A semiconductor die bonding machine hot and cold track integrated device

Abstract

The invention relates to the field of crystal bonding machines and discloses an integrated hot and cold track device for a semiconductor crystal bonding machine, which effectively solves the problem that the track module needs to be disassembled and reinstalled for use when performing different material processing procedures. The device comprises a circular seat, a loading seat is installed on one side of the circular seat, a loading machine is installed on the top of the loading seat, a unloading seat is installed on the side of the circular seat away from the loading seat, a unloading machine is installed on the top of the unloading seat, and a tinning heating pipe and a glue dispensing cold pipe are symmetrically installed on the top of the circular seat, and the tinning heating pipe and the glue dispensing cold pipe are respectively located on both sides of the vertical direction of the loading seat and the loading machine. According to the invention, a loading machine and an unloading machine are provided on the circular seat for loading and unloading of materials, and the tinning heating pipe and the glue dispensing cold pipe are symmetrically provided on the top of the circular seat, so that the hot and cold tracks of the semiconductor crystal bonding are set on the same device, which is convenient for processing of materials during semiconductor production.

Description

Technical Field

[0001] The invention belongs to the field of crystal bonding machines, in particular to a cold and hot track integrated device for a semiconductor crystal bonding machine. Background Art

[0002] Wafers are circular slices formed by cutting a single crystal cylinder made of silicon or gallium arsenide. To extract high-purity silicon materials, silica sand is needed, which is a special material with a silicon dioxide content of up to 95%, and is also the main raw material for making wafers. Wafer processing is the process of manufacturing and obtaining the above-mentioned wafers. According to the patent document with the application publication number "CN116153825A" and the invention name "A semiconductor crystal bonder hot and cold track process system and method", its specification states: A semiconductor crystal bonder hot and cold track process system, including a feeding system, the output end of the feeding system is respectively connected to a hot track module and a cold track module, the hot track module and the cold track module are both provided with a tinning mechanism and a glue dispensing mechanism, and the output ends of both are connected to a crystal bonding position, the hot track module specifically includes a heating track, the interior of the heating track is specifically eight-stage temperature zone control, the interior of the heating track is specifically a preheating temperature zone, a tinning temperature zone, a crystal bonding temperature zone and a discharge temperature zone The hot and cold track process system and method of the semiconductor die bonder are mainly intended to distinguish the sheets and send them to the hot track module and the cold track module respectively, so that two different manufacturing processes can be carried out. The sheets are tinned or glued respectively by the hot track module and the cold track module, so as to improve the work efficiency and reduce the engineering cost. The sheets can be heated evenly first by the different functions of each temperature zone, and then tinned, and then heat-insulated, and then die bonded and mounted, and finally stabilized and solidified. The hot track module and the cold track module can be disassembled, so that the same device can carry out the manufacturing processes of the hot track module and the cold track module respectively, so as to reduce the manufacturing cost. However, the following defects still exist:

[0003] When performing different processes such as tinning and gluing of blanks, the hot track module and the cold track module need to be disassembled, so as to achieve the purpose of performing different production processes with the same device, which is more troublesome to use. Summary of the invention

[0004] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides an integrated hot and cold track device for a semiconductor die bonder, which effectively solves the troublesome problem of disassembling and reinstalling the track module when performing different sheet processing procedures.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a semiconductor die bonder hot and cold track integrated device, comprising a circular seat, a loading seat is installed on one side of the circular seat, a loading machine is installed on the top of the loading seat, a unloading seat is installed on the side of the circular seat away from the loading seat, a unloading machine is installed on the top of the unloading seat, a tinning heating pipe and a glue dispensing cold pipe are symmetrically installed on the top of the circular seat, the tinning heating pipe and the glue dispensing cold pipe are respectively located on both sides of the vertical direction of the loading seat and the loading machine, the tinning heating pipe and the glue dispensing cold pipe are both arranged in a quarter-circular pipe shape, and a sheet moving component is installed between the tinning heating pipe and the glue dispensing cold pipe;

[0006] A plurality of heaters are installed at equal intervals inside the tinning heating pipe, and the plurality of heaters form a plurality of temperature zones inside the tinning heating pipe;

[0007] A tinning device is installed on the top of one end of the tinning heating pipe close to the material discharge seat, and a glue dispensing device is installed on the top of one end of the glue dispensing cold pipe close to the material discharge seat. A mounting frame is provided on one side of the circular seat close to the material discharge seat. The mounting frame is fixedly connected to the tinning heating pipe and the glue dispensing cold pipe, and a crystal bonding device is installed on the top of the mounting frame.

