Angular velocity sensitive unit and angular velocity sensor

Abstract

The present invention provides an angular velocity sensitive unit and an angular velocity sensor, which include: a base, a first straight sensing arm, a second straight sensing arm, a first connecting arm, a second connecting arm, a pair of first straight driving arms, and a pair of second straight driving arms; a first connecting arm groove is provided on the relative main surface of the first connecting arm, a first connecting arm groove electrode is provided on the first connecting arm groove, and a first connecting arm sidewall electrode is provided on the side of the first connecting arm; a second connecting arm groove is provided on the relative main surface of the second connecting arm, a second connecting arm groove electrode is provided on the second connecting arm groove, and a second connecting arm sidewall electrode is provided on the side of the second connecting arm. The present invention can reduce the energy dissipation caused by thermoelastic damping, thereby improving the Q value, and the groove is provided on the connecting arm to reduce its sectional inertia moment, so that the Coriolis force transmission effect is more obvious, thereby improving the sensitivity of the angular velocity sensitive unit, which is conducive to the miniaturization of the device.

Description

Technical Field

[0001] The present invention relates to the technical field of gyroscopes, and in particular to an angular velocity sensitive unit and an angular velocity sensor. Background Art

[0002] Angular velocity sensitive units have good frequency-temperature characteristics and are widely used in various electronic devices.

[0003] However, as the device becomes smaller, the temperature difference caused by bending vibration in the angular velocity sensitive unit is difficult to eliminate, which will cause a significant decrease in the Q value. In addition, the sensing electrode area of ​​the device becomes smaller, resulting in a decrease in the sensitivity of the sensitive unit. Summary of the invention

[0004] A first object of the present invention is to provide an angular velocity sensing unit with high sensitivity.

[0005] A second object of the present invention is to provide an angular velocity sensor with high sensitivity.

[0006] In order to achieve the above-mentioned first purpose, the present invention provides an angular velocity sensitive unit, which includes: a base, a first straight sensing arm, a second straight sensing arm, a first connecting arm, a second connecting arm, a pair of first straight driving arms, and a pair of second straight driving arms; the first straight sensing arm and the second straight sensing arm are respectively connected to the base and extend from the base in opposite directions along the X-axis direction; the first end of the first connecting arm along the Y-axis direction and the first end of the second connecting arm along the Y-axis direction are both connected to the base, a pair of first straight driving arms are connected to the second end of the first connecting arm along the Y-axis direction and extend from the second end of the first connecting arm along the Y-axis direction along the X-axis direction opposite to each other, a pair of second straight driving arms are connected to the second end of the second connecting arm along the Y-axis direction and extend from the second end of the second connecting arm along the Y-axis direction along the X-axis direction opposite to each other; the first straight driving arm includes a first A vibration arm portion, wherein the first vibration arm portion has a first driving arm groove portion disposed on the relative principal surface, a first driving arm groove portion electrode is disposed in the first driving arm groove portion, and a first driving arm side wall electrode is disposed on the side surface of the first vibration arm portion; the second straight driving arm includes a second vibration arm portion, wherein the second vibration arm portion has a second driving arm groove portion disposed on the relative principal surface, a second driving arm groove portion electrode is disposed in the second driving arm groove portion, and a second driving arm side wall electrode is disposed on the side surface of the second vibration arm portion; the first connecting arm has a first connecting arm groove portion disposed on the relative principal surface, a first connecting arm groove portion electrode is disposed in the first connecting arm groove portion, and a first connecting arm side wall electrode is disposed on the side surface of the first connecting arm; the second connecting arm has a second connecting arm groove portion disposed on the relative principal surface, a second connecting arm groove portion electrode is disposed in the second connecting arm groove portion, and a second connecting arm side wall electrode is disposed on the side surface of the second connecting arm.

[0007] It can be seen from the above scheme that when the angular velocity sensitive unit of the present invention is in bending vibration, the distance of heat transfer from the compressed surface to the extended surface becomes longer, that is, the heat conduction path becomes longer, which can reduce the energy dissipation caused by thermal elastic damping, thereby improving the Q value and contributing to the miniaturization of the device; in addition, a groove is provided on the connecting arm to reduce its cross-sectional moment of inertia, so that the Coriolis force transmission effect is more obvious, thereby improving the sensitivity of the angular velocity sensitive unit, which is also conducive to the miniaturization of the device.

[0008] A further solution is that the first driving arm slot electrode is connected to the first connecting arm slot electrode, and the first driving arm side wall electrode is connected to the first connecting arm side wall electrode; the second driving arm slot electrode is connected to the second connecting arm slot electrode, and the second driving arm side wall electrode is connected to the second connecting arm side wall electrode; the first connecting arm slot electrode is connected to the second connecting arm side wall electrode via the base, and the second connecting arm slot electrode is connected to the first connecting arm side wall electrode via the base.

