two axes and the other of the two axes of one heater wire 118 are configured to be roughly parallel or parallel to the cylindrical axis direction of the metal sheath 115. It is also possible to configure that at least a part of one of the two axes of one heater wire 118 and at least a part of the other of the two axes are roughly parallel or parallel to the cylindrical axis direction of the metal sheath 115. Furthermore, the heater wire 118 is configured with a gap in the metal sheath 115. In addition, the heater wire 118 includes a heating wire and a non-heating wire.

[0072] The heater wire 118 and the metal sheath 115 are insulated by the first insulator 116 provided in the gap. That is, the heater wire 118 is surrounded by the first insulator 116, and the first insulator 116 is surrounded by the metal sheath 115. In addition, the first insulator 116 is provided to fill the metal sheath 115 between the second end (open end) and the first end (closed end) of the metal sheath 115 until the vicinity of the second end (open end). The first insulator 116 may be provided to contact at least a portion of the metal sheath 115, or may be provided to contact at least a portion of the heater wire 118, or may be provided to insulate the heater wire 118 and the metal sheath 115 without contacting the metal sheath 115, or may be provided to insulate the heater wire 118 and the metal sheath 115 without contacting the heater wire 118. That is, it is sufficient as long as the first insulator 116 is provided to insulate the heater wire 118 and the metal sheath 115.

[0073] A first insulating component 122 is provided on the upper part of the first insulator 116. The first insulating component 122 is in contact with the upper part of the first insulator 116 and at least a part of the inner side of the metal sheath 115, and is set to protrude from the upper part of the metal sheath 115. The first insulating component 122 has at least a first through hole 123a and a second through hole 123b. One of the two ends of the heater wire 118 taken out from the second end (open end) of the metal sheath 115 is inserted into the first through hole 123a, and the other is inserted into the second through hole 123b. Therefore, with respect to the first insulating component 122, the two ends of the heater wire 118 are inserted from the side where the first insulator 116 is configured, and taken out from the side where the first insulator 116 is not configured. Here, at least a part of the first through hole 123a and at least a part of the second through hole 123b can be set to be approximately parallel or parallel to the cylindrical axis of the metal sheath 115. In addition, at least a portion of the heater wire 118 inserted into the first through hole 123a and the second through hole 123b may also be arranged to be approximately parallel or parallel to the cylindrical axis of the metal sheath 115. Furthermore, at least a portion of the first through hole 123a and at least a portion of the second through hole 123b may also be arranged to be approximately parallel or parallel to at least a portion of the heater wire 118 inserted into the first through hole 123a and the second through hole 123b. The first insulating member 122 is also referred to as a protective tube, an insulating tube, etc.

[0074] Here, in the first through hole 123a and the second through hole 123b, the hole diameter on the upper side of the first insulating member 122 is different from the hole diameter on the lower side of the first insulating member 122. Figure 1A As shown, the aperture of the upper side of the first insulating member 122 is larger than the aperture of the lower side of the first insulating member 122. That is, with respect to the first through hole 123a and the second through hole 123b, the aperture of the lower side of the first insulating member 122 is used to form the portion from the side of the first insulating member 122 in contact with the first insulator 116 to a predetermined length, and the aperture of the upper side of the first insulating member 122 is used to form the portion from the predetermined length to the upper side of the first insulating member 122. Therefore, as Figure 1A As shown, in the cross section, the first through hole 123a and the second through hole 123b have a stepped shape. In the first through hole 123a and the second through hole 123b, the aperture of the upper side of the first insulating component 122 is larger than the aperture of the lower side of the first insulating component 122, so the first through hole 123a serves as a stopper for stopping the second insulating component 128 described later at the stepped portion.

[0075] In the upper part of the first insulating component 122, one of the two second insulating components 128 is arranged to be inserted into the first through hole 123a and to contact the stepped portion of the first through hole 123a. The other of the two second insulating components 128 is arranged to be inserted into the second through hole 123b and to contact the stepped portion. The second insulating component 128 has a through hole. One of the two ends of the heater wire 118 taken out from the first through hole 123a of the first insulating component 122 is inserted into one of the two second insulating components 128, and the other of the two ends of the heater wire 118 taken out from the second through hole 123b of the first insulating component 122 is inserted into the other of the two second insulating components 128. Therefore, with respect to the two second insulating components 128, the two ends of the heater wire 118 are inserted from the side where the first insulating component 122 is configured, and taken out from the side where the first insulating component 122 is not configured. Here, the two second insulating members 128 may be arranged to be approximately parallel or parallel to the cylindrical axis of the metal sheath 115, and a portion of the two second insulating members 128 may be arranged to be approximately parallel or parallel to the cylindrical axis of the metal sheath 115. In addition, the heater wire 118 inserted into the two second insulating members 128 may also be arranged to be approximately parallel to the cylindrical axis of the metal sheath 115, and a portion of the heater wire 118 may also be arranged to be approximately parallel or parallel to the cylindrical axis of the metal sheath 115. In addition, the outer diameter of the second insulating member 128 is preferably smaller than the outer diameter of the first insulating member 122, and is the same as the aperture of the upper portion of the first through hole 123a and the aperture of the second through hole 123b of the first insulating member 122. Furthermore, the length of the second insulating member 128 is a length protruding from the position where the cover member 124 is arranged.

[0076] The second insulator (136) is arranged to be in contact with a portion of the metal sheath (115), a portion of the first insulating component (122), a portion of the inner side of the cover-shaped component (124), and a portion of the second insulating component (128). A portion of the metal sheath 115, a portion of the first insulating component 122, a portion of the inner side of the cover-shaped component 124, and the second insulating component 128 are connected by the second insulator 136. The second insulator 136 may also be arranged to protrude from the cover-shaped component 124 on the side opposite to the side connecting the cover-shaped component 124 and the metal sheath 115. The second insulator 136 is also called a sealant, an adhesive, etc. The second insulator 136 prevents moisture such as water and solvents from invading the interior of the sheath heater 110, thereby suppressing the expansion and deterioration of the first insulator 116.

[0077] The cover-like part 124 is connected to a part of the metal sheath 115, a part of the first insulating part 122, and a second insulating part 128 via the second insulator 136. The cover-like part 124 has a structure that is recessed inward. The recessed portion of the cover-like part 124 has at least two holes. In the sheath heater 110 of one embodiment of the present invention, for example, the recessed portion of the cover-like part 124 has two holes, and the two holes are a first hole 124a and a second hole 124b. One of the two second insulating parts 128 is inserted into the first hole 124a, and the other of the two second insulating parts 128 is inserted into the second hole 124b. In addition, the apertures of the first hole 124a and the second hole 124b are preferably larger than the outer diameter of the second insulating part 128, and are the same as the aperture of the upper portion of the first through hole 123a and the aperture of the second through hole 123b of the first insulating part 122. In addition, the cover-shaped member 124 is arranged in parallel with at least a portion of the metal sheath 115 , the first insulating member 122 , and the second insulating member 128 .

[0078] Furthermore, the cover member 124 is formed of one member having a recess and a predetermined thickness, and thus the outer diameter of the cover member 124 can be the same or almost the same as the outer diameter of the metal sheath 115. Therefore, the sheath heater 110 according to one embodiment of the present invention can have a uniform or substantially uniform outer diameter (thickness) by arranging the thicknesses of two or more members substantially uniformly.

[0079] A pair of lead wires 112 are connected to both ends of the heater wire 118. A pair of terminals 114 are connected to the lead wires 112. Alternatively, the pair of terminals 114 may be connected to both ends of the heater wire 118 without the lead wires 112 being interposed therebetween.

