High-efficiency coating device with zirconium dioxide raw material

Abstract

The invention relates to the technical field of high-efficiency coating devices, and specifically to a high-efficiency coating device with zirconium dioxide raw material, which also includes a rotary switching mechanism, a vertical rotator and a horizontal rotator. Each storage table is provided with a rotatable vertical rotating rod. The high-efficiency coating device for zirconium dioxide raw material can make the workpiece placed flat on the storage table undergo rotational coating, and at the same time, it can also make the workpiece be clamped on the vertical rotating rod, so that the workpiece whose bottom needs to be coated can also be used with the device, thereby reducing the maintenance cost and floor space of the device. After the workpiece is clamped on the push ring, it can be pushed by the workpiece to automatically lock the workpiece. The locking process is rapid, and when pushing, the transmission column and the push column can be clamped more smoothly by the worker to ensure that the push column can drive the transmission column to rotate, and after the clamping is completed, the clamping plate can be locked by the second retaining ring.

Description

Technical Field

[0001] The invention relates to the technical field of high-efficiency film coating devices, and in particular to a high-efficiency film coating device with a zirconium dioxide raw material. Background Art

[0002] The raw materials of vacuum coating materials are mainly made of silicon dioxide, zirconium dioxide, tungsten trioxide, titanate, chromium fluoride, cryolite and nitride. The vacuum coating materials are placed in the coating equipment and heated to make the gaseous coating materials enter the reaction chamber for coating.

[0003] Chinese Patent Publication No.: CN202021412068.8, discloses: a vacuum coating device, which includes a reaction chamber and a pipeline assembly. A bracket for placing the workpiece to be coated is provided in the reaction chamber, and the reaction chamber has at least one feed port and one or more exhaust ports, wherein the feed port of the reaction chamber is used to add the chemical monomer gas into the reaction chamber. The pipeline assembly includes a vacuum pipeline, wherein the vacuum pipeline is suitable for connecting the exhaust port of the reaction chamber with the vacuum pump to evacuate the reaction chamber via the exhaust port.

[0004] However, although the above scheme can place the workpiece on the storage table and realize coating by contacting the coating gas with the workpiece, this will result in the inability to coat the contact surface between the workpiece and the storage table, and the workpiece that needs to be coated on the bottom will not be able to be processed by this equipment. If a coating device is designed separately for workpieces that also need to be coated on the bottom, this will increase the floor space of the factory, and the device will also require frequent maintenance, wasting a lot of manpower and material resources. Therefore, it is necessary to design an efficient coating device with zirconium dioxide raw material, which can be adapted to the use of workpieces that are laid flat for coating and workpieces that need bottom coating, so as to reduce the maintenance cost and floor space of the device. Summary of the invention

[0005] In view of the above-mentioned technical deficiencies, the purpose of the present invention is to provide an efficient coating device with zirconium dioxide raw material, which can be adapted to workpieces that are laid flat for coating and workpieces that require bottom coating, thereby reducing the maintenance cost and floor space of the device.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: the present invention provides a high-efficiency film-plating device with zirconium dioxide raw material, including a reaction chamber and a central rotating column, a rotator for driving the central rotating column to rotate is fixedly arranged on the top of the reaction chamber, a plurality of hollow rotating columns capable of vertical rotation are fixedly arranged in the reaction chamber, a plurality of storage tables are fixedly arranged on each hollow rotating column, a vacuum exhaust port and a gas injection port are arranged on the reaction chamber, the vacuum exhaust port is used for vacuum equipment to vacuum the inside of the reaction chamber, the gas injection port is used for gasification equipment to inject the gas required for film coating into the reaction chamber, and an opening and closing door is arranged at the position of the reaction chamber facing the plurality of hollow rotating columns, and the opening and closing door is used for workers to place workpieces on the storage The platform also includes a rotation switching mechanism, a vertical rotator and a horizontal rotator. Each storage platform is provided with a rotatable vertical rotating rod. The horizontal rotator is fixedly installed at the bottom of the inner edge of the reaction chamber. The horizontal rotator is used to transmit the rotational force of the central rotating column to the hollow rotating column. The vertical rotator can be vertically slidably installed on the outer edge of the central rotating column. The rotation switching mechanism is fixedly installed on the horizontal rotator. The rotation switching mechanism is used to lift the vertical rotator upward; when the rotation switching mechanism is not lifted upward, the vertical rotator is connected to the horizontal rotator by transmission, and the vertical rotator is separated from the vertical rotating rod; when the rotation switching mechanism is lifted upward, the vertical rotator is connected to the vertical rotating rod by transmission, and the vertical rotator is separated from the horizontal rotator.

