A kind of upper hanging type crucible equipment and using method
Through the design of the upper lifting crucible equipment, the overlapping area of the heat dissipation holes is adjusted, and the problems of poor heat dissipation effect and inaccurate temperature control in the prior art are solved, and the stable growth and quality improvement of silicon carbide crystals are achieved.
Patent Information
- Application Number
- CN202411118587.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-15
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2044-08-15
AI Technical Summary
In the existing silicon carbide single crystal growth process, the poor heat dissipation effect of the crucible equipment and the insufficient temperature control are limited to the stable growth and quality improvement of the crystal.
An upper lifting crucible device is designed to adjust the overlapping area of the heat dissipation hole through a movable connecting sleeve and a movable sleeve to adjust the heat dissipation ability of the crucible body, thereby accurately controlling the temperature in the crucible, especially for the seed center and edge. The temperature difference is adjusted.
The radial temperature gradient of seed crystals is improved, the degree of protruding ring of silicon carbide crystals is reduced, the surface stress is reduced, and the crystal quality and growth stability are improved.
Smart Images
Figure CN118668292B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of artificial crystal growth, and in particular to an upper hanging type crucible device and a use method thereof. Background Art
[0002] At present, the physical vapor transport method (PVT method) is the mainstream process technology for growing silicon carbide single crystals. The characteristics of this technology are that the silicon carbide polycrystalline raw material is placed at the bottom of the graphite crucible, the silicon carbide seed crystal is bonded to the graphite seed crystal seat, and installed on the upper part of the graphite crucible. The silicon carbide polycrystalline raw material at the bottom of the graphite crucible is heated and sublimated, so that the silicon carbide single crystal is grown on the silicon carbide seed crystal. In the process of silicon carbide crystal growth, it is necessary to ensure the temperature gradient of the graphite crucible with low temperature on the top and high temperature on the bottom, so as to achieve stable growth of silicon carbide crystals, reduce the radial temperature gradient of the seed crystal, and reduce the degree of convex ring of the silicon carbide crystal, which is beneficial to reduce the surface stress of the silicon carbide crystal and improve the crystal quality.
[0003] The crucible equipment in the related art has technical problems such as poor heat dissipation and inaccurate temperature control in the crucible, which limits the stable growth and quality improvement of silicon carbide crystals. Summary of the invention
[0004] The present invention provides an upper hanging crucible device and a use method thereof, which can adjust the heat dissipation capacity of the crucible, thereby accurately controlling the temperature in the crucible and ensuring the stability of crystal growth.
[0005] The embodiments of the present invention can be implemented as follows:
[0006] An embodiment of the present invention provides a top-hanging crucible device, comprising:
[0007] Crucible body;
[0008] A crucible shaft, which is arranged above the crucible body;
[0009] A connecting sleeve, which is movably disposed on the top of the crucible body and connected to the crucible shaft, the connecting sleeve is provided with a heat dissipation hole, a cavity is formed between the connecting sleeve and the crucible body, and the heat dissipation hole is in communication with the cavity;
[0010] A movable sleeve, wherein the movable sleeve and the connecting sleeve are movably connected, and the movable sleeve is provided with a movable hole; wherein the movable sleeve is used to move relative to the connecting sleeve to adjust the size of the overlapping area between the movable hole and the heat dissipation hole.
[0011] Optionally, the movable sleeve includes an upper sleeve and an outer sleeve, the upper sleeve is movably disposed above the connecting sleeve, the outer sleeve is movably disposed on the side of the connecting sleeve, and the movable holes are provided on both the upper sleeve and the outer sleeve.
[0012] Optionally, the movable hole includes a first movable hole and a second movable hole, the first movable hole is arranged on the outer sleeve, and the second movable hole is arranged on the upper sleeve.
[0013] Optionally, the first movable hole is arranged along the horizontal direction, and the second movable hole is arranged along the vertical direction.
[0014] Optionally, the heat dissipation hole includes a first heat dissipation hole and a second heat dissipation hole, the first heat dissipation hole passes through the side surface of the connecting sleeve, the second heat dissipation hole passes through the top surface of the connecting sleeve, the first heat dissipation hole cooperates with the first movable hole, and the second heat dissipation hole cooperates with the second movable hole.
[0015] Optionally, an outer wall of the connecting sleeve is provided with an external thread, and the outer sleeve and the connecting sleeve are threadedly connected.
