Coating thickness detection method, device, computer readable storage medium and system

Abstract

The present application relates to a coating thickness detection method, device, computer-readable storage medium and system. The method comprises: obtaining first distance information between a time domain spectral probe and an alignment point on a pole piece coating and coating thickness information at the alignment point collected by the time domain spectral probe; obtaining multiple phase difference information collected by a frequency domain spectral probe array; performing thickness detection according to the first distance information, coating thickness information at the alignment point and multiple phase difference information, and obtaining coating thickness information at multiple non-aligned points. The present application can improve the accuracy of coating thickness measurement.

Description

Technical Field

[0001] The present application relates to the field of battery technology, and in particular to a coating thickness detection method, device, computer-readable storage medium and system. Background Art

[0002] In the manufacturing process of lithium batteries, the pole piece is an important carrier for battery charging and discharging, and its manufacturing process has a crucial impact on the performance and quality of the battery. The consistency of the pole piece thickness directly affects the winding and electrical performance stability of the lithium battery pole piece.

[0003] In order to achieve precise control of the thickness of the pole piece and meet cost requirements, the currently widely used online sensing methods include laser sensors and beta rays, etc. These methods use high-precision point sensors to perform "Z" scanning, collect data through reciprocating motion, and use the average of multiple sampling points as the partition data of the pole piece film area.

[0004] However, this method has the problem of sparse sampling points, which leads to insufficient representativeness of the data and affects the accuracy of the pole piece thickness measurement. Summary of the invention

[0005] Based on the above problems, the present application provides a coating thickness detection method, device, computer-readable storage medium and system that can improve the accuracy of coating thickness measurement.

[0006] In a first aspect, the present application provides a coating thickness detection method, the method comprising:

[0007] Acquire first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and coating thickness information at the alignment point collected by the time domain spectrum probe;

[0008] Acquire multiple phase difference information collected by the frequency domain spectral probe array;

[0009] Thickness detection is performed according to the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at the multiple non-alignment points.

[0010] In the technical solution of the embodiment of the present application, first, by acquiring the first distance information between the time domain spectroscopy probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectroscopy probe, the processor establishes the association between the actual position of the alignment point and the coating thickness. Secondly, acquiring multiple phase difference information collected by the frequency domain spectroscopy probe array allows the processor to capture a wider range of thickness change information on the coating surface. The phase difference information reflects the small fluctuations on the coating surface. By analyzing this information, the processor can identify and quantify the unevenness and change trend of the coating thickness. Finally, by combining the first distance information, the coating thickness information at the alignment point and the multiple phase difference information for thickness detection, the processor can calculate the coating thickness information at multiple non-aligned points. This method of comprehensively utilizing different types of probes and multiple information sources effectively compensates for the possible limitations of a single probe and a single data source, thereby improving the accuracy of coating thickness measurement.

[0011] In some embodiments, the phase difference information includes the phase difference information of the alignment point and the phase difference information of the non-alignment point, and the thickness detection is performed according to the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at the multiple non-alignment points, including: determining the first incident angle information of the incident wave of the frequency domain spectral probe array at the alignment point according to the coating thickness information at the alignment point, the first distance information and the phase difference information of the alignment point; for each non-alignment point, performing thickness detection on the non-alignment point according to the first incident angle information, the phase difference information of the non-alignment point, the coating thickness information at the alignment point and the first distance information to obtain thickness fluctuation information; based on the thickness fluctuation information and the coating thickness information at the alignment point, determining the coating thickness information at the non-alignment point. In the technical solution of the embodiment of the present application, for each non-alignment point, the first incident angle information, the phase difference information of the non-alignment point, the coating thickness information at the alignment point and the first distance information are used for thickness detection. This method of comprehensively utilizing multiple information sources can effectively compensate for the errors that may exist when measuring at different positions, and improve the accuracy and consistency of coating thickness measurement. Finally, by comprehensively considering the thickness fluctuation of the coating at different positions, the coating quality control in the production process can be effectively optimized.

[0012] In some embodiments, the thickness of the non-aligned point is detected according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the aligned point and the first distance information to obtain thickness fluctuation information, including: determining the second distance information between the frequency domain spectral probe array and the non-aligned point according to the phase difference information of the non-aligned point, the speed of light and the frequency of the incident wave of the frequency domain spectral probe array; determining the thickness fluctuation information according to the first distance information, the second distance information, the first incident angle information and the coating thickness information at the aligned point. In the technical solution of the embodiment of the present application, by calculating the distance information and comprehensively analyzing the thickness fluctuation, it is possible to effectively optimize the coating quality control in the production process, improve the consistency and stability of the coating thickness, and thus improve the quality of the product and production efficiency.

[0013] In some embodiments, obtaining the coating thickness information at the alignment point collected by the time domain spectroscopy probe includes: obtaining the second incident angle information of the incident wave of the time domain spectroscopy probe at the alignment point; obtaining the time difference information of the two reflected waves collected by the time domain spectroscopy probe; and determining the thickness information of the alignment point of the pole piece according to the second incident angle information, the time difference information and the pre-acquired refractive index. In the technical solution of the embodiment of the present application, the accuracy and reliability of the pole piece thickness measurement can be improved by comprehensively utilizing the angle information, the time information and the optical property parameters.

[0014] In some embodiments, obtaining the time difference information of two reflected waves collected by the time domain spectroscopy probe includes: obtaining the first reflected wave reflected by the surface of the alignment point and the second reflected wave refracted and reflected by the pole piece coating collected by the time domain spectroscopy probe; respectively extracting the first wave peak corresponding to the first reflected wave and the second wave peak corresponding to the second reflected wave; and determining the time difference information based on the first wave peak and the second wave peak. In the technical solution of the embodiment of the present application, by obtaining the first reflected wave collected by the time domain spectroscopy probe and the second reflected wave refracted and reflected by the pole piece coating, and extracting their wave peaks, the time difference information between them can be measured, and the time difference information reflects the time for the incident wave to propagate between the pole piece coating and the pole piece, so that the thickness of the pole piece coating can be accurately calculated.

[0015] In some embodiments, obtaining multiple phase difference information collected by the frequency domain spectral probe array includes: obtaining multiple third reflected waves collected by the frequency domain spectral probe array; for each third reflected wave, obtaining the phase difference between the third reflected wave and the incident wave corresponding to the third reflected wave, and obtaining phase difference information. In the technical solution of the embodiment of the present application, by obtaining multiple third reflected waves and the phase difference between them and the corresponding incident wave, the coating thickness change at different positions can be measured more accurately. This accurate phase difference measurement provides high-resolution thickness detection capability, which enables the capture of tiny thickness fluctuations.

[0016] In a second aspect, the present application also provides a coating thickness detection device, the device comprising:

[0017] A thickness information acquisition module, used to acquire first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and coating thickness information at the alignment point collected by the time domain spectrum probe;

[0018] A phase difference information acquisition module is used to acquire multiple phase difference information collected by the frequency domain spectrum probe array;

[0019] The thickness detection module is used to perform thickness detection according to the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at the multiple non-alignment points.

[0020] In a third aspect, the present application further provides a computer-readable storage medium having a computer program stored thereon, which implements any one of the methods in the first aspect when the computer program is executed by a processor.