[0080] like Figure 1B , Figure 1C , Figure 1D , Figure 1E and Figure 1FAs shown, the outer diameter of the heater wire 118 is set to d1, the inner diameter and outer diameter of the metal sheath 115 are d2 and d3 respectively, the thickness of the metal sheath 115 is d4, the diameter of the first through hole 123a and the second through hole 123b is d5, the diameter of the second insulator 136 in the cross section of the structure along the dashed lines D1 and D2 is d6, the outer diameter of the second insulating part 128a and the second insulating part 128b is d7, the diameter of the second insulator 136 in the cross section of the structure along the dashed lines E1 and E2 is d8, the outer diameter of the cover part 124 is d9, the diameter of the second insulator 136 in the cross section of the structure along the dashed lines F1 and F2 is d10, the distance between the heater wires 118 is g1, and the distance between the outer wall of the heater wire 118 and the inner wall of the metal sheath 115 is g2. In addition, the outer diameter of the first insulating part 122 is also d2. Furthermore, the outer diameter d3 of the metal sheath 115, the diameter d6 of the second insulator 136 in the cross section of the structure along the dashed lines D1 and D2, and the outer diameter d9 of the cover-like member 124 are the same or substantially the same. The diameter d8 of the second insulator 136 in the cross section of the structure along the dashed lines E1 and E2 is also the inner diameter of the cover-like member 124. In addition, the predetermined thickness of the cover-like member 124 is (d9-d8) / 2, and the predetermined thickness of the cover-like member 124 (d9-d8) / 2 is thinner than the thickness of the metal sheath 115. In addition, Figure 1B , 1C , 1D, 1E and 1F are cross-sectional views showing cross sections orthogonal to the cylinder axis. The outer diameter d1 of the heater wire 118 can be selected from a range of 0.1 mm to 2.0 mm. Respectively, the inner diameter d2 of the metal sheath 115 can be selected from a range of 3.0 mm to 4.0 mm, and the outer diameter d3 of the metal sheath 115 can be selected from a range of 3.0 mm to 6.0 mm. The thickness d4 of the metal sheath 115 can be selected from a range of 0.5 mm to 1.0 mm. The distance g1 between the metal sheath 115 and each heater wire 118 arranged in the metal sheath 115 can be selected from a range of 0.3 mm to 1.0 mm, or from a range of 0.4 mm to 1.0 mm. The distance g2 between the portion of the heater wire 118 that is folded back from one end and the portion that is folded back from the other end can be selected from a range of 0.3 mm to 2.0 mm, or from a range of 0.4 mm to 1.0 mm. The outer diameter d7 of the second insulating member 128a and the second insulating member 128b can be selected from a range of 1.0 mm to 4.5 mm.

[0081] A conductor that generates Joule heat by passing electricity can be used for the heater wire 118. Specifically, a metal selected from tungsten, tantalum, molybdenum, platinum, nickel, chromium, and cobalt, or an alloy containing these metals can be used. Examples of the alloy include an alloy of nickel and chromium, and an alloy containing nickel, chromium, and cobalt.

[0082] The first insulator 116 is provided to prevent the heater wire 118 from short-circuiting due to contact with the metal sheath 115. The material used for the first insulator 116 can be selected from insulating materials having a thermal conductivity of 10 W / mK or more and 200 W / mK. By using such a material, the heat energy generated by the heater wire 118 can be efficiently transferred to the metal sheath 115. Examples of the first insulator 116 include magnesium oxide, aluminum oxide, boron nitride, aluminum nitride, and the like.

[0083] The metal sheath 115 contains metal, and the metal can be selected from metals having a thermal conductivity of 10 W / mK or more and 430 W / mK or less. By selecting such a metal, the heat energy generated by the heater wire 118 can be efficiently transferred to the first support plate 102 and the second support plate 104. The thermal expansion coefficient of the metal is preferably 5×10 -6 / K or above and 25×10 -6 / K or less. This can suppress deformation due to thermal expansion, and can provide a highly reliable sheath heater 110. Specifically, metals such as aluminum, titanium, stainless steel, and alloys thereof can be used for the metal sheath 115.

[0084] For the second insulator 136 , for example, a fluorine-based adhesive, an epoxy-based adhesive, a silicone-based adhesive, or the like can be used.

[0085] The first insulating member 122 is formed of a material including aluminum oxide, zirconium oxide, magnesium oxide, aluminum nitride, silicon oxide, or the like.

[0086] As the cover member 124 , a member having the same material and the same properties as those of the metal sheath 115 can be used.

[0087] As the second insulating member 128, an insulating tube formed of, for example, vinyl chloride, silicone rubber, fluorine-based polymer, polyimide, a fabric of glass fiber or ceramic fiber, or the like may be used.

[0088] The sheath heater 110 having various structures may be used without limiting the shape of the cross section perpendicular to the cylindrical axis of the sheath heater 110. For example, it may be Figure 1B The circular shape shown may also be as described below Figure 7B and Figure 8BAlthough the cross-sectional shape is not shown in the figure, it may be an elliptical shape. When the cross-sectional shape is a circular shape, the force required for deformation is independent of the bending direction, so the sheath heater 110 can be easily bent in any direction. Therefore, the sheath heater 110 can be easily arranged in the groove formed in the first supporting plate 102 or the second supporting plate 104, etc.

[0089] For example, a conventional sheath heater has the following structure: in a pair of heater wires taken out from the open end of a metal sheath, an insulating component such as an insulating sleeve is installed in order to keep a certain distance between the heater wire on one side and the heater wire on the other side, and then, the lead wires are connected to the heater wire on one side and the heater wire on the other side, respectively, and the pair of lead wires are bound by insulating components such as insulating sleeves. At least a part of this structure is called a fastening portion. In addition, conventional sheath heaters have a structure in which the structure as described above is inserted into, for example, a two-stage stepped cylindrical component, and the two-stage stepped cylindrical component and the metal sheath are connected by brazing. Therefore, the conventional sheath heater has a complex structure and a large diameter heater at least due to the fastening portion and the stepped cylindrical component.

[0090] On the other hand, the sheath heater according to one embodiment of the present invention does not include the fastening portion and the stepped cylindrical member that the conventional sheath heater has. In the sheath heater 110 according to one embodiment of the present invention, a pair of heater wires 118 taken out from the open end of the metal sheath 115 are surrounded by a first insulating member 122 having a smaller outer diameter than the metal sheath 115 and a second insulating member 128 having a smaller outer diameter than the metal sheath 115, and the metal sheath 115 has a structure connected to a cover member 124 through a second insulator 136, and the cover member 124 has an outer diameter the same as that of the metal sheath 115 and is inserted into the second insulating member 128.

[0091] Furthermore, in the sheath heater of one embodiment of the present invention, the cover member 124 is composed of a member having a recess and a predetermined thickness, so the outer diameter of the cover member 124 can be the same or almost the same as the outer diameter of the metal sheath 115. Therefore, the sheath heater 110 of one embodiment of the present invention does not include the fastening portion and the stepped cylindrical member of the conventional sheath heater, and by making the thickness of two or more members roughly the same, a uniform or roughly uniform outer diameter (thickness) can be formed. Therefore, the sheath heater 110 can be formed thin. In addition, by using a thin sheath heater 110, the sheath heater 110 can be arranged at a high density on the stage 100 described later. Therefore, the temperature distribution on the substrate can be made uniform, and the temperature distribution on the substrate can be further reduced.

[0092] 1-2. Method for manufacturing sheath heater

[0093] Figures 2A to 2D It is a cross-sectional view showing a method of manufacturing the sheath heater 110 . Figure 3 FIG. 1 is a flowchart for explaining a method for manufacturing the sheath heater 110. Figure 1A , 2A In 2D, the right side is called the upper part and the left side is called the lower part. Figures 1A to 1F The same or similar structures are described.

