Power control method of load-bearing system and load-bearing device
By dividing the heating wire into independent temperature-controlled units and adjusting its power, the problem of temperature inconsistency in each area of the substrate caused by the inclination of the bearing disk is solved, the uniformity of the film layer performance is achieved, and the quality of the semiconductor material deposition process is improved.
Patent Information
- Application Number
- CN202080105409.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-10-21
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2040-10-21
AI Technical Summary
In the semiconductor material deposition process, the growth temperatures of each area of the substrate are inconsistent due to the inclination of the carrier disk, which makes it difficult to consistent film performance.
By dividing the heating wire into multiple independent temperature-controlled heating wire units, and using the power control module to adjust the power of each heating wire unit in the deposition process, ensuring the consistency of temperatures in each area of the bearing disk, thereby achieving the film layer performance on the substrate uniformity.
It effectively improves the uniformity of the performance of each region of the epitaxial growth film layer on the substrate, ensures the consistency of the growth temperature of each region of the substrate during the deposition process, and thus improves the performance of the film layer.
Smart Images
Figure CN116249796B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor technology, and in particular to a power control method for a load-bearing system and a load-bearing device. Background Art
[0002] Some semiconductor materials, such as GaN-based materials, are formed by epitaxial growth on a substrate through a deposition process. During the deposition process, the substrate is placed on a carrier plate of a carrier system and heated by a heating wire to bring the substrate to the deposition process conditions. During deposition, the carrier plate rotates to balance the temperature of each area of the substrate, so that the performance of each area of the epitaxially grown film is consistent.
[0003] However, it is found in actual processes that it is difficult to achieve consistent performance in different regions of the epitaxially grown film layer on the substrate. Summary of the invention
[0004] According to the inventor's analysis, the reason why the performance of each area of the epitaxially grown film on the substrate is difficult to be consistent is that the carrier plate is tilted to the shaft, that is, the carrier plate has a sinking end and an upturned end. In this way, during the deposition process, when the carrier plate rotates with the shaft, since the heating wire is a whole piece and the temperature is roughly the same, the substrate area at the sinking end is closer to the heating wire and has a higher temperature; the substrate area at the upturned end is farther from the heating wire and has a lower temperature, resulting in different growth temperatures in each area of the substrate, and thus different film performance.
[0005] Based on the above analysis, the present invention provides a power control method for a carrier system and a carrier device, the purpose of which is to improve the performance uniformity of each area of the epitaxially grown film layer on the substrate.
[0006] To achieve the above object, the present invention provides a bearing system, comprising:
[0007] Carrying tray;
[0008] A rotating shaft is fixed to the carrying plate; the rotating shaft rotates synchronously with the carrying plate;
[0009] A heating wire is placed below the carrier plate; the heating wire comprises n heating wire units arranged in the circumferential direction of the carrier plate, n≥2, and each heating wire unit is independently temperature controlled;
[0010] The power control module is used to control the power of the heating wire unit directly below the sinking end of the carrier plate to be less than the power of other heating wire units and / or the power of the heating wire unit directly below the upturned end of the carrier plate to be greater than the power of other heating wire units during rotation.
[0011] Optionally, each of the heating wire units has the same angle in the circumferential direction of the carrier disk.
[0012] Optionally, the carrying system further includes:
[0013] A parameter acquisition module, used to acquire the rotation speed and rotation direction of the carrier plate, and the number information of the initial heating wire unit directly below the sinking end of the carrier plate when in the initial position;
[0014] The power control module is used to control the n heating wire units arranged along the rotation direction of the carrier disk according to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit obtained by the parameter acquisition module, so that the power changes from the first power to the second power after 1 / (n*rotation speed) time, and the first power is less than the second power.
[0015] Optionally, the parameter acquisition module also acquires a first distance between the sinking end and the initial heating wire unit, and a second distance between the fixed point of the supporting plate and the rotating shaft and the heating wire directly below the fixed point; the ratio between the first power and the second power is proportional to the ratio between the first distance and the second distance.
[0016] Optionally, the carrying system further includes:
[0017] A parameter acquisition module, used to acquire the rotation speed and rotation direction of the carrier plate, and the number information of the initial heating wire unit directly below the upturned end of the carrier plate when in the initial position;
[0018] The power control module is used to control the n heating wire units arranged along the rotation direction of the carrier disk according to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit obtained by the parameter acquisition module, so that the power changes from the third power to the second power after 1 / (n*rotation speed) time, and the third power is greater than the second power.
[0019] Optionally, the parameter acquisition module also acquires a third distance between the upturned end and the initial heating wire unit, and a second distance between the fixed point of the supporting plate and the rotating shaft and the heating wire directly below the fixed point; the ratio of the third power to the second power is proportional to the ratio of the third distance to the second distance.
[0020] Optionally, the carrying system further includes:
[0021] A detection module, used for obtaining in real time the serial number information of the heating wire unit directly below the sinking end of the carrier plate;
[0022] The power control module is used to control the power of the heating wire unit detected by the detection module to be a first power, and the power of the other heating wire units to be a second power, and the first power is less than the second power.
[0023] Optionally, the carrying system further includes:
[0024] A detection module, used for obtaining in real time the serial number information of the heating wire unit directly below the upturned end of the carrier plate;
[0025] The power control module is used to control the power of the heating wire unit detected by the detection module to be a third power, and the power of the other heating wire units to be a second power, and the third power is greater than the second power.
