An adjustable high-specification sampling device

Abstract

The present application relates to the field of semiconductor technology, and in particular to an adjustable high-specification sampling device, including a box body, and also including a temperature regulating box, the temperature regulating box is fixed on the side wall of the box body, and a liquid inlet and a liquid outlet are provided on the side wall of the temperature regulating box; a sampling pipeline, the sampling pipeline is provided with a plurality of sampling pipelines, and the plurality of sampling pipelines are fixedly connected to the inner wall of the temperature regulating box, and the sampling pipelines are connected to the box body; a heating wire, the heating wire is wound on the outer wall of the sampling pipeline; an ice water baffle, the ice water baffle is arranged at intervals on the inner wall of the temperature regulating box, and the ice water baffle is located near the top of the temperature regulating box. The present application has the effect of facilitating the control of the temperature in the sampling box, reducing the possibility of interfering bubbles caused by temperature during the process of conveying the fluid, thereby reducing the possibility of affecting the transportation of the fluid.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an adjustable high-specification sampling device. Background Art

[0002] Among the high-purity chemicals currently used in the semiconductor industry, the metal ion analysis capability is moving towards the PPQ level, and the particle size and distribution of the chemicals on the wafer are also emphasized. Therefore, during the sampling process, the environment in the sampling box must meet the requirements of reducing metal impurity contamination.

[0003] The existing sampling box includes a box body, a liquid inlet and a liquid outlet arranged on the box body, and an operation window is arranged on the side wall of the box body. The operation window is located in the middle of the box body, and the operation window is used to place or take out the sampling bottle. After the sampling bottle is placed in the box body, verification and testing are carried out.

[0004] During the fluid transportation process in the above-mentioned sampling box, interfering bubbles are caused due to the influence of temperature and flow rate, which affects the sampling of metal ions, and there is room for improvement. Summary of the invention

[0005] In order to facilitate the adjustment of the temperature in the sampling box and reduce the generation of bubbles during the transportation of metal ions, the present application provides an adjustable high-specification sampling device.

[0006] The present application provides an adjustable high-specification sampling device, which adopts the following technical solution:

[0007] An adjustable high-specification sampling device, comprising a box body, and further comprising:

[0008] A temperature regulating box, the temperature regulating box is fixed on the side wall of the box body, and a liquid inlet and a liquid outlet are provided on the side wall of the temperature regulating box;

[0009] Sampling pipelines, wherein a plurality of the sampling pipelines are provided, and the plurality of the sampling pipelines are all fixedly connected to the inner wall of the temperature regulating box, and the sampling pipelines are all communicated with the box body;

[0010] A heating wire, the heating wire being wound around the outer wall of the sampling pipeline;

[0011] An ice-water baffle is arranged at intervals on the inner wall of the temperature regulating box, and the ice-water baffle is located near the top of the temperature regulating box.

[0012] By adopting the above technical scheme, the setting of the sampling pipeline is convenient for sampling, the setting of the box is used for sampling, the extracted liquid in the sampling pipeline flows into the box, and cold water is filled into the thermostat through the liquid inlet. The setting of the heating line heats the thermostat, and the setting of the ice water baffle blocks the cold water in the thermostat, so that the temperature of the water in the thermostat is constant, the temperature of the sample liquid flowing through the sampling pipeline is controlled, and the possibility of interfering bubbles generated during the fluid transportation process due to temperature factors is reduced.

[0013] Optionally, a windmill-type filter is fixed on the top wall of the box body, a return air box is fixed on the side wall of the box body, the inner cavity of the return air box is connected to the inner cavity of the box body, the return air boxes are fixed on both sides of the box body, a return air cover is provided on the side of the windmill-type filter away from the box body, the return air cover is connected to the return air box, and the return air cover is connected to the inner cavity of the return air box.

[0014] By adopting the above technical solution, the arrangement with a windmill-type filter facilitates the circulation of gas and filters the incoming gas. The gas in the box enters the return air box and the return air cover to form a reflux, which has the effect of energy saving and rational use of clean gas.

