Exhaust check valve structure of CVD furnace

Abstract

The invention relates to the technical field of silicon carbide furnaces. An exhaust check valve structure of a CVD furnace comprises a check valve base body, and the check valve base body comprises a valve seat, a valve opening and closing executing mechanism and a sliding flange. The valve seat is detachably connected with the sliding flange; the valve seat is provided with an air inlet and an air outlet which are perpendicular to each other. The valve opening and closing executing mechanism is used for switching connection and disconnection of the air inlet and the air outlet and comprises a valve, a sliding shaft, a spring, a spring shaft and a spring sleeve. A left-right through mounting pipe is fixed on the sliding flange, a sliding shaft, a spring and a spring shaft are axially mounted in the mounting pipe, a right end opening of the mounting pipe is in threaded connection with a spring sleeve, and the spring sleeve is in threaded connection with the spring shaft; the left end of the sliding shaft is connected with a valve used for blocking the air inlet, and a first sealing ring is installed on the side, making contact with the valve seat, of the valve. By means of the valve opening and closing executing mechanism, exhausting of the inner cavity of the CVD furnace is achieved.

Description

Technical Field

[0001] The invention relates to the field of silicon carbide furnaces, and in particular to an exhaust check valve. Background Art

[0002] After the coating is finished and the cooling is completed, the CVD furnace needs to be exhausted, and the exhaust gas pressure is about 1-2 atmospheres. At present, there is an urgent need for a valve that can open when the gas pressure in the CVD furnace cavity pipeline is greater than or equal to 1 atmosphere, and can automatically exhaust, and the valve is closed when it is less than 1 atmosphere, and the external gas cannot reversely enter the CVD furnace cavity pipeline. Summary of the invention

[0003] In view of the problems existing in the prior art, the present invention provides an exhaust check valve structure for a CVD furnace, which solves at least one of the above technical problems.

[0004] The technical solution of the present invention is: an exhaust check valve structure of a CVD furnace, comprising a check valve base, characterized in that the check valve base comprises a valve seat, a valve opening and closing actuator and a sliding flange;

[0005] The valve seat is detachably connected to the sliding flange;

[0006] The valve seat is provided with an air inlet and an air outlet which are arranged perpendicular to each other;

[0007] The valve opening and closing actuator is used to switch the inlet and the exhaust port on and off, and the valve opening and closing actuator includes a valve, a sliding shaft, a spring, a spring shaft and a spring sleeve;

[0008] A left-right conductive mounting tube is fixed on the sliding flange, the sliding shaft, the spring and the spring shaft are axially mounted in the mounting tube, the right end opening of the mounting tube is threadedly connected with the spring sleeve, and the spring sleeve is threadedly connected with the spring shaft;

[0009] The left end of the sliding shaft is connected to the valve, the valve is used to block the air inlet, and a first sealing ring is installed on the side of the valve used to contact the valve seat.

[0010] The invention realizes exhaust of the inner cavity of the CVD furnace through the valve opening and closing actuator. The threaded connection between the spring shaft and the spring sleeve facilitates the adjustment of the exhaust pressure by rotating the spring shaft.

[0011] Further preferably, a blind hole is provided on a side of the spring shaft away from the spring, and a cross section of the blind hole is a regular polygon.

[0012] Further preferably, the spring shaft is threadedly connected to a locking nut, and the locking nut abuts against the spring sleeve.

[0013] It is convenient to lock the spring shaft position.

[0014] Further preferably, a second annular groove is formed on the circumferential outer wall of the spring shaft, and the second annular groove is used to embed a second sealing ring, and the second sealing ring is located between the spring shaft and the mounting tube;

[0015] A third annular groove is formed on the axial end surface of the mounting tube. The third annular groove is used to embed a third sealing ring. The third sealing ring is located between the mounting tube and the spring sleeve.

[0016] Further preferably, the left end of the spring shaft is threadedly connected with a bolt;

[0017] The left end of the spring is sleeved on the periphery of the right end boss of the sliding shaft;

[0018] The right end of the spring is sleeved on the periphery of the left end boss of the bolt.

[0019] Further preferably, the spring shaft comprises a sliding portion and a screw portion which are sequentially arranged from left to right;

[0020] The sliding part is composed of a bolt connection part and a sealing ring installation part from left to right;

[0021] The bolt connection portion is threadedly connected to the bolt;

[0022] The sealing ring mounting portion is provided with the second annular groove;

[0023] The screw portion is threadedly connected to the spring sleeve;

[0024] The outer diameter of the sliding portion is larger than the outer diameter of the screw portion.

