Silicon rod cutting liquid recovery and processing system

Abstract

The present invention provides a silicon rod cutting liquid recovery and processing system, which belongs to the technical field of crystalline silicon cutting. The silicon rod cutting liquid recovery and processing system provided by the present invention includes a collection tank arranged on a machine body and located on both sides of a slide rail, a recovery port is provided in the middle of the two collection tanks located below the diamond cutting line, a recovery chamber with a liquid discharge port is connected below the recovery port, a filter assembly for filtering the cutting liquid is provided at the recovery port, and a concentrating mechanism is provided in each collection tank, and the concentrating mechanism is used to concentrate the cutting liquid and crystalline silicon debris located on both sides of the recovery port in the collection tank into the recovery port. The present invention can collect the cutting liquid and crystalline silicon debris on the entire slide rail through two collection tanks, and the cutting liquid and crystalline silicon debris in the collection tank are concentrated and collected at the recovery port through the concentrating mechanism, thereby improving the recovery effect of the cutting liquid and reducing the waste of crystalline silicon debris.

Description

Technical Field

[0001] The invention belongs to the technical field of crystalline silicon cutting, and more specifically, relates to a silicon rod cutting liquid recovery and processing system. Background Art

[0002] Silicon is the most common and widely used semiconductor material. When molten silicon solidifies, silicon atoms are arranged in a diamond lattice to form crystal nuclei, which grow into grains with the same crystal plane orientation to form single crystal silicon. Longer single crystal silicon rods are generally cut and truncated using a single wire saw during processing.

[0003] A single-wire cutting machine usually uses a long slide rail as a carrier. The silicon rod is transferred by sliding a slide table for supporting the silicon rod on the slide rail. The silicon rod is cut by a diamond cutting wire. At the same time, a cutting fluid is required to cool the position where the diamond cutting wire cuts.

[0004] Currently, only a recovery box is set at the position of the machine body below the diamond cutting wire to recover the cutting fluid, and the cutting position of the diamond cutting wire is generally located in the middle of the entire slide rail; however, since the cutting fluid will flow along the entire slide rail and both sides through the movement of the slide table and the silicon rod, the cutting fluid recovery effect is poor and the silicon crystal debris is wasted. Summary of the invention

[0005] The object of the present invention is to provide a silicon rod cutting liquid recovery and processing system to solve the technical problems of poor cutting liquid recovery effect and waste of crystalline silicon debris in the prior art.

[0006] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: to provide a silicon rod cutting liquid recovery and processing system, including a collection tank arranged on a machine body and located on both sides of a slide rail, a recovery port is opened in the middle of the two collection tanks at a position below the diamond cutting wire, and a recovery chamber with a drain port is connected below the recovery port, and a filter assembly for filtering the cutting liquid is arranged at the recovery port, and a concentrating mechanism is arranged in each of the collection tanks, and the concentrating mechanism is used to concentrate the cutting liquid and crystalline silicon debris located on both sides of the recovery port in the collection tank into the recovery port.

[0007] In combination with the above technical solution, in a possible implementation, the filter assembly includes a coarse filter and a fine filter, and the coarse filter and the fine filter are arranged in the recovery port in an upper and lower distribution.

[0008] In combination with the above technical solution, in a possible implementation, the recovery port is stepped, the coarse filter is installed in the recovery port by bolts, and the fine filter is placed below the coarse filter.

[0009] In combination with the above technical solution, in a possible implementation manner, the coarse filter is lower than the upper opening of the recovery port.

[0010] In combination with the above technical solution, in a possible implementation method, the concentrating mechanism includes a scraper and a driving assembly, there are two scrapers and they are symmetrically distributed on both sides of the recovery port, the driving assembly is arranged on the machine body, and the driving assembly is used to simultaneously drive the two scrapers to slide toward each other in the collection trough, and the bottom surface and both side surfaces of the scraper are in contact with the inner wall of the collection trough.