[0016] Optionally, the upper hanging crucible device further comprises a locking piece, the movable sleeve is connected to the connecting sleeve via the locking piece, and the movable sleeve is connected to the crucible shaft via the locking piece.
[0017] Optionally, a raised ring is provided on the top surface of the crucible body, and a position of the raised ring corresponds to an edge position of a seed crystal in the crucible body.
[0018] Optionally, the cross-section of the raised ring is rectangular, trapezoidal or triangular, and the raised ring is a single-ring or multi-ring structure.
[0019] An embodiment of the present invention further provides a method for using a hanging crucible device, wherein the hanging crucible device is used to perform work, and the method for using the hanging crucible device comprises:
[0020] The connecting sleeve is arranged on the top of the crucible body;
[0021] Rotate the outer sleeve to adjust the overlapping area of the first movable hole and the first heat dissipation hole, and then connect the outer sleeve and the connecting sleeve through a locking member;
[0022] The upper sleeve is rotated to adjust the overlapping area of the second movable hole and the second heat dissipation hole, and then the upper sleeve and the crucible shaft are connected by a locking member.
[0023] Optionally, the method for using the upper hanging crucible device further comprises:
[0024] The outer cover is rotated to move up and down, thereby adjusting the overlapping area of the first active hole and the first heat dissipation hole in the vertical direction.
[0025] The beneficial effects of the upper hanging crucible device and the use method of the embodiment of the present invention include, for example:
[0026] The upper hanging crucible device comprises a crucible body, a crucible shaft, a connecting sleeve and a movable sleeve, wherein the crucible shaft is arranged above the crucible body, the connecting sleeve can be movably arranged on the top of the crucible body and connected to the crucible shaft, the connecting sleeve is provided with a heat dissipation hole, a cavity is formed between the connecting sleeve and the crucible body, the heat dissipation hole is communicated with the cavity, the movable sleeve and the connecting sleeve are movably connected, and the movable sleeve is provided with a movable hole; wherein the movable sleeve is used to move relative to the connecting sleeve to adjust the size of the overlapping area between the movable hole and the heat dissipation hole. When the upper hanging crucible equipment is in use, the connecting sleeve can be movably arranged on the top of the crucible body, the crucible shaft is connected to the connecting sleeve, the connecting sleeve is provided with heat dissipation holes for dissipating heat to the crucible body, the movable sleeve and the connecting sleeve are movably connected, the movable sleeve is provided with movable holes, the movable holes can cooperate with the heat dissipation holes, the movable sleeve can be movable relative to the connecting sleeve, so as to adjust the size of the overlapping area between the movable holes and the heat dissipation holes, thereby adjusting the size of the heat dissipation area, and realizing the adjustment of the heat dissipation capacity of the crucible body, so as to accurately control the temperature in the crucible, especially the temperature difference between the center and the edge of the seed crystal can be effectively adjusted, so as to improve the radial temperature gradient of the seed crystal, ensure the stability of crystal growth, and improve the crystal quality.
[0027] The method for using the upper hanging crucible device uses the upper hanging crucible device to work, and the method for using the upper hanging crucible device includes: setting the connecting sleeve on the top of the crucible body; rotating the outer sleeve to adjust the overlapping area of the first movable hole and the first heat dissipation hole, and then connecting the outer sleeve and the connecting sleeve through a locking piece; rotating the upper sleeve to adjust the overlapping area of the second movable hole and the second heat dissipation hole, and then connecting the upper sleeve and the crucible shaft through a locking piece. The method for using the upper hanging crucible device can adjust the heat dissipation capacity of the crucible body, thereby accurately controlling the temperature in the crucible, especially effectively adjusting the temperature difference between the center and edge of the seed crystal, improving the radial temperature gradient of the seed crystal, ensuring the stability of crystal growth, and improving the crystal quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.
[0029] Figure 1 This is a schematic structural diagram of the upper hanging crucible device provided in this embodiment.
[0030] Icons: 10-crucible body; 20-crucible shaft; 30-connecting sleeve; 40-heat dissipation hole; 41-first heat dissipation hole; 42-second heat dissipation hole; 50-movable sleeve; 51-upper sleeve; 52-outer sleeve; 60-movable hole; 61-first movable hole; 62-second movable hole; 70-locking piece; 80-raised ring; 100-upper hanging crucible equipment. DETAILED DESCRIPTION
[0031] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.