[0094] like Figure 2A and Figure 3 As shown in step 30 (S30), after the manufacture of the sheath heater 110 is started, the folded heater wire 118 is inserted into the metal sheath 115 together with the first insulator 116. Both ends of the heater wire 118 are taken out from one end of the metal sheath 115. The length of the pair of heater wires 118 taken out from one end of the metal sheath 115 is sufficiently longer than the length of the metal sheath 115.

[0095] Then, if Figure 2A and Figure 3 As shown in step 33 (S33), both ends of the heater wire 118 taken out from one end of the metal sheath 115 are inserted into the first insulating component 122. Specifically, one of the two ends of the heater wire 118 is inserted into the first through hole 123a included in the first insulating component 122, and the other of the two ends of the heater wire 118 is inserted into the second through hole 123b included in the first insulating component 122. The first insulating component 122 with both ends of the heater wire 118 inserted is embedded in the metal sheath 115 surrounding the first insulator 116 and the heater wire 118. The outer diameter of the metal sheath 115 is substantially the same as or the same as the outer diameter of the first insulating component 122, so the first insulating component 122 can be fixed to the metal sheath 115 surrounding the heater wire 118 through step 33. In the present embodiment, a ceramic insulating tube having two through holes is used for the first insulating component 122. At this time, the length of the protrusion 125 of the first insulating component 122 protruding from the metal sheath 115 can also be measured. It is also possible to confirm whether the heater wire 118 is inserted into the first insulating member 122 and whether the first insulating member 122 is properly disposed on the metal sheath 115 by measuring the length of the protrusion 125 .

[0096] Then, if Figure 2B and Figure 3As shown in step 35 (S35), one of the two ends of the heater wire 118 is inserted into the second insulating member 128a, and the other of the two ends of the heater wire 118 is inserted into the second insulating member 128b. The second insulating member 128a is inserted into the hole at the upper part of the first through hole 123a and stops at the stepped portion. The second insulating member 128b is inserted into the hole at the upper part of the second through hole 123b and stops at the stepped portion. The outer diameter of the second insulating member 128 is substantially the same as or the same as the hole diameter of the first through hole 123. Through step 35, the second insulating member 128 stops at the stepped portion of the first through hole 123, so the second insulating member 128a and the second insulating member 128b can be fixed to the first insulating member 122. Therefore, the second insulating member 128 can be prevented from being displaced, and moisture such as water and solvent can be prevented from intruding into the sheath heater 110 from the gap between the second insulating member 128 and the first insulating member 122. Therefore, degradation of the sheath heater 110 is suppressed, and the long-term reliability of the sheath heater 110 is improved. In this embodiment, an insulating tube made of polyimide is used as the second insulating member 128. In addition, an insulating tube having an outer diameter d7 of about 2 mm is used as the second insulating member 128.

[0097] Then, if Figure 2C and Figure 3 As shown in step 37 (S37), the second insulator 136 is applied to the metal sheath 115, the first insulating component 122, and the second insulating component 128. In this embodiment, a fluorine-based adhesive is used for the second insulator 136. The second insulator 136 is in contact with a portion of the metal sheath 115, a portion of the first insulating component 122, and a portion of the second insulating component 128. In addition, the second insulator 136 is configured to cover the protrusion 125 of the first insulating component 122 and surround the protrusion 125 of the first insulating component 122. In addition, Figure 2C is a schematic diagram of a cross section of the sheath heater 110 , and the second insulator 136 actually has a curved shape including an inflection point.

[0098] Then, if Figure 2D and Figure 3As shown in step 39 (S39), the cover-like component 124 is connected to a part of the metal sheath 115, a part of the first insulating component 122, and a part of the second insulating component 128 through the second insulator 136. One of the two second insulating components 128 is inserted into the first hole 124a of the cover-like component 124, and the other of the two second insulating components 128 is inserted into the second hole 124b of the cover-like component 124. The cover-like component 124 has a structure that is recessed inward, so the cover-like component 124 is connected to a part of the metal sheath 115, a part of the first insulating component 122, and a part of the second insulating component 128 in a manner that covers the protrusion 125 of the first insulating component 122. Through step 39, the cover-like component 124 is in a state of covering the metal sheath 115 via the first insulating component 122, and is fixed to the metal sheath 115 and the first insulating component 122.

[0099] The outer diameter of the metal sheath 115 is substantially the same as or the same as the outer diameter of the first insulating component 122 , and the inner diameter of the cover-shaped component 124 is substantially the same as or the same as the outer diameter of the first insulating component 122 , so that the cover-shaped component 124 can be fitted into the first insulating component 122 without positional displacement.

[0100] Furthermore, if Figure 1A and Figure 3 As shown in step 41 (S41), a pair of lead wires 112 are connected to both ends of the heater wire 118. Finally, as Figure 1A and Figure 3 As shown in step 43 ( S43 ), a pair of terminals 114 are connected to a pair of lead wires 112 .

[0101] The sheath heater 110 is manufactured by the above manufacturing method. Figure 1A , 2A ~2D and Figure 3 The method for manufacturing the sheath heater 110 described above is an example, and the present invention is not limited to this example. The method for manufacturing the sheath heater 110 may use an appropriately selected method within the scope of the structure of the sheath heater 110 according to one embodiment of the present invention.

[0102] In the conventional manufacturing method of the sheath heater, a method of connecting the metal sheath, the fastening portion, and the stepped cylindrical member by brazing is used. The sheath heater 110 according to one embodiment of the present invention does not have a fastening portion and a stepped cylindrical member, so in the manufacturing method of the sheath heater 110 according to one embodiment of the present invention, the brazing step can be omitted, and a method of connecting the metal sheath 115 and the cover member 124 by the second insulator 136 (adhesive) is adopted. Therefore, compared with the conventional manufacturing method, the manufacturing method of the sheath heater 110 according to one embodiment of the present invention is relatively easy and has high safety. By manufacturing the sheath heater 110 by the above manufacturing method, the sheath heater 110 can be formed thin.

[0103] Furthermore, in the sheath heater 110 of one embodiment of the present invention, the metal sheath 115 and the cover-shaped member 124 are connected by the second insulator 136. The second insulator 136 is an adhesive or a sealant, and contains an organic resin. Therefore, even if a force that causes the sheath heater 110 to bend is applied to the sheath heater 110, the second insulator 136 can function as a soft cushioning material to mitigate the force that causes the sheath heater 110 to bend. Therefore, in the sheath heater of one embodiment of the present invention, the metal sheath 115 and the cover-shaped member 124 are connected by the second insulator 136, thereby preventing the thin-diameter sheath heater 110 from being damaged and the heating wire in the thin-diameter sheath heater 110 from being disconnected, and providing a sheath heater with high reliability.

[0104] 1-3. Modification of Sheath Heater

[0105] Figure 1A Variations of the sheath heater 110 shown are as follows: Figure 4A shown. Figure 4A : is a cross-sectional view showing the structure of the sheath heater 110 . Figure 4B , 4C 4D and 4D are diagrams showing a method of manufacturing the sheath heater 110 . Figure 5 1 is a flowchart for explaining a method for manufacturing the sheath heater 110. Figure 4A , a cross-sectional view of the structure along the dot-dash lines B1 and B2 is shown. Figure 1B Same. Figure 4A The cross-sectional view of the structure along the dot-dash lines C1 and C2 is shown in FIG. Figure 1C The first insulating component 122 in the embodiment is replaced by the first insulating component 122a. Figure 4A , a cross-sectional view of the structure along the dot-dash lines D1 and D2 is shown. Figure 1D Same. Figure 4A , a cross-sectional view of the structure along the dot-dash lines E1 and E2 is shown. Figure 1E Same. Figure 4A, a cross-sectional view of the structure along the dot-dash lines F1 and F2 is shown. Figure 1F The same. There are omissions and Figure 1A to Figure 3 In addition, Figure 1A Similarly, in Figure 4A The right side is called the upper part and the left side is called the lower part.