[0009] A further solution is that the first straight sensor arm includes a first sensor arm portion, and the second straight sensor arm includes a second sensor arm portion; the first sensor arm portion is provided with a first sensor arm groove portion on the relative main surfaces, a first straight sensor arm groove portion electrode is provided in the first sensor arm groove portion, and the first sensor arm portion also includes a first straight sensor arm sidewall electrode; the second sensor arm portion is provided with a second sensor arm groove portion on the relative main surfaces, a second straight sensor arm groove portion electrode is provided in the second sensor arm groove portion, and the second sensor arm portion also includes a second straight sensor arm sidewall electrode; the polarity of the first straight sensor arm groove portion electrode is opposite to that of the first straight sensor arm sidewall electrode; the polarity of the second straight sensor arm groove portion electrode is opposite to that of the second straight sensor arm sidewall electrode; the polarity of the first straight sensor arm groove portion electrode is opposite to that of the second straight sensor arm groove portion electrode; the first straight sensor arm groove portion electrode, the second straight sensor arm groove portion electrode, the first straight sensor arm sidewall electrode, and the second straight sensor arm sidewall electrode are respectively connected to different electrode connection points of the base.

[0010] A further solution is that the cross-sectional shape of the first connecting arm slot electrode and the cross-sectional shape of the second connecting arm slot electrode are both H-shaped.

[0011] It can be seen that by providing an H-shaped groove on the connecting arm, when the vibrating arm is bent and vibrated, the distance of heat transfer from the compressed surface to the extended surface becomes longer, which can reduce the energy dissipation caused by thermoelastic damping, thereby improving the Q value. In addition, the groove is provided to reduce the moment of inertia of the section, and the Coriolis force transmission effect is more obvious, thereby improving the sensitivity of the angular velocity sensitive unit, which is conducive to the miniaturization of the device.

[0012] A further solution is that the two first connecting arm grooves are symmetrically distributed in the thickness direction of the first connecting arm, and the two second connecting arm grooves are symmetrically distributed in the thickness direction of the second connecting arm; the sum of the depths of the two first connecting arm grooves does not exceed 80% of the thickness of the first connecting arm; the sum of the depths of the two second connecting arm grooves does not exceed 80% of the thickness of the second connecting arm.

[0013] A further solution is that the length of the first connecting arm groove accounts for 80%-95% of the length of the first connecting arm, and the width of the first connecting arm groove accounts for 40%-60% of the width of the first connecting arm; the length of the second connecting arm groove accounts for 80%-95% of the length of the second connecting arm, and the width of the second connecting arm groove accounts for 40%-60% of the width of the second connecting arm.

[0014] It can be seen from this that the moment of inertia of the cross section can be effectively reduced, ensuring that a sufficiently large Coriolis force is transmitted so that the straight sensing arm generates sufficient induced charge, while preventing the moment of inertia from being too small and the stiffness from being insufficient, causing breakage during the resonance process and making it impossible to perform normal sensing work.

[0015] A further solution is that the two first driving arm grooves are symmetrically distributed in the thickness direction of the first vibration arm, and the two second driving arm grooves are symmetrically distributed in the thickness direction of the second vibration arm; the polarity of the first driving arm groove electrode is the same as that of the first connecting arm groove electrode, the polarity of the first driving arm side wall electrode is the same as that of the first connecting arm side wall electrode, the polarity of the first connecting arm groove electrode is opposite to that of the first connecting arm side wall electrode, the polarity of the second driving arm groove electrode is the same as that of the second connecting arm groove electrode, the polarity of the second driving arm side wall electrode is the same as that of the second connecting arm side wall electrode, the polarity of the second connecting arm groove electrode is opposite to that of the second connecting arm side wall electrode, and the polarity of the first connecting arm groove electrode is opposite to that of the second connecting arm groove electrode.

[0016] A further solution is that the first straight driving arm also includes a first vibration arm counterweight, which is connected to an end of the first vibration arm away from the first connecting arm; the second straight driving arm also includes a second vibration arm counterweight, which is connected to an end of the second vibration arm away from the second connecting arm; the first straight sensing arm also includes a first sensing arm counterweight, which is connected to an end of the first sensing arm away from the base; the second straight sensing arm also includes a second sensing arm counterweight, which is connected to an end of the second sensing arm away from the base.

[0017] It can be seen that by providing the weight portion, the resonance frequency of the vibration plate can be effectively reduced, and the coarse adjustment of the resonance frequency can be achieved. At the same time, the sensing displacement of the straight sensing arm can be increased, and the sensitivity can be improved.

[0018] A further solution is that the first driving arm sidewall electrode, the second driving arm sidewall electrode, the first connecting arm sidewall electrode, the second connecting arm sidewall electrode, the first straight sensing arm sidewall electrode and the second straight sensing arm sidewall electrode each have edge traces on the corresponding relative main surfaces.

[0019] It can be seen that by setting the edge routing, the interconnection of the electrode connection points at the base can be facilitated, and the interconnection between the straight driving arm and the connecting arm can also be facilitated.

[0020] In order to achieve the second objective mentioned above, the present invention provides an angular velocity sensor, which includes: the angular velocity sensitive unit mentioned above. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic structural diagram of the first embodiment of the speed sensitive unit of the present invention.

[0022] Figure 2 It is a schematic structural diagram of a first straight sensing arm and a first connecting arm in a first embodiment of a speed sensitive unit of the present invention.

[0023] Figure 3 yes Figure 2 A schematic cross-sectional view of the first connecting arm groove portion.

[0024] Figure 4 It is a schematic structural diagram of the first embodiment of the speed sensitive unit of the present invention after partially cutting off the first driving arm slot, the second sensing arm slot, and the second driving arm slot.