[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0033] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.
[0034] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear to indicate an orientation or position relationship, they are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the product of the invention is usually placed when used. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0035] In addition, the terms “first”, “second”, etc., if used, are merely used to distinguish between the descriptions and should not be understood as indicating or implying relative importance.
[0036] It should be noted that, in the absence of conflict, the features in the embodiments of the present invention may be combined with each other.
[0037] At present, the physical vapor transport method (PVT method) is the mainstream process technology for growing silicon carbide single crystals. The characteristics of this technology are that the silicon carbide polycrystalline raw material is placed at the bottom of the graphite crucible, the silicon carbide seed crystal is bonded to the graphite seed crystal seat, and installed on the upper part of the graphite crucible. The silicon carbide polycrystalline raw material at the bottom of the graphite crucible is heated and sublimated, so that the silicon carbide single crystal is grown on the silicon carbide seed crystal. In the process of silicon carbide crystal growth, it is necessary to ensure the temperature gradient of the graphite crucible with low temperature on the top and high temperature on the bottom, so as to achieve stable growth of silicon carbide crystals, reduce the radial temperature gradient of the seed crystal, reduce the degree of convex ring of the silicon carbide crystal, and achieve flattening of the silicon carbide crystal, which is beneficial to reduce the surface stress of the silicon carbide crystal and improve the crystal quality.
[0038] The crucible equipment in the related art has technical problems such as poor heat dissipation and inaccurate temperature control in the crucible, which limits the stable growth and quality improvement of silicon carbide crystals.
[0039] Please refer to Figure 1 The present embodiment provides a top-mounted crucible device 100, which can effectively improve the above-mentioned technical problems, and can adjust the heat dissipation capacity of the crucible, so as to accurately control the temperature in the crucible and ensure the stability of crystal growth. The radial temperature gradient of the seed crystal is reduced by adjusting the heat dissipation structure, and the degree of protrusion ring of the silicon carbide crystal is reduced to achieve flattening of the silicon carbide crystal, which is beneficial to reducing the surface stress of the silicon carbide crystal and improving the crystal quality.
[0040] Please refer to Figure 1 The present embodiment provides a top-hanging crucible device 100 including a crucible body 10, a crucible shaft 20, a connecting sleeve 30 and a movable sleeve 50. The crucible shaft 20 is arranged above the crucible body 10. The connecting sleeve 30 is movably arranged on the top of the crucible body 10 and connected to the crucible shaft 20. The connecting sleeve 30 is provided with a heat dissipation hole 40. A cavity is formed between the connecting sleeve 30 and the crucible body 10. The cavity is connected to the heat dissipation hole 40. The movable sleeve 50 is movably connected to the connecting sleeve 30. The movable sleeve 50 is provided with a movable hole 60. The movable sleeve 50 is used to move relative to the connecting sleeve 30 to adjust the size of the overlapping area between the movable hole 60 and the heat dissipation hole 40. The crucible body 10 contains silicon carbide polycrystalline raw materials, and the silicon carbide seed crystal is installed on the top of the crucible body 10. The crucible body 10 is hoisted on the crucible shaft 20 through the connecting sleeve 30. The positions of some heat dissipation holes 40 of the connecting sleeve 30 correspond to the installation positions of the silicon carbide seed crystals at the top of the crucible body 10. During the heating process of the crucible body 10, the heat at the top of the crucible body 10 can be dissipated through the heat dissipation holes 40, thereby realizing the heat dissipation function.
[0041] In this embodiment, a cavity is provided inside the connection sleeve 30 , the heat dissipation hole 40 is connected to the cavity, and the top of the crucible body 10 is disposed in the cavity.
[0042] It should be noted that the crucible equipment in the prior art is to install the graphite crucible on the crucible shaft during use. Due to the heat conduction of the crucible shaft, the heat below the graphite crucible is lost, which is not conducive to the acquisition of a temperature gradient with a low temperature on the top and a high temperature on the bottom of the graphite crucible. It is often necessary to increase more heating power to achieve a temperature gradient effect with a low temperature on the top and a high temperature on the bottom of the graphite crucible; and the crucible equipment in the prior art cannot adjust the heat dissipation capacity, resulting in inaccurate temperature control in the crucible body. In order to solve this technical problem, the upper hanging crucible equipment 100 provided in this embodiment is in use, and the movable sleeve 50 and the connecting sleeve 30 are movably connected, and the movable sleeve 50 is provided with a movable hole 60, and the movable hole 60 can cooperate with the heat dissipation hole 40, and the movable sleeve 50 can be movable relative to the connecting sleeve 30, so as to adjust the size of the overlapping area of the movable hole 60 and the heat dissipation hole 40, thereby adjusting the size of the heat dissipation area, and realizing the adjustment of the heat dissipation capacity of the crucible body 10, thereby accurately controlling the temperature in the crucible and ensuring the stability of crystal growth.