[0106] exist Figure 4A In the sheath heater 110 shown, Figure 1A The difference of the sheath heater 110 shown is that the first insulating member 122 is composed of two parts, the first insulating member 122a and the first insulating member 122b, and the third insulator is provided between the first insulating member 122a and the first insulating member 122b. Figure 4A The sheath heater 110 shown is Figure 1A The sheath heaters 110 shown are the same and therefore description thereof is omitted here.

[0107] like Figure 4A As shown, relative to Figure 1A In the structure of the sheath heater 110 shown in the figure, in the sheath heater 110, the first insulating member 122 is composed of two parts, namely, the first insulating member 122a and the first insulating member 122b, and the third insulator 132 is provided between the first insulating member 122a and the first insulating member 122b.

[0108] A first insulating component 122a is provided on the upper portion of the first insulator 116. The first insulating component 122a is in contact with the upper portion of the first insulator 116 and at least a portion of the inner side of the metal sheath 115, and is provided inside the metal sheath 115 without protruding from the upper portion of the metal sheath 115. The outer diameter of the first insulating component 122a is the same as the outer diameter of the first insulating component 122. The first insulating component 122a has at least a first through hole 123a and a second through hole 123b. The apertures of the first through hole 123a and the second through hole 123b are substantially the same or the same at the upper and lower portions of the first insulating component 122a, which is different from the first insulating component 122. Figure 4A In the embodiment, the insertion method of the heater wire 118 taken out from the second end (open end) of the metal sheath 115 of the first insulating component 122a and the positional relationship of the heater wire 118, the metal sheath 115, the first through hole 123a and the second through hole 123b relative to the first insulating component 122a are similar to Figure 1A The structure of the sheath heater 110 shown is the same, so the description is omitted here. The first insulating member 122a is also called a protection tube or an insulating tube, similar to the first insulating member 122.

[0109] A third insulator 132 is provided on the upper portion of the first insulating component 122a. The third insulator 132 is in contact with the upper portion of the first insulating component 122a and at least a portion of the inner side of the metal sheath 115, and is provided inside the metal sheath 115 without protruding from the upper portion of the metal sheath 115. The third insulator 132 is also called a sealant, an adhesive, etc. The third insulator 132 connects the first insulating component 122a and the first insulating component 122b. The third insulator 132 prevents moisture such as water and solvent from invading the interior of the sheath heater 110, and suppresses expansion and deterioration of the first insulator 116.

[0110] A first insulating component 122b is provided on the upper portion of the third insulator 132. The first insulating component 122b contacts the upper portion of the third insulator 132 and at least a portion of the inner side of the metal sheath 115, and is provided to protrude from the upper portion of the metal sheath 115. The first insulating component 122b has the same structure as the first insulating component 122, and thus a detailed description thereof is omitted here.

[0111] refer to Figure 4B , Figure 4C , Figure 4D and Figure 5 The method for manufacturing the sheath heater 110 is described below. Step 30 (S30), step 35 (S35), step 37 (S37), step 39 (S39), step 41 (S41) and step 43 (S43) are similar to those in reference Figure 3 The method described is the same as that described in the previous section, so the description is omitted here. Figure 3 The same or similar structures are described.

[0112] like Figure 4B and Figure 5 As shown in step 31 (S31), both ends of the heater wire 118 taken out from one end of the metal sheath 115 are inserted into the first insulating component 122a. Specifically, one of the two ends of the heater wire 118 is inserted into the first through hole 123a included in the first insulating component 122, and the other of the two ends of the heater wire 118 is inserted into the second through hole 123b included in the first insulating component 122. The first insulating component 122 with both ends of the heater wire 118 inserted is embedded in the metal sheath 115 surrounding the first insulator 116 and the heater wire 118. The outer diameter of the metal sheath 115 is substantially the same as or the same as the outer diameter of the first insulating component 122, so the first insulating component 122 can be fixed to the metal sheath 115 surrounding the heater wire 118 through step 31. In the present embodiment, a ceramic insulating tube having two through holes is used as the first insulating component 122.

[0113] Then, if Figure 4C and Figure 5As shown in step 32 (S32), the third insulator 132 is applied so as to contact a portion of the inner wall of the metal sheath 115 and the first insulating member 122a. The third insulator 132 can be made of the same material as the second insulator 136. The third insulator 132 is formed using, for example, a fluorine-based adhesive.

[0114] Then, if Figure 4D and Figure 5 As shown in step 33 (S33), both ends of the heater wire 118 taken out from one end of the metal sheath 115 are inserted into the first insulating member 122b. Figure 4D and Figure 5 The description of step 33 (S33) is the same as that in Figure 3 The description after the first insulating component 122 described in step 33 (33) is replaced with the first insulating component 122b is the same, so the detailed description is omitted here.

[0115] As mentioned above, in Figure 4A In the sheath heater 110 shown, the first insulating member 122 is composed of two members, namely, the first insulating member 122a and the first insulating member 122b, and the third insulator 132 is provided between the first insulating member 122a and the first insulating member 122b. The third insulator 132 is an adhesive or a sealant, and contains an organic resin, similarly to the second insulator 136. Therefore, for example, even if a force that causes the sheath heater 110 to bend is applied to the sheath heater 110, the bending force can be relieved at least at two locations, namely, near the second insulator 136 and near the third insulator 132, or in two stages, by the structure including the cover member 124, the second insulator 136, the first insulating member 122b, the third insulator 132, and the first insulating member 122a. Therefore, in the sheath heater according to one embodiment of the present invention, by having the above-mentioned structure, it is possible to prevent the thinned sheath heater 110 from being damaged or the heating wire in the thinned sheath heater 110 from being disconnected, and to provide a highly reliable sheath heater.

[0116] 2. Second Implementation

[0117] In this embodiment, a stage 100 which is one embodiment of the present invention will be described. Description of the same or similar configurations as those of the first embodiment may be omitted.

[0118] Fig. 6A and Figure 6B 1 and 2 show a perspective view and a top view of the stage 100, respectively. Fig. 7A and Figure 7B It is shown along Figure 6B The cross-sectional view of the dotted lines A1 and A2 in FIG. FIG. 6A to FIG. 7BAs shown, the stage 100 has a first support plate 102, a second support plate 104, a shaft 108 and at least one sheath heater 110. FIG. 6A to FIG. 7B FIG. 1 shows an example in which two sheath heaters are provided, namely, a first sheath heater 110a and a second sheath heater 110b. Figure 6B The first support plate 102 is omitted in the figure. Figure 7B The sheath heater 110 is omitted in the figure.

[0119] The first support plate 102 is configured to have a flat upper surface, so that a semiconductor substrate containing silicon or a compound semiconductor, or an insulating substrate containing an insulating material such as quartz or glass, etc., can be arranged thereon. The first support plate contains metal, and the metal is selected from metals having a thermal conductivity of 10 W / mK or more and 430 W / mK or less. By using a metal having a high thermal conductivity, the heat energy generated by the sheath heater 110 can be efficiently received. In addition, the thermal expansion coefficient of the metal is preferably 5×10- 6 / K or above and 25×10 -6 / K or less. Specific metals satisfying this characteristic include titanium, aluminum, stainless steel, and the like. Although not shown in the figure, an electrostatic chuck for fixing the substrate, a through hole for supplying a gas with high thermal conductivity such as helium between the substrate and the stage 100, or a loop for circulating a liquid medium may also be provided on the first support plate 102.