[0021] In a fourth aspect, the present application also provides a coating thickness detection system, the system comprising a processor and a plurality of probe groups, each probe group comprising a time domain spectrum probe and a frequency domain spectrum probe array; the plurality of probe groups are respectively connected to the processor for communication;

[0022] A processor, configured to implement any one of the methods in the first aspect.

[0023] In some embodiments, the system further comprises a probe holder and a base, wherein the probe holder is fixed on the base, and the probe group is fixed on the probe holder.

[0024] In some embodiments, the probe bracket includes a height adjustment component and a crossbeam, the height adjustment component is connected to the base and the crossbeam respectively, and the probe group is fixed on the crossbeam.

[0025] In some embodiments, the probe holder further includes a probe fixing member, and the probe group is fixed on the crossbeam via the probe fixing member.

[0026] In some embodiments, the time domain spectrometer probe includes a first time domain spectrometer probe and a second time domain spectrometer probe; the first time domain spectrometer probe is used to transmit an incident wave to an alignment point on the pole piece coating; the second time domain spectrometer probe is used to receive a reflected wave reflected from the alignment point on the pole piece coating.

[0027] In some embodiments, the time domain spectroscopy probe is a terahertz time domain spectroscopy probe.

[0028] In some embodiments, the frequency range of the time domain spectroscopy probe is between 0.1 THz and 10 THz.

[0029] In some embodiments, the frequency domain spectroscopy probe array is a terahertz frequency domain spectroscopy probe array.

[0030] In some embodiments, the frequency range of the frequency domain spectroscopy probe array is between 0.1 THz and 10 THz.

[0031] In a fifth aspect, the present application further provides an electronic device, comprising a memory and a processor, wherein the memory stores a computer program, and the processor implements any one of the methods in the first aspect when executing the computer program. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the optional embodiments below. The accompanying drawings are only used for the purpose of illustrating the optional embodiments and are not to be considered as limiting the present application. Moreover, the same reference numerals are used throughout the drawings to represent the same components. In the drawings:

[0033] Figure 1 This is a structural schematic diagram of a coating thickness detection system according to an embodiment of the present application;

[0034] Figure 2 It is a schematic flow chart of a coating thickness detection method according to an embodiment of the present application;

[0035] Figure 3 is a flow chart of a step of determining coating thickness information at a plurality of non-aligned points according to an embodiment of the present application;

[0036] Figure 4 is a flow chart of the step of determining thickness fluctuation information in one embodiment of the present application;

[0037] Figure 5 is a schematic flow chart of the step of obtaining coating thickness information at an alignment point in one embodiment of the present application;

[0038] Figure 6 is a flowchart of the step of obtaining time difference information in one embodiment of the present application;

[0039] Figure 7 is a schematic diagram of coating thickness detection according to an embodiment of the present application;

[0040] Figure 8 is a flowchart of a step of determining phase difference information in an embodiment of the present application;

[0041] Fig. 9 is a structural block diagram of a coating thickness detection device according to an embodiment of the present application;

[0042] Fig.10 This is a structural schematic diagram of a coating thickness detection system according to an embodiment of the present application;

[0043] Fig.11This is a structural schematic diagram of a coating thickness detection system according to an embodiment of the present application;

[0044] Fig.12 This is a structural schematic diagram of a coating thickness detection system according to an embodiment of the present application;

[0045] Fig.13 It is a diagram of the internal structure of an electronic device according to an embodiment of the present application. DETAILED DESCRIPTION

[0046] The following embodiments of the technical solution of the present application are described in detail in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present application, and are therefore only used as examples, and cannot be used to limit the scope of protection of the present application.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by technicians in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" in the specification and claims of this application and the above-mentioned figure descriptions and any variations thereof are intended to cover non-exclusive inclusions.

[0048] In the description of the embodiments of the present application, the technical terms "first", "second", etc. are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly indicating the number, specific order or primary and secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "multiple" is more than two, unless otherwise clearly and specifically defined.

[0049] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0050] In the description of the embodiments of the present application, the term "and / or" is only a description of the association relationship of the associated objects, indicating that there may be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0051] In the description of the embodiments of the present application, the term "multiple" refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0052] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal connection of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0053] In the manufacturing process of lithium batteries, pole pieces are important carriers for battery charging and discharging, and their manufacturing process has a crucial impact on the performance and quality of the battery. The consistency of pole piece thickness has a great impact on the winding and electrical performance consistency of lithium battery pole pieces. The uniformity of pole piece thickness can not only improve the energy density and service life of the battery, but also improve the safety and reliability of the battery.

[0054] In order to meet the accuracy and cost requirements of the pole piece thickness control, the currently widely used online sensing methods include laser sensors and β-rays. These methods use high-precision point sensors to perform reciprocating "Z" scanning, and use the average of multiple sampling points as the partition data of the pole piece film area. Specifically, the laser sensor measures the tiny height changes on the pole piece surface by emitting and receiving laser beams, while the β-ray sensor obtains data by penetrating the pole piece and measuring its thickness difference.

[0055] Although this “Z” scanning method can ensure the thickness consistency of the entire roll of pole pieces, due to the sparse sampling points, only one sampling point in a battery cell is often collected. This sampling method is difficult to reflect the thickness distribution of each layer of pole pieces in the entire battery cell. Therefore, although the overall thickness consistency is guaranteed, there may still be differences in the thickness at different locations within a single battery cell, thus affecting the thickness consistency of the battery cell level. This situation may lead to uneven current distribution during the charging and discharging process of the battery cell, which in turn affects the overall performance and life of the battery.

[0056] In view of the above problems, the embodiment of the present application provides a coating thickness detection scheme, in which the processor first obtains the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe; then obtains multiple phase difference information collected by the frequency domain spectrum probe array; finally, the thickness detection is performed according to the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at multiple non-aligned points. In the technical scheme of the embodiment of the present application, firstly, by obtaining the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe, the processor establishes the association between the actual position of the alignment point and the coating thickness. Secondly, obtaining multiple phase difference information collected by the frequency domain spectrum probe array allows the processor to capture a wider range of thickness change information on the coating surface. The phase difference information reflects the situation of small fluctuations on the coating surface. By analyzing this information, the processor can identify and quantify the unevenness and change trend of the coating thickness. Finally, the thickness detection is performed by combining the first distance information, the coating thickness information at the alignment point and multiple phase difference information. The processor can calculate the coating thickness information at multiple non-aligned points. This method of comprehensive utilization of different types of probes and multiple information sources effectively compensates for the possible limitations of a single probe and a single data source, thereby improving the accuracy of coating thickness measurement.

[0057] The coating thickness detection method provided in the embodiment of the present application can be applied to Figure 1 In the application environment shown. The application environment includes a coating thickness detection system, which includes a plurality of probe groups 10 and a processor 11, and the processor 11 is connected to the probe group 10 in communication. Each probe group 10 includes a time domain spectroscopy (TDS) probe 101 and a frequency domain spectroscopy (FDS) probe array 102. The time domain spectroscopy probe 101 includes a first time domain spectroscopy probe ( Figure 1 T in) and the second time domain spectroscopy probe ( Figure 1 R in it); wherein the first time domain spectrum probe is used to transmit an incident wave to the alignment point on the pole piece coating; the second time domain spectrum probe is used to receive a reflected wave reflected from the alignment point on the pole piece coating.