[0043] In this embodiment, the movable sleeve 50 and the connecting sleeve 30 are rotatably connected. Specifically, by rotating the movable sleeve 50, the size of the overlapping area of the heat dissipation hole 40 and the movable hole 60 can be adjusted. During the rotation process, the heat dissipation hole 40 and the movable hole 60 can be completely closed, the heat dissipation hole 40 and the movable hole 60 can be partially overlapped, and the heat dissipation hole 40 and the movable hole 60 can also be completely overlapped. Heat flows out from the overlapping area of the heat dissipation hole 40 and the movable hole 60 to achieve heat dissipation. By rotating the movable sleeve 50, the heat dissipation capacity of the crucible body 10 can be adjusted.
[0044] It should also be noted that the movable sleeve 50 includes an upper sleeve 51 and an outer sleeve 52, wherein the upper sleeve 51 is movably disposed above the connecting sleeve 30, and the outer sleeve 52 is movably disposed on the side of the connecting sleeve 30, and movable holes 60 are provided on both the upper sleeve 51 and the outer sleeve 52. The outer sleeve 52 is rotatably disposed on the side of the connecting sleeve 30, and the upper sleeve 51 is rotatably disposed above the connecting sleeve 30.
[0045] Specifically, the movable hole 60 includes a first movable hole 61 and a second movable hole 62. The first movable hole 61 is provided in the outer sleeve 52, and the second movable hole 62 is provided in the upper sleeve 51. The first movable hole 61 is provided in the horizontal direction, and the second movable hole 62 is provided in the vertical direction.
[0046] In this embodiment, the heat dissipation hole 40 includes a first heat dissipation hole 41 and a second heat dissipation hole 42. The first heat dissipation hole 41 passes through the side surface of the connecting sleeve 30, and the second heat dissipation hole 42 passes through the top surface of the connecting sleeve 30. The first heat dissipation hole 41 cooperates with the first movable hole 61, and the second heat dissipation hole 42 cooperates with the second movable hole 62.
[0047] Specifically, when the crucible body 10 needs to dissipate heat, the outer sleeve 52 is rotated so that the first movable hole 61 and the first heat dissipation hole 41 partially overlap, and the heat of the crucible body 10 can flow out through the overlapping area of the first heat dissipation hole 41 and the first movable hole 61, thereby dissipating heat from the side; when it is necessary to increase the heat dissipation capacity, the outer sleeve 52 is continued to be rotated so that the first movable hole 61 and the first heat dissipation hole 41 completely overlap, at this time the overlapping area, that is, the heat dissipation area of the heat is maximized, so that the heat can be dissipated faster, thereby being more conducive to the heat dissipation regulation of the outer wall of the crucible body 10 and the surrounding area, and then to the temperature regulation of the corresponding part of the edge of the seed crystal. There is usually a certain temperature difference between the edge of the seed crystal and the center of the seed crystal, that is, there is a certain temperature gradient in the diameter direction of the seed crystal. The heat dissipation is changed by adjusting the overlapping area of the first heat dissipation hole 41 and the first movable hole 61, which is more conducive to the temperature gradient adjustment in the diameter direction of the seed crystal; by rotating the upper sleeve 51, the second movable hole 62 and the second heat dissipation hole 42 are overlapped, and the heat can flow out from the overlapping area of the second movable hole 62 and the second heat dissipation hole 42 to achieve heat dissipation. It is more advantageous to set an adjustable heat dissipation area on the upper part, which is more conducive to the adjustment of the heat dissipation capacity of the corresponding seed crystal center and the nearby area, thereby achieving the above-mentioned regional temperature adjustment. The outer sleeve 52 is rotated to adjust the overlapping area of the first movable hole 61 and the first heat dissipation hole 41, and the upper sleeve 51 is rotated to adjust the overlapping area of the second movable hole 62 and the second heat dissipation hole 42. The outer sleeve 52 can be used alone for adjustment (i.e., only the outer sleeve 52 is rotated for adjustment without rotating the upper sleeve 51 or only the upper sleeve 51 is rotated for adjustment without rotating the outer sleeve 52) to achieve the adjustment of the heat dissipation capacity of different areas, thereby achieving the temperature adjustment of different areas. The outer sleeve 52 and the upper sleeve 51 can also be rotated at the same time, and the matching adjustment is performed at the same time to achieve the multi-position precise adjustment of the heat dissipation capacity, thereby improving the temperature adjustment accuracy. Optionally, when it is necessary to increase the heat dissipation capacity, the outer sleeve 52 and the upper sleeve 51 are rotated to make the second movable hole 62 and the second heat dissipation hole 42 overlap, so that the heat can not only flow out from the overlapping area of the first movable hole 61 and the first heat dissipation hole 41, but also flow out from the overlapping area of the second movable hole 62 and the second heat dissipation hole 42, thereby achieving the maximum heat dissipation and multi-axis adjustment.