[0120] The second support plate 104 is disposed below the first support plate 102. The second support plate 104 also contains the metal that can be used for the first support plate 102. The metal contained in the second support plate 104 can be the same as or different from the metal contained in the first support plate 102. In different cases, the difference in thermal expansion coefficient between the metal contained in the first support plate 102 and the second support plate 104 can be 10×10 -6 The respective metals are selected on the premise that the K is less than / K. Thus, deformation due to thermal expansion can be suppressed, and the stage 100 with high reliability can be provided.

[0121] In addition, the upper surface 104-3 of the second support plate 104 is joined to the first support plate 102. The first support plate 102 and the second support plate 104 can be joined by welding, screwing or brazing. As the brazing material used in brazing, there can be cited an alloy containing silver, copper and zinc, an alloy containing copper and zinc, copper containing a trace amount of phosphorus, aluminum and its alloy, an alloy containing titanium, copper and nickel, an alloy containing titanium, zirconium and copper, an alloy containing titanium, zirconium, copper and nickel, etc.

[0122] In addition, the stage 100 may further include a third support plate (not shown). The third support plate of any structure is arranged below the second support plate 104. The third support plate includes the same structure as the first support plate 102 or the second support plate 104. The third support plate is joined to the lower surface 104-4 of the second support plate 104. Similar to the joining of the first support plate 102 and the second support plate 104, the joining of the third support plate and the second support plate 104 may also be performed by welding, screwing, brazing, or the like.

[0123] The shaft 108 is provided to support the first support plate 102 and the second support plate 104. A hollow structure is adopted to accommodate a lead wire 112 for supplying power to a heater wire 118 of a sheath heater 110 described later. In the case of an electrostatic chuck, wiring for supplying power to the electrostatic chuck is also arranged inside the shaft 108. Although the illustration is omitted for the sake of readability of the accompanying drawings, the shaft 108 can also be connected to a rotating mechanism. By connecting the shaft 108 to the rotating mechanism, the stage 100 can be rotated around the long axis of the shaft 108. The shaft 108 is joined to the second support plate 104 by welding, threaded fixing, brazing, etc. In addition, when a third support plate is used, the shaft 108 is joined to the third support plate and also supports the third support plate.

[0124] The sheath heater 110 can be applied to the structure described in the first embodiment. The sheath heater 110 has a function of generating heat by energizing. The sheath heater 110 is provided to heat the second support plate 104 and the first support plate 102. Thus, the substrate placed on the stage 100 is heated.

[0125] A groove (first groove 120) is provided on the upper surface 104-3 of the second support plate 104 ( Figure 7B ), the first sheath heater 110a and the second sheath heater 110b are arranged in the first tank 120 ( Fig. 7A ).exist Fig. 7A and Figure 7B In the example shown, the first support plate 102 has a flat lower surface, and no grooves are provided on the lower surface. Therefore, the depth of the first groove 120 is the same or substantially the same as the outer diameter of the sheath heater 110. Specifically, the depth of the first groove 120 can be set to be greater than 100% and less than 150% of the outer diameter of the sheath heater 110, greater than 100% and less than 120%, or greater than 100% and less than 110%. In order to reduce the in-plane temperature distribution of the first support plate 102, the first grooves 120 are formed to exist in the upper surface 104-3 with uniform density.

[0126] The first end portion T1 of the first sheath heater 110a is located in the region where the first support plate 102 and the second support plate 104 overlap with the shaft 108 ( Figure 6B The first sheath heater 110a bent at the first end T1 passes through the through hole 130 ( Figure 7B ), extends into the shaft 108, and is further connected to a heater power source (not shown) via a lead wire 112 and a terminal 114 ( Fig. 7A ).

[0127] Similar to the first end portion T1 of the first sheath heater 110a, the first end portion T2 of the second sheath heater 110b is also located in the region where the first support plate 102 and the second support plate 104 overlap with the shaft 108 ( Figure 6B The second sheath heater 110b bent at the first end T2 passes through the through hole 130 ( Figure 7B ), extends into the shaft 108, and is further connected to a heater power source (not shown) via a lead wire 112 and a terminal 114 ( Fig. 6A ).

[0128] By applying the above structure, not only the degree of freedom in the layout of the sheath heater is greatly improved, but also the substrate can be heated more uniformly.

[0129] As described in the first embodiment, the diameter of the conventional sheath heater is larger than the diameter of the sheath heater 110 provided on the stage 100 according to one embodiment of the present invention. Since the size of the shaft 108 provided on the stage is limited, it is difficult to arrange the ends of the plurality of conventional sheath heaters in the region 109 when a plurality of conventional sheath heaters are used on the stage. As a result, the number of sheath heaters that can be arranged is limited. Therefore, it is impossible to divide the upper surface of the stage into a plurality of sections and accurately perform temperature control for each section. Therefore, it is difficult to uniformly heat the substrate.

[0130] In contrast, the diameter of the sheath heater 110 included in the stage 100 according to one embodiment of the present invention is small. Therefore, even if a plurality of sheath heaters 110 are arranged on the stage 100, the ends of the plurality of sheath heaters can be arranged in the region 109. In addition, the plurality of sheath heaters 110 have a high degree of freedom in arrangement, and the upper surface of the stage can be divided into a plurality of sections, and the temperature can be accurately controlled for each section. Therefore, the substrate can be heated uniformly.

[0131] 3. Third Implementation

[0132] In this embodiment, using Fig. 8A and Figure 8B A modification of the stage 100 described in the second embodiment will be described. Fig. 7A Similarly, these figures are along the Figure 6B A cross-sectional view taken along dashed lines A1 and A2 of the embodiment 1 may be omitted in some cases.

[0133] 3-1 Modification 1

[0134] like Fig. 8A As shown, in the first modification, the groove (first groove 120) is not formed on the upper surface 104-3 of the second support plate 104, but the groove (second groove 140) is formed on the lower surface of the first support plate 102. In the first modification, the sheath heater 110 is accommodated in the second groove 140. The depth of the second groove 140 is the same or substantially the same as the outer diameter of the sheath heater 110. Specifically, the depth of the second groove 140 can be set to be greater than 100% and less than 150% of the outer diameter of the sheath heater 110, greater than 100% and less than 120%, or greater than 100% and less than 110%.

[0135] In the first modification, the contact area between the sheath heater 110 and the first support plate 102 can be increased by making the depth of the second groove 140 equal or substantially equal to the outer diameter of the sheath heater 110. Thus, the heat energy generated by the sheath heater 110 can be efficiently transferred to the first support plate 102.

[0136] In the first modification, a structure in which the depth of the second groove 140 is the same or substantially the same as the outer diameter of the sheath heater 110 is shown as an example, but the depth of the second groove 140 is not limited to this structure. For example, the outer diameter of the sheath heater 110 and the depth of the second groove 140 may be different. In the case where there is a space between the outer diameter of the sheath heater 110 and the second groove 140, deformation caused by thermal expansion of the sheath heater 110 can be suppressed. Therefore, a highly reliable stage can be provided.

[0137] 3-2 Variation 2

[0138] like Figure 8B As shown, in the second modification, the first groove 120 may be formed on the upper surface 104-3 of the second support plate 104, and the second groove 140 may be formed on the lower surface of the first support plate 102. In the second modification, the sum of the depth of the first groove 120 and the depth of the second groove 140 is the same or substantially the same as the outer diameter of the sheath heater 110. Specifically, the sum of the depth of the first groove 120 and the depth of the second groove 140 may be set to be greater than 100% and less than 150% of the outer diameter of the sheath heater 110, greater than 100% and less than 120%, or greater than 100% and less than 110%.