[0007] Preferably, a plurality of clamping strips are arranged on the outer edge of the central rotating column, and the vertical rotator comprises a sleeve sleeved on the outer edge of the central rotating column, and a plurality of clamping slots are opened on the inner edge of the sleeve, and the clamping slots are clamped in the clamping strips.

[0008] Preferably, a plurality of turntables are fixedly provided on the outer edge of the vertical rotator, and the turntable at the bottom layer is in contact with the lifting end of the rotation switching mechanism, and a plurality of push columns are fixedly provided on each turntable, and the plurality of push columns are evenly distributed along the circumferential direction of the turntable, and a card plate is provided on one end of the vertical rotating rod close to the turntable, and a plurality of transmission columns are fixedly provided on the card plate, and the plurality of transmission columns are evenly distributed along the circumferential direction of the card plate, when the turntable is lifted upward by the rotation switching mechanism, the end of the push column will be inserted into the transmission column, and a plurality of push bars are fixedly provided on the bottom of the outer edge of the sleeve, and a plurality of transmission bars are provided on the horizontal rotator, and when the sleeve is in the initial position, each transmission bar is inserted between two push bars, and when the turntable is lifted upward, the push bar will be pulled out from between the two transmission bars.

[0009] Preferably, the horizontal rotator also includes a swivel seat, a gear ring and a plurality of gears. A avoidance hole for the sleeve to pass through is provided in the middle of the swivel seat. The transmission bar is fixedly installed on the inner wall of the avoidance hole. The swivel seat is rotatably installed in the reaction chamber. The gear ring is fixedly installed on the swivel seat. The plurality of gears are respectively fixedly installed on a plurality of hollow rotating columns. The plurality of gears are all meshedly connected with the gear ring. A swivel seat is fixedly provided at both upper and lower ends of the hollow rotating column.

[0010] Preferably, it also includes a rotating seat, a strong magnet, a push ring, an external support mechanism and a clamping column. A conduit is fixedly arranged on the outer edge of the hollow rotating column, the vertical rotating rod is slidably connected to the conduit, the storage table includes a box body and a box cover arranged on the top of the box body, the conduit is located inside the box body, the clamping column is fixedly connected to one end of the vertical rotating rod, the strong magnet is fixedly installed on the outer edge of the clamping column, the push ring is sleeved on the outer edge of the clamping column, a retaining ring for blocking the workpiece is arranged on the outer edge of the push ring, the external support mechanism is fixedly installed on the end of the clamping column, the external support mechanism is transmission connected to the push ring, and when the push ring moves, the external support mechanism will diffuse outward.

[0011] Preferably, the external support mechanism includes a cover plate, four hinged rods, four sliders and four slide rails. The cover plate is fixedly mounted on the end of the clamping column, and the four slide rails are fixedly mounted on the push ring. The slider is slidably connected to the slide rail, one end of the hinged rod is hinged to the slider, and the other end of the hinged rod is hinged to the cover plate.

[0012] Preferably, a second retaining ring is provided on the bottom outer edge of the turntable, and the second retaining ring is fixedly connected to the turntable through a connecting ring. The side of the clamping plate away from the transmission column is a conical structure, and the lifting end of the rotary switching mechanism contacts the connecting ring.

[0013] Preferably, the rotary switching mechanism comprises a plurality of lifting push rods, which are fixedly mounted on the rotating seat, and a ball head seat is fixedly arranged on the top of each lifting push rod, and the top of the ball head seat abuts against the connecting ring.

[0014] Preferably, a return spring is sleeved on the outer edge of the vertical rotating rod, a retaining ring three is fixedly arranged on the outer edge of the vertical rotating rod, one end of the return spring abuts against the guide tube, and the other end of the return spring abuts against the retaining ring three.

[0015] The beneficial effects of the present invention are as follows: the efficient coating device for zirconium dioxide raw materials can perform rotational coating on workpieces placed flat on a storage table, and can also enable the workpieces to be clamped on a vertical rotating rod, so that workpieces whose bottoms need to be coated can also be used with the device, thereby reducing the maintenance cost and floor space occupied by the device.

[0016] After the workpiece is clamped on the push ring, it can be pushed by the workpiece to automatically lock the workpiece. The locking process is rapid, and when pushing, the transmission column and the push column can be clamped more smoothly by workers to ensure that the push column can drive the transmission column to rotate. After the clamping is completed, the clamping plate can be locked by the second retaining ring to ensure that the clamping plate will not separate during rotation.