[0015] Optionally, a plurality of automatic pressure regulating dampers are provided on the side walls of the return air cover, and the automatic pressure regulating dampers are located on opposite sides of the return air cover.

[0016] By adopting the above technical solution, the automatic pressure-regulating damper on one side is used to supply air to the box, and the automatic pressure-regulating damper on the other side is arranged to facilitate the release of the return gas in the return air box and the return air cover when the volume is large, so that the gas in the box, the return air box and the return air cover is appropriate. The design of the automatic external air supply and pressure relief damper device saves operating energy consumption to a great extent.

[0017] Optionally, a plurality of ice-water baffles are evenly spaced and fixed on the inner wall of the temperature regulating box, and the cold water pipe is wound around the plurality of ice-water baffles.

[0018] By adopting the above technical solution, the setting of the ice water partition makes it easy to fix the cold water pipe. Under the support of the ice water partition, the cold water pipe is bent to divide the inner cavity of the thermostat box, thereby making it easier to control the temperature in the thermostat box.

[0019] Optionally, two sections of the heating wire are arranged on the outer wall of the sampling pipeline along the height direction of the temperature regulating box.

[0020] By adopting the above technical solution, the heating wires near the upper part of the thermostat are set to accurately control the temperature of the water area, and the heating wires near the lower part of the thermostat are directly heated (quickly heating up and thawing effect).

[0021] Optionally, a mounting plate is fixed on the inner wall of the temperature control box, a driving rod is rotatably connected to the side wall of the mounting plate, a plurality of cranks are slidably connected to the side wall of the driving rod, a plurality of rotating shafts are fixed on the side walls of the ice-water partitions, the rotating shafts are rotatably connected to the mounting plate, the rotating shafts and the cranks are arranged in a one-to-one correspondence, the rotating shaft is fixedly connected to one end of the crank away from the driving rod, and a driving assembly for driving the driving rod to rotate is arranged on the side wall of the mounting plate.

[0022] By adopting the above technical solution, the driving assembly is started, the driving assembly drives the driving rod to rotate, the driving rod drives the crank to rotate, and the crank drives the corresponding ice-water baffle to rotate, so that the ice-water baffles are all arranged at an angle, so that the flow rate of the water in the temperature control box changes, thereby facilitating the control of the temperature in the temperature control box.

[0023] Optionally, the driving assembly includes a driving frame rotating on the side wall of the mounting plate, a connecting rod fixed on the side wall of the driving frame, and a connecting rod hinged on the side wall of the driving frame, one end of the connecting rod away from the driving frame is hinged to the side wall of the driving rod, and one end of the connecting rod away from the driving frame is hinged to the side wall of the driving rod.

[0024] By adopting the above technical solution, the staff rotates the driving frame, and the driving frame drives the connecting rod to rotate. Under the traction of the connecting rod, the connecting rod drives the driving rod to rotate, thereby driving the ice-water partition to rotate.

[0025] Optionally, a sliding groove is provided on the side wall of the driving rod, and the crank can slide along the length direction of the sliding groove. A power member for driving the crank to slide is provided on the side wall of the mounting plate.

[0026] By adopting the above technical solution, when it is necessary to adjust the distance between adjacent ice-water baffles, the power component is turned on, and the power component drives several cranks to slide simultaneously along the length direction of the sliding groove, so that the distance between the ice-water baffles changes, which facilitates the control of the flow rate of cold water entering the temperature control box.

[0027] Optionally, the power member includes a first rod rotating on the side wall of the mounting plate, a second rod rotating on the outer wall of the first rod, a third rod is hinged to the end of the first rod, a fourth rod is hinged to the end of the second rod, the third rod is hinged to the fourth rod, the hinged parts of the third rod and the fourth rod are coaxially connected to the crank, and the third rod and the fourth rod are both provided with a plurality of them.

