A plasma cleaning machine

Abstract

This invention discloses a plasma cleaning machine, specifically relating to the technical field of plasma cleaning machines. It includes a base and a static voltage detection and adjustment device. The static voltage detection and adjustment device includes a support ring, with a limiting rib ring at the top and several static voltage sensors sleeved on the outer side of the limiting rib ring. This invention uses a positive and negative voltage adjustment mesh plate to neutralize a portion of the positive ions, resulting in a greater quantity of negative ions than positive ions. The excess negative ions neutralize the positive charge on the product surface, and vice versa. This automatic adjustment ensures that the static voltage on the product surface remains zero, preventing damage to electronic components from accumulated voltage and guaranteeing product quality. It also has the function of cleaning different areas of the workpiece. The positive and negative voltage adjustment mesh plate and plasma generator can be placed close to the workpiece, facilitating plasma collision with the object surface and dislodging contaminants, ensuring effective cleaning.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma cleaning machines, and more particularly to a plasma cleaning machine. Background Art

[0002] Plasma cleaning machines are used to treat organic pollutants on the surface of objects and to modify the surface of materials. Plasma cleaning machines have electrode plates, which generate alternating electromagnetic fields through radio frequency power supplies. The gas in the vacuum chamber will be ionized into plasma, and various ions will be driven in the changing magnetic field to bombard the surface of the object to be treated at high speed. Some high-energy ions will react chemically with the molecules on the surface of the material to achieve cleaning and modification of the surface of the object. The object to be treated is generally placed close to the electrode, where the magnetic field strength is higher and the plasma treatment effect will be better.

[0003] Among them, the patent with announcement number CN217748469U discloses a plasma cleaning machine and its electrode device, the plasma cleaning machine includes a main body, the electrode device includes a vacuum box connected to the main body, a radio frequency power supply connected to the outer wall of the vacuum box and connected to the power supply of the plasma cleaning machine, a box door connected to the vacuum box and used to seal the vacuum chamber of the vacuum box, and a gas supply pipe connected to the vacuum box and used to input process gas into the vacuum box. The cavity wall of the vacuum cavity is connected to a first electrode member electrically connected to the electrode rod and a second electrode member electrically connected to the first electrode member and used to extend into the inner cavity of the cylindrical object to be processed.

[0004] When the structure is in use, the first electrode member and the second electrode member generate a constantly changing magnetic field. Under a vacuum state, the radio frequency power supply ignites under a certain pressure to generate high energy to ionize the process gas (input into the vacuum chamber through a gas pipe) into a plasma state. The plasma is accelerated in the constantly changing magnetic field to bombard the cylindrical object to be processed. The second electrode member extends into the inner cavity of the cylindrical object to be processed. The second electrode member forms an alternating electromagnetic field near the inner cavity of the cylindrical object to be processed, thereby driving the plasma to clean the inner cavity of the cylindrical object to be processed. However, an unbalanced positive and negative voltage will be generated on the surface of a PCB or other product, and the accumulated voltage will damage the electronic components. In order to prevent the accumulated voltage from damaging the components, a plasma cleaning machine is provided for this purpose. Summary of the invention

[0005] In order to overcome the above defects of the prior art, the present invention provides a plasma cleaning machine, aiming to solve the problems raised in the above background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions: a plasma cleaning machine, comprising a base and a static voltage detection and adjustment device, the static voltage detection and adjustment device comprising a support ring, a limit rib ring is arranged on the top of the support ring, a plurality of static voltage sensors are sleeved on the outer side of the limit rib ring, and a gathering cover with a conical vertical cross-section is arranged in the middle of the limit rib ring;

[0007] A through-hole disk is clamped at the bottom of the inner cavity of the gathering cover, and a restraining ring is arranged on the top of the through-hole disk, and the restraining ring is clamped with the through-hole disk;

[0008] A triangular nylon piece is provided in the middle of the restraining ring, and a plurality of nylon support blocks are distributed on the inner wall of the support ring, and the top of each nylon support block extends to the bottom of the corresponding static voltage sensor, the top of the nylon support block is trapezoidal, and the bottom of the nylon support block is clamped with the support ring;

[0009] A protective shell is arranged on the top of the support ring, a plasma generator is arranged in the middle of the protective shell, and a positive and negative voltage regulating screen is arranged at the bottom of the protective shell;

[0010] Limiting clamping rods are fixedly provided at both ends of the protective shell;

[0011] The outer side of the limit clamping rod is clamped with a support frame;

