Multi-axis magnetic field sensor

Abstract

The present application provides a multi-axis magnetic field sensor, which includes: a first magnetic conductor in a first direction, a second magnetic conductor located in the same plane as the first magnetic conductor, a first magnetic induction unit whose projection on the plane is located in the first air gap area, and a second magnetic induction unit whose projection on the plane is located in the second air gap area. The second magnetic conductor includes: a magnetic field input area in the second direction located at both ends of the second magnetic conductor and a magnetic field conversion area located between the two ends of the second magnetic conductor, and the magnetic field conversion area includes a conversion magnetic circuit in the first direction. The multi-axis magnetic field sensor can measure the magnetic induction intensity in the first direction and the second direction by using the first magnetic induction unit and the second magnetic induction unit with the same magnetic induction sensitivity direction, without rotating the magnetic induction unit, so that the packaging process is simpler.

Description

Technical Field

[0001] The present application relates to the field of magnetic induction technology, and in particular to a multi-axis magnetic field sensor. Background Art

[0002] Magnetic sensors are devices that detect corresponding physical quantities by converting changes in the magnetic properties of sensitive components caused by external factors such as magnetic fields, currents, stress strains, temperature, and light into electrical signals. They are widely used in modern industry and electronic products to measure physical parameters such as current, position, and direction by sensing changes in magnetic field strength.

[0003] Most of the existing multi-axis magnetic field sensors are obtained by chip packaging. Specifically, taking a two-axis magnetic compass chip as an example, it is obtained by rotating a magnetic sensing unit with an X-axis magnetic sensitive direction by 90° to obtain a magnetic sensing unit with a Y-axis magnetic sensitive direction, and then packaging the magnetic sensing unit with an X-axis magnetic sensitive direction and the obtained magnetic sensing unit with a Y-axis magnetic sensitive direction together. The existing multi-axis magnetic field sensors are prone to angle deviation during the packaging process, and have high requirements for the packaging process. Summary of the invention

[0004] In view of this, an object of the embodiments of the present application is to provide a multi-axis magnetic field sensor to solve the technical problem that the existing multi-axis magnetic field sensor is prone to angle deviation during the packaging process and has high requirements for the packaging process.

[0005] Specifically, an embodiment of the present application provides a multi-axis magnetic field sensor, the multi-axis magnetic field sensor comprising: a first magnetic conductor in a first direction, the first magnetic conductor having a first air gap in a second direction; wherein the first direction and the second direction are perpendicular to each other;

[0006] A second magnetic conductor located in the same plane as the first magnetic conductor, the second magnetic conductor comprising: a magnetic field input area in the second direction located at both ends of the second magnetic conductor and a magnetic field conversion area located between the two ends of the second magnetic conductor; the magnetic field conversion area comprises a conversion magnetic circuit in the first direction; wherein the conversion magnetic circuit has a second air gap in the second direction;

[0007] a first magnetic induction unit, wherein a projection of the first magnetic induction unit on the plane is located within the first air gap region; the sensor forms a first magnetic signal output circuit for measuring the magnetic induction intensity in the first direction based on the first magnetic induction unit;

[0008] a second magnetic induction unit, wherein a projection of the second magnetic induction unit on the plane is located within the second air gap region; and the sensor forms a second magnetic signal output circuit for measuring the magnetic induction intensity in the second direction based on the second magnetic induction unit;

[0009] The magnetic induction sensitivity directions of the first magnetic induction unit and the second magnetic induction unit are the same and parallel to the first direction.

[0010] In the above implementation process, the multi-axis magnetic field sensor includes a first magnetic conductor in a first direction, a second magnetic conductor located in the same plane as the first magnetic conductor, a first magnetic induction unit and a second magnetic induction unit, and the second magnetic conductor includes: a magnetic field input area in the second direction located at both ends of the second magnetic conductor and a magnetic field conversion area located between the two ends of the second magnetic conductor. Based on the magnetic field conversion area, the magnetic field to be measured in the second direction input by the magnetic field input area is converted, and the conversion magnetic circuit in the first direction forms a magnetic field component to be measured in the first direction, and then a second magnetic signal output circuit for measuring the magnetic induction intensity in the second direction is formed by a second magnetic induction unit "whose magnetic induction sensitivity direction is parallel to the first direction and whose projection on the plane is located in the second air gap area". In addition, a first magnetic signal output circuit for measuring the magnetic induction intensity in the first direction is formed by a first magnetic induction unit "whose magnetic induction sensitivity direction is parallel to the first direction and whose projection on the plane is located in the first air gap area". The multi-axis magnetic field sensor can measure the magnetic induction intensity in the first direction and the second direction by using the first magnetic induction unit and the second magnetic induction unit with the same magnetic induction sensitivity direction, without rotating the magnetic induction unit, so that the packaging process is simpler. The present invention solves the technical problem in the prior art that "a multi-axis magnetic field sensor made of magnetic induction units with different magnetic induction sensitivity directions" is prone to produce angle deviation during the packaging process and has high requirements for the packaging process.

[0011] Optionally, in an embodiment of the present application, the conversion magnetic circuit includes adjacent first conversion magnetic circuit and second conversion magnetic circuit; the first conversion magnetic circuit has a first conversion air gap in the second direction, and the second conversion magnetic circuit has a second conversion air gap in the second direction; the second magnetic induction unit includes: a first conversion magnetic induction unit and a second conversion magnetic induction unit; the projection of the first conversion magnetic induction unit on the plane is located in the first conversion air gap area, and the projection of the second conversion magnetic induction unit on the plane is located in the second conversion air gap area; the sensor forms the second magnetic signal output circuit based on the first conversion magnetic induction unit and the second conversion magnetic induction unit.

[0012] In the above implementation process, since the first conversion magnetic circuit and the second conversion magnetic circuit are adjacent conversion magnetic circuits in the first direction, after the magnetic field to be measured enters from the "magnetic field input area at both ends of the second magnetic conductor", magnetic field components with opposite directions will be formed at the first conversion air gap and the second conversion air gap, and the resistance values ​​of the first conversion magnetic induction unit and the second conversion magnetic induction unit will change in the opposite direction, thereby being able to more sensitively reflect the changes in the magnetic field, thereby improving the detection sensitivity of the multi-axis magnetic field sensor.

[0013] Optionally, in an embodiment of the present application, the sensor also includes: a first magnetically shielded magnetic induction unit; the projection of the first magnetically shielded magnetic induction unit on the plane is located within the magnetic conductive area of ​​the first magnetic conductive body; wherein the magnetic induction sensitivity direction of the first magnetically shielded magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit; the sensor forms the first magnetic signal output circuit based on the first magnetic induction unit and the first magnetically shielded magnetic induction unit.

[0014] In the above implementation process, since the projection of the first magnetic shielding induction unit on the plane is located in the magnetic conductive area of ​​the first magnetic conductive body, the magnetic field signal detected by the first magnetic shielding induction unit is weakened by the first magnetic conductive body, the first magnetic shielding induction unit can be regarded as a fixed value resistor, and a first magnetic signal output circuit for measuring the magnetic induction intensity in the first direction is formed based on the first magnetic induction unit and the first magnetic shielding magnetic induction unit. The first magnetic signal output circuit formed by the first magnetic induction unit and the first magnetic shielding magnetic induction unit has a low sensitivity and can have a larger magnetic field intensity detection range, thereby realizing a large-range low-sensitivity measurement of the magnetic induction intensity in the first direction.

[0015] Optionally, in an embodiment of the present application, the sensor also includes: a second magnetically shielded magnetic induction unit; the projection of the second magnetically shielded magnetic induction unit on the plane is located within the magnetic conductive area of ​​the second magnetic conductive body; wherein the magnetic induction sensitivity direction of the second magnetically shielded magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit; the sensor forms the second magnetic signal output circuit based on the second magnetic induction unit and the second magnetically shielded magnetic induction unit.

[0016] In the above implementation process, since the projection of the second magnetic shielding induction unit on the plane is located in the magnetic conductive area of ​​the second magnetic conductive body, the magnetic field signal detected by the second magnetic shielding induction unit is weakened by the second magnetic conductive body, and the second magnetic shielding induction unit can be regarded as a resistor, and a second magnetic signal output circuit for measuring the magnetic induction intensity in the second direction is formed based on the second magnetic induction unit and the second magnetic shielding magnetic induction unit. The second magnetic signal output circuit formed by the second magnetic induction unit and the second magnetic shielding magnetic induction unit has a low sensitivity and can have a larger magnetic field intensity detection range, thereby realizing a large-range low-sensitivity measurement of the magnetic induction intensity in the second direction.

[0017] Optionally, in an embodiment of the present application, the sensor further includes: a first partial magnet in the first direction placed on the plane; the first partial magnet has a first partial magnetic air gap in the second direction; and the sensor adjusts the measurement sensitivity of the magnetic induction intensity in the first direction by adjusting the width of the first partial magnetic air gap and / or the number of the first partial magnetic air gaps.

[0018] In the above-mentioned implementation process, the first magnetic separator in the first direction has a magnetic circuit in the first direction, and the magnetic circuit in the first direction will generate magnetic separation in the first direction for the first magnetic conductor. By changing the width of the first magnetic separation air gap or the number of the first magnetic separation air gaps, the strength of the magnetic separation effect in the first direction can be adjusted, and then the strength of the first direction magnetic field entering the first magnetic conductor can be adjusted to achieve the adjustment of the measurement sensitivity of the magnetic induction intensity in the first direction of the sensor. Specifically, by increasing the width of the first magnetic separation air gap, the magnetic separation effect on the first direction can be weakened, and then the strength of the first direction magnetic field entering the first magnetic conductor can be enhanced to improve the measurement sensitivity of the magnetic induction intensity in the first direction of the sensor; by reducing the width of the first magnetic separation air gap, the magnetic separation effect on the first direction can be enhanced, and then the strength of the first direction magnetic field entering the first magnetic conductor can be weakened to reduce the measurement sensitivity of the magnetic induction intensity in the first direction of the sensor. Alternatively, by increasing the number of first magnetic dividing air gaps, the magnetic dividing effect on the first direction can be weakened, thereby increasing the strength of the first direction magnetic field entering the first magnetic conductor, so as to improve the measurement sensitivity of the magnetic induction intensity in the first direction of the sensor; by reducing the number of first magnetic dividing air gaps, the magnetic dividing effect on the first direction can be enhanced, thereby decreasing the strength of the first direction magnetic field entering the first magnetic conductor, so as to reduce the measurement sensitivity of the magnetic induction intensity in the first direction of the sensor.

