Yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying and preparation method thereof

Abstract

The present invention belongs to the technical field of yttrium oxyfluoride powder and its preparation, and specifically relates to a yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying and a preparation method thereof. The preparation method of the yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying comprises the following steps: precipitation reaction: dripping ammonia water into the yttrium ion solution for reaction, dripping the fluorine source solution while stirring, then adding a dispersant, continuing the reaction, and precipitating; aging at 70-80°C; dehydration and calcination, cooling to obtain powder; grinding the obtained powder, requiring D10: 0.2-0.5μm, D50: 1-1.5μm, D90: 2.5-2.8μm, D100: <3.2μm, adding a granulation shape regulator for spray granulation, and obtaining yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying. The present invention provides a preparation method of yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying, and the prepared yttrium oxyfluoride powder is uniformly dispersed and has high purity.

Description

Technical Field

[0001] The invention belongs to the technical field of yttrium oxyfluoride powder and preparation thereof, and specifically relates to yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying and a preparation method thereof. Background Art

[0002] In semiconductor manufacturing and display technology, the high temperature and corrosive environment generated by the plasma process place extremely high demands on the materials of the equipment. Yttrium oxyfluoride (YOF) has become an ideal material in these fields due to its unique corrosion resistance and high temperature stability. The existing method for preparing yttrium oxyfluoride powder generally involves introducing hydrogen fluoride into the yttrium source, adding a precipitant for fluorination, and then preparing an yttrium oxyfluoride precursor under acidic conditions, which is then washed and calcined at 600-1200°C. However, the yttrium oxyfluoride prepared by the current preparation method has problems such as uneven particle distribution, severe agglomeration, and poor coating adhesion.

[0003] CN112357945A discloses a method for preparing high-purity yttrium fluoride oxide, which includes adding oxalic acid as a precipitant to a reaction container containing yttrium liquid, and then adding HF solution to completely precipitate the rare earth; after aging, filtering and washing with deionized water until the pH is 6-8; drying, burning, heating, and heat preservation to obtain yttrium fluoride oxide. The prepared yttrium fluoride oxide has an absolute purity of more than 99.998%, and has certain characteristic morphology (small and uniform particles, dispersed without agglomeration), and is used in luminescence, permanent magnetism, catalysis, and polishing materials. However, the oxalic acid and hydrofluoric acid used are expensive, corrosive and toxic, and are harmful to the environment and health.

[0004] CN114890449A discloses a method for preparing a submicron spherical yttrium fluoride powder, wherein a soluble salt solution of yttrium is mixed with a precipitant urea for reaction, the reaction is terminated by cooling, centrifugation, washing, and drying to obtain a precursor powder, the precursor powder is mixed with a soluble salt solution of yttrium and ammonium fluoride for fluorination reaction, centrifugation, washing, and drying to obtain a fluorinated precursor. Roasting and cooling to obtain a submicron spherical yttrium fluoride powder. The obtained yttrium fluoride powder has uniform particle size distribution, few surface defects, and good morphology. The process is mainly divided into three steps, and the yttrium precursor powder must be prepared first, and then the fluorination reaction is continued with yttrium salt and fluoriding agent, and finally roasting. Not only is the process complicated, but the uniformity of the yttrium fluoride powder is also limited, and the purity is low. Summary of the invention

[0005] The technical problem to be solved by the present invention is to overcome the above-mentioned defects of the prior art and provide a method for preparing yttrium fluoride oxide powder for plasma corrosion-resistant thermal spraying. The prepared yttrium fluoride oxide powder is evenly dispersed and has improved morphology.

[0006] The method for preparing yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying of the present invention comprises the following steps:

[0007] (1) Precipitation reaction: Add ammonia water to the yttrium ion solution, react at 50-60°C for 0.3-1h, add fluorine source solution while stirring, then add dispersant, continue to react for 1-1.5h, and precipitation is completed;

[0008] (2) Aging: After stirring, transfer into a reactor and age at 70-80°C for 8-10 hours;

[0009] (3) Dehydration and calcination: The aged precipitate is washed, centrifuged for dehydration, calcined at 600-650°C for 6-7h in a vacuum or inert atmosphere, and cooled to obtain a powder;

[0010] (4) Granulation: Grind the powder obtained in step (3) to the required values ​​of D10: 0.2-0.5 μm, D50: 1-1.5 μm, D90: 2.5-2.8 μm, and D100: <3.2 μm, add a granulation shape regulator and perform spray granulation to obtain yttrium fluoride oxide powder for plasma corrosion-resistant thermal spraying.

