A grain selection method, device, electronic device and storage medium

By determining the positioning marks and refreshing grain positions in the image partition during the grain selection process, and selecting grains in preset order, the problem of blue film deformation affecting grain selection accuracy is solved, and efficient and accurate grains are achieved Choose.

CN114496844BActive Publication Date: 2025-01-10SHENZHEN 80 UNITED EQUIP CO LTD
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Patent Information

Application Number
CN202111654015.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-12-30
Publication Date
2025-01-10
Estimated Expiration
2041-12-30

AI Technical Summary

Technical Problem

During the grain selection and manufacturing process, as the number of selected grains increases, the blue film deformation causes the grain position to change, reducing the accuracy of grain picking and affecting subsequent production.

Method used

By determining at least two image partitions of the grain image, positioning marks are generated, and the grain positions are refreshed according to these marks, and the grains are selected in the image partition in the preset selection order, reducing the impact of blue film deformation on grain selection.

Benefits of technology

It realizes fast and accurate selection of grains, reduces selection errors and grain damage, and improves the quality and accuracy of grain selection.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a grain selection method, device, electronic device and storage medium. The method comprises: determining at least two image partitions included in a grain image, and generating positioning marks according to the grains to be selected in the at least two image partitions; refreshing the grain positions of the grains to be selected in the corresponding image partitions according to each positioning mark; and selecting grains in the at least two image partitions according to a preset selection order and the grain positions. In an embodiment of the present invention, by refreshing the grain positions of the grains to be selected in the corresponding image partitions according to each positioning mark, and selecting grains in at least two image partitions according to a preset selection order and grain positions, rapid grain selection is achieved, and the influence of blue film deformation on grain selection is reduced to a certain extent, thereby improving the accuracy of grain selection.
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Description

Technical Field

[0001] The embodiments of the present invention relate to the field of automatic control technology, and in particular to a grain selection method, device, electronic equipment and storage medium. Background Art

[0002] During the die selection and manufacturing process, a layer of sticky film will be attached to the front of the wafer. The function of this film is to fix the chip on the front of the wafer to facilitate the handling of the wafer. This sticky film is commonly known as blue film. The blue film can keep the integrity of the die during the switching process, reduce the breakage caused by the cutting process, and ensure that the die will not be displaced or dropped during normal transmission. However, during the die selection process, as the number of selected die increases, the blue film will undergo a certain deformation, causing the position of the die to change, reducing the accuracy of die picking and affecting subsequent production. Summary of the invention

[0003] The present invention provides a grain selection method, device, electronic equipment and storage medium to realize rapid grain selection, reduce the influence of blue film deformation on grain selection, and improve the accuracy of grain selection.

[0004] In a first aspect, an embodiment of the present invention provides a method for selecting a die, the method comprising:

[0005] Determine at least two image partitions included in the grain image, and generate positioning marks according to the to-be-selected grains in the at least two image partitions;

[0006] Refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark;

[0007] The grains are selected in the at least two image partitions according to a preset selection order and the positions of the grains.

[0008] In a second aspect, an embodiment of the present invention further provides a die selection device, the device comprising:

[0009] A positioning mark module, used for determining at least two image partitions included in the grain image, and generating positioning marks according to the grains to be selected in the at least two image partitions;

[0010] A position refresh module, used for refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark;

[0011] The grain selection module is used to select grains in the at least two image partitions according to a preset selection order and the grain positions.

[0012] In a third aspect, an embodiment of the present invention further provides an electronic device, the electronic device comprising:

[0013] one or more processors;

[0014] a memory for storing one or more programs,

[0015] When the one or more programs are executed by the one or more processors, the one or more processors implement the die selection method as described in the first aspect.

[0016] In a fourth aspect, an embodiment of the present invention further provides a computer-readable storage medium having a computer program stored thereon, wherein when the computer program is executed by a processor, the grain selection method as described in any one of the first aspects is implemented.

[0017] In the technical solution provided by the embodiment of the present invention, at least two image partitions included in the grain image are first determined, and positioning marks are generated according to the grains to be selected in the at least two image partitions, and the grain positions of the grains to be selected in the corresponding image partitions are refreshed according to each positioning mark, and the grains are selected in the at least two image partitions according to the preset selection order and the grain positions. In the embodiment of the present invention, the grains are selected in the at least two image partitions according to the preset selection order and the grain positions, so that the grains are quickly selected. The grains on the blue film are selected based on the preset selection order, which can reduce the deformation degree of the blue film, reduce the amount of change in grain displacement, reduce the occurrence of grain selection errors or grain damage during the selection process, and improve the quality of grain selection. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A flow chart of a grain selection method provided in Embodiment 1 of the present invention;

[0019] Figure 2 A flow chart of a grain selection method provided in the second embodiment of the present invention;

[0020] Figure 3 A schematic diagram of a positioning marking method provided in Embodiment 2 of the present invention;