[0012] A conversion cleaning assembly is provided on the base, and the base is provided at the bottom of the support ring;

[0013] The conversion cleaning assembly includes a housing disposed on the top of the base;

[0014] A turntable is provided at the bottom of the inner cavity of the housing, a plurality of extension rods are provided at the top of the turntable, and each of the extension rods is detachably connected to the turntable, a rotating shaft is plugged into one end of the extension rod, a first toothed disc is rotatably connected to the top of the rotating shaft, and a static voltage detection and adjustment device is provided at the top of the first toothed disc;

[0015] A driving motor is provided at the bottom of the turntable, the driving motor is mounted on the base by bolts, and the output end of the driving motor is detachably connected to the turntable by bolts, and a controller is provided at the top of the inner cavity of the housing;

[0016] A second toothed disc is arranged outside the first toothed disc, a limit seat is fixedly arranged at the bottom of the second toothed disc, and the limit seat is installed on the top of the base by bolts;

[0017] A plasma cleaning head is arranged on the top of the first toothed disc, and the plasma cleaning head is arranged outside the protective shell, the support frame is installed in the plasma cleaning head, a dislocation opening is opened on the top of the base, two electric push rods are installed on the top of the housing by bolts, and the output ends of the electric push rods penetrate the housing and extend to the top of the corresponding plasma cleaning head respectively, and the workpiece is placed between the static voltage sensors. When the first toothed disc is transported to the bottom of the plasma cleaning head, the first toothed disc is meshed with the second toothed disc, so that the first toothed disc can rotate along the axis point of the connection between the first toothed disc and the rotating shaft, thereby driving the support ring, the limiting rib ring, the gathering cover and the workpiece to rotate, so as to realize the function of cleaning different areas of the workpiece;

[0018] A fan is installed on the top of the casing by bolts, and an input end of the fan is connected to the casing. Two first baffles are arranged on the top of the inner cavity of the casing, and each of the first baffles is slidably connected to a second baffle.

[0019] Technical effects and advantages of the present invention:

[0020] 1. The static voltage sensor of the present invention contacts the outside of the workpiece and detects the static voltage on the surface of the product in real time. When the static voltage sensor detects that the voltage on the surface of the product is positive, the plasma cleaning machine system calculates and outputs a quantized negative voltage through the controller operation. The positive and negative voltage adjustment screen neutralizes a part of the positive ions, and the amount of negative ions will be more than the positive ions. The excess negative ions neutralize the positive charge on the surface of the product. Conversely, it is also automatically adjusted to make the surface static voltage of the product always zero, avoiding the accumulated voltage from causing damage to electronic components, and ensuring the quality of the produced products.

[0021] 2. When the first toothed disc of the present invention is transferred to the bottom of the plasma cleaning head, the first toothed disc meshes with the second toothed disc, so that the first toothed disc can rotate along the axis point where the first toothed disc and the rotating shaft are connected, thereby driving the support ring, the limiting rib ring, the gathering cover and the workpiece to rotate, thereby realizing the function of cleaning different areas of the workpiece;

[0022] 3. The present invention drives multiple extension rods, a rotating shaft and a first gear plate to move when the rotating disk rotates, thereby allowing the workpiece to be transported to the bottom of the plasma cleaning head for cleaning, making it easy for the device to continuously transport and clean the workpiece, thereby improving large-scale production efficiency;

[0023] 4. The present invention drives the plasma cleaning head downward through an electric push rod, so that the positive and negative voltage adjustment screen and the plasma generator can be close to the workpiece, making it easy for the plasma to collide with the surface of the object, knocking the pollutants off the surface and ensuring the cleaning effect;

[0024] To sum up, through the corresponding coordinated use of various structures, the positive and negative voltage regulating screens neutralize a part of the positive ions, and the amount of negative ions will be more than the positive ions. The extra negative ions neutralize the positive charge on the surface of the product. Conversely, it is automatically adjusted to make the surface static voltage of the product always zero, avoiding the accumulated voltage from causing damage to electronic components, thereby ensuring the quality of the products produced. The support ring, the limiting rib ring, the gathering cover and the workpiece rotate to realize the function of cleaning different areas of the workpiece. The positive and negative voltage regulating screens and the plasma generator can be close to the workpiece, which is easy for the plasma to collide with the surface of the object, knocking the pollutants off the surface and ensuring the cleaning effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the present invention, the following briefly introduces the drawings required to be used in some embodiments of the present invention. Obviously, the drawings described below are only drawings of some embodiments of the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings. In addition, the drawings described below can be regarded as schematic diagrams, and are not limitations on the actual size of the product involved in the embodiments of the present invention, the actual process of the method, the actual timing of the signal, etc.

