Interactive three-stage stepless track change system for plasma cleaning equipment

Abstract

The present invention discloses an interactive three-stage stepless track change system applied to plasma cleaning equipment, wherein the track spacing of the material tray is automatically adjusted according to the needs of the user, and the compatibility is good. Within the adjustable range, it is not limited by the type and quantity of the frame product, thereby improving the cleaning efficiency of the plasma cleaning equipment. The system comprises: a cleaning interactive high-plate track mechanism, which comprises a high-plate and a group of high-plate station switching mechanisms; a cleaning interactive low-plate track mechanism, which comprises a low-plate and a group of low-plate station switching mechanisms; a stepless track change track transmission mechanism, which is used to drive the first frame mechanism corresponding to the second guide rail on the high plate, or the second frame mechanism corresponding to the fourth guide rail on the low plate to move and operate; at least one cleaning interactive high-low plate sealing mechanism, which is used to cover the lower adjustment window of the high plate or the low plate and complete the lower sealing; and at least two lifting transmission mechanisms.

Description

Technical Field

[0001] The invention relates to the technical field of precision cleaning, and in particular to an interactive three-stage stepless track change system applied to plasma cleaning equipment. Background Art

[0002] The existing fully automatic plasma cleaning equipment is used for precision cleaning of lead frames and integrated circuit chips. During the operation of the fully automatic plasma cleaning equipment, there is a link in which the track on the material tray that receives the width of the frame sheet needs to be adjusted to different sizes during cleaning to meet the requirements of frame sheets of different sizes for plasma cleaning in the equipment.

[0003] The width between the tracks on the existing tray is a set value, and a combination of tracks with different fixed widths is set on the same tray. The tracks between the trays cannot be adjusted and can only be fixed for use. It uses a total of four sets of tracks, each track has a staircase tower guide rail with a height of up to five layers. Each layer of the guide rail is designed according to the actual size of each fixed frame sheet, so as to meet a total of up to five frame sheets of different sizes, and the number of compatible frame products is effective; if there are new types of frame products of new sizes, they cannot be used in the machine equipment, and can only be used by redesigning the tray suitable for the new product or re-disassembling; thereby making the versatility of the tray of the existing Plasma cleaning equipment relatively poor, and cannot meet the placement requirements of frame products of various sizes; and when the existing Plasma cleaning equipment is loading frame products, there is only a single loading and unloading station and a cleaning station, which makes the production efficiency low.

[0004] Therefore, it is urgent to develop a track changing system that can improve the cleaning efficiency of Plasma cleaning equipment. Summary of the invention

[0005] In view of the above problems, the present invention provides an interactive three-stage stepless track changing system applied to plasma cleaning equipment, wherein the track spacing of the material tray is automatically adjusted according to user requirements, and the system has good compatibility and is not limited by the type and quantity of frame products within an adjustable range, thereby improving the cleaning efficiency of the plasma cleaning equipment.

[0006] The interactive three-stage stepless track change system applied to plasma cleaning equipment is characterized in that it includes:

[0007] The cleaning interactive high-plate track mechanism includes a high-plate and a group of high-plate station switching mechanisms. The cleaning interactive high-plate track mechanism is installed in the Plasma cleaning equipment. The high-plate station switching mechanism drives the high-plate to move along the left station, the middle station, and the right station. The bottom of the high-plate station switching mechanism is fixed on the machine's main fixed large plate. The high-plate is arranged with a plurality of groups of fixed first guide rails and adjustable second guide rails. The width between each group of first guide rails and second guide rails is used to place frame products. The positions of all first guide rails are fixed. All second guide rails form an integrated structure through the first frame mechanism. The lower adjustment window of the high-plate makes the first frame mechanism exposed.

[0008] The cleaning interactive low-plate track mechanism includes a low-plate and a group of low-plate station switching mechanisms. The cleaning interactive low-plate track mechanism is installed in the Plasma cleaning equipment. The low-plate station switching mechanism drives the low-plate to move along the left station, the middle station and the right station for operation. The bottom of the low-plate station switching mechanism is fixed on the main fixed plate of the machine. Several groups of fixed third guide rails and adjustable fourth guide rails are arranged on the low-plate. The width between each group of third guide rails and fourth guide rails is used to place frame products. The positions of all third guide rails are fixed. All fourth guide rails form an integrated structure through the second frame mechanism. The lower adjustment window of the low-plate makes the second frame mechanism exposed.