[0025] Further preferably, the spring sleeve is provided with a step groove for supporting the connection between the sliding portion and the screw portion.

[0026] Then realize mechanical limit.

[0027] Further preferably, a fourth sealing ring is sandwiched between the valve seat and the sliding flange;

[0028] A first annular groove for embedding a first sealing ring is provided on the left side of the valve, the axial section of the first annular groove is a trapezoid, and the notch width of the first annular groove is smaller than the groove bottom width of the first annular groove;

[0029] The inner diameter of the first annular groove decreases from left to right.

[0030] Prevent the first sealing ring from falling out.

[0031] Further preferably, when the air pressure at the air inlet is greater than or equal to 1 atmosphere, the valve overcomes the elastic force of the spring and moves to the right, so that the air inlet is connected to the exhaust port;

[0032] When the air pressure at the air inlet is less than 1 atmosphere, the valve cannot be driven to move to the right, and the valve tightly closes the air inlet.

[0033] A method for assembling an exhaust check valve structure of a CVD furnace comprises the following steps:

[0034] Step 1: Place the second sealing ring in the second annular groove of the spring shaft, place the spring shaft in the inner hole of the mounting tube from the right end, and install and tighten the bolt from the left end;

[0035] Step 2: place the third sealing ring in the third annular groove of the mounting tube, install the spring sleeve on the mounting tube and tighten it;

[0036] Insert the spring into the inner hole of the mounting tube from the left side and clamp it on the left end boss of the bolt;

[0037] Set the first sealing ring on the valve, and install the sliding shaft on the valve and tighten it;

[0038] Insert the sliding shaft into the inner hole of the mounting tube from the left side;

[0039] Step three, set the sliding flange on the valve seat, seal the fitting surfaces of the sliding flange and the valve seat through the fourth sealing ring, and finally set the locking nut on the spring shaft, and the locking nut is against the spring sleeve.

[0040] Compared with the prior art, the present invention has the following beneficial effects:

[0041] When the gas pressure in the cavity pipeline is greater than or equal to 1 atmosphere, the check valve can automatically open to discharge the waste gas. When the gas pressure in the cavity pipeline is less than 1 atmosphere, the check valve is closed, and the external gas cannot reversely enter the CVD furnace cavity pipeline through the check valve.

[0042] The structure is simple and compact, the pressure is easy to adjust, and the non-return function can be well realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Figure 1 A cross-sectional view of a specific embodiment 1 of the present invention;

[0044] Figure 2 This is a structural schematic diagram of a specific embodiment 1 of the present invention.

[0045] In the figure, 1 is a valve seat, 2 is a first sealing ring, 3 is a valve, 4 is a sliding shaft, 5 is a fourth sealing ring, 6 is a sliding flange, 7 is a spring, 8 is a spring shaft, 9 is a second sealing ring, 10 is a locking nut, 11 is a third sealing ring, 12 is a spring sleeve, and 13 is a bolt. DETAILED DESCRIPTION

[0046] See also Figure 1 to Figure 2 , Specific embodiment 1, an exhaust check valve structure of a CVD furnace, comprising a check valve base, the check valve base comprising a valve seat 1, a valve opening and closing actuator and a sliding flange 6; the valve seat 1 is detachably connected to the sliding flange 6; the valve seat 1 is provided with an air inlet and an exhaust port vertically arranged to each other; the valve opening and closing actuator is used to switch the opening and closing of the air inlet and the exhaust port, and the valve opening and closing actuator comprises a valve 3, a sliding shaft 4, a spring 7, a spring shaft 8 and a spring sleeve 12; a left-right conductive mounting pipe is fixed on the sliding flange 6, and the sliding shaft 4, the spring 7 and the spring shaft 8 are installed in the mounting pipe along the axial direction, the right end opening of the mounting pipe is threadedly connected with a spring sleeve 12, and the spring sleeve 12 is threadedly connected with the spring shaft 8; the left end of the sliding shaft 4 is connected to the valve 3, the valve 3 is used to block the air inlet, and the valve 3 is used to contact the valve seat 1 side and is provided with a first sealing ring 2. The present invention realizes the exhaust of the inner cavity of the CVD furnace through the valve opening and closing actuator. The threaded connection between the spring shaft 8 and the spring sleeve 12 facilitates the adjustment of the exhaust pressure by rotating the spring shaft 8 .