[0011] The yttrium ion solution is prepared by dissolving yttrium salt crystals in deionized water to obtain a 0.8-1.2 mol / L yttrium ion solution; the yttrium salt is one of yttrium acetate, yttrium ethoxide, yttrium propoxide and yttrium isopropoxide.

[0012] The fluorine source solution is prepared by dissolving a fluorine source in deionized water to obtain a 1.8-2.2 mol / L fluorine source solution; the fluorine source is one of trifluoroacetic acid and ammonium fluoride or a mixture of the two.

[0013] The dispersant is one or a mixture of polyvinyl alcohol, polymethyl pyrrolidone, polyacrylic acid, sodium polyacrylate and sodium hexametaphosphate.

[0014] The granulation shape regulator is one of polyacrylamide and carboxymethyl cellulose, and the added amount is 0.001% to 0.012% of the weight of the powder.

[0015] In step (1), the yttrium ions and the fluoride ions in the fluoride source solution are added in a molar ratio of 1:1.

[0016] In step (1), the molar ratio of ammonia water to yttrium ions is 7-8:1.

[0017] The speed of adding ammonia water in step (1) is 50-60 mL / min.

[0018] The process parameters of the spray granulation in step (4) are: the inlet temperature of the spray granulator is 220-240°C, the outlet temperature is 120-140°C, the atomizer speed is 17000-19000r / min, the granulation particle size is 10-60μm, and the bulk density is 1.5-2.0g / cm 3 Powder, fluidity 15-20s / 50g.

[0019] The invention discloses yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying, which is prepared by the preparation method of yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying.

[0020] Specifically, the method for preparing yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying comprises the following steps:

[0021] (1) Precipitation reaction: Dissolve yttrium salt (yttrium acetate, yttrium ethoxide, yttrium propoxide, yttrium isopropoxide) crystals in deionized water to obtain a 0.8-1.2 mol / L yttrium ion solution; add ammonia water to the yttrium ion solution at a rate of 50-60 mL / min (the purpose of adding ammonia water is to generate yttrium hydroxide and maintain pH 7-8), react at 50-60° C. for 0.3-1 h, add fluorine source solution while stirring, and then add dispersant (polyvinyl alcohol, polymethyl pyrrolidone, polyacrylic acid, sodium polyacrylate, sodium hexametaphosphate), continue to react for 1-1.5 h, and precipitation is completed; the amount of yttrium ion and fluoride ion added is added according to the molar ratio of 1:1; the molar ratio of ammonia water to yttrium ion is 7-8:1;

[0022] The fluoride source solution is prepared by dissolving a fluoride source (trifluoroacetic acid and / or ammonium fluoride) in deionized water to obtain a 1.8-2.2 mol / L fluoride source solution.

[0023] (2) Aging: After stirring, transfer into a reactor and age at 70-80°C for 8-10 hours;

[0024] (3) Dehydration and calcination: The aged precipitate is washed, centrifuged and dehydrated, calcined at 600-650°C for 6-7h in a vacuum or inert atmosphere, and cooled to obtain a powder;

[0025] (4) Granulation: Grind the powder obtained in step (3) to the required D10: 0.2-0.5 μm, D50: 1-1.5 μm, D90: 2.5-2.8 μm, D100: <3.2 μm, add granulation shape regulator (polyacrylamide, carboxymethyl cellulose) and spray granulate; the inlet temperature of the spray granulator is 220-240°C, the outlet temperature is 120-140°C, the atomizer speed is 17000-19000 r / min, the granulation particle size is 10-60 μm, and the bulk density is 1.5-2.0 g / cm 3 Powder, fluidity 15-20s / 50g.