[0017] According to the different hole diameters of each workpiece, the clamping column and the vertical rotating rod can be disassembled and replaced, so that the device can be suitable for use with more workpieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the present invention without the reaction chamber.

[0021] Figure 3 It is a partial cross-sectional view of the present invention.

[0022] Figure 4 It is a schematic diagram of the three-dimensional structure decomposition of the central rotating column and the sleeve.

[0023] Figure 5 This is a schematic diagram of the partial three-dimensional structure of the vertical rotator.

[0024] Figure 6 Schematic diagram of the partial three-dimensional structure of the horizontal rotator.

[0025] Figure 7 It is a schematic diagram of the local three-dimensional structure of the present invention.

[0026] Figure 8 for Figure 3 A partial enlarged view of point A.

[0027] Fig. 9 This is a partial schematic diagram of the worker pushing the vertical rotating rod.

[0028] Fig.10 It is a schematic diagram of the three-dimensional structure of the external support mechanism.

[0029] Fig.11 It is a cross-sectional view of the transmission column and the push column after being clamped together in the present invention.

[0030] Fig.12 Schematic diagram of the three-dimensional structure of the external support mechanism

[0031] Description of the reference numerals: 1, reaction chamber; 1a, vacuum pumping port; 1b, gas injection port; 1c, opening and closing door; 2, storage table; 2a, vertical rotating rod; 2b, clamping plate; 2c, transmission column; 2d, box body; 3, rotator; 4, central rotating column; 4a, clamping strip; 5, hollow rotating column; 5a, conduit; 6, rotation switching mechanism; 6a, lifting push rod; 6b, ball head seat; 7, vertical rotator; 7a, sleeve; 7 a1, card slot; 7a2, push bar; 7b, turntable; 7c, push column; 7d, retaining ring 2; 8, horizontal rotator; 8a, transmission bar; 8b, swivel seat; 8c, gear ring; 8d, gear; 9, swivel seat; 10, strong magnet; 11, push ring; 11a, retaining ring 1; 12, external support mechanism; 12a, slider; 12b, slide rail; 12c, hinged rod; 12d, cover plate; 13, card column; 14, reset spring. DETAILED DESCRIPTION

[0032] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0033] Embodiment: The present invention provides an efficient coating device with zirconium dioxide raw material, such as Figure 1-3 As shown, it includes a reaction chamber 1 and a central rotating column 4, a rotator 3 for driving the central rotating column 4 to rotate is fixedly arranged on the top of the reaction chamber 1, a plurality of hollow rotating columns 5 capable of vertical rotation are fixedly arranged in the reaction chamber 1, and a plurality of storage tables 2 are fixedly arranged on each hollow rotating column 5, wherein a vacuum exhaust port 1a and a gas injection port 1b are arranged on the reaction chamber 1, the vacuum exhaust port 1a is used for the vacuum equipment to evacuate the inside of the reaction chamber 1, and the gas injection port 1b is used for the gasification equipment to inject the gas required for coating into the reaction chamber 1, and an opening and closing door 1c is arranged at the position of the reaction chamber 1 facing the plurality of hollow rotating columns 5, and the opening and closing The door 1c is used for workers to place workpieces on the storage table 2, and also includes a rotation switching mechanism 6, a vertical rotator 7 and a horizontal rotator 8. Each storage table 2 is provided with a rotatable vertical rotation rod 2a. The horizontal rotator 8 is fixedly installed at the bottom of the inner edge of the reaction chamber 1. The horizontal rotator 8 is used to transmit the rotation force of the central rotating column 4 to the hollow rotating column 5. The vertical rotator 7 can be vertically slidably installed on the outer edge of the central rotating column 4. When the central rotating column 4 rotates, the vertical rotator 7 can be driven to rotate. The rotation switching mechanism 6 is fixedly installed on the horizontal rotator 8. The rotation switching mechanism 6 is used to lift the vertical rotator 7 upward;

[0034] When the rotation switching mechanism 6 is not lifted upward, the vertical rotator 7 is connected to the horizontal rotator 8 by transmission, and the vertical rotator 7 is separated from the vertical rotating rod 2a, that is, when the central rotating column 4 rotates, the central rotating column 4 will drive the vertical rotator 7 to rotate, and the vertical rotator 7 will drive the horizontal rotator 8 to rotate through the transmission connection, and the horizontal rotator 8 can drive the hollow rotating column 5 to rotate, so that the hollow rotating column 5 drives the multiple storage tables 2 to rotate, so that the multiple workpieces placed on the top surface of the storage table 2 can be closer to the inner wall of the reaction chamber 1 one by one, so that the workpieces can be better coated. Among them, the storage table 2 drives the vertical rotating rod 2a to rotate horizontally, but the vertical rotating rod 2a will not collide with the vertical rotator 7 because the vertical rotating rod 2a is not lifted upward.