[0048] In this embodiment, the upper hanging crucible device 100 further includes a locking member 70, the movable sleeve 50 is connected to the connecting sleeve 30 through the locking member 70, and the movable sleeve 50 is connected to the crucible shaft 20 through the locking member 70. Before the crucible body 10 is heated, the positions of the connecting sleeve 30 and the movable sleeve 50 are adjusted, so as to adjust the overlapping area of the first movable hole 61 and the first heat dissipation hole 41 and the overlapping area of the second movable hole 62 and the second heat dissipation hole 42, and then the movable sleeve 50 and the connecting sleeve 30 are assembled through the locking member 70.
[0049] Specifically, the locking member 70 is a bolt.
[0050] In other embodiments, the outer wall of the connecting sleeve 30 is provided with an external thread, and the outer sleeve 52 is correspondingly provided with an internal thread. The outer sleeve 52 and the connecting sleeve 30 are threadedly connected, which can increase the connection area between the outer sleeve 52 and the connecting sleeve 30 and enhance the connection firmness. Moreover, when the heat dissipation capacity needs to be adjusted, the outer sleeve 52 is rotated to adjust the position of the outer sleeve 52 and the connecting sleeve 30 through the thread, so as to adjust the overlapping area of the first movable hole 61 and the first heat dissipation hole 41. The outer sleeve 52 can adjust the size of the overlapping area of the first movable hole 61 and the first heat dissipation hole 41 in the circumferential direction of the rotating outer sleeve 52, so as to adjust the heat dissipation capacity and realize that the overlapping area can be adjusted up and down in the axial direction. It can be understood that after the rotating outer sleeve 52 is rotated by the threaded connection, it moves upward away from the crucible, and the overlapping area of the first movable hole 61 and the first heat dissipation hole 41 moves upward away from the crucible accordingly, reducing heat dissipation. After the rotating outer sleeve 52 is rotated by the threaded connection, it moves downward toward the crucible, and the overlapping area of the first movable hole 61 and the first heat dissipation hole 41 moves downward toward the crucible accordingly, strengthening heat dissipation. The upper and lower positions of the overlapping area of the first movable hole 61 and the first heat dissipation hole 41 can be adjusted, which is more conducive to the heat dissipation adjustment of the crucible from top to bottom in the axial direction, and is conducive to obtaining the stable adjustment of the temperature required for crystal growth. That is, the size of the overlapping area can adjust the heat dissipation capacity, and the position of the overlapping area from the crucible can also be adjusted to adjust the heat dissipation, so as to be more conducive to the precise adjustment of the temperature at the top of the crucible.
[0051] It can be understood that when the crucible body 10 is heated, the temperature at the edge of the crucible body 10 is higher than the temperature in the middle of the crucible body 10, that is, the temperature of the seed crystal located in the middle is lower than the temperature of the seed crystal located at the edge. In order to obtain a relatively flat crystal, the temperature gradient of the seed crystals located at different positions in the diameter direction of the seed crystal needs to be reduced. Therefore, the top surface of the crucible body 10 in this embodiment is provided with a raised ring 80, and the position of the raised ring 80 corresponds to the edge position of the seed crystal in the crucible body 10. The heat at the edge position will pass through the raised ring 80 during the outflow process, thereby increasing the heat dissipation area, allowing the heat at the edge position to flow out faster, accelerating the heat dissipation at the edge position, and allowing the temperature of the seed crystal at the edge position to drop faster, thereby increasing the edge heat dissipation in the diameter direction of the seed crystal, and then reducing the temperature difference of the seed crystal at different positions in the diameter direction of the seed crystal, obtaining a relatively flat crystal, and improving the crystal quality.