[0019] Optionally, in an embodiment of the present application, the second magnetic conductor further includes: a magnetic division circuit connecting the magnetic field input areas at both ends of the second magnetic conductor; the magnetic division circuit has a second magnetic division air gap in the second direction; and the sensor adjusts the measurement sensitivity of the magnetic induction intensity in the second direction by adjusting the width of the second magnetic division air gap and / or the number of the second magnetic division air gaps.

[0020] In the above implementation process, the magnetic separation magnetic circuit connecting the magnetic field input area at both ends of the second magnetic conductor is a magnetic separation magnetic circuit in the second direction, and the magnetic separation magnetic circuit in the second direction will generate magnetic separation in the second direction for the second magnetic conductor. By changing the width of the second magnetic separation air gap or changing the number of the second magnetic separation air gaps, the strength of the magnetic separation effect in the second direction can be adjusted, and then the strength of the second direction magnetic field entering the second magnetic conductor can be adjusted to achieve the adjustment of the measurement sensitivity of the magnetic induction intensity in the second direction of the sensor. Specifically, by increasing the width of the second magnetic separation air gap, the magnetic separation effect on the second direction can be weakened, and then the strength of the second direction magnetic field entering the second magnetic conductor can be enhanced to improve the measurement sensitivity of the magnetic induction intensity in the second direction of the sensor; by reducing the width of the second magnetic separation air gap, the magnetic separation effect on the second direction can be enhanced, and then the strength of the second direction magnetic field entering the second magnetic conductor can be weakened to reduce the measurement sensitivity of the magnetic induction intensity in the second direction of the sensor. Alternatively, by increasing the number of second magnetic dividing air gaps, the magnetic dividing effect on the second direction can be weakened, thereby increasing the strength of the second direction magnetic field entering the second magnetic conductor, so as to improve the measurement sensitivity of the magnetic induction intensity in the second direction of the sensor; by reducing the number of second magnetic dividing air gaps, the magnetic dividing effect on the second direction can be enhanced, thereby decreasing the strength of the second direction magnetic field entering the second magnetic conductor, so as to reduce the measurement sensitivity of the magnetic induction intensity in the second direction of the sensor.

[0021] Optionally, in an embodiment of the present application, the distances between the first magnetic induction unit and the first magnetic conductor and the second magnetic conductor are both greater than a first preset distance; the sensor also includes: a third magnetic induction unit; wherein the projection of the third magnetic induction unit on the plane is located in the magnetic conductive area of ​​the first magnetic conductor and adjacent to the first air gap area, or, the projection on the plane is located in the first air gap area and adjacent to the magnetic conductive area of ​​the first magnetic conductor, or, the projection on the plane is located in the magnetic conductive area of ​​the second magnetic conductor and adjacent to the second air gap area, or, the projection on the plane is located in the second air gap area and adjacent to the magnetic conductive area of ​​the second magnetic conductor; the magnetic induction sensitivity direction of the third magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit; wherein the distance between the third magnetic induction unit and the first magnetic conductor or the second magnetic conductor is less than a second preset distance; the second preset distance is less than the first preset distance; the sensor forms a third magnetic signal output circuit for measuring the magnetic induction intensity in a third direction based on the third magnetic induction unit; wherein the third direction is perpendicular to the plane.

[0022] In the above implementation process, due to the magnetic focusing effect of the first magnetic conductor or the second magnetic conductor on the magnetic field in the third direction, the magnetic field will be distorted at the edge of the magnetic area when entering and exiting the magnetic area of ​​the first magnetic conductor or the second magnetic conductor; therefore, the magnetic field to be measured in the third direction will generate a magnetic field component in the first direction or the second direction at the edge of the magnetic area of ​​the first magnetic conductor and the second magnetic conductor. Since "the magnetic induction sensitivity direction of the third magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit", and "the magnetic field to be measured in the third direction will generate a magnetic field component in the first direction or the second direction at the edge of the magnetic area of ​​the first magnetic conductor and the second magnetic conductor", the edge of the third magnetic induction unit adjacent to the magnetic area will be affected by the magnetic field component in the first direction or the second direction, and the third magnetic signal output circuit for measuring the magnetic induction intensity in the third direction can be formed by the third magnetic induction unit. The multi-axis magnetic field sensor can measure the magnetic induction intensity in the first direction, the second direction and the third direction through the first magnetic induction unit, the second magnetic induction unit and the third magnetic induction unit with the same magnetic induction sensitivity direction, without rotating the magnetic induction unit, making the packaging process simpler.

[0023] Optionally, in an embodiment of the present application, the sensor also includes: an external magnetic field magnetic induction unit; the magnetic induction sensitivity direction of the external magnetic field magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit, and the distance between the external magnetic field magnetic induction unit and the first magnetic conductor and the second magnetic conductor is greater than a third preset distance; the sensor forms the first magnetic signal output circuit based on the external magnetic field magnetic induction unit and the first magnetic induction unit; the sensor forms the second magnetic signal output circuit based on the external magnetic field magnetic induction unit and the second magnetic induction unit.

[0024] In the above implementation process, since the distance between the external magnetic field magnetic induction unit and the first magnetic conductor and the second magnetic conductor is relatively far, the external magnetic field magnetic induction unit will be directly affected by the external magnetic field (compared with the magnetic field inside the first magnetic conductor and the second magnetic conductor, the external magnetic field refers to the external magnetic field to be measured). The sensitivity of the first magnetic signal output circuit formed by the external magnetic field magnetic induction unit and the first magnetic induction unit is low, and a larger magnetic field strength detection range can be provided, so as to achieve a large-scale low-sensitivity measurement of the magnetic induction strength in the first direction. Similarly, the second magnetic signal output formed by the external magnetic field magnetic induction unit and the second magnetic induction unit can achieve a large-scale low-sensitivity measurement of the magnetic induction strength in the second direction.

[0025] Optionally, in an embodiment of the present application, the sensor further includes: a resistor (preferably a fixed value resistor); the sensor forms the first magnetic signal output circuit based on the resistor and the first magnetic induction unit; the sensor forms the second magnetic signal output circuit based on the resistor and the second magnetic induction unit.

[0026] In the above implementation process, a first magnetic signal output circuit for measuring the magnetic induction intensity in the first direction can be formed by a resistor and a first magnetic induction unit, and a second magnetic signal output circuit for measuring the magnetic induction intensity in the second direction can be formed by a resistor and a second magnetic induction unit. The output circuit structure of the multi-axis magnetic field sensor is simpler, which can reduce the actual process packaging difficulty. In addition, the first magnetic signal output circuit formed by the resistor and the first magnetic induction unit has a lower sensitivity and can have a larger magnetic field intensity detection range, thereby realizing a large-scale low-sensitivity measurement of the magnetic induction intensity in the first direction. Similarly, the second magnetic signal output formed by the resistor and the second magnetic induction unit can realize a large-scale low-sensitivity measurement of the magnetic induction intensity in the second direction.

[0027] Optionally, in an embodiment of the present application, the sensor further includes: an open-loop signal conditioning circuit; the open-loop signal conditioning circuit is electrically connected to the first magnetic signal output circuit and the second magnetic signal output circuit respectively; the sensor conditions and amplifies, temperature compensates and / or linearizes the electrical signals output by the first magnetic signal output circuit and the second magnetic signal output circuit based on the open-loop signal conditioning circuit to obtain a first conditioned signal; and outputs the first conditioned signal; or, the sensor further includes: a closed-loop signal conditioning circuit and a magnetic field feedback coil; the sensor forms a closed-loop magnetic field feedback structure based on the closed-loop signal conditioning circuit, the magnetic field feedback coil and the magnetic induction unit; the sensor conditions and amplifies, temperature compensates and / or linearizes the electrical signals output by the first magnetic signal output circuit and the second magnetic signal output circuit based on the closed-loop magnetic field feedback structure, and generates a feedback magnetic field to achieve a dynamic balance of the magnetic field, to obtain a second conditioned signal; and outputs the second conditioned signal; wherein, the second conditioned signal represents the feedback current of the magnetic field feedback coil when the magnetic field dynamic balance state is reached.

[0028] In the above-mentioned implementation process, after the electrical signals output by the first magnetic signal output circuit and the second magnetic signal output circuit are conditioned, amplified, temperature compensated and / or linearly corrected by the signal conditioning circuit (open-loop signal conditioning circuit / closed-loop signal conditioning circuit and magnetic field feedback coil), a conditioned standard signal can be obtained to ensure that the conditioned standard signal can be more accurately recognized by the corresponding magnetic detection system, so as to obtain a more accurate magnetic field detection result based on the multi-axis magnetic field sensor.

[0029] By adopting a multi-axis magnetic field sensor provided by the present application, the magnetic induction intensity in the first direction and the second direction can be measured by using a first magnetic induction unit and a second magnetic induction unit with the same magnetic induction sensitivity direction, without rotating the magnetic induction unit, making the packaging process simpler. The technical problem that the "multi-axis magnetic field sensor made of magnetic induction units with different sensitivity directions" in the prior art is prone to angle deviation during the packaging process and has high requirements for the packaging process is solved. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments of the present application will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0031] Figure 1 A schematic diagram of the projection structure of the first multi-axis magnetic field sensor provided in an embodiment of the present application on a plane;

[0032] Figure 2 A first magnetic flux path simulation schematic diagram provided in an embodiment of the present application;

[0033] Figure 3 A second magnetic flux path simulation schematic diagram provided in an embodiment of the present application;

[0034] Figure 4 A schematic diagram of the projection structure of the second multi-axis magnetic field sensor provided in an embodiment of the present application on a plane;

[0035] Figure 5 A third magnetic flux path simulation schematic diagram provided in an embodiment of the present application;

[0036] Figure 6 A fourth magnetic flux path simulation schematic diagram provided in an embodiment of the present application;

[0037] Figure 7 A schematic diagram of the projection structure of a third multi-axis magnetic field sensor provided in an embodiment of the present application on a plane;

[0038] Figure 8 A fifth magnetic flux path simulation schematic diagram provided in an embodiment of the present application;

[0039] Fig. 9 A sixth magnetic flux path simulation schematic diagram provided in an embodiment of the present application;

[0040] Fig.10 A schematic diagram of the projection structure of the fourth multi-axis magnetic field sensor provided in an embodiment of the present application on a plane;

[0041] Fig.11 This is a schematic diagram of the projection structure of the fifth multi-axis magnetic field sensor provided in an embodiment of the present application on a plane. DETAILED DESCRIPTION