[0021] Figure 4 This is a flow chart of a grain selection method provided in Embodiment 2 of the present invention;

[0022] Figure 5 A schematic diagram of refreshing the position of a target selection area provided in the second embodiment of the present invention;

[0023] Figure 6 A schematic diagram of the structure of a grain selection device provided in Embodiment 3 of the present invention;

[0024] Figure 7 A schematic diagram of the structure of an electronic device provided in Embodiment 4 of the present invention. DETAILED DESCRIPTION

[0025] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It is to be understood that the specific embodiments described herein are only used to explain the present invention, rather than to limit the present invention. It should also be noted that, for ease of description, only parts related to the present invention are shown in the accompanying drawings, rather than all structures. In addition, the embodiments of the present invention and the features in the embodiments may be combined with each other without conflict.

[0026] Embodiment 1

[0027] Figure 1 This is a flow chart of a method for selecting a die according to the first embodiment of the present invention. This embodiment is applicable to the case where the die is selected quickly and accurately. The method can be performed by a device for selecting a die. The device can be implemented in hardware and / or software and can usually be configured in an electronic device. Specifically, the method includes the following steps:

[0028] S110, determining at least two image partitions included in a grain image, and generating positioning marks according to the grains to be selected in the at least two image partitions.

[0029] Among them, the positioning mark can be understood as a candidate grain for positioning in each image partition, and the candidate grain can be located at any specified position in the image partition, for example, the edge position, the center position, the center of gravity position, etc. Exemplarily, the positioning mark can be a mark generated by the candidate grain closest to the center of each image partition according to the center of each image partition; it can also be a mark generated according to the candidate grain in the upper left corner or the upper right corner of each image partition; it can also be a mark generated according to the candidate grain in the lower left corner or the lower right corner of each image partition, etc.; this embodiment is not limited here. Of course, the positioning mark method is not limited, and it can be marked with various symbols, etc. Exemplarily, it can be represented by "+"; it can also be represented by "o".

[0030] In this embodiment, the grain image in the grain disk can be collected, the grain image can be divided into multiple image partitions according to a fixed size, and a selected grain can be selected in each image partition as a positioning mark. It can be understood that the positions of the positioning marks in different image partitions in the corresponding image partitions can be the same or different. It should be noted that each image partition has a corresponding grain positioning mark, which can be understood as corresponding to a grain positioning mark for each image partition. Among them, the positioning mark can be the selected grain of each image partition. The selected grain can be located at any position in each image partition.

[0031] S120 , updating the grain positions of the to-be-selected grains in the corresponding image partitions according to the positioning marks.

[0032] Among them, refreshing can be a process of updating the position information of each to-be-selected grain in the image partition. Exemplarily, the updating process can be, in the process of grain selection, at the corresponding time point, according to the positioning mark generated by the to-be-selected grain in each image partition, repositioning and refreshing the grain position of the to-be-selected grain in the corresponding image partition; it can also be adjusted according to the refresh change amount of each positioning mark; this embodiment is not limited here. Of course, the refreshing process does not need to refresh the grain position of all to-be-selected grains in the image partition, it can be to update a small number of grains around the current to-be-selected grain in the positioning mark, for example, it can be to refresh the two rows around the current to-be-selected grain in the positioning mark; it can also be to refresh the four rows around the current to-be-selected grain in the positioning mark; this embodiment is not limited here. The grain position can be understood as the position-related position information of the to-be-selected grain, which can include the grain position coordinates, the grain row and column numbers, the grain number, and the pixel position of the grain.

[0033] Specifically, during the selection of the selected grains, industrial equipment, such as an industrial camera, will scan images at the grain selection position and then perform visual positioning, so that the grains at the selection position can correspond to the scanned grains.

[0034] In this embodiment, after the candidate grains in the image partition are selected, the grain positions of the candidate grains in each image partition can be refreshed according to the positioning marks. It can be understood that the relevant position information of the candidate grains in each image partition needs to be rescanned. For example, the relevant coordinates of the positioning mark positions of the scanned grains can be determined, so that the offset of the grain position can be determined according to the positioning mark positions, and then the grain position of the candidate grains in each image partition can be determined; for example, the negative image information of the image partition in the positioning mark can be extracted, which can include image pixels, marking foreground images and background images, so as to correct the amplitude image and then determine the grain position.

[0035] S130 , selecting grains in at least two image partitions according to a preset selection order and grain positions.

[0036] The preset selection order can be understood as a preset grain selection order. The preset selection order can be selected from the smallest number of grains in each image partition according to the number of grain grades in each image partition; it can also be selected from the outer circle of each image partition to the inner circle; it can also be selected from the outermost circle of each image partition at the same time according to each image partition; this embodiment does not limit this.

[0037] In this embodiment, after refreshing the grain positions of the to-be-selected grains in the corresponding image partitions according to each positioning mark, the number of to-be-selected grains corresponding to different grain grades can be determined according to the pre-set grain grade order, and the distance from the image partition to the center of the grain image, i.e., the position information of the to-be-selected grains, can be determined according to the image partitions divided by the grain image, so that the grains can be selected in each image partition according to the grain grade information and the position information.