[0058] The processor 11 can obtain the coating thickness information at the alignment point collected by the time domain spectroscopy probe 101 and the multiple phase difference information collected by the frequency domain spectroscopy probe array 102, and obtain the coating thickness information at multiple non-alignment points based on the coating thickness information and the multiple phase difference information.

[0059] The probe type of the above-mentioned time domain spectrometer probe 101 can be set to a terahertz time domain spectrometer probe. The TDS probe 101 acquires the time domain response of the pole piece coating by emitting electromagnetic waves and then recording the propagation information and reflection information of the electromagnetic wave pulses in the pole piece coating. Among them, the electromagnetic waves emitted by the TDS probe 101 are terahertz (THz) with a frequency between millimeter waves and infrared rays, and the specific frequency is defined as 100GHz to 10THz. The main reason for choosing THz as the emitted electromagnetic wave is that THz can hardly penetrate metal media such as copper / aluminum foil in the pole piece, and each measurement can obtain the coating thickness information of a single side, so when applied to double-sided coating, there is no need to consider the alignment of the sampling points on the front and back sides.

[0060] Working principle of TDS probe 101:

[0061] (1) Pulse generation: The TDS probe uses femtosecond laser pulses to excite the THz radiation source and generate a broadband THz pulse.

[0062] (2) Pulse emission: The generated THz pulse is emitted to the surface of the pole piece coating through the transmitting antenna.

[0063] (3) Pulse propagation and reflection: The THz pulse propagates in the electrode coating and is reflected at the interface between the electrode coating and the copper / aluminum foil. The reflected THz wave contains information such as the thickness and refractive index of the electrode coating.

[0064] Features of TDS probe:

[0065] (1) High precision: TDS probe 101 can accurately measure the thickness and refractive index of the electrode coating with a resolution of micrometers or even nanometers.

[0066] (2) Broadband: The TDS probe 101 covers a wide THz band and can provide optical information of the electrode coating over a wide frequency range.

[0067] (3) Non-destructive testing: TDS probe 101 measures in a non-contact manner and will not damage the electrode coating.

[0068] The frequency domain spectroscopy probe array is a group of sensors or probes that can simultaneously or continuously collect frequency domain spectral information. The probe type of the frequency domain spectroscopy probe array 102 can be set to a terahertz frequency domain spectroscopy probe array. The frequency domain spectroscopy probe array 102 can emit electromagnetic waves within a certain frequency range and measure the signal characteristics of the electromagnetic waves after reflection or transmission on the pole piece coating.

[0069] The difference between the TDS probe 101 and the FDS probe array 102 is that the TDS probe 101 can return a complete reflection waveform, the frequency range of the frequency domain spectrum probe array 102 is between 0.1 THz and 10 THz, and the FDS probe array 102 transmits a single frequency terahertz wave, which can only obtain the amplitude and phase. In the embodiment of the present application, the FDS probe array 102 based on complementary metal oxide semiconductor (CMOS) is selected instead of a row of TDS single point probes, mainly because of the high integration of CMOS, which can reduce the interference of the same frequency signals between the simultaneous transmission and reception of multiple signals, and save the layout space and cost, so that it is easier to improve the sampling rate of the electrode thickness perception.

[0070] The main features of the frequency domain spectroscopy probe array 102 include:

[0071] (1) Multi-channel or multi-point measurement: Able to collect data at multiple locations or frequency points simultaneously or quickly.

[0072] (2) Spectral analysis capability: Able to measure the phase difference or amplitude difference of reflected waves at different frequencies, thereby inferring the physical properties of the sample surface or interior.

[0073] (3) High sensitivity and precision: It has high signal processing capability and sensitivity, and can perform accurate measurements in complex environments.

[0074] According to some embodiments of the present application, referring to Figure 2 , provides a coating thickness detection method, which is applied to Figure 1 Taking the processor in as an example, the following steps may be included:

[0075] Step 201, obtaining first distance information between the time domain spectroscopy probe and the alignment point on the pole piece coating and coating thickness information at the alignment point collected by the time domain spectroscopy probe.

[0076] Among them, the pole piece coating refers to the active material layer coated on the surface of the electrode substrate (such as copper foil or aluminum foil) used in the battery manufacturing process. The alignment point refers to the specific point where the time domain spectrum measurement and the frequency domain spectrum measurement are performed simultaneously at the same position. At the alignment point, the measurement areas of the time domain spectrum probe and the frequency domain spectrum probe array completely overlap. The first distance information is the physical distance information between the TDS probe and the alignment point on the pole piece coating surface.

[0077] The processor controls the time domain spectrometer TDS probe to emit a THz pulse signal. The TDS probe transmitting source sends a THz signal to illuminate the surface of the pole piece coating, which is reflected on the surface of the pole piece coating. The TDS probe receiving source receives the reflected THz signal. Then, the processor records and measures the round-trip time of the THz signal to determine the first distance information between the TDS probe and the alignment point on the pole piece coating. At the same time, the processor analyzes the reflected waveform and calculates the coating thickness information at the alignment point through signal processing.

[0078] Step 202: Acquire a plurality of phase difference information collected by the frequency domain spectral probe array.

[0079] Among them, the phase difference information reflects the thickness change of the pole piece coating surface.

[0080] The processor first sets the transmission frequency and transmission order of each probe in the frequency domain spectrum probe array so that the frequency domain spectrum probe array covers multiple measurement points of the pole piece coating. When the incident wave emitted by each frequency domain spectrum probe passes through the pole piece coating, part of the incident wave is reflected on the coating surface. Then, each probe receives the reflected wave reflected from the pole piece coating surface and sends these reflected waves to the processor. After receiving these reflected waves, the processor can use phase detection technology to measure the phase difference between the incident wave and the reflected wave, thereby obtaining multiple phase difference information.

[0081] Step 203 , performing thickness detection according to the first distance information, the coating thickness information at the alignment point and the plurality of phase difference information, to obtain the coating thickness information at the plurality of non-alignment points.

[0082] The processor first establishes a corresponding relationship between the coating thickness and the phase difference of the alignment point, and then determines the thickness of the non-alignment point according to the corresponding relationship and the phase difference of the non-alignment point.

[0083] The processor first uses the previously acquired coating thickness information of the alignment point and the phase difference information of the alignment point to establish the corresponding relationship between the coating thickness and the phase difference, and obtains a thickness-phase difference model. Then, the processor substitutes the phase difference information of the non-aligned point into the previously established thickness-phase difference model, and determines the coating thickness information at each non-aligned point according to the thickness-phase difference model.

[0084] It should be noted that the processor can also verify the coating thickness information at each non-aligned point to check the rationality and consistency of the calculation results. If an abnormal value is found, the phase difference data can be corrected or the thickness-phase difference model parameters can be readjusted. Finally, the processor can also summarize the coating thickness information of all non-aligned points to generate a complete coating thickness distribution map or data table for further analysis and use.