[0025] Figure 5 yes Figure 4 A cross-sectional schematic diagram of the first driving arm slot, the second sensing arm slot, and the second driving arm slot.

[0026] Figure 6 It is a schematic diagram of the structure of the first embodiment of the speed sensitive unit of the present invention including the arrangement of electrodes.

[0027] Figure 7 FIG. 1 is a schematic diagram of electrode arrangement in the first embodiment of the speed sensitive unit of the present invention.

[0028] Figure 8 1 is a diagram of the first working state of the first embodiment of the speed sensitive unit of the present invention.

[0029] Fig. 9 1 is a second working state diagram of the first embodiment of the speed sensitive unit of the present invention.

[0030] Fig.10 1 is a schematic diagram of the structure of the speed sensitive unit in the second embodiment of the present invention.

[0031] Fig.11FIG. 4 is a schematic diagram of electrodes in the second embodiment of the speed sensitive unit of the present invention.

[0032] Fig.12 It is a first main surface schematic diagram of the electrode arrangement in the third embodiment of the speed sensitive unit of the present invention.

[0033] Fig.13 It is a second main surface schematic diagram of the electrode arrangement in the third embodiment of the speed sensitive unit of the present invention. DETAILED DESCRIPTION

[0034] The angular velocity sensitive unit of the present invention improves the sensitivity of the angular velocity sensitive unit by providing a connecting arm groove portion on the connecting arm, which is beneficial to the miniaturization of the device.

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution of the present application will be described clearly and completely in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the technical solution of the present application, not all of them. Based on the embodiments recorded in the present application documents, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the technical solution of the present application.

[0036] The first embodiment of the angular velocity sensitive unit:

[0037] See also Figures 1 to 5 The angular velocity sensing unit 100 of the present embodiment includes a base 10, a first straight sensing arm 21, a second straight sensing arm 22, a first connecting arm 31, a second connecting arm 32, a pair of first straight driving arms 41, and a pair of second straight driving arms 42. The pair of first straight driving arms 41 includes two identical first straight driving arms 41, and the pair of second straight driving arms 42 includes two identical second straight driving arms 42.

[0038] The first connecting arm 31 and the first straight sensing arm 21 , the first straight sensing arm 21 and the second connecting arm 32 , the second connecting arm 32 and the second straight sensing arm 22 , and the second straight sensing arm 22 and the first connecting arm 31 are all perpendicular to each other.

[0039] The first straight sensing arm 21 and the second straight sensing arm 22 are respectively connected to the base 10 and extend from the base 10 in opposite directions along the X-axis.

[0040] The first end of the first connecting arm 31 along the Y-axis direction and the first end of the second connecting arm 32 along the Y-axis direction are both connected to the base 10. A pair of first straight driving arms 41 connect the second end of the first connecting arm 31 along the Y-axis direction and extend from the second end of the first connecting arm 31 along the Y-axis direction in opposite directions along the X-axis direction. A pair of second straight driving arms 42 connect the second end of the second connecting arm 32 along the Y-axis direction and extend from the second end of the second connecting arm 32 along the Y-axis direction in opposite directions along the X-axis direction. The first end of the first connecting arm 31 along the Y-axis direction is the end of the first connecting arm 31 in the length direction close to the base 10, and the second end of the first connecting arm 31 along the Y-axis direction is the end of the first connecting arm 31 in the length direction away from the base 10. The first end of the second connecting arm 32 along the Y-axis direction is the end of the second connecting arm 32 in the length direction close to the base 10, and the second end of the second connecting arm 32 along the Y-axis direction is the end of the second connecting arm 32 in the length direction away from the base 10.

[0041] The first straight sensor arm 21 includes a first sensor arm portion 801 and a first sensor arm counterweight portion 51. The first sensor arm portion 801 is connected to the first sensor arm counterweight portion 51 at one end thereof away from the base portion 10 in the length direction. The first sensor arm portion 801 is provided with a first sensor arm slot portion 210 on the opposite main surface (i.e., the other surface opposite to the main surface). The second straight sensor arm 22 includes a second sensor arm portion 802 and a second sensor arm counterweight portion 52. The second sensor arm portion 802 is connected to the second sensor arm counterweight portion 52 at one end thereof away from the base portion 10 in the length direction. The second sensor arm portion 802 is provided with a second sensor arm slot portion 220 on the opposite main surface. The two first sensor arm slot portions 210 are symmetrically distributed in the thickness direction of the first sensor arm portion 801, and the two second sensor arm slot portions 220 are symmetrically distributed in the thickness direction of the second sensor arm portion 802, and the cross-sectional shape of the first sensor arm slot portion 210 and the cross-sectional shape of the second sensor arm slot portion 220 are both H-shaped.

[0042] In implementation, for the two first sensor arm slots 210, the sum of their depths accounts for no more than 80% of the thickness of the first sensor arm 801. For each first sensor arm slot 210, its length accounts for 40%-70% of the length of the first sensor arm 801, and its width accounts for 35%-65% of the width of the first sensor arm 801. For the two second sensor arm slots 220, the sum of their depths accounts for no more than 80% of the thickness of the second sensor arm 802. For each second sensor arm slot 220, its length accounts for 40%-70% of the length of the second sensor arm 802, and its width accounts for 35%-65% of the width of the second sensor arm 802. As a result, the first sensor arm 801 and the second sensor arm 802 have a larger electrode area to collect charges, thereby ensuring a certain sensitivity.