[0028] By adopting the above technical solution, the staff rotates the first rod, the second rod rotates, the first rod and the second rod drive the third rod and the fourth rod to rotate, and under the traction of the third rod and the fourth rod, several ice-water baffles slide, and the distance between adjacent ice-water baffles is reduced, thereby facilitating the staff to adjust the distance between the ice-water baffles.

[0029] Optionally, the outer wall of the sampling pipeline is coated with a heating patch.

[0030] By adopting the above technical solution, the setting of the heating patch heats the sampling pipeline, thereby facilitating accurate control of the temperature in the temperature control box.

[0031] In summary, the present application includes at least one of the following beneficial technical effects:

[0032] 1. The sampling pipeline is used for sampling, the heating line is used to heat the sampling pipeline, and the thermostat is filled with cold water to lower the temperature of the sampling pipeline, so that the staff can control the temperature in the thermostat and reduce the impact of temperature.

[0033] 2. The setting of the ice-water baffle divides the inner cavity of the thermostat box to reduce the flow of water. The water temperature at different heights in the thermostat box is different. The setting of the ice-water baffle reduces the flow of water in the thermostat box, making it easier for staff to control the temperature in the thermostat box.

[0034] 3. The distance between adjacent ice water partitions can be adjusted to facilitate the control of the flow of water in the thermostat, which is more conducive to the staff to control the temperature in the thermostat. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a schematic diagram of the overall structure of the sampling verification device in Example 1 of the present application.

[0036] Figure 2 It is a cross-sectional view of the temperature regulating box in Example 1 of the present application, used to show the internal structure of the temperature regulating box.

[0037] Figure 3 It is a cross-sectional view of the temperature regulating box in the second embodiment of the present application.

[0038] Figure 4 It is a schematic diagram of the structure of the mounting plate in the second embodiment of the present application.

[0039] Figure 5 This is a structural display diagram of the driving rod in the second embodiment of the present application.

[0040] Figure numerals: 1. Box body; 2. Temperature control box; 3. Liquid inlet; 4. Liquid outlet; 5. Sampling pipeline; 6. Heating wire; 7. Ice water baffle; 8. Windmill filter; 9. Return air box; 10. Return air cover; 11. Automatic pressure regulating damper; 12. Mounting plate; 13. Driving rod; 14. Crank; 15. Rotating shaft; 16. Driving assembly; 161. Driving frame; 162. Connecting rod; 163. Connecting rod; 17. Sliding groove; 18. Power part; 181. First rod; 182. Second rod; 19. Third rod; 20. Fourth rod; 21. Heating patch; 22. Rotating tube; 23. Rotating handle; 24. Rotating rod; 25. Turntable. DETAILED DESCRIPTION

[0041] The following is combined with Figure 1-5 This application is described in further detail.

[0042] The embodiment of the present application discloses an adjustable high-specification sampling device.

[0043] Embodiment 1

[0044] Reference Figure 1 An adjustable high-specification sampling device includes a box body 1 and a temperature regulating box 2 fixed to the side wall of the box body 1 by screws, return air boxes 9 are welded and fixed to the side walls of the box body 1, and a return air cover 10 is fixed to the top wall of the box body 1 by bolts. The box body 1 is connected to the inner cavity of the return air box 9, and the gas in the box body 1 enters the return air box 9, and then enters the return air cover 10 to form a reflux, saving operating energy consumption.

[0045] Reference Figure 1 Mounting holes are provided on both side walls of the return air cover 10, and automatic pressure regulating dampers 11 are installed on the inner walls of the mounting holes. The automatic pressure regulating damper 11 on one side is used for air replenishment, and the automatic pressure regulating damper 11 on the other side is used for air release, so as to facilitate air replenishment into the box body 1 and exhaust when the gas pressure in the box body 1 is relatively high.

[0046] Reference Figure 1 A windmill filter 8 is installed on the top wall of the box body 1. The windmill filter 8 filters the gas entering the box body 1, and facilitates the circulation of reflux gas in the return air box 9 and the return air cover 10, reducing dust from entering the box body 1.