[0035] When the rotation switching mechanism 6 is lifted upward, the vertical rotator 7 is connected to the vertical rotating rod 2a, and the vertical rotator 7 is separated from the horizontal rotator 8, that is, when the central rotating column 4 rotates, the central rotating column 4 will drive the vertical rotating rod 2a to rotate through the vertical rotator 7. The workpiece is clamped at the end of the vertical rotating rod 2a, and when the vertical rotating rod 2a rotates, it can drive the workpiece to rotate vertically, ensuring that the bottom of the workpiece can also be coated, and the workpiece can be driven to rotate, so that the workpiece can be better in contact with the coating gas, that is, it can be better coated.

[0036] Through the above-mentioned method, it can be adapted to the workpieces that are to be coated horizontally and the workpieces that need bottom coating, thereby reducing the maintenance cost and floor space occupied by the device.

[0037] In order to realize that the vertical rotator 7 can slide vertically along the central rotating column 4, and the central rotating column 4 can drive the vertical rotator 7 to rotate when rotating, for this purpose, Figure 4 As shown, a plurality of clamping strips 4a are arranged on the outer edge of the central rotating column 4, and the vertical rotator 7 includes a sleeve 7a sleeved on the outer edge of the central rotating column 4, and a plurality of clamping grooves 7a1 are opened on the inner edge of the sleeve 7a, and the clamping grooves 7a1 are clamped in the clamping strip 4a. By rotating the central rotating column 4, the central rotating column 4 can drive the sleeve 7a to rotate through the clamping grooves 7a1. When the vertical rotator 7 is lifted upward, since the clamping grooves 7a1 are still clamped with the clamping strip 4a, the central rotating column 4 can still drive the sleeve 7a to rotate, that is, the vertical rotator 7 always keeps rotating.

[0038] In order to realize that when the rotation switching mechanism 6 is not lifted upward, the vertical rotator 7 is connected to the horizontal rotator 8 by transmission, and when the rotation switching mechanism 6 is lifted upward, the vertical rotator 7 is connected to the vertical rotation rod 2a by transmission, for this purpose, Figure 3 and Figure 5As shown, a plurality of layers of turntables 7b are fixedly provided on the outer edge of the vertical rotator 7, and the turntable 7b at the bottom layer is in contact with the lifting end of the rotation switching mechanism 6. When the rotation switching mechanism 6 is lifted upward, the turntable 7b at the bottom layer will be pushed upward, so that the multi-layer turntables 7b will all move upward. A plurality of push posts 7c are fixedly provided on each turntable 7b, and the plurality of push posts 7c are evenly distributed along the circumferential direction of the turntable 7b. A card plate 2b is provided at one end of the vertical rotating rod 2a close to the turntable 7b, and a plurality of transmission posts 2c are fixedly provided on the card plate 2b, and the plurality of transmission posts 2c are evenly distributed along the circumferential direction of the card plate 2b. When the turntable 7b is lifted upward by the rotation switching mechanism 6, the end of the push post 7c will be inserted into the transmission post 2c, and the plurality of push posts 7c will be rotated, so that the plurality of push posts 7c can drive the plurality of transmission posts 2c to move by means of rotation and pushing, and the vertical rotating rod 2a can be driven to rotate by the action of the transmission post 2c. A plurality of push bars 7a2 are fixedly arranged at the bottom of the outer edge of the sleeve 7a, and a plurality of transmission bars 8a are arranged on the horizontal rotator 8. When the sleeve 7a is in the initial position, each transmission bar 8a is inserted between two push bars 7a2, so that when the sleeve 7a rotates, the transmission bar 8a can be pushed to rotate, and the horizontal rotator 8 can be driven to rotate by the transmission bar 8a. When the turntable 7b is lifted upward, the push bar 7a2 will be pulled out from between the two transmission bars 8a, so that when the sleeve 7a rotates, the sleeve 7a will not be able to contact the transmission bar 8a, that is, the sleeve 7a cannot drive the horizontal rotator 8 to rotate, so that the plurality of hollow rotating columns 5 cannot rotate. That is, through the above-mentioned method, when the rotation switching mechanism 6 is not lifted upward, the central rotating column 4 transmits power to the vertical rotator 7, and through the action of the push bar 7a2 and the transmission bar 8a, the power can be transmitted to the horizontal rotator 8, so that the hollow rotating column 5 rotates. When the rotation switching mechanism 6 is lifted upward, the transmission bar 8a is separated from the push bar 7a2, and the push column 7c is engaged with the transmission column 2c, so that the sleeve 7a can drive the vertical rotation rod 2a to rotate when it rotates. That is, when the rotation switching mechanism 6 is not lifted upward, the vertical rotator 7 is in transmission connection with the horizontal rotator 8, and when the rotation switching mechanism 6 is lifted upward, the vertical rotator 7 is in transmission connection with the vertical rotation rod 2a.