[0026] The present invention aims to provide an efficient preparation process to improve the fluidity and particle size control of yttrium oxyfluoride powder, making it more suitable for plasma spraying process. The yttrium oxyfluoride powder in the present invention is suitable for plasma spraying process in semiconductor manufacturing and display technology, has high corrosion resistance and high temperature stability, and can effectively improve the service life and performance of the coating.

[0027] The present invention improves the particle morphology and dispersibility of yttrium oxyfluoride powder by carrying out precipitation reaction between yttrium salt and fluorine source solution and using a dispersing aid. After precipitation, the yttrium oxyfluoride powder is crystallized more completely through an aging process, thereby enhancing its high temperature resistance and corrosion resistance. The dehydration and calcination steps are carried out in a vacuum or inert atmosphere environment, thereby effectively avoiding oxidation or side reactions of the powder at high temperature, thereby improving the purity and structural stability of the powder. In the granulation process, the particle size is controlled by a spray granulation process, so that the powder particle size meets the requirements of plasma spraying, thereby ensuring the fluidity and coating quality during the spraying process.

[0028] Compared with the prior art, the present invention has the following beneficial effects:

[0029] (1) The yttrium fluoride oxide powder for plasma corrosion-resistant thermal spraying prepared by the method of the present invention has uniform particle distribution, no agglomeration phenomenon, and strong coating adhesion.

[0030] (2) The method for preparing yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying of the present invention prepares yttrium oxyfluoride powder with good fluidity and uniform particle size distribution by optimizing reaction conditions, granulation process and calcination process.

[0031] (3) The yttrium fluoride oxide powder for plasma corrosion-resistant thermal spraying prepared by the method of the present invention has high corrosion resistance and high temperature stability, and can effectively improve the service life and performance of the coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 These are SEM scanning electron microscope images of yttrium fluoride oxide powders of 200 μm, 100 μm, 50 μm, 20 μm, 10 μm, 5 μm, 2 μm, and 1 μm for plasma corrosion-resistant thermal spraying prepared in Example 1.

[0033] Figure 2 These are SEM scanning electron microscope images of yttrium fluoride oxide powders of 200 μm, 100 μm, 50 μm, 20 μm, 10 μm, 5 μm, 2 μm, and 1 μm for plasma corrosion-resistant thermal spraying prepared in Example 2.

[0034] Figure 3 This is the XRD analysis diagram of the yttrium oxyfluoride powder prepared in Example 1.

[0035] Figure 4 This is the XRD analysis diagram of the yttrium oxyfluoride powder prepared in Example 2. DETAILED DESCRIPTION

[0036] The present invention will be further described below in conjunction with specific embodiments.

[0037] Example 1

[0038] The method for preparing the yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying comprises the following steps:

[0039] (1) Precipitation reaction: Dissolve yttrium acetate crystals in deionized water to obtain a 1.0 mol / L yttrium ion solution; add ammonia water to the yttrium ion solution at 55 mL / min, react at 55° C. for 0.5 h, add fluorine source solution while stirring, then add polyvinyl alcohol, keep warm and continue to react for 1.0 h, and precipitation is completed; the amount of yttrium ion and fluoride ion added is added according to the molar ratio of 1:1; the molar ratio of ammonia water to yttrium ion is 7:1;

[0040] The fluorine source solution is prepared by dissolving trifluoroacetic acid in deionized water to obtain a 2.0 mol / L fluorine source solution;

[0041] (2) Aging: After precipitation is completed, continue stirring for 3 hours, transfer to a reactor and age at 75°C for 9 hours;

[0042] (3) Dehydration and calcination: The aged precipitate is washed, deionized and anhydrous ethanol is added, and the mixture is fully washed and filtered three times. The rotation speed is controlled at 8000 r / min for centrifugal dehydration to finally obtain a precipitate with a solid content of more than 20%. The precipitate is placed in a muffle furnace, calcined at 630°C in vacuum for 6.5 h, and cooled to obtain a powder.