[0008] Preferably, the sheet moving assembly includes an arc groove opened on the inner side of the tinning heating pipe and the glue dispensing cold pipe, the center position of the two arc grooves coincides with the center position of the circular seat, a rotating ring is provided inside the two arc grooves, the upper and lower sides of the rotating ring are respectively tightly attached to the top wall and bottom wall of the arc groove, and limiting rings are installed on the outer and inner sides of the rotating ring, the outer limiting ring is tightly attached to the inner side wall of the tinning heating pipe and the inner side wall of the glue dispensing cold pipe, the outer limiting ring is tightly attached to the outer side wall of the tinning heating pipe and the outer side wall of the glue dispensing cold pipe, the height of the limiting ring is greater than the height of the rotating ring, a placing platform is installed on the side of the outer limiting ring close to the loading seat, the placing platform can enter the interior of the tinning heating pipe and the glue dispensing cold pipe, a friction surface is provided on the surface of the inner limiting ring away from the rotating ring, and a driving box is provided on the side of the inner limiting ring away from the loading seat.

[0009] Preferably, a central mounting groove is provided inside the driving box body, and the central mounting groove extends to one side of the driving box body close to the loading seat. A friction block is rotatably installed inside the central mounting groove, and the side of the friction block close to the loading seat contacts with the limiting ring. Tooth grooves are evenly provided in the middle of the outer wall of the friction block. A motor mounting box is installed on one side of the driving box body, and a first motor is installed inside the motor mounting box. A gear is fixedly installed on the output shaft of the first motor, and the gear is meshed with the tooth groove. A rotation control unit is installed inside the driving box body.

[0010] Preferably, the rotation control unit includes two end mounting grooves opened inside the driving box body, the two end mounting grooves are symmetrically opened on the upper and lower sides of the middle mounting groove, the end mounting grooves penetrate to the side of the driving box body close to the loading seat, a friction block is movably installed inside the end mounting groove, a pressure plate is provided on the side of the friction block away from the loading seat, the pressure plate is installed inside the end mounting groove, and two springs are symmetrically installed between the friction block and the pressure plate.

[0011] Preferably, a push rod is installed on the side of the pressure plate away from the friction block, one end of the push rod passes through the side of the driving box away from the loading seat, a push block is installed on the end of the upper and lower electromagnets away from the pressure plate, an extrusion slope is provided on the side of the push block away from the driving box, the bottom end of the extrusion slope is inclined toward the side away from the driving box, a speed control unit is provided above the extrusion slope, and a clamping stop unit is installed on the push block.

[0012] Preferably, the speed control unit includes a pressure roller arranged above the extrusion inclined surface, the bottom wall of the pressure roller contacts the top surface of the extrusion inclined surface, a top plate is installed on the top of the pressure roller, an end plate is installed on one end of the top plate, fixed plates are provided on the upper and lower sides of the end plate, the two fixed plates are fixedly connected to the side of the driving box away from the loading seat, a second motor is rotatably installed between the two fixed plates, the second motor is threadedly connected to the end plate, the top of the second motor is fixedly connected to the output shaft of the guide rod, and the guide rod is fixedly installed on the top of the upper fixed plate.

[0013] Preferably, a screw rod is installed between the two fixing plates, the screw rod is slidably connected to the end plate, and the length of the screw rod is the same as the length of the push block.

[0014] Preferably, the clamping and stopping unit comprises a magnetic block installed on the side of the push block close to the driving box body, an electromagnet is provided on the side of the magnetic block close to the driving box body, the electromagnet is fixedly installed on the driving box body, and the electromagnet is magnetically connected to the magnetic block.

[0015] Preferably, a base is provided under the driving box, a slide groove is opened inside the base, a slider is installed at the bottom end of the driving box, the slider is slidably installed inside the slide groove, the side of the slider away from the loading seat is fixedly connected to the output end of the cylinder, and the cylinder is fixedly installed on the side of the base away from the loading seat.

[0016] Preferably, a conductive rod is installed on the slider, and the setting direction of the conductive rod is perpendicular to the opening direction of the slide slot. The two ends of the conductive rod respectively penetrate into the two sides of the slider, and contacts are symmetrically installed on the inner walls of both sides of the slide slot away from the loading seat. The contacts are electrically connected to terminals, and the two terminals are electrically connected to the positive and negative poles of the electromagnet respectively. A connecting circuit is formed between the two terminals and the electromagnet, and a battery is connected in series in the connecting circuit.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] (1) The present invention provides a loading and unloading machine on the circular seat for loading and unloading the material sheets, and the top of the circular seat is symmetrically provided with a tinning heating pipe and a glue dispensing cold pipe. When the rotating ring rotates counterclockwise, the placement platform can pass through the inside of the tinning heating pipe to tin the material sheets, and when the rotating ring rotates clockwise, the placement platform can pass through the inside of the glue dispensing cold pipe to glue the material sheets, and when the placement platform rotates to between the tinning heating pipe and the glue dispensing cold pipe, the crystal is fixed, so that the hot and cold tracks of semiconductor crystal fixing are set on the same device, which is convenient for processing the material sheets during semiconductor production;