[0043] The first straight driving arm 41 includes a first vibration arm portion 901 and a first vibration arm counterweight portion 61, and the first vibration arm portion 901 is connected to the first vibration arm counterweight portion 61 at one end thereof away from the first connecting arm 31 in the length direction. The first driving arm groove portion 410 is provided on the opposite main surfaces of the first vibration arm portion 901. The second straight driving arm 42 includes a second vibration arm portion 902 and a second vibration arm counterweight portion 62, and the second vibration arm portion 902 is connected to the second vibration arm counterweight portion 62 at one end thereof away from the base portion 10 in the length direction. The second driving arm groove portion 420 is provided on the opposite main surfaces of the second vibration arm portion 902.

[0044] The two first driving arm slots 410 are symmetrically distributed in the thickness direction of the first vibration arm 901, and the two second driving arm slots 420 are symmetrically distributed in the thickness direction of the second vibration arm 902. The cross-sectional shapes of the first driving arm slots 410 and the second driving arm slots 420 are both H-shaped.

[0045] During implementation, for the two first drive arm slots 410, the sum of their depths does not exceed 80% of the thickness of the first vibration arm 901. For each first drive arm slot 410, its length accounts for 40%-70% of the length of the first vibration arm 901, and its width accounts for 35%-65% of the width of the first vibration arm 901; for the two second drive arm slots 420, the sum of their depths does not exceed 80% of the thickness of the second vibration arm 902. For each second drive arm slot 420, its length accounts for 40%-70% of the length of the second vibration arm 902, and its width accounts for 35%-65% of the width of the second vibration arm 902. As a result, the first vibration arm 901 and the second vibration arm 902 can generate a sufficiently large electric field driving force to drive the vibration arm to perform alternating bending vibrations, while preventing the crystal impedance value from being too large and affecting the device performance.

[0046] The first connecting arm 31 has its opposite main surface provided with a first connecting arm groove portion 310 . The second connecting arm 32 has its opposite main surface provided with a second connecting arm groove portion 320 .

[0047] The two first connecting arm grooves 310 are symmetrically distributed in the thickness direction of the first connecting arm 31, and the two second connecting arm grooves 320 are symmetrically distributed in the thickness direction of the second connecting arm 32. The cross-sectional shapes of the first connecting arm grooves 310 and the second connecting arm grooves 320 are both H-shaped.

[0048] The sum of the depths of the two first connecting arm grooves 310 does not exceed 80% of the thickness of the first connecting arm 31. For each first connecting arm groove 310, its length accounts for 80%-95% of the length of the first connecting arm 31, and its width accounts for 40%-60% of the width of the first connecting arm 31. The sum of the depths of the two second connecting arm grooves 320 does not exceed 80% of the thickness of the second connecting arm 32. For each second connecting arm groove 320, its length accounts for 80%-95% of the length of the second connecting arm 32, and its width accounts for 40%-60% of the width of the second connecting arm 32.

[0049] See also Figure 6 and Figure 7 , a first straight sensor arm slot electrode 211 is disposed in the first sensor arm slot 210, and a first straight sensor arm side wall electrode 212 is disposed on the side of the first sensor arm 801. The first sensor arm counterweight 51 includes a first straight sensor arm main surface electrode 511 and a first straight sensor arm side electrode 512, the first straight sensor arm main surface electrode 511 and the first straight sensor arm side electrode 512 present an envelope shape, and the electrodes have the same polarity. A second straight sensor arm slot electrode 221 is disposed in the second sensor arm slot 220, and a second straight sensor arm side wall electrode 222 is disposed on the side of the second sensor arm 802. The second sensor arm counterweight 52 includes a second straight sensor arm main surface electrode 521 and a second straight sensor arm side electrode 522, the second straight sensor arm main surface electrode 521 and the second straight sensor arm side electrode 522 present an envelope shape, and the electrodes have the same polarity.

[0050] The first straight sensor arm slot electrode 211 and the first straight sensor arm sidewall electrode 212 have opposite polarities, and the second straight sensor arm slot electrode 221 and the second straight sensor arm sidewall electrode 222 have opposite polarities. The first straight sensor arm slot electrode 211 and the second straight sensor arm slot electrode 221 have opposite polarities.

[0051] The first connecting arm groove 310 is provided with a first connecting arm groove electrode 311, and the side of the first connecting arm 31 is provided with a first connecting arm sidewall electrode 312. The second connecting arm groove 320 is provided with a second connecting arm groove electrode 321, and the side of the second connecting arm 32 is provided with a second connecting arm sidewall electrode 322.

[0052] A first driving arm groove electrode 411 is provided in the first driving arm groove 410, and a first driving arm side wall electrode 412 is provided on the side of the first vibration arm 901. The first vibration arm weight portion 61 is provided with a first vibration arm weight portion main surface electrode 611 and a first vibration arm weight portion side electrode 612, and the first vibration arm weight portion main surface electrode 611 and the first vibration arm weight portion side electrode 612 present an envelope shape. A second driving arm groove electrode 421 is provided in the second driving arm groove 420, and a second driving arm side wall electrode 422 is provided on the side of the second vibration arm 902. The second vibration arm weight portion 62 includes a second vibration arm weight portion main surface electrode 621 and a second vibration arm weight portion side electrode 622, and the second vibration arm weight portion main surface electrode 621 and the second vibration arm weight portion side electrode 622 present an envelope shape.