[0139] In the second modification, the contact area between the sheath heater 110 and the first support plate 102 and the second support plate 104 can be increased by making the sum of the depth of the first groove 120 and the depth of the second groove 140 the same or substantially the same as the outer diameter of the sheath heater 110. Therefore, the heat energy generated by the sheath heater 110 can be efficiently transferred to the first support plate 102 and the second support plate 104.

[0140] In the second modification, a structure in which the sum of the depth of the first groove 120 and the depth of the second groove 140 is the same or substantially the same as the outer diameter of the sheath heater 110 is shown as an example, but the sum of the depth of the first groove 120 and the depth of the second groove 140 is not limited to this structure. For example, the outer diameter of the sheath heater 110 and the sum of the depth of the first groove 120 and the depth of the second groove 140 may be different. In the case where there is a space between the outer diameter of the sheath heater 110 and the first groove 120 and the second groove 140, deformation caused by thermal expansion of the sheath heater 110 can be suppressed. Therefore, a highly reliable stage can be provided.

[0141] 4. Fourth Implementation

[0142] In this embodiment, a stage 150 provided with a plurality of independently driven sheath heaters 110 is described. The following embodiment is an example of this embodiment, and does not limit the number of sheath heaters 110 provided on the stage 100. The description of the same or similar structures as those in the first to third embodiments may be omitted.

[0143] Fig. 9 1 shows a top view of the stage 150. Considering the readability of the drawings, Fig. 9 The first support plate 102 is omitted in the figure. Fig. 9 As shown, in the stage 150, four sheath heaters (the first sheath heater 110a, the second sheath heater 110b, the third sheath heater 110c, and the fourth sheath heater 110d) are respectively arranged in a quarter circle. That is, the four sheath heaters (the first sheath heater 110a, the second sheath heater 110b, the third sheath heater 110c, and the fourth sheath heater 110d) are symmetrically arranged on the stage 150. Fig. 9 In the illustrated example, the first to fourth sheath heaters 110 a to 110 d are arranged to have arcs having different radii.

[0144] The first to fourth sheath heaters 110 a to 110 d have the same shape and may be configured such that one of the first to fourth sheath heaters 110 a to 110 d overlaps with another one if rotated 90° around an axis passing through the center of the second support plate 104 .

[0145] Even with the above-described layout, since the diameters of the plurality of sheath heaters 110 included in the stage 150 according to one embodiment of the present invention are small, the ends of the plurality of sheath heaters 110 can be arranged within the region 109. In addition, by adopting the above-described layout, the plurality of sheath heaters 110 having high symmetry can be arranged at a high density on the second support plate 104. Therefore, the temperature of the substrate can be controlled more uniformly and more accurately.

[0146] 5. Fifth Implementation

[0147] In this embodiment, the structure of the sheathed heater 110 different from that of the first embodiment is described. The description of the same or similar structure as that of the first embodiment may be omitted.

[0148] There is no limitation on the sheath heater 110 that can be used for the stage 100 of this embodiment, and sheath heaters 110 having various structures can be used. As an example, Fig. 10A A cross section of a single terminal type sheath heater 110 having a ribbon heater wire 118 is shown. Fig. 10B : is a diagram showing a cross section along the dot-dash lines G1 and G2 perpendicular to the major axis. Fig.11A A cross-sectional view of a single-terminal sheath heater 110 having a belt-shaped heater wire 118 having a spiral structure is shown. Fig. 11B is a diagram showing a cross section along the dot-dash lines H1 and H2 perpendicular to the long axis. Fig. 12A A cross-sectional view of a single-terminal sheath heater 110 having a belt-shaped heater wire 118 having a double helical structure is shown. Fig. 12B 3 is a diagram showing a cross section along dashed lines J1 and J2 perpendicular to the major axis.

[0149] Fig. 10A The sheath heater 110 shown is different from the sheath heater 110 shown in the first embodiment in that a strip-shaped heater wire 118 is folded inside a metal sheath 115 , and both ends thereof are taken out from one end of the metal sheath 115 .

[0150] Fig. 10A The cross-sectional shape of the sheath heater 110 shown is circular, and a strip-shaped heater wire 118 is used. Fig.11AAs shown, the heater wire 118 can be twisted in the metal sheath 115, and the part folded from one end and the part folded from the other end can each independently form a spiral structure. In the case where the strip-shaped heater wire 118 has a spiral structure, the spiral structure is adjusted so that the pitch L1 of the spiral is greater than 1.0 mm and less than 3.0 mm, greater than 1.0 mm and less than 2.5 mm, or greater than 1.0 mm and less than 2.0 mm. By adopting such a spiral structure, the length of the heater wire 118 corresponding to the metal sheath 115 per unit length can be increased, and the resistance value of the sheath heater 110 can be increased. Furthermore, the spring characteristics can be given to the heater wire 118, so that the disconnection of the heater wire 118 during deformation and thermal expansion can be suppressed. Therefore, even if, for example, the difference in the thermal expansion coefficients of the metal sheath 115 and the heater wire 118 is large, a sheath heater 110 with improved reliability can be provided.

[0151] like Fig. 10B and Fig. 11B As shown, the normal line of the heater wire 118 is almost perpendicular to the direction in which the metal sheath 115 extends. Furthermore, in the two portions of the heater wire 118 that are opposite to each other, the surfaces of the heater wire 118 are approximately parallel. In addition, by making the winding direction of the spiral structure the same and making its pitch L1 also approximately the same, the distance g4 between the two portions of the heater wire 118 that are opposite to each other (the distance between the portion of the heater wire 118 that is folded from one end and the portion of the heater wire 118 that is folded from the other end) can be kept constant, and as a result, a short circuit of the heater wire 118 can be prevented. However, in the two portions of the heater wire 118 that are opposite to each other, the winding direction or pitch L1 of the spiral may be different from each other.

[0152] like Fig. 12A As shown, the heater wire 118 may be configured such that two portions of the heater wire 118 facing each other have a double helical structure. In this case, the heater wire 118 may be configured such that the pitch L2 of the helical structure of the heater wire 118 is greater than or equal to 1.0 mm and less than or equal to 6.0 mm, greater than or equal to 1.0 mm and less than or equal to 2.5 mm, or greater than or equal to 1.0 mm and less than or equal to 2.0 mm.

[0153] Reference Fig. 10B and Fig. 11B and Fig. 12B, the width d11 of the heater wire 118 can be selected from a range of 0.1 mm to 2.0 mm, and the thickness d12 can be selected from a range of 0.1 mm to 0.5 mm. The inner diameter d2 of the metal sheath 115 can be selected from a range of 3.0 mm to 4.0 mm, the thickness d4 can be selected from a range of 0.5 mm to 1.0 mm, and the outer diameter d3 can be selected from a range of 3.0 mm to 6.0 mm. The distance g3 between the heater wire 118 and the metal sheath 115 can be selected from a range of 0.3 mm to 1.0 mm, or from a range of 0.4 mm to 1.0 mm. The distance g4 between the portion folded from one end of the heater wire 118 and the portion folded from the other end can be selected from a range of 0.3 mm to 2.0 mm, or from a range of 0.4 mm to 1.0 mm. Thus, the sheath heater 110 can be made thinner. Therefore, the sheath heaters 110 can be densely arranged on the stage 100. Therefore, the temperature distribution of the substrate can be further reduced. In addition, the insulation between the metal sheath 115 and the heater wire 118 can be ensured, and at the same time, the short circuit of the heater wire 118 can be prevented.