[0052] In this embodiment, the cross section of the raised ring 80 is rectangular, trapezoidal or triangular. The raised ring 80 is a ring structure. In other embodiments, the number of the raised rings 80 can be set to multiple rings according to actual conditions to adjust the heat dissipation.
[0053] The embodiment of the present invention further provides a method for using a hanging crucible device. The hanging crucible device 100 is used to work. The method for using the hanging crucible device includes:
[0054] S1: placing the connecting sleeve 30 on the top of the crucible body 10 .
[0055] S2: rotating the outer sleeve 52 to adjust the overlapping area between the first movable hole 61 and the first heat dissipation hole 41 , and then connecting the outer sleeve 52 and the connecting sleeve 30 through the locking member 70 .
[0056] Specifically, the outer sleeve 52 is rotated, and the overlapping area of the first movable hole 61 and the first heat dissipation hole 41 is adjusted according to the heat dissipation effect required in the actual production process. After the adjustment, the outer sleeve 52 and the connecting sleeve 30 are assembled by bolts.
[0057] S3 : rotating the upper sleeve 51 to adjust the overlapping area of the second movable hole 62 and the second heat dissipation hole 42 , and then connecting the upper sleeve 51 and the crucible shaft 20 through the locking member 70 .
[0058] Specifically, the upper sleeve 51 is rotated, and the overlapping area of the second movable hole 62 and the second heat dissipation hole 42 is adjusted according to the heat dissipation effect required in the actual production process. After the adjustment, the upper sleeve 51 and the crucible shaft 20 are assembled by bolts.
[0059] In summary, an embodiment of the present invention provides an upper-mounted crucible device 100 and a method of use, wherein the upper-mounted crucible device 100 includes a crucible body 10, a crucible shaft 20, a connecting sleeve 30 and a movable sleeve 50, wherein the crucible shaft 20 is disposed above the crucible body 10, the connecting sleeve 30 can be movably disposed on the top of the crucible body 10 and is connected to the crucible shaft 20, the connecting sleeve 30 is provided with a heat dissipation hole 40, a cavity is formed between the connecting sleeve 30 and the crucible body 10, the cavity is connected to the heat dissipation hole 40, the movable sleeve 50 and the connecting sleeve 30 are movably connected, and the movable sleeve 50 is provided with a movable hole 60; wherein the movable sleeve 50 is used to move relative to the connecting sleeve 30 to adjust the size of the overlapping area between the movable hole 60 and the heat dissipation hole 40. When the upper hanging crucible equipment 100 is in use, the top of the crucible body 10 is connected to the crucible shaft 20, the connecting sleeve 30 is movably arranged on the top of the crucible body 10, the connecting sleeve 30 is provided with a heat dissipation hole 40 for dissipating heat to the crucible body 10, the movable sleeve 50 and the connecting sleeve 30 are movably connected, the movable sleeve 50 is provided with a movable hole 60, the movable hole 60 can cooperate with the heat dissipation hole 40, the movable sleeve 50 can be movable relative to the connecting sleeve 30, so as to adjust the size of the overlapping area between the movable hole 60 and the heat dissipation hole 40, so as to adjust the size of the heat dissipation area, so as to adjust the heat dissipation capacity of the crucible body 10, so as to accurately control the temperature in the crucible, especially the temperature difference between the center and the edge of the seed crystal can be effectively adjusted, so as to improve the radial temperature gradient of the seed crystal, ensure the stability of crystal growth, and improve the crystal quality.
[0060] The method for using the upper hanging crucible device uses the upper hanging crucible device 100 to work, and the method for using the upper hanging crucible device includes: setting the connecting sleeve 30 on the top of the crucible body 10; rotating the outer sleeve 52 to adjust the overlapping area of the first movable hole 61 and the first heat dissipation hole 41, and then connecting the outer sleeve 52 and the connecting sleeve 30 through the locking member 70; rotating the upper sleeve 51 to adjust the overlapping area of the second movable hole 62 and the second heat dissipation hole 42, and then connecting the upper sleeve 51 and the crucible shaft 20 through the locking member 70. The method for using the upper hanging crucible device can adjust the heat dissipation capacity of the crucible body 10, thereby accurately controlling the temperature in the crucible, especially effectively adjusting the temperature difference between the center and edge of the seed crystal, improving the radial temperature gradient of the seed crystal, ensuring the stability of crystal growth, and improving the crystal quality.