[0047] Reference Figure 2 A liquid inlet 3 is provided on one side wall of the thermostat 2, and a liquid outlet 4 is provided on the other side wall of the thermostat 2. Ice water enters the thermostat 2 from the liquid inlet 3, and the liquid outlet 4 is provided to facilitate the discharge of the liquid in the thermostat 2.

[0048] Reference Figure 2A plurality of fixing holes are provided on the upper and lower surfaces of the temperature regulating box 2, and sampling pipelines 5 are fixed in the two opposite fixing holes, and the outlet of the sampling pipeline 5 leads to the sampling box through a conduit; a heating wire 6 is wound on the outer wall of the sampling pipeline, and two sections of heating wire 6 are wound along the height direction of the sampling pipeline 5, the first end of the lower row is directly heated and heated (quickly thawed), and the second section of the upper row of water area is precisely temperature controlled.

[0049] Reference Figure 2 A plurality of ice-water baffles 7 are fixed at intervals on the inner wall of the temperature regulating box 2. The ice-water baffles 7 are arranged along the connecting direction of the liquid inlet 3 and the liquid outlet 4. Normally, the water temperature above the temperature regulating box 2 is different from the water temperature below the temperature regulating box. The setting of the ice-water baffles 7 reduces the flow of water, thereby making the water temperature in the temperature regulating box 2 constant, reducing the influence of bubbles caused by temperature difference on the analysis results.

[0050] Reference Figure 2 The outer wall of the sampling pipeline 5 is covered with a heating patch 21, and the outer wall of the sampling pipeline 5 is covered with a two-stage heating patch 21, which is convenient for heating the sampling pipeline 5, thereby facilitating accurate temperature control.

[0051] In the first embodiment of the present application, an adjustable high-specification sampling device is implemented according to the following principles: ice water is pre-filled into the box body 1 through the liquid inlet 3, and the ice water baffle 7 restricts the flow of water entering the temperature regulating box 2, so that the water temperature in the temperature regulating box 2 remains relatively constant. The sampling pipeline 5 is provided for sampling, and the sample liquid is input into the box body 1. External gas enters through the return air cover 10, and the relatively clean gas enters the box body 1 under the action of the windmill filter 8. The gas in the box body 1 enters the return air box 9, so that the return air box 9 and the gas in the return air cover 10 form a reflux, thereby reducing the operating energy consumption of the gas.

[0052] Embodiment 2

[0053] The difference between the second embodiment and the first embodiment is that: Figure 4 and Figure 5 A mounting plate 12 is fixed to the inner wall of the temperature regulating box 2 by screws, and a driving rod 13 is rotatably arranged on the bottom wall of the mounting plate 12. The driving rod 13 has a tendency to slide along the width direction of the mounting plate 12, and a sliding groove 17 is provided on the side of the driving rod 13 facing the mounting plate 12. The ice-water baffles 7 are all connected to the side of the mounting plate 12 away from the driving rod 13, and a rotating shaft 15 is welded and fixed to the side wall of the ice-water baffle 7. A crank 14 is welded and fixed to the end of the rotating shaft 15 away from the ice-water baffle 7, and the end of the crank 14 away from the rotating shaft 15 is slidingly connected to the inner wall of the sliding groove 17. The crank 14 is driven to rotate during the rotation of the driving rod 13, and the crank 14 drives the rotating shaft 15 to rotate, thereby driving the ice-water baffle 7 to rotate, so that the ice-water baffle 7 is arranged at different inclination angles, which is convenient for controlling the flow rate of the water in the temperature regulating box 2.

