Roller arrangement for use in a coil coating process, coil coating apparatus and method for controlling the temperature of a coil in a coil coating process

Abstract

A roller arrangement (10) for guiding a web (12) in a web coating process under vacuum conditions, a web coating apparatus (14) comprising a vacuum chamber (16) including the roller arrangement (10), and a method for controlling the temperature of a web (12) in a web coating process under vacuum conditions. The roller device (10) comprises: a rotatable roller (100) having a web-facing surface (102), the web-facing surface comprising a first web-facing surface portion (104); a gas distribution system (400) for providing a gas flow (115) comprising a gas composition into a gap, indicated as a first gap (110), between the web (12) and the first web-facing surface portion (104), the gas composition comprising vapor of a gas and / or a liquid; and a temperature adjustment system (300) adapted to control the temperature of the first web-facing surface portion (104) so ​​that the gas composition cools in such a manner that the gas and / or the liquid changes its aggregation state, thereby forming a non-gaseous cushion (116) in the first gap (110).

Description

Technical Field

[0001] Embodiments of the present disclosure relate to a roller device for guiding a web, a web coating apparatus, and a method for controlling the temperature of a web. Embodiments of the present disclosure relate in particular to a roller device for guiding a web in a web coating process under vacuum conditions, a web coating apparatus including a vacuum chamber including the roller device, and a method for controlling the temperature of a web in a web coating process under vacuum conditions. Background Art

[0002] In an apparatus and method for coating a coil, the coil to be coated is guided by means of a coil coating apparatus. For example, the coil can be guided past one or more deposition sources in order to deposit one or more layers of deposition material on the coil. However, under process conditions of high coating temperatures, some areas of the coil can be overheated. Since in a vacuum environment, cooling of the coil by convection or radiation is greatly impaired, at high deposition rates the coil can be heated to impermissible temperature values ​​and thus be damaged or can even melt.

[0003] In order to overcome this situation, it is known to cool the rollers supporting the web, wherein a high heat transfer coefficient (HTC) should be used. However, this represents a considerable limitation to conventional coating operations.

[0004] Accordingly, it would be beneficial to improve the cooling mechanism of a drum arrangement for guiding a web in a web coating process under vacuum conditions while allowing improved working conditions, such as cleaning efficiency, while the web is subject to fewer restrictions regarding the materials used.

[0005] Terms and Definitions

[0006] The meanings of the terms used in the present disclosure are briefly explained here.

[0007] As referred to herein, a drum may be a device that is rotationally symmetrical about an axis of rotation. The drum may be cylindrical or concave cylindrical. The drum may also be a cone or a truncated cone. Typically, the drum may be rotatable about an axis of rotation. In some embodiments, the drum may include a stationary inner portion and a rotating outer portion, the rotating outer portion rotating about the inner stationary portion. Alternatively, the inner portion may rotate with the outer portion.

[0008] The terms axis and axial refer to the axis of rotation of a rotatable element, in particular a drum. The axial direction refers to the direction parallel to the axis of rotation. The axial extension of an element refers to the extension of the element along the axis of rotation. The term radial refers to the direction perpendicular to the axis of rotation.

[0009] The roll material used in the embodiments described herein can typically be considered as a flexible substrate, which is characterized in that the flexible substrate is bendable. The term "roll material" can be used synonymously with the term "strip" or the term "flexible substrate". For example, as described in the embodiments herein, the roll material can be a foil, a plastic film, or another flexible substrate.

[0010] The terms "inner zone" and "outer zone" refer to spaces that are complementary to each other. The term "outer zone" refers to a space that is further away from the rotation axis of the drum relative to the drum surface or the web than the space designated as "inner zone".

[0011] The term "deposition device" may be used synonymously herein as a "vapor deposition unit" or "evaporator unit" and may be understood as a device in a process for converting a source material into a gaseous form (i.e., vapor) of the source material. The source material may first be converted into a fluid form by a melting process and then into a gaseous form, or may be directly converted into a gaseous form.

[0012] The term "substantially" as used herein typically implies that there is a certain deviation from the property expressed by "substantially", for example at most 1%, at most 3%, or at most 10%. Summary of the invention

[0013] According to one aspect of the present disclosure, there is provided a roller apparatus for guiding a web in a web coating process under vacuum conditions. The roller apparatus comprises: a rotatable roller having a web-facing surface, the web-facing surface comprising a first web-facing surface portion; and a gas distribution system for providing a gas flow comprising a gas composition into a gap, denoted as a first gap, between the web and the first web-facing surface portion, the gas composition comprising a vapor of a gas, and / or a liquid. The roller apparatus further comprises a temperature adjustment system adapted to control the temperature of the first web-facing surface portion such that the gas composition cools in such a manner that the gas and / or liquid changes state of aggregation, thereby forming a non-gaseous cushion in the first gap.

[0014] According to another aspect of the present disclosure, a coil coating apparatus is provided, the coil coating apparatus comprising a vacuum chamber and a deposition device. The vacuum chamber comprises a roller device. The deposition device is adapted to perform chemical vapor deposition, physical vapor deposition (such as evaporation or sputtering), or plasma enhanced chemical vapor deposition.