[0047] The movable flange comprises an end cover with a central opening, and the central opening of the end cover is fixedly connected to the mounting pipe. The left and right ends of the mounting pipe both extend out of the left and right ends of the end cover.

[0048] The valve is connected with a mounting sleeve extending to the right. The inner hole of the mounting sleeve is detachably connected to the sliding shaft 4. The right end surface of the mounting sleeve is used to abut against the left end surface of the mounting pipe.

[0049] The air inlet is used for detachable connection to the mounting flange of the CVD furnace.

[0050] The valve seat is provided with an air intake flange and a mounting flange arranged on the left and right, and the mounting flange is detachably connected to the movable flange by connecting bolts. The air intake flange includes a first flange plate, a vent cylinder and a radial extension portion arranged from left to right in the axial direction, the vent cylinder is fixedly connected to the inner side of the radial extension portion, the outer side of the radial extension portion is fixedly connected to the left end of the cylinder of the valve seat, and the outer side of the right end of the cylinder of the valve seat is connected to the inner side of the mounting flange.

[0051] A blind hole is provided on the side of the spring shaft 8 away from the spring 7, and the cross section of the blind hole is a regular polygon. The spring shaft 8 is threadedly connected to the locking nut 10, and the locking nut 10 is against the spring sleeve 12. It is convenient to lock the position of the spring shaft 8.

[0052] A second annular groove is provided on the circumferential outer wall of the spring shaft 8, and the second annular groove is used to embed the second sealing ring 9, and the second sealing ring 9 is located between the spring shaft 8 and the mounting tube; a third annular groove is provided on the axial end surface of the mounting tube, and the third annular groove is used to embed the third sealing ring 11, and the third sealing ring 11 is located between the mounting tube and the spring sleeve 12. The left end of the spring shaft 8 is threadedly connected with a bolt 13; the left end of the spring 7 is sleeved on the outer periphery of the right end boss of the sliding shaft 4; the right end of the spring 7 is sleeved on the outer periphery of the left end boss of the bolt 13.

[0053] The spring shaft 8 includes a sliding part and a screw part arranged from left to right in sequence; the sliding part includes a bolt 13 connection part and a sealing ring installation part in sequence from left to right; the bolt 13 connection part is threadedly connected to the bolt 13; a second annular groove is provided on the sealing ring installation part; the screw part is threadedly connected to the spring sleeve 12; the outer diameter of the sliding part is larger than the outer diameter of the screw part. The spring sleeve 12 is provided with a step groove for supporting the connection between the sliding part and the screw part. Thus, mechanical limit is realized.

[0054] A fourth sealing ring 5 is sandwiched between the valve seat 1 and the sliding flange 6; a first annular groove for embedding the first sealing ring 2 is provided on the left side of the valve 3, the axial section of the first annular groove is trapezoidal, the notch width of the first annular groove is smaller than the groove bottom width of the first annular groove; the inner diameter of the first annular groove decreases from left to right, preventing the first sealing ring 2 from falling out.

[0055] When the air pressure at the air inlet is greater than or equal to 1 atmosphere, valve 3 overcomes the elastic force of spring 7 and moves to the right, and the air inlet and exhaust port are connected; when the air pressure at the air inlet is less than 1 atmosphere, valve 3 cannot be driven to move to the right, and valve 3 tightly closes the air inlet.

[0056] A method for assembling an exhaust check valve structure of a CVD furnace comprises the following steps:

[0057] Step 1: Set the second sealing ring 9 in the second annular groove of the spring shaft 8, set the spring shaft 8 in the inner hole of the mounting tube from the right end, and install the bolt 13 from the left end and tighten it;

[0058] Step 2: Set the third sealing ring 11 in the third annular groove of the mounting tube, install the spring sleeve 12 on the mounting tube and tighten it; insert the spring 7 into the inner hole of the mounting tube from the left side, and clamp it on the left end boss of the bolt 13; set the first sealing ring 2 on the valve 3, and also install the sliding shaft 4 on the valve 3 and tighten it; put the sliding shaft 4 into the inner hole of the mounting tube from the left side;

[0059] Step three, set the sliding flange 6 on the valve seat 1, and seal the fitting surfaces between the sliding flange 6 and the valve seat 1 through the fourth sealing ring 5, and finally set the locking nut 10 on the spring shaft 8, and the locking nut 10 and the spring sleeve 12 are against each other.