[0154] The shape of the cross section perpendicular to the long axis of the sheath heater 110 is not limited. For example, the shape of the cross section perpendicular to the long axis of the sheath heater 110 may be as follows: Figure 1B Although not shown in the figure, the circular shape shown in the figure may be a polygonal shape or an elliptical shape. When the cross-sectional shape is a circle, the force required for deformation is independent of the bending direction, so the sheath heater 110 can be easily bent in any direction. Therefore, the sheath heater 110 can be easily arranged in FIG. 6B to FIG. 9 The grooves are formed by the first support plate 102, the second support plate 104, etc. shown.

[0155] 6. Sixth Implementation

[0156] In this embodiment, a film forming apparatus and a film processing apparatus having the stage 100 or the stage 150 are described. In this embodiment, a film forming apparatus and a film processing apparatus having the stage 100 are described as an example. There is a case where the description of the same or similar structure as the first to fifth embodiments is omitted.

[0157] 6-1. Etching equipment

[0158] Fig.13 A cross-sectional view of an etching device 200 as one of the film processing devices is shown. The etching device 200 can perform dry etching on various films. The etching device 200 has a chamber 202. The chamber 202 provides a space for etching a film such as a conductor, an insulator, or a semiconductor formed on a substrate.

[0159] The exhaust device 204 is connected to the chamber 202, thereby the chamber 202 can be set to a reduced pressure atmosphere. The chamber 202 is also provided with an introduction pipe 206 for introducing a reaction gas, and the reaction gas for etching is introduced into the chamber through a valve 208. Examples of the reaction gas include carbon tetrafluoride (CF4), octafluorocyclobutane (c-C4F8), decafluorocyclopentane (c-C5F 10 ), hexafluorobutadiene (C4F6) and other fluorine-containing organic compounds.

[0160] A microwave source 212 may be disposed at the upper portion of the chamber 202 via a waveguide 210. The microwave source 212 has an antenna for providing microwaves, and outputs high-frequency microwaves such as 2.45 GHz microwaves or radio frequency (RF) microwaves of 13.56 MHz. The microwaves generated by the microwave source 212 propagate to the upper portion of the chamber 202 via the waveguide 210, and are introduced into the chamber 202 via a window 214 made of quartz, ceramic, or the like. The reaction gas is plasmatized under the action of the microwaves, and the film is etched using electrons, ions, and free radicals contained in the plasma.

[0161] The stage 100 of one embodiment of the present invention is arranged at the lower part of the chamber 202 so as to arrange the substrate. The substrate is arranged on the stage 100. The power supply 224 is connected to the stage 100 to provide high-frequency power to the stage 100, and an electric field generated under the action of microwaves is formed in a direction perpendicular to the surface of the stage 100 and the surface of the substrate. The magnet 216, the magnet 218 and the magnet 220 can also be arranged on the upper part and the side of the chamber 202. The magnet 216, the magnet 218 and the magnet 220 can be a permanent magnet or an electromagnet with an electromagnetic coil. The magnetic field component parallel to the surface of the stage 100 and the substrate is generated by the magnet 216, the magnet 218 and the magnet 220, and the magnetic field component is coordinated with the electric field generated under the action of the microwave, so that the electrons in the plasma are subjected to the Lorentz force and resonate, and are bound to the stage 100 and the substrate surface. As a result, a high-density plasma can be generated on the substrate surface.

[0162] The stage 100 is further connected to a heater power supply 230 for controlling the sheath heater 110 provided on the stage 100. The stage 100 may also be connected, as an arbitrary structure, to a power supply 226 for an electrostatic chuck for fixing a substrate on the stage 100, a temperature controller 228 for controlling the temperature of a medium circulating inside the stage 100, and a rotation control device (not shown) for rotating the stage 100.

[0163] As described above, the stage 100 according to one embodiment of the present invention is used in the etching apparatus 200. By using the stage 100, the substrate can be uniformly heated and the heating temperature can be accurately controlled. Therefore, the etching apparatus 200 can uniformly etch various films provided on the substrate.

[0164] 6-2.CVD equipment

[0165] Fig.14 A cross-sectional view of a CVD apparatus 300 as one of film forming apparatuses is shown. The CVD apparatus 300 includes a chamber 302. The CVD apparatus 300 provides a place for chemically forming various films on a substrate by chemically reacting a reaction gas.

[0166] The exhaust device 304 is connected to the chamber 302 and can reduce the pressure in the chamber 302. The chamber 302 is also provided with an introduction pipe 306 for introducing a reaction gas, and the reaction gas for film formation is introduced into the chamber 302 via a valve 308. As the reaction gas, various gases can be used according to the film to be formed. The gas can be liquid at room temperature. For example, by using silane, dichlorosilane, tetraethoxysilane, etc., a thin film of silicon, silicon oxide, or silicon nitride can be formed. Alternatively, by using tungsten fluoride, trimethylaluminum, etc., a metal thin film of tungsten, aluminum, etc. can be formed.

[0167] Similar to the etching device 200, a microwave source 312 may be provided at the upper portion of the chamber 302 via a waveguide 310. The microwaves generated by the microwave source 312 are introduced into the chamber 302 via the waveguide 310. The reaction gas is plasmatized by the microwaves, and the chemical reaction of the gas is promoted by various active species contained in the plasma. The product obtained by the chemical reaction is deposited on the substrate to form a thin film. The magnet 344 for increasing the density of the plasma may be provided in the chamber 302 as an arbitrary structure. The stage 100 described in the first embodiment may be provided at the lower portion of the chamber 302, and the thin film may be deposited in a state where the substrate is provided on the stage 100. Similar to the etching device 200, the magnets 316 and 318 may be further provided on the side of the chamber 302.

[0168] The stage 100 may be further connected to a heater power supply 330 for controlling the sheath heater 110 provided on the stage 100. The stage 100 may be further connected to a power supply 324 for supplying high-frequency power to the stage 100, a power supply 326 for an electrostatic chuck, a temperature controller 328 for controlling the temperature of a medium circulating inside the stage 100, a rotation control device (not shown) for rotating the stage 100, and the like as an arbitrary structure.

[0169] 6-3. Sputtering device

[0170] Fig.15 A cross-sectional view of a sputtering device 400 as one of the film forming devices is shown. The sputtering device 400 has a chamber 402. The sputtering device 400 provides a place for high-speed ions to collide with a target and for target atoms generated at this time to be deposited on a substrate.

[0171] An exhaust device 404 for reducing the pressure in the chamber 402 is connected to the chamber 402. The chamber 402 is provided with an introduction pipe 406 and a valve 408 for introducing a sputtering gas such as argon gas into the chamber 402.

[0172] A target stage 410 is provided at the bottom of the chamber 402, and a target 412 is provided on the target stage 410, wherein the target stage 410 holds a target containing a material for film formation and functions as a cathode. A high frequency power supply 414 is connected to the target stage 410, and plasma can be generated in the chamber 402 by the high frequency power supply 414.

[0173] The stage 100 described in the first embodiment may be disposed above the chamber 402. In this case, the thin film is formed with the substrate disposed under the stage 100. As with the etching apparatus 200 and the CVD apparatus 300, a heater power supply 430 is connected to the stage 100. The stage 100 may further be connected with a power supply 424 for supplying high-frequency power to the stage 100, a power supply 426 for an electrostatic chuck, a temperature controller 428, and a rotation control device (not shown) for rotating the stage 100.

[0174] Argon ions accelerated by the plasma generated in the chamber 402 collide with the target 412, ejecting atoms of the target 412. The ejected atoms fly toward and are deposited on the substrate disposed under the stage 100 while a shutter 416 is open.

[0175] In the present embodiment, a structure in which the stage 100 is disposed at the upper portion of the chamber 402 and the target stage 410 is disposed at the lower portion of the chamber 402 is illustrated, but the present embodiment is not limited to this structure, and the sputtering device 400 may be configured so that the target 412 is located above the stage 100. Alternatively, the stage 100 may be disposed so that the main surface of the substrate is configured to be perpendicular to the horizontal plane, and the target stage 410 may be disposed so as to be opposed to the stage 100.