[0009] The stepless track-changing track transmission mechanism is used to drive the first frame mechanism corresponding to the second guide rail on the high plate, or the second frame mechanism corresponding to the fourth guide rail on the low plate to move;

[0010] At least one cleaning interactive high and low plate sealing mechanism, which is used to cover the lower adjustment window of the high plate or the low plate to complete the lower sealing;

[0011] and at least two lifting transmission mechanisms;

[0012] The stepless track-changing track transmission mechanism is supported at the top output end of the jacking transmission mechanism, and the cleaning interactive high and low plate sealing mechanism is supported at the top output end of the independent jacking transmission mechanism;

[0013] The three stations include at least one loading and unloading station and one cleaning station. The position corresponding to the loading and unloading station is provided with the stepless track transmission mechanism, and the cleaning interactive high and low plate sealing mechanism is provided directly below the cleaning station.

[0014] The height position of the high plate is higher than that of the low plate, and both the high plate and the low plate are used to receive frame products of corresponding widths.

[0015] It is further characterized by:

[0016] The high-plate station switching mechanism comprises two outer profile columns, two outer support plates at two sides, a first electric execution module, a first motor, and a first linear guide rail. The high-plate comprises a high-plate body, first pads at two sides, and a plurality of guide rail combinations. Each pair of guide rail combinations comprises a fixed first guide rail and an adjustable second guide rail. The convex parts at two sides of the high-plate body are respectively pressed onto the first pads. The output end of the first electric execution module is fixedly connected to one of the first pads, and the other first pad is embedded and connected to the first linear guide rail. The two ends of the high-plate body in the width direction are respectively provided with downwardly convex first guide optical axes and first linear bearings inserted into the first pads, so that the first motor drives the first electric execution module to drive the high-plate to move along the first linear guide rail, and the high-plate body can be lifted and lowered along the first linear bearing through the first guide optical axis.

[0017] The low-disk station switching mechanism comprises two inner profile columns, inner support plates on both sides, a second electric execution module, a second motor, and a second linear guide rail. The low-disk comprises a low-disk body, second pads on both sides, and a plurality of guide rail combinations. Each pair of guide rail combinations comprises a fixed third guide rail and an adjustable fourth guide rail. Both sides of the low-disk body are respectively pressed onto the second pads. The output end of the second electric execution module is fixedly connected to one of the second pads, and the other second pad is embedded and connected to the second linear guide rail. Both ends of the low-disk body in the width direction are respectively provided with a downwardly convex second guide optical axis and a second linear bearing inserted into the second pad, so that the second motor drives the second electric execution module to drive the low-disk to move along the second linear guide rail, and the low-disk body can be lifted and lowered along the second linear bearing via the second guide optical axis.

[0018] The high tray body includes a corresponding upper plate, a lower plate, and an outer frame, and the low tray body includes a corresponding upper plate, a lower plate, and an outer frame. The difference between the high tray body and the low tray body is that the high tray body has an outwardly convex side convex portion, the first guide rail and the third guide rail are the same guide rail, the second guide rail and the fourth guide rail are the same guide rail, and the first frame mechanism and the second frame mechanism are the same frame mechanism;

[0019] The upper plate and the lower plate of the high disk body and the low disk body are provided with outer frames around them, and a frame mechanism is provided in the cavity formed by the outer frames, and the frame mechanism includes the same number of track channel supports corresponding to the second guide rail or the fourth guide rail, and both sides of all the track channel supports are connected by a track-changing movable bracket to form a frame mechanism, and the lower plate is fixedly provided with a track-changing movable friction light sheet corresponding to the outer side of the track-changing movable bracket, and a plurality of track-changing movable adjustment pressure accessories are arranged at intervals in the length direction of the track-changing movable bracket, and the track-changing movable adjustment pressure accessories are arranged to move along the track-changing movable friction light sheet and will not move when the pressure is not received, and a plurality of groups of waist-shaped holes are provided on the upper plate, and the second guide rail or the fourth guide rail is fixedly connected to the track channel support after passing through the waist-shaped holes through fasteners, and the waist-shaped holes are arranged parallel to the width direction of the disk body;

[0020] The track-changing activity regulating pressure accessories include a track-changing activity regulator and a track-changing activity pressure plate, which ensure that the track-changing activity regulation is carried out reliably;

[0021] The bottom center of the lower plate is provided with a lower adjustment window, which enables the stepless track-changing track transmission mechanism to rise and drive the frame mechanism to move along the track-changing movable friction light sheet, thereby adjusting the width spacing for placing frame products;

[0022] The lifting transmission mechanism includes a lifting motor, a lifting screw module, a lifting transmission seat, and a lifting seat. A fixed connection plate is integrated on the lifting seat. The connection plate is used to fix the machine main fixed plate of the Plasma cleaning equipment. The output shaft of the lifting motor is connected to the input end of the lifting screw module. The linear output end of the lifting screw module is connected to the lifting transmission seat. The top of the lifting transmission seat protrudes from the corresponding station notch of the machine main fixed plate. The top of the lifting transmission seat is fixed to the stepless track change rail transmission mechanism or the cleaning interactive high and low plate sealing mechanism. The lifting seat is fixed with a lifting motor and a lifting screw module.

