Adaptive optical device with simplified structure and related manufacturing method

Abstract

The invention relates to an adaptive optical device (1) comprising a deformable plate (2) capable of deforming an incident wavefront by refraction and / or reflection, characterised in that it comprises: - a wing (5) attached to the plate (2), - a frame (21) fixed relative to the plate (2), each wing (5) comprising a movable part (22) connected to at least one respective peripheral actuator (7) so that the peripheral actuator can locally deform the wing (5) so that the latter transmits a deformation force to the deformable plate (2), each wing (5) also comprising a respective fixed part (23) fixedly attached to the frame (21) so as to be fixed relative to the latter. The invention is particularly suitable for the controlled introduction or correction of optical aberrations in the incident wavefront.

Description

Technical Field

[0001] The present invention relates to the general technical field of adaptive optics and is applicable to astronomy, medicine, especially ophthalmology, laser applications, microscopy, microelectronics, etc.

[0002] The invention more particularly relates to an adaptive optical device comprising a deformable plate that can deform an incident wavefront by refraction and / or reflection.

[0003] The invention also relates to a method for manufacturing such an adaptive optical device.

[0004] Existing background

[0005] It is known to use active optical devices, i.e. adaptive optical devices, such as deformable mirrors, to produce or correct optical aberrations, such as astigmatism, in an incident wavefront in a controllable manner. In practice, such a deformable mirror can be configured to change the shape of the wavefront in a desired manner by utilizing the deformation produced on the surface of such a mirror that reflects the incident wavefront. The incident wavefront that reaches the surface of the mirror is deformed into a reflected wavefront, wherein the initial optical aberration (the incident wavefront aberration) is produced or corrected by the deformable mirror. Adaptive mirrors are known in particular in the field of astronomy and include a circular deformable plate with a reflective surface, the plate being connected to and surrounded by a thick rigid ring that extends outwardly through a plurality of arms. Each arm is connected to a pair of actuators that can apply a force or torque to the ring and thereby deform the wavefront reflected on the reflective surface of the plate. In order to achieve a satisfactory deformation and reduce the risk of damaging the plate, it also has a greater thickness and a specific and thick central hole.

[0006] These known adaptive mirrors, while generally satisfactory in their target field (astronomy), still have some drawbacks.

[0007] The design of these known mirrors requires in practice a large number of actuators, since each arm should be equipped with a pair of actuators in order to obtain, in particular, the desired deformation amplitude. In addition, the ring is relatively rigid and thick, and the plate is also relatively thick, and the actuators need to be dimensioned so that they can exert a sufficient moment on the edge of the plate through the ring to deform it, wherein the entire system is relatively heavy. Finally, the arm itself should be rigid and thick in order to withstand the forces exerted by the pair of actuators connected thereto. In particular, in order to achieve the desired deformation of the plate, it is necessary according to the existing construction of a deformable mirror with arms to use a large number of arms and therefore a large number of actuators.

[0008] These different requirements and restrictions therefore increase the manufacturing costs and result in greater volume and weight, as well as greater deformation inertia (or longer reaction time) and make the mounting and adjustment of these known plane mirrors particularly difficult.

[0009] In addition, during the manufacturing process, each pair of actuators should be very accurately positioned not only relative to their respective arms, but also relative to each other. To make matters more complicated, multiple pairs of actuators should be very accurately and strictly positioned relative to each other.

[0010] The last two constraints further increase the manufacturing costs of these known mirrors, and the correct mounting of the pairs of actuators proves to be particularly complex in practice.

[0011] Therefore, for these known mirrors, due to their design, there is a greater risk that some of the actuators are not positioned correctly, which increases the risk of inaccuracies in the control of the deformation of the reflective surface of the plate, leading to correction defects or defects in the introduction of the expected optical aberrations in the incident wavefront. The reliability of these known mirrors is therefore affected.

[0012] In summary, the known plane mirrors described above prove to be relatively large, cumbersome and expensive and do not have optimal reliability and responsiveness. Summary of the invention

[0013] The object of the present invention is therefore to overcome the above-mentioned drawbacks and to propose a novel adaptive optical device which is robust, compact, lightweight, has a controllable manufacturing cost, and can be easily and quickly implemented.

[0014] Another object of the present invention is to provide a novel adaptive optical device with simple structure and reliability.

[0015] Another object of the present invention is to provide a novel adaptive optical device, which is designed to be easily, quickly and cost-effectively installed in an optical system.

[0016] Another object of the invention is to propose a novel adaptive optical device which is suitable for particularly simple, reliable and controllable generation of a desired deformable plate curvature (concavity or convexity), for example in order to controllably, precisely and rapidly deform an incident wavefront.

[0017] Another object of the present invention is to provide a novel adaptive optical device which is particularly convenient to use and can introduce or correct optical aberrations by reflection and / or refraction, while being easy and fast to maintain and adjust.

[0018] Finally, another object of the present invention is to propose a novel adaptive optical device which, although having an extremely simple and lightweight structure, can achieve an excellent deformation amplitude range accurately and in a controlled manner.

[0019] In addition, another object of the present invention is to propose a new method for manufacturing an adaptive optical device, which is easy, fast and low-cost to implement, while obtaining an adaptive optical device that is particularly reliable, compact, responsive, lightweight and strong.

[0020] The object of the present invention is achieved by an adaptive optical device comprising a deformable plate capable of deforming an incident wavefront by refraction and / or reflection, characterized in that it also comprises at least:

[0021] - a fin fixedly attached to said deformable plate,

[0022] - a frame fixed relative to said deformable plate,

[0023] - a plurality of peripheral actuators,

[0024] Each wing comprises a movable portion connected to at least one respective peripheral actuator, so that the peripheral actuator can locally deform the wing, so that the latter transmits the deformation force to the deformable plate, and each wing also comprises a respective fixed portion, which is fixedly attached to the frame so as to be fixed relative to the latter.

[0025] The object of the present invention is also achieved by a method for manufacturing an adaptive optical device, the method comprising a first step of manufacturing and providing a deformable plate that can deform an incident wavefront by refraction and / or reflection, the method being characterized in that it at least further comprises:

[0026] - a second step, making a fin fixedly attached to said deformable plate,

[0027] - an arming step during which the respective movable portion of each wing is connected to a respective at least one actuator enabling the latter to locally deform said wing so that it transmits a deformation force to said deformable plate,

[0028] - a fixing step during which the respective fixing portion of each wing is fixedly attached to a frame fixed relative to the deformable plate so as to be fixed relative to the latter. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Other features and advantages of the invention are described and explained in more detail below by means of a description given only as a non-limiting example, with reference to the accompanying drawings, in which:

[0030] - Figure 1 The perspective view shows a cross section along the sagittal plane of an example of the adaptive optical device of the present invention when viewed from the hidden surface side of the plate.

[0031] - Figure 2 The side view shows Figure 1A cross-section of the adaptive optics device along the sagittal plane.

[0032] - Figure 3 A sagittal cross-section of one embodiment of an adaptive optical device is shown in side view, with an obtuse dihedral angle formed between the deformable plate and the wings, and without a frame or actuator.

[0033] - Figure 4 Another embodiment of an adaptive optical device is shown in a side view in cross-section along a sagittal plane, wherein a sharp dihedral angle is formed between the deformable plate and the wings, without a frame or actuator.

[0034] - Figure 5 A cross section along the sagittal plane of yet another embodiment of an adaptive optical device is shown, wherein a straight dihedral angle is formed between the deformable plate and the wings, without a frame or actuator.

[0035] - Figure 6 A cross section along the sagittal plane of yet another embodiment of an adaptive optical device is shown with rounded wings, without a frame or actuator, and with an obtuse dihedral angle formed between the deformable plate and the wings.

[0036] - Figure 7 The perspective view shows a Fig. 9 A plate member of a wing of an adaptive optical device in which the deformable plate is observed from the side of its incident surface.

[0037] - Figure 8 The perspective view shows Fig. 9 The plate and the fins in the

[0038] Each is equipped with its own peripheral actuator, and the deformable plate is viewed from its hidden surface side.

[0039] - Fig. 9 An example of the adaptive optics device of the present invention is shown in a perspective view.

[0040] - Fig.10 A first alternative manufacturing method according to the invention is shown in a perspective view for producing Fig. 9 An adaptive optical device in which a central actuator is further provided.

[0041] - Fig.11 A perspective view shows a part of a second alternative manufacturing method according to the invention for producing Fig. 9 Adaptive optics device.

[0042] - Fig.12An embodiment of the hexagonal deformable plate and trapezoidal wings of the adaptive optical device of the present invention is shown in a perspective view, observed from the hidden surface side of the plate.

[0043] - Fig.13 Another embodiment of the deformable plate and fins of the adaptive optical device of the present invention is shown in a perspective view, viewed from the hidden surface side of the plate.

[0044] - Fig.14 A specific embodiment of the deformable plate and wing of the adaptive optical device according to the present invention is shown in a perspective view, observed from the hidden surface side of the plate.

[0045] - Fig.15 The adaptive optical device according to the present invention is shown in a perspective view, wherein the deformable plate thereof is deformed by an actuator, thereby presenting an outline of an example of a deformation pattern.

[0046] Preferred Embodiments of the Invention

[0047] According to a first aspect, the present invention relates to an adaptive optics device 1 as shown in the figure.