[0054] Reference Figure 5 A driving assembly 16 for driving the driving rod 13 to rotate is provided at the end of the mounting plate 12. The driving assembly 16 includes a driving frame 161 rotating on the end of the mounting plate 12, a connecting rod 162 welded and fixed on the driving frame 161, and a connecting rod 163 hinged on the side wall of the driving frame 161. One end of the connecting rod 163 away from the driving frame 161 is hinged to one end of the driving rod 13 away from the driving frame 161. One end of the connecting rod 162 away from the driving frame 161 is rotatably connected to the side wall of the driving rod 13 through a rotating shaft. In the process of rotating the driving frame 161, the connecting rod 162 is driven to rotate. Under the traction of the connecting rod 163, the rotation and sliding deviation of the driving rod 13 are more stable.

[0055] Reference Figure 3 and Figure 5 A power member 18 is provided at the end of the mounting plate 12 for driving the crank 14 to slide along the length direction of the sliding groove 17. The power member 18 drives a plurality of cranks 14 to slide, and the cranks 14 drive the ice-water baffles 7 to slide, so that the distance between adjacent ice-water baffles 7 is reduced, and the ice-water baffles 7 move to a position close to the liquid inlet 3, thereby more effectively preventing the flow rate of the water entering the temperature control box 2.

[0056] Reference Figure 5 The power member 18 includes a first rod 181 rotatably connected to the side wall of the mounting plate 12 through a rotating shaft and a second rod 182 rotatably connected to the first rod 181 through a rotating shaft. The rotating shaft of the second rod 182 is coaxially fixed with the rotating shaft of the first rod 181. The end of the first rod 181 is hinged with a third rod 19 through a rotating shaft. The end of the second rod 182 is rotatably connected with a fourth rod 20 through a rotating shaft. The third rod 19 and the fourth rod 20 are rotatably connected through a rotating shaft. In the present application, a plurality of third rods 19 and fourth rods 20 are provided. The third rods 19 are hinged in sequence to form a long strip. The hinge points of the third rods 19 and the fourth rods 20 are coaxially fixed with the corresponding rotating shaft 15. The first rod 181 is rotated, and the crank 14 slides along the length direction of the sliding groove 17 under the support of the second rod 182 and the traction of the third rod 19 and the fourth rod 20, thereby reducing the distance between the ice-water baffles 7.

[0057] Reference Figure 4 A rotating tube 22 is coaxially fixed on the rotating shaft of the first rod 181, and a rotating handle 23 is welded and fixed on the outer wall of the rotating tube 22. The rotating tube 22 is rotatably connected to the temperature regulating box 2. A rotating rod 24 is coaxially fixed on the rotating shaft of the driving frame 161. A groove is opened on the side wall of the rotating tube 22. The rotating rod 24 is located in the rotating tube 22. The driving frame 161 passes through the groove on the outer wall of the rotating tube 22 and is rotatably connected to the rotating tube 22. A turntable 25 is fixed at the end of the rotating rod 24. The turntable 25 is rotated to drive the rotating rod 24 to rotate.

[0058] In the second embodiment of the present application, the implementation principle of an adjustable high-specification sampling device is as follows: before loading ice water into the temperature regulating box 2, the first rod 181 is rotated, the first rod 181 and the second rod 182 are rotated, and under the traction of the third rod 19 and the fourth rod 20, a plurality of ice water baffles 7 are moved toward the direction of the liquid inlet 3, and the distance between the ice water baffles 7 is reduced, thereby restricting the flow of water entering the temperature regulating box 2, so that the temperature of the water in the temperature regulating box 2 is constant and the change of the water temperature is reduced; the driving frame 161 is rotated, and the driving frame 161 drives the connecting rod 162 to move, and the connecting rod 162 drives the driving rod 13 to rotate and deflect at the same time, driving the crank 14 to rotate, and the crank 14 drives the rotating shaft 15 to rotate, and the rotating shaft 15 drives the ice water baffle 7 to rotate, so that the flow speed of the water in the temperature regulating box 2 changes, which is convenient for controlling the water flow in the temperature regulating box 2, thereby facilitating the control of the temperature change of the water in the temperature regulating box 2.