[0023] The stepless track-changing track transmission mechanism comprises a housing, a driving motor, a screw module, and at least one group of translation blocks, each group of translation blocks is provided with a transmission block, the housing is provided with a driving motor and a screw module, the driving motor drives the screw module to rotate, the translation block is threadedly connected to the screw module, the upper surface of the housing is provided with a guide notch groove corresponding to the upper area of ​​the translation block, the upper part of the translation block is fixedly connected to the transmission block, the transmission block is exposed on the upper surface of the housing, and the transmission block is used to drive the corresponding track channel support of the frame mechanism to move linearly;

[0024] The bottom of the housing is provided with a track groove and a docking hole, the bottom of the translation block is embedded in the track groove to ensure the linear movement of the translation block, and the docking hole is used for quick and reliable connection with the top of the lifting transmission seat;

[0025] Preferably, the translation blocks are provided in two groups, and the two groups of translation blocks are arranged at intervals to ensure that the corresponding track channel support within the surface area of ​​the lower adjustment window can be moved without moving a large stroke;

[0026] The cleaning interactive high and low plate sealing mechanism includes a lifting base and an upper large plate. The upper surface of the upper large plate is provided with an upwardly convex first sealing ring and a second sealing ring. The second sealing ring is located on the periphery of the first sealing ring. The surface area of ​​the first sealing ring covers the surface area of ​​the lower adjustment window of the high plate or the low plate in the middle position. The second sealing ring is tightly attached to the bottom surface of the lower plate of the high plate or the low plate in a sealed state to ensure the sealing of the lower adjustment window of the high plate or the low plate.

[0027] After adopting the above technical scheme, the cleaning operation of the material frame product is carried out at the cleaning station, and at least one loading and unloading station is set within the track range. The corresponding positions and numbers of the loading and unloading stations and the cleaning stations can be switched arbitrarily according to needs. The loading and unloading operation can be carried out on one side or on both sides. Only the middle station can be set as the cleaning station, or the middle station and two stations on one side can be set as the cleaning stations, which improves the convenience of the overall production line layout; in addition, the system designs two sets of material trays, high tray and low tray, for loading and unloading operations of frame products, which improves the convenience of loading and unloading of cleaning operations; in addition, several sets of guide rail intervals are set in the width direction of the high tray and the low tray The adjustable combined mechanism for positioning and placing frame products can timely adjust the spacing between the fixed track and the adjustable track through the stepless track transmission mechanism at the loading and unloading stations, so that the track spacing of the material tray can be automatically adjusted according to the user's needs. In addition, at the middle station, the cleaning interactive high and low plate sealing mechanism is lifted by the lifting transmission mechanism to drive the high and low plates at the corresponding positions to be lifted into the upper cleaning area of ​​the Plasma cleaning equipment. The cleaning interactive high and low plate sealing mechanism seals the lower adjustment window area, thereby completing a reliable cleaning operation; it has good compatibility and is not limited by the type and quantity of frame products within the adjustable range, thereby improving the cleaning efficiency of the Plasma cleaning equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the three-dimensional structure of a specific embodiment of the present invention;

[0029] Figure 2 A three-dimensional diagram of the cleaning interactive high-plate track mechanism of the present invention (the corresponding position states of the three stations are shown in the diagram);

[0030] Figure 3 for Figure 2 A side view structural schematic diagram of

[0031] Figure 4A three-dimensional diagram of the cleaning interactive low-disk track mechanism of the present invention (the corresponding position states of the three stations are shown in the diagram);

[0032] Figure 5 for Figure 4 A side view structural schematic diagram of

[0033] Figure 6 The three-dimensional high plate suitable for the present invention Figure 1 ;

[0034] Figure 7 The three-dimensional high plate suitable for the present invention Figure 2 ;

[0035] Figure 8 For the three-dimensional low plate suitable for the present invention Figure 1 ;

[0036] Fig. 9 For the three-dimensional low plate suitable for the present invention Figure 2 ;

[0037] Fig.10 A three-dimensional schematic diagram of a frame mechanism applicable to a high tray of the present invention (without the upper plate);

[0038] Fig.11 It is a three-dimensional structural schematic diagram of the cleaning interactive high and low plate sealing mechanism of the present invention;

[0039] Fig.12 It is a three-dimensional structural schematic diagram of the jacking transmission mechanism of the present invention;

[0040] Fig.13 The three-dimensional structure of the stepless track-changing track transmission mechanism of the present invention Figure 1 ;

[0041] Fig.14 The three-dimensional structure of the stepless track-changing track transmission mechanism of the present invention Figure 2 ;

[0042] Fig.15 It is a three-dimensional schematic diagram of the stepless track-changing track transmission mechanism of the present invention with part of the housing removed;