[0011] In combination with the above technical scheme, in a possible implementation, the driving assembly includes a driving motor, a driving screw, a connecting plate and a folding telescopic cover. The machine body is provided with a accommodating chamber located on the outside of the corresponding collecting tank. The driving screw is rotatably connected in the accommodating chamber and is parallel to the length direction of the collecting tank. The driving motor is arranged on the machine body and is drivingly connected with the driving screw; a side opening is connected between the collecting tank and the corresponding accommodating chamber, and the bottom wall of the side opening is higher than the bottom wall of the collecting tank; the driving screw is divided into two sections of threads with opposite rotation directions from its middle part, and the two connecting plates are correspondingly threadedly connected to the threads of different rotation directions of the driving screw, and the connecting plate is connected to the scraper after passing through the side opening; the folding telescopic cover is arranged in the side opening and is connected to the connecting plate.

[0012] In combination with the above technical solution, in a possible implementation method, the inner bottom wall of the collecting trough is inclined and lowered from its two ends to the direction of the recovery port; the scraper includes a fixed plate and a lifting plate, the fixed plate is connected to the driving assembly and maintains horizontal movement, the top surface of the lifting plate is provided with a lifting groove and is slidably connected to the bottom of the fixed plate, and a tightening spring connected to the fixed plate is arranged in the lifting groove, the tightening spring is always in a compressed state, and the outer bottom wall of the lifting plate is in contact with the inner bottom wall of the collecting trough.

[0013] In combination with the above technical solution, in a possible implementation method, a release groove is provided at the bottom of the fixed plate, a connecting block is lifted and lowered in the release groove, and the top end of the tightening spring is connected to the connecting block; an automatic lifting component with a self-locking function is provided between the machine body and each of the fixed plates, and the connecting block is self-locked at the bottom of the release groove by the automatic lifting component when it is in an initial state; the automatic lifting component is used to drive the connecting block to slide upward when the fixed plate moves to the end of the collecting groove, and drive the connecting block to slide downward and reset when the fixed plate moves toward the recovery port.

[0014] In combination with the above technical scheme, in a possible implementation method, the automatic lifting assembly includes a lifting block, a transmission screw, a transmission gear and a transmission rack. A lower pressure groove is provided on one side of the release groove, and the transmission screw is vertically rotated and connected in the lower pressure groove. The lifting block slides and rises and falls in the lower pressure groove and is threadedly connected with the transmission screw. One end of the lifting block extends into the release groove and abuts against the top of the connecting block; the transmission gear is coaxially fixed on the transmission screw; a transmission hole is provided on the fixed plate, and one side of the transmission gear is located in the transmission hole; the transmission rack is horizontally fixed on the inner side walls at both ends of the collecting groove and is used to be inserted into the transmission hole. When the scraper moves toward the end of the collecting groove to insert the transmission rack into the transmission hole, the lifting block slides upward.

[0015] In combination with the above technical solution, in a possible implementation, each of the fixing plates has two groups of the automatic lifting components corresponding to the two sides of the release groove, and the two lifting blocks are both in contact with the top of the connecting block.

[0016] The beneficial effect of a silicon rod cutting fluid recovery and processing system provided by the present invention is that: compared with the prior art, the present invention can collect the cutting fluid and crystalline silicon debris on the entire slide rail through two collecting troughs, and the cutting fluid and crystalline silicon debris in the collecting troughs are collected at the recovery port through a central mechanism, and solid-liquid separation is achieved through filtration by a filter component. The recovery port is located directly below the diamond cutting line, and most of the cutting fluid and crystalline silicon debris can be collected, thereby reducing the workload of the central mechanism, improving the overall recovery effect of the cutting fluid and reducing the waste of crystalline silicon debris. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0018] Figure 1 A cross-sectional view of a silicon rod cutting liquid recovery and processing system provided by an embodiment of the present invention;

[0019] Figure 2 A partial cross-sectional view of a filter assembly provided by an embodiment of the present invention;

[0020] Figure 3 A partial cross-sectional view of a drive assembly provided by an embodiment of the present invention;

[0021] Figure 4 A cross-sectional view of the shape of the collecting tank provided by an embodiment of the present invention;

[0022] Figure 5 A cross-sectional view of a scraper and an automatic lifting assembly provided in an embodiment of the present invention.