[0042] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0043] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0044] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0045] Please refer to Figure 1 , Figure 1 This is a schematic diagram of the projection structure of the first multi-axis magnetic field sensor provided in an embodiment of the present application on a plane. The multi-axis magnetic field sensor includes:

[0046] A first magnetic conductor 1D in a first direction, the first magnetic conductor 1D having a first air gap in a second direction; wherein the first direction and the second direction are perpendicular to each other;

[0047] A second magnetic conductor 2D located in the same plane (substrate 3) as the first magnetic conductor 1D, the second magnetic conductor 2D comprising: magnetic field input areas (1A and 1B) in the second direction located at both ends of the second magnetic conductor 2D and magnetic field conversion areas (1Ca, 1Cb, 1Cc, 1Cd, 1Ea, 1Eb and 1Ec) located between the two ends of the second magnetic conductor 2D; the magnetic field conversion areas (1Ca, 1Cb, 1Cc, 1Cd, 1Ea, 1Eb and 1Ec) comprising a conversion magnetic circuit in the first direction; wherein the conversion magnetic circuit has a second air gap in the second direction;

[0048] a first magnetic induction unit 2Ya, the projection of which on the plane 1 is located in the first air gap region; the sensor forms a first magnetic signal output circuit for measuring the magnetic induction intensity in the first direction based on the first magnetic induction unit 2Ya;

[0049] A second magnetic induction unit 2X, the projection of the second magnetic induction unit 2X on the plane (substrate 3) is located in the second air gap area; the sensor forms a second magnetic signal output circuit for measuring the magnetic induction intensity in the second direction based on the second magnetic induction unit 2X;

[0050] The magnetic induction sensitivity directions of the first magnetic induction unit 2Ya and the second magnetic induction unit 2X are the same and parallel to the first direction.

[0051] The above-mentioned plane may be a PCB substrate (for example, Figure 1The substrate 3 shown in the figure may also be a wafer substrate. The first magnetic conductor 1D and the second magnetic conductor 2D may be magnetic conductive areas formed on a plane by soft magnetic materials, such as silicon steel sheets, low carbon steel or iron-silicon alloys. Specifically, the first magnetic conductor 1D and the second magnetic conductor 2D are respectively magnetic conductive areas formed by at least two sections of soft magnetic materials, and the first air gap and the second air gap refer to the gap between the two sections of soft magnetic materials; the first air gap and the second air gap may be gaps formed by air or other non-magnetic conductive materials. The number of the first air gaps may be one or more, and the number of the second air gaps may also be one or more, which is not specifically limited in the present application. The first magnetic induction unit 2Ya and the second magnetic induction unit 2X may be implemented by giant magnetoresistance (GMI), fluxgate or magnetoresistance sensitive elements; wherein the magnetoresistance sensitive elements include anisotropic magnetoresistance (AMR), giant magnetoresistance (GMR), tunnel magnetoresistance (TMR) and giant magnetoresistance, etc.

[0052] Among them, the first magnetic signal output circuit can be formed based on the first magnetic induction unit 2Ya and the resistor, and can also be formed based on the first magnetic induction unit 2Ya and "the magnetic induction unit whose projection on the plane is located in the magnetic conductive area of ​​the first magnetic conductive body". Correspondingly, the first magnetic signal output circuit can be formed based on the second magnetic induction unit 2X and the resistor, and can also be formed based on the second magnetic induction unit 2X and "the magnetic induction unit whose projection on the plane is located in the magnetic conductive area of ​​the second magnetic conductive body". The first magnetic signal output circuit and the second magnetic signal output circuit can be differential half-bridge or differential full-bridge output circuits.

[0053] by Figure 1 The plane where the substrate 3 is shown is the XY plane, the first direction is the Y axis direction, the left side is the magnetic field measurement area 4x in the X axis direction, and the right side is the magnetic field measurement area 4y in the Y axis direction. The XY direction conversion area 1Ca is a corner pointing to the negative direction of the X axis and the positive direction of the Y axis, the XY direction conversion area 1Cb is a corner pointing to the positive direction of the X axis and the negative direction of the Y axis, the XY direction conversion area 1Cc is a corner pointing to the negative direction of the X axis and the negative direction of the Y axis, and the XY direction conversion area 1Cd is a corner pointing to the positive direction of the X axis and the positive direction of the Y axis; the magnetic flux path connection area 1Ea connects the XY direction conversion areas 1Ca and 1Cb in the Y axis direction, the magnetic flux path connection area 1Eb connects the XY direction conversion areas 1Cb and 1Cc in the X axis direction, and the magnetic flux path connection area 1Ec connects the XY direction conversion areas 1Cc and 1Cd in the Y axis direction. The magnetic flux path connection areas 1Ea and 1Ec are respectively provided with two second air gaps penetrating the soft magnetic material along the X-axis direction; the first magnetic conductor 1D is provided with a first air gap penetrating the soft magnetic material along the X-axis direction.

[0054] Wherein, the second magnetic conductor 2D includes: magnetic field input areas (1A and 1B) in the second direction (X-axis direction) located at both ends of the second magnetic conductor 2D. Specifically, 1A serves as the magnetic field input area when the external magnetic field is in the positive direction of the X-axis, and 1B serves as the magnetic field input area when the external magnetic field is in the negative direction of the X-axis. When the external magnetic field is in the positive direction of the X-axis, 1A serves as the magnetic field input area in the positive direction of the X-axis, and at this time, the magnetic field input area 1B serves as the magnetic field output area of ​​the magnetic field (the external magnetic field in the positive direction of the X-axis); when the external magnetic field is in the negative direction of the X-axis, 1B serves as the magnetic field input area in the negative direction of the X-axis, and at this time, the magnetic field input area 1A serves as the magnetic field output area of ​​the magnetic field (the external magnetic field in the negative direction of the X-axis).

[0055] Specifically, an example is given in which the direction of the external magnetic field is the positive direction of the X-axis and the first magnetic conductor 1D and the second magnetic conductor 2D are made of metallic soft magnetic materials. At this time, the external magnetic field enters the second magnetic conductor 2D from the magnetic field input area 1A, and the metallic soft magnetic material gathers and amplifies the external magnetic field to form a magnetic flux path. The magnetic path enters from the magnetic field input area 1A at the negative X-axis end of the X-axis magnetic field measurement area 4x, and then the XY direction conversion area 1Ca twists the magnetic circuit to the positive direction of the Y-axis, and then passes through the magnetic flux path connection area 1Ea with a second air gap along the positive direction of the Y-axis, and generates a magnetic field component in the positive direction of the Y-axis in the second air gap; and after passing through the XY direction conversion area 1Cb, the magnetic flux path connection area 1Eb, and the XY direction conversion area 1Cc, the magnetic circuit is twisted from the positive direction of the Y-axis to the negative direction of the Y-axis, passes through the magnetic flux path connection area 1Ec with an air gap, and generates a magnetic field component in the negative direction of the Y-axis in the air gap; then the magnetic circuit is twisted back to the positive direction of the X-axis by the XY direction conversion area 1Cd, and finally returns to the external magnetic field through the magnetic field input area 1B. Thus, the magnetic field to be measured in the positive direction of the X-axis can generate opposite magnetic field components in the positive and negative directions of the Y-axis at air gaps at different positions, thereby forming a differential magnetic field.

[0056] When the external magnetic field is in the negative direction of the X-axis, it will enter from the magnetic field input area 1B, pass through the magnetic field conversion areas (1Ca, 1Cb, 1Cc, 1Cd, 1Ea, 1Eb and 1Ec) to the magnetic field input area 1A, and return to the external magnetic field from the magnetic field input area 1A. Specifically, the opposite magnetic field components in the positive and negative directions of the Y-axis are generated at the air gaps at different positions by converting the magnetic circuit, forming a differential magnetic field.

[0057] Specifically, for the X-axis magnetic field measurement area 4x whose magnetic field induction direction is the X-axis direction, the second magnetic induction unit includes a magnetic induction unit 2Xa and a magnetic induction unit 2Xb. Taking the case where the sensitivity directions of the magnetic induction units 2Xa and 2Xb are both in the positive direction of the Y-axis and the external magnetic field is in the positive direction of the X-axis as an example, the magnetic circuit after the aggregation and amplification passes through the magnetic flux path connection area 1Ea with an air gap along the positive direction of the Y-axis, and then passes through the magnetic flux path connection area 1Ec with an air gap along the negative direction of the Y-axis; at this time, a magnetic field component in the positive direction of the Y-axis is generated in the air gap of the magnetic flux path connection area 1Ea, and a magnetic field component in the negative direction of the Y-axis is generated in the air gap of the magnetic flux path connection area 1Ec. Since the sensitivity directions of the magnetic induction units 2Xa and 2Xb are both in the positive direction of the Y-axis, the resistance value of the magnetic induction unit 2Xa decreases, and the resistance value of the magnetic induction unit 2Xb increases. Then, a push-pull half-bridge structure (second magnetic signal output circuit) can be used to sense the magnetic field in the positive direction of the X-axis to generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a second magnetic induction unit 2X can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction). Please refer to Figure 2 , Figure 2 The first magnetic flux path simulation schematic diagram provided in the embodiment of the present application. Specifically, Figure 2 For Figure 1 The magnetic flux path simulation diagram after the X-axis magnetic field measurement area 4x in the provided embodiment is added with the magnetic field to be measured in the positive direction of the X-axis. It can be seen that the magnetic field to be measured is gathered and amplified by the metal soft magnetic material to form a magnetic circuit, and is distorted in the XY direction conversion areas 1Ca, 1Cb, 1Cc, and 1Cd in turn. In the air gap of the magnetic flux path connection area 1Ea and 1Ec, obvious opposite magnetic field components in the positive and negative directions of the Y axis can be generated to form a differential magnetic field, and the magnetic flux path passing through the above air gap is in a series relationship. Please refer to Figure 3 , Figure 3 The second magnetic flux path simulation schematic diagram provided in the embodiment of the present application. Specifically, Figure 3 For Figure 1 The magnetic flux path simulation diagram after the Y-axis magnetic field measurement area 4y in the provided embodiment is added to the Y-axis positive direction magnetic field to be measured; it can be seen that the magnetic field to be measured is gathered and amplified by the metallic soft magnetic material to form a magnetic circuit and pass through the air gap of the Y-direction magnetic conductive area 1D along the Y-axis direction.