[0015] According to another aspect of the present disclosure, a method of controlling the temperature of a web in a web coating process under vacuum conditions is provided. The method comprises a) moving the web over a rotatable drum having a web-facing surface, the web-facing surface comprising a first web-facing surface portion, b) providing a gas flow comprising a gas composition into a gap, denoted as a first gap, between the web and the first web-facing surface portion, the gas composition comprising a vapor of a gas and / or a liquid, and c) controlling the temperature of the gas composition in the first gap such that the gas composition cools in such a manner that the gas and / or liquid changes state of aggregation, thereby forming a non-gaseous cushion in the first gap.

[0016] According to another aspect of the present disclosure, a method for coating a web under vacuum conditions is provided. The method comprises: controlling the temperature of the web as described herein; and depositing a coating material on the web by chemical vapor deposition, physical vapor deposition (such as evaporation or sputtering), or plasma enhanced chemical vapor deposition.

[0017] According to another aspect of the present disclosure, a controller is provided, the controller comprising: a processor; and a memory storing instructions that, when executed by the processor, cause a coil coating apparatus to perform a method as described herein.

[0018] The roller arrangement, coating apparatus and method for controlling temperature provide an improved concept for guiding a coil in a coil coating process under vacuum conditions and allow efficient cooling of the coil during the coating process. The improved cooling efficiency does not compromise the cleaning efficiency of the roller nor the use of a variety of coil materials, including coils with large thickness and / or low temperature stability.

[0019] Further aspects, advantages and features of the present disclosure are apparent from the dependent claims, the description and the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order that the above-recited features of the present disclosure may be understood in detail, a more particular description of the present disclosure, briefly summarized above, may be obtained by reference to typical embodiments. The accompanying drawings relate to embodiments of the present disclosure and are described below:

[0021] Figure 1a , Figure 1b A schematic diagram showing a roller arrangement for guiding a web in a web coating process under vacuum conditions according to embodiments described herein;

[0022] Figure 1c shows a schematic diagram of a coil coating apparatus according to embodiments described herein;

[0023] Figure 2A schematic diagram showing a roller arrangement for guiding a web in a web coating process under vacuum conditions according to embodiments described herein;

[0024] Figure 3a A schematic diagram showing a method of controlling the temperature of a coil in a coil coating process under vacuum conditions according to an embodiment described herein; and

[0025] Figure 3b A schematic diagram showing a method of coating a web in a coating process under vacuum conditions according to embodiments described herein. DETAILED DESCRIPTION

[0026] Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the figures. In the following description of the figures, the same reference numerals refer to the same parts. Generally speaking, only the differences relative to individual embodiments are described. Each example is provided in an illustrative manner and is not intended to be a limitation of the present disclosure. Features illustrated or described as part of an embodiment may be used on other embodiments or in combination with other embodiments to produce yet another embodiment. The specification is intended to include such modifications and variations.

[0027] Figure 1a , Figure 1b A schematic diagram showing an exemplary embodiment of a roller arrangement for guiding a web in a web coating process under vacuum conditions. Figure 1c A schematic diagram showing an exemplary embodiment of a coil coating apparatus. Figure 1a , Figure 1b , Figure 1c The details of the explanation should not be construed as limiting Figure 1a , Figure 1b , Figure 1c Rather, these details may also be combined with further embodiments that are illustratively explained with reference to other figures.

[0028] Figure 1a The focus is on the geometric structure of the drum device 10 which is not related to the deposition process. Figure 1b and Figure 1c The drum arrangement 10 is shown during operation, ie during a deposition process.

[0029] Figure 1a , Figure 1b and Figure 1cThe drum device 10 shown in the figure may include a rotatable drum 100 having a web-facing surface 102, the web-facing surface 102 including a first web-facing surface portion 104. The drum 100 as mentioned herein may be a rotationally symmetric device about a rotation axis 114. The drum 100 may be cylindrical or concave cylindrical. The drum 100 may also be a cone or a frustum of a cone. Typically, the drum 100 is rotatable around the rotation axis 114. In some embodiments, the drum 100 may include a stationary inner portion 112 and a rotating outer portion, the rotating outer portion rotating around the inner stationary portion 112. Alternatively, the inner portion may rotate with the outer portion.

[0030] The web-facing surface or area 102 can be considered as the portion or area of ​​the drum surface that faces and / or guides the web 12. From the perspective of an observer along the rotation axis 114 of the drum 100, the web-facing surface 102 can be viewed as having an angular opening 106 (see FIG. 1 ) surrounding the web-facing surface 102. Figure 1a This means that the web-facing surface 102 may extend along the corner opening 106 .

[0031] The drum apparatus 10 as described herein may also include a gas distribution system 400 for providing a gas flow 115 including a gas composition into the gap between the web 12 and the first web facing surface portion 104. The gap is indicated as first gap 110. The gas composition includes vapor of a gas and / or a liquid.

[0032] First web-facing surface portion or area 104 may be considered as a portion or area of ​​web-facing surface 102 of the drum, wherein first web-facing surface portion 104 and the facing area of ​​web 12 define or form a receiving volume or first gap 110 that receives airflow 115. From the perspective of an observer along the rotation axis 114 of drum 100, first web-facing surface portion 104 is observed to have an angular opening 108 (see FIG. 1 ) surrounding first web-facing surface portion 104. Figure 1a ).