[0019] (2) The invention opens the guide rod during the movement of the placement platform, so that the pressure roller moves downward to generate pressure on the extrusion slope, pushing the pressure plate toward the friction block, compressing the spring for a certain distance, causing the friction block to generate friction resistance on the rotating ring, slowing down the rotation speed of the rotating ring, and the greater the distance the pressure plate moves toward the friction block, the greater the friction resistance, and the lower the rotation speed of the rotating ring, thereby facilitating the control of the movement speed of the placement platform, thereby facilitating the adjustment of the movement speed of the placement platform through the tinning heating pipe and the dispensing cold pipe, facilitating the adjustment of the operation time such as the heating of the sheet, and facilitating the sheet processing in semiconductor production;

[0020] (3) When the placement platform moves to the processing position and needs to stop moving, the invention starts the cylinder to retract the cylinder, pulling the drive box to move toward the side away from the loading seat, so that the friction circle is out of contact with the friction surface, so that the rotation of the friction circle no longer drives the rotating ring to rotate, thereby facilitating the stopping of the rotating ring and the fixing of the placement platform, so that the stopping of the placement platform will not be completed by stopping the first motor, avoiding the output shaft of the first motor from continuing to rotate under the action of inertia, causing the position of the placement platform to shift, thereby improving the processing quality of the sheet;

[0021] (4) The invention drives the housing to move rapidly away from the loading seat, so that the two ends of the conductive rod on the slider contact the two contacts, so that the electromagnet is energized, generating attraction to the magnetic block, so that the extrusion slope moves rapidly toward the driving housing, so that the spring is fully compressed, and the friction force between the friction block and the friction surface increases instantly to a maximum value. Then, under the action of the friction force, the rotating ring is directly pressed to stop, so that the placement platform stops accurately at the sheet processing position, which is convenient for sheet processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The accompanying drawings are used to provide further understanding of the present invention and constitute a part of the specification. They are used to explain the present invention together with the embodiments of the present invention and do not constitute a limitation of the present invention.

[0023] In the attached picture:

[0024] Figure 1 It is a schematic diagram of the structure of the hot and cold track integrated device of the semiconductor die bonding machine of the present invention;

[0025] Figure 2 This is a schematic diagram of the circular seat structure of the present invention;

[0026] Figure 3 It is a schematic diagram of the structure of the rotating ring of the present invention;

[0027] Figure 4 This is a schematic diagram of the drive box structure of the present invention;

[0028] Figure 5 This is a schematic diagram of the friction block structure of the present invention;

[0029] Figure 6 This is a schematic diagram of the structure of the rotation control unit of the present invention;

[0030] Figure 7 It is a schematic diagram of the structure of the speed control unit of the present invention;

[0031] Figure 8 This is a schematic diagram of the push block structure of the present invention;

[0032] Fig. 9 This is a schematic diagram of the structure of the compaction and stop unit of the present invention;