[0026] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0027] Figure 2 It is a side view of the overall structure of the present invention.

[0028] Figure 3 It is a stereoscopic diagram of the support ring, the limiting rib ring, the static voltage sensor, the gathering cover, the restraining ring and the triangular nylon part of the present invention.

[0029] Figure 4 It is a stereoscopic diagram of the plasma generator, the support frame and the plasma cleaning head of the present invention.

[0030] Figure 5 It is a stereoscopic diagram of the extension rod, the first toothed disc, the limiting seat and the second toothed disc of the present invention.

[0031] Figure 6 It is a stereoscopic diagram of the protective shell, plasma generator and positive and negative voltage regulating screen of the present invention.

[0032] Figure 7 For the present invention Figure 3 Exploded diagram.

[0033] The reference numerals are: 1, base; 101, housing; 102, fan; 103, first baffle; 104, second baffle; 105, offset opening; 106, electric push rod; 107, drive motor; 108, controller;

[0034] 2. Turntable; 201. Extension rod; 202. Rotating shaft; 203. First toothed disc; 204. Second toothed disc; 205. Plasma cleaning head; 206. Protective shell; 207. Plasma generator; 208. Positive and negative voltage regulating screen; 209. Limiting rod; 210. Support frame; 211. Limiting seat;

[0035] 3. Support ring; 301. Limit rib ring; 302. Static voltage sensor; 303. Gathering cover; 304. Through-hole plate; 305. Constraint ring; 306. Triangular nylon part; 307. Nylon support block. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] The terms "first", "second", "third" in the embodiments of the present application are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features. Thus, the features defined as "first", "second", "third" can expressly or implicitly include at least one of the features. In the description of the present application, the meaning of "multiple" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device comprising a series of steps or units is not limited to the listed steps or units, but optionally also includes steps or units that are not listed, or optionally also includes other steps or units inherent to these processes, methods, products or devices.

[0038] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0039] As attached Figure 1 - Figure 7A plasma cleaning machine shown in the figure, through the conversion cleaning component set on the base 1, the positive and negative voltage regulating screen 208 neutralizes a part of the positive ions, and the amount of negative ions will be more than the positive ions, and the excess negative ions neutralize the positive charge on the surface of the product. Conversely, it is also automatically adjusted to make the surface static voltage of the product always zero, avoiding the accumulated voltage from causing damage to the electronic components, ensuring the quality of the produced products, the support ring 3, the limiting rib ring 301, the gathering cover 303 and the workpiece rotate to realize the function of cleaning different areas of the workpiece, the positive and negative voltage regulating screen 208 and the plasma generator 207 can be close to the workpiece, which is easy for the plasma to collide with the surface of the object, knock the pollutants off the surface, and ensure the cleaning effect, and the specific structure of the components is set as follows;

[0040] A plasma cleaning machine comprises a base 1 and a static voltage detection and adjustment device, wherein the static voltage detection and adjustment device comprises a support ring 3, a limit rib ring 301 is arranged on the top of the support ring 3, a plurality of static voltage sensors 302 are sleeved on the outer side of the limit rib ring 301, and a gathering cover 303 with a conical vertical cross-section is arranged in the middle of the limit rib ring 301;

[0041] A through-hole plate 304 is clamped at the bottom of the inner cavity of the gathering cover 303, and a restraining ring 305 is provided on the top of the through-hole plate 304, and the restraining ring 305 is clamped with the through-hole plate 304;

[0042] A triangular nylon piece 306 is provided in the middle of the restraining ring 305, and a plurality of nylon support blocks 307 are distributed on the inner wall of the supporting ring 3, and the top of each nylon support block 307 extends to the bottom of the corresponding static voltage sensor 302, the top of the nylon support block 307 is trapezoidal, and the bottom of the nylon support block 307 is clamped with the supporting ring 3;

[0043] A protective shell 206 is disposed on the top of the support ring 3, a plasma generator 207 is disposed in the middle of the protective shell 206, and a positive and negative voltage regulating screen 208 is disposed at the bottom of the protective shell 206;

[0044] Limiting rods 209 are fixedly provided at both ends of the protective shell 206;

[0045] The outer side of the limit clamping rod 209 is clamped with a support frame 210;

