Laser direct writing lithography machine frame opening and closing mechanism

Abstract

The present invention relates to the technical field of automatic control equipment, and specifically to a laser direct writing lithography machine frame opening and closing mechanism, including an upper frame working group and a lower frame working group, the upper frame working group and the lower frame working group are relatively limited, and a control processing structure is provided on the upper frame working group and the lower frame working group, through which the upper frame working group and the lower frame working group can be controlled to run relative to each other, so as to perform the opening and closing control between the upper frame working group and the lower frame working group, and the control processing structure includes a servo motor, the servo motor is driven and connected with a tight screw rod, and the tight screw rod is threadedly connected with a guide rail lifting connecting frame, the guide rail lifting connecting frame is limited by a first linear guide rail and a second linear guide rail, and can move in a straight line, a lifting trapezoidal block is fixedly connected to one side of the guide rail lifting connecting frame, and a lifting V-shaped block is fixedly connected to the side of the lifting trapezoidal block away from the guide rail lifting connecting frame. Through the setting of the structure, the purpose of opening and closing adjustment is convenient.

Description

Technical Field

[0001] The invention relates to the technical field of automatic control equipment, in particular to a table frame opening and closing mechanism of a laser direct writing lithography machine. Background Art

[0002] Laser direct writing lithography: refers to the use of the high energy density and highly focused characteristics of the laser beam to directly expose the surface of the photoresist, thereby achieving precise characterization of micro-nano structures.

[0003] As the closest prior art, according to Chinese patent publication number CN112764322A, a long roller pressure plate mechanism of a laser direct writing lithography machine is disclosed, including a pressure plate part, the pressure plate part includes a supporting wing plate and a rubber roller assembly arranged below the supporting wing plate; the rubber roller assembly includes a rotating shaft and a rubber roller sleeved on the rotating shaft, both ends of the rotating shaft are connected to the supporting wing plate by a linear guide shaft, the lower end of the linear guide shaft is fixedly connected to the rotating shaft, the upper end of the linear guide shaft is connected to the supporting wing plate by sliding, a compression spring is arranged between the rotating shaft and the supporting wing plate, and the compression spring is sleeved on the linear guide shaft. The structure adopts a pressing technology to perform a limited extrusion work;

[0004] However, most of the current laser direct writing lithography machine frame opening and closing mechanisms use upper and lower frames to independently control the opening and closing, which makes the cost high, the structure complex, and there are problems of complex control technology. The present invention can solve the problem of simultaneous opening and closing of the upper and lower frames, and can improve the control effect of the overall movement. Summary of the invention

[0005] In view of the problems in the prior art, the present invention provides a laser direct writing lithography machine frame opening and closing mechanism.

[0006] The technical solution adopted by the present invention to solve its technical problem is: a laser direct writing lithography machine frame opening and closing mechanism, including an upper frame working group and a lower frame working group, the upper frame working group and the lower frame working group are relatively limited, and a control processing structure is provided on the upper frame working group and the lower frame working group, and the control processing structure can control the relative operation of the upper frame working group and the lower frame working group, thereby performing the opening and closing control between the upper frame working group and the lower frame working group.