[0033] In the figure: 1, circular seat; 2, loading seat; 3, loading machine; 4, unloading seat; 5, unloading machine; 6, tinning heating pipe; 7, tinning equipment; 8, dispensing cold pipe; 9, dispensing equipment; 10, mounting frame; 11, solid crystal equipment; 12, sheet moving assembly; 1201, arc groove; 1202, rotating ring; 1203, limiting ring; 1204, placing platform; 1205, friction surface; 1206, driving box; 1207, middle mounting groove; 1208, friction circle; 1209, tooth groove; 1210, motor mounting box; 1211, first motor; 1212, gear; 1213, rotation control unit; 12131, end mounting groove; 121 32. Friction block; 12133. Pressure plate; 12134. Spring; 12135. Push rod; 12136. Push block; 12137. Extrusion ramp; 1214. Speed ​​control unit; 12141. Pressure roller; 12142. Top plate; 12143. End plate; 12144. Fixed plate; 12145. Screw; 12146. Second motor; 12147. Guide rod; 1215. Pressing stop unit; 12151. Electromagnet; 12152. Magnetic block; 12153. Base; 12154. Slide; 12155. Slider; 12156. Conductive rod; 12157. Contact; 12158. Terminal; 12159. Cylinder. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments; based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0035] Embodiment 1, by Figure 1-Figure 9 The present invention comprises a circular seat 1, a loading seat 2 is installed on one side of the circular seat 1, a loading machine 3 is installed on the top of the loading seat 2, a unloading seat 4 is installed on the side of the circular seat 1 away from the loading seat 2, a unloading machine 5 is installed on the top of the unloading seat 4, a tinning heating pipe 6 and a glue dispensing cold pipe 8 are symmetrically installed on the top of the circular seat 1, the tinning heating pipe 6 and the glue dispensing cold pipe 8 are respectively located on both sides of the vertical direction of the loading seat 2 and the loading machine 3, the tinning heating pipe 6 and the glue dispensing cold pipe 8 are both arranged in a quarter-circular pipe shape, and the tinning heating pipe 6 and the glue dispensing cold pipe 8 are symmetrically installed on the top of the circular seat 1. A sheet moving assembly 12 is installed between the cold pipes 8, a plurality of heaters are installed equidistantly inside the tinning heating pipe 6, and the plurality of heaters form a plurality of temperature zones inside the tinning heating pipe 6. A tinning device 7 is installed on the top of one end of the tinning heating pipe 6 close to the unloading seat 4, a glue dispensing device 9 is installed on the top of one end of the glue dispensing cold pipe 8 close to the unloading seat 4, a mounting frame 10 is provided on one side above the circular seat 1 close to the unloading seat 4, the mounting frame 10 is fixedly connected to the tinning heating pipe 6 and the glue dispensing cold pipe 8, and a crystal bonding device 11 is installed on the top of the mounting frame 10.

[0036] The sheet moving component 12 includes an arc groove 1201 opened on the inner side of the tinning heating pipe 6 and the glue dispensing cold pipe 8, the center position of the two arc grooves 1201 coincides with the center position of the circular seat 1, and a rotating ring 1202 is arranged inside the two arc grooves 1201. The upper and lower sides of the rotating ring 1202 are respectively tightly attached to the top wall and the bottom wall of the arc groove 1201, and the outer and inner sides of the rotating ring 1202 are both installed with a limiting ring 1203, and the outer limiting ring 1203 is tightly attached to the inner wall of the tinning heating pipe 6 and the inner wall of the glue dispensing cold pipe 8, and the outer limiting ring 1203 is tightly attached to the outer wall of the tinning heating pipe 6 and the glue dispensing cold pipe 8. The outer wall of the pipe 8 is tightly attached, the height of the limiting ring 1203 is greater than the height of the rotating ring 1202, and a placing platform 1204 is installed on the side of the outer limiting ring 1203 close to the loading seat 2, and the placing platform 1204 can enter the interior of the tinning heating pipe 6 and the dispensing cold pipe 8, and a friction surface 1205 is provided on the surface of the inner limiting ring 1203 away from the rotating ring 1202, and a driving box body 1206 is provided on the side of the inner limiting ring 1203 away from the loading seat 2, and a middle mounting groove 1207 is opened inside the driving box body 1206, and the middle mounting groove 1207 penetrates to the driving box body 1206 close to the upper On one side of the material seat 2, a friction block 1208 is rotatably installed inside the middle mounting groove 1207, and the side of the friction block 1208 close to the material seat 2 contacts the limit ring 1203, and the middle of the outer wall of the friction block 1208 is evenly provided with tooth grooves 1209. A motor mounting box 1210 is installed on one side of the drive box 1206, and a first motor 1211 is installed inside the motor mounting box 1210. A gear 1212 is fixedly installed on the output shaft of the first motor 1211, and the gear 1212 is meshed with the tooth groove 1209. A rotation control unit 1213 is installed inside the drive box 1206, and the circular seat 1 A loading machine 3 and a unloading machine 5 are provided for loading and unloading of the material sheets, and a tinning heating pipe 6 and a glue dispensing cold pipe 8 are symmetrically provided on the top of the circular seat 1. When the rotating ring 1202 rotates counterclockwise, the placement platform 1204 can tin the material sheets through the tinning heating pipe 6, and when the rotating ring 1202 rotates clockwise, the placement platform 1204 can glue the material sheets through the glue dispensing cold pipe 8, and when the placement platform 1204 rotates to between the tinning heating pipe 6 and the glue dispensing cold pipe 8, crystal bonding is carried out, so that the hot and cold tracks of semiconductor crystal bonding are set on the same equipment, which is convenient for the processing of the material sheets during semiconductor production.