[0039] In order to realize the conversion of the power of the transmission bar 8a into the rotational power of the hollow rotating column 5, for this purpose, as shown in FIG. Figure 3 , Figure 5 and Figure 6As shown, the horizontal rotator 8 also includes a rotating seat 8b, a gear ring 8c and a plurality of gears 8d. The middle part of the rotating seat 8b is provided with an avoidance hole for the sleeve 7a to pass through. The transmission bar 8a is fixedly mounted on the inner wall of the avoidance hole. The rotating seat 8b is rotatably mounted in the reaction chamber 1. The gear ring 8c is fixedly mounted on the rotating seat 8b. The plurality of gears 8d are respectively fixedly mounted on the plurality of hollow rotating columns 5. The plurality of gears 8d are all meshedly connected with the gear ring 8c. The upper and lower ends of the hollow rotating column 5 are fixedly provided with a rotating seat 9. The transmission bar 8a is driven to rotate, so that the transmission bar 8a can drive the gear ring 8c to rotate through the rotating seat 8b, that is, the gear ring 8c can drive the plurality of hollow rotating columns 5 to rotate simultaneously through the meshing with the gear 8d, so that the storage table 2 on each hollow rotating column 5 is driven to rotate. It should be noted that when multiple vertical rotating rods 2a are required to rotate, the axes of the multiple vertical rotating rods 2a will be perpendicular to the axis of the central rotating column 4, so that the push column 7c can be plugged into the transmission column 2c later.

[0040] When the workpiece is engaged with the end of the vertical rotating rod 2a, there is no obstruction between the end of the vertical rotating rod 2a and the workpiece, making it easy for the workpiece to be thrown out. If an electric or pneumatic blocker is set, since the vertical rotating rod 2a itself needs to rotate, this will cause the wire harness to be entangled in the device, causing device failure. Therefore, it is necessary to design a device that can replace the electric or pneumatic locking to fix the workpiece, and the fixing speed needs to be faster. For this purpose, Figure 6 and Figure 7As shown, it also includes a rotating seat 9, a strong magnet 10, a push ring 11, an external support mechanism 12 and a clamping column 13. A guide tube 5a is fixedly arranged on the outer edge of the hollow rotating column 5, and the vertical rotating rod 2a is slidably connected with the guide tube 5a. The storage table 2 includes a box body 2d and a box cover arranged on the top of the box body 2d. The guide tube 5a is located inside the box body 2d. The clamping column 13 is fixedly connected with one end of the vertical rotating rod 2a. The strong magnet 10 is fixedly installed on the outer edge of the clamping column 13. The clamping column 13 can adopt a plastic structure so that the strong magnet The magnetic force of iron 10 will not be transmitted to the clamping column 13. The push ring 11 is sleeved on the outer edge of the clamping column 13. A retaining ring 11a is provided on the outer edge of the push ring 11 for blocking the workpiece. The mounting hole of the workpiece can be sleeved on the push ring 11, and then the workpiece can be pushed horizontally to make the retaining ring 11a and the strong magnet 10 come into contact with each other. Then, by continuing to push, the push ring 11 and the box body 2d can come into contact with each other, so that the strong magnet 10 and the box body 2d are attracted to each other, and the installation of the workpiece can be achieved. The outer support mechanism 12 is fixedly installed at the end of the clamping column 13, and is in transmission connection with the push ring 11. When the push ring 11 moves, the outer support mechanism 12 will spread outward, that is, it will block one side of the push ring 11 to prevent the workpiece from being thrown out during rotation. The blocking force of the outer support mechanism 12 on the workpiece depends on the attraction between the retaining ring 11a and the strong magnet 10. The retaining ring 11a can be replaced with a magnet to increase the attraction. It should be noted that Figure 8 In the position shown, a gap is left between the retaining ring 11a and the strong magnet 10, and the gap can prevent the strong magnet 10 from pulling the push ring 11 through magnetic force.