[0085] In the above embodiment, the processor first obtains the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe; then obtains multiple phase difference information collected by the frequency domain spectrum probe array; finally, thickness detection is performed based on the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at multiple non-aligned points. In the technical solution of the embodiment of the present application, firstly, by obtaining the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe, the processor establishes the association between the actual position of the alignment point and the coating thickness. Secondly, obtaining multiple phase difference information collected by the frequency domain spectrum probe array allows the processor to capture a wider range of thickness change information on the coating surface. The phase difference information reflects the small fluctuations on the coating surface. By analyzing this information, the processor can identify and quantify the unevenness and change trend of the coating thickness. Finally, the thickness detection is performed by combining the first distance information, the coating thickness information at the alignment point and multiple phase difference information. The processor can calculate the coating thickness information at multiple non-aligned points. This method of comprehensive utilization of different types of probes and multiple information sources effectively compensates for the possible limitations of a single probe and a single data source, thereby improving the accuracy of coating thickness measurement.

[0086] According to some embodiments of the present application, the phase difference information in the above embodiments specifically includes the phase difference information of the alignment point and the phase difference information of the non-alignment point. Figure 3 , “performing thickness detection according to the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at the multiple non-alignment points” may include the following steps:

[0087] Step 301 : determining first incident angle information of an incident wave of a frequency domain spectroscopy probe array at the alignment point according to coating thickness information at the alignment point, first distance information and phase difference information at the alignment point.

[0088] The processor determines the first incident angle information of the incident wave of the frequency domain spectrum probe array at the alignment point by using the coating thickness information at the alignment point, the first distance information and the phase difference information at the alignment point.

[0089] The first incident angle information can be specifically determined by formula (1):

[0090] (1)

[0091] In formula (1), is the phase difference information of the alignment point, is the frequency of the incident wave of the frequency domain spectroscopy probe array, is the speed of light, is the distance between the probe of the frequency domain spectroscopy probe array and the surface of the pole piece coating, is the first incident angle information, is the first distance information, is the coating thickness information at the alignment point.

[0092] Step 302 : for each non-aligned point, perform thickness detection on the non-aligned point according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the aligned point and the first distance information to obtain thickness fluctuation information.

[0093] Among them, thickness fluctuation information refers to the degree of variation in thickness at different locations of the pole piece coating. During the manufacturing process, the thickness of the pole piece coating may fluctuate slightly due to slight changes in production conditions, equipment accuracy, or material properties. These fluctuations will affect the final performance and quality of the product.

[0094] When the processor performs thickness detection on each non-aligned point, it first uses the known coating thickness information at the aligned point and the first incident angle information to calculate the optical path difference of the incident wave after it is reflected on the pole piece coating surface. The optical path difference refers to the additional optical path delay of the incident wave after it is reflected and refracted on the pole piece coating surface compared to the direct path. Next, the thickness of the non-aligned point is detected based on the optical path difference and the first distance information to obtain the thickness fluctuation information of each non-aligned point.

[0095] It should be noted that since the FDS probe array is fixed and each probe is arranged in parallel, the height change caused by the inconsistent thickness of the pole piece coating surface will lead to the advance and lag of the incident wave. When the frequency of the transmitted signals of multiple probes in the FDS array is consistent, the phase difference between the reflected wave and the incident wave can represent the coating thickness fluctuation. After the thickness corresponding to a certain phase difference is known in advance, the thickness corresponding to other phase differences can be calculated.

[0096] Step 303: Determine the coating thickness information at the non-aligned point based on the thickness fluctuation information and the coating thickness information at the aligned point.

[0097] The specific process of determining coating thickness information can be expressed by formula (2):

[0098] (2)

[0099] In formula (2), is the coating thickness information at the non-aligned point, It is the thickness fluctuation information.

[0100] In the above embodiment, first, according to the coating thickness information at the alignment point, the first distance information and the phase difference information of the alignment point, the first incident angle information of the frequency domain spectrum probe array at the alignment point can be determined; then, for each non-aligned point, according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the alignment point and the first distance information, the thickness of the non-aligned point is detected to obtain the thickness fluctuation information; finally, based on the thickness fluctuation information and the coating thickness information at the alignment point, the coating thickness information at the non-aligned point is determined. In the technical solution of the embodiment of the present application, for each non-aligned point, the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the alignment point and the first distance information are used to perform thickness detection. This method of comprehensively utilizing multiple information sources can effectively compensate for the errors that may exist when measuring at different positions, and improve the accuracy and consistency of coating thickness measurement. Finally, by comprehensively considering the thickness fluctuation of the coating at different positions, the coating quality control in the production process can be effectively optimized.

[0101] According to some embodiments of the present application, referring to Figure 4 In the above embodiment, “according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the aligned point and the first distance information, the thickness of the non-aligned point is detected to obtain the thickness fluctuation information” may include the following steps:

[0102] Step 401 : determining second distance information between the frequency domain spectrum probe array and the non-aligned point according to the phase difference information of the non-aligned point, the speed of light and the frequency of the incident wave of the frequency domain spectrum probe array.

[0103] The processor determines second distance information between the frequency domain spectrum probe array and the non-aligned point according to the phase difference information of the non-aligned point, the speed of light, and the frequency of the incident wave of the frequency domain spectrum probe array.

[0104] The specific process of determining the second distance information can be expressed by formula (3):

[0105] (3)

[0106] In formula (3), is the phase difference information of the non-aligned point, is the speed of light, is the frequency of the incident wave of the frequency domain spectroscopy probe array, is the second distance information.

[0107] Step 402: Determine thickness fluctuation information according to the first distance information, the second distance information, the first incident angle information, and the coating thickness information at the alignment point.

[0108] The processor determines thickness fluctuation information based on the first distance information, the second distance information, the first incident angle information, and the coating thickness information at the alignment point.

[0109] The specific process of determining thickness fluctuation information can be expressed by formula (4):

[0110] (4)

[0111] In formula (4), is the distance between the frequency domain spectroscopy probe array probe and the coating surface, is the first incident angle information, It is the thickness fluctuation information.

[0112] In the above embodiment, the second distance information between the frequency domain spectral probe array and the non-aligned point is determined based on the phase difference information of the non-aligned point, the speed of light, and the frequency of the incident wave of the frequency domain spectral probe array; the thickness fluctuation information is determined based on the first distance information, the second distance information, the first incident angle information, and the coating thickness information at the aligned point. In the technical solution of the embodiment of the present application, by calculating the distance information and comprehensively analyzing the thickness fluctuation, it is possible to effectively optimize the coating quality control in the production process, improve the consistency and stability of the coating thickness, and thus improve the quality of the product and production efficiency.

[0113] According to some embodiments of the present application, referring to Figure 5 In the above embodiment, “obtaining coating thickness information at the alignment point collected by the time domain spectroscopy probe” may include the following steps:

[0114] Step 501, obtaining the second incident angle information of the incident wave of the time domain spectroscopy probe at the alignment point.

[0115] First, the processor uses a calibration tool such as an angle meter or a laser aligner to adjust the time domain spectrometer probe to a predetermined initial position and angle so that it is aligned vertically or at a specific angle to the alignment point on the surface of the pole piece coating. Next, the processor controls the TDS probe to transmit a calibration signal, which will be reflected at a known position or reflection surface near the time domain spectrometer probe, and then receives the reflected signal. Next, the processor adjusts the position of the time domain spectrometer probe based on the reflection signal and the calibration signal so that the time domain spectrometer probe is aligned with the alignment point on the surface of the pole piece coating. Subsequently, the processor controls the TDS probe to transmit an incident wave to the alignment point on the surface of the pole piece coating, and the angle formed by the incident wave at the alignment point and the pole piece coating is the second incident angle information.