[0026] Another aspect of the present invention provides a power control method for a load-bearing device, the load-bearing device comprising:
[0027] Carrying tray;
[0028] A rotating shaft is fixed to the carrying plate; the rotating shaft rotates synchronously with the carrying plate;
[0029] and a heating wire, which is placed below the carrier plate; the heating wire comprises n heating wire units arranged in the circumferential direction of the carrier plate, n≥2, and each heating wire unit is independently temperature controlled;
[0030] The power control method includes: during the rotation process, the power of the heating wire unit directly below the sinking end of the carrier plate is configured to be smaller than the power of other heating wire units and / or the power of the heating wire unit directly below the upturned end of the carrier plate is configured to be larger than the power of other heating wire units.
[0031] Optionally, each of the heating wire units has the same angle in the circumferential direction of the carrier disc;
[0032] The method for implementing that the power of the heating wire unit directly below the sinking end of the carrier plate during the rotation is configured to be smaller than the power of other heating wire units includes:
[0033] Obtaining the rotation speed and rotation direction of the carrier plate, and the number information of the initial heating wire unit directly below the sinking end of the carrier plate when the carrier plate is in the initial position;
[0034] According to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit, n heating wire units are arranged along the rotation direction of the carrier disk, and the power changes from the first power to the second power after 1 / (n*rotation speed) time, and the first power is less than the second power.
[0035] Optionally, each of the heating wire units has the same angle in the circumferential direction of the carrier disc;
[0036] The method for implementing that the power of the heating wire unit directly below the upturned end of the carrier plate during the rotation is configured to be greater than the power of other heating wire units includes:
[0037] Obtaining the rotation speed and rotation direction of the carrier plate, and the number information of the initial heating wire unit directly below the upturned end of the carrier plate when the carrier plate is in the initial position;
[0038] According to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit, n heating wire units are arranged along the rotation direction of the carrier disk, and the power changes from the third power to the second power after 1 / (n*rotation speed) time, and the third power is greater than the second power.
[0039] Optionally, a method for implementing that the power of the heating wire unit directly below the sinking end of the carrier plate during the rotation is configured to be smaller than the power of other heating wire units includes:
[0040] Real-time acquisition of the serial number information of the heating wire unit directly below the sinking end of the carrier plate;
[0041] The detected power of the heating wire unit is configured to be a first power, and the powers of the other heating wire units are a second power, and the first power is less than the second power.
[0042] Optionally, a method for implementing that the power of the heating wire unit directly below the upturned end of the carrier plate during the rotation is configured to be greater than the power of other heating wire units includes:
[0043] Real-time acquisition of the serial number information of the heating wire unit directly below the upturned end of the carrier plate;
[0044] The detected power of the heating wire unit is configured to be a third power, the power of the other heating wire units is a second power, and the third power is greater than the second power.
[0045] Compared with the prior art, the present invention has the following beneficial effects:
[0046] 1) The heating wire is divided into n heating wire units, n≥2, each heating wire unit is independently temperature controlled, and the n heating wire units are arranged along the circumference of the carrier plate; the power control module is used to control the power of the heating wire unit directly below the sinking end of the carrier plate to be less than the power of other heating wire units during the rotation process, and / or the power of the heating wire unit directly below the upturned end of the carrier plate is greater than the power of other heating wire units. In this way, the temperature of each area of the carrier plate is consistent, the growth temperature of each area of the substrate carried by the carrier plate is consistent, and then the performance of the epitaxially grown film layer is uniform.
[0047] 2) In the optional scheme, the carrier system also includes: a parameter acquisition module for acquiring the rotation speed and rotation direction of the carrier plate, and the number information of the initial heating wire unit directly below the sinking end of the carrier plate when in the initial position; a power control module for controlling the n heating wire units arranged along the rotation direction of the carrier plate according to the rotation speed, rotation direction, and number information of the initial heating wire unit acquired by the parameter acquisition module, so that the power changes from the first power to the second power after 1 / (n*rotation speed) time, and the first power is less than the second power. In other words, in the deposition process, the n heating wire units are pre-configured to perform power jumps according to a predetermined rule.
[0048] 3) In the optional solution, the carrier system further includes: a parameter acquisition module for acquiring the rotation speed and rotation direction of the carrier plate, and the number information of the initial heating wire unit directly below the upturned end of the carrier plate when in the initial position; a power control module for controlling the n heating wire units arranged along the rotation direction of the carrier plate according to the rotation speed, rotation direction, and number information of the initial heating wire unit acquired by the parameter acquisition module, so that the power changes from the third power to the second power after 1 / (n*rotation speed) time, and the third power is greater than the second power. In the deposition process of this optional solution, the n heating wire units are also pre-configured to perform power jumps according to a predetermined rule.
[0049] 4) In the optional solution, the carrier system further includes: a detection module for obtaining the serial number information of the heating wire unit directly below the sinking end of the carrier plate in real time; a power control module for controlling the power of the heating wire unit detected by the detection module to be the first power, and the power of the other heating wire units to be the second power, and the first power is less than the second power. Different from the optional solutions 2) and 3), in the deposition process of this optional solution, the power of the n heating wire units is changed in real time according to the real-time position of the sinking end.