[0058] Since all the magnetic induction units of the multi-axis magnetic field sensor provided in this embodiment have the same sensitivity direction, the magnetic induction unit (the first magnetic induction unit 2Ya or the second magnetic induction unit 2X) can select a magnetoresistive sensitive element whose sensitivity direction is parallel to its own plane, such as a tunnel magnetoresistor TMR, combined with a lead pad and a mechanical support housing, and adopt a single chip integration preparation process.

[0059] It can be seen that the multi-axis magnetic field sensor provided by the present application can measure the magnetic induction intensity in the first direction and the second direction through the first magnetic induction unit 2Ya and the second magnetic induction unit 2X with the same magnetic induction sensitivity direction, without rotating the magnetic induction unit, making the packaging process simpler. Specifically, the measurement of the magnetic induction intensity in the first direction can be achieved through "the first magnetic induction unit 2Ya and the resistor" or "the first magnetic induction unit 2Ya and the external magnetic field magnetic induction unit for detecting the magnetic induction intensity of the external magnetic field". It solves the technical problem in the prior art that "a multi-axis magnetic field sensor made of magnetic induction units with different sensitivity directions" is prone to angle deviation during the packaging process and has high requirements for the packaging process.

[0060] It should be noted that, for the same metal soft magnetic material structure, there may be multiple situations for defining the magnetic flux path connection area 1E (1Ea, 1Eb, 1Ec); as in the above case, Figure 1 The magnetic field input area 1A and the XY direction conversion area 1Ca in the figure are considered to be directly connected, and can also be considered to have a magnetic flux path connecting area 1E; Figure 1 The XY direction conversion area 1Cb, the magnetic flux path connection area 1Eb, and the XY direction conversion area 1Cc are connected in sequence. When the corner distances of the XY direction conversion area 1Cb and the XY direction conversion area 1Cc are too close, the XY direction conversion areas 1Cb and 1Cc can be regarded as being directly connected. Similarly, the part with an air gap in the metal soft magnetic material can be regarded as being located in the magnetic flux path connection area 1E (1Ea or 1Ec) and can also be regarded as being located in the XY direction conversion area 1C (1Ca, 1Cb, 1Cc or 1Cd). The above situations are all narrative methods for describing the structure of the embodiment of the present application in a schematic manner. The description of the embodiment of the present application only selects one of the relatively clear definition methods for the convenience of drawing and explanation, and the narrative method of the embodiment also selects only one of them.

[0061] In some optional embodiments, the conversion magnetic circuit includes adjacent first conversion magnetic circuit 1Ea and second conversion magnetic circuit 1Ec; the first conversion magnetic circuit 1Ea has a first conversion air gap in the second direction, and the second conversion magnetic circuit 1Ec has a second conversion air gap in the second direction; the second magnetic induction unit 2X includes: a first conversion magnetic induction unit 2Xa and a second conversion magnetic induction unit 2Xb; the projection of the first conversion magnetic induction unit 2Xa on the plane (substrate 3) is located in the first conversion air gap area, and the projection of the second conversion magnetic induction unit 2Xb on the plane (substrate 3) is located in the second conversion air gap area; the sensor forms the second magnetic signal output circuit based on the first conversion magnetic induction unit 2Xa and the second conversion magnetic induction unit 2Xb.

[0062] Please refer to Figure 4 , Figure 4 A schematic diagram of the projection structure of the second multi-axis magnetic field sensor provided in an embodiment of the present application on a plane.

[0063] In some optional embodiments, the sensor also includes: a first magnetically shielded magnetic induction unit 2Yb; the projection of the first magnetically shielded magnetic induction unit 2Yb on the plane (substrate 3) is located within the magnetic conductive area of ​​the first magnetic conductive body 1D; wherein the magnetic induction sensitivity direction of the first magnetically shielded magnetic induction unit 2Yb is the same as the magnetic induction sensitivity direction of the first magnetic induction unit 2Ya or the second magnetic induction unit 2X; the sensor forms the first magnetic signal output circuit based on the first magnetic induction unit 2Ya and the first magnetically shielded magnetic induction unit 2Yb.

[0064] Among them, refer to Figure 1 , Figure 4For the Y-axis magnetic field measurement area 4y where the magnetic field induction direction is the Y-axis direction, taking the sensitivity direction of the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb as the positive direction of the Y-axis and the external magnetic field as the positive direction of the Y-axis as an example, the magnetic circuit after the aggregation and amplification passes through the Y-direction magnetic conductive area (first magnetic conductive body) 1D with an air gap along the positive direction of the Y-axis, and generates a magnetic field component in the positive direction of the Y-axis in the air gap. Since the sensitivity directions of the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb are both in the positive direction of the Y-axis, the resistance value of the first magnetic induction unit 2Ya decreases, and the first magnetic shielding magnetic induction unit 2Yb detects the magnetic field weakened by the metal soft magnetic material shielding, so the resistance value of the first magnetic shielding magnetic induction unit 2Yb can be regarded as approximately unchanged. Therefore, based on the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb, a differential half-bridge structure can be used to sense the magnetic field in the positive direction of the Y-axis to generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a first magnetic signal output circuit for detecting the first direction (i.e., the Y-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (a first magnetic induction unit 2Ya, a first magnetic shielding magnetic induction unit 2Yb) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of the first magnetic signal output circuit for detecting the first direction (i.e., the Y-axis direction).

[0065] It can be seen that the multi-axis magnetic field sensor provided by the present application can measure the magnetic induction intensity in the first direction and the second direction through the first magnetic induction unit 2Ya, the first magnetic shielding magnetic induction unit 2Yb and the second magnetic induction unit 2X with the same magnetic induction sensitivity direction, without rotating the magnetic induction unit, making the packaging process simpler. The technical problem that the "multi-axis magnetic field sensor made of magnetic induction units with different sensitivity directions" in the prior art is prone to angular deviation during the packaging process and has high requirements for the packaging process is solved.

[0066] In some optional embodiments, the sensor also includes: a second magnetically shielded magnetic induction unit 2B; the projection of the second magnetically shielded magnetic induction unit 2B on the plane (substrate 3) is located within the magnetic conductive area of ​​the second magnetic conductive body 2D; wherein the magnetic induction sensitivity direction of the second magnetically shielded magnetic induction unit 2B is the same as the magnetic induction sensitivity direction of the first magnetic induction unit 2Y or the second magnetic induction unit 2X; the sensor forms the second magnetic signal output circuit based on the second magnetic induction unit 2X and the second magnetically shielded magnetic induction unit 2B.

[0067] Among them, refer to Figure 4The second magnetic conductor 2D includes a magnetic field input area (1Ax, 1Bx), an XY direction conversion area (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf) and a magnetic flux path connection area (1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef). The first magnetic conductor 1D includes a magnetic field input area (1Ay, 1By) and a magnetic flux path connection area (1Eb, 1Ee) shared with the second magnetic conductor 2D.

[0068] Among them, the first magnetic conductor 1D and the second magnetic conductor 2D can be made of metallic soft magnetic material, the XY direction conversion zone 1Ca includes three ports pointing to the negative direction of the X-axis, the positive direction of the Y-axis, and the negative direction of the Y-axis and is connected to the magnetic field input zone 1Ax, the XY direction conversion zone 1Cb is a corner pointing to the positive direction of the X-axis and the negative direction of the Y-axis, the XY direction conversion zone 1Cc is a corner pointing to the negative direction of the X-axis and the negative direction of the Y-axis, the XY direction conversion zone 1Cd includes three ports pointing to the positive direction of the X-axis, the positive direction of the Y-axis, and the negative direction of the Y-axis and is connected to the magnetic field input zone 1Bx, the XY direction conversion zone 1Ce is a corner pointing to the positive direction of the X-axis and the positive direction of the Y-axis, and the XY direction conversion zone 1Cf is a corner pointing to the negative direction of the X-axis and the positive direction of the Y-axis. The magnetic flux path connection area 1Ea is connected to the XY direction conversion areas 1Ca and 1Cb in the Y-axis direction; the magnetic flux path connection area 1Eb is connected to the XY direction conversion areas 1Cb and 1Cc in the X-axis direction, and is connected to the magnetic field input area 1Ay and the Y-direction magnetic conductive area 1D in the Y-axis direction; the magnetic flux path connection area 1Ec is connected to the XY direction conversion areas 1Cc and 1Cd in the Y-axis direction; the magnetic flux path connection area 1Ed is connected to the XY direction conversion areas 1Ca and 1Ce in the Y-axis direction; the magnetic flux path connection area 1Ee is connected to the XY direction conversion areas 1Ce and 1Cf in the X-axis direction, and is connected to the magnetic field input area 1By and the Y-direction magnetic conductive area 1D in the Y-axis direction; the magnetic flux path connection area 1Ef is connected to the XY direction conversion areas 1Cd and 1Cf in the Y-axis direction; and the magnetic flux path connection areas 1Ea, 1Ec, 1Ed, 1Ef and the Y-direction magnetic conductive area 1D are respectively provided with two air gaps that penetrate the metal soft magnetic material along the X-axis direction.

[0069] Specifically, the external magnetic field direction is described as the positive direction of the X-axis. At this time, the metal soft magnetic material gathers and amplifies the external magnetic field and forms a magnetic flux path, which enters from the magnetic field input area 1Ax, and then the XY direction conversion area 1Ca twists the magnetic circuit on both sides to the positive direction of the Y-axis and the negative direction of the Y-axis. The two magnetic circuits are mirror-symmetrical about the X-axis and are in a parallel relationship. One of the magnetic circuits passes through the magnetic flux path connection area 1Ea with a second air gap along the positive direction of the Y-axis, and generates a magnetic field component in the positive direction of the Y-axis in the second air gap; the magnetic circuit then passes through the XY direction conversion area 1Cb, the magnetic flux path connection area 1Eb, and the XY direction conversion area 1Cc in sequence, twists the magnetic circuit in the positive direction of the Y-axis to the negative direction of the Y-axis, and then passes through the magnetic flux path connection area 1Ec with a second air gap, and generates a magnetic field component in the negative direction of the Y-axis in the second air gap. Another magnetic circuit passes through the magnetic flux path connection area 1Ed with a second air gap along the negative direction of the Y axis, and generates a magnetic field component in the negative direction of the Y axis in the second air gap; the magnetic circuit then passes through the XY direction conversion area 1Ce, the magnetic flux path connection area 1Ee, and the XY direction conversion area 1Cf in sequence, twisting the magnetic circuit from the negative direction of the Y axis to the positive direction of the Y axis, and then passes through the magnetic flux path connection area 1Ef with a second air gap, and generates a magnetic field component in the positive direction of the Y axis in the second air gap. In this way, the magnetic field to be measured in the X-axis direction can generate opposite magnetic field components in the positive and negative directions of the Y axis at the second air gaps at different positions, forming a differential magnetic field; finally, the two magnetic circuits in the positive and negative directions of the Y axis are twisted back to the positive direction of the X axis by the XY direction conversion area 1Cd, and then pass through the magnetic field input area 1Bx for external magnetic field.