[0176] 6-4. Evaporation device

[0177] Fig.16The cross-sectional view of an evaporation device 500 as one of the film forming devices is shown. The evaporation device 500 has a chamber 502. The evaporation device 500 provides a space for evaporating a material of an evaporation source 510 and depositing the evaporated material on a substrate.

[0178] An exhaust device 504 for making the chamber 502 highly vacuumed is connected to the chamber 502. An introduction pipe 506 for returning the chamber 502 to atmospheric pressure is provided in the chamber 502, and an inert gas such as nitrogen or argon is introduced into the chamber 502 via a valve 508.

[0179] The stage 100 may be disposed at the upper portion of the chamber 502. The material is deposited while the substrate is disposed under the stage 100. As with the etching device 200, the CVD device 300, and the sputtering device 400, a heater power supply 528 may be further connected to the stage 100. As an arbitrary structure, a power supply 524 for an electrostatic chuck, a temperature controller 526, and a rotation control device 530 for selecting the stage 100 may be further connected to the stage 100. The stage 100 may further include a mask holder 516 for fixing a metal mask between the substrate and the vapor deposition source 510. Thus, the metal mask may be arranged near the substrate so that the opening of the metal mask overlaps with the region where the material is to be deposited.

[0180] The evaporation source 510 is provided at the lower side of the chamber, and the material to be evaporated is filled in the evaporation source 510. The evaporation source 510 is provided with a heater for heating the material, and the heater is controlled by a control device 512. The chamber 502 is made into a high vacuum by using an exhaust device 504, and the evaporation source 510 is heated to vaporize the material, thereby starting evaporation. When the evaporation speed becomes constant, the material is deposited on the substrate by opening the shutter 514.

[0181] As described above, the stage according to one embodiment of the present invention is used in a film forming apparatus such as the CVD apparatus 300, the sputtering apparatus 400, or the evaporation apparatus 500 of this embodiment. By using the stage, the substrate can be uniformly heated, and the heating temperature can be accurately controlled. Therefore, by using these film forming apparatuses, various films with controlled characteristics can be uniformly formed on the substrate.

[0182] As an embodiment of the present invention, as long as the above-mentioned embodiments are not contradictory, they can be appropriately combined and implemented. In addition, as long as the purpose of the present invention is possessed, the addition, deletion or design change of appropriate structural elements performed by those skilled in the art according to the various embodiments is also included in the scope of the present invention.

[0183] Furthermore, even if the effects are different from the effects brought about by the above-mentioned embodiments, the effects that are obvious from the description of this specification or that can be easily predicted by a person skilled in the art should naturally be understood as the effects brought about by the present invention.

[0184] (Explanation of Reference Numerals)

[0185] 100: stage; 102: first support plate; 104: second support plate;

[0186] 104-3: upper surface; 104-4: lower surface; 108: axis; 109: region;

[0187] 110: sheath heater; 110a: first sheath heater; 110b: second sheath heater;

[0188] 110c: third sheath heater; 110d: fourth sheath heater; 112: lead wire;

[0189] 114: terminal; 115: metal sheath; 116: first insulator; 118: heater wire;

[0190] 120: first groove; 122: first insulating member; 122a: first insulating member;

[0191] 125: protrusion; 122b: first insulating member; 123: first through hole;

[0192] 123a: first through hole; 123b: second through hole; 124: cover-shaped member; 124a: first hole;

[0193] 124b: second hole; 128: second insulating member; 128a: second insulating member;

[0194] 128b: second insulating member; 130: through hole; 132: third insulator;

[0195] 136: second insulator; 140: second groove; 150: stage; 200: etching device;

[0196] 202: chamber; 204: exhaust device; 206: introduction pipe; 208: valve; 210: waveguide;

[0197] 212: microwave source; 214: window; 216: magnet; 218: magnet; 220: magnet;

[0198] 224: power supply; 226: power supply; 228: temperature controller; 230: heater power supply;

[0199] 300: device; 302: chamber; 304: exhaust device; 306: introduction pipe;

[0200] 308: valve; 310: waveguide; 312: microwave source; 316: magnet; 318: magnet;

[0201] 324: power supply; 326: power supply; 328: temperature controller; 330: heater power supply;

[0202] 344: magnet; 400: sputtering device; 402: chamber; 404: exhaust device;

[0203] 406: introduction tube; 408: valve; 410: target platform; 412: target; 414: high frequency power supply;

[0204] 416: baffle; 424: power supply; 426: power supply; 428: temperature controller; 430: heater power supply;

[0205] 500: evaporation device; 502: chamber; 504: exhaust device; 506: introduction pipe;

[0206] 508: valve; 510: evaporation source; 512: control device; 514: baffle;

[0207] 516: mask holder; 524: power supply; 526: temperature controller;

[0208] 528: heater power supply; 530: rotation control device.

Claims

1. A heater, comprising: folded heater wires; a first insulator disposed on the heater wire; a metal sheath disposed in contact with at least a portion of the first insulator; a first insulating member arranged to be parallel to at least a portion of one side of the heater wire taken out from the first end portion of the metal sheath; a second insulating member arranged to be parallel to at least a portion of the first insulating member and to be parallel to at least a portion of the other side of the heater wire taken out from the first end of the metal sheath; a second insulator in contact with at least a portion of the metal sheath, the first insulating member, and the second insulating member; as well as a cover-shaped member covering a portion of the first insulating member, connected to the metal sheath, the first insulating member, and at least a portion of the second insulating member via the second insulator, and parallel to the metal sheath, the first insulating member, and at least a portion of the second insulating member, The cover-shaped member has a structure that is concave inwardly, The second insulator is in contact with the inner side of the cover-shaped member, The cover-shaped member is fitted to the first insulating member via the second insulator.

2. The heater according to claim 1, wherein The cover member is composed of one member having a predetermined thickness.

3. The heater according to claim 1, wherein The inner diameter of the cover-shaped component is substantially the same as the outer diameter of the first insulating component, and the outer diameter of the cover-shaped component is substantially the same as the outer diameter of the metal sheath.

4. The heater according to claim 1, wherein The inner diameter of the metal sheath is substantially the same as the outer diameter of the first insulating component, The first insulating member is inserted into the metal sheath.

5. The heater according to claim 1, wherein The first insulating member has a protruding portion, and the cover-shaped member is fitted into the protruding portion via the second insulator.

6. The heater according to claim 5, wherein The protrusion protrudes in a direction opposite to a direction in which the metal sheath is provided.

7. The heater according to claim 1, wherein The first insulating member has a through hole, The second insulating member is inserted into the through hole.

8. The heater according to claim 7, wherein The hole diameters of the through holes are different between the upper portion and the lower portion of the first insulating member.

9. The heater according to claim 8, wherein The cross section of the through hole is stepped at the connecting part with different apertures. The second insulating member is inserted into the connecting portion.

10. The heater according to claim 1, wherein The heater wire is in the shape of a ribbon.

11. The heater according to claim 1, wherein The heater wire has a spiral structure.

12. The heater according to claim 1, wherein The heater wire has a double helix structure.

13. The heater according to claim 1, wherein The second insulator is a sealant or an adhesive.

14. The heater according to claim 1, wherein The metal sheath contains aluminum.

15. The heater according to claim 1, wherein The outer diameter of the metal sheath is greater than or equal to 3.0 mm and less than or equal to 6.0 mm.

16. The heater according to claim 1, wherein The cover member contains aluminum.

17. The heater according to claim 1, wherein The outer diameter of the cover-shaped member is greater than or equal to 3.0 mm and less than or equal to 6.0 mm.

Images