[0050] 5) In the optional solution, the carrier system further includes: a detection module for obtaining the serial number information of the heating wire unit directly below the upturned end of the carrier plate in real time; a power control module for controlling the power of the heating wire unit detected by the detection module to be the third power, and the power of the other heating wire units to be the second power, and the third power is greater than the second power. In the deposition process of this optional solution, the power of the n heating wire units is changed in real time according to the real-time position of the upturned end. BRIEF DESCRIPTION OF THE DRAWINGS
[0051] Figure 1 is a schematic diagram of the three-dimensional structure of the carrying device according to the first embodiment of the present invention;
[0052] Figure 2 yes Figure 1 A top view of the heating wire in FIG.
[0053] Figure 3 yes Figure 1 A schematic cross-sectional structure diagram of a vertical section of a carrying device;
[0054] Figure 4 is a schematic diagram of the three-dimensional structure of the bearing system of the first embodiment of the present invention;
[0055] Figure 5 yes Figure 4 A schematic cross-sectional structure diagram of a vertical section of a load-bearing system;
[0056] Figure 6 is a flow chart of a power control method for a load-bearing device according to a second embodiment of the present invention;
[0057] Figure 7 is a schematic cross-sectional structural diagram of a bearing system according to a second embodiment of the present invention;
[0058] Figure 8 is a flow chart of a power control method for a load-bearing device according to a third embodiment of the present invention;
[0059] Fig. 9 is a schematic cross-sectional structural diagram of a bearing system according to a third embodiment of the present invention;
[0060] Fig.10 is a flow chart of a power control method for a load-bearing device according to a fourth embodiment of the present invention;
[0061] Fig.11 is a schematic cross-sectional structural diagram of a bearing system according to a fourth embodiment of the present invention;
[0062] Fig.12 is a flow chart of a power control method for a load-bearing device according to a fifth embodiment of the present invention;
[0063] Fig.13It is a schematic cross-sectional structure diagram of a bearing system according to a fifth embodiment of the present invention.
[0064] To facilitate understanding of the present invention, all reference numerals appearing in the present invention are listed below:
[0065] Carrying plate 11 Rotating shaft 12
[0066] Heating wire 13 Heating wire units 131, 132..., 13n, 13x,
[0067] 13y, 13p, 13q
[0068] Downward end 11a Upward end 11b
[0069] Power control module 14 Parameter acquisition module 15
[0070] Detection module 16 Carrying system 1, 2, 3, 4, 5
[0071] First distance L1 Second distance L2
[0072] The third distance L3 and the fourth distance L4
[0073] Fifth distance L5 DETAILED DESCRIPTION
[0074] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.
[0075] Figure 1 It is a schematic diagram of the three-dimensional structure of the carrying device of the first embodiment of the present invention. Figure 2 yes Figure 1 Top view of the heating wire in the figure. Figure 3 yes Figure 1 A schematic diagram of the cross-sectional structure of a vertical section of a carrying device.
[0076] Reference Figures 1 to 3 As shown, the carrying device includes:
[0077] Carrying plate 11;
[0078] The rotating shaft 12 is fixed to the carrier plate 11; the rotating shaft 12 rotates synchronously with the carrier plate 11;
[0079] The heating wire 13 is placed under the carrier plate 11 ; the heating wire 13 includes n heating wire units 131 , 132 . . . , 13n arranged in the circumferential direction of the carrier plate 11 , where n≥2, and each heating wire unit 131 , 132 . . . , 13n is independently temperature controlled.
[0080] The power control method of the above-mentioned carrying device includes: during the rotation process, the power of the heating wire unit 13x directly below the sinking end 11a of the carrying plate 11 is configured to be smaller than the power of the other heating wire units 131, 132..., 13x-1, 13x+1..., 13n and / or the power of the heating wire unit 13y directly below the upturned end 11b of the carrying plate 11 is configured to be larger than the power of the other heating wire units 131, 132..., 13y-1, 13y+1..., 13n.
[0081] The material of the carrier plate 11 can be graphite. Figure 1 As shown, when the carrier plate 11 is installed on the rotating shaft 12, the problem of installation tilt often occurs, that is, the carrier plate 11 is not perpendicular to the rotating shaft 12, and tilting at a small angle is the most common.
[0082] The material of the heating wire 13 can be copper or aluminum. The heating wire 13 can be embedded in an insulating material, such as asbestos tile. Figure 2 As shown, in this embodiment, the angles of the heating wire units 131, 132..., 13n in the circumferential direction of the carrier plate 11 are the same. In other embodiments, the angles of the heating wire units 131, 132..., 13n in the circumferential direction of the carrier plate 11 may also be different.
[0083] Compared with the situation in the prior art where the heating wire 13 is a whole piece with the same power, in this embodiment, the heating wire 13 is divided into n heating wire units 131, 132..., 13n, n≥2, each heating wire unit 131, 132..., 13n is independently temperature controlled, and the n heating wire units 131, 132..., 13n are arranged along the circumference of the carrier plate 11. By controlling the power of the heating wire unit 13x directly below the sinking end 11a of the carrier plate 11 during rotation to be lower than the power of other heating wire units 131, 132..., 13x-1, 13x+1..., 13n and / or the power of the heating wire unit 13y directly below the upturned end 11b of the carrier plate 11 to be higher than the power of other heating wire units 131, 132..., 13y-1, 13y+1..., 13n, the temperature of each area of the carrier plate 11 is consistent, the growth temperature of each area of the substrate carried by the carrier plate 11 is consistent, and the performance of the epitaxially grown film layer is uniform.