[0041] When the push ring 11 is attracted to the strong magnet 10, it is necessary to push the strong magnet 10 to attract the box body 2d. The main effect is that the vertical rotating rod 2a will be pushed along with it. Figure 3 As shown, the transmission column 2c can be inserted into the push column 7c. If there is a conflict, the position of the transmission column 2c can be adjusted by slightly rotating it. Before the vertical rotating rod 2a is pushed, the rotating disk 7b needs to be lifted upward by the rotating switching mechanism 6 in advance, so that the push column 7c moves to a position where it can contact the transmission column 2c. It should be noted that this position is not the final position of the rotating disk 7b when it is lifted upward. Fig. 9 The status shown. Fig.11 It is the final position of the turntable 7b being lifted upward.

[0042] in Figure 8 The outer support mechanism 12 is in a retracted state. Fig.10 The outer supporting mechanism 12 is in a diffusion state, that is, a state of blocking the workpiece. Figure 8 The diameter of the outer support mechanism 12 is smaller than the outer diameter of the push ring 11, and will not cause any obstruction when the workpiece is installed.

[0043] In order to realize that after the push ring 11 is pulled, the outer support mechanism 12 can automatically block, for this purpose, Fig.10 and Fig.12 As shown, the external support mechanism 12 includes a cover plate 12d, four hinged rods 12c, four sliders 12a and four slide rails 12b. The cover plate 12d is fixedly mounted on the end of the clamping column 13, and the four slide rails 12b are fixedly mounted on the push ring 11. The slider 12a is slidably connected to the slide rail 12b. One end of the hinged rod 12c is hinged to the slider 12a, and the other end of the hinged rod 12c is hinged to the cover plate 12d. By pulling the push ring 11 horizontally, the push ring 11 pulls the slider 12a to move. Since the cover plate 12d cannot move, the four sliders 12a can be pushed outward by the action of the hinged rod 12c, so that the four sliders 12a block the workpiece, that is, after the push ring 11 is pulled, the external support mechanism 12 can automatically block.

[0044] like Fig.11 As shown, the outer edge of the bottom of the rotating disk 7b is provided with a second retaining ring 7d, which is fixedly connected to the rotating disk 7b through a connecting ring. The side of the clamping plate 2b away from the transmission column 2c is a conical structure, and the lifting end of the rotating switching mechanism 6 contacts the connecting ring. When the rotating switching mechanism 6 lifts the rotating disk 7b upward to the final position, it will present Fig.11 The retaining ring 2 7d blocks the clamping plate 2b so that the clamping plate 2b will not be pushed outward when rotating, thereby ensuring the position of the clamping plate 2b, that is, the transmission column 2c can be kept engaged with the push column 7c.

[0045] like Figure 5 and Fig.11 As shown, the rotation switching mechanism 6 includes a plurality of lifting push rods 6a, and the plurality of lifting push rods 6a are fixedly mounted on the rotating seat 8b, and a ball head seat 6b is fixedly arranged on the top of each lifting push rod 6a. The top of the ball head seat 6b is in conflict with the connecting ring, and by controlling the lifting push rods 6a to work, the plurality of lifting push rods 6a can lift the ball head seat 6b upward, and the ball head seat 6b can lift the rotating disk 7b upward, that is, the vertical rotator 7 moves upward as a whole. The vertical rotator 7 can be switched to be connected with the horizontal rotator 8 or the vertical rotating rod 2a through the rotation switching mechanism 6.

[0046] like Figure 8 As shown, a return spring 14 is sleeved on the outer edge of the vertical rotating rod 2a, and a retaining ring 3 15 is fixedly arranged on the outer edge of the vertical rotating rod 2a. One end of the return spring 14 abuts against the conduit 5a, and the other end of the return spring 14 abuts against the retaining ring 3 15. The retaining ring 3 15 is pushed by the elastic force of the return spring 14. After the strong magnet 10 and the box body 2d are pulled apart, the return spring 14 can push the retaining ring 3 15 to abut against the box body 2d, thereby ensuring that the vertical rotating rod 2a will not slide freely along the conduit 5a.

[0047] When in use, when the rotator 3 drives the central rotating column 4 to rotate, the central rotating column 4 will drive the vertical rotator 7 to rotate. When the rotation switching mechanism 6 is not lifted upward, the vertical rotator 7 will drive the transmission bar 8a to rotate through the push bar 7a2, so that the gear ring 8c can rotate, and the gear ring 8c will drive the gear 8d to rotate through meshing, so that the hollow rotating column 5 can drive multiple storage tables 2 to rotate horizontally.