[0023] Among them, the reference numerals in the figures are as follows:

[0024] 1. Machine body; 11. Slide rail; 12. Accommodating chamber; 13. Side port; 2. Collecting tank; 21. Recovery port; 22. Recovery chamber; 3. Filter assembly; 31. Coarse filter; 32. Fine filter; 4. Centralizing mechanism; 41. Scraper; 411. Fixing plate; 4111. Release slot; 4112. Connecting block; 412. Lifting plate; 4121. Lifting slot; 4122. Tightening spring; 42. Driving assembly; 421. Driving motor; 422. Driving screw; 423. Connecting plate; 424. Folding telescopic cover; 5. Automatic lifting assembly; 51. Lifting block; 511. Pressing slot; 52. Transmission screw; 53. Transmission gear; 54. Transmission rack; 541. Transmission hole. DETAILED DESCRIPTION

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention clearer, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the described embodiments are only part of the embodiments of the present application, rather than all the embodiments, and the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of this application.

[0026] It should be further explained that the drawings and implementation modes of the present invention mainly describe the concept of the present invention. On the basis of this concept, the specific forms and settings of some connection relationships, positional relationships, power mechanisms, power supply systems, hydraulic systems and control systems may not be fully described. However, on the premise that those skilled in the art understand the concept of the present invention, those skilled in the art can implement the above-mentioned specific forms and settings in a well-known manner.

[0027] When an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or indirectly connected to the other element.

[0028] The directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself. The directions or positional relationships indicated by the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0029] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" may include both "above" and "below". The device may also be positioned in other different ways, and the spatially relative descriptions used here are interpreted accordingly.

[0030] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, and "several" means one or more, unless otherwise clearly and specifically defined.

[0031] A silicon rod cutting liquid recovery and processing system provided by the present invention is now described.

[0032] like Figure 1 and Figure 2 As shown, one embodiment of the present invention provides a silicon rod cutting liquid recovery and processing system, including a collection tank 2 arranged on a body 1 and located on both sides of a slide rail 11, a recovery port 21 is opened in the middle of the two collection tanks 2 and located below the diamond cutting line, and a recovery chamber 22 with a drain port is connected below the recovery port 21, and a filter assembly 3 for filtering the cutting liquid is arranged at the recovery port 21, and a concentrating mechanism 4 is arranged in each collection tank 2, and the concentrating mechanism 4 is used to concentrate the cutting liquid and crystalline silicon debris located on both sides of the recovery port 21 in the collection tank 2 into the recovery port 21.

[0033] The present embodiment provides a silicon rod cutting fluid recovery and processing system. Compared with the prior art, the cutting fluid and crystalline silicon debris on the entire slide rail 11 can be collected through two collecting troughs 2. The cutting fluid and crystalline silicon debris in the collecting troughs 2 are collected and concentrated at the recovery port 21 through a centralizing mechanism 4, and solid-liquid separation is achieved through filtration by a filter assembly 3. The recovery port 21 is located directly below the diamond cutting line, and most of the cutting fluid and crystalline silicon debris can be collected, thereby reducing the workload of the centralizing mechanism 4, improving the overall recovery effect of the cutting fluid, and reducing the waste of crystalline silicon debris.

[0034] like Figure 1 to Figure 2 As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0035] The filter assembly 3 includes a coarse filter 31 and a fine filter 32 , and the coarse filter 31 and the fine filter 32 are arranged in the recovery port 21 in an upper and lower distribution.

[0036] Furthermore, the recovery port 21 is stepped, the coarse filter 31 is installed in the recovery port 21 by bolts, and the fine filter 32 is placed below the coarse filter 31 .

[0037] Furthermore, the coarse filter screen 31 is lower than the upper opening of the recovery port 21 , so that the cutting fluid and the crystalline silicon debris can enter the recovery port 21 more easily and conveniently for solid-liquid separation.

[0038] The coarse filter 31 and the fine filter 32 can perform dual filtration on the cutting fluid and the crystalline silicon debris, thereby improving the solid-liquid separation effect. The coarse filter 31 can be removed by unscrewing the bolts, and the fine filter 32 can be directly taken out from the recovery port 21, thereby improving the cleaning efficiency of the coarse filter 31 and the fine filter 32.

[0039] like Figures 2 to 3 As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0040] The concentrating mechanism 4 includes a scraper 41 and a driving assembly 42. There are two scrapers 41 and they are symmetrically distributed on both sides of the recovery port 21. The driving assembly 42 is set on the body 1. The driving assembly 42 is used to simultaneously drive the two scrapers 41 to slide toward each other in the collecting tank 2. The bottom surface and both side surfaces of the scraper 41 are in contact with the inner wall of the collecting tank 2.