[0084] Correspondingly, the first embodiment of the present invention further provides a bearing system. Figure 4 It is a three-dimensional structural diagram of the bearing system. Figure 5 yes Figure 4 Schematic diagram of the cross-sectional structure of a vertical section of the load-bearing system.
[0085] Reference Figure 4 and Figure 5 As shown, the carrying system 1 includes:
[0086] Carrying plate 11;
[0087] The rotating shaft 12 is fixed to the carrier plate 11; the rotating shaft 12 rotates synchronously with the carrier plate 11;
[0088] The heating wire 13 is placed below the carrier plate 11; the heating wire 13 includes n heating wire units 131, 132..., 13n arranged in the circumferential direction of the carrier plate 11, n≥2, and each heating wire unit 131, 132..., 13n is independently temperature controlled;
[0089] The power control module 14 is used to control the power of the heating wire unit 13x directly below the sinking end 11a of the carrier plate 11 during rotation to be lower than the power of other heating wire units 131, 132..., 13x-1, 13x+1..., 13n and / or the power of the heating wire unit 13y directly below the upturned end 11b of the carrier plate 11 to be higher than the power of other heating wire units 131, 132..., 13y-1, 13y+1..., 13n.
[0090] In the carrying system 1, the power control module 14 is used to control the power of the heating wire unit 13x directly below the sinking end 11a of the carrying plate 11 during rotation to be lower than the power of other heating wire units 131, 132..., 13x-1, 13x+1..., 13n and / or the power of the heating wire unit 13y directly below the upturned end 11b of the carrying plate 11 is higher than the power of other heating wire units 131, 132..., 13y-1, 13y+1..., 13n, thereby achieving consistent temperature in various areas of the carrying plate 11 and consistent growth temperature in various areas of the substrate carried by the carrying plate 11, thereby achieving uniform performance of the epitaxially grown film layer.
[0091] Figure 6 is a flow chart of a power control method for a load carrying device according to a second embodiment of the present invention.
[0092] The carrying device of the second embodiment is the same as the carrying device of the first embodiment, and the difference lies in the power control method. Specifically, the power control method of the first embodiment: the power of the heating wire unit 13x directly below the sinking end 11a of the carrying plate 11 during the rotation process is configured to be smaller than the power of the other heating wire units 131, 132..., 13x-1, 13x+1..., 13n. The implementation method may include:
[0093] Step S11, obtaining the rotation speed and rotation direction of the carrier plate 11, and the number information of the initial heating wire unit 13p directly below the sinking end 11a of the carrier plate 11 at the initial position;
[0094] Step S12, according to the rotation speed, rotation direction, and numbering information of the initial heating wire unit 13p, configure n heating wire units 13p, 13p+1..., 13p-1 arranged along the rotation direction of the carrier disk 11, and after 1 / (n*rotation speed) time, the power changes from the first power P1 to the second power P2, and the first power P1 is less than the second power P2.
[0095] In step S11 , the rotation speed and the rotation direction of the carrier plate 11 can be obtained through a storage list, that is, before the deposition process, the rotation speed and the rotation direction of the carrier plate 11 are stored in the storage list.
[0096] In the second embodiment, the numbering information of the first heating wire unit 131 may be, for example, 131; the numbering information of the second heating wire unit 132 may be, for example, 132...; the numbering information of the nth heating wire unit 13n may be, for example, 13n. In other words, the numbering information of each heating wire unit 131, 132..., 13n is absolutely determined.
[0097] In other embodiments, when the initial position is acquired in step S11, the numbering information of the initial heating wire unit 13p directly below the sinking end 11a of the carrier plate 11 may include: when the initial position is acquired, the numbering information of the initial heating wire unit 13p directly below the sinking end 11a of the carrier plate 11 is set to 131, and the numbering information of the n heating wire units 13p, 13p+1..., 13p-1 arranged along the rotation direction of the carrier plate 11 is 131, 132..., 13n in sequence. In other words, the numbering information of each heating wire unit 131, 132..., 13n is relatively determined in one acquisition process; in the next acquisition process, the numbering information of each heating wire unit 131, 132..., 13n is re-determined.
[0098] In step S12, each heating wire unit 13p, 13p+1..., 13p-1 is at the first power P1 for a time period of 1 / (n*rotation speed), and is at the second power P2 for the rest of the time period.
[0099] It can be seen that when the deposition process is performed according to the power control method of the second embodiment, the n heating wire units 13p, 13p+1 . . . , 13p-1 are pre-configured to perform power jumps according to a predetermined rule.
[0100] Furthermore, in some embodiments, step S11 also obtains a first distance L1 between the sinking end 11a and the initial heating wire unit 13p, and a second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; in step S12, the ratio between the first power P1 and the second power P2 is proportional to the ratio between the first distance L1 and the second distance L2.
[0101] Correspondingly, the second embodiment of the present invention further provides a bearing system. Figure 7 It is a schematic diagram of the cross-sectional structure of the load-bearing system.