[0048] Therefore, the adaptive optical device 1 can be advantageously used in systems that require the application of adaptive optics, such as microscopic observation systems, astronomical observation systems, atmospheric turbulence vision correction systems, image magnification or reduction systems, zoom systems, image distortion systems or ophthalmic imaging systems.

[0049] According to the invention and as shown in the accompanying drawings, an adaptive optical device 1 comprises a deformable plate 2 which can deform an incident wavefront by refraction and / or reflection.

[0050] Preferably, the adaptive optical device 1 is constituted by a deformable plane mirror and / or an adaptive lens. For example, the adaptive optical device 1 can introduce or correct optical aberrations in the light wavefront (or light beam). The adaptive optical device 1 is therefore advantageously designed, in particular when it constitutes a deformable plane mirror, so as to dynamically, i.e. variably and controllably reflect the incident wavefront, in order to, for example, introduce or correct optical aberrations in the wavefront. Preferably, the adaptive optical device 1, in particular when it constitutes an adaptive lens, is designed for dynamically, i.e. variably and controllably refracting the wavefront, in order to, for example, introduce or correct optical aberrations in the wavefront. The adaptive lens constitutes, for example, a refractive medium, for example more refractive than air or the environment of the lens, so as to deform the incident wavefront. For example, the deformable plate 2 constitutes one of the faces of the adaptive lens and comprises at least one refractive material, such as, in particular, a fluid, or a solid, or even a gas, having a refractive index not equal to 1, in particular greater than 1. The adaptive lens is preferably at least partially deformable, in particular at the deformable plate 2.

[0051] Advantageously, in the absence of external influences, the deformable plate 2 is generally flat or curved in configuration. For example, the deformable plate 2 is slightly curved, i.e. convex (or slightly concave, depending on the viewing angle). The convexity (or concavity, depending on the viewing angle) of the deformable plate 2 is preferably small enough, i.e. has a relatively large radius of curvature relative to the size of the deformable plate 2, so that the surface of the deformable plate 2 is (slightly) bent and assimilated into a flat surface, at least partially (that is, at least over a portion of the area of ​​the deformable plate 2).

[0052] Preferably, and as shown in the accompanying drawings, the deformable plate 2 is substantially along the first intermediate extension plane when at rest. P Thus, at rest, that is to say advantageously without mechanical deformation stresses exerted on said deformable plate 2 by, for example, an actuator, the deformable plate advantageously (whether it is flat or slightly curved) lies in said first intermediate extension plane. P The first intermediate extension plane intersects the deformable plate 2 preferably over most, almost all or all of its thickness.

[0053] Advantageously, the deformable plate 2 is a thin deformable plate that is deformed in particular under the effect of an external force exerted on its surface, in particular a force exerted by at least one actuator.

[0054] Preferably, the deformable plate 2 is made of a relatively soft material, but still has a certain mechanical strength, so that it deforms only slightly or not at all, unless it is subjected to the smallest external pressure or tension. Thus, advantageously, the deformable plate 2 is inherently mechanically strong, not slack, but has sufficient softness and flexibility to undergo slight elastic deformations, that is to say reversible, in particular when it is bent by stress, in particular by the stress applied by the actuator (described in more detail below).

[0055] Preferably, the deformable plate 2 is mainly made of silicon, metal (such as steel or aluminum), alloy, polymer, composite material, ceramic, glassy amorphous material (such as organic or inorganic glass, such as heat-resistant glass), quartz or its derivatives, or a combination of several different materials, especially a combination of the above materials. Advantageously, the average thickness of the deformable plate 2 is roughly between 5 and 500 μm. Preferably, in order to achieve the functions involved in the present invention, the deformable plate 2 has relatively small specifications. For example, the diameter of the deformable plate 2 (especially when the deformable plate 2 is circular) and / or a larger dimension (especially the length, such as when the deformable plate 2 is elliptical or rectangular) is between 5 and 300 mm.

[0056] Preferably, and as shown in the accompanying drawings, the deformable plate 2 has a geometric center C , such as the center of gravity and / or center of mass.

[0057] Preferably, the deformable plate 2 has a peripheral edge 11. For example, and specifically as shown in the attached Figure 1 , 7 As shown in 11, 13, and 14, the shape of the deformable plate 2 is generally circular or elliptical. Therefore, in these latter two examples, the periphery 11 defining the deformable plate 2 advantageously constitutes a circle or an ellipse. Alternatively, the deformable plate 2 is a triangle, a rectangle, a square, a trapezoid, or any other suitable geometric shape or polygon. Therefore, the periphery 11 optionally constitutes a polygon, such as a rectangle or a hexagon, as shown in FIG. Fig.12 shown.

[0058] According to the present invention, the deformable plate 2 has an incident surface 3 that can receive the wavefront. The incident surface 3 preferably includes or forms an optical surface that can be used for application in an adaptive optical system, and the optical surface preferably can receive the incident wavefront. The incident surface 3 (more precisely, the optical surface) preferably has a substantially smooth surface that can receive the incident wavefront, and the deformable plate 2 and / or the incident surface 3 are designed to introduce and / or correct optical aberrations when the deformable plate 2 is effectively deformed. Therefore, the deformable plate 2 can preferably be reversibly deformed according to several deformation configurations, one of which is Fig.15 Therefore, the incident surface 3 is advantageously integral (ie, an integral component formed at one time, with visual, physical and mechanical continuity), has no unevenness or concavities, and can preferably receive the incident wavefront.

[0059] The deformable plate 2 is advantageously designed to receive the incident wavefront and to deform it in a controlled manner, in particular via the incident face 3, so as to emit a deformed wavefront (in particular to reflect and / or refract). More precisely, the deformable plate 2 is preferably designed to receive the incident wavefront so as to:

[0060] - reflecting it in the form of a reflected wavefront (including deformation), in particular when the adaptive optical device 1 is a deformable plane mirror, and / or

[0061] - refracting it in the form of a refracted wavefront (ie transmitting it in a deformed manner), in particular when the adaptive optical device 1 is an adaptive lens.

[0062] The reflected and / or refracted light beam exhibits, for example, optical aberrations not present in the incident wavefront, or corrections of optical aberrations present in the incident wavefront, or both. Preferably, the reflected and / or refracted wavefront is thus deformed relative to the incident wavefront. In other words, the adaptive optical device 1 is advantageously designed to deform the incident wavefront in a controlled manner and according to several continuous configurations, since, according to the setting, the adaptive optical device 1 is adaptive according to the expected changes, the incident wavefront, the angle of incidence of the latter, the medium, etc. Alternatively, the adaptive optical device can be designed to reflect a part of the incident wavefront and to refract another part.

[0063] Advantageously, the deformable plate 2 also has a hidden surface 4 opposite to the incident surface 3. Thus, advantageously, the incident surface 3 and the hidden surface 4 are located on surfaces opposite to each other on both sides of the deformable plate 2. Thus, the deformable plate 2 advantageously has a substantially flat shape when at rest, or alternatively substantially curved, wherein the incident surface 3 and the hidden surface 4 are separated by the thickness of the deformable plate 2, the thickness preferably being smaller than the radial extension of the two surfaces 3, 4 of the deformable plate 2. According to a first alternative, the incident surface 3 is (at least partially) substantially parallel to the hidden surface 4. According to another alternative, in particular in some cases where the adaptive optical device 1 is an adaptive lens (or a specific deformable plane mirror), the incident surface 3 is not parallel to the hidden surface 4, and the deformable plate 2 is, for example, curved on two mutually opposite surfaces of the deformable plate 2, in other words, substantially convex on both the incident surface 3 and the hidden surface 4, or, on the contrary, substantially concave towards both the incident surface 3 and the hidden surface 4.

[0064] When the adaptive optical device 1 constitutes the deformable plane mirror, the incident surface 3 advantageously constitutes a reflective surface. Obviously, when the adaptive optical device 1 constitutes the adaptive lens, the incident light advantageously enters the deformable plate 2 via the incident surface 3 and leaves the deformable plate via the hidden surface 4, thereby passing through the deformable plate 2. Therefore, the thickness of the deformable plate 2 can play a role in the deformation of the incident wavefront, while the hidden surface 4 is only "hidden" from the perspective of the incident wavefront.

[0065] Advantageously, the deformable plate 2 can be subjected to forces and / or moments of pressure and / or tension, for example applied to the periphery of the deformable plate 2, more precisely to the periphery 11, which can make the deformable plate 2 reversibly deformable (that is to say advantageously within the elastic range), which is controlled and appropriate, that is to say in a satisfactory manner, so that the adaptive optical device 1 realizes a certain function in the adaptive optical system. Preferably, the forces and / or moments are applied to the side faces of the hidden surface 4 and / or to the hidden surface, so as to generate convexity or concavity, for example, on the opposite incident surface 3.

[0066] The incident surface 3 and the hidden surface 4 are preferably an integral part of the deformable plate 2, for example, they are made of the same material. Alternatively, the deformable plate 2 is composed of several plate parts connected to each other, for example, by gluing, one of which includes the incident surface 3 (or a part of the incident surface, such as the optical surface), and another of the plate parts includes the hidden surface 4.