[0038] In the technical solution provided by the embodiment of the present invention, at least two image partitions included in the grain image are first determined, and positioning marks are generated according to the grains to be selected in the at least two image partitions, and the grain positions of the grains to be selected in the corresponding image partitions are refreshed according to each positioning mark, and the grains are selected in the at least two image partitions according to the preset selection order and the grain positions. In the embodiment of the present invention, the grains are selected in the at least two image partitions according to the preset selection order and the grain positions, so that the grains can be quickly selected, and the influence of the blue film deformation on the grain selection is reduced to a certain extent, thereby improving the accuracy of the grain selection.

[0039] Optionally, the grain selection method further includes:

[0040] When the refreshed change amount of the grain position of the grain to be selected is greater than or equal to the threshold, an abnormal alarm is issued and the grain selection is stopped.

[0041] The refresh change amount can be understood as the change amount of the grain position of the grain to be selected in each image partition after the grain position is refreshed. Of course, the smaller the refresh change amount of the grain position, the smaller the change amount of the grain position of the grain to be selected in each image partition after the grain position is refreshed, so that the grain selection will be more accurate.

[0042] In this embodiment, when the refreshed change in the grain position of the selected grain is greater than or equal to a threshold, it can be considered that the change in the grain position is too much, which will cause a certain impact, and it is necessary to issue an abnormal alarm and stop selecting grains. The threshold can be understood as the threshold of the refresh change. The setting of the threshold can be set based on experience; it can also be set based on relevant experiments; this embodiment does not limit this. The abnormal alarm can be displayed in the form of sound effects or in the form of text, which is not limited in this embodiment.

[0043] For example, the position of the grain to be selected is (a, b), and the position of the grain after refreshing is (aRefresh, bRefresh). The change amount of the horizontal and vertical coordinates refreshed is recorded as DistX and DistY respectively, then: DistX = aRefresh-a; DistY = bRefresh-b. After that, the change amount of the refresh is changed. If DistX is greater than or equal to the threshold, an abnormal alarm is issued and the grain selection is stopped, and it is manually confirmed whether the position of the grain is abnormal; if DistY is greater than or equal to the threshold, an abnormal alarm is issued and the grain selection is stopped, and it is manually confirmed whether the position of the grain is abnormal.

[0044] Optionally, the preset selection order includes at least one of the following:

[0045] In each image partition, the grains are selected in order from small to large according to the number of to-be-selected grains corresponding to the grain grade;

[0046] The grains are selected in order from large to small between each image partition according to the distance from each image partition to the center of the grain image.

[0047] Among them, the grain grade can be judged according to the electrical properties of each grain. The grain grade can be used to judge the quality of the crystal state of the grain. Different grain characteristics have different grain grades. The higher the grade of the grain, the better its permeability or conductivity.

[0048] In this embodiment, in each image partition, the grains can be selected in order from small to large according to the number of to-be-selected grains corresponding to the grain grade; or the grains can be selected in order from large to small according to the distance from each image partition to the center of the grain image. It should be noted that in the process of grain selection, if the grains are selected from small to large from the center of the image partition, after a certain number of grains are selected, the blue film in the grains will be deformed, thereby affecting the effect of grain selection. Therefore, in the process of grain selection, it is necessary to select the grains in the pre-selected order, so that the grains can be selected quickly and accurately, reducing the influence of the deformation of the blue film on the grain selection. Among them, the role of the blue film is to stick the chip to the blue film, which can keep the integrity of the grains during the cutting process, reduce the collapse caused by the cutting process, and ensure that the grains will not be displaced or dropped during normal transmission.

[0049] Optionally, the timing of refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark includes at least one of the following:

[0050] The time interval for refreshing the grain position reaches a preset time threshold; the current grain position of the selected grain and the historical grain position of the previous selected grain do not belong to the same image partition.

[0051] Among them, the time interval can be understood as the time interval for refreshing the grain position after a grain is selected. The preset time threshold can be understood as the threshold for the preset time interval for refreshing the grain position. Exemplarily, the preset time threshold can be set based on experience; it can also be set directly manually; it can also be set by relevant experiments; this embodiment is not limited here. The current grain position can be understood as the grain position of the current grain to be selected. The historical grain position can be understood as the grain position when the grain was last selected.

[0052] In this embodiment, when the time interval for refreshing the grain position reaches a preset time threshold, and / or the current grain position of the selected grain and the historical grain position of the previously selected grain do not belong to the same image partition, the grain position of the grain to be selected in the corresponding image partition can be refreshed according to each positioning mark.