[0102] Specifically, refer to Figure 7 As shown, the carrying system 2 also includes:
[0103] The parameter acquisition module 15 is used to acquire the rotation speed and rotation direction of the carrier plate 11, and the number information of the initial heating wire unit 13p directly below the sinking end 11a of the carrier plate 11 at the initial position;
[0104] The power control module 14 is used to control the n heating wire units 13p, 13p+1..., 13p-1 arranged along the rotation direction of the carrier disk 11 according to the rotation speed, rotation direction and numbering information of the initial heating wire unit 13p obtained by the parameter acquisition module 15, so that the power changes from the first power P1 to the second power P2 after 1 / (n*rotation speed) time, and the first power P1 is less than the second power P2.
[0105] In some embodiments, the parameter acquisition module 15 also acquires a first distance L1 between the sinking end 11a and the initial heating wire unit 13p, and a second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; the ratio between the first power P1 and the second power P2 in the power control module 14 is proportional to the ratio between the first distance L1 and the second distance L2.
[0106] Figure 8 is a flow chart of a power control method for a load carrying device according to a third embodiment of the present invention.
[0107] The carrying device of the third embodiment is the same as the carrying device of the first embodiment, and the difference lies in the power control method. Specifically, the power control method of the first embodiment: the power of the heating wire unit 13y directly below the upturned end 11b of the carrying plate 11 during the rotation process is configured to be greater than the power of the other heating wire units 131, 132..., 13y-1, 13y+1..., 13n. The implementation method includes:
[0108] Step S11', obtaining the rotation speed and rotation direction of the carrier plate 11, and the number information of the initial heating wire unit 13q directly below the upturned end 11b of the carrier plate 11 at the initial position;
[0109] Step S12', according to the rotation speed, rotation direction, and numbering information of the initial heating wire unit 13q, configure n heating wire units 13q, 13q+1..., 13q-1 arranged along the rotation direction of the carrier disk 11, and after 1 / (n*rotation speed) time, the power changes from the third power P3 to the second power P2, and the third power P3 is greater than the second power P2.
[0110] In step S11 ′, the rotation speed and the rotation direction of the carrier plate 11 can be obtained through a storage list, that is, before the deposition process, the rotation speed and the rotation direction of the carrier plate 11 are stored in the storage list.
[0111] In the third embodiment, the numbering information of the first heating wire unit 131 may be, for example, 131; the numbering information of the second heating wire unit 132 may be, for example, 132...; the numbering information of the nth heating wire unit 13n may be, for example, 13n. In other words, the numbering information of each heating wire unit 131, 132..., 13n is absolutely determined.
[0112] In other embodiments, when the initial position is acquired in step S11', the numbering information of the initial heating wire unit 13q directly below the upturned end 11b of the carrier plate 11 may include: the numbering information of the initial heating wire unit 13q directly below the upturned end 11b of the carrier plate 11 at the initial position is set to 131, and the numbering information of the n heating wire units 13q, 13q+1..., 13q-1 arranged along the rotation direction of the carrier plate 11 is 131, 132..., 13n in sequence. In other words, the numbering information of each heating wire unit 131, 132..., 13n is relatively determined in one acquisition process; in the next acquisition process, the numbering information of each heating wire unit 131, 132..., 13n is re-determined.
[0113] In step S12', each heating wire unit 13q, 13q+1 . . . , 13q-1 is at the third power P3 for a time period of 1 / (n*rotation speed), and is at the second power P2 for the rest of the time period.
[0114] It can be seen that when the deposition process is performed according to the power control method of the third embodiment, the n heating wire units 13q, 13q+1 . . . , 13q-1 are pre-configured to perform power jumps according to a predetermined rule.
[0115] Furthermore, in some embodiments, step S11' also obtains a third distance L3 between the upturned end 11b and the initial heating wire unit 13q, and a second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; in step S12', the ratio of the third power P3 to the second power P2 is proportional to the ratio of the third distance L3 to the second distance L2.
[0116] Correspondingly, the third embodiment of the present invention further provides a bearing system. Fig. 9 It is a schematic diagram of the cross-sectional structure of the load-bearing system.
[0117] Specifically, refer to Fig. 9 As shown, the carrying system 3 also includes:
[0118] The parameter acquisition module 15 is used to acquire the rotation speed and rotation direction of the carrier plate 11, and the number information of the initial heating wire unit 13q directly below the upturned end 11b of the carrier plate 11 at the initial position;
[0119] The power control module 14 is used to control the n heating wire units 13q, 13q+1..., 13q-1 arranged along the rotation direction of the carrier disk 11 according to the rotation speed, rotation direction and numbering information of the initial heating wire unit 13q obtained by the parameter acquisition module 15, and the power changes from the third power P3 to the second power P2 after 1 / (n*rotation speed) time, and the third power P3 is greater than the second power P2.
[0120] In some embodiments, the parameter acquisition module 15 also acquires a third distance L3 between the upturned end 11b and the initial heating wire unit 13q, and a second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; the ratio between the third power P3 and the second power P2 in the power control module 14 is proportional to the ratio between the third distance L3 and the second distance L2.