[0037] The rotation control unit 1213 includes two end mounting grooves 12131 opened inside the driving box body 1206, and the two end mounting grooves 12131 are symmetrically opened at the upper and lower sides of the middle mounting groove 1207. The end mounting groove 12131 penetrates to the side of the driving box body 1206 close to the loading seat 2. A friction block 12132 is movably installed inside the end mounting groove 12131. A pressure plate 12133 is provided on the side of the friction block 12132 away from the loading seat 2. The pressure plate 12133 is installed in the end mounting groove 121 31, two springs 12134 are symmetrically installed between the friction block 12132 and the pressure plate 12133, a push rod 12135 is installed on the side of the pressure plate 12133 away from the friction block 12132, one end of the push rod 12135 penetrates to the side of the drive box 1206 away from the loading seat 2, and a push block 12136 is installed on the end of the upper and lower electromagnets 12151 away from the pressure plate 12133, and an extrusion slope 12137 is provided on the side of the push block 12136 away from the drive box 1206. The bottom end of 2137 is tilted toward the side away from the driving box 1206, and a speed control unit 1214 is provided above the extrusion slope 12137. A pressing stop unit 1215 is installed on the push block 12136. When the placing platform 1204 moves, the guide rod 12147 is opened, so that the pressing roller 12141 moves downward to generate pressure on the extrusion slope 12137, and the pressing plate 12133 is pushed toward the friction block 12132, so that the spring 12134 is compressed for a distance, so that the friction block 12132 is pressed. 2132 generates friction resistance on the rotating ring 1202, slowing down the rotation speed of the rotating ring 1202, and the greater the moving distance of the pressure plate 12133 toward the friction block 12132, the greater the friction resistance, and the smaller the rotation speed of the rotating ring 1202, thereby facilitating the control of the moving speed of the placement platform 1204, thereby facilitating the adjustment of the moving speed of the placement platform 1204 through the tinning heating pipe 6 and the glue dispensing cold pipe 8, facilitating the adjustment of the operation time such as the heating of the sheet, and facilitating the sheet processing in semiconductor production.

[0038] The speed control unit 1214 includes a pressure roller 12141 arranged above the extrusion inclined surface 12137, the bottom wall of the pressure roller 12141 is in contact with the top surface of the extrusion inclined surface 12137, a top plate 12142 is installed on the top of the pressure roller 12141, an end plate 12143 is installed at one end of the top plate 12142, and fixed plates 12144 are provided on the upper and lower sides of the end plate 12143, the two fixed plates 12144 are fixedly connected to the side of the driving box 1206 away from the loading seat 2, a second motor 12146 is rotatably installed between the two fixed plates 12144, the second motor 12146 is threadedly connected to the end plate 12143, the top of the second motor 12146 is fixedly connected to the output shaft of the guide rod 12147, the guide rod 12147 is fixedly installed on the top of the upper fixed plate 12144, and a Screw 12145 is slidably connected to the end plate 12143. The length of screw 12145 is the same as the length of push block 12136. When the placement platform 1204 moves to the processing position and needs to stop moving, the cylinder 12159 is turned on to make the cylinder 12159 retract, pulling the drive box 1206 to move toward the side away from the loading seat 2, so that the friction block 1208 is out of contact with the friction surface 1205, so that the rotation of the friction block 1208 no longer drives the rotating ring 1202 to rotate, thereby facilitating the stopping of the rotating ring 1202 and the fixing of the placement platform 1204, so that the stopping movement of the placement platform 1204 will not be completed by the shutdown of the first motor 1211, avoiding the output shaft of the first motor 1211 to continue to rotate under the action of inertia, causing the position of the placement platform 1204 to shift, thereby improving the processing quality of the sheet.