[0046] A conversion cleaning assembly is provided on the base 1, and the base 1 is provided at the bottom of the support ring 3;

[0047] The conversion cleaning assembly includes a housing 101 disposed on the top of the base 1;

[0048] A turntable 2 is provided at the bottom of the inner cavity of the housing 101, and a plurality of extension rods 201 are provided at the top of the turntable 2, and each extension rod 201 is detachably connected to the turntable 2, a rotating shaft 202 is plugged into one end of the extension rod 201, and a first toothed disc 203 is rotatably connected to the top of the rotating shaft 202, and a static voltage detection and adjustment device is provided at the top of the first toothed disc 203;

[0049] A driving motor 107 is provided at the bottom of the turntable 2, and the driving motor 107 is mounted on the base 1 by bolts, and the output end of the driving motor 107 is detachably connected to the turntable 2 by bolts, and a controller 108 is provided at the top of the inner cavity of the housing 101;

[0050] A second toothed disc 204 is disposed outside the first toothed disc 203, and a limit seat 211 is fixedly disposed at the bottom of the second toothed disc 204. The limit seat 211 is mounted on the top of the base 1 by bolts;

[0051] A plasma cleaning head 205 is arranged on the top of the first toothed disc 203, and the plasma cleaning head 205 is arranged outside the protective shell 206. The support frame 210 is installed in the plasma cleaning head 205. A dislocation opening 105 is opened on the top of the base 1. Two electric push rods 106 are installed on the top of the housing 101 by bolts, and the output ends of each electric push rod 106 penetrate the housing 101 and extend to the top of the corresponding plasma cleaning head 205 respectively. The workpiece is placed between each static voltage sensor 302. When the first toothed disc 203 is transported to the bottom of the plasma cleaning head 205, the first toothed disc 203 is meshed with the second toothed disc 204, so that the first toothed disc 203 can rotate along the axis point of the connection between the first toothed disc 203 and the rotating shaft 202, thereby driving the support ring 3, the limiting rib ring 301, the gathering cover 303 and the workpiece to rotate, so as to realize the function of cleaning different areas of the workpiece;

[0052] A fan 102 is installed on the top of the casing 101 by bolts, and the input end of the fan 102 is connected to the casing 101. Two first baffles 103 are arranged on the top of the inner cavity of the casing 101, and each first baffle 103 is slidably connected to a second baffle 104.

[0053] According to the above structure, when in use, the staff installs the device at the designated position, and places the workpiece between the electrostatic voltage sensors 302 when cleaning the workpiece. The electrostatic voltage sensor 302 contacts the outside of the workpiece to detect the electrostatic voltage on the surface of the product in real time. When the electrostatic voltage sensor 302 detects that the voltage on the surface of the product is positive, the plasma cleaning machine system calculates and outputs a quantized negative voltage through the controller 108. The positive and negative voltage adjustment screen 208 neutralizes a part of the positive ions, and the amount of negative ions will be more than the positive ions. The excess negative ions neutralize the positive charge on the surface of the product. Conversely, it is also automatically adjusted to make the surface electrostatic voltage of the product always zero, thereby ensuring the quality of the products produced.

[0054] During cleaning, the driving motor 107 is started to drive the turntable 2 to rotate. When the turntable 2 rotates, it drives the multiple extension rods 201, the rotating shaft 202 and the first toothed disc 203 to move, so that the workpiece can be transported to the bottom of the plasma cleaning head 205 for cleaning. At the same time, when the first toothed disc 203 is transported to the bottom of the plasma cleaning head 205, the first toothed disc 203 is meshed with the second toothed disc 204, so that the first toothed disc 203 can rotate along the axis point where the first toothed disc 203 and the rotating shaft 202 are connected, and then the support ring 3, the limiting rib ring 301, the gathering cover 303 and the workpiece are driven to rotate, so as to realize the function of cleaning different areas of the workpiece.

[0055] The electric push rod 106 drives the plasma cleaning head 205 to move downward, so that the positive and negative voltage adjustment screen 208 and the plasma generator 207 can be close to the workpiece, making it easier for the plasma to collide with the surface of the object, knocking the pollutants off the surface and ensuring the cleaning effect.