[0053] The first drive arm slot electrode 411 has the same polarity as the first connection arm slot electrode 311, the first drive arm side wall electrode 412 has the same polarity as the first connection arm side wall electrode 312, and the first connection arm slot electrode 311 has opposite polarity to the first connection arm side wall electrode 312. The second drive arm slot electrode 421 has the same polarity as the second connection arm slot electrode 321, the second drive arm side wall electrode 422 has the same polarity as the second connection arm side wall electrode 322, and the second connection arm slot electrode 321 has opposite polarity to the second connection arm side wall electrode 322. The first connection arm slot electrode 311 has opposite polarity to the second connection arm slot electrode 321.

[0054] The first drive arm side wall electrode 412 is integral with the first connecting arm side wall electrode 312, and the second drive arm side wall electrode 422 is integral with the second connecting arm side wall electrode 322. The first drive arm side wall electrode 412 is connected to a rectangular electrode connection point of the base 10 through the first connecting arm side wall electrode 312, and the second drive arm side wall electrode 422 is connected to another rectangular electrode connection point of the base 10 through the second connecting arm side wall electrode 322. The first drive arm side wall electrode 412, the first connecting arm side wall electrode 312, the second drive arm side wall electrode 422, and the second connecting arm side wall electrode 322 all have edge traces on the relative main surfaces. The edge traces are set at 10μm-20μm to prevent the electrodes from falling off during the wet process.

[0055] The first straight sensor arm sidewall electrode 212 and the first straight sensor arm groove electrode 211 are directly connected to different rectangular electrode connection points of the base 10. The second straight sensor arm sidewall electrode 222 and the second straight sensor arm groove electrode 221 are directly connected to two other different rectangular electrode connection points of the base 10. Similarly, the first straight sensor arm sidewall electrode 212 and the second straight sensor arm sidewall electrode 222 both have edge traces on the corresponding relative main surfaces, and the edge traces are set at 10μm-20μm to prevent the electrodes from falling off during the wet process.

[0056] The first straight sensor arm slot electrode 211 and the second straight sensor arm sidewall electrode 222 are used to draw out charges of different polarities, and the first straight sensor arm sidewall electrode 212 and the second straight sensor arm sidewall electrode 222 are both grounded. The first straight sensor arm slot electrode 211 and the second straight sensor arm sidewall electrode 222 have the same electrode polarity.

[0057] The first driving arm slot electrode 411 completely covers the first driving arm slot 410. The second driving arm slot electrode 421 completely covers the second driving arm slot 420. The first connecting arm slot electrode 311 completely covers the first connecting arm slot electrode 310, and the second connecting arm slot electrode 321 completely covers the second connecting arm slot 320.

[0058] The first driving arm slot electrode 411 is connected to the first connecting arm slot electrode 311, and the first connecting arm slot electrode 311 is connected to a rectangular electrode connection point of the base 10. The second driving arm slot electrode 421 is connected to another rectangular electrode connection point of the base 10 by connecting the second connecting arm slot electrode 321. The electrode pattern of the first driving arm slot electrode 411 is the same as that of the second driving arm slot electrode 421, and the electrode pattern of the first connecting arm slot electrode 311 is the same as that of the second connecting arm slot electrode 321.

[0059] The width of the first vibration arm counterweight 61 is slightly larger than the width of the first vibration arm 901, and a width transition region is provided at the position of the first vibration arm counterweight 61 close to the first vibration arm 901, and the shape of the width transition region is connected in a straight line. The width of the second vibration arm counterweight 62 is slightly larger than the width of the second vibration arm 902, and a width transition region of the same size as above is provided at the position of the second vibration arm counterweight 62 close to the second vibration arm 902, and the shape of the width transition region is connected in a straight line.

[0060] The electrode polarity of the first vibration arm weight portion main surface electrode 611 and the first vibration arm weight portion side electrode 612 is the same, and the electrode polarity of the first vibration arm weight portion main surface electrode 611 and the first vibration arm weight portion side electrode 612 is opposite to the electrode polarity of the first driving arm slot portion electrode 411. The electrode polarity of the second vibration arm weight portion main surface electrode 621 and the second vibration arm weight portion side electrode 622 is the same, and the electrode polarity of the second vibration arm weight portion main surface electrode 621 and the second vibration arm weight portion side electrode 622 is opposite to the electrode polarity of the second driving arm slot portion electrode 421.

[0061] The first vibration arm counterweight 61, the second vibration arm counterweight 62, the first sensor arm counterweight 51, and the second sensor arm counterweight 52 have the same shape. The ends of the first vibration arm counterweight 61, the second vibration arm counterweight 62, the first sensor arm counterweight 51, and the second sensor arm counterweight 52 can be provided with a metal of a preset thickness to achieve fine tuning of the resonant frequency.