[0053] Embodiment 2

[0054] Figure 2 A flowchart of a grain selection method provided for the second embodiment of the present invention. Based on the above embodiments, this embodiment further refines the method of determining at least two image partitions included in the grain image, generating positioning marks according to the grains to be selected in the at least two image partitions, refreshing the grain positions of the grains to be selected in the corresponding image partitions according to each positioning mark, and selecting grains in the at least two image partitions according to the preset selection order and grain positions. Specifically, it may include the following steps:

[0055] S210 , dividing the grain image into at least two image partitions according to a preset size.

[0056] Among them, the preset size can be understood as the pre-set relevant size for dividing the grain image. When the grain image is divided, the preset size can be relevant size parameters such as length and width. The grain image can be divided into multiple image areas according to the size parameters. Of course, the length and width size parameters are only examples. The size parameters can also be parameters such as circumference and area, which are also within the protection scope of the present invention.

[0057] In the embodiment of the present invention, the grain image can be divided into at least two image partitions according to a preset size, and the number of grains contained in each image partition can be one or more grains. The preset sizes for dividing the grain image can be the same or different.

[0058] S220 , selecting the position of the to-be-selected grain closest to the center of the image partition in at least two image partitions as a positioning mark.

[0059] In this embodiment, after the grain image is divided into at least two image partitions according to a preset size, it is necessary to first find the center of each image partition in the at least two image partitions, and select the position of the to-be-selected grain closest to the center of the image partition in the image partition as a positioning mark. Specifically, each image partition corresponds to a positioning mark position of the position of the to-be-selected grain closest to the center of the image partition.

[0060] For example, Figure 3 A schematic diagram of a positioning marking method provided in Embodiment 2 of the present invention is shown in FIG. Figure 3 As shown in the figure, the "+" mark indicates the position of the to-be-selected grain, which can be understood as the marking position of the positioning mark; the box area can be understood as the grain image partitions into which the grain image is divided one by one, and each image partition corresponds to a marking position of the positioning mark, and the marking position is the position of the to-be-selected grain closest to the central area of ​​the image partition.

[0061] S230, extracting the initial coordinates of each positioning mark and scanning the current coordinates of each positioning mark.

[0062] The initial coordinates can be understood as the position coordinates of the candidate grains closest to the center of each image partition in each image partition, and the current coordinates can be understood as the grain position coordinates of each candidate grain after refreshing each image partition currently scanned.

[0063] In this embodiment, when performing grain selection in each image area, after determining the positioning marks of the positions of the grains to be selected in each image partition, the initial coordinates of each positioning mark can be extracted and the current coordinates of each positioning mark can be scanned to determine the offset of the grain position.

[0064] S240, determining the coordinate displacement between the initial coordinate and the current coordinate as the grain offset.

[0065] The grain offset can be understood as the coordinate displacement of the grain, and can be used to adjust the grain position of the to-be-selected grain in each image partition.

[0066] In this embodiment, the position coordinates of the selected grain closest to the center of each image partition can be compared with the position coordinates of the grain obtained after re-positioning and refreshing, and the coordinate displacement between the two can be obtained. From the coordinate displacement of the grain, the grain offset of the grain displacement coordinate after refreshing compared with the initial coordinate can be determined, so as to adjust the grain offset. It can be understood that the smaller the grain offset, the smaller the grain amount of the position coordinate of the grain after refreshing; on the contrary, the larger the grain offset, the larger the grain amount of the position coordinate of the grain after refreshing.

[0067] For example, when selecting grains in each image partition, the scanning position of the grain is (X, Y), the initial coordinates of the positioning mark are (xSign0, ySign0), and the current coordinates of the positioning mark are (xSign, ySign), then the displacement offset can be expressed as: OffsetX = xSign-xSign0; OffsetY = ySign-ySign0. Wherein, OffsetX represents the displacement offset of the horizontal coordinate, and OffsetY represents the displacement offset of the vertical coordinate.

[0068] S250 , adjusting the grain position of the to-be-selected grain in the corresponding image partition according to the grain offset.

[0069] In this embodiment, the grain positions of the grains to be selected in each image partition can be adjusted accordingly based on the grain offset. It can be understood that when the grain displacement offset is large, the grain positions of the grains to be selected in each image partition that need to be adjusted will be correspondingly more; on the contrary, when the grain displacement offset is small, the grain positions of the grains to be selected in each image partition that need to be adjusted will be correspondingly less.

[0070] For example, the displacement offset of the horizontal coordinate is expressed as: OffsetX = xSign-xSign0; the displacement offset of the vertical coordinate is expressed as: OffsetY = ySign-ySign0, then according to the grain offset, the grain position of the selected grain in the corresponding image partition is adjusted as follows: xPos = X + OffsetX; yPos = Y + OffsetY. Among them, xPos represents the position of the horizontal coordinate of the grain after adjusting the offset, and yPos represents the position of the vertical coordinate of the grain after adjusting the offset.

[0071] S260: Determine the number of to-be-selected grains corresponding to different grain grades in each image partition, and the distance from each image partition to the center of the grain image.