[0007] Specifically, the control processing structure includes a servo motor, the servo motor is driven and connected with a tight screw rod, and the tight screw rod is threadedly connected to the guide rail lifting connecting frame, the guide rail lifting connecting frame is limited by the first linear guide and the second linear guide, and can move along a straight line, one side of the guide rail lifting connecting frame is fixedly connected with a lifting trapezoidal block, the side of the lifting trapezoidal block away from the guide rail lifting connecting frame is fixedly connected with a lifting V-shaped block, the lifting trapezoidal block is provided with a fourth lower table frame lifting bearing combination shaft and a fourth upper table frame lifting bearing combination shaft, the lower end of the fourth lower table frame lifting bearing combination shaft moves on the lifting trapezoidal block through a wheel body, and the fourth upper table frame lifting bearing combination shaft is also moved on the upper table frame through the wheel body The lifting and lowering ladder block moves, the third lower frame lifting bearing combination shaft moves on the lifting V-shaped block through the wheel body, the third upper frame lifting bearing combination shaft also moves on the lifting V-shaped block through the wheel body, the rear end of the third upper frame lifting bearing combination shaft is provided with a first upper frame lifting bearing combination shaft, the rear end of the third lower frame lifting bearing combination shaft is provided with a first lower frame lifting bearing combination shaft, the rear end of the fourth lower frame lifting bearing combination shaft is provided with a second lower frame lifting bearing combination shaft, the rear end of the fourth upper frame lifting bearing combination shaft is provided with a second upper frame lifting bearing combination shaft, the first upper frame lifting bearing combination shaft, the second upper frame lifting bearing combination shaft, the third upper frame lifting bearing combination shaft, the fourth The upper part of the table frame lifting bearing combination shaft is fixed to the upper table frame working group, and the upper parts of the first lower table frame lifting bearing combination shaft, the second lower table frame lifting bearing combination shaft, the third lower table frame lifting bearing combination shaft, and the fourth lower table frame lifting bearing combination shaft are fixed to the lower table frame working group, thereby controlling the relative movement of the upper table frame working group and the lower table frame working group, and the first table frame lifting limit guide column, the second table frame lifting limit guide column, the fourth table frame lifting limit guide column, and the third table frame lifting limit guide column are used for limiting the upper table frame working group and the lower table frame working group, so that the upper table frame working group and the lower table frame working group can be slidably adjusted along the longitudinal position, and through the setting of the servo motor, the tight screw rod can be driven to rotate, so that the guide rail lifting connecting frame The lifting and lowering parts are connected to the lifting and lowering parts of the vehicle body through the lifting and lowering parts of the vehicle body, and the lifting and lowering parts are connected to the lifting and lowering parts of the vehicle body through the lifting and lowering parts of the vehicle body.The first upper frame lifting bearing combination shaft, the second upper frame lifting bearing combination shaft, the third upper frame lifting bearing combination shaft, the fourth upper frame lifting bearing combination shaft, the first lower frame lifting bearing combination shaft, the second lower frame lifting bearing combination shaft, the third lower frame lifting bearing combination shaft, and the fourth lower frame lifting bearing combination shaft are respectively moved, thereby changing the positions of the upper frame working group and the lower frame working group to achieve the purpose of opening and closing adjustment. The control purpose is achieved through a unique V-shaped and trapezoidal structure setting and a set of servo motor screw devices. The structure is relatively simple, cost-saving, and a lot of space is saved at the same time, leaving sufficient operating space for other complex mechanisms. A set of mechanisms is used to achieve simultaneous opening and closing movements. At the same time, the mechanical positioning position is accurate, which reduces malfunctions and is more convenient for debugging.

[0008] Beneficial effects of the present invention:

[0009] The present invention can drive the tight screw rod to rotate through the setting of the servo motor, so that the guide rail lifting connection frame can move and adjust on the tight screw rod, and at the same time, the side end of the guide rail lifting connection frame is limited by the first linear guide rail and the second linear guide rail, so that the guide rail lifting connection frame can perform linear motion, and can drive the lifting V-shaped block and the lifting trapezoidal block to move synchronously. The lifting V-shaped block is arranged in a V shape, and the lifting trapezoidal block is arranged in a trapezoidal shape, and the upper end is connected with the first upper table frame lifting bearing combination shaft, the first lower table frame lifting bearing combination shaft, the second lower table frame lifting bearing combination shaft, the second upper table frame lifting bearing combination shaft, the third upper table frame lifting bearing combination shaft, the third lower table frame lifting bearing combination shaft, the fourth lower table frame lifting bearing combination shaft, and the fourth upper table frame lifting bearing combination shaft, accompanied by the lifting V-shaped block, the lifting ladder The movement of the block causes the first upper table frame lifting bearing combination axis, the second upper table frame lifting bearing combination axis, the third upper table frame lifting bearing combination axis, the fourth upper table frame lifting bearing combination axis and the first lower table frame lifting bearing combination axis, the second lower table frame lifting bearing combination axis, the third lower table frame lifting bearing combination axis, and the fourth lower table frame lifting bearing combination axis to move respectively, thereby changing the positions of the upper table frame working group and the lower table frame working group to achieve the purpose of opening and closing adjustment. The control purpose is achieved through a unique V-shaped and trapezoidal structure setting and a set of servo motor lead screw devices. The structure is relatively simple and cost-saving. At the same time, it saves a lot of space, leaving sufficient operating space for other complex mechanisms. A set of mechanisms is used to achieve simultaneous opening and closing movements. At the same time, the mechanical positioning position is accurate, misoperation is reduced, and debugging is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0011] Figure 1 A top view of the main body of the present invention;

[0012] Figure 2A cross-sectional view of the main body of the present invention;

[0013] Figure 3 It is a front view of the main body of the present invention;

[0014] Figure 4 It is a three-dimensional structural diagram of the main body of the present invention.