[0041] When the collection tank 2 needs to be cleaned, the driving assembly 42 drives the two scrapers 41 to move from both ends of the collection tank 2 to the recovery port 21 at the same time, so that the scrapers 41 scrape the cutting liquid and crystalline silicon debris in the collection tank 2 into the recovery port 21, thereby improving the cleaning efficiency of the collection tank 2.

[0042] like Figures 2 to 3As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0043] The driving assembly 42 includes a driving motor 421, a driving screw 422, a connecting plate 423 and a folding telescopic cover 424. A accommodating chamber 12 located outside the corresponding collecting tank 2 is provided on the machine body 1. The driving screw 422 is rotatably connected in the accommodating chamber 12 and is parallel to the length direction of the collecting tank 2. The driving motor 421 is arranged on the machine body 1 and is transmission-connected to the driving screw 422; a side opening 13 is connected between the collecting tank 2 and the corresponding accommodating chamber 12, and the bottom wall of the side opening 13 is higher than the bottom wall of the collecting tank 2; the driving screw 422 is divided into two sections of threads with opposite rotation directions from its middle part, and two connecting plates 423 are correspondingly threadedly connected to the threads of the driving screw 422 with different rotation directions. The connecting plate 423 passes through the side opening 13 and is connected to the scraper 41; the folding telescopic cover 424 is arranged in the side opening 13 and is connected to the connecting plate 423.

[0044] When the collection tank 2 needs to be cleaned, the driving motor 421 is started to rotate the driving screw 422, and the driving screw 422 simultaneously drives the two connecting plates 423 to move toward each other, thereby improving the efficiency of the synchronous movement of the two scrapers 41. The height of the side opening 13 and the setting of the folding telescopic cover 424 can prevent the cutting fluid and crystalline silicon debris from entering the side opening 13 as much as possible.

[0045] like Figure 4 and Figure 5 As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0046] The inner bottom wall of the collecting trough 2 is inclined and lowered from its two ends to the direction of the recovery port 21; the scraper 41 includes a fixed plate 411 and a lifting plate 412, the fixed plate 411 is connected to the driving component 42 and maintains horizontal movement, the top surface of the lifting plate 412 is provided with a lifting groove 4121 and is slidably connected to the bottom of the fixed plate 411, and a tightening spring 4122 connected to the fixed plate 411 is arranged in the lifting groove 4121, the tightening spring 4122 is always in a compressed state, and the outer bottom wall of the lifting plate 412 fits with the inner bottom wall of the collecting trough 2.

[0047] The relative inclination of the bottom wall of the collecting tank 2 can improve the efficiency of the cutting fluid and crystalline silicon debris entering the recovery port 21; when the driving component 42 drives the scraper 41 to move, the tightening spring 4122 can always press the lifting plate 412 downward against the bottom wall of the collecting tank 2, thereby improving the scraper 41's efficiency in scraping off the cutting fluid and crystalline silicon debris in the collecting tank 2.

[0048] like Figures 4 to 5 As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0049] A release groove 4111 is provided at the bottom of the fixed plate 411, and a connecting block 4112 is lifted and lowered in the release groove 4111, and the top of the tightening spring 4122 is connected to the connecting block 4112; an automatic lifting component 5 with a self-locking function is provided between the body 1 and each fixed plate 411, and the connecting block 4112 is self-locked at the bottom of the release groove 4111 through the automatic lifting component 5 when it is in the initial state; the automatic lifting component 5 is used to drive the connecting block 4112 to slide upward when the fixed plate 411 moves to the end of the collecting tank 2, and drive the connecting block 4112 to slide downward and reset when the fixed plate 411 moves toward the recovery port 21.

[0050] Since the closer the scraper 41 is to the end of the collecting tank 2, the higher the height of the lifting plate 412 and the compression degree of the tension spring 4122, and the frequency of cleaning the collecting tank 2 is not high, the scraper 41 is in the initial state at the end of the collecting tank 2 for a long time. In order to reduce the workload of the tension spring 4122 and extend its service life, when the scraper 41 is reset to the end of the collecting tank 2, the automatic lifting assembly 5 drives the connecting block 4112 to move upward in the release groove 4111, reducing the compression degree of the tension spring 4122. When the scraper 41 moves toward the recovery port 21 again, the automatic lifting assembly 5 drives the connecting block 4112 to reset and lock the position of the connecting block 4112, so that the tension spring 4122 returns to the working state again.