[0072] In this embodiment, it is necessary to determine the number of grains to be selected corresponding to different grain grades in each image partition, and to determine the distance from each image partition to the center of the grain image in each image partition. It should be noted that, due to the different grades of different grains, it is necessary to determine the number of grains to be selected corresponding to different grain grades in each image partition, and the grains can be selected in order from small to large according to the number of grains to be selected corresponding to the grain grade. When determining the distance from each image partition to the center of the grain image, the grains can be selected in order from large to small according to the distance from each image partition to the center of the grain image.

[0073] S270: partition the image into target selection areas in order of distance from far to near.

[0074] The target selection area can be understood as a grain image partition to be selected.

[0075] In this embodiment, the image partitions for grain selection can be used as target selection areas in order of distance from far to near. It should be noted that the grain position where the target selection area starts grain selection can be any point on the outermost circle of the distance from each image partition to the center of the grain image, and the grains are selected from the image partitions in the outermost circle to the innermost circle. For example, the grain position where the target selection area starts grain selection can be the upper left corner or upper right corner of the grain image, or the lower left corner or lower right corner of the grain image; it can also be directly above or directly below the grain image; this embodiment does not limit this.

[0076] Specifically, in the process of selecting grains in the target selection area, the grains can be selected continuously from the outermost circle to the innermost circle in the target selection area; or discontinuous grain selection can be performed from the outermost circle to the innermost circle; this embodiment does not make any limitation here.

[0077] For example, Figure 3 The first “+” in the upper left corner indicates the target selection area. Start selecting grains from here and select grains in turn towards the innermost circle of the grain image. Figure 3 In the process of selecting grains in the target selection area, the grains are selected continuously from the outermost circle to the innermost circle in the target selection area.

[0078] S280, taking the grain grade with the least current number in the target selection area as the target grade, and selecting all the to-be-selected grains corresponding to the target grade according to the grain positions.

[0079] The target grade can be understood as the grade of the grains with the least number of grains to be selected.

[0080] In this embodiment, the number of current grains to be selected in the target selection area has different values. The grain level with the smallest number of values ​​is taken as the target level. The grain positions of the grains to be selected in the target selection area can be adjusted according to the displacement offset of the grains, and then all the grains to be selected corresponding to the target level are selected according to the grain positions.

[0081] S290, determining whether all the to-be-selected grains in the grain image have been selected, if so, stopping the grain selection, if not, reselecting the target selection area to select the grains.

[0082] In this embodiment, after selecting all the selected grains corresponding to the target level according to the grain positions, it is necessary to determine whether all the selected grains in the grain image are selected. If yes, stop selecting the grains. If not, reselect the target selection area to select the grains.

[0083] In the technical solution provided by the embodiment of the present invention, the grain image is first divided into at least two image partitions according to a preset size, and the position of the to-be-selected grain closest to the center of the image partition is selected as a positioning mark in the at least two image partitions; the initial coordinates of each positioning mark are extracted and the current coordinates of each positioning mark are scanned, and the coordinate displacement between the initial coordinates and the current coordinates is determined as the grain offset; the grain position of the to-be-selected grain in the corresponding image partition is adjusted according to the grain offset; the number of to-be-selected grains corresponding to different grain grades in each image partition and the distance from each image partition to the center of the grain image are determined; the image partitions are used as target selection areas in order from far to near; the grain grade with the least current number in the target selection area is used as the target grade, and all to-be-selected grains corresponding to the target grade are selected according to the grain position; it is determined whether all to-be-selected grains in the grain image are selected, and if so, the grain selection is stopped; if not, the target selection area is reselected to select the grains. The embodiment of the present invention further realizes rapid grain selection by taking the grain grade with the least current value in the target selection area as the target grade and selecting all the selected grains corresponding to the target grade according to the grain positions, thereby reducing the influence of blue film deformation on grain selection and improving the accuracy of grain selection.

[0084] For example, to better understand the grain selection method, Figure 4 This is a flow chart of a grain selection method provided in the second embodiment of the present invention. The grain selection method specifically comprises the following steps:

[0085] S410, dividing the grain image and performing positioning marking.

[0086] After scanning the wafer, the sorting equipment merges the document with the spot-measured grains, divides the scanned grains into image partitions, and searches for the grain point closest to the center in each image partition as the mark position according to the center of each image partition. The schematic diagram of dividing the grain image and positioning the mark can be shown as follows: Figure 3 shown.

[0087] S420, scanning each positioning mark.

[0088] In the process of grain selection, it can be found that when a certain number of grains are selected from the center of the grain area, the deformation of the blue film will become larger, affecting the effect of grain selection. Based on this rule, the logic of setting the grain scanning mark is: 1) The order of grain selection is to select grains from small to large according to the number of to-be-selected grains corresponding to the grain grade, that is, the smaller the number of grain grades, the earlier the grains are selected; 2) The area for grain selection is from the outermost circle of the image partition to the innermost circle of the image partition.