[0121] The solutions of the third embodiment and the second embodiment may also be combined to form a new solution. For example, in some embodiments, the power control method of the first embodiment specifically includes:
[0122] Step S31, obtaining the rotation speed and rotation direction of the carrier plate 11, and the numbering information of the initial heating wire unit 13p directly below the sinking end 11a of the carrier plate 11 and the numbering information of the initial heating wire unit 13q directly below the upward end 11b when the carrier plate 11 is in the initial position;
[0123] Step S32, according to the rotation speed, rotation direction, and numbering information of the initial heating wire units 13p, 13q, configure n heating wire units 13p, 13p+1..., 13p-1 arranged along the rotation direction of the carrier disk 11, and after 1 / (n*rotation speed) time, the power changes from the first power P1 to the second power P2, and the first power P1 is less than the second power P2; and the n heating wire units 13q, 13q+1..., 13q-1 arranged along the rotation direction of the carrier disk 11, after 1 / (n*rotation speed) time, the power changes from the third power P3 to the second power P2, and the third power P3 is greater than the second power P2.
[0124] In some embodiments, the carrier system further comprises:
[0125] The parameter acquisition module 15 is used to acquire the rotation speed and rotation direction of the carrier plate 11, and the number information of the initial heating wire unit 13p directly below the sinking end 11a of the carrier plate 11 and the number information of the initial heating wire unit 13q directly below the upward end 11b when the carrier plate 11 is in the initial position;
[0126] The power control module 14 is used to control the n heating wire units 13p, 13p+1..., 13p-1 arranged along the rotation direction of the carrier disk 11 according to the rotation speed, rotation direction and numbering information of the initial heating wire units 13p and 13q obtained by the parameter acquisition module 15, so that the power changes from the first power P1 to the second power P2 after 1 / (n*rotation speed) time, and the first power P1 is less than the second power P2; and the n heating wire units 13q, 13q+1..., 13q-1 arranged along the rotation direction of the carrier disk 11 change from the third power P3 to the second power P2 after 1 / (n*rotation speed) time, and the third power P3 is greater than the second power P2.
[0127] Fig.10 is a flow chart of a power control method for a load carrying device according to a fourth embodiment of the present invention.
[0128] The bearing device of the fourth embodiment is the same as the bearing device of the first embodiment, and the difference lies in the power control method. Specifically, the power control method of the fourth embodiment: the power of the heating wire unit 13x directly below the sinking end 11a of the bearing plate 11 during the rotation process is configured to be less than the power of the other heating wire units 131, 132..., 13x-1, 13x+1..., 13n. The implementation method may include:
[0129] Step S41, obtaining in real time the serial number information of the heating wire unit 13x directly below the sinking end 11a of the carrier plate 11;
[0130] Step S42, configuring the detected power of the heating wire unit 13x to be the first power P1, and the powers of the other heating wire units 131, 132..., 13x-1, 13x+1..., 13n to be the second power P2, and the first power P1 is less than the second power P2.
[0131] In the fourth embodiment, the numbering information of the first heating wire unit 131 may be, for example, 131; the numbering information of the second heating wire unit 132 may be, for example, 132...; the numbering information of the nth heating wire unit 13n may be, for example, 13n. In other words, the numbering information of each heating wire unit 131, 132..., 13n is absolutely determined.
[0132] In step S42 , each heating wire unit 131 , 132 . . . , 13n is at the first power P1 for a time period of 1 / (n*rotation speed), and is at the second power P2 for the remaining time periods.
[0133] It can be seen that when the deposition process is performed according to the power control method of the fourth embodiment, the power of the n heating wire units 13x, 13x+1 . . . , 13x-1 changes in real time according to the real-time position of the sinking end 11a.
[0134] Furthermore, in some embodiments, step S41 also obtains in real time a fourth distance L4 between the sinking end 11a and the heating wire unit 13x directly below, and a second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; in step S42, the ratio between the first power P1 and the second power P2 is proportional to the ratio between the fourth distance L4 and the second distance L2.
[0135] Correspondingly, the fourth embodiment of the present invention further provides a bearing system. Fig.11 It is a schematic diagram of the cross-sectional structure of the load-bearing system.
[0136] Specifically, refer to Fig.11 As shown, the carrying system 4 also includes:
[0137] The detection module 16 is used to obtain the serial number information of the heating wire unit 13x directly below the sinking end 11a of the carrier plate 11 in real time;
[0138] The power control module 14 is used to control the power of the heating wire unit 13x detected by the detection module 16 to be the first power P1, and the power of other heating wire units 131, 132..., 13x-1, 13x+1..., 13n to be the second power P2, and the first power P1 is less than the second power P2.
[0139] In some embodiments, the detection module 16 also obtains in real time a fourth distance L4 between the sinking end 11a and the heating wire unit 13x directly below, and a second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; the ratio between the first power P1 and the second power P2 in the power control module 14 is proportional to the ratio between the fourth distance L4 and the second distance L2.
[0140] Fig.12 is a flow chart of a power control method for a load carrying device according to a fifth embodiment of the present invention.