[0043] The names corresponding to the serial numbers in the figure are as follows:

[0044] The lower adjustment window 1, the upper plate 2, the waist-shaped hole 201, the lower plate 3, the outer frame 4, the track channel support 5, the track-changing movable bracket 6, the track-changing movable friction light sheet 7, the track-changing movable regulator 8, and the track-changing movable pressure plate 9;

[0045] Cleaning interactive high disk track mechanism 10, cleaning interactive low disk track mechanism 20, stepless track change track transmission mechanism 30, shell 31, guide notch groove 311, track groove 312, docking hole 313, drive motor 32, screw module 33, translation block 34, transmission block 35, synchronous belt 36, synchronous wheel 37, cleaning interactive high and low disk sealing mechanism 40, lifting base 41, upper large plate 42, first sealing ring 43, second sealing ring 44, high disk 50, first guide rail 51, second guide rail 52, high disk body 53, side convex part 531, first pad 54, first guide light axis 55, first linear bearing 56, high disk station switching mechanism 60 , outer profile column 61, outer support plate 62, first electric actuator module 63, first motor 64, first linear guide rail 65, first frame mechanism 70, low plate 80, third guide rail 81, fourth guide rail 82, low plate body 83, second pad 84, second guide light axis 85, second linear bearing 86, low plate station switching mechanism 90, inner profile column 91, inner support plate 92, second electric actuator module 93, second motor 94, second linear guide rail 95, second frame mechanism 100, lifting transmission mechanism 110, lifting motor 111, lifting screw module 112, lifting transmission seat 113, lifting seat 114, connecting plate 115. DETAILED DESCRIPTION

[0046] Interactive three-stage stepless track change system for plasma cleaning equipment, see Figure 1-Figure 15 , which includes a cleaning interactive high-disk track mechanism 10, a cleaning interactive low-disk track mechanism 20, a stepless track change track transmission mechanism 30, a cleaning interactive high-low disk sealing mechanism 40, and at least two jacking transmission mechanisms 110;

[0047] The cleaning interactive high-plate track mechanism 10 includes a high-plate 50 and a group of high-plate station switching mechanisms 60. The cleaning interactive high-plate track mechanism 10 is installed in the Plasma cleaning equipment. The high-plate station switching mechanism 60 drives the high-plate 50 to move along the left station, the middle station, and the right station. The bottom of the high-plate station switching mechanism 60 is fixed on the machine's total fixed large plate (not shown in the figure, located below the column and above the connecting plate). A plurality of groups of fixed first guide rails 51 and adjustable second guide rails 52 are arranged on the high-plate 50. The width between each group of first guide rails 51 and second guide rails 52 is used to place frame products. The positions of all first guide rails 51 are fixed, and all second guide rails 52 form an integrated structure through the first frame mechanism 70. The lower adjustment window 1 of the high-plate 50 makes the first frame mechanism 70 exposed.

[0048] The cleaning interactive low-plate track mechanism 20 includes a low-plate 80 and a group of low-plate station switching mechanisms 90. The cleaning interactive low-plate track mechanism 90 is installed in the Plasma cleaning equipment. The low-plate station switching mechanism 90 drives the low-plate 80 to move along the left station, the middle station, and the right station. The bottom of the low-plate station switching mechanism 90 is fixed on the main fixed plate of the machine. Several groups of fixed third guide rails 81 and adjustable fourth guide rails 82 are arranged on the low-plate 80. The width between each group of third guide rails 81 and fourth guide rails 82 is used to place frame products. The positions of all third guide rails 81 are fixed. All fourth guide rails 82 form an integrated structure through the second frame mechanism 100. The lower adjustment window 1 of the low-plate 80 makes the second frame mechanism 100 exposed.

[0049] The stepless track-changing track transmission mechanism 30 is used to drive the first frame mechanism 70 corresponding to the second guide rail 52 on the high plate 50, or the second frame mechanism 100 corresponding to the fourth guide rail 82 on the low plate 80 to move;

[0050] Cleaning the interactive high and low plate sealing mechanism 40, which is used to cover the lower adjustment window 1 of the high plate 50 or the low plate 80 to complete the lower sealing;

[0051] In specific implementation, the position corresponding to the left station is the loading and unloading station, and the positions corresponding to the middle station and the right station are cleaning stations. The left station performs loading and unloading operations, and the middle station and the right station perform cleaning operations.