[0089] Among them, blue film (UV blue film): before the wafer disc is thinned, a layer of sticky film will be attached to the front of the wafer disc. The function of this layer of film is to fix the chip on the front of the wafer disc, so that the grinder can grind the silicon wafer on the back of the wafer disc. Generally, the thickness of the silicon wafer before grinding is about 700μm. After grinding, the thickness of the wafer disc becomes 200μm, or even 120μm. It depends on the customer's requirements and the application environment of the chip, that is, the wafer disc thinning process. Before the wafer disc is diced, a layer of film will be attached to the back of the wafer disc.

[0090] S430: Refresh the position of the target selection area

[0091] Figure 5 A schematic diagram of refreshing the position of a target selection area provided in the second embodiment of the present invention is shown in FIG. Figure 5 As shown, the solid cross line indicates the center position of the image; the dotted cross line indicates the position of the nozzle on the image; the background of the entire area indicates the blue film; the box area indicates the grains on the wafer disk; the marked box area indicates the grains located in the image area, which mainly records the position and angle of the grains.

[0092] During the grain picking process, CCD (industrial camera) performs visual positioning at the picking position and associates the grains at that position with the scanned grains for fool-proof processing to avoid grain misalignment, which can lead to fatal errors in grain sorting.

[0093] S440: Refresh the positioning mark.

[0094] To refresh the positioning mark, it is necessary to reposition the mark and refresh it at the corresponding time point during the grain selection process. The setting of this time point can be: 1) a fixed time interval to trigger the full-area scanning and positioning mark refreshing of the positioning mark; 2) during the grain selection process, jump from one grain selection area to another grain selection area to trigger the scanning and refreshing of the positioning mark of another grain selection area.

[0095] The grain selection area can be understood as Figure 3 The box area of ​​the divided area block is the grain selection area. When the grain selection in one image partition is completed, the device will jump to the next image partition to carry out the grain selection process.

[0096] S450, correction of grain position.

[0097] When each grain image partition is used for grain selection, the scanning position of the grain is (X, Y), the initial data of the positioning mark is (xSign0, ySign0), and the latest position of the positioning mark is (xSign, ySign). The actual position of the selected grain is as follows:

[0098] OffsetX=xSign-xSign0

[0099] OffsetY=ySign-ySign0

[0100] xPos=X+OffsetX

[0101] yPos=Y+OffsetY

[0102] Where, OffsetX represents the displacement offset of the horizontal axis, and OffsetY represents the displacement offset of the vertical axis. (xPos, yPos) is the actual picking position of the grain.

[0103] S460, Error correction of grain selection.

[0104] During the grain selection process, the grain is refreshed. For example, the selected grain coordinates are (xPos, yPos), and the previously refreshed coordinates are (xRefresh, yRefresh).

[0105] DistX=xRefresh-xPos

[0106] DistY=yRefresh-yPos

[0107] Compare position differences: 1) In the X direction, when the distance DistX is greater than 0.4 of the spacing, an abnormal alarm is triggered, the equipment stops, and manual confirmation is made to see if the position of the grain is abnormal; 2) In the horizontal direction, when the distance DistX is greater than 0.4 of the spacing, an abnormal alarm is triggered, the equipment stops, and manual confirmation is made to see if the position of the grain is abnormal. DistX represents the change in the X-axis refresh, and DistY represents the change in the Y-axis refresh.

[0108] Embodiment 3

[0109] Figure 6 This is a schematic diagram of the structure of a grain selection device provided in the third embodiment of the present invention. The grain selection device provided in this embodiment can be implemented by software and / or hardware, and can be configured in a server to implement a grain selection method in the embodiment of the present invention. Figure 6As shown, the device may specifically include: a positioning mark module 610 , a position flashing module 620 and a die selection module 630 .

[0110] The positioning mark module 610 is used to determine at least two image partitions included in the grain image, and generate positioning marks according to the selected grains in the at least two image partitions.

[0111] The position refresh module 620 is used to refresh the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark.

[0112] The grain selection module 630 is used to select grains in the at least two image partitions according to a preset selection order and the grain positions.

[0113] In the technical solution provided by the embodiment of the present invention, first, the positioning mark module determines at least two image partitions included in the grain image, and generates positioning marks based on the grains to be selected in the at least two image partitions. The position refresh module refreshes the grain positions of the grains to be selected in the corresponding image partitions according to each positioning mark, and the grain selection module selects grains in at least two image partitions according to a preset selection order and the grain positions. In the embodiment of the present invention, grains are selected in at least two image partitions according to a preset selection order and grain positions, which realizes rapid grain selection, reduces the influence of blue film deformation on grain selection to a certain extent, and thus improves the accuracy of grain selection.

[0114] Optionally, the positioning mark module 610 includes:

[0115] The image partitioning unit is used to divide the grain image into at least two image partitions according to a preset size.

[0116] A positioning mark unit is used to select the position of the to-be-selected grain closest to the center of the image partition in the at least two image partitions as the positioning mark.