[0039] The pressing stop unit 1215 includes a magnetic block 12152 installed on the side of the push block 12136 close to the driving box 1206, and an electromagnet 12151 is provided on the side of the magnetic block 12152 close to the driving box 1206. The electromagnet 12151 is fixedly installed on the driving box 1206, and the electromagnet 12151 is magnetically connected to the magnetic block 12152. A base 12153 is provided below the driving box 1206, and a slide groove 12154 is provided inside the base 12153. The driving box 1206 A slider 12155 is installed at the bottom end, and the slider 12155 is slidably installed inside the slide groove 12154. The side of the slider 12155 away from the loading seat 2 is fixedly connected to the output end of the cylinder 12159. The cylinder 12159 is fixedly installed on the side of the base 12153 away from the loading seat 2. A conductive rod 12156 is installed on the slider 12155. The setting direction of the conductive rod 12156 is perpendicular to the opening direction of the slide groove 12154. The two ends of the conductive rod 12156 respectively penetrate the slider 1215 5, contacts 12157 are symmetrically installed on the inner walls of both sides of the slide 12154 away from the loading seat 2, and the contacts 12157 are electrically connected to the terminals 12158. The two terminals 12158 are electrically connected to the positive and negative poles of the electromagnet 12151 respectively, and a connection circuit is formed between the two terminals 12158 and the electromagnet 12151. A battery is connected in series in the connection circuit. After the driving box 1206 moves quickly away from the loading seat 2, the conductive rod 1215 on the slider 12155 is 6 The two ends are in contact with the two contacts 12157, so that the electromagnet 12151 is energized, generating attraction to the magnetic block 12152, so that the extrusion slope 12137 moves quickly toward the driving box 1206, so that the spring 12134 is fully compressed, so that the friction force between the friction block 12132 and the friction surface 1205 increases instantly to the maximum value, and then under the action of the friction force, the rotating ring 1202 is directly pressed to stop, so that the placement platform 1204 stops accurately at the sheet processing position, which is convenient for sheet processing.

[0040] Working principle: When in use, the placement platform 1204 on the rotating ring 1202 is in a position facing the side of the loading seat 2, and the material sheet is transferred from the loading machine 3 toward the placement platform 1204 until the material sheet is transferred to the top of the placement platform 1204. At this time, the slider 12155 at the bottom of the driving box 1206 is located on the side of the slide groove 12154 close to the loading seat 2, and the conductive rod 12156 is separated from the contact 12157. At this time, the friction circle 1208 is in contact with the friction surface 1205 on the limit ring 1203;

[0041] When tinning operation is required, a positive current is passed through the first motor 1211, so that the gear 1212 rotates clockwise, and the gear 1212 meshes with the tooth groove 1209 on the friction block 1208, thereby driving the friction block 1208 to rotate counterclockwise. Since the friction block 1208 contacts the friction surface 1205 on the limit ring 1203, the rotating ring 1202 rotates counterclockwise under the action of friction force, thereby driving the placement platform 1204 to rotate along with the rotating ring 1202, so that the placement platform 1204 enters the tinning heating pipe 6, and the heater inside the tinning heating pipe 6 is turned on. When the material sheet at the top of the placement platform 1204 passes through the tinning heating pipe 6, the heater heats the material sheet. When the placement platform 1204 moves to the bottom of the tinning device 7, the rotating ring 1202 stops, and the tinning device 7 tins the material sheet;

[0042] When the dispensing operation is required, the first motor 1211 is supplied with reverse current, so that the gear 1212 rotates counterclockwise, and then drives the friction circle 1208 to rotate clockwise. Under the action of friction force, the rotating ring 1202 rotates clockwise, driving the placement platform 1204 to rotate toward the dispensing cold pipe 8 along with the rotating ring 1202. When passing under the dispensing device 9, the rotating ring 1202 stops rotating, so that the dispensing device 9 dispenses glue to the sheet;

[0043] After tinning or dispensing is completed, the placement platform 1204 rotates with the rotating ring 1202 to the side facing the unloading seat 4. At this time, the material piece moves to the bottom of the solid crystal device 11, and the material piece is solidified by the solid crystal device 11, so that the semiconductor solid crystal hot and cold tracks are set on the same device, which is convenient for processing the material piece during semiconductor production. After the fixation is completed, the material piece is moved from the placement platform 1204 to the top of the unloading machine 5 for unloading, and then the rotating ring 1202 is rotated to rotate the placement platform 1204 to the original position, so that the equipment is stopped to process the next material piece;

[0044] When the rotating ring 1202 rotates, the friction block 1208 contacts the friction surface 1205. When the friction block 1208 rotates, the rotating ring 1202 is driven to rotate under the action of friction. When it is necessary to extend the heating time of the sheet on the placement platform 1204 or the moving speed of the placement platform 1204, the guide rod 12147 is turned on to rotate the second motor 12146. Since the second motor 12146 is threadedly connected to the end plate 12143, and the end plate 12143 is slidably connected to the screw 12145, the end plate 12143 is driven to move downward, and the pressure roller 121 41 contacts with the extrusion inclined surface 12137, thereby pushing the pressing plate 12133 to move toward the friction block 12132, and the friction block 12132 contacts with the friction surface 1205, so that the spring 12134 is compressed for a distance, so that the friction block 12132 generates friction resistance to the rotating ring 1202, thereby slowing down the rotation speed of the rotating ring 1202, and the greater the moving distance of the pressing plate 12133 toward the friction block 12132, the greater the friction resistance, and the smaller the rotation speed of the rotating ring 1202, so as to facilitate the control of the moving speed of the placing platform 1204 and facilitate the processing of the sheet;