[0052] A stepless track-changing rail transmission mechanism 30 is arranged directly below the high plate 50 or the low plate 80 of the left station, and the stepless track-changing rail transmission mechanism 30 is supported at the top output end of the jacking transmission mechanism 110;

[0053] Independent cleaning interactive high and low plate sealing mechanisms 40 are provided directly below the high plate 50 and the low plate 80 of the middle station and the right station, and each cleaning interactive high and low plate sealing mechanism 40 is supported at the top output end of an independent lifting transmission mechanism 110;

[0054] The middle station and right station positions corresponding to the high plate 50 and the middle station and right station positions corresponding to the low plate 80 are all directly below the cleaning station of the Plasma cleaning equipment, and the cleaning interactive high and low plate sealing mechanism 40 is arranged directly below the cleaning station;

[0055] The height position of the high plate 50 is higher than that of the low plate 80 , and both the high plate 50 and the low plate 80 are used to connect frame products of corresponding widths.

[0056] In a specific embodiment, the high plate station switching mechanism 60 includes two outer profile columns 61, two side outer support plates 62, a first electric execution module 63, a first motor 64, and a first linear guide rail 65. The high plate 50 includes a high plate body 53, first pads 54 on both sides, and six pairs of guide rail combinations. Each pair of guide rail combinations includes a fixed first guide rail 51 and an adjustable second guide rail 52. The convex parts 531 on both sides of the high plate body 53 are respectively pressed on the first pads 54. The output end of the first electric execution module 63 is fixedly connected to one of the first pads 54, and the other first pad 54 is embedded and connected to the first linear guide rail 65. The two ends of the high plate body 53 in the width direction are respectively provided with a downward convex first guide light axis 55 and a first linear bearing 56 inserted on the first pad 54, which enables the first motor 64 to drive the first electric execution module 63 to drive the high plate 50 to move along the first linear guide rail 65, and the high plate body 53 can be lifted and lowered along the first linear bearing 56 through the first guide light axis 55;

[0057] The low plate station switching mechanism 90 includes two inner profile columns 91, inner support plates 92 on both sides, a second electric execution module 93, a second motor 94, and a second linear guide rail 95. The low plate 80 includes a low plate body 83, second pads 84 on both sides, and six pairs of guide rail combinations. Each pair of guide rail combinations includes a fixed third guide rail 81 and an adjustable fourth guide rail 82. The two sides of the low plate body 83 are respectively pressed on the second pads 84. The output end of the second electric execution module 93 is fixedly connected to one of the second pads 84, and the other second pad 84 is embedded and connected to the second linear guide rail 95. The two ends of the low plate body 83 in the width direction are respectively provided with a downwardly convex second guide light axis 85 and a second linear bearing 86 inserted on the second pad 84, which enables the second motor 94 to drive the second electric execution module 93 to drive the low plate 80 to move along the second linear guide rail 95, and the low plate body 83 can be lifted and lowered along the second linear bearing 86 through the second guide light axis 85;

[0058] The six pairs of guide rails of the high tray 50 and the low tray 80 enable a single tray to hold six groups of frame products, which increases the number of frame products that can be placed at a time by 50% compared to the original four groups of guide rails, greatly improving production capacity.

[0059] In a specific embodiment, the high tray body 53 includes a corresponding upper plate 2, a lower plate 3, and an outer frame 4, and the low tray body 83 includes a corresponding upper plate 2, a lower plate 3, and an outer frame 4. The difference between the high tray body 53 and the low tray body 83 is that the high tray body 53 has an outwardly convex side convex portion 531, the first guide rail 51 and the third guide rail 81 are the same guide rails, the second guide rail 52 and the fourth guide rail 82 are the same guide rails, and the first frame mechanism 70 and the second frame mechanism 110 are the same frame mechanism;

[0060] An outer frame 4 is arranged around the upper plate 2 and the lower plate 3 of the high disk body 53 and the low disk body 83, and a frame mechanism is arranged in the cavity formed by the outer frame 4. The frame mechanism includes the same number of track channel supports 5 corresponding to the second guide rail 52 or the fourth guide rail 82. Both sides of all the track channel supports 5 are connected by a track-changing movable bracket 6 to form a frame mechanism. A track-changing movable friction light sheet 7 is fixedly arranged on the lower plate 3 corresponding to the outer side of the track-changing movable bracket 6. A plurality of track-changing movable adjusting pressure accessories are arranged at intervals in the length direction of the track-changing movable bracket 6. The track-changing movable adjusting pressure accessories are arranged to move along the track-changing movable friction light sheet 7 and will not move when no pressure is applied. A plurality of groups of waist-shaped holes 201 are arranged on the upper plate 2. The second guide rail 52 or the fourth guide rail 82 is fixedly connected to the track channel support 5 after passing through the waist-shaped holes 201 through fasteners. The waist-shaped holes 201 are arranged parallel to the width direction of the disk body.

[0061] In specific implementation, the track-changing activity regulating pressure accessories include a track-changing activity regulator 8 and a track-changing activity pressure plate 9, which ensure that the track-changing activity regulation is carried out reliably;

[0062] A lower adjustment window 1 is provided at the bottom center of the lower plate 3, which enables the stepless track-changing track transmission mechanism 30 to rise and drive the frame mechanism to move linearly along the track-changing movable friction light sheet 7, thereby adjusting the width spacing for placing frame products.