[0043] (4) Granulation: Grind the powder obtained in step (3) to a value of D10 of 0.2-0.5 μm, D50 of 1-1.5 μm, D90 of 2.5-2.8 μm, and D100 of <3.2 μm; add 0.01% polyacrylamide based on the weight of the powder, and spray granulate the powder; the inlet temperature of the spray granulator is 230° C., the outlet temperature is 130° C., the atomizer speed is 18000 r / min, and the granulation particle size is 10-60 μm to obtain yttrium fluoride oxide powder for plasma corrosion-resistant thermal spraying. After XRD detection and quantitative analysis, Y7O6F9 accounts for 36% and YOF accounts for 64%; the bulk density is 1.6 g / cm 3 The powder has a fluidity of 18s / 50g during spraying.

[0044] The SEM scanning electron microscope images of the yttrium fluoride oxide powder for plasma corrosion resistant thermal spraying prepared in this embodiment with a size of 200 μm, 100 μm, 50 μm, 20 μm, 10 μm, 5 μm, 2 μm, and 1 μm are as follows: Figure 1As shown. Figure 1 It can be seen that the particles are evenly distributed and there is no agglomeration. The XRD analysis diagram of the yttrium oxyfluoride powder prepared in this embodiment is as follows: Figure 3 As shown in (a), Figure 3 (b) is a separation diagram of the detection diagram and the standard diagram; the XRD diagram with reference code 01-070-0867 is the reference standard diagram of Y7O6F9, and the XRD diagram with reference code 010-071-2100 is the reference standard diagram of YOF.

[0045] Example 2

[0046] The method for preparing the yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying comprises the following steps:

[0047] (1) Precipitation reaction: Dissolve yttrium isopropoxide crystals in deionized water to obtain a 0.8 mol / L yttrium ion solution; add ammonia water to the yttrium ion solution at 50 mL / min, react at 50°C for 1 hour, add fluorine source solution while stirring, then add polymethylpyrrolidone, continue to react for 1 hour, and precipitation is completed; the amount of yttrium ions and fluoride ions added is added according to a molar ratio of 1:1; the molar ratio of ammonia water to yttrium ions is 8:1;

[0048] The fluoride source solution is prepared by dissolving ammonium fluoride in deionized water to obtain a 1.8 mol / L fluoride source solution;

[0049] (2) Aging: After precipitation is completed, continue stirring for 3 hours, then transfer to a reactor and age at 80°C for 8 hours;

[0050] (3) Dehydration and calcination: The aged precipitate is washed, deionized and anhydrous ethanol is added to wash and filter twice, and the rotation speed is controlled to 8000r / min for centrifugal dehydration. The precipitate is calcined at 650°C for 6h in an inert atmosphere and cooled to obtain a powder.

[0051] (4) Granulation: The powder obtained in step (3) is ground to a value of D10: 0.2-0.5 μm, D50: 1-1.5 μm, D90: 2.5-2.8 μm, and D100: <3.2 μm, and 0.012% polyacrylamide by weight of the powder is added, and spray granulation is performed; the inlet temperature of the spray granulator is 220° C., the outlet temperature is 120° C., the atomizer speed is 19000 r / min, and the granulation particle size is 10-60 μm, to obtain yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying. After XRD detection and quantitative analysis, the YOF is 100% and the bulk density is 1.7 g / cm 3 The powder has a fluidity of 17s / 50g during spraying.

[0052] The SEM scanning electron microscope images of the yttrium fluoride oxide powder for plasma corrosion resistant thermal spraying prepared in this embodiment with a size of 200 μm, 100 μm, 50 μm, 20 μm, 10 μm, 5 μm, 2 μm, and 1 μm are as follows: Figure 2 As shown. Figure 2 It can be seen that the particles are evenly distributed and there is no agglomeration. The XRD analysis diagram of the yttrium oxyfluoride powder prepared in this embodiment is as follows: Figure 4 As shown in (a), Figure 4 (b) is a separation diagram of the detection diagram and the standard diagram; the XRD diagram with reference code 01-071-2100 is the reference diagram of YOF, and the XRD diagram with reference code 010-071-2100 is the reference standard diagram of YOF.