[0045] When it is necessary to stop the rotating ring 1202 and stop the placement platform 1204 from moving to process the sheet, the staff controls the cylinder 12159 to pull the drive box 1206 to move quickly toward the side away from the loading seat 2, so that the friction circle 1208 is out of contact with the friction surface 1205. Since there is no rotational power, the rotating ring 1202 stops rotating, and at the same time, the two ends of the conductive rod 12156 on the slider 12155 are in contact with the contacts 12157 on both sides of the inner wall of the slide groove 12154. The circuit of the electromagnet 12151 is connected. After the electromagnet 12151 is energized, it generates attraction to the magnetic block 12152, so that the push block 12136 contacts the drive box 1206, and the spring 12134 is fully compressed, so that the friction force between the friction block 12132 and the friction surface 1205 increases instantly to a maximum value. Then, under the action of the friction force, the rotating ring 1202 is directly pressed to stop, so that the placement platform 1204 stops accurately at the sheet processing position, which is convenient for sheet processing;

[0046] When the placement platform 1204 needs to continue moving, the output end of the cylinder 12159 extends to push the slider 12155 toward the loading seat 2, so that the conductive rod 12156 is out of contact with the contact 12157, and the friction block 1208 is in contact with the friction surface 1205, and the rotating ring 1202 rotates normally.

Claims

1. A semiconductor die-bonding machine hot and cold track integrated device, comprising a circular seat (1), characterized in that: A loading seat (2) is installed on one side of the circular seat (1), a loading machine (3) is installed on the top of the loading seat (2), a discharging seat (4) is installed on the side of the circular seat (1) away from the loading seat (2), a discharging machine (5) is installed on the top of the discharging seat (4), a tinning heating pipe (6) and a glue dispensing cold pipe (8) are symmetrically installed on the top of the circular seat (1), the tinning heating pipe (6) and the glue dispensing cold pipe (8) are respectively located on both sides of the loading seat (2) and the loading machine (3), the tinning heating pipe (6) and the glue dispensing cold pipe (8) are both arranged in a quarter-circular pipe shape, and a sheet moving component (12) is installed between the tinning heating pipe (6) and the glue dispensing cold pipe (8); A plurality of heaters are installed at equal intervals inside the tinning heating pipe (6), and the plurality of heaters form a plurality of temperature zones inside the tinning heating pipe (6); A tinning device (7) is installed on the top of one end of the tinning heating pipe (6) close to the material discharging seat (4), and a glue dispensing device (9) is installed on the top of one end of the glue dispensing cold pipe (8) close to the material discharging seat (4). A mounting frame (10) is provided on one side of the circular seat (1) close to the material discharging seat (4). The mounting frame (10) is fixedly connected to the tinning heating pipe (6) and the glue dispensing cold pipe (8), and a crystal bonding device (11) is installed on the top of the mounting frame (10); The sheet moving assembly (12) comprises an arc groove (1201) provided on the inner side of the tinning heating pipe (6) and the dispensing cold pipe (8), the center position of the two arc grooves (1201) coincides with the center position of the circular seat (1), a rotating ring (1202) is provided inside the two arc grooves (1201), the upper and lower sides of the rotating ring (1202) are respectively in close contact with the top wall and the bottom wall of the arc groove (1201), and the outer side of the rotating ring (1202) is The outer limiting ring (1203) is tightly attached to the inner wall of the tinning heating pipe (6) and the inner wall of the glue dispensing cold pipe (8), and the outer limiting ring (1203) is tightly attached to the outer wall of the tinning heating pipe (6) and the outer wall of the glue dispensing cold pipe (8). The height of the limiting ring (1203) is greater than the height of the rotating ring (1202). The outer limiting ring (1203) is installed on one side close to the loading seat (2). A placement platform (1204) is provided, and the placement platform (1204) can enter the interior of the tinning heating pipe (6) and the dispensing cold pipe (8); a friction surface (1205) is provided on the surface of the inner limiting ring (1203) away from the rotating ring (1202); a driving box (1206) is provided on the side of the inner limiting ring (1203) away from the loading seat (2); a base (12153) is provided below the driving box (1206) A slide groove (12154) is provided inside the base (12153), a slider (12155) is installed at the bottom end of the driving box (1206), the slider (12155) is slidably installed inside the slide groove (12154), the side of the slider (12155) away from the loading seat (2) is fixedly connected to the output end of the cylinder (12159), and the cylinder (12159) is fixedly installed on the side of the base (12153) away from the loading seat (2).