[0015] In the figure: 1-first upper frame lifting bearing combination shaft, 2-first lower frame lifting bearing combination shaft, 3-second lower frame lifting bearing combination shaft, 4-second upper frame lifting bearing combination shaft, 5-upper frame working group, 6-third lower frame lifting bearing combination shaft, 7-third upper frame lifting bearing combination shaft, 8-lifting V-shaped block, 9-lower frame working group, 10-fourth lower frame lifting bearing combination shaft, 11-lifting trapezoidal block, 12-fourth upper frame lifting bearing combination shaft, 13-first frame lifting limit guide column, 14-second frame lifting limit guide column, 15-first linear guide rail, 16-tight screw rod, 17-servo motor, 18-guide rail lifting connecting frame, 19-second linear guide rail, 20-third frame lifting limit guide column, 21-fourth frame lifting limit guide column. DETAILED DESCRIPTION

[0016] In order to enable those skilled in the art to better understand the solution of the present application, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present application.

[0017] The present invention is further described below in conjunction with the accompanying drawings. Example

[0018] like Figure 1-4 As shown, the laser direct writing lithography machine frame opening and closing mechanism of the present invention includes an upper frame working group 5 and a lower frame working group 9. The upper frame working group 5 and the lower frame working group 9 are relatively limited, and a control processing structure is provided on the upper frame working group 5 and the lower frame working group 9. The control processing structure can control the relative operation of the upper frame working group 5 and the lower frame working group 9, thereby performing the opening and closing control between the upper frame working group 5 and the lower frame working group 9.

[0019] The control processing structure includes a servo motor 17, which is driven and connected with a tight screw rod 16, and the tight screw rod 16 is threadedly connected with the guide rail lifting connecting frame 18. The servo motor 17 is controlled to drive, and can synchronously drive the tight screw rod 16 to rotate. The tight screw rod 16 is threadedly arranged with the guide rail lifting connecting frame 18, and the guide rail lifting connecting frame 18 is limited by the first linear guide 15 and the second linear guide 19, so that under the drive of the tight screw rod 16, the guide rail lifting connecting frame 18 can move along a straight line. The guide rail lifting connecting frame 18 is limited by the first linear guide 15 and the second linear guide 19 and can move along a straight line. A lifting trapezoid is fixedly connected to one side of the guide rail lifting connecting frame 18. Block 11, the lifting trapezoidal block 11 is fixedly connected with a lifting V-shaped block 8 on one side away from the guide rail lifting connecting frame 18, and the lifting trapezoidal block 11 is provided with a fourth lower frame lifting bearing combination shaft 10 and a fourth upper frame lifting bearing combination shaft 12. The lower end of the fourth lower frame lifting bearing combination shaft 10 moves on the lifting trapezoidal block 11 through the wheel body, and the fourth upper frame lifting bearing combination shaft 12 also moves on the lifting trapezoidal block 11 through the wheel body. The third lower frame lifting bearing combination shaft 6 moves on the lifting V-shaped block 8 through the wheel body, and the third upper frame lifting bearing combination shaft 7 also moves on the lifting V-shaped block 8 through the wheel body. The rear end of the third upper frame lifting bearing combination shaft 7 is provided with a first upper frame lifting bearing combination shaft 1, and the third lower frame lifting shaft The rear end of the bearing assembly shaft 6 is provided with the first lower table frame lifting bearing assembly shaft 2, the rear end of the fourth lower table frame lifting bearing assembly shaft 10 is provided with the second lower table frame lifting bearing assembly shaft 3, and the rear end of the fourth upper table frame lifting bearing assembly shaft 12 is provided with the second upper table frame lifting bearing assembly shaft 4. The upper parts of the first upper table frame lifting bearing assembly shaft 1, the second upper table frame lifting bearing assembly shaft 4, the third upper table frame lifting bearing assembly shaft 7, and the fourth upper table frame lifting bearing assembly shaft 12 are fixed to the upper table frame working group 5, and the upper parts of the first lower table frame lifting bearing assembly shaft 2, the second lower table frame lifting bearing assembly shaft 3, the third lower table frame lifting bearing assembly shaft 6, and the fourth lower table frame lifting bearing assembly shaft 10 are fixed to the lower table frame working group 9, thereby controlling the upper table frame working group 5. , and the lower frame working group 9 move relative to each other, and the first frame lifting limit guide post 13, the second frame lifting limit guide post 14, the fourth frame lifting limit guide post 21, and the third frame lifting limit guide post 20 are used for limiting the upper frame working group 5 and the lower frame working group 9, so that the upper frame working group 5 and the lower frame working group 9 slide and adjust along the longitudinal position, and a lifting V-shaped block 8 and a lifting trapezoidal block 11 are fixedly provided on the guide rail lifting connecting frame 18, which drive the lifting V-shaped block 8 and the lifting trapezoidal block 11 to move synchronously, and the upper end of the lifting V-shaped block 8 is connected with the first upper frame lifting bearing combination shaft 1, the first lower frame lifting bearing combination shaft 2, the third lower frame lifting bearing combination shaft 6, and the third upper frame lifting bearing combination shaft 7 through the wheel body.The upper end of the lifting trapezoidal block 11 is connected to the second upper frame lifting bearing assembly shaft 4, the second lower frame lifting bearing assembly shaft 3, the fourth upper frame lifting bearing assembly shaft 12, and the fourth lower frame lifting bearing assembly shaft 10, and the height position can be adjusted along with the displacement.