[0053] Example 3

[0054] The method for preparing the yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying comprises the following steps:

[0055] (1) Precipitation reaction: Dissolve yttrium acetate crystals in deionized water to obtain a 1.2 mol / L yttrium ion solution; add ammonia water to the yttrium ion solution at 60 mL / min, react at 60°C for 0.3 h, add fluorine source solution while stirring, then add polyacrylic acid, continue to react for 1.5 h, and precipitation is completed; the amount of yttrium ions and fluoride ions added is added according to a molar ratio of 1:1; the molar ratio of ammonia water to yttrium ions is 7:1;

[0056] The fluoride source solution is prepared by dissolving ammonium fluoride in deionized water to obtain a 2.2 mol / L fluoride source solution.

[0057] (2) Aging: After precipitation is completed, continue stirring for 3 hours, transfer to a reactor and age at 80°C for 8 hours;

[0058] (3) Dehydration and calcination: The aged precipitate was washed, and deionized and anhydrous ethanol was added to wash and filter for three times. The precipitate was centrifuged at a speed of 8000 r / min for dehydration. The precipitate was calcined at 650°C in a vacuum for 6 h, and cooled to obtain a powder.

[0059] (4) Granulation: The powder obtained in step (3) is ground to a value of D10: 0.2-0.5 μm, D50: 1-1.5 μm, D90: 2.5-2.8 μm, and D100: <3.2 μm, and 0.01% hydroxypropyl methylcellulose by weight of the powder is added, and spray granulation is performed; the inlet temperature of the spray granulator is 240° C., the outlet temperature is 140° C., the atomizer speed is 17000 r / min, and the granulation particle size is 10-60 μm, to obtain yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying, and the bulk density is 1.6 g / cm after quantitative analysis by XRD detection. 3The powder has a fluidity of 18s / 50g during spraying.

[0060] Example 4

[0061] The method for preparing the yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying comprises the following steps:

[0062] (1) Precipitation reaction: Dissolve yttrium acetate crystals in deionized water to obtain a 0.8-1.2 mol / L yttrium ion solution; add ammonia water to the yttrium ion solution at 55 mL / min, react at 55° C. for 0.5 h, add fluorine source solution while stirring, then add dispersants polyvinyl alcohol, sodium polyacrylate, and sodium hexametaphosphate, and continue to react for 1.5 h until precipitation is completed; the amount of yttrium ions and fluoride ions added is in a molar ratio of 1:1; the molar ratio of ammonia water to yttrium ions is 8:1;

[0063] The fluorine source solution is prepared by dissolving trifluoroacetic acid in deionized water to obtain a 2.0 mol / L fluorine source solution.

[0064] (2) Aging: After precipitation is completed, continue stirring for 3 hours, transfer to a reactor and age at 80°C for 8 hours;

[0065] (3) Dehydration and calcination: The aged precipitate was washed, and deionized and anhydrous ethanol was added to wash and filter for three times. The rotation speed was controlled to be 8000 r / min for centrifugal dehydration. The precipitate was calcined at 650 °C for 6 h in an inert atmosphere and cooled to obtain a powder.

[0066] (4) Granulation: The powder obtained in step (3) is ground to a value of D10: 0.2-0.5 μm, D50: 1-1.5 μm, D90: 2.5-2.8 μm, and D100: <3.2 μm, and 0.001% hydroxypropyl methylcellulose by weight of the powder is added, and spray granulation is performed; the inlet temperature of the spray granulator is 230° C., the outlet temperature is 130° C., the atomizer speed is 19000 r / min, and the granulation particle size is 10-60 μm, to obtain yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying, and the bulk density is 1.9 g / cm after XRD quantitative analysis. 3 The powder has a fluidity of 20s / 50g during spraying.

[0067] Comparative Example 1

[0068] This comparative example is the same as Example 1, except that "reacting at 55°C for 0.5h" in step (1) is replaced by "reacting at 70°C for 0.3h", and the other preparations are the same. The obtained yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying has a bulk density of 1.8 g / cm 3 The powder has a fluidity of 22s / 50g during spraying.

[0069] Comparative Example 2

[0070] This comparative example is the same as Example 1, except that the polyacrylamide in step (4) is removed, and the other preparations are the same. The obtained yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying has a bulk density of 1.6 g / cm 3 The powder has a fluidity of 26s / 50g during spraying.