[0033] The angular extension of the first web facing surface portion 104 is preferably smaller than the angular extension of the web facing surface 102 .

[0034] The axial extension of the web facing surface 102 and the first web facing surface portion 104 are substantially the same. In the axial direction, the web facing surface 102 may extend along a span that i) encompasses the width of the web 12 and / or ii) is shorter than or at most the same length as the axial extension of the drum 100.

[0035] In the rotation direction 113 of the drum 100, the first web-facing surface portion 104 is followed by a region of the drum surface referred to as the second web-facing surface portion 105. From the perspective of an observer along the rotation axis 114 of the drum 100, the second web-facing surface is seen to have an angular opening 109 surrounding the second web-facing surface (see FIG. Figure 1a ). This means that the second web-facing surface can extend along said corner opening 109. The gap between the web 12 and the second web-facing surface portion 105 is indicated as a second gap 111. Advantageously, the non-gaseous cushion 116 is transformed into a gas cushion 118 within the second gap 111, which is designed to cool the web 12 when heat is applied from outside the drum 100.

[0036] The drum device 10 as described herein may also include a temperature adjustment system 300 adapted for controlling the temperature of the first web-facing surface portion 104 so that the gas composition cools in a manner that the gas and / or liquid changes state of aggregation within the first void 110, thereby forming a non-gaseous cushion or medium 116 in the first void 110. In particular, the temperature adjustment system may be configured to cool at least a portion of the drum, in particular the first web-facing surface portion.

[0037] The non-gaseous cushion 116 within the first void 110 may be a solid or fluid cushion. The non-gaseous cushion 116 may extend up to the corner edges and / or axial edges of the first web-facing surface portion 104.

[0038] The liquid or solid pad 116 allows the cooling medium to be transported to the void adjacent to the deposition area 120 (i.e., the process area) without escaping during transport. In contrast, by using a gas pad, the gas is only temporarily trapped. However, the gas converted to a liquid or solid state cannot escape and can be efficiently transported to the process area, where it can be turned back into a gaseous state due to the high temperature and can provide a high heat transfer coefficient in the process area.

[0039] Figure 1c The web coating apparatus 14 shown in FIG. 1 may include a vacuum chamber 16 including the drum apparatus 10 and a deposition device 18. The deposition device 18 may be adapted for performing chemical vapor deposition, physical vapor deposition (such as evaporation or sputtering), or plasma enhanced chemical vapor deposition.

[0040] The deposition device 18 can vaporize the source material, and the generated vapor 20 can be transferred to the web 12. After passing through the shield 510 or the window formed by the shield 510, the vapor 20 can be deposited on the web 12. In particular, in the area where the material depositing the vapor 20 is deposited on the web 12, a large amount of heat is applied to the web 12. Therefore, it is necessary to ensure effective cooling of the web 12 in the deposition area 120. This is achieved by the gas cushion 118 in the second gap 111 below the deposition area 120 of the web 12, so that the gas cushion 118 acts as a cooling cushion.

[0041] Deposition device 18 may transfer material to be deposited onto web 12 in a deposition region 120 of web 12 adjacent second gap 111. As a result of heating associated with the deposition process, non-gaseous cushion 116 within first gap 110 transforms into gaseous cushion 118 within second gap 111.

[0042] Roller arrangements in which a gas cushion is formed in the gap between the web and the roller often suffer from the problem that the gas does not remain in the gap but dissipates from it. The amount of gas remaining in the gap is insufficient and can no longer produce a sufficient cooling effect on the web. As a result, the web can be damaged when heat is applied during the coating of the web. In addition, the roller can also become contaminated, which is particularly bad if the roller has openings or pores that can become blocked.

[0043] The described obstacles are overcome by the concept of the present roller device 10, wherein a non-gaseous cushion 116 is built into the first interspace 110. The material of the non-gaseous cushion 116 inside the first interspace 110 either does not escape from the first interspace 110 at all or at least escapes to a much lesser extent. This results in a sufficient amount of gas remaining in the second interspace 111, thereby allowing the gas cushion 118 within the second interspace 111 to provide improved cooling of the deposition area 120 of the web 12 onto which the material is deposited during the deposition process.

[0044] Improved cooling enables the use of a wide range of coil materials, including materials with low thermal stability and / or coil materials that are temperature sensitive. Advantageously, due to improved cooling, neither the HTC, the coil nor the thickness of the deposited layer play a limiting role in the selection of parameters for the coated coil. In this way, thick layers can also be deposited on the coil 12, for example 1 μm, which are known to be 20 times thicker than the classic layers used for encapsulation with aluminum or copper.

[0045] Through the present concept, the possibility of damage to the web 12 due to insufficient cooling is greatly reduced, which also enables easy and efficient cleaning of the drum 100.