[0061] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by a person skilled in the art within the technical scope disclosed by the present invention should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.
Claims
1. A hanging crucible device, characterized in that: include: Crucible body (10); A crucible shaft (20), the crucible shaft (20) being arranged above the crucible body (10); a connecting sleeve (30), the connecting sleeve (30) being movably disposed on the top of the crucible body (10) and connected to the crucible shaft (20), the connecting sleeve (30) being provided with a heat dissipation hole (40), a cavity being formed between the connecting sleeve (30) and the crucible body (10), the heat dissipation hole (40) being in communication with the cavity; a movable sleeve (50), the movable sleeve (50) and the connecting sleeve (30) being movably connected, the movable sleeve (50) being provided with a movable hole (60); wherein the movable sleeve (50) is used to move relative to the connecting sleeve (30) so as to adjust the size of the overlapping area between the movable hole (60) and the heat dissipation hole (40); The movable sleeve (50) comprises an upper sleeve (51) and an outer sleeve (52), wherein the upper sleeve (51) is movably arranged above the connecting sleeve (30), and the outer sleeve (52) is movably arranged on a side of the connecting sleeve (30), and the movable hole (60) is provided on both the upper sleeve (51) and the outer sleeve (52); The movable hole (60) comprises a first movable hole (61) and a second movable hole (62), wherein the first movable hole (61) is arranged on the outer sleeve (52), and the second movable hole (62) is arranged on the upper sleeve (51); The heat dissipation hole (40) comprises a first heat dissipation hole (41) and a second heat dissipation hole (42); the first heat dissipation hole (41) penetrates a side surface of the connection sleeve (30); the second heat dissipation hole (42) penetrates a top surface of the connection sleeve (30); the first heat dissipation hole (41) cooperates with the first movable hole (61); and the second heat dissipation hole (42) cooperates with the second movable hole (62).
2. The overhead crucible device according to claim 1, characterized in that: The first movable hole (61) is arranged along the horizontal direction, and the second movable hole (62) is arranged along the vertical direction.
3. The upper hanging crucible equipment according to claim 2, characterized in that: The outer wall of the connecting sleeve (30) is provided with an external thread, and the outer sleeve (52) and the connecting sleeve (30) are threadedly connected.
4. The overhead crucible device according to claim 1, characterized in that: The upper hanging crucible device (100) further comprises a locking piece (70), the movable sleeve (50) is connected to the connecting sleeve (30) via the locking piece (70), and the movable sleeve (50) is connected to the crucible shaft (20) via the locking piece (70).
5. The overhead crucible equipment according to claim 1, characterized in that: A raised ring (80) is provided on the top surface of the crucible body (10), and the position of the raised ring (80) corresponds to the edge position of the seed crystal in the crucible body (10).
6. The upper hanging crucible equipment according to claim 5, characterized in that: The cross-section of the raised ring (80) is rectangular, trapezoidal or triangular, and the raised ring (80) is a single ring or multi-ring structure.
7. A method for using a hanging crucible device, characterized in that: The upper hanging crucible device according to any one of claims 1 to 6 is used for working, and the method for using the upper hanging crucible device comprises: The connecting sleeve (30) is arranged on the top of the crucible body (10); Rotating the outer sleeve (52) to adjust the overlapping area of the first movable hole (61) and the first heat dissipation hole (41), and then connecting the outer sleeve (52) and the connecting sleeve (30) via a locking member (70); The upper sleeve (51) is rotated to adjust the overlapping area of the second movable hole (62) and the second heat dissipation hole (42), and then the upper sleeve (51) and the crucible shaft (20) are connected via a locking member (70).
8. The method for using the upper hanging crucible device according to claim 7, characterized in that: The method for using the upper hanging crucible device also includes: The outer sleeve (52) is rotated so that the outer sleeve (52) moves up and down, thereby adjusting the overlapping area of the first movable hole (61) and the first heat dissipation hole (41) in the vertical direction.