[0020] Working principle: When in use, the user controls the servo motor 17 to drive, which can synchronously drive the compact screw 16 to rotate. The compact screw 16 is threaded with the guide rail lifting connection frame 18, and the guide rail lifting connection frame 18 is limited by the first linear guide 15 and the second linear guide 19, so that under the drive of the compact screw 16, the guide rail lifting connection frame 18 can move along a straight line. At the same time, the guide rail lifting connection frame 18 is fixed with a lifting V-shaped block 8 and a lifting trapezoidal block 11, which drives the lifting V-shaped block 8 and the lifting trapezoidal block 11 to rotate. The blocks 11 move synchronously, the upper end of the lifting V-shaped block 8 is connected to the first upper frame lifting bearing combination shaft 1, the first lower frame lifting bearing combination shaft 2, the third lower frame lifting bearing combination shaft 6, and the third upper frame lifting bearing combination shaft 7 through the wheel body, and the upper end of the lifting trapezoidal block 11 is connected to the second upper frame lifting bearing combination shaft 4, the second lower frame lifting bearing combination shaft 3, the fourth upper frame lifting bearing combination shaft 12, and the fourth lower frame lifting bearing combination shaft 10. Due to the V-shaped structure of the lifting V-shaped block 8, the lifting V-shaped block 8 is When moving to the left, the third upper frame lifting bearing assembly shaft 7 and the first upper frame lifting bearing assembly shaft 1 descend, while the first lower frame lifting bearing assembly shaft 2 and the third lower frame lifting bearing assembly shaft 6 rise. At the same time, when the lifting trapezoidal block 11 moves to the left, the second lower frame lifting bearing assembly shaft 3 and the fourth lower frame lifting bearing assembly shaft 10 move upward, and the second upper frame lifting bearing assembly shaft 4 and the fourth upper frame lifting bearing assembly shaft 12 move downward, thereby changing the positions of the upper upper frame working group 5 and the lower frame working group 9. The upper parts of the first lower table frame lifting bearing combination shaft 2, the second lower table frame lifting bearing combination shaft 3, the third lower table frame lifting bearing combination shaft 6, and the fourth lower table frame lifting bearing combination shaft 10 are fixed to the lower table frame working group 9, and the upper parts of the first upper table frame lifting bearing combination shaft 1, the second upper table frame lifting bearing combination shaft 4, the third upper table frame lifting bearing combination shaft 7, and the fourth upper table frame lifting bearing combination shaft 12 are fixed to the upper table frame working group 5, so that the upper table frame working group 5 and the lower table frame working group 9 move in the opposite direction, perform closing processing, and complete the work.