[0048] When the rotation switching mechanism 6 pushes the vertical rotator 7 upward to Fig. 9 After the workpiece is in the position shown, the worker inserts the workpiece into the push ring 11 and pushes the push ring 11, so that the outer support mechanism 12 expands outward to block the workpiece and prevent the workpiece from being thrown out. At the same time, the workpiece is pushed continuously, which pushes the vertical rotating rod 2a horizontally, so that the transmission column 2c is inserted into the push column 7c, and the strong magnet 10 is attracted to the box body 2d to achieve pre-locking. Finally, the vertical rotator 7 is pushed upward by the rotating switching mechanism 6 to move to the final position, that is, Fig.11 When the vertical rotator 7 is working, it will drive the push column 7c to rotate, which can drive the multiple transmission columns 2c to rotate, that is, drive the workpiece stuck on the vertical rotation rod 2a to rotate vertically.

[0049] The efficient coating device for zirconium dioxide raw materials can perform rotational coating on a workpiece placed flat on a storage table 2, and can also enable the workpiece to be clamped on a vertical rotating rod 2a, so that workpieces whose bottoms need to be coated can also be used with the device, thereby reducing the maintenance cost and floor space occupied by the device.

[0050] After the workpiece is clamped on the push ring 11, it can be pushed by the workpiece to automatically lock the workpiece. The locking process is rapid, and when pushing, the worker can more smoothly clamp the transmission column 2c and the push column 7c to ensure that the push column 7c can drive the transmission column 2c to rotate. After the clamping is completed, the retaining ring 7d can be used to lock the card plate 2b to ensure that the card plate 2b will not separate during rotation.

[0051] According to the different hole diameters of each workpiece, the clamping column 13 and the vertical rotating rod 2a can be disassembled and replaced, so that the device can be suitable for use with more workpieces.