[0063] During specific implementation, the lifting transmission mechanism 110 includes a lifting motor 111, a lifting screw module 112, a lifting transmission seat 113, and a lifting seat 114. The lifting seat 114 is integrated with a connecting plate 115, and the connecting plate 115 is used to fix the machine's main fixed plate of the Plasma cleaning equipment. The output shaft of the lifting motor 111 is connected to the input end of the lifting screw module 112, and the linear output end of the lifting screw module 112 is connected to the lifting transmission seat 113. The top of the lifting transmission seat 113 protrudes from the corresponding workstation gap of the machine's main fixed plate. The top of the lifting transmission seat 113 is fixedly connected to the stepless track transmission mechanism 30 or the cleaning interactive high and low plate sealing mechanism 40. The lifting motor 111 and the lifting screw module 112 are fixedly provided on the lifting seat 114.

[0064] During specific implementation, the stepless track-changing track transmission mechanism 30 includes a housing 31, a driving motor 32, a screw module 33, and at least one group of translation blocks 34. Each group of translation blocks 34 is provided with a transmission block 35. The driving motor 32 and the screw module 33 are provided in the housing 31. The driving motor drives the screw module 33 to rotate through a synchronous belt 36 and a synchronous wheel 37. The translation block 34 is threadedly connected to the screw of the screw module 33. A guide notch groove 311 is provided on the upper surface of the housing 31 corresponding to the upper area of ​​the translation block 34. The upper part of the translation block 34 is fixedly connected to the transmission block 35. The transmission block 35 is exposed on the upper surface of the housing. The transmission block 35 is used to drive the corresponding track channel support 5 of the frame mechanism to move linearly.

[0065] The bottom of the housing 31 is provided with a track groove 312 and a docking hole 313. The bottom of the translation block 34 is embedded in the track groove 312 to ensure the linear movement of the translation block 34. The docking hole 313 is used to quickly and reliably connect with the top of the lifting transmission seat 113.

[0066] In a specific embodiment, two groups of translation blocks 34 are provided, and the two groups of translation blocks 34 are arranged at intervals to ensure that the corresponding track channel support 5 within the surface area of ​​the lower adjustment window 1 can be moved without moving a large stroke.

[0067] During specific implementation, the cleaning interactive high and low plate sealing mechanism 40 includes a lifting base 41 and an upper large plate 42. The upper surface of the upper large plate 42 is provided with an upwardly convex first sealing ring 43 and a second sealing ring 44. The second sealing ring 44 is located on the periphery of the first sealing ring 43. The surface area of ​​the first sealing ring 43 covers the surface area of ​​the lower adjustment window 1 of the high plate 50 or the low plate 80 in the middle position. The second sealing ring 44 is tightly attached to the bottom surface of the lower plate 3 of the high plate 50 or the low plate 80 in a sealed state to ensure the sealing of the lower adjustment window 1 of the high plate 50 or the low plate 80. The bottom of the lifting base 41 is used to fix the top of the lifting transmission seat 113.

[0068] The working principle of the specific embodiment is as follows:

[0069] Step a, cleaning: When the interactive high-plate track mechanism is transferred from the first section to the second section (from the left station to the middle station), the lifting transmission mechanism sends the frame product (lead frame and integrated circuit chip) into the plasma cleaning reaction chamber to perform plasma cleaning on the product;

[0070] Step b, cleaning: When the interactive high-plate track mechanism is transferred from the second stage to the third stage (from the middle station to the right station), it is cleaned again, or not cleaned, and then discharged through the right station, and the product frame returns to the product (lead frame and integrated circuit chip) material box again;

[0071] Or in step c, after the cleaning of the corresponding position of the middle station, when the cleaning interactive high-plate track mechanism is transferred from the second stage to the first stage (from the middle station to the left station), the plasma cleaning equipment completes the cleaning, and the left port of the plasma cleaning equipment is unloaded, and the product frame returns to the product (lead frame and integrated circuit chip) material box again;

[0072] When cleaning the interactive low-disk track mechanism, the same as steps a and c or steps a and b;

[0073] When the cleaning interactive high-plate track mechanism or the cleaning interactive low-plate track mechanism is in the first section (left station) of the interactive three-section fully automatic intelligent stepless track change system of the Plasma cleaning equipment, the lifting and receiving mechanism is completed by the lifting transmission mechanism, and the stepless track change automatic adjustment of the track is completed by the stepless track change track transmission mechanism;