[0056] Different from the prior art, the present application discloses an electrostatic voltage detection and adjustment device and a plasma cleaning machine. By neutralizing a portion of the positive ions through the positive and negative voltage adjustment screen 208, the amount of negative ions will be more than the positive ions, and the excess negative ions will neutralize the positive charge on the surface of the product. Conversely, the surface electrostatic voltage of the product is automatically adjusted to always be zero, avoiding the accumulated voltage from causing damage to electronic components and ensuring the quality of the produced products. The support ring 3, the limiting rib ring 301, the gathering cover 303 and the workpiece rotate to realize the function of cleaning different areas of the workpiece. The positive and negative voltage adjustment screen 208 and the plasma generator 207 can be close to the workpiece, making it easy for the plasma to collide with the surface of the object, knocking the pollutants off the surface and ensuring the cleaning effect.

[0057] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A plasma cleaning machine, characterized in that: The invention comprises a base (1) and a static voltage detection and adjustment device, wherein the static voltage detection and adjustment device comprises a support ring (3), a limit rib ring (301) is arranged on the top of the support ring (3), a plurality of static voltage sensors (302) are sleeved on the outer side of the limit rib ring (301), and a gathering cover (303) with a conical vertical cross-section is arranged in the middle of the limit rib ring (301); A through-hole disk (304) is clamped on the bottom of the inner cavity of the gathering cover (303), a restraining ring (305) is provided on the top of the through-hole disk (304), and the restraining ring (305) is clamped on the through-hole disk (304); A triangular nylon piece (306) is provided in the middle of the restraining ring (305), a plurality of nylon support blocks (307) are distributed on the inner wall of the support ring (3), and the top of each nylon support block (307) extends to the bottom of the corresponding static voltage sensor (302), the top of the nylon support block (307) is trapezoidal, and the bottom of the nylon support block (307) is snap-fitted to the support ring (3); A protective shell (206) is arranged on the top of the support ring (3), a plasma generator (207) is arranged in the middle of the protective shell (206), and a positive and negative voltage regulating screen (208) is arranged on the bottom of the protective shell (206); Limiting clamping rods (209) are fixedly provided at both ends of the protective shell (206); The outer side of the limit clamping rod (209) is clamped with a support frame (210); The base (1) is provided with a conversion cleaning component, and the base (1) is arranged at the bottom of the support ring (3); The conversion cleaning assembly comprises a housing (101) arranged on the top of the base (1); A rotating disk (2) is arranged at the bottom of the inner cavity of the housing (101), a plurality of extension rods (201) are arranged at the top of the rotating disk (2), and each of the extension rods (201) is detachably connected to the rotating disk (2), a rotating shaft (202) is plugged into one end of the extension rod (201), a first toothed disk (203) is rotatably connected to the top of the rotating shaft (202), and a static voltage detection and adjustment device is arranged at the top of the first toothed disk (203); A driving motor (107) is provided at the bottom of the rotating disk (2), the driving motor (107) is mounted on the base (1) via bolts, and an output end of the driving motor (107) is detachably connected to the rotating disk (2) via bolts, and a controller (108) is provided at the top of the inner cavity of the housing (101); A second toothed disc (204) is arranged outside the first toothed disc (203), a limit seat (211) is fixedly arranged at the bottom of the second toothed disc (204), and the limit seat (211) is mounted on the top of the base (1) by means of bolts; A plasma cleaning head (205) is arranged on the top of the first toothed disc (203), the plasma cleaning head (205) is arranged outside the protective shell (206), the support frame (210) is installed in the plasma cleaning head (205), a dislocation opening (105) is opened on the top of the base (1), two electric push rods (106) are installed on the top of the housing (101) by bolts, and the output end of each electric push rod (106) passes through the housing (101) and extends to the corresponding plasma cleaning head. At the top of the cleaning head (205), the workpiece is placed between the static voltage sensors (302). When the first toothed disc (203) is transferred to the bottom of the plasma cleaning head (205), the first toothed disc (203) meshes with the second toothed disc (204), so that the first toothed disc (203) can rotate along the axis point of the connection between the first toothed disc (203) and the rotating shaft (202), thereby driving the support ring (3), the limiting rib ring (301), the gathering cover (303) and the workpiece to rotate, thereby realizing the function of cleaning different areas of the workpiece.

2. The plasma cleaning machine according to claim 1, characterized in that: A fan (102) is installed on the top of the casing (101) by means of bolts, and an input end of the fan (102) is connected to the casing (101).

3. The plasma cleaning machine according to claim 1, characterized in that: Two first baffles (103) are arranged at the top of the inner cavity of the housing (101), and each of the first baffles (103) is slidably connected to a second baffle (104).

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