[0070] When the external magnetic field is in the negative direction of the X axis, it will enter from the magnetic field input area 1Bx, through the XY direction conversion area (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf) and the magnetic flux path connection area (1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef) to the magnetic field input area 1Ax, and return to the external magnetic field from the magnetic field input area 1Ax. Specifically, the opposite magnetic field components in the positive and negative directions of the Y axis are generated at the second air gap at different positions by converting the magnetic circuit to form a differential magnetic field.

[0071] Specifically, for the X-axis magnetic field measurement area 4x where the magnetic field induction direction is the X-axis direction, the second magnetic induction unit includes a magnetic induction unit 2Xa, a magnetic induction unit 2Xb, a magnetic induction unit 2Xc, and a magnetic induction unit 2Xd. Taking the case where the sensitivity directions of the second magnetic induction units are all in the positive direction of the Y-axis and the external magnetic field is in the positive direction of the X-axis as an example, a magnetic field component in the positive direction of the Y-axis is generated in the air gap of the magnetic flux path connection areas 1Ea and 1Ef, and a magnetic field component in the negative direction of the Y-axis is generated in the air gap of the magnetic flux path connection areas 1Ec and 1Ed. Since the sensitivity directions of the second magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd are all in the positive direction of the Y-axis, the resistance values ​​of the second magnetic induction units 2Xa and 2Xd decrease, and the resistance values ​​of the second magnetic induction units 2Xb and 2Xc increase. Therefore, the second magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd can be selected in series and parallel to form a push-pull half-bridge or push-pull full-bridge structure to sense the magnetic field in the positive direction of the X-axis and generate a differential voltage signal; the second magnetic induction units 2Xa, 2Xb, 2Xc or 2Xd can also be selected to form a differential half-bridge or differential full-bridge structure with the second magnetically shielded magnetic induction unit 2B to sense the magnetic field in the positive direction of the X-axis and generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (a second magnetic induction unit 2Xa, 2Xb, 2Xc, 2Xd, a second magnetic shielding magnetic induction unit 2B) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction).

[0072] Please refer to Figure 5 , Figure 5 The third magnetic flux path simulation schematic diagram provided in the embodiment of the present application. Specifically, Figure 5 For Figure 4 The magnetic flux path simulation diagram after the X-axis magnetic field measurement area 4x in the provided embodiment is added with the magnetic field to be measured in the positive direction of the X-axis; it can be seen that the magnetic field to be measured is gathered and amplified by the metal soft magnetic material to form a magnetic circuit, and is twisted to the positive direction of the Y-axis and the negative direction of the Y-axis on both sides to form two magnetic flux paths in parallel; then the two magnetic circuits are twisted in the Y-axis direction and then twisted back to the positive direction of the X-axis. And in the air gaps of the magnetic flux path connection areas 1Ea, 1Ec, 1Ed, and 1Ef, it can generate obvious opposite magnetic field components in the positive and negative directions of the Y-axis to form a differential magnetic field, and the magnetic circuit basically does not pass through the first magnetizer 1D. Since the magnetic circuit generated by the external magnetic field in the X-axis direction basically does not pass through the first magnetizer 1D, the influence of the external magnetic field in the X-axis direction on the Y-axis measurement can be ignored.

[0073] Please refer to Figure 6 , Figure 6 This is a fourth magnetic flux path simulation schematic diagram provided in the embodiment of the present application. Specifically, Figure 6 For Figure 4 The magnetic flux path simulation diagram after the Y-axis magnetic field measurement area 4y in the provided embodiment is added with the magnetic field to be measured in the negative direction of the Y-axis. The magnetic circuit that has been concentrated and amplified passes through the first magnetic conductor 1D with an air gap along the negative direction of the Y-axis, and generates a magnetic field component in the negative direction of the Y-axis in the first air gap. Since the sensitivity directions of the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb are both in the positive direction of the Y-axis, the resistance value of the first magnetic induction unit 2Ya increases, and the first magnetic shielding magnetic induction unit 2Yb detects the magnetic field that is weakened by the shielding of the metal soft magnetic material, so the resistance value can be regarded as approximately unchanged. Therefore, a differential half-bridge or differential full-bridge structure can be used to sense the magnetic field in the negative direction of the Y-axis to generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a first magnetic signal output circuit for detecting the first direction (i.e., the Y-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (a first magnetic induction unit 2Ya, a first magnetic shielding magnetic induction unit 2Yb) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of the first magnetic signal output circuit for detecting the first direction (i.e., the Y-axis direction).

[0074] By the aforementioned Figure 6 Analysis shows that the magnetic circuit generated by the external magnetic field in the Y-axis direction generates a magnetic field in the air gap of the magnetic flux path connection area 1Ea, 1Ec, 1Ed, and 1Ef used for X-axis measurement in the negative direction of the Y-axis. Therefore, when the magnetic flux path connection areas 1Ea, 1Ec, 1Ed, and 1Ef form a push-pull half-bridge or push-pull full-bridge structure, the external magnetic field in the Y-axis direction basically has no effect on the differential voltage signal generated by the bridge. Therefore, the multi-axis magnetic field sensor has a strong anti-interference ability.

[0075] Please refer to Figure 7 , Figure 7 A schematic diagram of the projection structure of the third multi-axis magnetic field sensor provided in an embodiment of the present application on a plane.

[0076] In some optional embodiments, the sensor also includes: a first partial magnet 1F in the first direction placed on a plane (substrate 3); the first partial magnet 1F has a first partial magnetic air gap in the second direction; and the sensor adjusts the measurement sensitivity of the magnetic induction intensity in the first direction by adjusting the width of the first partial magnetic air gap.

[0077] Among them, refer to Figure 7 The second magnetic conductor 2D includes a magnetic field input area (1Axa, 1Axb, 1Bxa, 1Bxb), an XY direction conversion area (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf, 1Cg, 1Ch) and a magnetic flux path connection area (1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef). The first magnetic conductor 1D includes a magnetic field input area (1Axa, 1Axb) shared with the second magnetic conductor 2D.

[0078] Among them, the first magnetic conductor 1D and the second magnetic conductor 2D can be made of metallic soft magnetic material, the XY direction conversion zones 1Ca and 1Cg are corners pointing to the negative direction of the X-axis and the negative direction of the Y-axis, the XY direction conversion zones 1Cb and 1Ch are corners pointing to the positive direction of the X-axis and the positive direction of the Y-axis, the XY direction conversion zones 1Cc and 1Ce are corners pointing to the negative direction of the X-axis and the positive direction of the Y-axis, and the XY direction conversion zones 1Cd and 1Cf are corners pointing to the positive direction of the X-axis and the negative direction of the Y-axis. The magnetic flux path connection area 1Ea is connected to the XY direction conversion areas 1Ca and 1Cb in the Y-axis direction, the magnetic flux path connection area 1Eb is connected to the XY direction conversion areas 1Cb and 1Cc in the X-axis direction, the magnetic flux path connection area 1Ec is connected to the XY direction conversion areas 1Cc and 1Cd in the Y-axis direction, the magnetic flux path connection area 1Ed is connected to the XY direction conversion areas 1Ce and 1Cf in the Y-axis direction, the magnetic flux path connection area 1Ee is connected to the XY direction conversion areas 1Cf and 1Cg in the X-axis direction, and the magnetic flux path connection area 1Ef is connected to the XY direction conversion areas 1Cg and 1Ch in the Y-axis direction. The magnetic flux path connection areas 1Ea, 1Ec, 1Ed, 1Ef and the first magnetic conductor 1D are respectively provided with two air gaps penetrating the metal soft magnetic material along the X-axis direction.

[0079] Specifically, the external magnetic field direction is described as the positive direction of the X-axis. At this time, the metal soft magnetic material gathers and amplifies the external magnetic field and forms two magnetic flux paths that are mirror-symmetrical and parallel about the X-axis. After the two magnetic paths pass through the magnetic field input areas 1Axa and 1Axb, they enter the XY direction conversion areas 1Ca and 1Ce respectively along the positive direction of the X-axis, and then the XY direction conversion areas 1Ca and 1Ce twist the magnetic path to the negative direction of the Y-axis and the positive direction of the Y-axis on both sides. One of the magnetic paths passes through the magnetic flux path connection area 1Ea with an air gap along the negative direction of the Y-axis, and generates a magnetic field component in the negative direction of the Y-axis in the air gap; the magnetic path then passes through the XY direction conversion area 1Cb, the magnetic flux path connection area 1Eb, and the XY direction conversion area 1Cc in turn, twists the magnetic path from the negative direction of the Y-axis to the positive direction of the Y-axis, and then passes through the magnetic flux path connection area 1Ec with an air gap, and generates a magnetic field component in the positive direction of the Y-axis in the air gap. Another magnetic circuit passes through the magnetic flux path connection area 1Ed with an air gap along the positive direction of the Y axis, and generates a magnetic field component in the positive direction of the Y axis in the air gap; the magnetic circuit then passes through the XY direction conversion area 1Cf, the magnetic flux path connection area 1Ee, and the XY direction conversion area 1Cg in sequence, twisting the magnetic circuit from the positive direction of the Y axis to the negative direction of the Y axis, and then passes through the magnetic flux path connection area 1Ef with an air gap, and generates a magnetic field component in the negative direction of the Y axis in the air gap. In this way, the magnetic field to be measured in the X-axis direction can generate opposite magnetic field components in the positive and negative directions of the Y axis at the air gaps at different positions, forming a differential magnetic field; finally, the two magnetic circuits in the positive and negative directions of the Y axis are twisted back to the positive direction of the X axis by the XY direction conversion areas 1Cd and 1Ch, and then reach the external magnetic field through the magnetic field input areas 1Bxa and 1Bxb.

[0080] When the external magnetic field is in the negative direction of the X axis, it will enter from the magnetic field input area 1Bxa, 1Bxb, through the XY direction conversion area (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf, 1Cg, 1Ch) and the magnetic flux path connection area (1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef) to the magnetic field input area 1Ax, and return to the external magnetic field from the magnetic field input area 1Axa, 1Axb. Specifically, the opposite magnetic field components in the positive and negative directions of the Y axis are generated at the second air gap at different positions by converting the magnetic circuit to form a differential magnetic field.