[0074] The stepless track-changing track transmission mechanism is combined with the cleaning interactive high-plate track mechanism and the cleaning interactive low-plate track mechanism through the jacking transmission mechanism, and then the stepless track-changing track transmission mechanism drives the transmission block to move, so that the transmission block penetrates the lower adjustment window to drive the track channel support to make precise position adjustment, so as to achieve the purpose of adjusting the size to meet the placement of frame products of different types and sizes;

[0075] When the plasma cleaning equipment performs plasma cleaning (a surface treatment) on the product, a completely enclosed vacuum state (achieved by a vacuum pump) is required. Therefore, the lower adjustment window at the bottom of the cleaning interactive high-plate track mechanism or the cleaning interactive low-plate track mechanism needs to be sealed. The lifting transmission mechanism drives the upper top of the cleaning interactive high-low plate sealing mechanism to fit the position area of ​​the lower adjustment window of the lower plate, and lifts the high plate or bottom plate to the cleaning area, thereby completing the plasma cleaning.

[0076] The beneficial effects are as follows: since the rail system in the present invention can be automatically adjusted according to any product type required by the user, it has excellent compatibility and is not limited by the type and quantity of frame products (lead frames and integrated circuit chips) within the adjustable range;

[0077] The present invention adds two integrated track channels on the basis of the original four-track channel of the equipment, which makes the whole equipment upgraded from the original four-track channel to six-track channel, and increases the UPH of the whole equipment by 50% of the original, greatly enhancing the production capacity of the equipment;

[0078] On the basis of the original two ends, the present invention optimizes the design of the three-stage running positions of the left, middle and right positions, so that the equipment can pick up and place products at any end of the equipment, and the loading and unloading process of the equipment is no longer restricted, and the loading and unloading areas on both sides can simultaneously meet the loading and unloading of different types of product carriers and material boxes;

[0079] The invention has low cost, is easy to install and adjust, has strong applicability of modular software and hardware, and the entire system runs safely and reliably.