[0141] The carrying device of the fifth embodiment is the same as the carrying device of the first embodiment, and the difference lies in the power control method. Specifically, the power control method of the fifth embodiment: the power of the heating wire unit 13y directly below the upturned end 11b of the carrying plate 11 during the rotation process is configured to be greater than the power of the other heating wire units 131, 132..., 13y-1, 13y+1..., 13n. The implementation method may include:
[0142] Step S41', obtaining the serial number information of the heating wire unit 13y directly below the upturned end 11b of the carrier plate 11 in real time;
[0143] Step S42', configuring the detected power of the heating wire unit 13y to be the third power P3, and the powers of the other heating wire units 131, 132..., 13y-1, 13y+1..., 13n to be the second power P2, and the third power P3 is greater than the second power P2.
[0144] In the fifth embodiment, the numbering information of the first heating wire unit 131 may be, for example, 131; the numbering information of the second heating wire unit 132 may be, for example, 132...; the numbering information of the nth heating wire unit 13n may be, for example, 13n. In other words, the numbering information of each heating wire unit 131, 132..., 13n is absolutely determined.
[0145] In step S42 ′, each heating wire unit 131 , 132 . . . , 13n is at the third power P3 for a period of 1 / (n*rotation speed), and is at the second power P2 for the rest of the time period.
[0146] It can be seen that when the deposition process is performed according to the power control method of the fifth embodiment, the power of the n heating wire units 13y, 13y+1 . . . , 13y-1 changes in real time according to the real-time position of the upturned end 11b.
[0147] Furthermore, in some embodiments, step S41' also obtains in real time the fifth distance L5 between the upturned end 11b and the heating wire unit 13y directly below, and the second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; in step S42', the ratio between the third power P3 and the second power P2 is proportional to the ratio between the fifth distance L5 and the second distance L2.
[0148] Correspondingly, the fifth embodiment of the present invention also provides a bearing system. Fig.13 It is a schematic diagram of the cross-sectional structure of the load-bearing system.
[0149] Specifically, refer to Fig.13 As shown, the carrying system 5 also includes:
[0150] The detection module 16 is used to obtain the serial number information of the heating wire unit 13y directly below the upturned end 11b of the carrier plate 11 in real time;
[0151] The power control module 14 is used to control the power of the heating wire unit 13y detected by the detection module 16 to be the third power P3, and the power of other heating wire units 131, 132..., 13y-1, 13y+1..., 13n to be the second power P2, and the third power P3 is greater than the second power P2.
[0152] In some embodiments, the detection module 16 also obtains in real time the fifth distance L5 between the upturned end 11b and the heating wire unit 13y directly below, and the second distance L2 between the fixed point of the supporting plate 11 and the rotating shaft 12 and the heating wire 13 directly below the fixed point; the ratio between the third power P3 and the second power P2 in the power control module 14 is proportional to the ratio between the fifth distance L5 and the second distance L2.
[0153] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.
Claims
1. A bearing system, characterized in that: include: A carrier plate (11); A rotating shaft (12) is fixed to the carrying plate (11); the rotating shaft (12) and the carrying plate (11) rotate synchronously; A heating wire (13) is placed below the carrier plate (11); the heating wire (13) comprises n heating wire units (131, 132, ..., 13n) arranged in the circumferential direction of the carrier plate (11), n≥2, and each of the heating wire units (131, 132, ..., 13n) is independently temperature controlled; A power control module (14) is used to control the power of the heating wire unit (13x) directly below the sinking end (11a) of the carrier plate (11) during rotation to be smaller than the power of the other heating wire units (131, 132..., 13x-1, 13x+1..., 13n) and / or the power of the heating wire unit (13y) directly below the upturned end (11b) of the carrier plate (11) to be larger than the power of the other heating wire units (131, 132..., 13y-1, 13y+1..., 13n).
2. The carrying system according to claim 1, characterized in that: The angles of each of the heating wire units (131, 132, ..., 13n) in the circumferential direction of the carrier plate (11) are the same.
3. The carrying system according to claim 2, characterized in that: Also includes: A parameter acquisition module (15) is used to acquire the rotation speed and rotation direction of the carrier plate (11), and the number information of the initial heating wire unit (13p) directly below the sinking end (11a) of the carrier plate (11) when in the initial position; The power control module (14) is used to control the n heating wire units (13p, 13p+1..., 13p-1) arranged along the rotation direction of the carrier disk (11) according to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit (13p) obtained by the parameter acquisition module (15), so that the power changes from the first power to the second power after 1 / (n*rotation speed) time, and the first power is less than the second power.
4. The carrying system according to claim 3, characterized in that: The parameter acquisition module (15) also acquires a first distance (L1) between the sinking end (11a) and the initial heating wire unit (13p), and a second distance (L2) between the fixed point of the supporting plate (11) and the rotating shaft (12) and the heating wire (13) directly below the fixed point; the ratio between the first power and the second power is proportional to the ratio between the first distance (L1) and the second distance (L2).
5. The carrying system according to claim 2, characterized in that: Also includes: A parameter acquisition module (15) for acquiring the rotation speed and rotation direction of the carrier plate (11), and the number information of the initial heating wire unit (13q) directly below the upturned end (11b) of the carrier plate (11) when in the initial position; The power control module (14) is used to control the n heating wire units (13q, 13q+1..., 13q-1) arranged along the rotation direction of the carrier disk (11) according to the rotation speed, the rotation direction, and the number information of the initial heating wire unit (13q) obtained by the parameter acquisition module (15), so that the power changes from the third power to the second power after 1 / (n*rotation speed) time, and the third power is greater than the second power.