[0021] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A laser direct writing lithography machine frame opening and closing mechanism, characterized in that: The device comprises an upper frame working group (5) and a lower frame working group (9), wherein the upper frame working group (5) and the lower frame working group (9) are relatively limitedly arranged, and a control processing structure is provided on the upper frame working group (5) and the lower frame working group (9), and the control processing structure can control the relative operation of the upper frame working group (5) and the lower frame working group (9), thereby performing opening and closing control between the upper frame working group (5) and the lower frame working group (9); The control processing structure comprises a servo motor (17), the servo motor (17) is drivingly connected with a tight screw rod (16), and the tight screw rod (16) is threadedly connected to a guide rail lifting connection frame (18), and the servo motor (17) is controlled to drive, so as to synchronously drive the tight screw rod (16) to rotate, the tight screw rod (16) is threadedly arranged with the guide rail lifting connection frame (18), and the guide rail lifting connection frame (18) is limited by a first linear guide rail (15) and a second linear guide rail (19), so that under the drive of the tight screw rod (16), the guide rail lifting connection frame (18) can move along a straight line, and the guide rail lifting connection frame (18) is limited by the first linear guide rail (15) and the second linear guide rail (19), so as to be able to move along a straight line. The guide rail lifting connection frame (18) is provided with a lifting trapezoidal block (11) on one side thereof, and a lifting V-shaped block (8) is fixedly connected to the lifting trapezoidal block (11) on the side thereof facing away from the guide rail lifting connection frame (18). The lifting trapezoidal block (11) is provided with a fourth lower frame lifting bearing combination shaft (10) and a fourth upper frame lifting bearing combination shaft (12). The lower end of the fourth lower frame lifting bearing combination shaft (10) moves on the lifting trapezoidal block (11) through a wheel body, and the fourth upper frame lifting bearing combination shaft (12) also moves on the lifting trapezoidal block (11) through a wheel body. The third lower frame lifting bearing combination shaft (6) moves on the lifting V-shaped block (8) through a wheel body, and the third upper frame lifting bearing combination shaft (7) also moves on the lifting The V-shaped block (8) moves upward, the rear end of the third upper frame lifting bearing combination shaft (7) is provided with a first upper frame lifting bearing combination shaft (1), the rear end of the third lower frame lifting bearing combination shaft (6) is provided with a first lower frame lifting bearing combination shaft (2), the rear end of the fourth lower frame lifting bearing combination shaft (10) is provided with a second lower frame lifting bearing combination shaft (3), the rear end of the fourth upper frame lifting bearing combination shaft (12) is provided with a second upper frame lifting bearing combination shaft (4), the upper parts of the first upper frame lifting bearing combination shaft (1), the second upper frame lifting bearing combination shaft (4), the third upper frame lifting bearing combination shaft (7), and the fourth upper frame lifting bearing combination shaft (12) are fixed to the upper frame working group (5), and the first lower frame lifting bearing combination shaft ( 2), the upper parts of the second lower frame lifting bearing assembly shaft (3), the third lower frame lifting bearing assembly shaft (6), and the fourth lower frame lifting bearing assembly shaft (10) are fixed to the lower frame working group (9), thereby controlling the relative movement of the upper frame working group (5) and the lower frame working group (9), and the first frame lifting limit guide column (13), the second frame lifting limit guide column (14), the fourth frame lifting limit guide column (21), and the third frame lifting limit guide column (20) are used to limit the upper frame working group (5) and the lower frame working group (9), so that the upper frame working group (5) and the lower frame working group (9) can be slidably adjusted along the longitudinal position, and a lifting V-shaped block (8) and a lifting ladder block (11) are fixedly provided on the guide rail lifting connection frame (18).The lifting V-shaped block (8) and the lifting trapezoidal block (11) are driven to move synchronously. The upper end of the lifting V-shaped block (8) is connected to the first upper frame lifting bearing combination shaft (1), the first lower frame lifting bearing combination shaft (2), the third lower frame lifting bearing combination shaft (6), and the third upper frame lifting bearing combination shaft (7) through the wheel body. The upper end of the lifting trapezoidal block (11) is connected to the second upper frame lifting bearing combination shaft (4), the second lower frame lifting bearing combination shaft (3), the fourth upper frame lifting bearing combination shaft (12), and the fourth lower frame lifting bearing combination shaft (10), and the height position can be adjusted along with the displacement.

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