[0052] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. A high-efficiency film coating device with zirconium dioxide raw material, comprising a reaction chamber (1) and a central rotating column (4), wherein a rotator (3) for driving the central rotating column (4) to rotate is fixedly arranged on the top of the reaction chamber (1), a plurality of hollow rotating columns (5) capable of vertical rotation are fixedly arranged in the reaction chamber (1), a plurality of storage tables (2) are fixedly arranged on each hollow rotating column (5), a vacuum exhaust port (1a) and a gas injection port (1b) are arranged on the reaction chamber (1), the vacuum exhaust port (1a) is used for a vacuum device to evacuate the interior of the reaction chamber (1), and the gas injection port (1b) is used for a gasification device to inject gas required for film coating into the reaction chamber (1), an opening and closing door (1c) is arranged at a position of the reaction chamber (1) opposite to the plurality of hollow rotating columns (5), and the opening and closing door (1c) is used for a worker to place a workpiece on the storage table (2), characterized in that: It also includes a rotation switching mechanism (6), a vertical rotator (7) and a horizontal rotator (8), each storage platform (2) is provided with a rotatable vertical rotation rod (2a), the horizontal rotator (8) is fixedly mounted on the inner edge bottom of the reaction chamber (1), the horizontal rotator (8) is used to transmit the rotation force of the central rotation column (4) to the hollow rotation column (5), the vertical rotator (7) is vertically slidably mounted on the outer edge of the central rotation column (4), the rotation switching mechanism (6) is fixedly mounted on the horizontal rotator (8), and the rotation switching mechanism (6) is used to lift the vertical rotator (7) upward; When the rotation switching mechanism (6) is not lifted upward, the vertical rotator (7) is transmission-connected with the horizontal rotator (8), and the vertical rotator (7) is separated from the vertical rotation rod (2a); When the rotation switching mechanism (6) is lifted upward, the vertical rotator (7) is connected to the vertical rotation rod (2a) by transmission, and the vertical rotator (7) is separated from the horizontal rotator (8); A plurality of clamping strips (4a) are arranged on the outer edge of the central rotating column (4); the vertical rotator (7) comprises a sleeve (7a) sleeved on the outer edge of the central rotating column (4); a plurality of clamping grooves (7a1) are arranged on the inner edge of the sleeve (7a); and the clamping grooves (7a1) are clamped in the clamping strips (4a); A plurality of rotating disks (7b) are fixedly arranged on the outer edge of the vertical rotator (7), the rotating disk (7b) at the bottom layer is in contact with the lifting end of the rotating switching mechanism (6), a plurality of push posts (7c) are fixedly arranged on each rotating disk (7b), and the plurality of push posts (7c) are evenly distributed along the circumference of the rotating disk (7b), a card plate (2b) is arranged at one end of the vertical rotating rod (2a) close to the rotating disk (7b), a plurality of transmission posts (2c) are fixedly arranged on the card plate (2b), and the plurality of transmission posts (2c) are arranged along the circumference of the card plate (2b). The rotating disc (7b) is evenly distributed in the direction, when the rotating disc (7b) is lifted upward by the rotating switching mechanism (6), the end of the push column (7c) will be inserted into the transmission column (2c), a plurality of push bars (7a2) are fixedly arranged at the bottom of the outer edge of the sleeve (7a), and a plurality of transmission bars (8a) are arranged on the horizontal rotator (8), when the sleeve (7a) is in the initial position, each transmission bar (8a) is inserted between two push bars (7a2), and when the rotating disc (7b) is lifted upward, the push bar (7a2) will be pulled out from between the two transmission bars (8a); The horizontal rotator (8) further comprises a rotating seat (8b), a gear ring (8c) and a plurality of gears (8d); a middle portion of the rotating seat (8b) is provided with an avoidance hole for the sleeve (7a) to pass through; the transmission bar (8a) is fixedly mounted on the inner wall of the avoidance hole; the rotating seat (8b) is rotatably mounted in the reaction chamber (1); the gear ring (8c) is fixedly mounted on the rotating seat (8b); the plurality of gears (8d) are respectively fixedly mounted on the plurality of hollow rotating columns (5); the plurality of gears (8d) are all meshedly connected with the gear ring (8c); and rotating seats (9) are fixedly mounted at both upper and lower ends of the hollow rotating column (5); The device also comprises a rotating seat (9), a strong magnet (10), a push ring (11), an external support mechanism (12) and a clamping column (13). A guide tube (5a) is fixedly arranged on the outer edge of the hollow rotating column (5). The vertical rotating rod (2a) is slidably connected to the guide tube (5a). The storage platform (2) comprises a box body (2d) and a box cover arranged on the top of the box body (2d). The guide tube (5a) is located inside the box body (2d). The clamping column (13) is connected to the vertical rotating rod (2a). ), a strong magnet (10) is fixedly mounted on the outer edge of the clamping column (13), a push ring (11) is sleeved on the outer edge of the clamping column (13), a stop ring (11a) for blocking the workpiece is provided on the outer edge of the push ring (11), an external support mechanism (12) is fixedly mounted on the end of the clamping column (13), the external support mechanism (12) is transmission-connected to the push ring (11), and when the push ring (11) moves, the external support mechanism (12) will spread outward.

2. The high-efficiency film coating device with zirconium dioxide raw material according to claim 1, characterized in that: The external support mechanism (12) comprises a cover plate (12d), four hinged rods (12c), four sliders (12a) and four slide rails (12b); the cover plate (12d) is fixedly mounted on the end of the clamping column (13); the four slide rails (12b) are fixedly mounted on the push ring (11); the slider (12a) is slidably connected to the slide rail (12b); one end of the hinged rod (12c) is hinged to the slider (12a); and the other end of the hinged rod (12c) is hinged to the cover plate (12d).

3. The high-efficiency film coating device with zirconium dioxide raw material as claimed in claim 2, characterized in that: A second retaining ring (7d) is provided on the outer edge of the bottom of the turntable (7b), and the second retaining ring (7d) is fixedly connected to the turntable (7b) via a connecting ring. The side of the clamping plate (2b) away from the transmission column (2c) is a conical structure, and the lifting end of the rotary switching mechanism (6) contacts the connecting ring.

4. The high-efficiency film coating device with zirconium dioxide raw material as claimed in claim 3, characterized in that: The rotary switching mechanism (6) comprises a plurality of lifting push rods (6a), each of which is fixedly mounted on a rotating seat (8b), a ball head seat (6b) being fixedly provided on the top of each lifting push rod (6a), and the top of the ball head seat (6b) abuts against the connecting ring.

5. The high-efficiency film coating device with zirconium dioxide raw material as claimed in claim 4, characterized in that: A return spring (14) is sleeved on the outer edge of the vertical rotating rod (2a), and a retaining ring (15) is fixedly arranged on the outer edge of the vertical rotating rod (2a). One end of the return spring (14) abuts against the guide tube (5a), and the other end of the return spring (14) abuts against the retaining ring (15).

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