[0116] Step 502: Acquire the time difference information of two reflected waves collected by the time domain spectroscopy probe.

[0117] The time difference information reflects the total time from the incident wave being emitted to the time it is reflected back to the time domain spectrometer probe.

[0118] The processor issues a command to trigger the TDS probe to emit a THz pulse signal (i.e., incident wave). After the THz pulse is reflected by the coating surface and the electrode surface, it is received by the TDS probe.

[0119] The processor can record the arrival time of each reflected wave. The time interval between two reflected waves is the time difference information.

[0120] Step 503, determining the thickness information of the alignment point of the pole piece according to the second incident angle information, the time difference information and the pre-acquired refractive index.

[0121] The processor determines the thickness information of the alignment point of the pole piece according to the second incident angle information, the time difference information and the pre-acquired refractive index.

[0122] It should be noted that the embodiment of the present application pre-sets that the refractive index of the pole piece coating is uniform, so a pre-calibrated known thickness can be used as the refractive index of the pole piece coating.

[0123] The specific process of determining the thickness information of the alignment point can be expressed by formula (5):

[0124] (5)

[0125] In formula (5), is the second incident angle information, is the coating thickness information at the alignment point, is the time difference information, is the pre-obtained refractive index of the pole piece coating, The speed of light.

[0126] In the above embodiment, the second incident angle information of the incident wave of the time domain spectroscopy probe at the alignment point is first obtained; then the time difference information of the two reflected waves collected by the time domain spectroscopy probe is obtained; finally, the thickness information of the alignment point of the pole piece is determined according to the second incident angle information, the time difference information and the pre-acquired refractive index. In the technical solution of the embodiment of the present application, the accuracy and reliability of the pole piece thickness measurement can be improved by comprehensively utilizing the angle information, time information and optical property parameters.

[0127] According to some embodiments of the present application, referring to Figure 6 In the above embodiment, “obtaining the time difference information of two reflected waves collected by the time domain spectroscopy probe” may include the following steps:

[0128] Step 601, obtaining a first reflected wave reflected by the surface of the alignment point and a second reflected wave refracted and reflected by the pole piece coating, collected by a time domain spectrum probe.

[0129] First, the processor triggers the TDS probe to emit a THz pulse signal. After the THz pulse signal is reflected on the coating surface and the electrode surface, it is received by the TDS probe. The reflected wave received by the TDS probe contains two important reflected waveforms, namely the first reflected wave and the second reflected wave.

[0130] Correspondingly, see Figure 7 , the processor triggers the first time domain spectroscopy probe ( Figure 7 The THz pulse signal is emitted by the second time domain spectrometer ( Figure 7 The reflected wave received by the second time domain spectrum probe contains two important reflected waveforms, namely the first reflected wave and the second reflected wave.

[0131] Since the refractive index of air is lower than that of the electrode coating, THz will produce refraction and reflection when propagating in the air and the electrode coating. The absolute refractive index in air is regarded as 1. According to Snell's law, the following equation (6) holds:

[0132] (6)

[0133] In the above formula (6), represents the speed of light, It represents the propagation speed of terahertz waves in the electrode coating. is the first incident angle information, that is, the incident angle of the terahertz wave from air into the conductive coating, and is the corresponding reflection angle information.

[0134] Since THz cannot penetrate the metal pole pieces of metal media such as copper / aluminum foil, the THz that is attenuated after refraction on the pole piece coating surface will be reflected on the metal pole piece surface. Therefore, the THz emitted by the TDS probe will be reflected once on the pole piece coating surface and once on the metal pole piece surface. The reflected wave received by the TDS probe is the superposition of the first reflected wave and the second reflected wave, which is reflected as two peaks in the waveform.

[0135] Step 602 : extracting a first wave peak corresponding to the first reflected wave and a second wave peak corresponding to the second reflected wave respectively.

[0136] For the first reflected wave, the processor analyzes its signal waveform to extract the position of the first peak. The first peak corresponds to the first reflection time of the THz pulse from emission to reflection from the pole piece surface. The processor uses signal processing techniques, such as peak detection algorithms or waveform analysis, to identify and record the time point of the first peak.

[0137] Next, the processor will analyze the signal of the second reflected wave and extract the position of the second wave peak. The second wave peak corresponds to the time when the THz pulse is refracted from the emission to the coating surface and then reflected from the pole piece coating back to the probe. Similarly, the processor will use similar signal processing technology to locate and record the time point of the second wave peak.

[0138] Step 603: Determine time difference information according to the first wave peak and the second wave peak.

[0139] By calculating the difference between the first and second peak times, the processor can accurately determine the time difference information. This time difference reflects the time it takes the THz pulse to propagate in the coating, thus providing important reference data for the coating thickness.

[0140] The time difference between the two peaks represents the time difference information of THz in the coating, which can be determined using the following formula (7).

[0141] (7)

[0142] In the above formula (7), is the coating thickness information at the alignment point, is the time difference information, is the refractive index of the pole piece coating.

[0143] In the above embodiment, the first reflected wave reflected by the surface of the alignment point and the second reflected wave refracted and reflected by the pole piece coating are first acquired by the time domain spectrum probe; then the first wave peak corresponding to the first reflected wave and the second wave peak corresponding to the second reflected wave are respectively extracted; finally, the time difference information is determined based on the first wave peak and the second wave peak. In the technical solution of the embodiment of the present application, the time difference information between them can be measured by acquiring the first reflected wave collected by the time domain spectrum probe and the second reflected wave refracted and reflected by the pole piece coating, and extracting their wave peaks. The time difference information reflects the time for the incident wave to propagate between the pole piece coating and the pole piece, so that the thickness of the pole piece coating can be accurately calculated.

[0144] According to some embodiments of the present application, referring to Figure 8 In the above embodiment, “obtaining multiple phase difference information collected by the frequency domain spectral probe array” may include the following steps:

[0145] Step 801: Acquire multiple third reflected waves collected by the frequency domain spectrum probe array.

[0146] The processor uses instructions or trigger signals to make the frequency domain spectrum probe array emit a sine wave with a fixed frequency. After the sine wave is reflected by the surface of the pole piece coating, it is received back by each probe in the frequency domain spectrum probe array and sent to the processor, which obtains multiple third reflected waves collected by the frequency domain spectrum probe array.

[0147] Step 802: For each third reflected wave, obtain a phase difference between the third reflected wave and an incident wave corresponding to the third reflected wave to obtain phase difference information.

[0148] The phase difference information refers to the phase delay or phase difference between the third reflected wave and the incident wave corresponding to the third reflected wave, which directly reflects the phase change of the incident wave corresponding to the third reflected wave when propagating in the coating.

[0149] For each third reflected wave, the processor analyzes the signal waveform of the received third reflected wave and determines the phase difference information between the third reflected wave and its corresponding incident wave through signal processing technology, such as spectrum analysis or phase difference calculation.