[0046] According to an embodiment, which can be combined with any other embodiment described herein, the temperature adjustment system 300 can be adapted for changing the state of aggregation of a liquid into a solid state in the first void 110 by freezing. Additionally or alternatively, the temperature adjustment system 300 can be adapted for changing the state of aggregation of a gas into a solid state in the first void 110, in particular by deposition. Additionally or alternatively, the temperature adjustment system 300 can be adapted for changing the state of aggregation of a gas into a liquid state in the first void 110. When changing the state of aggregation of a liquid or gas into a solid state, a solid pad 116 can be generated in the first void 110. When changing the state of aggregation of a gas into a liquid state, a liquid pad 116 can be generated in the first void 110. A solid pad exhibits less dissipation than a liquid pad, and a liquid pad exhibits less dissipation than a gaseous pad.

[0047] According to an embodiment, which can be combined with any other embodiment described herein, no continuous layer or mat is formed in the first interspace 110. Instead, the frozen vapor can fill the pores of the web 12 and / or the surface of the drum 100. Thus, the gas composition can be trapped as frozen vapor and cannot escape as in known devices. Once the frozen vapor has melted, in the area following the second interspace 111 in the direction of rotation 113, the gas composition can escape and can be subsequently extracted.

[0048] In this document, the term "mat" includes a gas composition that: i) forms as a layer of frozen vapor or gas between the drum surface 104 and the web 12, and / or ii) is deposited or trapped as frozen vapor or gas in the pores of the web 12 and / or the drum surface 104.

[0049] The amount of material remaining in the solid cushion 116 within the first gap 110 is sufficiently large to allow for a sufficient amount of material in the gas cushion 118 within the second gap 111 to effectively cool the web 12 in areas that experience heating associated with the deposition process.

[0050] According to an embodiment, which can be combined with any other embodiment described herein, the temperature adjustment system 300 can be adapted for controlling the temperature of the gas flow 115 entering the first void 110. Control in the sense of heating the gas flow 115 can result in that the gas can be injected at high pressure without any state transition occurring before the gas enters the first void 110. Control in the sense of cooling the injected gas flow 115 can result in lower cooling requirements to achieve a solid gas cushion 116 within the first void 110.

[0051] According to an embodiment, which can be combined with any other embodiment described herein, the temperature adjustment system 300 may include a temperature sensing unit 302 adapted to measure the gas composition and / or the temperature of the first web-facing surface portion 104. The sensing unit may be, for example, an IR sensor located in the inner area of ​​the drum 100.

[0052] According to an embodiment, which can be combined with any other embodiment described herein, the temperature adjustment system may include a temperature adjustment unit 304 adapted to adjust the temperature of the gas composition and / or the first web-facing surface portion 104. The temperature adjustment unit 304 may be based on liquid cooling, the drum 100 being provided with an array of passages around the periphery of the drum.

[0053] According to an embodiment that can be combined with any other embodiment described herein, the temperature adjustment system 300 can include a controller 301 that can be connected to or connected to a temperature sensing unit 302 and / or a temperature adjustment unit 304. The controller 301 can be adapted to control the temperature of the gas composition within a predetermined temperature range. Compared to direct temperature actuation, the present control system can work more efficiently and save energy.

[0054] The controller may also be configured to control a method for coating a coil as described herein. The controller 301 may include a central processing unit (CPU), a memory, and, for example, a support circuit. In order to facilitate control of the temperature adjustment system, the CPU may be one of any form of general-purpose computer processors that can be used in an industrial environment to control various chambers and subprocessors. The memory is coupled to the CPU. The memory or computer-readable medium may be one or more readily available memory devices, such as random access memory, read-only memory, USB stick, hard disk, or any other form of digital storage device locally or remotely. The support circuit may be coupled to the CPU to support the processor in a conventional manner. These circuits include cache, power supply, clock circuit, input / output circuit system, and related subsystems and the like. The software routine may also be stored and / or executed by a second CPU (not shown) located remotely from the hardware controlled by the CPU. The software routine, when executed by the CPU, transforms a general-purpose computer into a dedicated computer (controller) that controls temperature adjustment. Although the method and / or process of the present disclosure is discussed as being implemented as a software routine, some of the method actions disclosed therein may be executed in hardware and by a software controller. As such, the present invention may be implemented in software such as executed on a computer system, and in hardware implemented as an application specific integrated circuit or other type of hardware, or in a combination of software and hardware.

[0055] According to an embodiment that can be combined with any other embodiment described herein, the liquid may comprise at least one of the group consisting of:

[0056] -water;

[0057] - Liquefied gas;

[0058] -glycerin;

[0059] -alkanes;

[0060] - ketones such as acetone, alcohols such as isopropanol;

[0061] - polyols such as ethylene glycol, diethylene glycol, propylene glycol, glycerol,;

[0062] - Lower oligomers of glycerol, such as diglycerol or triglycerol.

[0063] In particular, water and / or glycerol change rapidly from the gas phase to the solid phase when they hit the coating roller at a given temperature and pressure and are therefore very suitable.

[0064] According to an embodiment, which may be combined with any other embodiment described herein, the gas may include at least one of the group consisting of:

[0065] - alkanes, such as methane, ethylene, butane, propane;

[0066] -oxygen;

[0067] -carbon dioxide;

[0068] - Nitrogen or air;

[0069] Especially gases with high momentum transfer (when masses are equal) are very suitable.