[0067] According to the invention and as shown in the attached drawings, the adaptive optical device 1 also comprises a wing 5 fixedly attached to the deformable plate 2. Thus, the wing 5 is advantageously integral with the deformable plate 2 and this is permanent and irreversible. In other words, the wing 5 is preferably embedded in connection with the deformable plate 2. Advantageously, the wing 5 is separate from each other, that is to say preferably not directly connected to each other, and furthermore the wing 5 is advantageously at a distance from each other. Each wing 5 is, for example, in the form of a portion of a deformable thin plate, which advantageously deforms and / or moves, for example bends, under the action of an external force applied to its surface, in particular a force applied by at least one actuator. The wing 5 is preferably directly connected to the deformable plate 2, without significant intermediate elements (except possibly used glue, welding rods, etc.), and preferably without elements that are rigid and / or have inherent mechanical strength.

[0068] Preferably, each of the fins 5 is not directly connected to the other fins 5, that is, by bending one of the fins 5, for example, the other fins 5 do not bend or move, or at least do not bend or move in the same way as the associated fins 5. The fins 5 are preferably connected to the deformable plate 2 via the peripheral edge 11 and can be substantially elongated. Preferably, each fin 5 extends from the deformable plate 2 relative to the geometric center. C Extend radially, for example, outwardly, Figures 1 to 3 , 7 to 14, or extending inwardly, as shown in 4, preferably starting from the peripheral edge 11. Advantageously, as shown in the accompanying drawings, the fin 5 surrounds the geometric center C The angles are evenly distributed. As shown in the figures, the fins 5 are, for example, substantially identical to one another, although alternatively some fins 5 may also be wider and / or thicker and / or stiffer and / or longer than others.

[0069] According to a particular embodiment, each flap 5 extends regularly on either side of a (single) respective longitudinal extension axis, so that there is preferably a straight line segment extending all along the flap through the material constituting the flap 5, such as Figures 1 to 4 and Figures 7 to 14 Preferably, each extension axis passes through a central axis, which extends substantially perpendicularly to the deformable plate 2 and passes through the geometric centerC .

[0070] Advantageously, as shown in the specific embodiment illustrated in the drawings, the peripheral edge 11 is free except for being connected to the fin 5. In other words, the peripheral edge 11 is preferably not connected to any structure (separate from the deformable plate 2) other than the fin 5. This configuration of the "free" peripheral edge 11 allows a greater range of possible deformations of the deformable plate 2 without exerting a large force on the fin 5, such as the force exerted by the peripheral actuator 7, as will be described in more detail below.

[0071] Preferably, the periphery 11 advantageously does not have a significant thickness excess and, for example, does not exceed three times, preferably does not exceed two times, the thickness of the rest of the deformable plate 2. In particular, the thickness of the periphery 11 is advantageously close to the thickness of the rest of the deformable plate 2, the deviation being possibly less than or equal to 25%, more preferably less than or equal to 15%. Preferably, as shown in the figures, each fin 5 is separated from its adjacent fin 5 by a spacer 6. Each fin 5 is therefore advantageously bordered by two of said spaces 6, which are separated from each other by said fins 5. Said spaces 6 may, for example, be sufficiently wide and in particular as wide as or wider than said fins 5, as shown in the figures, or be quite narrow, narrower than said fins 5, while said spaces 6 form grooves (or slots), preferably through-going. Said fins 5 are preferably not directly connected to each other, said spaces 6 advantageously being through-going. Advantageously, said plate 2 together with said fins 5 attached thereto constitutes a star-shaped deformable body formed in one piece with a plurality of branches, each branch being constituted by one of said fins 2. Alternatively, the deformable plate 2 and the fins 5 constitute an assembly of a generally circular structure, each fin 5 advantageously constituting a respective peripheral portion of a respective sector of the assembly of the generally circular structure. Alternatively, each of the fins 5 has a petal shape and arrangement around the deformable plate 2. The periphery 11 advantageously has free portions in the space 6, so that these free portions are not connected to any structure (except the deformable plate 2, of course, the free portions constitute part of the deformable plate 2). More precisely, the free portions may partially delimit the space 6. In other words, advantageously, the periphery 11 comprises, between each pair of adjacent fins 5, respective free portions (as described above) that are not connected to any structure.

[0072] According to a second aspect, the present invention relates to a method for manufacturing an adaptive optical device 1. The method is preferably implemented to manufacture the adaptive optical device 1 described above and below. Therefore, the above description about the adaptive optical device 1, similar to the following, preferably also applies to the manufacturing method according to the present invention, and vice versa, the description about the manufacturing method in the following preferably also applies to the adaptive optical device 1 according to the present invention.

[0073] Therefore, according to the second aspect of the present invention, the manufacturing method comprises a first step of making and providing a deformable plate 2 that can deform an incident wavefront by refraction and / or reflection.

[0074] Still according to the present invention, the manufacturing method further comprises at least a second step of making the fins 5 fixedly attached to the deformable plate 5. For example, as shown in the accompanying drawings, the adaptive optical device 1 preferably comprises at least four fins 5, in particular four to twenty fins 5, for example Figures 7 to 10 As shown, eight fins 5 are included, or according to Fig.13 Another example shown includes four fins 5, or according to Fig.11 and 12 Another example shown includes six fins 5, or according to Figure 1 Another example shown includes eighteen fins 5, or according to Fig.14 Another example shown includes eleven blades 5. Therefore, the number of blades 5 of the adaptive optical device 1 can be an even number as shown in most of the drawings, or as shown in FIG. Fig.14 Odd numbers are shown.

[0075] According to the first alternative, Figure 1 , 7 As shown in FIGS. 10, 12 to 14, the fin 5 is integral with the deformable plate 2, and the first and second manufacturing steps are, for example, at least partially overlapping, and in particular include a common step of cutting the original plate 12 to form the fin 5 and the deformable plate 2, as shown in FIGS. Fig.10 In the latter case, the periphery 11 of the deformable plate 2 may in particular be constituted at least in part by a virtual boundary between the body of the plate 2 and the fin 5, as shown in FIG. Fig. 9 , 12 , 13, as shown by the dotted line at the end of the winglet 5. According to this example, the winglets 5 are therefore preferably made of the same original plate 12, for example, by forming the spacers 6 in the thickness of the original plate 12, thereby forming the winglets 5, which at the same time define a central area, which advantageously does not include any spacers 6 and at least partially constitutes the deformable plate 2. Therefore, each winglet 5 is advantageously separated from its adjacent winglet 5 by a narrow groove (the spacers 6) formed in the thickness of the original plate 12. The original plate 12 is preferably a whole piece formed at one time. According to this example, the deformable plate 2 (or at least a part thereof) and / or the winglets 5 are preferably at least partially and preferably entirely formed by cutting the edge of the original plate 12, as shown in FIG. Fig.10 One of the advantages of the common cutting step is that it allows the formation of an integral flap 5 and deformable plate 2 in a single operation, thus ensuring excellent and easily reproducible mechanical strength.

[0076] According to the second alternative, Fig.11 As shown, in particular during the second manufacturing step, the fins 5 are connected to the deformable plate 2. For example, the second manufacturing step comprises a step of joining the fins 5 to the deformable plate 2, for example by welding, gluing and / or soldering. According to this alternative, the deformable plate 2 and the fins 5 are formed independently of each other. In the latter case, the adaptive optical device 1 comprises a welded and / or glued interface between each fin 5 and the deformable plate 2, preferably at the periphery 11 of the deformable plate 2. During the second manufacturing step, the spacing 6 is simply set by attaching the fins 2 to the deformable plate 2 at a distance from each other. One of the advantages of the joining step is that the fins 5 and the deformable plate 2 can be formed separately, for example easier to manufacture separately by molding, machining or any other suitable way.

[0077] Preferably, in particular during said joining step, at least part (or even all) of said fins 5 are joined to said deformable plate 2:

[0078] - on the edge of the deformable plate 2, for example on the periphery 11, such as Fig.11 As shown,

[0079] - on the deformable plate 2, more precisely on the incident surface 3, the fins 5 are for example partially pre-stressed on the incident surface 3, and / or

[0080] Underneath the deformable plate 2 , more precisely on the hide 4 , the flaps 5 are for example partially pre-pressed on the hide surface 4 .

[0081] Obviously, it is entirely possible that, for example, some of the fins 5 are joined to the edge of the deformable plate 2, while others are joined to the deformable plate 2 and / or below it, and all suitable combinations are possible, depending on the intended use and design of the adaptive optical device 1.

[0082] According to another alternative, the deformable plate 2 and the fins 5 are molded at one time by a single molding assembly, advantageously comprising the deformable plate 2, to which the fins 5 are attached and separated from each other by the spacings 6. According to another alternative, some of the fins 5 are attached to the deformable plate 2, while other fins 5 are integral with the deformable plate 2, in particular by molding and / or cutting. According to this example, the first step of making or providing the deformable plate 2 and the second step of making the plurality of fins 5 are coincident in the molding step of the molding assembly, advantageously molded at one time as an integral piece, comprising the deformable plate 2 and the fins 5. In the latter example, the molding assembly is molded, for example, with molten material, to form the deformable plate 2 with flanks separated from each other, wherein the flanks constitute the fins 5. According to yet another alternative, the deformable plate 2 is provided during the first step, i.e. already delivered ready for use.