[0051] like Figures 4 to 5 As shown, the present invention provides a specific implementation method based on the above implementation method as follows:

[0052] The automatic lifting assembly 5 includes a lifting block 51, a transmission screw 52, ​​a transmission gear 53 and a transmission rack 54. A lower pressure groove 511 is provided on one side of the release groove 4111. The transmission screw 52 is vertically rotated and connected in the lower pressure groove 511. The lifting block 51 slides and rises in the lower pressure groove 511 and is threadedly connected with the transmission screw 52. One end of the lifting block 51 extends into the release groove 4111 and abuts against the top of the connecting block 4112. The transmission gear 53 is coaxially fixed on the transmission screw 52. A transmission hole 541 is provided on the fixing plate 411. One side of the transmission gear 53 is located in the transmission hole 541. The transmission rack 54 is horizontally fixed on the inner side walls at both ends of the collecting tank 2 and is used to be inserted into the transmission hole 541. When the scraper 41 moves toward the end of the collecting tank 2 to insert the transmission rack 54 into the transmission hole 541, the lifting block 51 slides upward. There is a self-locking thread between the lifting block 51 and the transmission screw 52.

[0053] When the scraper 41 moves to the end of the collecting trough 2, the transmission rack 54 is inserted into the transmission hole 541 and meshes with the transmission gear 53. As the scraper 41 moves, the transmission rack 54 drives the transmission gear 53 to rotate, and the transmission gear 53 drives the transmission screw 52 to rotate. The transmission screw 52 drives the lifting block 51 to rise, and the elastic force of the tensioning spring 4122 drives the connecting block 4112 to rise accordingly, thereby improving the release efficiency of the compression force of the tensioning spring 4122.

[0054] When the scraper 41 moves toward the recovery port 21, the transmission rack 54 reverses the transmission gear 53 and the transmission screw 52, ​​the lifting block 51 slides downward and drives the connecting block 4112 to reset, and the self-locking function between the lifting block 51 and the transmission screw 52 prevents the transmission gear 53 and the transmission rack 54 from rotating after separation, thereby improving the stability of the connecting block 4112 positioned in the working position.

[0055] Furthermore, each fixing plate 411 has two sets of automatic lifting components 5 corresponding to the two sides of the release slot 4111, and the two lifting blocks 51 are both in contact with the top of the connecting block 4112. The two sets of automatic lifting components 5 can exert a more uniform downward pressure on the connecting block 4112 and improve fault tolerance.

[0056] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

[0057] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0058] Unless otherwise specifically stated, the relative arrangement, numerical expressions and numerical values ​​of the parts and steps set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to those of ordinary skill in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be considered as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so that once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

Claims

1. A silicon rod cutting liquid recovery and processing system, characterized in that: The invention comprises a collecting tank (2) arranged on a machine body (1) and located on both sides of a slide rail (11); a recovery port (21) is provided in the middle of the two collecting tanks (2) at a position below the diamond cutting wire; a recovery chamber (22) with a liquid discharge port is connected below the recovery port (21); a filter assembly (3) for filtering cutting liquid is provided at the recovery port (21); a concentrating mechanism (4) is provided in each of the collecting tanks (2); the concentrating mechanism (4) is used to concentrate the cutting liquid and crystalline silicon debris located on both sides of the recovery port (21) in the collecting tank (2) into the recovery port (21); The centralizing mechanism (4) comprises a scraper (41) and a driving assembly (42), wherein the scraper (41) has two and is symmetrically distributed on both sides of the recovery port (21), and the driving assembly (42) is arranged on the machine body (1), and the driving assembly (42) is used to simultaneously drive the two scrapers (41) to slide towards each other in the collection tank (2), and the bottom surface and both side surfaces of the scraper (41) are in contact with the inner wall of the collection tank (2); The inner bottom wall of the collecting trough (2) is inclined downward from its two ends to the direction of the recovery port (21); the scraper (41) comprises a fixed plate (411) and a lifting plate (412); the fixed plate (411) is connected to the driving assembly (42) and keeps horizontal movement; the top surface of the lifting plate (412) is provided with a lifting groove (4121) and is slidably connected to the bottom of the fixed plate (411); a tensioning spring (4122) connected to the fixed plate (411) is arranged in the lifting groove (4121); the tensioning spring (4122) is always in a compressed state; the outer bottom wall of the lifting plate (412) is in contact with the inner bottom wall of the collecting trough (2); A release groove (4111) is provided at the bottom of the fixed plate (411), a connection block (4112) is lifted in the release groove (4111), and the top end of the tension spring (4122) is connected to the connection block (4112); an automatic lifting component (5) with a self-locking function is provided between the machine body (1) and each of the fixed plates (411), and the connection block (4112) is self-locked at the bottom of the release groove (4111) by the automatic lifting component (5) when it is in an initial state; the automatic lifting component (5) is used to drive the connection block (4112) to slide upward when the fixed plate (411) moves to the end of the collecting tank (2), and to drive the connection block (4112) to slide downward and reset when the fixed plate (411) moves toward the recovery port (21).