[0062] By setting the electrodes of the first straight driving arm 41 and the second straight driving arm 42, an electric field in one direction can be generated, causing the first straight driving arm 41 and the second straight driving arm 42 to be displaced in a direction perpendicular to the direction, thereby forming a bending state of the first vibration arm portion 901 and the second vibration arm portion 902. Under the action of the alternating voltage, the first vibration arm portion 901 and the second vibration arm portion 902 will bend alternately in two directions opposite to each other, that is, they are in a vibrating state.

[0063] See also Figure 8 , when there is no angular velocity input, the first straight driving arm 41 and the second straight driving arm 42 produce the vibration effect as shown in the figure. Since the electrode polarity settings of the two first straight driving arms 41 on the same side of the base 10 are the same, the two first straight driving arms 41 will vibrate in the same direction; since the electrode polarity setting of the second straight driving arm 42 on the other side of the base 10, which is symmetrical with the first straight driving arm 41 along the X-axis, is opposite to the electrode polarity setting of the first straight driving arm 41, it will vibrate in the opposite direction to the first straight driving arm 41. Since the Coriolis force cannot be generated without angular velocity input, there is no effect in the Y-axis direction. Therefore, the first connecting arm 31 and the second connecting arm 32 are in a horizontal state, and the first straight sensing arm 21 and the second straight sensing arm 22 are in a vertical state, and no vibration displacement is generated.

[0064] See also Fig. 9When the angular velocity in the Z-axis direction (Z-axis direction is perpendicular to X-axis and Y-axis) is input, the forces in the X-axis direction generated by the two pairs of straight drive arms under the action of the electrodes will both generate effects in the Y-axis direction. Since the polarities of the electrodes in the first straight drive arm 41 and the second straight drive arm 42 symmetrical along the X-axis direction are opposite, the first straight drive arm 41 and the second straight drive arm 42 will respectively generate opposite forces in the Y-axis direction. Specifically, the generated Coriolis force will drive the first connecting arm 31 and the second connecting arm 32 to vibrate, and transmit the vibration effect to the first straight sensing arm 21 and the second straight sensing arm 22 through the base 10. Since the directions of the Coriolis forces are opposite, the vibration directions of the first connecting arm 31 and the second connecting arm 32 are opposite, and the vibration directions of the first straight sensing arm 21 and the second straight sensing arm 22 are opposite. Among them, the first connecting arm 31 and the second connecting arm 32 respectively perform bending vibrations in the Y-axis directions opposite to each other, and the first straight sensing arm 21 and the second straight sensing arm 22 respectively perform bending vibrations in the X-axis directions opposite to each other. Under the influence of the Coriolis force, the first straight sensing arm 21 and the second straight sensing arm 22 perform bending vibration.

[0065] Charges can be collected by the first straight sensor arm slot electrode 211, the first straight sensor arm sidewall electrode 212, the second straight sensor arm slot electrode 221, and the second straight sensor arm sidewall electrode 222. Since the first straight sensor arm 21 and the second straight sensor arm 22 are bending and vibrating in opposite X-axis directions, the polarities of the induced charges inside them are opposite. By setting this electrode method on the two pairs of straight sensor arms, charges of different polarities can be collected.

[0066] Electrodes on the first straight driving arm 41 and the second straight driving arm 42 may be made of metal with good conductivity, and the electrodes are adhered to the piezoelectric vibrating piece by sputtering, usually with a thickness of 50nm-200nm.

[0067] Second embodiment of the angular velocity sensitive unit:

[0068] The difference between this embodiment and the first embodiment of the angular velocity sensing unit is the arrangement of electrodes and the connection method thereof. The rest is the same as the first embodiment of the angular velocity sensing unit, and will not be described again.

[0069] See also Fig.10 and Fig.11 The first driving arm side wall electrode 412 is connected to the first connecting arm side wall electrode 312, and the first connecting arm side wall electrode 312 is connected to the first rectangular electrode connection point of the base 10. The first driving arm slot electrode 411 is connected to the first connecting arm slot electrode 311, and is connected to the second driving arm side wall electrode 422 through the base 10. The first driving arm slot electrodes 411 are connected through the envelope electrode formed at the first vibration arm counterweight 61.

[0070] On the second main surface (i.e. Fig.11 As the first main surface, the second main surface is the opposite surface of the first main surface, and the second main surface is not shown), the second driving arm slot electrodes 421 are connected to each other through the envelope electrode formed at the second vibration arm counterweight 62. The second driving arm slot electrode 421 is connected to the second connecting arm slot electrode (the second connecting arm slot electrode is arranged on the second main surface, not shown in the figure), and is connected to the first driving arm side wall electrode 412 through the base 10.

[0071] In terms of electrode polarity, the electrode polarity of the first drive arm slot electrode 411 and the first drive arm side wall electrode 412 are opposite. The electrode polarity of the first drive arm slot electrode 411 and the envelope electrode formed at the first vibration arm counterweight 61 are the same. The electrode polarity of the second drive arm slot electrode 421 and the second drive arm side wall electrode 422 are opposite. The electrode polarity of the envelope electrode formed at the second drive arm slot electrode 421 and the second vibration arm counterweight 62 is the same. The electrode polarity of the first drive arm slot electrode 411, the first connection arm slot electrode 311, the second connection arm side wall electrode 322, and the second drive arm side wall electrode 422 are the same.