[0070] According to an embodiment, which can be combined with any other embodiment described herein, the drum device 10 can include a shield 510 positioned near the web 12 in an outer region of the web 12. At least one shield can be located on each side of the second web-facing surface portion 105 to define a window responsible for passing the coating material to the web section opposite the second web-facing surface portion 105. The shield 510 allows a desired and precisely defined amount of deposition material to be deposited onto the web 12 through the window, which is beneficial for ensuring a desired and / or constant thickness of the layer deposited on the web 12. In addition, the shield 510 prevents the web 12 from being heated outside the section opposite the second web-facing surface portion 105, which ensures that the gas cushion 118 in the second gap 111 contains a constant amount of gas over time, thereby preventing fluctuations in the cooling effect.

[0071] According to embodiments that may be combined with any other embodiments described herein, the gas distribution system 400 may include at least one nozzle 404 to 408 for providing a directed and / or metered supply of a gas flow 115 into the first gap 110. As referred to herein, a "nozzle" may be understood as a device for directing a gas, in particular for controlling the direction or characteristics of the gas (such as the flow rate, velocity, shape and / or pressure of the gas discharged from the nozzle). The nozzle may have an inlet for receiving the gas, a passage or channel for directing the gas through the nozzle, and an outlet for releasing the gas. According to embodiments described herein, the channel of the nozzle may include a defined geometry for achieving the direction or characteristics of the gas flowing through the nozzle. According to some embodiments, the nozzle may be part of a distribution component, such as a distribution conduit or one or more point sources. Additionally or alternatively, a nozzle as described herein may be connectable to or connected to a distribution component that provides the gas and may receive the gas from the distribution component.

[0072] According to an embodiment that may be combined with any other embodiment described herein, at least one nozzle (hereinafter indicated as t-nozzle 404) may be adapted to provide an airflow 115 into the first gap 110 tangentially or substantially tangentially relative to the drum 100 (i.e., relative to the drum surface).

[0073] According to one embodiment, the t-nozzle 404 may have a linear slot-shaped outlet adapted to inject the gas flow 115 into a feed zone or gap that opens into the first gap 110 and extends over at least a portion of the width of the web 12, preferably over the entire width of the web 12. At the entrance to the first gap 110, the feed zone is formed when the web 12 is rolled onto the drum 100. The nozzles as described herein, and in particular the t-nozzle 404, may be air blades configured to provide a homogenous gas jet entering the edge of the infeed. The air blade may extend approximately over the entire first web-facing portion.

[0074] According to another embodiment, the t-nozzle 404 may have multiple circular outlets arranged linearly side by side to provide a uniform or substantially uniform gas jet into the feed zone.

[0075] The t-nozzle 404 may be positioned at the beginning of the first gap 110 relative to the rotation direction 113 of the drum 100 .

[0076] A linear arrangement of linear slotted outlets or circular outlets may be arranged parallel to the feed zone and located at a short distance from the feed zone.The two t-nozzle embodiments described above may be implemented individually or in combination with each other.

[0077] Figure 2A schematic diagram of a roller arrangement 10 for guiding a web 12 in a web coating process under vacuum conditions is shown. Figure 2 The details of the explanation should not be construed as limiting Figure 2 Rather, these details may also be combined with further embodiments that are illustratively explained with reference to other figures.

[0078] According to an embodiment described herein, the gas distribution system 400 may include at least one nozzle (hereinafter referred to as r-nozzle 406, 408), the outlet of which is arranged in the drum surface and is adapted to provide a gas flow 115 into the first gap 110 radially or substantially radially relative to the drum 100 or the drum surface. Figure 2 The embodiment focuses on the design and function of the nozzle in the drum device 10 to replace Figure 1b and Figure 1c However, reference has been made to the Figure 1a to Figure 1c The characteristics of the explanation (even if not mentioned in the text for the sake of clarity) Figure 2 All details are shown in Figure 2 Combinations of features explained.

[0079] The r-nozzles 406, 408 may be adapted to release gas from the gas distribution system 400 in a direction substantially perpendicular to the drum surface at the location where the respective r-nozzles 406, 408 are located. Figure 2 In the example shown in , the r-nozzles 406, 408 are distributed over the surface of the drum 100. In particular, the r-nozzles 406, 408 are distributed over the surface of the drum 100 in a regular manner.

[0080] The feature of "arranged in a regular manner" may imply that the distance between a first r nozzle and at least one neighboring r nozzle of the first r nozzle is substantially equal to the distance between a second r nozzle and at least one neighboring r nozzle of the second r nozzle. In some embodiments, the feature of "arranged in a regular manner" may refer to a surface in which a specific pattern may be assigned to a portion of a plurality of r nozzles and the same pattern may be assigned to another portion of a plurality of r nozzles. In some embodiments, the r nozzles may be arranged on the circumference of the drum 100 in an irregular manner.

[0081] According to embodiments that may be combined with any other embodiments described herein, any nozzle outlet may be selected from the group consisting of: an opening, a hole, a slit, a blast tube, a jet valve, a duct opening, an orifice, a jet, an outlet provided by a porous material, and the like. According to some embodiments, the nozzle outlet referred to herein may have any suitable shape, such as substantially circular, circular, elliptical, triangular, rectangular, square, polygonal, irregular shape, such as irregular circular, irregular angled shape, shapes where the gas outlets are different from each other, or the like. According to some embodiments, the nozzle outlet does not protrude from the drum surface.