[0083] According to the invention, the adaptive optical device comprises a plurality of peripheral actuators 7. Still according to the invention, each wing 5 comprises a movable portion 22 connected from at least one peripheral actuator 7 of each, so that the latter can locally deform the wing 5, so that the wing transmits the deformation force to the deformable plate 2. Therefore, the movable portion 22 is preferably a part of the wing 5, which is connected to the peripheral actuator 7 and can be moved by the latter's actuation. Therefore, each movable portion 5 is preferably connected to one of the peripheral actuators 7. More preferably, each movable portion 22 is connected to a single peripheral actuator 7 of each of the plurality of peripheral actuators 7. Conversely, advantageously, each peripheral actuator 7 is connected to only one of the movable portions 22. Therefore, each peripheral actuator 7 is preferably connected to only one of the wing 5.

[0084] Advantageously, each peripheral actuator 7 can thus move the movable portion 22 so as to deform the deformable plate 2, the wings 5 ​​transmitting a portion of the deformation received by the peripheral actuator 7 to the deformable plate 2, in particular to the periphery 11. In other words, the adaptive optical device 1 preferably comprises the plurality of peripheral actuators 7, each of which is connected to a respective one of the wings 5, so as to deform the respective movable portion 22 of the wings 5. Each peripheral actuator 7 is advantageously designed to apply a compressive or tensile force to the corresponding wing 5, thereby causing a local displacement and / or deformation of the wing 5 at the so-called movable portion 22 of this wing 5. This displacement and / or this deformation causes the application of a deforming force to the deformable plate 2, preferably through the periphery 11, advantageously at the connection with the wings 5, thereby deforming the incident wavefront, in particular when it is reflected by the entrance face 3 and / or refracted by the deformable plate 2. This allows the deformable plate 2 to be effectively deformed so as to introduce or correct the optical aberration in the wavefront reflected and / or refracted by the deformable plate 2, for example by at least partially deforming the curvature of the deformable plate 2 (and thus advantageously the curvature of its entrance face 3). The effect is that the curvature varies at least locally as a function of the force applied to the wing 5 by the peripheral actuators 7. Each peripheral actuator 7 is, for example, positioned on the same side of the deformable plate 2, preferably on the side of the hidden face 4 or, alternatively, on the side of the entrance face 3. The peripheral actuators 7 are preferably all located on the first intermediate plane P Alternatively, at least one peripheral actuator 7 is positioned on the side of the hidden surface 4 and at least one other peripheral actuator 7 is positioned on the side of the incident surface 3, the (two) peripheral actuators 7 being thus positioned on the first intermediate plane P on both sides. Therefore, preferably, each wing 5 has at the same time sufficient flexibility to be deformed under the action of the actuator to which it is connected when the actuator 7 moves the movable part 22, and maintains sufficient inherent mechanical strength to affect the shape of the deformable plate 2 by transmitting the deformation force through the periphery 11. Advantageously, the peripheral actuator 7 can be of any type (piezoelectric, magnetic, two-part, mechanical, screw, etc.), including those known in the relevant technical field. For example, the peripheral actuator 7 connects the wing 5 through a glue point, thereby defining the movable part 22, and transmits a tensile or compressive force locally to the surface of the movable part 22 to move it and thus deform the deformable plate 2, the latter being integral with the wing 5.

[0085] According to the first aspect of the invention, the adaptive optical device 1 further comprises a frame 21 fixed relative to the deformable plate 2. In other words, when the deformable plate 2 is deformed to controllably deform the incident wavefront, the frame 21 advantageously remains stationary. The peripheral actuator 7 may be, for example, of the magnetic type, divided into two parts, specifically Figure 2 As shown, the movable part of the peripheral actuator 7 is connected to the corresponding wing 5, while the stationary part of the peripheral actuator 7 is connected to the frame 21. In summary, it can be considered that it is advantageous that the frame 21 is also fixed relative to the peripheral actuator 7, which is movable towards it (or at least its active part is movable).

[0086] According to the specific example, the periphery 11 is not (directly) connected to the frame 21 (but indirectly via the fins 5 ).

[0087] The frame 21 includes, for example, Figure 1 , 2 , 9, 10, 14, the shape of the peripheral body is similar to the shape of the deformable plate 2, for example, when the deformable plate 2 is circular, the peripheral body is circular, or when the deformable plate 2 is rectangular, the peripheral body is rectangular, and so on. For example, especially when the general shape of the deformable plate 2 is circular or elliptical, the frame 21 advantageously includes a rigid ring 8, and the deformable plate 2 equipped with the fins 5 is positioned in the middle of the rigid ring. The ring 8 (and more generally the peripheral body) is specifically designed to surround the deformable plate 2 and the fins 5. The shape of the ring 8 is, for example, cylindrical, and its directional curve is, for example, circular or polygonal.

[0088] The frame 21 may be formed in one piece, i.e. in one piece, to form the ring 8 as shown in most of the figures (especially Figure 1 , 9 , the ring shown in 10), or alternatively, may have a discontinuous appearance, such as Fig.13 As shown, the frame 21 comprises, for example, arms 30 (or screws or rivets) connecting the fins 5 and positioned at a distance from each other, the arms 30 being thus fixed relative to the deformable plate 2 and preferably relative to the peripheral actuator 7. The frame 21 may also optionally comprise a base 31, such as Figure 2 As shown, the base 31 is connected to the ring 8, for example by an embedded connection, which rests on the base 31. In the peripheral actuator 7 (or the auxiliary actuator 29 to be seen below), it is possible to partially abut against the base 31 and to connect the latter in translation, that is, the active part of the peripheral actuator 7 (or the auxiliary actuator 29) is designed to be able to move in translation relative to the base 31 and more generally relative to the frame 21.

[0089] According to the invention, and as shown in particular in the accompanying drawings, each wing 5 also comprises a respective fixing portion 23 fixedly attached to said frame 21 so as to be fixed relative to the latter. Preferably, said fixing portion 23 is fixed in at least one fixing direction relative to said frame 21. F In other words, the fixing portion 23 is fixed to the frame 21 so that it cannot move at least in the fixing direction. F relative to the frame and thus cannot move in translation at least in the fixed direction F Move away from or towards the frame, as Figure 2 The fixed direction F Preferably, it is formed by the normal line of the incident surface 3, that is, the normal line at a point on the surface of the deformable plate 2 on one side of the incident surface 3. According to an example, the fixed direction F is formed by a straight line perpendicular to the tangent plane at a point on the incident surface 3, in particular when the deformable plate 2 is curved (but this also applies when it is flat). According to another example compatible with the previous one, the fixed direction F perpendicular to the first intermediate extension plane P , in particular when the deformable plate 2 is substantially flat (but this also applies when it is slightly curved).

[0090] According to a first alternative, the fixing portion 23 has no degrees of freedom relative to the frame 21 , but according to other alternatives, the fixing portion 23 has one or more degrees of freedom relative to the frame 23 .

[0091] The fixed part 23 is, for example:

[0092] - is embedded in the frame 21 and therefore has no degrees of freedom relative to the latter, or

[0093] - is pivotally connected to said frame 21 and thus has at least one degree of freedom relative to the latter, or

[0094] - connected in a ball-and-socket joint to said frame 21, thus having at least two degrees of freedom relative to the latter.

[0095] The fixed part 23 may also optionally have one or two degrees of translational freedom relative to the frame 21 in one or two free translational directions, thus advantageously being different from the fixed direction F Therefore, the or the two free translation directions are preferably aligned with the fixed direction F Not coincident and not parallel, and for example perpendicular to the latter and / or to each other.

[0096] Thus, the fixed portion 23 is fixed to the frame 21 and cannot be separated from the latter and preferably cannot move relative to the latter (embedded). Alternatively, however, as described above, the fixed portion 23 is able to change its orientation relative to the frame 21 (pivot connection or ball-and-socket joint connection) while remaining attached to the frame at the fixed point. Thus, the fixed portion 23 of the wing 5 is advantageously fixed in a direction locally perpendicular to the deformable plate 2, at least in translation (for example corresponding to Figure 2 Fixed orientation in the example shown F ), the other degrees of freedom (two translations and three rotations) may be fixed or not. In other words, the fixed portion 23 is preferably at least along the fixed direction F , fixed at least in translation relative to the frame 21, but the fixed part 23 can, according to alternative embodiments, optionally have one or two translational degrees of freedom and / or one, two or three rotational degrees of freedom relative to the frame 21, or have no degrees of freedom relative to the frame 21, i.e. be completely fixed relative to the latter.

[0097] Thus, each flap 5 advantageously has a respective fixed portion 23 firmly connected to the frame 21 so as to be fixed relative to the latter, that is to say at least in translation. The fixed portion 23 is preferably attached to the frame 21, in direct or almost direct contact with the latter. Advantageously, the fixed portion 23 does not move relative to the frame 21, in particular in translation, and is advantageously fixed regardless of whether the flap 5 is deformed locally, or more precisely regardless of whether the movable portion 22 is moved, or whether the deformable plate 2 is deformed. This can advantageously allow, on the one hand, each flap 5 to be moved by a respective peripheral actuator 7, which is connected to the flap at the movable portion 22, and, on the other hand, by applying a "restoring force" or "holding force" to the flap 5 through a fixed portion 23 fixed to the frame 21, thereby applying a moment to the surface of the deformable plate 2, without excessive forces acting on the portion of the peripheral actuator 7, the fixing of each of the fixed portions 23 of the flap 5, respectively, on the frame 21 ensuring control of the deformation of the deformable plate 2. Thus, the combination of the fixed portion 23 and the movable portion 22, through the relative flap 5, will advantageously allow the use of leverage and / or moment effects, on the one hand, resulting from the deformation forces exerted by the peripheral actuator 7, and on the other hand, resulting from the holding or restoring forces (constant and without calibration) of the fixed portion 23, while precisely controlling the deformation amplitude of the deformable plate 2 and rationalizing the number of peripheral actuators 7 and / or their power and the number of flaps 5. For example, the number of actuators (peripheral actuators 7 and / or auxiliary actuators 29 to be described below) corresponds exactly or approximately (eg + / - 2) to the number of possible deformation modes or deformation trajectories of the deformable plate 2 .