[0072] The first straight sensor arm side wall electrode 212, the second straight sensor arm side wall electrode 222, the first straight sensor arm slot electrode 211 and the second straight sensor arm slot electrode 221 are respectively connected to different rectangular electrode connection points in the base 10, the first straight sensor arm side wall electrode 212 and the second straight sensor arm side wall electrode 222 are both grounded, and charges of different polarities are induced through the first straight sensor arm slot electrode 211 and the second straight sensor arm slot electrode 221.

[0073] Two first straight sensor arm groove electrodes 211 on the first main surface and the second main surface of the first straight sensor arm 21 are connected through the first sensor arm counterweight 51. Two second straight sensor arm groove electrodes 221 on the first main surface and the second main surface of the second straight sensor arm 22 are connected through the second sensor arm counterweight 52. The two corresponding rectangular electrodes on the first main surface and the second main surface of the base 10 are connected through the edge wiring of the first straight sensor arm side wall electrode 212 and the second straight sensor arm side wall electrode 222.

[0074] The third embodiment of the angular velocity sensitive unit:

[0075] The difference between this embodiment and the first embodiment of the angular velocity sensing unit is the arrangement and connection method of the electrodes. The rest is the same as the first embodiment of the angular velocity sensing unit, which will not be described again.

[0076] See also Fig.12 and Fig.13The first driving arm side wall electrode 412 is connected to the first connecting arm side wall electrode 312, and the first connecting arm side wall electrode 312 is connected to a rectangular electrode connection point of the base 10. The first driving arm groove electrode 411 is connected to the first connecting arm groove electrode 311, and the first connecting arm groove electrode 311 is connected to the second driving arm side wall electrode 422 through the base 10. The two second driving arm side wall electrodes 422 on the first main surface and the second main surface are connected through the second vibration arm counterweight 62.

[0077] The second driving arm groove electrode 421 is connected to the second connecting arm groove electrode 321 and connected to the first driving arm sidewall electrode 412 via the base 10. The two first driving arm sidewall electrodes 412 on the first main surface and the second main surface are connected via the first vibration arm weight 61.

[0078] The first driving arm slot electrode 411 is connected to the rectangular electrode connection point of the base 10, and is connected to the second driving arm side wall electrode 422 through the rectangular electrode connection point; the second driving arm slot electrode 421 is connected to another rectangular electrode connection point of the base 10, and is connected to the first driving arm side wall electrode 412 through the rectangular electrode connection point.

[0079] The first straight sensor arm side wall electrode 212, the second straight sensor arm side wall electrode 222, the first straight sensor arm slot electrode 211 and the second straight sensor arm slot electrode 221 are respectively connected to different rectangular electrode connection points in the base 10, the first straight sensor arm slot electrode 211 and the second straight sensor arm slot electrode 221 draw out charges of different polarities, and the first straight sensor arm side wall electrode 212 and the second straight sensor arm side wall electrode 222 are both grounded.

[0080] In the second main surface, the arrangement of the electrodes on the first straight driving arm 41 and the electrodes on the second straight driving arm 42 is exactly the same as that of the first main surface. In order to reasonably set the position and area of ​​the rectangular electrodes, there are certain differences in the electrode patterns in the base 10 area of ​​the two main surfaces. The electrode patterns in the non-base 10 areas of the two main surfaces are set to the same pattern, which can reduce the number of photolithography masks and save costs to a certain extent.

[0081] Angular velocity sensor embodiment:

[0082] This embodiment includes a shell, and the angular velocity sensitive unit of any of the above embodiments can be vacuum-packaged in the shell, with a certain airtightness.

[0083] In summary, the present invention can reduce the energy dissipation caused by thermoelastic damping, thereby improving the Q value, and a groove is provided on the connecting arm to reduce its cross-sectional inertia moment, making the Coriolis force transmission effect more obvious, thereby improving the sensitivity of the angular velocity sensitive unit, which is conducive to the miniaturization of the device.

[0084] Finally, it should be emphasized that the above is only a preferred embodiment of the present invention and is not intended to be used.

[0085] The present invention is not limited to this invention. For those skilled in the art, the present invention may have various changes and modifications. Any modification, equivalent replacement,

[0086] Improvements and the like should all be included in the protection scope of the present invention.