[0082] According to an embodiment, which can be combined with any other embodiment described herein, a gas source 402 can be provided. The gas source 402 can be part of the distribution system 400, such as Figure 2 As shown in, or according to Figure 1c 1. Part of a coil coating apparatus 14, wherein the gas source is not shown.

[0083] According to an embodiment that can be combined with any other embodiment described herein, the R nozzles may include a first subset of R nozzles 406 and a second subset of R nozzles 408, wherein the first subset of R nozzles 406 is composed of at least one R nozzle whose outlet is located in the first web-facing surface portion 104, and the second subset of R nozzles 408 is composed of at least one R nozzle whose outlet is outside the first web-facing surface portion 104.

[0084] According to embodiments, which can be combined with any other embodiments described herein, the gas distribution system 400 can be configured to provide the gas flow 115 to the first subset of r-nozzles 406 and prevent gas flow to the second subset of r-nozzles 408 .

[0085] The gas distribution system 400 may allow selectively providing the gas flow 115 to a first subset of r-nozzles 406. The r-nozzles 406 (temporarily) located in the first web facing surface portion 104 belong to the first subset of r-nozzles 406.

[0086] During operation, the membership of any single r nozzle for the first subgroup or the second subgroup can change. In other words, the r nozzle that is opened can be closed later, and vice versa. In some embodiments, the membership of the gas outlet for the first subgroup and / or the second subgroup changes during operation according to the rotational position of the drum surface. The first web-facing surface portion 104 can be maintained at a fixed position in space, and the gas r nozzle that enters the first web-facing surface portion 104 due to the rotation of the drum surface is opened (or connected to the gas source 402), that is, the membership is changed to the first subgroup. The r nozzle that leaves the first web-facing surface portion 104 due to the rotation of the drum surface is closed (or disconnected from the gas source 402), that is, the membership is changed to the second subgroup.

[0087] The gas distribution system 400 of the drum 100 according to some embodiments described herein may be adapted to selectively provide and block airflow in defined nozzles through the size, location, shape, and configuration of the gas distribution system 400, and the dynamic properties. Figure 2 In the example of the present invention, the gas distribution system 400 may include a gas source 402, which is arranged in or presents the fixed part 112 of the drum 100. The gas source 402 may have a size that surrounds a certain segment of the circumference of the stationary part 112 of the drum 100. The drum surface may rotate about the rotation axis 114 of the drum 100, and in particular about the fixed part 112 of the drum 100 (including, for example, the gas source 402).

[0088] According to some embodiments described herein, the gas passages of the r-nozzles from the gas source 402 to the r-nozzles 406 of the first subset when the corresponding r-nozzles are located in the first web-facing surface portion 104 may be conductive. The gas passages from the gas source 402 to the r-nozzles of the second subset when the corresponding r-nozzles are outside the first web-facing surface portion 104 may be non-conductive. The gas distribution system 400 with the gas source 402 and the gas passages may be described as partially rotating (e.g., the gas passages) and partially stationary (e.g., the gas source 402). As the gas passages rotate around the gas source 402, the gas distribution system 400 allows the gas passages to be selectively connected to the gas source 402 and disconnected from the gas source 402.

[0089] According to some embodiments, the gas distribution system 400 (and in particular the gas source 402) provides the gas flow 115 (eg, Figure 2). In some embodiments, the gas flow 115 provided to the r-nozzle 406 by the gas distribution system 400 is a gas flow 115 that still allows the web 12 to contact (at least point-like contact) with the drum surface. For example, the gas flow 115 may typically be between about 10 sccm and about 400 sccm, more typically between about 20 sccm and about 300 sccm, and even more typically between about 30 sccm and about 150 sccm.

[0090] The gas distribution system 400 according to the embodiments described herein may be adapted to provide a gas distribution system having a typical flow rate of about 10 sccm / m 2 About 200 sccm / m 2 between 20 sccm / m and more typically between 20 sccm / m 2 About 150sccm / m 2 and even more typically about 30 sccm / m 2 About 120sccm / m 2 In one example, the gas distribution system 400 may be adapted to provide a gas flow rate per roller surface area, which may typically be about 100 sccm / m 2 .

[0091] According to some embodiments, which may be combined with other embodiments described herein, the gas distribution system 400 may be adapted to provide a defined gas flow rate via one or more parameters, such as the number or size of nozzles, the fluid conductance of the gas distribution system 400, the size or capacity of the gas source 402, the size and power of the pumping system for the gas, the size and design of the gas passages, and / or the like.

[0092] According to some embodiments that can be combined with other embodiments described herein, the number of nozzles can typically be between 20 and 100, more typically between 30 and 100, and even more typically between 40 and 100, especially for a drum device 10 having an air channel (such as Figure 2 According to some embodiments, the drum surface can be divided into gas sections. In some embodiments, each gas section has a number of r nozzles. In some embodiments, the number of r nozzles in the first web-facing surface portion 104 can be between 5 and 20.