2. A silicon rod cutting liquid recovery and processing system according to claim 1, characterized in that: The filter assembly (3) comprises a coarse filter (31) and a fine filter (32), and the coarse filter (31) and the fine filter (32) are arranged in an upper and lower distribution in the recovery port (21).

3. A silicon rod cutting liquid recovery and processing system as claimed in claim 2, characterized in that: The recovery port (21) is in a stepped shape, the coarse filter (31) is installed in the recovery port (21) by means of bolts, and the fine filter (32) is placed below the coarse filter (31).

4. A silicon rod cutting liquid recovery and processing system as claimed in claim 3, characterized in that: The coarse filter screen (31) is lower than the upper opening of the recovery port (21).

5. A silicon rod cutting liquid recovery and processing system according to claim 1, characterized in that: The driving assembly (42) comprises a driving motor (421), a driving screw (422), a connecting plate (423) and a folding telescopic cover (424); the machine body (1) is provided with a receiving chamber (12) located outside the corresponding collecting tank (2); the driving screw (422) is rotatably connected in the receiving chamber (12) and parallel to the length direction of the collecting tank (2); the driving motor (421) is arranged on the machine body (1) and is drivingly connected to the driving screw (422); the collecting tank (2) and the corresponding The accommodating chamber (12) is connected with a side opening (13), and the bottom wall of the side opening (13) is higher than the bottom wall of the collecting tank (2); the driving screw (422) is divided into two sections of threads with opposite rotation directions from its middle part, and the two connecting plates (423) are correspondingly connected to the threads of different rotation directions of the driving screw (422), and the connecting plate (423) passes through the side opening (13) and is connected to the scraper (41); the folding telescopic cover (424) is arranged in the side opening (13) and is connected to the connecting plate (423).

6. A silicon rod cutting liquid recovery and processing system according to claim 1, characterized in that: The automatic lifting assembly (5) comprises a lifting block (51), a transmission screw (52), a transmission gear (53) and a transmission rack (54); a lower pressing groove (511) is provided on one side of the release groove (4111); the transmission screw (52) is vertically rotatably connected in the lower pressing groove (511); the lifting block (51) is slidably lifted and lowered in the lower pressing groove (511) and is threadedly connected to the transmission screw (52); one end of the lifting block (51) extends into the release groove (4111) and abuts against the upper side of the connection block (4112) The transmission gear (53) is coaxially fixed on the transmission screw (52); a transmission hole (541) is provided on the fixing plate (411), and one side of the transmission gear (53) is located in the transmission hole (541); the transmission rack (54) is horizontally fixed on the inner side walls at both ends of the collecting trough (2) and is used to be inserted into the transmission hole (541); when the scraper (41) moves toward the end of the collecting trough (2) so that the transmission rack (54) is inserted into the transmission hole (541), the lifting block (51) slides upward.

7. A silicon rod cutting liquid recovery and processing system according to claim 6, characterized in that: Each of the fixing plates (411) has two groups of automatic lifting components (5) correspondingly located on both sides of the release slot (4111), and the two lifting blocks (51) are both in contact with the top of the connecting block (4112).

Images