[0098] In the case where the frame 21 is discontinuous, each of the arms 30 is fixed to a respective one of the wings 5 ​​at the respective fixing portion 23, for example. Fig.13 In the case of the frame 21 being formed in one step, for example, the frame 21 formed by the ring 8 is fixed to the wing 5 through its respective fixing parts 23, as shown in FIG. Figure 1 , 9 , as shown in 10. In any case, the frame 21 is preferably not in direct contact with the deformable plate 2.

[0099] According to the present invention, the manufacturing method at least further comprises:

[0100] - an arming step during which the respective movable portion 22 of each flap 5 is connected to the respective at least one actuator 7 so as to enable the latter to locally deform said flap 5 so that it transmits a deformation force to said deformable plate 2,

[0101] - A fixing step, during which the respective fixing portion 23 of each wing 2 is fixedly attached to a frame 21 fixed relative to said deformable plate 2 so as to be fixed relative to the latter.

[0102] In other words, during said assembly step, each peripheral actuator 7 is advantageously fixed to each wing 5 by, for example, gluing, welding, soldering or any other suitable fixing means. Figures 3 to 6 In the drawings, each peripheral actuator 7 , which is not shown, may be located, for example, below a corresponding wing 5 .

[0103] Preferably, the peripheral actuator 7 is not directly connected to the deformable plate 2, in particular not directly connected to the peripheral edge 11 of the deformable plate, in particular during the arming step. On the contrary, in particular in order to deform the deformable plate 2 and the entrance face 3, the peripheral actuator 7 is advantageously positioned to act only indirectly on the deformable plate 2 via the flap 5. The latter is therefore preferably separate from the peripheral actuator 7. The use of the flap 5 in the adaptive optical device 1 of the invention allows an excellent precision in the deformation of the deformable plate 2 and therefore in the correction or introduction of optical aberrations of the incident wavefront, although it does not exclude the use of an auxiliary actuator 29 directly connected to the peripheral edge 11 of the deformable plate 2.

[0104] For example, during the fixing step, the fins 5 are riveted, screwed, glued, brazed and / or welded to the frame 21. According to this example, during the fixing step, a portion of each fin 5 is attached to the frame 21, for example by at least one rivet, at least one screw, glue, welding, brazing or any other suitable attachment means, thereby forming the fixed portion 23 of the corresponding fin 5. Preferably, the assembly step also comprises a step of connecting a portion of each peripheral actuator 7 (or even each auxiliary actuator 29, including the central actuator 27, as described below) to the frame 21, for example via a portion of the peripheral actuator 7, for example by gluing, screwing, riveting, clamping, welding or brazing.

[0105] According to another example, the manufacturing method also comprises a second step of cutting said original plate 12 to form said frame 21 or at least a portion of said frame 21, said second cutting step thus advantageously at least partially coinciding with said common cutting step, so that said frame 21 is advantageously integral with said fin 5 (and said deformable plate 2) and constituted simultaneously with them from said original plate 12. Alternatively, the manufacturing method comprises a step of providing said frame 21 already ready for installation.

[0106] For each of the fins 5 concerned, the fixing portion 23 may, for example, comprise a surface portion of the frame 21 fixed to the fin 5. According to another example, the fixing portion 23 may be substantially point-shaped, that is to say very locally attached to the frame 21, in particular via one or more fixing points, for example each consisting of a screw or a rivet, in particular during the fixing step.

[0107] Advantageously, during said equipping step, each wing 5 is preferably connected to only a single respective peripheral actuator 7. More precisely, during said equipping step, each movable part 22 is preferably connected to only a single respective peripheral actuator 7. Thus, a single peripheral actuator 7 of each wing 5 is advantageously sufficient to move the latter and, for example, to generate sufficient torsion at the periphery of the deformable plate 2 to use the adaptive optical device 1 in an adaptive optical system. Preferably, the design of the adaptive optical device 1 according to the invention makes it possible to require only a single peripheral actuator 7 for each wing 5, while the combination of the movable part 22 and the fixed part 23 makes it possible for each wing 5 to apply at least one deformation mode to the deformable plate 2 (and the wavefront) with a large deformation amplitude, which not only makes the number of actuators and / or their power and / or their size more reasonable compared to the prior art configurations, but also the number of wings, which makes the adaptive optical device 1 of the invention particularly easy to adjust and use, and therefore the manufacturing method is also easy to implement. The implementation of the adaptive optical device 1 is particularly simple, since the fixed part 23 represents the "passive" part of the wing 5 that is sufficient to be fixed to the frame 21 (in all cases of translation, since in some cases it is still possible to rotate), the movable part 22 representing the only "active" part of the wing 5. Obviously, the fixed part 23 is preferably not directly connected to the actuators 7, since they advantageously do not translate relative to the frame 21. This ingenious construction thus makes it possible to limit the manufacturing costs and complexity of the adaptive optical device 1 of the invention compared to the constructions of the prior art. Alternatively, thanks to the support provided by the fixed part 23, each wing 5 is connected to a plurality of peripheral actuators 7, the adjustment and operation of which are easy to carry out with satisfactory precision. According to this last alternative, during the assembly step, each wing 5 is connected to a plurality of respective peripheral actuators 7, for example to two peripheral actuators 7, such as Fig.14As shown, the two peripheral actuators 7 are positioned at a distance from each other and are each connected to a different movable portion 22 of the wing 5. The latter alternative has several of the same advantages as above, namely the larger possible deformation amplitude of the deformable plate 2 and the power of the peripheral actuator 7 has been adjusted to be as precise as possible, with a large number of possible deformation trajectories. It is also possible that some of the wing 5 are connected to a single peripheral actuator 7 as described above, while other wing are connected to a plurality of peripheral actuators 7, as described above. Obviously, the manufacturing method advantageously includes the step of providing or manufacturing the peripheral actuator 7.

[0108] According to one embodiment, the fixing parts 23 are all stationary relative to each other, in particular in the case of a snap-in connection of the frame 21 / fixing parts 23 .

[0109] According to a specific example, the peripheral actuators 7 of two different corresponding fins 5 are designed to jointly actuate each other so as to deform the deformable plate 2 in a controlled manner, for example by applying a moment to the deformable plate 2, preferably through its periphery 11. In addition, the moment does not need to be particularly large, and the fixing portion 23 can advantageously accurately control the deformation without requiring a large force, especially by utilizing the lever effect generated by the fixing portion 23.

[0110] Preferably, the wing 5 is flexible so as to be able to deform locally at the movable portion 22 when the respective peripheral actuator 7 to which the wing 5 is connected moves and / or deforms its movable portion 22, for example by pushing or pulling. Thus, the wing 5 is advantageously soft enough to bend elastically when subjected to the pulling or compressing force of the respective peripheral actuator 7, but rigid or elastic enough to restore its original shape and position when the peripheral actuator 7 no longer exerts any force, this feature of the wing 5 being reinforced by the presence of the fixed portion 23, which exerts a "restoring" or "holding" force of the wing 5. Such a configuration is particularly advantageous for convenient and precise calibration of the adaptive optical device 1, while ensuring the latter has an excellent working duration.

[0111] The adaptive optical device 1 of the present invention can advantageously use a deformable and thin or even very thin deformable plate 2, and the peripheral actuator 7 makes the force required for the deformable plate 2 to be effectively and controllably deformed significantly reduced compared to the adaptive optical devices of the prior art. Therefore, this configuration can advantageously use limited power (and therefore limited cost) peripheral actuators, which, combined with a reasonable number of peripheral actuators 7 (because the fixed part 23 is attached to the frame 21 rather than the actuator) and a thin deformable plate 2, can make the adaptive optical device 1 significantly miniaturized and lightweight, and its effect is at least as effective as the adaptive optical devices of the prior art that use more actuators and / or more powerful actuators and have a more complex design.

[0112] Advantageously, as shown in the accompanying drawings, each fin 5 extends between a respective proximal end 24 attached to said plate 2 and a respective distal end 25 opposite said proximal end 24. The distal end 25 is preferably the portion or end of the fin 5 considered to be farthest from the deformable plate 2, while the proximal end 24 is preferably the portion or end of the associated fin 5 considered to be closest to the deformable plate 2.