[0093] According to some embodiments that can be combined with other embodiments described herein, the r nozzle may have a cross-sectional size typically between about 0.01 mm and about 1 mm. The cross-sectional size can be measured as the minimum cross-sectional area of ​​the r nozzle at the drum surface. In some embodiments, the fluid flow conductance of the r nozzle may typically be between about 0.001 liters / second and about 0.1 liters / second, more typically between about 0.005 liters / second and about 0.08 liters / second, and even more typically between about 0.009 liters / second and about 0.05 liters / second. In one embodiment, the fluid flow conductance of the r nozzle may be about 0.01 liters / second.

[0094] According to some embodiments, which can be combined with other embodiments described herein, the drum device 10 can include a drive unit 512 for rotating the drum 100 and / or a smaller deflection drum 508. The drum 100 can guide the web 12 in cooperation with the deflection drum 508, wherein the deflection drum ensures sufficient web 12 tension and improved guiding behavior.

[0095] Figure 3a A schematic diagram showing a method for controlling the temperature of a web 12 in a web coating process under vacuum conditions. Figure 3a The details of the explanation should not be construed as limiting Figure 3a Rather, these details may also be combined with further embodiments that are illustratively explained with reference to other figures.

[0096] The method 700 for controlling the temperature of a web 12 during a web coating process under vacuum conditions may include:

[0097] - moving 702 the web 12 on a rotatable drum 100 having a web-facing surface 102 including a first web-facing surface portion 104;

[0098] - providing 704 a gas flow 115 comprising a gas composition comprising a vapor of a gas, and / or a liquid, into a gap, denoted as first gap 110, between the web 12 and the first web facing surface portion 104; and

[0099] - controlling 706 the temperature of the gas composition in the first interspace 110 so that the gas composition cools in such a way that the gas and / or liquid changes state of aggregation, thereby forming a non-gaseous cushion 116 in the first interspace 110.

[0100] Figure 3b A schematic diagram showing a method for coating a web 12 in a coating process under vacuum conditions. Figure 3b The details of the explanation should not be construed as limiting Figure 3bRather, these details may also be combined with further embodiments that are illustratively explained with reference to other figures.

[0101] The method 720 for coating the web 12 in a coating process under vacuum conditions may include:

[0102] - controlling 722 the temperature of the web 12 according to the method of any of the two preceding claims; and

[0103] - Depositing 724 a coating material on the web 12 by chemical vapor deposition, physical vapor deposition (such as evaporation or sputtering), or plasma enhanced chemical vapor deposition.

[0104] This written description uses examples to disclose the present disclosure, including the best mode, and also enables any person skilled in the art to practice the described subject matter, including making and using any device or system, and performing any combined method. The embodiments described herein provide an improved cooling mechanism for a roller device for guiding a coil in a coil coating process under vacuum conditions while allowing improved working conditions (such as cleaning efficiency), and the coil is subject to fewer restrictions on the materials used. Although various specific embodiments have been disclosed in the foregoing, the mutually non-exclusive features of the embodiments described above can be combined with each other. The patentable scope is defined by the claims, and it is expected that other examples are within the scope of the claims, as long as these examples have structural elements that are not different from the literal language of the claims, or as long as these examples include equivalent structural elements that are not substantially different from the literal language of the claims.

Claims

1. A roller device (10) for guiding a web (12) in a web coating process under vacuum conditions, comprising: - a rotatable drum (100) having a web-facing surface (102) comprising a first web-facing surface portion (104); a gas distribution system (400) for providing a gas flow (115) comprising a gas composition comprising a gas and / or a vapor of a liquid into a gap, denoted as a first gap (110), between the web (12) and the first web-facing surface portion (104); and - a temperature regulation system (300) adapted for controlling the temperature of the first web-facing surface portion (104) so ​​that the gas composition cools in such a way that the gas and / or the liquid changes state of aggregation, thereby forming a non-gaseous cushion (116) in the first void (110).

2. The drum device (10) according to claim 1, wherein The temperature adjustment system (300) is adapted to perform one or more of the following in the first gap (110): i) changing the aggregate state of the liquid into a solid state by freezing; ii) changing said aggregate state of said gas into a solid state; and iii) changing said aggregate state of said gas into a liquid state.

3. The drum device (10) according to claim 2, wherein the non-gaseous cushion is formed as a solid cushion (116).

4. The drum device (10) according to claim 2, wherein the non-gaseous cushion is formed as a fluid cushion.

5. The drum device (10) according to claim 1, wherein the temperature adjustment system (300) comprises one or more of the following: a temperature sensing unit (302) adapted to measure the temperature of the gas composition and / or the first web-facing surface portion (104); a temperature adjustment unit (304) adapted to adjust the temperature of the gas composition and / or the first web-facing surface portion (104); and A controller (300) is connectable to or connected to the temperature sensing unit (302) and / or the temperature adjustment unit (304), the controller (300) being adapted to control the temperature of the gas composition within a predetermined temperature range.

6. The drum device (10) according to claim 1, wherein the liquid comprises at least one of the group consisting of: -water; - Liquefied gas; -alkanes; - ketones, alcohols; - Lower oligomers of glycerol.

7. The drum device (10) according to claim 6, wherein the ketone is acetone.

8. The drum device (10) according to claim 6, wherein the alcohol is a polyol.

9. The drum device (10) according to claim 6, wherein the lower oligomer of glycerol is diglycerol or triglycerol.

10. The drum device (10) according to claim 8, wherein the polyol is isopropyl alcohol, ethylene glycol, diethylene glycol, propylene glycol or glycerol.