[0060] The above are only preferred embodiments of the present invention. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. An exhaust check valve structure for a CVD furnace, comprising a check valve substrate, characterized in that: The check valve base includes a valve seat, a valve opening and closing actuator and a sliding flange; The valve seat is detachably connected to the sliding flange; The valve seat is provided with an air inlet and an air outlet which are arranged perpendicularly to each other; The valve opening and closing actuator is used to switch the inlet and the exhaust port on and off, and the valve opening and closing actuator includes a valve, a sliding shaft, a spring, a spring shaft and a spring sleeve; A left-right conductive mounting tube is fixed on the sliding flange, the sliding shaft, the spring and the spring shaft are axially mounted in the mounting tube, the right end opening of the mounting tube is threadedly connected with the spring sleeve, and the spring sleeve is threadedly connected with the spring shaft; The left end of the sliding shaft is connected to the valve, the valve is used to block the air inlet, and a first sealing ring is installed on the side of the valve used to contact the valve seat.

2. The exhaust check valve structure of a CVD furnace according to claim 1, characterized in that: A blind hole is arranged on one side of the spring shaft away from the spring, and the cross section of the blind hole is a regular polygon.

3. The exhaust check valve structure of a CVD furnace according to claim 1, characterized in that: The spring shaft is threadedly connected to a locking nut, and the locking nut abuts against the spring sleeve.

4. The exhaust check valve structure of a CVD furnace according to claim 3, characterized in that: A second annular groove is formed on the circumferential outer wall of the spring shaft, and the second annular groove is used to embed a second sealing ring, and the second sealing ring is located between the spring shaft and the mounting tube; A third annular groove is formed on the axial end surface of the mounting tube. The third annular groove is used to embed a third sealing ring. The third sealing ring is located between the mounting tube and the spring sleeve.

5. The exhaust check valve structure of a CVD furnace according to claim 1, characterized in that: The left end of the spring shaft is threadedly connected with a bolt; The left end of the spring is sleeved on the periphery of the right end boss of the sliding shaft; The right end of the spring is sleeved on the periphery of the left end boss of the bolt.

6. The exhaust check valve structure of a CVD furnace according to claim 4, characterized in that: The spring shaft comprises a sliding portion and a screw portion which are arranged in sequence from left to right; The sliding part is composed of a bolt connection part and a sealing ring installation part from left to right; The bolt connection portion is threadedly connected to the bolt; The sealing ring mounting portion is provided with the second annular groove; The screw portion is threadedly connected to the spring sleeve; The outer diameter of the sliding portion is larger than the outer diameter of the screw portion.

7. The exhaust check valve structure of a CVD furnace according to claim 6, characterized in that: The spring sleeve is provided with a step groove for resisting against the connection between the sliding part and the screw part.

8. The exhaust check valve structure of a CVD furnace according to claim 1, characterized in that: A fourth sealing ring is sandwiched between the valve seat and the sliding flange; A first annular groove for embedding a first sealing ring is provided on the left side of the valve, the axial section of the first annular groove is a trapezoid, and the notch width of the first annular groove is smaller than the groove bottom width of the first annular groove; The inner diameter of the first annular groove decreases from left to right.

9. The exhaust check valve structure of a CVD furnace according to claim 1, characterized in that: When the air pressure at the air inlet is greater than or equal to 1 atmosphere, the valve overcomes the elastic force of the spring and moves to the right, connecting the air inlet and the exhaust port; When the air pressure at the air inlet is less than 1 atmosphere, the valve cannot be driven to move to the right, and the valve tightly closes the air inlet.

10. The exhaust check valve structure of a CVD furnace according to claim 6, characterized in that: The assembly method comprises the following steps: Step 1: Place the second sealing ring in the second annular groove of the spring shaft, place the spring shaft in the inner hole of the mounting tube from the right end, and install and tighten the bolt from the left end; Step 2: place the third sealing ring in the third annular groove of the mounting tube, install the spring sleeve on the mounting tube and tighten it; Insert the spring into the inner hole of the mounting tube from the left side and clamp it on the left end boss of the bolt; Set the first sealing ring on the valve, and install the sliding shaft on the valve and tighten it; Insert the sliding shaft into the inner hole of the mounting tube from the left side; Step three, set the sliding flange on the valve seat, seal the fitting surfaces of the sliding flange and the valve seat through the fourth sealing ring, and finally set the locking nut on the spring shaft, and the locking nut is against the spring sleeve.

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