6. The carrying system according to claim 5, characterized in that: The parameter acquisition module (15) also acquires a third distance (L3) between the upturned end (11b) and the initial heating wire unit (13q), and a second distance (L2) between the fixed point of the carrier plate (11) and the rotating shaft (12) and the heating wire (13) directly below the fixed point; the ratio of the third power to the second power is proportional to the ratio of the third distance (L3) to the second distance (L2).
7. The carrying system according to claim 1, characterized in that: Also includes: A detection module (16) for acquiring in real time the serial number information of the heating wire unit (13x) directly below the sinking end (11a) of the carrier plate (11); The power control module (14) is used to control the power of the heating wire unit (13x) detected by the detection module (16) to be a first power, and the power of the other heating wire units (131, 132..., 13x-1, 13x+1..., 13n) to be a second power, and the first power is less than the second power.
8. The carrying system according to claim 1, characterized in that: Also includes: A detection module (16) for acquiring in real time the serial number information of the heating wire unit (13y) directly below the upturned end (11b) of the carrier plate (11); The power control module (14) is used to control the power of the heating wire unit (13y) detected by the detection module (16) to be a third power, and the power of the other heating wire units (131, 132..., 13y-1, 13y+1..., 13n) to be a second power, and the third power is greater than the second power.
9. A power control method for a load-bearing device, characterized in that: The carrying device comprises: A carrier plate (11); A rotating shaft (12) is fixed to the carrying plate (11); the rotating shaft (12) and the carrying plate (11) rotate synchronously; and a heating wire (13) disposed below the carrier plate (11); the heating wire (13) comprises n heating wire units (131, 132, ..., 13n) arranged in the circumferential direction of the carrier plate (11), n≥2, and each of the heating wire units (131, 132, ..., 13n) is independently temperature controlled; The power control method comprises: during the rotation process, the power of the heating wire unit (13x) directly below the sinking end (11a) of the carrier plate (11) is configured to be smaller than the power of the other heating wire units (131, 132..., 13x-1, 13x+1..., 13n) and / or the power of the heating wire unit (13y) directly below the upturned end (11b) of the carrier plate (11) is configured to be larger than the power of the other heating wire units (131, 132..., 13y-1, 13y+1..., 13n).
10. The power control method of the load-bearing device according to claim 9, characterized in that: The angles of the heating wire units (131, 132, ..., 13n) in the circumferential direction of the carrier plate (11) are the same; The method for implementing the configuration in which the power of the heating wire unit (13x) directly below the sinking end (11a) of the carrier plate (11) during rotation is configured to be smaller than the power of the other heating wire units (131, 132..., 13x-1, 13x+1..., 13n) comprises: Obtaining the rotation speed and rotation direction of the carrier plate (11), as well as the number information of the initial heating wire unit (13p) directly below the sinking end (11a) of the carrier plate (11) when the initial position is obtained; According to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit (13p), n heating wire units (13p, 13p+1..., 13p-1) are arranged along the rotation direction of the carrier disk (11), and the power changes from the first power to the second power after 1 / (n*rotation speed) time, and the first power is less than the second power.
11. The power control method of the load-bearing device according to claim 9, characterized in that: The angles of the heating wire units (131, 132, ..., 13n) in the circumferential direction of the carrier plate (11) are the same; The method for implementing the configuration in which the power of the heating wire unit (13y) directly below the upturned end (11b) of the carrier plate (11) during rotation is configured to be greater than the power of the other heating wire units (131, 132..., 13y-1, 13y+1..., 13n) comprises: Obtaining the rotation speed and rotation direction of the carrier plate (11), as well as the number information of the initial heating wire unit (13q) directly below the upturned end (11b) of the carrier plate (11) when the initial position is obtained; According to the rotation speed, the rotation direction, and the numbering information of the initial heating wire unit (13q), n heating wire units (13q, 13q+1..., 13q-1) are arranged along the rotation direction of the carrier disk (11), and the power changes from the third power to the second power after 1 / (n*rotation speed) time, and the third power is greater than the second power.
12. The power control method of the load-bearing device according to claim 9, characterized in that: The method for implementing the configuration in which the power of the heating wire unit (13x) directly below the sinking end (11a) of the carrier plate (11) during rotation is configured to be smaller than the power of the other heating wire units (131, 132..., 13x-1, 13x+1..., 13n) comprises: Real-time acquisition of serial number information of the heating wire unit (13x) directly below the sinking end (11a) of the carrier plate (11); The power of the heating wire unit (13x) detected is configured as a first power, and the power of the other heating wire units (131, 132..., 13x-1, 13x+1..., 13n) is a second power, and the first power is less than the second power.
13. The power control method of the load-bearing device according to claim 9, characterized in that: The method for implementing the configuration in which the power of the heating wire unit (13y) directly below the upturned end (11b) of the carrier plate (11) during rotation is configured to be greater than the power of the other heating wire units (131, 132..., 13y-1, 13y+1..., 13n) comprises: Real-time acquisition of the serial number information of the heating wire unit (13y) directly below the upturned end (11b) of the carrier plate (11); The power of the heating wire unit (13y) detected is configured as the third power, and the powers of the other heating wire units (131, 132..., 13y-1, 13y+1..., 13n) are the second power, and the third power is greater than the second power.