11. The drum device (10) according to claim 1, wherein the gas comprises at least one of the group consisting of: -alkanes; -oxygen; -carbon dioxide; - Nitrogen or air.

12. The drum device (10) according to claim 11, wherein the alkane is methane, ethylene, butane or propane.

13. The drum device (10) according to claim 1, wherein The drum (100) comprises a second web-facing surface portion (105) following the first web-facing surface portion (104) in the rotation direction (113) of the drum (100), a gap indicated as a second gap (111) between the web (12) and the second web-facing surface portion (105), wherein the cushion within the second gap (111) is a gas cushion (118) designed to cool the web (12) when heat is applied from outside the drum (100).

14. The drum device (10) according to claim 1, wherein The roller device (10) comprises shields (510) positioned close to the web (12) in an outer area of ​​the web (12), at least one shield being located on each side of the second web-facing surface portion (105) to define a window responsible for allowing vapor (20) including coating material to pass to a web section opposite the second web surface portion (105).

15. The drum device (10) according to claim 1, wherein The gas distribution system (400) includes at least one nozzle, denoted as a t-nozzle (404), adapted for providing a directed and / or metered supply of a gas flow (115) into the first gap (110) tangentially relative to the drum surface.

16. The drum device (10) according to claim 1, wherein The gas distribution system (400) comprises at least one nozzle, indicated as t-nozzle (404), which is positioned at the beginning of the first gap (110) relative to the rotation direction (113) of the drum (100).

17. The drum device (10) according to claim 1, wherein The drum device (10) comprises a driving unit for rotating the drum (100).

18. The drum device (10) according to claim 15 or 16, wherein The gas distribution system (400) includes one or more tangential gas channels, each tangential gas channel being in fluid communication with one of the t-nozzles (404).

19. A web coating apparatus (14), comprising: a vacuum chamber (16), the vacuum chamber comprising a roller device (10) according to claim 1; and a deposition apparatus (18), the deposition apparatus being adapted for performing chemical vapor deposition, physical vapor deposition, or plasma enhanced chemical vapor deposition.

20. The coil coating apparatus (14) of claim 19, wherein The roller (100) includes a second web-facing surface portion (105) following the first web-facing surface portion (104) in the rotation direction (113) of the roller (100), wherein a gap between the web (12) and the second web-facing surface portion (105) is indicated as a second gap (111), and wherein the non-gaseous cushion within the second gap (111) is designed to be converted into a gas cushion (118) during a deposition process in which heat is applied to the web (12).

21. The coil coating apparatus (14) according to claim 19 or 20, wherein the physical vapor deposition is evaporation or sputtering.

22. A method for controlling the temperature of a web (12) in a web coating process under vacuum conditions, comprising: - moving the web (12) over a rotatable drum (100) having a web-facing surface (102), the web-facing surface comprising a first web-facing surface portion (104); - providing a gas flow (115) comprising a gas composition containing a gas, and / or a vapor of a liquid, into a gap, denoted as a first gap (110), between said web (12) and said first web-facing surface portion (104); and - controlling the temperature of the gas composition in the first interspace (110) so that the gas composition cools in such a way that the gas and / or the liquid changes state of aggregation, thereby forming a non-gaseous cushion (116) in the first interspace (110).

23. The method for controlling the temperature of a web (12) in a web coating process under vacuum conditions according to claim 22, comprising at least one of the following: i) changing the state of aggregation of the liquid into a solid state by freezing and / or ii) changing the state of aggregation of the gas into a solid state by precipitation; Controlling the temperature of the first web-facing surface portion (104) is performed by controlling the temperature of the roller (100) or a lower roller portion; rotating the drum (100) by a drive unit, wherein the web-facing surface (102) includes a web-guiding area outside the first web-facing portion (104), such that rotating the web-guiding area causes moving the web (12); forming the non-gaseous pad into a solid pad (116); converting the non-gaseous cushion within the second gap (111) into a gaseous cushion (118) during a deposition process applying heat to the web (12), wherein the roller (100) comprises a second web-facing surface portion (105), wherein a gap between the web (12) and the second web-facing surface portion (105) is denoted as the second gap (111), and wherein the second gap (111) follows the first gap (110) in a rotational direction (113) of the roller (100); The web (12) is cooled by means of the gas cushion (118) during a deposition process in which heat is applied to the web (12).

24. A method for coating a web (12) in a coating process under vacuum conditions, the method comprising: - controlling the temperature of the coil (12) according to the method of claim 22; and - depositing a coating material on the web (12) by chemical vapor deposition, physical vapor deposition, or plasma enhanced chemical vapor deposition.

25. The method of claim 24, wherein the physical vapor deposition is evaporation or sputtering.

26. A controller comprising: a processor; and a memory storing instructions which, when executed by the processor, cause a coil coating apparatus to perform a method for controlling the temperature of a coil (12) in a coil coating process under vacuum conditions as claimed in claim 22 or 23.

27. A controller comprising: a processor; and a memory storing instructions which, when executed by the processor, cause a web coating apparatus to perform the method for coating a web (12) in a coating process under vacuum conditions as claimed in claim 24.

Images