2. The semiconductor die bonder hot and cold track integrated device according to claim 1, characterized in that: The drive housing (1206) is provided with a middle installation groove (1207) inside, the middle installation groove (1207) extends to a side of the drive housing (1206) close to the loading seat (2), a friction block (1208) is rotatably installed inside the middle installation groove (1207), a side of the friction block (1208) close to the loading seat (2) contacts the limit ring (1203), and tooth grooves (1209) are evenly arranged in the middle of the outer wall of the friction block (1208), a motor installation box (1210) is installed on one side of the drive housing (1206), a first motor (1211) is installed inside the motor installation box (1210), a gear (1212) is fixedly installed on the output shaft of the first motor (1211), the gear (1212) is meshed with the tooth groove (1209), and a rotation control unit (1213) is installed inside the drive housing (1206).

3. The semiconductor die bonder hot and cold track integrated device according to claim 2, characterized in that: The rotation control unit (1213) comprises two end mounting grooves (12131) opened inside the driving housing (1206), the two end mounting grooves (12131) are symmetrically opened on the upper and lower sides of the middle mounting groove (1207), the end mounting grooves (12131) penetrate to the side of the driving housing (1206) close to the loading seat (2), a friction block (12132) is movably installed inside the end mounting groove (12131), a pressure plate (12133) is provided on the side of the friction block (12132 away from the loading seat (2), the pressure plate (12133) is installed inside the end mounting groove (12131), and two springs (12134) are symmetrically installed between the friction block (12132) and the pressure plate (12133).

4. The semiconductor die bonder hot and cold track integrated device according to claim 3, characterized in that: A push rod (12135) is installed on the side of the pressure plate (12133) away from the friction block (12132), one end of the push rod (12135) penetrates to the side of the drive housing (1206) away from the loading seat (2), and a push block (12136) is installed on the ends of the upper and lower electromagnets (12151) away from the pressure plate (12133). An extrusion slope (12137) is provided on the side of the push block (12136) away from the drive housing (1206), and the bottom end of the extrusion slope (12137) is inclined toward the side away from the drive housing (1206). A speed control unit (1214) is provided above the extrusion slope (12137), and a clamping stop unit (1215) is installed on the push block (12136).

5. The semiconductor die bonder hot and cold track integrated device according to claim 4, characterized in that: The speed control unit (1214) comprises a pressing roller (12141) arranged above the extrusion inclined surface (12137); the bottom wall of the pressing roller (12141) contacts the top surface of the extrusion inclined surface (12137); a top plate (12142) is installed at the top of the pressing roller (12141); an end plate (12143) is installed at one end of the top plate (12142); fixed plates (12144) are provided on both the upper and lower sides of the end plate (12143); and the two fixed plates (12144) are provided on the upper and lower sides of the end plate (12143). The plates (12144) are fixedly connected to the side of the driving box (1206) away from the loading seat (2), and a second motor (12146) is rotatably installed between the two fixed plates (12144). The second motor (12146) is threadedly connected to the end plate (12143). The top end of the second motor (12146) is fixedly connected to the output shaft of the guide rod (12147), and the guide rod (12147) is fixedly installed on the top end of the upper fixed plate (12144).

6. The semiconductor die bonder hot and cold track integrated device according to claim 5, characterized in that: A screw rod (12145) is installed between the two fixing plates (12144), the screw rod (12145) is slidably connected to the end plate (12143), and the length of the screw rod (12145) is the same as the length of the push block (12136).

7. The semiconductor die bonder hot and cold track integrated device according to claim 6, characterized in that: The clamping stop unit (1215) comprises a magnetic block (12152) mounted on a side of the push block (12136) close to the drive housing (1206); an electromagnet (12151) is provided on a side of the magnetic block (12152) close to the drive housing (1206); the electromagnet (12151) is fixedly mounted on the drive housing (1206); and the electromagnet (12151) is magnetically connected to the magnetic block (12152).

8. The semiconductor die bonder hot and cold track integrated device according to claim 7, characterized in that: A conductive rod (12156) is installed on the slider (12155), and the setting direction of the conductive rod (12156) is perpendicular to the opening direction of the slide groove (12154). The two ends of the conductive rod (12156) respectively penetrate the two sides of the slider (12155), and the inner walls of the two sides of the slide groove (12154) are symmetrically installed at one end away from the loading seat (2). The contact points (12157) are electrically connected to the terminal posts (12158), and the two terminal posts (12158) are electrically connected to the positive and negative poles of the electromagnet (12151) respectively. A connection circuit is formed between the two terminal posts (12158) and the electromagnet (12151), and a battery is connected in series in the connection circuit.

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