[0059] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. An adjustable high-specification sampling device, comprising a housing (1), characterized in that: Also includes, A temperature regulating box (2), the temperature regulating box (2) being fixed on the side wall of the box body (1), and the side wall of the temperature regulating box (2) being provided with a liquid inlet (3) and a liquid outlet (4); A sampling pipeline (5), wherein a plurality of the sampling pipelines (5) are provided, and the plurality of the sampling pipelines (5) are all fixedly connected to the inner wall of the temperature regulating box (2), and the sampling pipelines (5) are all in communication with the box body (1); A heating wire (6), wherein the heating wire (6) is wound around the outer wall of the sampling pipeline (5); An ice-water baffle (7), wherein the ice-water baffle (7) is arranged at intervals on the inner wall of the temperature regulating box (2), and the ice-water baffle (7) is located near the top of the temperature regulating box (2); A mounting plate (12) is fixed on the inner wall of the temperature control box (2), a driving rod (13) is rotatably arranged on the side wall of the mounting plate (12), a plurality of cranks (14) are slidably connected to the side wall of the driving rod (13), a rotating shaft (15) is fixed on the side walls of the plurality of ice-water baffles (7), the rotating shaft (15) is rotatably connected to the mounting plate (12), the rotating shaft (15) and the crank (14) are arranged in a one-to-one correspondence, the rotating shaft (15) is fixedly connected to one end of the crank (14) away from the driving rod (13), and a driving assembly (16) for driving the driving rod (13) to rotate is arranged on the side wall of the mounting plate (12).

2. The adjustable high-specification sampling device according to claim 1, characterized in that: A windmill-type filter (8) is fixed on the top wall of the box body (1), a return air box (9) is fixed on the side wall of the box body (1), the inner cavity of the return air box (9) is communicated with the inner cavity of the box body (1), the return air boxes (9) are fixed on both sides of the box body (1), a return air cover (10) is provided on the side of the windmill-type filter (8) facing away from the box body (1), the return air cover (10) is communicated with the return air box (9), and the return air cover (10) is communicated with the inner cavity of the return air box (9).

3. The adjustable high-specification sampling device according to claim 2, characterized in that: A plurality of automatic pressure regulating dampers (11) are arranged on the side wall of the return air cover (10), and the automatic pressure regulating dampers (11) are located on two opposite sides of the return air cover (10).

4. The adjustable high-specification sampling device according to claim 1, characterized in that: Two sections of the heating wire (6) are arranged on the outer wall of the sampling pipeline (5) along the height direction of the temperature regulating box (2).

5. The adjustable high-specification sampling device according to claim 1, characterized in that: The driving assembly (16) comprises a driving frame (161) rotating on the side wall of the mounting plate (12), a connecting rod (162) fixed on the side wall of the driving frame (161), and a connecting rod (163) hinged on the side wall of the driving frame (161), one end of the connecting rod (162) away from the driving frame (161) is hinged to the side wall of the driving rod (13), and one end of the connecting rod (163) away from the driving frame (161) is hinged to the side wall of the driving rod (13).

6. The adjustable high-specification sampling device according to claim 5, characterized in that: A sliding groove (17) is provided on the side wall of the driving rod (13), and the crank (14) can slide along the length direction of the sliding groove (17). A power member (18) for driving the crank (14) to slide is provided on the side wall of the mounting plate (12).

7. The adjustable high-specification sampling device according to claim 6, characterized in that: The power member (18) comprises a first rod (181) rotating on the side wall of the mounting plate (12), and a second rod (182) rotating on the outer wall of the first rod (181); a third rod (19) is hingedly connected to the end of the first rod (181); a fourth rod (20) is hingedly connected to the end of the second rod (182); the third rod (19) is hingedly connected to the fourth rod (20); the hinged parts of the third rod (19) and the fourth rod (20) are coaxially connected to the crank (14); and a plurality of the third rod (19) and the fourth rod (20) are provided.

8. The adjustable high-specification sampling device according to claim 1, characterized in that: The outer wall of the sampling pipeline (5) is coated with a heating patch (21).

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