[0113] According to an alternative, the fixing portion 23 is closer to the distal end 25 than to the proximal end 24. According to a specific embodiment of this alternative, Figure 1 , 2 As shown in FIGS. 9 and 10 , the fixing portion 23 includes the distal end 25, which is thus fixedly attached to the frame 21. For example, Figure 1 As shown, the fixing portion 23 comprises only the distal end 25 of the corresponding wing 5, which is preferably attached to the frame 21 (or more precisely to the ring 8, as shown in FIG. 1 ) only via the distal end 25 by riveting, screwing, gluing, welding or soldering, etc. Figure 1 According to another example, specifically as follows Figure 2 , 9, 10, the rigid ring 8 has an inner shoulder 26 to which the fins 2 are fixed, while the fixing portion 23 advantageously comprises, in addition to the distal end 25, a surface portion of the corresponding fin 5, for example attached (for example by riveting, screwing, gluing, soldering or welding) to the ring 8 at the shoulder 26, more generally to the frame 21. The inner shoulder 26 can be constituted, for example, by a bore formed in the thickness of the ring 8 and allows to easily position the deformable plate 2 equipped with the fins 5, which come to rest against the shoulder 26 by their respective fixing portion 23. It is also possible that, according to an alternative, the fixing portion 23 is positioned between the distal end 25 and the proximal end 24, the distal end 25 optionally being free, that is to say not connected to the frame 21. According to a specific embodiment not shown here, the fixing portion 23 is closer to the proximal end 24 than to the distal end 25. According to another specific embodiment not shown here, the fixing portion 23 is located equidistantly between the proximal end 24 and the distal end 25 .

[0114] Preferably, the movable portion 22 is positioned between the distal end 25 and the proximal end 24, as shown in the figures. The movable portion 22 is preferably constituted by a portion of the corresponding flap 5 at the connection of the corresponding peripheral actuator 7, for example via a glue point as described above. The movable portion 22 may alternatively be at least partially positioned at the distal end 25 and / or at the proximal end 24.

[0115] According to a specific embodiment, the movable portion 22 is positioned closer to the proximal end 24 than to the distal end 25, such as Figures 8 to 10 and Fig.13 In other words, according to this example, the movable portion 22 and the peripheral actuator 7 are positioned closer to the deformable plate 2 than to the distal end 25. This configuration is advantageous, for example, in the case where the fixed portion 23 includes the distal end 25, because it is possible to place the fixed portion 23 and the movable portion 22 at a certain distance, while making the movable portion 22 close to the deformable member 2, so that when the corresponding peripheral actuator 7 is working, the fin 5 is subjected to relatively small stress, while making the deformable plate 2 significantly deformable, and this does not require the peripheral actuator 7 to apply a large force.

[0116] Alternatively, the movable portion 22 is positioned equidistantly between the proximal end 24 and the distal end 25; the advantage of this last configuration is obviously its simplicity of manufacture, but other parameters may need to be taken into account (shape of the fin 5, expected deformation of the deformable plate 2, etc.).

[0117] According to yet another alternative, the movable portion 22 is positioned closer to the distal end 25 than to the proximal end 24. This last configuration may be advantageous in certain circumstances, for example when the fin 5 has a certain shape (e.g. a trapezoidal shape as described below), in particular when it is easier to deform towards the distal end 25 than towards the proximal end 24, such as Fig.12 As shown, and / or when the adaptive optical device 1 is relatively bulky and / or the wing 5 is very short, as shown Figure 1 as shown, or depending on the expected deformation of the deformable plate 2.

[0118] Therefore, the shape of the fins 5 has a certain importance for the deformation of the deformable plate 2. For example, each fin 5 is generally flat and generally rectangular in shape as shown in most of the drawings, or as shown in FIG. Fig.12 The shape shown is a trapezoid, the long base of the trapezoid is formed by, for example, the proximal end 24 at the periphery 11 , and the short base of the trapezoid is formed by, for example, the distal end 25 , which is separated from the deformable plate 2 . Figures 7 to 10 Specifically shown is a generally rectangular wing 5, forming a peripheral edge 11 of a circular deformable plate 2, and Fig.12 The figure shows a trapezoidal wing 5 whose short base is much smaller than the long base, forming the periphery 11 of the hexagonal deformable plate 2, and Fig.13 The wing piece 5 is shown to be slightly trapezoidal, with the size of the short base being relatively close to the size of the long base, and the peripheral edge 11 of the deformable plate 2 is still circular here.

[0119] The fixed portion 23 and the movable portion 22 belonging to the same one of the wings 5 ​​are preferably separate from each other and at a distance from each other along the wing 5 .

[0120] Advantageously, as shown in the accompanying drawings, at least one (or several, or even all) of the fins 5 is substantially along the second intermediate extension plane when at rest. P’ Thus, at rest, that is to say preferably without mechanical deformation stresses exerted on the wing 5 by, for example, an actuator, the wing advantageously has a second intermediate extension plane. P’ The main extension inside (or immediately adjacent to the latter, or on either side of the latter) preferably occupies most, or even all, of the thickness of said fin 5. According to a first example shown in most of the figures, at least one (or several, or even all) of said fins 5 has a substantially flat surface when at rest. Figure 6In the second example shown, but not limited to this example, at least one (or several, or even all) of the fins 5 has a certain curvature, preferably a continuous curvature, when at rest. Alternatively, at least one (or several, or even all) of the fins 5 has a first portion with a substantially flat surface and a second portion with a curved surface (preferably a curved surface) when at rest.

[0121] According to a specific embodiment, and as Figure 1 , 2 , 7 to 14, at least one (or several, or even all) of the fins 5 extends substantially in the extension of the deformable plate 2 when at rest, preferably in the first intermediate extension plane P The first intermediate extension plane P It is therefore advantageously parallel to the (respective) second intermediate extension plane P’ Thus, at rest, that is to say preferably without mechanical deformation stresses exerted on the deformable plate 2, the latter and one, several or all of the fins 5 in its extension, advantageously extend along the same continuous and regular trajectory, advantageously in a straight line, but alternatively in a stepped shape, so that the fin 5 and the deformable plate 2 respectively constitute a first and a second parallel step of the step, the two steps being at different heights, the first intermediate plane P and the second midplane P’ For example, at least one (or more, or even all) of the fins 5 protrudes outward from the periphery 11 of the deformable plate 2. Therefore, the fins 5 are preferably arranged transversely relative to the deformable plate 2 and connected to the latter.

[0122] According to another specific embodiment, and as Figures 3 to 6 As shown, the (respective) second intermediate extension plane P’ The first intermediate extension plane P Thus, at rest, that is to say preferably without mechanical deformation stresses exerted on said deformable plate 2, the latter and said fins 5 in its extension advantageously extend along the same continuous trajectory with at least one angle separating said deformable plate 2 from the relative fins 5. According to this example, said first intermediate extension plane P and a second intermediate extension plane P’ Therefore, according to this example, at least one of the fins 5 extends substantially obliquely or perpendicularly relative to the deformable plate 2 when at rest.

[0123] More advantageously, the second intermediate extension plane P’ The first intermediate extension plane P Forming a dihedral angle β. Figure 5 As shown, the first intermediate extension plane P and a second intermediate extension plane P’ In other words, according to this example, the first intermediate extension plane P The second intermediate extension plane P’ The dihedral angle β is advantageously a right angle, i.e. approximately equal to 90°. Figure 3 , 4 , 6, according to another example, the first intermediate extension plane P The second intermediate extension plane P’ The dihedral angle β may be an acute angle or an obtuse angle, that is, between 0° and 90°, excluding 0° and 90°, or between 90° and 180°, excluding 90° and 180°. More preferably, the dihedral angle β is between 30° and 60° or between 120° and 150°. Figure 6 In the example shown, in which the fin 5 has a curvature, the second intermediate extension plane P’ Preferably relative to the first median plane P The fins 5 are inclined and intersect the latter, and the dihedral angle β between these two planes is advantageously an obtuse angle. Advantageously, any useful combination of fins 5 can be made, each fin extending along its own plane and intersecting the first intermediate extension plane. P Coincident, parallel or intersecting second intermediate extension planes P’ extending, the respective second mid-plane P’ Preferably, the second manufacturing step comprises a step of bending at least one of the fins 5 so that the latter extends substantially obliquely or perpendicularly relative to the deformable plate 2. For example, the fins 5 extend along the second intermediate extension plane. P’ The deformable plate 2 extends substantially along the first intermediate extension plane when at rest. P The bending step is performed so that the first intermediate extension plane P and a second intermediate extension plane P’ More preferably, the bending is irreversible, that is to say it is advantageously carried out so as to bend the fin 5 inelastically. Figures 4 to 6 The example of the fins 5 attached to the deformable plate 2 obtained in the last step is shown, wherein each fin 5 has been formed according to the first intermediate extension plane. P and a second intermediate extension plane P’ The dihedral angle β formed between the bends, Figure 3 , 4 The dihedral angles β in , 5 and 6 are respectively an obtuse angle, an acute angle, a right angle and an obtuse angle.

[0124] Preferably, and as shown in the accompanying drawings, the deformable plate 2 and the wing 5 have a first and a second thickness, respectively, which are, for example, substantially the same. This configuration is sometimes advantageous for standardizing the manufacture of the deformable plate 2 and / or the wing 5. This is particularly advantageous because, with the adaptive optical device 1 of the present invention, the risk of errors in the manufacture of the adaptive optical device 1 can be reduced, while using a thin or even very thin (and therefore easier to deform but relatively fragile) deformable plate 2, which can be formed in one step. However, the present invention is not limited to this preferred embodiment, and for example, different thicknesses are contemplated, for example, the second thickness is greater than the first thickness, or vice versa.