[0080] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0081] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An interactive three-stage stepless track change system for plasma cleaning equipment, characterized in that: It includes: The cleaning interactive high-plate track mechanism includes a high-plate and a group of high-plate station switching mechanisms. The cleaning interactive high-plate track mechanism is installed in the Plasma cleaning equipment. The high-plate station switching mechanism drives the high-plate to move along the left station, the middle station, and the right station. The bottom of the high-plate station switching mechanism is fixed on the machine's main fixed large plate. The high-plate is arranged with a plurality of groups of fixed first guide rails and adjustable second guide rails. The width between each group of first guide rails and second guide rails is used to place frame products. The positions of all first guide rails are fixed. All second guide rails form an integrated structure through the first frame mechanism. The lower adjustment window of the high-plate makes the first frame mechanism exposed. The cleaning interactive low-plate track mechanism includes a low-plate and a group of low-plate station switching mechanisms. The cleaning interactive low-plate track mechanism is installed in the Plasma cleaning equipment. The low-plate station switching mechanism drives the low-plate to move along the left station, the middle station and the right station for operation. The bottom of the low-plate station switching mechanism is fixed on the main fixed plate of the machine. Several groups of fixed third guide rails and adjustable fourth guide rails are arranged on the low-plate. The width between each group of third guide rails and fourth guide rails is used to place frame products. The positions of all third guide rails are fixed. All fourth guide rails form an integrated structure through the second frame mechanism. The lower adjustment window of the low-plate makes the second frame mechanism exposed. The stepless track-changing track transmission mechanism is used to drive the first frame mechanism corresponding to the second guide rail on the high plate or the second frame mechanism corresponding to the fourth guide rail on the low plate to move; At least one cleaning interactive high and low plate sealing mechanism, which is used to cover the lower adjustment window of the high plate or the low plate to complete the lower sealing; and at least two lifting transmission mechanisms; The stepless track-changing track transmission mechanism is supported at the top output end of the jacking transmission mechanism, and the cleaning interactive high and low plate sealing mechanism is supported at the top output end of the independent jacking transmission mechanism; The three stations include at least one loading and unloading station and one cleaning station. The position corresponding to the loading and unloading station is provided with the stepless track transmission mechanism, and the cleaning interactive high and low plate sealing mechanism is provided directly below the cleaning station. The height of the high plate is higher than that of the low plate, and both the high plate and the low plate are used to receive frame products of corresponding width; The high plate station switching mechanism comprises two outer profile columns, two outer support plates at two sides, a first electric execution module, a first motor, and a first linear guide rail. The high plate comprises a high plate body, first pads at two sides, and a plurality of guide rail combinations. Each pair of guide rail combinations comprises a fixed first guide rail and an adjustable second guide rail. The convex parts at two sides of the high plate body are respectively pressed on the first pads. The output end of the first electric execution module is fixedly connected to one of the first pads, and the other first pad is embedded and connected to the first linear guide rail. The two ends of the high plate body in the width direction are respectively provided with downward convex first guide light axes and first linear bearings inserted on the first pads. The low-plate station switching mechanism comprises two inner profile columns, inner support plates on both sides, a second electric execution module, a second motor, and a second linear guide rail. The low-plate comprises a low-plate body, second pads on both sides, and a plurality of pairs of guide rail assemblies. Each pair of guide rail assemblies comprises a fixed third guide rail and an adjustable fourth guide rail. Both sides of the low-plate body are press-fitted on the second pads respectively. The output end of the second electric execution module is fixedly connected to one of the second pads, and the other second pad is embedded and connected to the second linear guide rail. Both ends of the low-plate body in the width direction are respectively provided with a downwardly convex second guide optical axis and a second linear bearing inserted on the second pad. The high tray body includes a corresponding upper plate, a lower plate, and an outer frame, and the low tray body includes a corresponding upper plate, a lower plate, and an outer frame. The difference between the high tray body and the low tray body is that the high tray body has an outwardly convex side convex portion, the first guide rail and the third guide rail are the same guide rail, the second guide rail and the fourth guide rail are the same guide rail, and the first frame mechanism and the second frame mechanism are the same frame mechanism; the upper plate and the lower plate of the high tray body and the low tray body are surrounded by outer frames, and the cavity formed by the outer frames is provided with a frame mechanism, and the frame mechanism includes a number corresponding to the second guide rail or the fourth guide rail. The same track channel support, both sides of all track channel supports are connected by a track-changing movable bracket to form a frame mechanism, the lower plate is fixedly provided with a track-changing movable friction light sheet corresponding to the outer side of the track-changing movable bracket, and a plurality of track-changing movable adjustment pressure accessories are arranged at intervals in the length direction of the track-changing movable bracket, and the track-changing movable adjustment pressure accessories are arranged to move along the track-changing movable friction light sheet and will not move when the pressure is not received, and the upper plate is provided with a plurality of groups of waist-shaped holes, and the second guide rail or the fourth guide rail is fixedly connected to the track channel support after passing through the waist-shaped holes through fasteners, and the waist-shaped holes are arranged parallel to the width direction of the disk body; The lower adjustment window is provided at the bottom center of the lower plate; The stepless track-changing track transmission mechanism comprises a housing, a driving motor, a screw module, and at least one group of translation blocks, each group of translation blocks is provided with a transmission block, the housing is provided with a driving motor and a screw module, the driving motor drives the screw module to rotate, the translation block is threadedly connected to the screw module, the upper surface of the housing is provided with a guide notch groove corresponding to the upper area of ​​the translation block, the upper part of the translation block is fixedly connected to the transmission block, the transmission block is exposed on the upper surface of the housing, and the transmission block is used to drive the corresponding track channel support of the frame mechanism to move linearly; The stepless track-changing track transmission mechanism is combined with the cleaning interactive high-disk track mechanism and the cleaning interactive low-disk track mechanism through the jacking transmission mechanism, and then the stepless track-changing track transmission mechanism drives the transmission block to move, so that the transmission block passes through the lower adjustment window and drives the track channel support to make precise position adjustment, so as to achieve the purpose of adjusting the size to meet the placement of frame products of different types and sizes.

2. The interactive three-stage stepless track change system for plasma cleaning equipment according to claim 1, characterized in that: The track-changing movable regulating pressure accessory comprises a track-changing movable regulator and a track-changing movable pressure plate.

3. The interactive three-stage stepless track change system for plasma cleaning equipment according to claim 1, characterized in that: The lifting transmission mechanism includes a lifting motor, a lifting screw module, a lifting transmission seat, and a lifting seat. A fixed connecting plate is integrated on the lifting seat. The connecting plate is used to fix the machine's main fixed plate of the Plasma cleaning equipment. The output shaft of the lifting motor is connected to the input end of the lifting screw module. The linear output end of the lifting screw module is connected to the lifting transmission seat. The top of the lifting transmission seat protrudes from the corresponding workstation notch of the machine's main fixed plate. The top of the lifting transmission seat is fixedly connected to the stepless track transmission mechanism or the cleaning interactive high and low plate sealing mechanism. The lifting seat is fixedly provided with a lifting motor and a lifting screw module.

4. The interactive three-stage stepless track change system for plasma cleaning equipment according to claim 1, characterized in that: The cleaning interactive high and low plate sealing mechanism includes a lifting base and an upper large plate. The upper surface of the upper large plate is provided with an upwardly convex first sealing ring and a second sealing ring. The second sealing ring is located on the periphery of the first sealing ring. The surface area of ​​the first sealing ring covers the lower adjustment window surface area of ​​the high plate or the low plate in the middle position. The second sealing ring is tightly attached to the bottom surface of the lower plate of the high plate or the low plate in a sealed state.

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