[0117] Optionally, the position flashing module 620 includes:

[0118] The coordinate extraction unit is used to extract the initial coordinates of each positioning mark and scan the current coordinates of each positioning mark.

[0119] The offset determination unit is used to determine the coordinate displacement between the initial coordinate and the current coordinate as the grain offset.

[0120] The grain position adjustment unit is used to adjust the grain position of the to-be-selected grain in the corresponding image partition according to the grain offset.

[0121] Optionally, the preset selection order includes at least one of the following:

[0122] In each of the image partitions, the grains are selected in order from small to large according to the number of the to-be-selected grains corresponding to the grain grade.

[0123] Among the image partitions, the grains are selected in order from large to small according to the distances from the image partitions to the center of the grain image.

[0124] Optionally, the die selection module 630 includes:

[0125] The distance determination unit is used to determine the number of to-be-selected grains corresponding to different grain grades in each of the image partitions, and the distance from each of the image partitions to the center of the grain image.

[0126] The area determination unit is used to select the image partitions as target selection areas in the order of the distance from far to near.

[0127] The grain selection unit is used to take the grain grade with the least number of values ​​in the target selection area as the target grade, and select all the to-be-selected grains corresponding to the target grade according to the grain positions.

[0128] The selection confirmation unit is used to determine whether all the to-be-selected grains in the grain image have been selected. If so, the grain selection is stopped; if not, the target selection area is reselected to select grains.

[0129] Optionally, the grain selection device further includes:

[0130] The grain abnormality processing module is used to issue an abnormality alarm and stop selecting grains when the change amount of the grain position of the grain to be selected after the refresh is greater than or equal to a threshold.

[0131] Optionally, the timing of refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark includes at least one of the following:

[0132] The time interval for refreshing the position of the die reaches a preset time threshold.

[0133] The current grain position of the selected grain and the historical grain position of the previous selected grain do not belong to the same image partition.

[0134] The die selection device provided in the embodiment of the present invention can execute the die selection method provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0135] Embodiment 3

[0136] Figure 7 A schematic diagram of the structure of an electronic device provided in Embodiment 3 of the present invention is shown in FIG. Figure 7As shown, the device includes a processor 710, a memory 720, an input device 730, and an output device 740; the number of processors 710 in the device can be one or more. Figure 7 A processor 710 is taken as an example; the processor 710, the memory 720, the input device 730 and the output device 740 in the device can be connected via a bus or other means. Figure 7 The example of connecting through bus is taken in the following.

[0137] The memory 720, as a computer-readable storage medium, can be used to store software programs, computer executable programs and modules, such as program instructions / modules corresponding to the grain selection method in the embodiment of the present invention (for example, the positioning mark module 610, the position writing module 620 and the grain selection module 630 in the grain selection device). The processor 710 executes various functional applications and data processing of the device by running the software programs, instructions and modules stored in the memory 720, that is, realizing the above-mentioned grain selection method.

[0138] The memory 720 may mainly include a program storage area and a data storage area, wherein the program storage area may store an operating system, an application required for at least one function; the data storage area may store data created according to the use of the terminal, etc. In addition, the memory 720 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other non-volatile solid-state storage device. In some instances, the memory 720 may further include a memory remotely arranged relative to the processor 710, and these remote memories may be connected to the device via a network. Examples of the above-mentioned network include, but are not limited to, the Internet, an intranet, a local area network, a mobile communication network, and combinations thereof.

[0139] The input device 730 may be used to receive input digital or character information and generate key signal input related to user settings and function control of the device. The output device 740 may include a display device such as a display screen.

[0140] Embodiment 4

[0141] Embodiment 4 of the present invention further provides a storage medium containing computer executable instructions, wherein the computer executable instructions are used to execute a die selection method when executed by a computer processor, the method comprising:

[0142] Determine at least two image partitions included in the grain image, and generate positioning marks according to the to-be-selected grains in the at least two image partitions;

[0143] Refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark;

[0144] The grains are selected in the at least two image partitions according to a preset selection order and the positions of the grains.

[0145] Of course, the computer executable instructions of a storage medium containing computer executable instructions provided by an embodiment of the present invention are not limited to the operations of the method described above, and can also execute related operations in the grain selection method provided by any embodiment of the present invention.

[0146] Through the above description of the implementation methods, the technicians in the relevant field can clearly understand that the present invention can be implemented by means of software and necessary general hardware, and of course it can also be implemented by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, can be embodied in the form of a software product, and the computer software product can be stored in a computer-readable storage medium, such as a computer floppy disk, read-only memory (ROM), random access memory (RAM), flash memory (FLASH), hard disk or optical disk, etc., including a number of instructions for a computer device (which can be a personal computer, server, or network device, etc.) to execute the methods described in each embodiment of the present invention.