[0125] Advantageously, the adaptive optical device 1 further comprises at least one auxiliary actuator 29, which is designed to directly apply force to the deformable plate 2 to deform it, rather than to one of the fins 5. Therefore, the auxiliary actuator 29 can advantageously partially improve or modify the overall actuation of the peripheral actuator 7. The auxiliary actuator 29 is particularly designed to apply a point force or a near-point force to the deformable plate 2, or alternatively to apply a force distributed on the surface of the deformable plate 2. For example, the auxiliary actuator 29 is composed of at least one piezoelectric film disposed on the surface of the deformable plate 2 (specifically on the hidden surface 4), and when a current is applied to the piezoelectric film, a bimetallic effect that causes at least a local bending of the deformable plate 2 can be generated.

[0126] The adaptive optical device 1 may further comprise at least one central actuator 27, such as Fig.10 and 12 As shown, it is designed to be oriented to the geometric center C The central actuator 27 thus constitutes the auxiliary actuator 29 or one of the auxiliary actuators. The auxiliary actuator or actuators 29 may also be located at the geometric center. C Externally connected plate 2, such as Fig.13 As shown in the example, the adaptive optical device 1 specifically includes four auxiliary actuators 29, which are located on one side of the hidden surface 4 and around the geometric center of the deformable plate 2. C Set and keep a certain distance from it, and if Fig.14 As shown in the example, the adaptive optical device 1 specifically includes two auxiliary actuators 29, which are arranged on one side of the hidden surface 4 at the geometric center of the deformable plate 2. C On both sides and at a certain distance from them.

[0127] The auxiliary actuator 29 (e.g., the central actuator 27) is advantageously designed to apply pressure or tension (e.g., at the center) to the deformable plate 2 from the side and through the hidden surface 4. Advantageously, when the incident wavefront is reflected by the incident surface 3 and / or refracted by the deformable plate 2, the pressure or tension (e.g., at the center) deforms the deformable plate 2 to introduce or correct an aberration, such as an ellipsoidal aberration, in the incident wavefront. Preferably, the aberration is at least partially applied to the deformable plate 2 (e.g., at the geometric center). C ) varies with the force exerted by the auxiliary actuator 29 (e.g. the central actuator 27) on the hidden surface 4. Obviously, the adaptive optical device 1 can include a combination of multiple auxiliary actuators 29 (central or non-central), in particular with the same or different properties as described above and / or below. Advantageously, the auxiliary actuator 29 (e.g. the central actuator 27) can be of any type (piezoelectric, magnetic, two-part, mechanical, screw, etc.), including those known in the relevant technical field. For example, the auxiliary actuator 29 (e.g. the central actuator 27) is connected via a glue point (e.g. at the geometric center) to the auxiliary actuator 29 (e.g. the central actuator 27). C The hidden surface 4 is connected to the hidden surface 4 at a certain position, and the tension or pressure is locally transmitted to the surface of the hidden surface 4 to deform the deformable plate 2. More advantageously, the force is applied in a direction that is locally substantially perpendicular to the incident surface 3.

[0128] Each peripheral actuator 7 and / or auxiliary actuator 29 (e.g. central actuator 27) preferably has a first portion integral with the corresponding wing 5 (i.e. fixedly attached) and a second portion integral with the frame 21, which first and second portions may themselves be translationally connected to each other, such as in the case of peripheral actuators 7 and / or auxiliary actuators 29 of the piezoelectric type (in which case a nearly point-like force is preferably generated), or not integral with each other, such as in the case of peripheral actuators 7 and / or magnetic auxiliary actuators 29. For example, in particular during said assembly step, said first portion is bonded to the corresponding wing 5 by means of a drop of glue and advantageously has a head, such as substantially cylindrical, conical or truncated cone-shaped, so as to enter into said drop of glue without coming into contact with the corresponding wing 5, said drop of glue thus forming a ball-and-socket joint connection between said head and the corresponding wing 5. This can in particular avoid that the associated peripheral actuator 7 and / or auxiliary actuator 29 (for example the central actuator 27) cause surface deformations of the deformable plate 2, even in the absence of mechanical deforming stresses applied by the actuators, simply due to their connection to the deformable plate 2 (for example when the associated actuator is the central actuator 27) or to the wing 5 (for example when the associated actuator is the peripheral actuator 7).

[0129] Fig.10An example of manufacturing the deformable plate 2 and the fins 5 attached thereto is shown, in the example of the figure, the fins 5 are formed integrally with the deformable plate 2 in the common step of cutting the original plate 12. Each of the peripheral actuators 7 is then connected to a respective one of the fins 5 on the side of the hidden face 4, so that each fin 5 carries at least one peripheral actuator 7 and thus defines a movable portion 22 of the relative fin 5 to which the peripheral actuator 7 is connected. An auxiliary actuator 29, for example a central actuator 27, is also placed in the geometric center of the deformable plate 2. C , also on the side of the hidden surface 4. Finally, the deformable plate 2 and the wing 5 attached thereto are placed in the center of the ring 8, the distal end 25 of the wing 5 being housed in a shoulder 26 of the ring 8, which rests against the wing 5, which is in turn connected to the ring 8 by riveting, screwing, brazing, bonding or welding, thus defining a fixed portion 23, since the ring 8 here constitutes at least part of the frame 21. The adaptive optical device 1 may also optionally comprise a cover 28 with light, for example in its center, which is designed to define the incident surface 3 of the deformable plate 2, more precisely to define the optical surface of the incident surface 3, that is to say the optically effective part of the incident surface 3. Fig. 9 , 10 In the example of FIG. 15 , the cover 28 is placed on the deformable plate 2 on the side of the incident surface 3 so as to be accommodated in the boss 26 . Fig.11 A manufacturing alternative is partially shown, in which only the second production step is shown, in which the tabs 5 are formed separately from the deformable plate 2 and then attached to it.

[0130] An example of use of the aforementioned adaptive optical device 1 will now be explained. According to this example, it is desired to correct the optical aberrations observed in the wavefront using an adaptive optical device, which may be a deformable plane mirror or an adaptive lens. Therefore, the adaptive optical device 1 is positioned on the path of the wavefront so that the incident surface 3 of the deformable plate 2 intercepts the wavefront in order to deform it, in particular to reflect and / or refract it. This implementation of a single interference is generally not sufficient to correct the observed optical aberrations: it is necessary to change the deformation (reflection and / or refraction) caused by the incident surface 3 and / or the deformable plate 2 in order to satisfactorily modify the wavefront. For this purpose, it will be sought to deform the deformable plate 2 of which the incident surface 3 is a part, so that it is bent (or flattened) in a determined, precise and usually local manner, in particular in order to present a determined and constant angle of curvature. Thus, at least one peripheral actuator 7 is activated so that it moves (and optionally deforms) in a controlled manner the mobile portion 22 of one of the wings 5 ​​to which it is connected, this movement being achieved by pushing or pulling, that is to say by moving it towards the entrance face 3 of the adaptive optical device 1 or towards the opposite hidden face 4. The moving mobile portion 22 causes a slight deformation of the deformable plate 2 integral therewith, by connecting the deformable plate 2 and the peripheral edge 11 of the wing 5. The deformation of the deformable plate 2 is limited and very well controlled due to the presence of the fixed portion 23 of the wing 5, which is fixedly connected to the frame 21 and therefore remains fixed relative to the latter, at least in translation during and after the movement of the mobile portion 22. Several peripheral actuators 7 can be activated successively or simultaneously, even as auxiliary actuators 29 of the central actuator 27, so as to satisfactorily deform the deformable plate 2 so that its incident surface 3 receives the incident wavefront at a certain angle and obtains a certain deformation of the deformable plate 2, thereby correcting the optical aberration. Fig.15 A configuration is shown in which one or more movable parts 22 have been moved by their respective peripheral actuators 7 (hidden in the figure by covers 28 ), and the respective fixed parts 23 have not moved as they are not connected to the frame 21 .

[0131] The adaptive optical device 1 can then be placed in a non-use position, with the moved wing 5 returning to its starting position in the extension of the deformable plate 2, in particular by means of elastic behavior, deactivation of the peripheral actuator 7 and the restoring and retaining forces applied by the fixed part 23 of the wing 5 to the rest of the wing 5 and therefore to the deformable plate 2.

[0132] Another example of use of the adaptive optical device 1 according to the present invention will be described below, but this example does not constitute any limitation on the possible uses of the adaptive optical device 1 of the present invention. According to this example, the adaptive optical device 1 changes the shape of the incident wavefront. The incident wavefront is deformed due to, for example, reflection and / or deflection by the deformable plate 2, so that a deformed wavefront is generated by, for example, reflection and / or refraction. The phase of the incident wavefront is therefore locally advanced or delayed relative to the reflected and / or refracted wavefront, depending on the geometry of the deformable plate 2, in particular the geometry of the incident surface 3. The peripheral actuator 7 (optionally combined with the auxiliary actuator 29), according to its selected actuation combination and its layout in the adaptive optical device 1, can cause the latter to generate various Zernike polynomials in the deformed wavefront (in particular Zernike polynomials that are not present in the incident wavefront). Thus, by actuating one or more peripheral actuators 7 (and optionally auxiliary actuators 29), different Zernike polynomials can be generated, so that the deformable plate 2 introduces one or more optical aberrations, such as astigmatism, "defocus", "trefoil" or "three-foil" and / or coma into the incident wavefront. Various actuations of the peripheral actuators 7 (and optionally one or more auxiliary actuators 29, in particular the central actuator 27), mentioned or not mentioned above, can be combined to generate or correct more complex optical aberrations.