[0150] Assume that the incident wave corresponding to the third reflected wave is:

[0151] (8)

[0152] In formula (8), is the frequency of the incident wave of the frequency domain spectroscopy probe array, is the phase information of the incident wave corresponding to the third reflected wave.

[0153] The third reflected wave is:

[0154] (9)

[0155] In formula (9), is the frequency of the incident wave of the frequency domain spectroscopy probe array, is the phase information of the third reflected wave.

[0156] The phase difference information can be calculated according to the following formula (10):

[0157] (10)

[0158] In formula (10), is the phase difference information, is the distance information of the alignment point, is the speed of light, is the frequency of the incident wave of the frequency domain spectroscopy probe array, is the distance between the frequency domain spectroscopy probe array probe and the coating surface, is the first incident angle information.

[0159] In the above embodiment, a plurality of third reflected waves collected by the frequency domain spectral probe array are first obtained; then, for each third reflected wave, the phase difference between the third reflected wave and the incident wave corresponding to the third reflected wave is obtained to obtain phase difference information. In the technical solution of the embodiment of the present application, by obtaining a plurality of third reflected waves and the phase difference between them and the corresponding incident wave, the coating thickness variation at different positions can be measured more accurately. This precise phase difference measurement provides high-resolution thickness detection capability, enabling the capture of tiny thickness fluctuations.

[0160] According to some embodiments of the present application, a coating thickness detection method is provided, which is applied to Figure 1 Taking the processor in as an example, the following steps may be included:

[0161] Step 1, obtaining the first distance information between the time domain spectroscopy probe and the alignment point on the pole piece coating.

[0162] Step 2, obtaining the second incident angle information of the incident wave of the time domain spectroscopy probe at the alignment point.

[0163] Step 3, obtaining the time domain spectrum probe to collect the first reflected wave reflected by the alignment point surface and the second reflected wave refracted and reflected by the pole piece coating.

[0164] Step 4: extract the first wave peak corresponding to the first reflected wave and the second wave peak corresponding to the second reflected wave respectively.

[0165] Step 5: Determine time difference information according to the first wave peak and the second wave peak.

[0166] Step 6: Determine the thickness information of the alignment point of the pole piece according to the second incident angle information, the time difference information and the pre-acquired refractive index.

[0167] Step 7: Acquire multiple third reflected waves collected by the frequency domain spectrum probe array.

[0168] Step 8: For each third reflected wave, obtain the phase difference between the third reflected wave and the incident wave corresponding to the third reflected wave to obtain phase difference information; wherein the phase difference information includes the phase difference information of the aligned point and the phase difference information of the non-aligned point.

[0169] Step 9: determining the first incident angle information of the incident wave of the frequency domain spectroscopy probe array at the alignment point according to the coating thickness information at the alignment point, the first distance information and the phase difference information at the alignment point.

[0170] Step 10: for each non-aligned point, determine the second distance information between the frequency domain spectrum probe array and the non-aligned point according to the phase difference information of the non-aligned point, the speed of light and the frequency of the incident wave of the frequency domain spectrum probe array.

[0171] Step 11, determining thickness fluctuation information according to the first distance information, the second distance information, the first incident angle information and the coating thickness information at the alignment point.

[0172] Step 12: Determine the coating thickness information at the non-aligned point based on the thickness fluctuation information and the coating thickness information at the aligned point.

[0173] In the above embodiment, the processor first obtains the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe; then obtains multiple phase difference information collected by the frequency domain spectrum probe array; finally, thickness detection is performed based on the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at multiple non-aligned points. In the technical solution of the embodiment of the present application, firstly, by obtaining the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe, the processor establishes the association between the actual position of the alignment point and the coating thickness. Secondly, obtaining multiple phase difference information collected by the frequency domain spectrum probe array allows the processor to capture a wider range of thickness change information on the coating surface. The phase difference information reflects the small fluctuations on the coating surface. By analyzing this information, the processor can identify and quantify the unevenness and change trend of the coating thickness. Finally, the thickness detection is performed by combining the first distance information, the coating thickness information at the alignment point and multiple phase difference information. The processor can calculate the coating thickness information at multiple non-aligned points. This method of comprehensive utilization of different types of probes and multiple information sources effectively compensates for the possible limitations of a single probe and a single data source, thereby improving the accuracy of coating thickness measurement.

[0174] It should be understood that, although the various steps in the above flowchart are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear description in this article, the execution of these steps is not strictly limited in order, and these steps can be executed in other orders. Moreover, at least a part of the steps in the above flowchart may include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0175] Based on the same inventive concept, the embodiment of the present application also provides a coating thickness detection device for implementing the coating thickness detection method involved above. The implementation scheme for solving the problem provided by the device is similar to the implementation scheme recorded in the above method, so the specific limitations in one or more coating thickness detection device embodiments provided below can refer to the limitations of the coating thickness detection method above, and will not be repeated here.

[0176] According to some embodiments of the present application, referring to Fig. 9 , provides a coating thickness detection device, the device comprising:

[0177] The thickness information acquisition module 901 is used to acquire the first distance information between the time domain spectrum probe and the alignment point on the pole piece coating and the coating thickness information at the alignment point collected by the time domain spectrum probe;

[0178] The phase difference information acquisition module 902 is used to acquire a plurality of phase difference information collected by the frequency domain spectrum probe array;

[0179] The thickness detection module 903 is used to perform thickness detection according to the first distance information, the coating thickness information at the alignment point and the multiple phase difference information to obtain the coating thickness information at the multiple non-alignment points.

[0180] In some embodiments, the thickness detection module 903 is specifically used to determine the first incident angle information of the incident wave of the frequency domain spectral probe array at the alignment point based on the coating thickness information at the alignment point, the first distance information and the phase difference information of the alignment point; for each non-aligned point, according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the alignment point and the first distance information, perform thickness detection on the non-aligned point to obtain thickness fluctuation information; based on the thickness fluctuation information and the coating thickness information at the alignment point, determine the coating thickness information at the non-aligned point.

[0181] In some embodiments, the thickness detection module 903 is specifically used to determine the second distance information between the frequency domain spectral probe array and the non-aligned point based on the phase difference information of the non-aligned point, the speed of light and the frequency of the incident wave of the frequency domain spectral probe array; and determine the thickness fluctuation information based on the first distance information, the second distance information, the first incident angle information and the coating thickness information at the alignment point.

[0182] In some embodiments, the thickness information acquisition module 901 is specifically used to obtain the second incident angle information of the incident wave of the time domain spectroscopy probe at the alignment point; obtain the time difference information of the two reflected waves collected by the time domain spectroscopy probe; and determine the thickness information of the alignment point of the pole piece based on the second incident angle information, the time difference information and the refractive index acquired in advance.

[0183] In some embodiments, the thickness information acquisition module 901 is specifically used to obtain the first reflected wave reflected by the alignment point surface and the second reflected wave refracted and reflected by the pole piece coating collected by the time domain spectrum probe; extract the first wave peak corresponding to the first reflected wave and the second wave peak corresponding to the second reflected wave respectively; determine the time difference information based on the first wave peak and the second wave peak.

[0184] In some embodiments, the phase difference information acquisition module 902 is specifically used to acquire multiple third reflected waves collected by the frequency domain spectral probe array; for each third reflected wave, the phase difference between the third reflected wave and the incident wave corresponding to the third reflected wave is acquired to obtain phase difference information.