[0071] Comparative Example 3

[0072] This comparative example is the same as Example 1, except that the aging step in step (2) is removed, and the other preparations are the same. The obtained yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying has a bulk density of 1.1 g / cm 3 The powder has a fluidity of 12s / 50g during spraying.

[0073] The yttrium fluoride oxide powder prepared in the above embodiment and comparative example was coated on an aluminum alloy with a thickness of 200±20μm. The plasma gases Ar and He were sent to the plasma gun through piping using a gas system. The flow rate was Ar: 110SCFH±0.5%, He: 60SCFH±0.5%; the current passed into the plasma gun was 450A, the voltage was 40V, the powder feeding rate was 16g / min, the powder particle size was 15-45μm, the spraying distance was 115mm from the plasma gun outlet to the workpiece surface, the spraying speed was 500mm / s, and multi-layer spraying was performed until the set thickness was reached. The coating was analyzed and tested, and the test results are shown in Table 1.

[0074] Table 1 Test results

[0075]

[0076] It can be seen from Table 1 above that after the yttrium oxyfluoride powder prepared by the present invention is sprayed, the fluidity and particle size control of the yttrium oxyfluoride powder are improved, making it more suitable for plasma spraying process, having high corrosion resistance and high temperature stability, and can effectively improve the service life and performance of the coating.

Claims

1. A method for preparing yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying, characterized in that: The following steps are involved: (1) Precipitation reaction: Add ammonia water to the yttrium ion solution, maintain pH 7-8, react at 50-60°C for 0.3-1h, add fluorine source solution while stirring, then add dispersant, continue to react for 1-1.5h, and precipitation is completed; The yttrium ion solution is prepared by dissolving yttrium salt crystals in deionized water to obtain a 0.8-1.2 mol / L yttrium ion solution; the yttrium salt is one of yttrium acetate, yttrium ethoxide, yttrium propoxide, and yttrium isopropoxide; The fluorine source solution is prepared by dissolving a fluorine source in deionized water to obtain a 1.8-2.2 mol / L fluorine source solution; the fluorine source is one of trifluoroacetic acid and ammonium fluoride or a mixture of the two; (2) Aging: After stirring, transfer into a reactor and age at 70-80°C for 8-10 hours; (3) Dehydration and calcination: The aged precipitate is washed, centrifuged for dehydration, calcined at 600-650°C for 6-7h in a vacuum or inert atmosphere, and cooled to obtain a powder; (4) Granulation: Grind the powder obtained in step (3) to the required values ​​of D10: 0.2-0.5 μm, D50: 1-1.5 μm, D90: 2.5-2.8 μm, and D100: <3.2 μm, add a granulation shape regulator and spray granulate to obtain yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying; the granulation shape regulator is one of polyacrylamide and carboxymethyl cellulose, and the added amount is 0.001% to 0.012% of the weight of the powder.

2. The method for preparing yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying according to claim 1, characterized in that: The dispersant is one or a mixture of polyvinyl alcohol, polymethyl pyrrolidone, polyacrylic acid, sodium polyacrylate and sodium hexametaphosphate.

3. The method for preparing yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying according to claim 1, characterized in that: In step (1), the yttrium ions and the fluoride ions in the fluoride source solution are added in a molar ratio of 1:

1.

4. The method for preparing yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying according to claim 1, characterized in that: In step (1), the molar ratio of ammonia water to yttrium ions is 7-8:

1.

5. The method for preparing yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying according to claim 1, characterized in that: The speed of adding ammonia water in step (1) is 50-60 mL / min.

6. The method for preparing yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying according to claim 1, characterized in that: The process parameters of the spray granulation in step (4) are: the inlet temperature of the spray granulator is 220-240°C, the outlet temperature is 120-140°C, the atomizer speed is 17000-19000r / min, the granulation particle size is 10-60μm, and the bulk density is 1.5-2.0g / cm 3 Powder, fluidity 15-20s / 50g.

7. A yttrium oxyfluoride powder for plasma corrosion resistant thermal spraying, characterized in that: The powder is prepared by the method for preparing yttrium oxyfluoride powder for plasma corrosion-resistant thermal spraying as described in any one of claims 1 to 6.

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