[0147] It is worth noting that in the embodiment of the above-mentioned grain selection device, the various units and modules included are only divided according to functional logic, but are not limited to the above-mentioned division, as long as the corresponding functions can be achieved; in addition, the specific names of the functional units are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of the present invention.

[0148] Note that the above are only preferred embodiments of the present invention and the technical principles used. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments, and may include more other equivalent embodiments without departing from the concept of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A grain selection method, characterized in that: The method comprises: Determine at least two image partitions included in the grain image, and generate positioning marks according to the to-be-selected grains in the at least two image partitions; Refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark; Selecting grains in the at least two image partitions according to a preset selection order and the grain positions; Wherein, the method further comprises: When the change amount of the grain position of the grain to be selected after the refresh is greater than or equal to the threshold, an abnormal alarm is issued and the grain selection is stopped; Wherein, the to-be-selected grain is located at a designated position in each of the image partitions, wherein the designated position includes an edge position, a center position and a center of gravity position; wherein the positioning mark is one of the following: a mark generated by the to-be-selected grain closest to the center of each image partition found according to the center of each image partition; a mark generated by the to-be-selected grain at the upper left corner or the upper right corner of each image partition; a mark generated by the to-be-selected grain at the lower left corner or the lower right corner of each image partition; Wherein, the refreshing is a process of updating the position information of each of the to-be-selected grains in the image partition; The crystal grain position includes the crystal grain position coordinates, the crystal grain row and column numbers, the crystal grain number and the pixel position of the crystal grain.

2. The method according to claim 1, characterized in that: The step of determining at least two image partitions included in the grain image and generating positioning marks according to the selected grains in the at least two image partitions includes: Dividing the grain image into at least two image partitions according to a preset size; The position of the to-be-selected grain closest to the center of the image partition is selected in the at least two image partitions as the positioning mark.

3. The method according to claim 1, characterized in that: The updating of the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark includes: Extracting the initial coordinates of each of the positioning marks and scanning the current coordinates of each of the positioning marks; Determine the coordinate displacement between the initial coordinate and the current coordinate as the grain offset; The grain position of the to-be-selected grain in the corresponding image partition is adjusted according to the grain offset.

4. The method according to claim 1, characterized in that: The preset selection order includes at least one of the following: Selecting grains in each of the image partitions in order from small to large according to the number of the to-be-selected grains corresponding to the grain grade; Among the image partitions, the grains are selected in order from large to small according to the distances from the image partitions to the center of the grain image.

5. The method according to claim 1, characterized in that: The step of selecting grains in the at least two image partitions according to a preset selection order and the grain positions includes: Determine the number of grains to be selected corresponding to different grain grades in each of the image partitions, and the distance from each of the image partitions to the center of the grain image; The image partitions are used as target selection areas in the order of the distances from far to near; Taking the grain grade with the least number of values ​​in the target selection area as the target grade, and selecting all the to-be-selected grains corresponding to the target grade according to the grain positions; Determine whether all the to-be-selected grains of the grain image have been selected, if so, stop selecting grains, if not, reselect the target selection area to select grains.

6. The method according to claim 1, characterized in that: The timing of refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark includes at least one of the following: The time interval for refreshing the position of the grain reaches a preset time threshold; The current grain position of the selected grain and the historical grain position of the previous selected grain do not belong to the same image partition.

7. A grain selection device, characterized in that: The device comprises: A positioning mark module, used for determining at least two image partitions included in the grain image, and generating positioning marks according to the grains to be selected in the at least two image partitions; A position refresh module, used for refreshing the grain position of the to-be-selected grain in the corresponding image partition according to each positioning mark; A grain selection module, used for selecting grains in the at least two image partitions according to a preset selection order and the grain positions; The grain selection device further includes: a grain abnormality processing module, which is used to issue an abnormality alarm and stop selecting grains when the change amount of the grain position of the grain to be selected after the refresh is greater than or equal to a threshold value; Wherein, the to-be-selected grain is located at a designated position in each of the image partitions, wherein the designated position includes an edge position, a center position and a center of gravity position; wherein the positioning mark is one of the following: a mark generated by the to-be-selected grain closest to the center of each image partition found according to the center of each image partition; a mark generated by the to-be-selected grain at the upper left corner or the upper right corner of each image partition; a mark generated by the to-be-selected grain at the lower left corner or the lower right corner of each image partition; Wherein, the refreshing is a process of updating the position information of each of the to-be-selected grains in the image partition; The crystal grain position includes the crystal grain position coordinates, the crystal grain row and column numbers, the crystal grain number and the pixel position of the crystal grain.

8. An electronic device, characterized in that: The electronic device comprises: one or more processors; a memory for storing one or more programs, When the one or more programs are executed by the one or more processors, the one or more processors implement the method according to any one of claims 1 to 6.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the method according to any one of claims 1 to 6 is implemented.

Citation Information

Patent Citations

  • Method for picking model type crystal particle

    CN101728227A

  • Crystal grain needling demolding method

    CN113380674A