[0081] Specifically, for the X-axis magnetic field measurement area 4x where the magnetic field induction direction is the X-axis direction, the second magnetic induction unit includes a magnetic induction unit 2Xa, a magnetic induction unit 2Xb, a magnetic induction unit 2Xc, and a magnetic induction unit 2Xd. Taking the case where the sensitivity direction of the second magnetic induction unit is the positive direction of the Y-axis and the external magnetic field is the positive direction of the X-axis as an example, a magnetic field component in the negative direction of the Y-axis is generated in the air gap of the magnetic flux path connection area 1Ea and 1Ef, and a magnetic field component in the positive direction of the Y-axis is generated in the air gap of the magnetic flux path connection area 1Ec and 1Ed. Since the sensitivity directions of the magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd are all in the positive direction of the Y-axis, the resistance values ​​of the magnetic induction units 2Xa and 2Xd increase, and the resistance values ​​of the magnetic induction units 2Xb and 2Xc decrease. Therefore, the series-parallel magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd can be selected to form a push-pull half-bridge or push-pull full-bridge structure to sense the magnetic field in the positive direction of the X-axis and generate a differential voltage signal; the magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd and a reference resistor with a fixed resistance value can also be selected to form a differential half-bridge or differential full-bridge structure to sense the magnetic field in the positive direction of the X-axis and generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (magnetic induction units 2Xa, 2Xb, 2Xc, 2Xd) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction).

[0082] Please refer to Figure 8 , Figure 8 This is a fifth magnetic flux path simulation schematic diagram provided in the embodiment of the present application. Specifically, Figure 8 For Figure 7 The magnetic flux path simulation diagram after the X-axis magnetic field measurement area 4x in the provided embodiment is added with the magnetic field to be measured in the positive direction of the X-axis; it can be seen that the magnetic field to be measured is gathered and amplified by the metal soft magnetic material and forms two magnetic flux paths that are mirror-symmetrical and in parallel relationship about the X-axis. In the air gaps of the magnetic flux path connection areas 1Ea, 1Ec, 1Ed, and 1Ef, obvious opposite magnetic field components in the positive and negative directions of the Y-axis can be generated to form a differential magnetic field, and the magnetic path basically does not pass through the first magnetic conductor 1D and the first sub-magnet 1F. Therefore, the influence of the external magnetic field in the X-axis direction on the Y-axis measurement can be ignored.

[0083] Please refer to Fig. 9 , Fig. 9 This is a sixth magnetic flux path simulation schematic diagram provided in the embodiment of the present application. Specifically, Fig. 9For Figure 7 The magnetic flux path simulation diagram after the Y-axis magnetic field measurement area 4y in the provided embodiment is added with the magnetic field to be measured in the positive direction of the Y-axis. The magnetic circuit after being concentrated and amplified passes through the first magnetic conductor 1D and the first magnetic separator 1F provided with an air gap in the positive direction of the Y-axis in half, and generates a magnetic field component in the positive direction of the Y-axis in the air gap. Since the sensitivity directions of the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb are both in the positive direction of the Y-axis, the resistance value of the first magnetic induction unit 2Ya decreases, and the first magnetic shielding magnetic induction unit 2Yb detects the magnetic field weakened by the shielding of the metal soft magnetic material, so the resistance value can be regarded as approximately unchanged. Therefore, a differential half-bridge or differential full-bridge structure can be used to sense the magnetic field in the positive direction of the Y-axis to generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a first magnetic signal output circuit for detecting the first direction (i.e., the Y-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (a first magnetic induction unit 2Ya, a first magnetic shielding magnetic induction unit 2Yb) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of the first magnetic signal output circuit for detecting the first direction (i.e., the Y-axis direction).

[0084] By the aforementioned Fig. 9 Analysis shows that the magnetic circuit generated by the external magnetic field in the Y-axis direction generates an extremely small magnetic field at the air gap of the magnetic flux path connection area 1Ea, 1Ec, 1Ed, and 1Ef used for X-axis measurement, and all are in the positive direction of the Y-axis. Therefore, when the magnetic flux path connection areas 1Ea, 1Ec, 1Ed, and 1Ef form a push-pull half-bridge or push-pull full-bridge structure, the external magnetic field in the Y-axis direction basically does not affect the differential voltage signal generated by the bridge, and thus has the characteristic of strong anti-interference ability.

[0085] Please refer to Fig.10 , Fig.10 A schematic diagram of the projection structure of the fourth multi-axis magnetic field sensor provided in an embodiment of the present application on a plane.

[0086] In some optional embodiments, the second magnetic conductor 2D also includes: a magnetic field input area (1Axa, 1Axb, 1Bxa, 1Bxb) connecting the two ends of the second magnetic conductor 2D; the magnetic field input area (1Fa, 1Fb) has a second magnetic field air gap in the second direction; the sensor adjusts the measurement sensitivity of the magnetic induction intensity in the second direction by adjusting the width of the second magnetic field air gap.

[0087] In some optional embodiments, the distances between the first magnetic induction unit 1Ya and the first magnetizer 1D and the second magnetizer 2D are all greater than the first preset distance; the sensor also includes: a third magnetic induction unit 2Z (2Za, 2Zb, 2Zc, 2Zd); wherein the projection of the third magnetic induction unit 2Z on the plane is located in the magnetic conductive area of ​​the first magnetizer 1D and adjacent to the first air gap area, or, the projection on the plane is located in the first air gap area and adjacent to the magnetic conductive area of ​​the first magnetizer 1D, or, the projection on the plane is located in the magnetic conductive area of ​​the second magnetizer 2D and adjacent to the second air gap area, or, The projection on the plane is located in the second air gap area and adjacent to the magnetic conductive area of ​​the second magnetic conductive body 2D; the magnetic induction sensitivity direction of the third magnetic induction unit 2Z is ​​the same as the magnetic induction sensitivity direction of the first magnetic induction unit 2Ya or the second magnetic induction unit 2X; wherein, the distance between the third magnetic induction unit 2Z and the first magnetic conductive body 1D or the second magnetic conductive body 2D is less than the second preset distance; the second preset distance is less than the first preset distance; the sensor forms a third magnetic signal output circuit for measuring the magnetic induction intensity in a third direction based on the third magnetic induction unit 2Z; wherein, the third direction is perpendicular to the plane (substrate 3).

[0088] Among them, the distances between the first magnetic shielding magnetic induction unit 2Yb and the first magnetizer 1D and the second magnetizer 2D are also greater than the above-mentioned first preset distance. Specifically, when the projection of the third magnetic induction unit 2Z on the plane is located in the magnetic conductive area of ​​the first magnetizer 1D and adjacent to the first air gap area, or, when the projection on the plane is located in the first air gap area and adjacent to the magnetic conductive area of ​​the first magnetizer 1D, the distance between the third magnetic induction unit 2Z and the first magnetizer 1D is less than the second preset distance. When the projection of the third magnetic induction unit 2Z on the plane is located in the magnetic conductive area of ​​the second magnetizer 2D and adjacent to the second air gap area, or, when the projection on the plane is located in the second air gap area and adjacent to the magnetic conductive area of ​​the second magnetizer 2D, the distance between the third magnetic induction unit 2Z and the second magnetizer 2D is less than the second preset distance.

[0089] Among them, refer to Fig.10The second magnetizer 2D includes a magnetic field input area (1Axa, 1Axb, 1Bxa, 1Bxb), an XY direction conversion area (1Ca, 1Cb, 1Cc, 1Cd, 1Ce, 1Cf, 1Cg, 1Ch), a magnetic flux path connection area (1Ea, 1Eb, 1Ec, 1Ed, 1Ee, 1Ef) and a magnetic separation magnetic path (1Fa, 1Fb). The first magnetizer 1D includes a magnetic field input area (1Axa, 1Axb) shared with the second magnetizer 2D. The first magnetic conductor 1D and the second magnetic conductor 2D can be made of metal soft magnetic material. The XY direction conversion area 1Ca includes three ports pointing to the positive direction of the X axis, the negative direction of the X axis, and the positive direction of the Y axis and is connected to the magnetic field input area 1Axa. The XY direction conversion area 1Cb is a corner pointing to the positive direction of the X axis and the negative direction of the Y axis. The XY direction conversion area 1Cc is a corner pointing to the negative direction of the X axis and the negative direction of the Y axis. The XY direction conversion area 1Cd includes three ports pointing to the positive direction of the X axis, the negative direction of the X axis, and the positive direction of the Y axis. And it is connected to the magnetic field output area 1Bxa, the XY direction conversion area 1Ce includes three ports pointing to the positive direction of the X-axis, the negative direction of the X-axis, and the negative direction of the Y-axis and is connected to the magnetic field input area 1Axb, the XY direction conversion area 1Cf is a corner pointing to the positive direction of the X-axis and the positive direction of the Y-axis, the XY direction conversion area 1Cg is a corner pointing to the negative direction of the X-axis and the positive direction of the Y-axis, and the XY direction conversion area 1Ch includes three ports pointing to the positive direction of the X-axis, the negative direction of the X-axis, and the negative direction of the Y-axis and is connected to the magnetic field output area 1Bxb. The magnetic flux path connection area 1Ea is connected to the XY direction conversion areas 1Ca and 1Cb in the Y-axis direction, the magnetic flux path connection area 1Eb is connected to the XY direction conversion areas 1Cb and 1Cc in the X-axis direction, the magnetic flux path connection area 1Ec is connected to the XY direction conversion areas 1Cc and 1Cd in the Y-axis direction, the magnetic flux path connection area 1Ed is connected to the XY direction conversion areas 1Ce and 1Cf in the Y-axis direction, the magnetic flux path connection area 1Ee is connected to the XY direction conversion areas 1Cf and 1Cg in the X-axis direction, and the magnetic flux path connection area 1Ef is connected to the XY direction conversion areas 1Cg and 1Ch in the Y-axis direction. The magnetic flux path connection areas 1Ea, 1Ec, 1Ed, and 1Ef are respectively provided with two air gaps penetrating the metal soft magnetic material along the X-axis direction.

[0090] In this embodiment, the magnetic separation circuit (1Fa, 1Fb) separates the magnetic circuit of the input magnetic field to be measured on the X axis. The magnetic separation circuit (1Fa, 1Fb) separates the magnetic circuit of the input magnetic field to be measured on the X axis, and then regulates the magnitude of the magnetic field at the air gaps connecting the magnetic flux path areas 1Ea, 1Ec, 1Ed, and 1Ef. When the magnetic separation circuit (1Fa, 1Fb) does not include an air gap, the magnetic circuit will mostly pass through the magnetic separation circuit (1Fa, 1Fb), and when the magnetic separation circuit (1Fa, 1Fb) includes an air gap, the magnetic separation ratio can be controlled by adjusting the number and width of the air gaps to adjust the overall sensitivity of the multi-axis magnetic field sensor.