[0185] Each module in the above coating thickness detection device can be implemented in whole or in part by software, hardware and a combination thereof. Each module can be embedded in or independent of a processor in an electronic device in the form of hardware, or can be stored in a memory in an electronic device in the form of software, so that the processor can call and execute operations corresponding to each module.

[0186] According to some embodiments of the present application, a coating thickness detection system is provided. Figure 1 As shown, the coating thickness detection system includes a plurality of probe groups 10 and a processor 11, and the processor 11 is in communication with the probe group 10. Each probe group 10 includes a time domain spectrum probe 101 and a frequency domain spectrum probe array 102. The time domain spectrum probe 101 includes a first time domain spectrum probe ( Figure 1 T in) and the second time domain spectroscopy probe ( Figure 1 R in the figure); wherein the first time domain spectrum probe is used to transmit an incident wave to the alignment point on the pole piece coating; and the second time domain spectrum probe is used to receive a reflected wave reflected from the alignment point on the pole piece coating. The processor 11 can obtain the coating thickness information at the alignment point collected by the time domain spectrum probe 101 and the multiple phase difference information collected by the frequency domain spectrum probe array 102, and obtain the coating thickness information at multiple non-aligned points according to the coating thickness information and the multiple phase difference information.

[0187] The probe type of the above-mentioned time domain spectrometer probe 101 can be set to a terahertz time domain spectrometer probe. The TDS probe 101 acquires the time domain response of the pole piece coating by emitting electromagnetic waves and then recording the propagation information and reflection information of the electromagnetic wave pulses in the pole piece coating. Among them, the electromagnetic waves emitted by the TDS probe 101 are terahertz waves with a frequency between millimeter waves and infrared rays, and the specific frequency is defined as 100GHz to 10THz. The main reason for choosing THz as the emitted electromagnetic wave is that THz can hardly penetrate metal media such as copper / aluminum foil in the pole piece, and each measurement can obtain the coating thickness information of a single side. Therefore, when applied to double-sided coating, there is no need to consider the alignment of the front and back sampling points.

[0188] In the technical solution of the embodiment of the present application, the coating thickness detection can calculate the coating thickness information at multiple non-aligned points. This method of comprehensively utilizing different types of probes and multiple information sources effectively compensates for the possible limitations of a single probe and a single data source, thereby improving the accuracy of coating thickness measurement.

[0189] According to some embodiments of the present application, referring to Fig.10 and Fig.11 The coating thickness detection system further includes a probe bracket 12 and a base 13 . The probe bracket 12 is fixed on the base 13 , and the probe group 10 is fixed on the probe bracket 12 .

[0190] According to some embodiments of the present application, continue to refer to Fig.10 The probe bracket 12 further includes a height adjustment component 121 and a crossbeam 122 . The height adjustment component 121 is connected to the base 13 and the crossbeam 122 , respectively. The probe group 10 is fixed on the crossbeam 122 .

[0191] According to some embodiments of the present application, continue to refer to Fig.10 The probe bracket 12 further includes a probe fixing member 123 , and the probe group 10 is fixed on the crossbeam 122 via the probe fixing member 123 .

[0192] According to some embodiments of the present application, Figure 1 and Fig.12 As shown, the time domain spectrum probe 101 includes a first time domain spectrum probe 1011 and a second time domain spectrum probe 1012; the first time domain spectrum probe 1011 is used to transmit an incident wave to the alignment point on the pole piece coating; the second time domain spectrum probe 1012 is used to receive a reflected wave reflected from the alignment point on the pole piece coating.

[0193] Among them, the first time domain spectrum probe 1011 (i.e. Figure 7 T in the figure) and the second time domain spectroscopy probe 1012 (i.e. Figure 7 The R in the figure is tilted on both sides of the frequency domain spectrum probe array, and the incident wave emitted by the first time domain spectrum probe 1011 can be more effectively transmitted to the second time domain spectrum probe 1012 after being reflected by the alignment point. In the process of wave propagation, the tilt setting can avoid interference and multiple reflections of the beam directly incident and reflected on the same path, which can reduce mutual interference between reflected waves, so that the received reflected waves have higher intensity and quality.

[0194] According to some embodiments of the present application, continue to refer to Fig.12 The time domain spectrometer probe 101 is a terahertz time domain spectrometer probe.

[0195] According to some embodiments of the present application, continue to refer to Fig.12 The frequency range of the time domain spectroscopy probe 101 is between 0.1 THz and 10 THz.

[0196] According to some embodiments of the present application, continue to refer to Fig.12 The frequency domain spectrum probe array 102 is a terahertz frequency domain spectrum probe array.

[0197] According to some embodiments of the present application, continue to refer to Fig.12 The frequency range of the frequency domain spectroscopy probe array 102 is between 0.1 THz and 10 THz.

[0198] According to some embodiments of the present application, an electronic device is provided. The electronic device may be a terminal, and its internal structure diagram may be as follows: Fig.13 As shown. The electronic device includes a processor, a memory, an input / output interface, a communication interface, a display unit and an input device. Among them, the processor, the memory and the input / output interface are connected through a system bus, and the communication interface, the display unit and the input device are connected to the system bus through the input / output interface. Among them, the processor of the electronic device is used to provide computing and control capabilities. The memory of the electronic device includes a non-volatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of the operating system and the computer program in the non-volatile storage medium. The input / output interface of the electronic device is used to exchange information between the processor and the external device. The communication interface of the electronic device is used to communicate with an external terminal in a wired or wireless manner, and the wireless manner can be realized through WIFI, a mobile cellular network, NFC (near field communication) or other technologies. When the computer program is executed by the processor, a coating thickness detection method is realized. The display unit of the electronic device is used to form a visually visible picture, which can be a display screen, a projection device or a virtual reality imaging device. The display screen can be a liquid crystal display screen or an electronic ink display screen, and the input device of the electronic device can be a touch layer covering the display screen, or a button, trackball or touchpad set on the electronic device casing, or an external keyboard, touchpad or mouse.

[0199] Those skilled in the art will understand that Fig.13 The structure shown in the figure is merely a block diagram of a partial structure related to the scheme of the present application, and does not constitute a limitation on the electronic device to which the scheme of the present application is applied. The specific electronic device may include more or fewer components than shown in the figure, or combine certain components, or have a different arrangement of components.

[0200] According to some embodiments of the present application, there is also provided a non-transitory computer-readable storage medium including instructions, such as a memory including instructions, and the above instructions can be executed by a processor of an electronic device to complete the above method. For example, the non-transitory computer-readable storage medium can be a ROM, a random access memory (RAM), a CD-ROM, a magnetic tape, a floppy disk, an optical data storage device, etc.

[0201] According to some embodiments of the present application, a computer program product is also provided, and when the computer program is executed by a processor, the above method can be implemented. The computer program product includes one or more computer instructions. When these computer instructions are loaded and executed on a computer, part or all of the above method can be implemented in whole or in part according to the process or function described in the embodiment of the present application.