[0133] Any combination of the various examples and modifications described above is obviously possible, considering that making a suitable adaptive optical device appears to be related to the technical field involved.

[0134] Optionally, the step of forming the deformable plate 2 may comprise a step of joining a central plate to the original plate 12, in particular by gluing, brazing and / or welding, the central plate advantageously comprising the entrance face 3. The original plate 12 is preferably made of a cheaper material than that used for the central plate, since the original plate 12 can be formed into the fins 5 at an advantageous cost price, for example by cutting. In practice, the deformable plate 2 should preferably have an extremely good surface quality, so the material constituting it is usually very expensive, while the fins 5 only need to have appropriate mechanical properties (in particular elasticity) without requiring a special surface state.

[0135] Preferably, said common cutting step and / or said second cutting step comprises a selective etching operation.

[0136] According to a specific implementation, the manufacturing method further includes a step of performing a reflection treatment on the incident surface 3 to form a reflective surface, and the adaptive optical device 1 is a deformable plane mirror. Preferably, the reflection treatment step includes a step of covering the incident surface 3 with a reflective coating. The covering step may, for example, include spraying a reflective material on the incident surface 3, thereby forming a reflective surface capable of reflecting the wavefront at the incident surface 3. According to an embodiment, the reflection treatment step is applied to the central plate on one side of the incident surface 3 to form the reflective surface.

[0137] The adaptive optical device 1 of the present invention is preferably obtained through the manufacturing method of the present invention. Through reflection and / or refraction of the wavefront, extremely fine deformation operations can be performed on the incident wavefront in the adaptive optical system, and the cost of maintenance and controlled implementation is very low due to the simple, precise and rapid adjustment.

[0138] Possibility of industrial applications

[0139] The invention finds industrial application in the design, manufacture and use of adaptive optical devices.

Claims

1. An adaptive optical device (1), comprising a deformable plate (2) capable of deforming an incident wavefront by refraction and / or reflection, the deformable plate (2) having a peripheral edge (11), characterized in that: The adaptive optical device comprises at least: - a fin (5) fixedly attached to said deformable plate (2), - a frame (21) fixed relative to the deformable plate (2), - a plurality of peripheral actuators (7), Each of the fins (5) comprises a movable portion (22) connected to at least one respective peripheral actuator (7), so that the peripheral actuator can locally deform the fin (5), thereby causing the latter to transmit the deformation force to the deformable plate (2), each of the fins (5) also comprises a respective fixed portion (23), fixedly attached to the frame (21) so as to be fixed relative to the latter, and the periphery (11) comprises respective free portions between each pair of adjacent fins (5) that are not connected to any structure.

2. The adaptive optical device (1) according to claim 1, characterized in that The fixing portion (23) is fixed at least in translation along at least one fixing direction (F) relative to the frame (21).

3. The adaptive optical device (1) according to claim 1 or 2, characterized in that: The fixing part (23): - is embedded in the frame (21) and therefore has no degrees of freedom relative to the latter, or - is pivotally connected to the frame (21), or - Ball-and-socket joint connection with the frame (21).

4. The adaptive optical device (1) according to claim 1 or 2, characterized in that: Each of the fins (5) extends between a respective proximal end (24) attached to the deformable plate (2) and a respective distal end (25) opposite the proximal end (24).

5. The adaptive optical device (1) according to claim 4, characterized in that The fixing portion (23) comprises the distal end (25), which is thus fixedly attached to the frame (21).

6. The adaptive optical device (1) according to claim 4, characterized in that The movable portion (22) is positioned between the distal end (25) and the proximal end (24).

7. The adaptive optical device (1) according to claim 4, characterized in that The movable portion (22) is located closer to the proximal end (24) than to the distal end (25).

8. The adaptive optical device (1) according to claim 4, characterized in that The movable portion (22) is positioned equidistantly between the proximal end (24) and the distal end (25).

9. The adaptive optical device (1) according to claim 4, characterized in that The movable portion (22) is located closer to the distal end (25) than to the proximal end (24).

10. The adaptive optical device (1) according to claim 4, characterized in that The fixing portion (23) is closer to the distal end (25) than to the proximal end (24).

11. The adaptive optical device (1) according to claim 1 or 2, characterized in that: Each of the fins (5) is flat and rectangular or trapezoidal in shape.

12. The adaptive optical device (1) according to claim 1 or 2, characterized in that: The deformable plate (2) together with the fins (5) attached thereto form a one-step formed star-shaped deformable body with a plurality of branches, each of which is formed by one of the fins (5).

13. The adaptive optical device (1) according to claim 1 or 2, characterized in that: The frame (21) comprises a rigid ring (8) in the middle of which the deformable plate (2) equipped with the flaps (5) is positioned.

14. The adaptive optical device (1) according to claim 13, characterized in that The rigid ring (8) has an inner shoulder (26) to which the fins (5) are fixed.

15. The adaptive optical device (1) according to claim 1 or 2, characterized in that: At least one of the fins (5) extends in the extension of the deformable plate (2) when at rest.

16. The adaptive optical device (1) according to claim 1 or 2, characterized in that: At least one of the fins (5) extends obliquely or perpendicularly relative to the deformable plate (2) when at rest.

17. The adaptive optical device (1) according to claim 1 or 2, characterized in that: The deformable plate (2) extends, when at rest, along a first intermediate extension plane (P), while at least one of the fins (5) extends, when at rest, along a second intermediate extension plane (P').

18. The adaptive optical device (1) according to claim 17, characterized in that The first intermediate extension plane (P) is parallel to or coincident with the second intermediate extension plane (P').

19. The adaptive optical device (1) according to claim 17, characterized in that The second intermediate extension plane (P') intersects the first intermediate extension plane (P).

20. The adaptive optical device (1) according to claim 19, characterized in that The second intermediate extension plane (P') is orthogonal to the first intermediate extension plane (P).

21. The adaptive optical device (1) according to claim 1 or 2, characterized in that: It also includes at least one auxiliary actuator (29) designed to directly apply force to the deformable plate (2) to deform it.

22. The adaptive optical device (1) according to claim 1 or 2, characterized in that: The deformable plate (2) has a geometric center (C).

23. The adaptive optical device (1) according to claim 22, characterized in that It also comprises at least one central actuator (27) designed to apply a force to said geometrical centre (C).

24. The adaptive optical device (1) according to claim 22, characterized in that Each of the fins (5) extends radially from the deformable plate (2) relative to the geometric center (C).

25. The adaptive optical device (1) according to claim 22, characterized in that The fins (5) are angularly uniformly distributed around the geometric center (C).

26. The adaptive optical device (1) according to claim 1 or 2, characterized in that The wing (5) is integrated with the deformable plate (2).

27. The adaptive optical device (1) according to claim 1 or 2, characterized in that: It comprises at least four fins (5).

28. The adaptive optical device (1) according to claim 1 or 2, characterized in that: It constitutes a deformable plane mirror and / or an adaptive lens.

29. A method for manufacturing an adaptive optical device (1), comprising a first step of manufacturing and providing a deformable plate (2) capable of deforming an incident wavefront by refraction and / or reflection, wherein the deformable plate (2) has a peripheral edge (11), the method being characterized in that it further comprises: - a second step, making a fin (5) fixedly attached to said deformable plate (2), - an arming step during which the respective movable portion (22) of each of said fins (5) is connected to a respective at least one peripheral actuator (7) so as to enable the latter to locally deform said fin (5) so that said fin transmits a deformation force to said deformable plate (2), - a fixing step during which the respective fixing portion (23) of each of said fins (5) is fixedly attached to a frame (21) fixed relative to said deformable plate (2) so as to be fixed relative to the latter, said periphery (11) comprising, between each pair of adjacent fins (5), respective free portions not connected to any structure.

30. The manufacturing method according to claim 29, characterized in that: The first step and the second step are at least partially overlapping and comprise the common step of cutting the original plate (12) to form the fin (5) and the deformable plate (2), wherein the fin (5) is integral with the deformable plate (2).

31. The manufacturing method according to claim 29, characterized in that: The second step comprises the step of joining the fin (5) to the deformable plate (2).

32. The manufacturing method according to claim 31, characterized in that: The second step comprises the step of joining the fin (5) to the deformable plate (2) by welding, gluing and / or brazing.

33. The manufacturing method according to claim 31 or 32, characterized in that: During said step of joining said fin (5), at least part of said fin (5) is joined to said deformable plate (2): - on the edge of the deformable plate (2), - on the deformable plate (2), and / or - below the deformable plate (2).

34. The manufacturing method according to any one of claims 29 to 32, characterized in that: During the fixing step, the tabs (5) are riveted, screwed, glued, brazed and / or welded to the frame (21).

35. The manufacturing method according to any one of claims 29 to 32, characterized in that: The deformable plate (2) has an incident surface (3) capable of receiving the wavefront, and the manufacturing method further comprises the step of performing a reflection process on the incident surface (3) to form a reflecting surface, wherein the adaptive optical device (1) is a deformable plane mirror.

36. The manufacturing method according to claim 35, characterized in that: The reflection processing step includes the step of covering the incident surface (3) with a reflective coating.

37. The manufacturing method according to any one of claims 29 to 32, characterized in that: The second step comprises the step of bending at least one of the fins (5) so that the latter extends obliquely or perpendicularly relative to the deformable plate (2).

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