[0091] Specifically, the external magnetic field direction is described as the positive direction of the X-axis. At this time, the air gap of the gold magnetic flux path connection area 1Ea, 1Ef generates a magnetic field component in the positive direction of the Y-axis, and the air gap of the magnetic flux path connection area 1Ec, 1Ed generates a magnetic field component in the negative direction of the Y-axis. Since the sensitivity directions of the second magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd are all in the positive direction of the Y-axis, the resistance values ​​of the second magnetic induction units 2Xa and 2Xd decrease, and the resistance values ​​of the second magnetic induction units 2Xb and 2Xc increase. Therefore, the second magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd can be selected in series and parallel to form a push-pull half-bridge or push-pull full-bridge structure to sense the magnetic field in the positive direction of the X-axis and generate a differential voltage signal; the second magnetic induction units 2Xa, 2Xb, 2Xc, and 2Xd can also be selected to form a differential half-bridge or differential full-bridge structure with a reference resistor with a fixed resistance value to sense the magnetic field in the positive direction of the X-axis and generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (magnetic induction units 2Xa, 2Xb, 2Xc, 2Xd) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of a second magnetic signal output circuit for detecting the second direction (i.e., the X-axis direction).

[0092] Among them, the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb are used to measure the magnetic field to be measured in the Y-axis direction. Taking the case where the external magnetic field is in the positive direction of the Y-axis as an example, the magnetic circuit that has been concentrated and amplified passes through the first magnetic conductor 1D with an air gap along the positive direction of the Y-axis, and generates a magnetic field component in the positive direction of the Y-axis in the first air gap. Since the sensitivity directions of the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb are both in the positive direction of the Y-axis, the resistance value of the first magnetic induction unit 2Ya decreases, and the first magnetic shielding magnetic induction unit 2Yb detects the magnetic field that is weakened by the shielding of the metal soft magnetic material, so the resistance value can be regarded as approximately unchanged. Therefore, a differential half-bridge or differential full-bridge structure can be used to sense the magnetic field in the positive direction of the Y-axis to generate a differential voltage signal.

[0093] Among them, the third magnetic induction units 2Za, 2Zb, 2Zc, and 2Zd are used to measure the magnetic field to be measured in the Z-axis direction. Taking the case where the external magnetic field is in the positive direction of the Z-axis as an example, due to the magnetic focusing effect of the metal soft magnetic material, the magnetic field will be distorted at the edge of the metal soft magnetic material when entering and exiting the metal soft magnetic material, and the magnetic field component in the negative direction of the Y-axis is generated at the third magnetic induction units 2Za and 2Zc, so the resistance value increases, and the magnetic field component in the positive direction of the Y-axis is generated at the third magnetic induction units 2Zb and 2Zd, so the resistance value decreases; and the degree of magnetic field distortion at the third magnetic induction units 2Zc and 2Zd is greater than the degree of magnetic field distortion at the third magnetic induction units 2Za and 2Zb. Therefore, the third magnetic induction units 2Za and 2Zb can be selected according to demand to form a push-pull half-bridge or push-pull full-bridge structure, or the third magnetic induction units 2Zc and 2Zd can be selected to form a push-pull half-bridge or push-pull full-bridge structure to sense the magnetic field in the positive direction of the Z-axis and generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a second magnetic signal output circuit for detecting a third direction (i.e., the Z-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (third magnetic induction unit 2Za, 2Zb, 2Zc, 2Zd) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of a third magnetic signal output circuit for detecting the third direction (i.e., the Z-axis direction).

[0094] Specifically, the magnetic field sensing direction of the Y-axis and Z-axis magnetic field measurement area 4yz is the Y-axis and Z-axis directions. In this embodiment, the Y-axis and Z-axis magnetic field measurement area 4yz includes an independently placed first magnetic conductor 1D, and the first magnetic conductor 1D is provided with a first air gap that penetrates the metal soft magnetic material along the X-axis direction. The first magnetic conductor 1D can also be regarded as a soft magnetic array distributed at a certain distance. When the external magnetic field is in the positive direction of the Y-axis, the working principle of the Y-axis and Z-axis magnetic field measurement area 4yz is the same as Figure 1 The Y-axis magnetic field measurement area 4y in the corresponding embodiment is basically the same. The magnetic circuit that has been concentrated and amplified passes through the first magnetic conductor 1D provided with a first air gap along the positive direction of the Y-axis, and generates a magnetic field component in the positive direction of the Y-axis in the first air gap. When the external magnetic field is in the positive direction of the Z-axis, the Y-axis Z-axis magnetic field measurement area 4yz can be regarded as a soft magnetic array distributed at a certain distance. Due to the magnetic focusing effect of the metal soft magnetic material, the magnetic field will be distorted at the edge of the metal soft magnetic material when entering and exiting the metal soft magnetic material, that is, the magnetic field to be measured in the Z-axis direction will generate magnetic field components in the X-axis and Y-axis directions. For the end where the magnetic field enters the metal soft magnetic material, the magnetic field component tends to point to the inside of the metal soft magnetic material; for the end where the magnetic field leaves the metal soft magnetic material, the magnetic field component tends to point to the outside of the metal soft magnetic material.

[0095] In industrial production, the actual thickness of the metal soft magnetic material is much greater than the actual thickness of the magnetic induction unit, and the magnetic induction unit is usually close to the upper plane (the positive side of the Z axis) or the lower plane (the negative side of the Z axis) of the metal soft magnetic material. Assume that the plane where the magnetic induction unit is located in this embodiment is close to the upper plane (the positive side of the Z axis) of the metal soft magnetic material, that is Fig.10 The magnetic induction units in the Z-axis measurement are all located above the metal soft magnetic material (on the positive side of the Z-axis). The third magnetic induction unit 2Z for Z-axis measurement is located in the vertical projection coverage area of ​​the soft magnetic array in the Y-axis Z-axis magnetic field measurement area 4yz, and as shown in FIG. Fig.10 As shown, the third magnetic induction unit 2Za is close to the negative edge of the metal soft magnetic material in the Y axis, and the third magnetic induction unit 2Zb is close to the positive edge of the metal soft magnetic material in the Y axis. The third magnetic induction units 2Zc and 2Zd are located at the air gap position of the soft magnetic array in the Y-axis and Z-axis magnetic field measurement area 4yz, and as shown Fig.10 As shown, the third magnetic induction unit 2Zc is close to the negative edge of the Y-axis of the metal soft magnetic material, and the magnetic induction unit 2Zd is close to the positive edge of the Y-axis of the metal soft magnetic material. It should be noted that, compared with the third magnetic induction units 2Za, 2Zb, 2Zc, and 2Zd, the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb (the distance from the metal soft magnetic material is greater than the first preset distance) are farther away from the Y-axis edge of the metal soft magnetic material, so the magnetic field to be measured in the Z-axis direction has basically no effect on the aggregation and distortion of the magnetic circuit on the first magnetic induction unit 2Ya and the first magnetic shielding magnetic induction unit 2Yb; similarly, the magnetic field to be measured in the Y-axis direction generates approximately the same Y-axis magnetic field at the third magnetic induction units 2Za and 2Zb, and approximately generates the same Y-axis magnetic field at the third magnetic induction units 2Zc and 2Zd, so that no differential magnetic field interfering with the Z-axis measurement is generated.

[0096] Please refer to Fig.11 , Fig.11 This is a schematic diagram of the projection structure of the fifth multi-axis magnetic field sensor provided in an embodiment of the present application on a plane.

[0097] Among them, refer to Fig.11 For Z-axis measurement, due to the magnetic focusing effect of the metal soft magnetic material, the magnetic field will be distorted at the edge of the metal soft magnetic material when entering and exiting the metal soft magnetic material, that is, the magnetic field to be measured in the Z-axis direction will generate magnetic field components in the X-axis and Y-axis directions. For the end where the magnetic field enters the metal soft magnetic material, the magnetic field component tends to point to the inside of the metal soft magnetic material; for the end where the magnetic field leaves the metal soft magnetic material, the magnetic field component tends to point to the outside of the metal soft magnetic material; therefore, a soft magnetic array symmetrically distributed at a certain distance can be used to achieve Z-axis measurement. This embodiment provides three different Z-axis magnetic field measurement structures as Z-direction conversion zones. One of the Z-direction conversion zone structures is located at Fig.11The Y-direction magnetic zone 1D in the middle position has the same Z-axis measurement principle as above. Fig.10 The measurement principle of the magnetic induction intensity in the Z-axis direction of the corresponding embodiment is basically the same, which is equivalent to merging the metal soft magnetic material of the Y-axis Z-axis magnetic field measurement area 4yz with the metal soft magnetic material of the X-axis magnetic field measurement area 4x; this embodiment is equivalent to using a soft magnetic array with two gaps symmetrically distributed about the X-axis. In actual application, the number of gaps and the shape of the soft magnetic material can be adjusted as needed to achieve Z-axis measurement without affecting Y-axis measurement. Another Z-direction conversion zone structure is located at Fig.11 On the left, the metal soft magnetic material is shared with the magnetic field input area (1Axa, 1Axb). The last Z-direction conversion area structure is located at Fig.11 On the right side, the metal soft magnetic material is shared with the magnetic field output area (1Bxa, 1Bxb, 1Bxc), which is equivalent to using a soft magnetic material with two gaps symmetrically distributed about the X axis. In practical applications, the number of gaps and the shape of the soft magnetic material in the magnetic field input area or the magnetic field output area can be adjusted as needed to achieve Z-axis measurement without affecting X-axis measurement.