[0202] Those skilled in the art can understand that all or part of the processes in the above-mentioned embodiment methods can be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to the memory, database or other medium used in the embodiments provided in this application can include at least one of non-volatile and volatile memory. Non-volatile memory can include read-only memory (ROM), magnetic tape, floppy disk, flash memory, optical memory, high-density embedded non-volatile memory, resistive random access memory (ReRAM), magnetoresistive random access memory (MRAM), ferroelectric random access memory (FRAM), phase change memory (PCM), graphene memory, etc. Volatile memory can include random access memory (RAM) or external cache memory, etc. As an illustration and not limitation, RAM can be in various forms, such as static random access memory (SRAM) or dynamic random access memory (DRAM). The database involved in each embodiment provided in this application may include at least one of a relational database and a non-relational database. Non-relational databases may include distributed databases based on blockchains, etc., but are not limited to this. The processor involved in each embodiment provided in this application may be a general-purpose processor, a central processing unit, a graphics processor, a digital signal processor, a programmable logic device, a data processing logic device based on quantum computing, etc., but are not limited to this.

[0203] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0204] The above-described embodiments only express several implementation methods of the present application, which is convenient for understanding the technical solutions of the present application in detail, but cannot be understood as limiting the scope of protection of the invention patent. It should be pointed out that for ordinary technicians in this field, without departing from the concept of the present application, several modifications and improvements can be made, which all belong to the protection scope of the present application. It should be understood that the technical solutions obtained by those skilled in the art through logical analysis, reasoning or limited experiments on the basis of the technical solutions provided in the present application are all within the protection scope of the attached claims described in the present application. Therefore, the protection scope of the patent of this application shall be based on the contents of the attached claims, and the description and drawings can be used to explain the contents of the claims.

Claims

1. A coating thickness detection method, characterized in that: The method comprises: Acquire first distance information between the time domain spectrum probe and an alignment point on the pole piece coating and coating thickness information at the alignment point collected by the time domain spectrum probe; Acquire multiple phase difference information collected by the frequency domain spectral probe array; Perform thickness detection according to the first distance information, the coating thickness information at the alignment point and the plurality of phase difference information to obtain coating thickness information at a plurality of non-alignment points; The phase difference information includes the phase difference information of the alignment point and the phase difference information of the non-alignment point, and the thickness detection is performed according to the first distance information, the coating thickness information at the alignment point and the plurality of the phase difference information to obtain the coating thickness information at the plurality of non-alignment points, including: Determining first incident angle information of the incident wave of the frequency domain spectroscopy probe array at the alignment point according to the coating thickness information at the alignment point, the first distance information and the phase difference information at the alignment point; For each of the non-aligned points, according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the aligned point and the first distance information, a thickness detection is performed on the non-aligned point to obtain thickness fluctuation information; Based on the thickness fluctuation information and the coating thickness information at the alignment point, the coating thickness information at the non-alignment point is determined.

2. The method according to claim 1, characterized in that The method of performing thickness detection on the non-aligned point according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the aligned point and the first distance information to obtain thickness fluctuation information includes: Determine second distance information between the frequency domain spectrum probe array and the non-aligned point according to the phase difference information of the non-aligned point, the speed of light, and the frequency of the incident wave of the frequency domain spectrum probe array; The thickness fluctuation information is determined according to the first distance information, the second distance information, the first incident angle information, and the coating thickness information at the alignment point.

3. The method according to claim 1, characterized in that: Acquiring the coating thickness information at the alignment point collected by the time domain spectroscopy probe, comprising: Acquire second incident angle information of the incident wave of the time domain spectroscopy probe at the alignment point; Acquire time difference information of two reflected waves collected by the time domain spectroscopy probe; The thickness information of the alignment point of the pole piece is determined according to the second incident angle information, the time difference information and the pre-acquired refractive index.

4. The method according to claim 3, characterized in that The step of obtaining the time difference information of two reflected waves collected by the time domain spectroscopy probe includes: Acquiring the first reflected wave reflected by the surface of the alignment point and the second reflected wave refracted and reflected by the pole piece coating collected by the time domain spectrum probe; extracting a first wave peak corresponding to the first reflected wave and a second wave peak corresponding to the second reflected wave respectively; The time difference information is determined according to the first wave peak and the second wave peak.

5. The method according to claim 1, characterized in that The step of obtaining a plurality of phase difference information collected by the frequency domain spectral probe array includes: Acquire a plurality of third reflected waves collected by the frequency domain spectral probe array; For each of the third reflected waves, a phase difference between the third reflected wave and an incident wave corresponding to the third reflected wave is acquired to obtain the phase difference information.

6. A coating thickness detection device, characterized in that: The device comprises: A thickness information acquisition module, used to acquire first distance information between the time domain spectrum probe and an alignment point on the pole piece coating and coating thickness information at the alignment point collected by the time domain spectrum probe; A phase difference information acquisition module is used to acquire multiple phase difference information collected by the frequency domain spectrum probe array; a thickness detection module, configured to perform thickness detection according to the first distance information, the coating thickness information at the alignment point and the plurality of phase difference information, and obtain coating thickness information at a plurality of non-alignment points; The phase difference information includes phase difference information of the alignment point and phase difference information of the non-alignment point, and the thickness detection module is specifically used to determine the first incident angle information of the incident wave of the frequency domain spectrum probe array at the alignment point according to the coating thickness information at the alignment point, the first distance information and the phase difference information of the alignment point; For each of the non-aligned points, according to the first incident angle information, the phase difference information of the non-aligned point, the coating thickness information at the aligned point and the first distance information, a thickness detection is performed on the non-aligned point to obtain thickness fluctuation information; Based on the thickness fluctuation information and the coating thickness information at the alignment point, the coating thickness information at the non-alignment point is determined.

7. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 1 to 5 are implemented.

8. A coating thickness detection system, characterized in that: The system comprises a processor and a plurality of probe groups, each of which comprises a time domain spectrum probe and a frequency domain spectrum probe array; the plurality of probe groups are respectively connected to the processor for communication; The processor is used to implement the steps of the method according to any one of claims 1 to 5.

9. The system according to claim 8, characterized in that The system further comprises a probe bracket and a base, wherein the probe bracket is fixed on the base, and the probe group is fixed on the probe bracket.

10. The system according to claim 9, characterized in that The probe bracket comprises a height adjustment component and a crossbeam. The height adjustment component is connected to the base and the crossbeam respectively, and the probe group is fixed on the crossbeam.

11. The system according to claim 10, characterized in that The probe bracket further comprises a probe fixing part, and the probe group is fixed on the crossbeam through the probe fixing part.

12. The system according to claim 8, characterized in that The time domain spectrum probe comprises a first time domain spectrum probe and a second time domain spectrum probe; The first time domain spectrometer probe is used to emit incident waves to the alignment points on the pole piece coating; The second time domain spectrometer probe is used to receive the reflected wave reflected from the alignment point on the pole piece coating.

13. The system according to claim 8, characterized in that The time domain spectrometer probe is a terahertz time domain spectrometer probe.

14. The system according to claim 8, characterized in that The frequency range of the time domain spectroscopy probe is between 0.1 THz and 10 THz.

15. The system according to claim 8, characterized in that The frequency domain spectrum probe array is a terahertz frequency domain spectrum probe array.

16. The system according to claim 8, characterized in that The frequency range of the frequency domain spectroscopy probe array is between 0.1 THz and 10 THz.

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