Claims

1. An angular velocity sensitive unit, characterized in that: include: A base, a first straight sensing arm, a second straight sensing arm, a first connecting arm, a second connecting arm, a pair of first straight driving arms, and a pair of second straight driving arms; The first straight sensing arm and the second straight sensing arm are respectively connected to the base and extend from the base in opposite directions along the X-axis direction; The first end of the first connecting arm along the Y-axis direction and the first end of the second connecting arm along the Y-axis direction are both connected to the base, a pair of the first straight driving arms are connected to the second end of the first connecting arm along the Y-axis direction and extend from the second end of the first connecting arm along the Y-axis direction in opposite directions along the X-axis direction, and a pair of the second straight driving arms are connected to the second end of the second connecting arm along the Y-axis direction and extend from the second end of the second connecting arm along the Y-axis direction in opposite directions along the X-axis direction; The first straight driving arm comprises a first vibrating arm portion, the first vibrating arm portion has first driving arm grooves on opposite main surfaces, the first driving arm grooves have first driving arm groove electrodes disposed therein, and the first vibrating arm portion has first driving arm sidewall electrodes disposed thereon; the second straight driving arm comprises a second vibrating arm portion, the second vibrating arm portion has second driving arm grooves on opposite main surfaces, the second driving arm grooves have second driving arm groove electrodes disposed therein, and the second vibrating arm portion has second driving arm sidewall electrodes disposed thereon; The first connecting arm has a first connecting arm groove on its opposite main surface, a first connecting arm groove electrode on its opposite main surface, and a first connecting arm sidewall electrode on its side surface; the second connecting arm has a second connecting arm groove on its opposite main surface, a second connecting arm groove electrode on its opposite main surface, and a second connecting arm sidewall electrode on its side surface; The two first drive arm grooves are symmetrically distributed in the thickness direction of the first vibration arm portion, and the two second drive arm grooves are symmetrically distributed in the thickness direction of the second vibration arm portion; The first driving arm slot electrode has the same polarity as the first connecting arm slot electrode, the first driving arm sidewall electrode has the same polarity as the first connecting arm sidewall electrode, the first connecting arm slot electrode has an opposite polarity to the first connecting arm sidewall electrode, the second driving arm slot electrode has the same polarity as the second connecting arm slot electrode, the second driving arm sidewall electrode has the same polarity as the second connecting arm sidewall electrode, the second connecting arm slot electrode has an opposite polarity to the second connecting arm sidewall electrode, and the first connecting arm slot electrode has an opposite polarity to the second connecting arm slot electrode; The first straight sensor arm includes a first sensor arm portion, and the second straight sensor arm includes a second sensor arm portion; The first sensing arm portion is provided with a first sensing arm groove portion on the opposite main surface, a first straight sensing arm groove portion electrode is provided in the first sensing arm groove portion, and the first sensing arm portion further comprises a first straight sensing arm sidewall electrode; the second sensing arm portion is provided with a second sensing arm groove portion on the opposite main surface, a second straight sensing arm groove portion electrode is provided in the second sensing arm groove portion, and the second sensing arm portion further comprises a second straight sensing arm sidewall electrode; The first straight sensor arm slot electrode has an opposite polarity to the first straight sensor arm sidewall electrode; the second straight sensor arm slot electrode has an opposite polarity to the second straight sensor arm sidewall electrode; the first straight sensor arm slot electrode has an opposite polarity to the second straight sensor arm slot electrode; The first straight sensor arm slot electrode, the second straight sensor arm slot electrode, the first straight sensor arm side wall electrode, and the second straight sensor arm side wall electrode are respectively connected to different electrode connection points of the base.

2. The angular velocity sensing unit according to claim 1, characterized in that: The first driving arm groove electrode is connected to the first connecting arm groove electrode, and the first driving arm side wall electrode is connected to the first connecting arm side wall electrode; The second driving arm groove electrode is connected to the second connecting arm groove electrode, and the second driving arm side wall electrode is connected to the second connecting arm side wall electrode; The first connecting arm groove electrode is connected to the second connecting arm side wall electrode via the base, and the second connecting arm groove electrode is connected to the first connecting arm side wall electrode via the base.

3. The angular velocity sensing unit according to claim 2, characterized in that: The first driving arm sidewall electrode, the second driving arm sidewall electrode, the first connecting arm sidewall electrode, the second connecting arm sidewall electrode, the first straight sensing arm sidewall electrode and the second straight sensing arm sidewall electrode all have edge traces on corresponding relative main surfaces.

4. The angular velocity sensing unit according to claim 1, wherein: The cross-sectional shape of the first connecting arm groove portion electrode and the cross-sectional shape of the second connecting arm groove portion electrode are both H-shaped.

5. The angular velocity sensing unit according to claim 4, characterized in that: The two first connecting arm grooves are symmetrically distributed in the thickness direction of the first connecting arm, and the two second connecting arm grooves are symmetrically distributed in the thickness direction of the second connecting arm; The sum of the depths of the two first connecting arm grooves does not exceed 80% of the thickness of the first connecting arm; the sum of the depths of the two second connecting arm grooves does not exceed 80% of the thickness of the second connecting arm.

6. The angular velocity sensing unit according to claim 5, characterized in that: The length of the first connecting arm groove accounts for 80%-95% of the length of the first connecting arm, and the width of the first connecting arm groove accounts for 40%-60% of the width of the first connecting arm; the length of the second connecting arm groove accounts for 80%-95% of the length of the second connecting arm, and the width of the second connecting arm groove accounts for 40%-60% of the width of the second connecting arm.

7. The angular velocity sensing unit according to any one of claims 1 to 6, characterized in that: The first straight driving arm also includes a first vibration arm counterweight, which is connected to an end of the first vibration arm away from the first connecting arm; the second straight driving arm also includes a second vibration arm counterweight, which is connected to an end of the second vibration arm away from the second connecting arm; the first straight sensing arm also includes a first sensing arm counterweight, which is connected to an end of the first sensing arm away from the base; the second straight sensing arm also includes a second sensing arm counterweight, which is connected to an end of the second sensing arm away from the base.

8. An angular velocity sensor, characterized in that: include: An angular velocity sensing unit as claimed in any one of claims 1 to 7.

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