[0098] Among them, one or more structures located in the magnetic field input area of ​​the first magnetic conductor 1D or the second magnetic conductor can be selected according to actual needs to measure the Z-axis magnetic field. In addition, since the degree of magnetic field distortion at the third magnetic induction units 2Zc and 2Zd is greater than the degree of magnetic field distortion at the third magnetic induction units 2Za and 2Zb, the magnetic induction units 2Za and 2Zb can be selected according to needs to form a push-pull half-bridge or push-pull full-bridge structure, or the magnetic induction units 2Zc and 2Zd can be selected to form a push-pull half-bridge or push-pull full-bridge structure to sense the magnetic field in the positive direction of the Z axis and generate a differential voltage signal. In addition, an open-loop signal conditioning circuit can be used to condition, amplify, temperature compensate and / or linearly correct the generated differential voltage signal to form an output signal of a second magnetic signal output circuit for detecting a third direction (i.e., the Z-axis direction); or a closed-loop signal conditioning circuit, a magnetic field feedback coil and a magnetic induction unit (magnetic induction unit 2Za, 2Zb or magnetic induction unit 2Zc, 2Zd) can be used to form a closed-loop magnetic field feedback structure; the generated differential voltage signal is amplified by a closed-loop signal conditioning circuit, and a feedback magnetic field is generated by a magnetic field feedback coil to achieve a dynamic balance of the magnetic field, and the feedback current of the magnetic field feedback coil is sampled to form an output signal of a third magnetic signal output circuit for detecting the third direction (i.e., the Z-axis direction).

[0099] In some optional embodiments, the sensor also includes: an external magnetic field magnetic induction unit 2A; the magnetic induction sensitivity direction of the external magnetic field magnetic induction unit 2A is the same as the magnetic induction sensitivity direction of the first magnetic induction unit 2Ya or the second magnetic induction unit 2X, and the distance between the external magnetic field magnetic induction unit 2A and the first magnetic conductor 1D and the second magnetic conductor 2D is greater than a third preset distance; the sensor forms the first magnetic signal output circuit based on the external magnetic field magnetic induction unit 2A and the first magnetic induction unit 2Ya; the sensor forms the second magnetic signal output circuit based on the external magnetic field magnetic induction unit 2A and the second magnetic induction unit 2X.

[0100] Among them, Figure 4 As shown, the multi-axis magnetic field sensor also includes an external magnetic field magnetic induction unit 2A "whose projection on the substrate 3 is located outside the magnetic conductive area of ​​the first magnetic conductive body and the second magnetic conductive body". The position selected by the external magnetic field magnetic induction unit 2A is far away from the metal soft magnetic material and is directly affected by the external magnetic field. Therefore, when detecting with low sensitivity and large measurement range, the first magnetic induction unit 2Ya at the first air gap can be selected to form a differential half-bridge or differential full-bridge structure with the external magnetic field magnetic induction unit 2A to induce the magnetic field in the Y-axis direction, and generate a differential voltage signal. The second magnetic induction unit 2X at the second air gap can also be selected to form a differential half-bridge or differential full-bridge structure with the external magnetic field magnetic induction unit 2A to induce the magnetic field in the X-axis direction, and generate a differential voltage signal. It should be noted that when the distance between the external magnetic field magnetic induction unit 2A and the metal soft magnetic material is greater than the third preset distance, the external magnetic field magnetic induction unit 2A will be directly affected by the external magnetic field, and the third preset distance can be determined according to the actual magnetic induction range.

[0101] In some optional embodiments, the sensor further includes: a resistor; the sensor forms the first magnetic signal output circuit based on the resistor and the first magnetic induction unit 1Ya; the sensor forms the second magnetic signal output circuit based on the resistor and the second magnetic induction unit 2X.

[0102] Since all the magnetic induction units of the multi-axis magnetic field sensor provided in the embodiment of the present application have the same sensitivity direction, the magnetic induction unit can select a magnetoresistive sensitive element whose sensitivity direction is parallel to its own plane, such as a tunnel magnetoresistor TMR, combined with a lead pad and a mechanical support housing, and adopt a single chip integration preparation process.

[0103] The functional modules in each embodiment of the present application may be integrated together to form an independent part, or each module may exist separately, or two or more modules may be integrated to form an independent part.

[0104] The above description is only an optional implementation manner of the embodiments of the present application, but the protection scope of the embodiments of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or replacements within the technical scope disclosed in the embodiments of the present application, which should be covered within the protection scope of the embodiments of the present application.

Claims

1. A multi-axis magnetic field sensor, characterized in that: The sensor comprises: A first magnetic conductor in a first direction, the first magnetic conductor having a first air gap in a second direction; wherein the first direction and the second direction are perpendicular to each other; A second magnetic conductor located in the same plane as the first magnetic conductor, the second magnetic conductor comprising: a magnetic field input area in the second direction located at both ends of the second magnetic conductor and a magnetic field conversion area located between the two ends of the second magnetic conductor; the magnetic field conversion area comprises a conversion magnetic circuit in the first direction; wherein the conversion magnetic circuit has a second air gap in the second direction; a first magnetic induction unit, wherein a projection of the first magnetic induction unit on the plane is located within the first air gap region; the sensor forms a first magnetic signal output circuit for measuring the magnetic induction intensity in the first direction based on the first magnetic induction unit; a second magnetic induction unit, wherein a projection of the second magnetic induction unit on the plane is located within the second air gap region; and the sensor forms a second magnetic signal output circuit for measuring the magnetic induction intensity in the second direction based on the second magnetic induction unit; The magnetic induction sensitivity directions of the first magnetic induction unit and the second magnetic induction unit are the same and parallel to the first direction.

2. The sensor according to claim 1, characterized in that in, The conversion magnetic circuit comprises a first conversion magnetic circuit and a second conversion magnetic circuit adjacent to each other; the first conversion magnetic circuit has a first conversion air gap in the second direction, and the second conversion magnetic circuit has a second conversion air gap in the second direction; The second magnetic induction unit includes: a first conversion magnetic induction unit and a second conversion magnetic induction unit; The projection of the first conversion magnetic induction unit on the plane is located in the first conversion air gap region, and the projection of the second conversion magnetic induction unit on the plane is located in the second conversion air gap region; The sensor forms the second magnetic signal output circuit based on the first conversion magnetic induction unit and the second conversion magnetic induction unit.

3. The sensor according to claim 1, characterized in that The sensor further comprises: a first magnetic shielding magnetic induction unit; the projection of the first magnetic shielding magnetic induction unit on the plane is located within the magnetic conductive area of ​​the first magnetic conductive body; wherein the magnetic induction sensitivity direction of the first magnetic shielding magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit; The sensor forms the first magnetic signal output circuit based on the first magnetic induction unit and the first magnetic shielding magnetic induction unit.

4. The sensor according to claim 1, characterized in that The sensor further comprises: a second magnetic shielding magnetic induction unit; the projection of the second magnetic shielding magnetic induction unit on the plane is located within the magnetic conductive area of ​​the second magnetic conductive body; wherein the magnetic induction sensitivity direction of the second magnetic shielding magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit; The sensor forms the second magnetic signal output circuit based on the second magnetic induction unit and the second magnetic shielding magnetic induction unit.

5. The sensor according to claim 1, characterized in that The sensor also includes: a first partial magnet in the first direction placed on the plane; the first partial magnet has a first partial magnetic air gap in the second direction; the sensor adjusts the measurement sensitivity of the magnetic induction intensity in the first direction by adjusting the width of the first partial magnetic air gap and / or the number of the first partial magnetic air gaps.

6. The sensor according to claim 1, characterized in that in, The second magnetic conductor also includes: a magnetic division circuit connecting the magnetic field input areas at both ends of the second magnetic conductor; the magnetic division circuit has a second magnetic division air gap in the second direction; the sensor adjusts the measurement sensitivity of the magnetic induction intensity in the second direction by adjusting the width of the second magnetic division air gap and / or the number of the second magnetic division air gaps.

7. The sensor according to claim 1, characterized in that in, The distances between the first magnetic induction unit and the first magnetic conductor and the second magnetic conductor are all greater than a first preset distance; The sensor further includes: a third magnetic induction unit; wherein the projection of the third magnetic induction unit on the plane is located in the magnetic conductive area of ​​the first magnetic conductive body and adjacent to the first air gap area, or the projection of the third magnetic induction unit on the plane is located in the first air gap area and adjacent to the magnetic conductive area of ​​the first magnetic conductive body, or the projection of the third magnetic induction unit on the plane is located in the magnetic conductive area of ​​the second magnetic conductive body and adjacent to the second air gap area, or the projection of the third magnetic induction unit on the plane is located in the second air gap area and adjacent to the magnetic conductive area of ​​the second magnetic conductive body; the magnetic induction sensitivity direction of the third magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit; Wherein, the distance between the third magnetic induction unit and the first magnetic conductor or the second magnetic conductor is less than a second preset distance; the second preset distance is less than the first preset distance; the sensor forms a third magnetic signal output circuit for measuring the magnetic induction intensity in a third direction based on the third magnetic induction unit; wherein the third direction is perpendicular to the plane.

8. The sensor according to claim 1, characterized in that The sensor further includes: an external magnetic field magnetic induction unit; the magnetic induction sensitivity direction of the external magnetic field magnetic induction unit is the same as the magnetic induction sensitivity direction of the first magnetic induction unit or the second magnetic induction unit, and the distance between the external magnetic field magnetic induction unit and the first magnetic conductor and the second magnetic conductor is greater than a third preset distance; The sensor forms the first magnetic signal output circuit based on the external magnetic field magnetic induction unit and the first magnetic induction unit; The sensor forms the second magnetic signal output circuit based on the external magnetic field magnetic induction unit and the second magnetic induction unit.

9. The sensor according to claim 1, characterized in that The sensor further comprises: a resistor; The sensor forms the first magnetic signal output circuit based on the resistor and the first magnetic sensing unit; The sensor forms the second magnetic signal output circuit based on the resistor and the second magnetic sensing unit.

10. The sensor according to any one of claims 1 to 9, characterized in that: The sensor further includes: an open-loop signal conditioning circuit; the open-loop signal conditioning circuit is electrically connected to the first magnetic signal output circuit and the second magnetic signal output circuit respectively; the sensor conditions, amplifies, temperature compensates and / or linearizes the electrical signals output by the first magnetic signal output circuit and the second magnetic signal output circuit based on the open-loop signal conditioning circuit to obtain a first conditioned signal; and outputs the first conditioned signal; or, The sensor also includes: a closed-loop signal conditioning circuit and a magnetic field feedback coil; the sensor forms a closed-loop magnetic field feedback structure based on the closed-loop signal conditioning circuit, the magnetic field feedback coil and the magnetic induction unit; the sensor conditions and amplifies, temperature compensates and / or linearizes the electrical signals output by the first magnetic signal output circuit and the second magnetic signal output circuit based on the closed-loop magnetic field feedback structure, and generates a feedback magnetic field to achieve a dynamic balance of the magnetic field, thereby obtaining a second conditioning signal; and outputs the second conditioning signal; wherein the second conditioning signal represents the feedback current of the magnetic field feedback coil when the magnetic field reaches a dynamic balance state.

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