Grinding fluid supply device and method

Abstract

The invention discloses a grinding fluid supply device and method.The device comprises a fluid mixing barrel and a fluid supply barrel which are sequentially arranged on a grinding fluid supply pipeline, the fluid mixing barrel is arranged to axially rotate when driven, and a protruding first stirring part is arranged on the inner side wall of the fluid mixing barrel; and the stirring device is used for providing stirring force for the grinding liquid in the liquid mixing barrel during rotation, so that grinding particles in the grinding liquid are in a uniformly dispersed state. According to the grinding fluid supply device, the grinding fluid stirring capacity can be greatly enhanced, the risk of blocking a grinding fluid supply pipeline can be effectively prevented, and the flow stability during grinding fluid supply is ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of chemical mechanical grinding processing, and in particular to a grinding liquid supply device and method. Background Art

[0002] The existing grinding liquid supply device will be stationary for a certain period of time when the grinding liquid is transported from the mixing barrel to the liquid supply barrel and used in the liquid supply barrel, which makes the grinding particles easily aggregate into large particles, causing scratches on the wafer surface and abnormal grinding speed during grinding. The method to reduce this particle aggregation is generally to use a stirring method to stir the grinding liquid in the barrel, and to use a pump circulation method to make the grinding liquid in the barrel in a flowing circulation state, and to filter it through a filter during the liquid supply process to reduce the impact of large particles on the process. However, due to the limited space in the barrel, the stirring effect of the existing stirring method is weak and cannot achieve a good effect of fully dispersing the grinding particles. And because the circulation speed of the circulating pump has certain limitations, it takes a long time to achieve the effect of uniformly dispersing the grinding particles, and the efficiency is low. In addition, there is a risk of clogging when the filter is used for a long time, which increases the pipeline pressure and causes unstable flow during the supply of grinding liquid. Summary of the invention

[0003] The purpose of the present invention is to overcome the above-mentioned defects in the prior art and to provide a grinding liquid supply device and method.

[0004] To achieve the above object, the technical solution of the present invention is as follows: The present invention provides a grinding liquid supply device, comprising a mixing barrel and a liquid supply barrel which are sequentially arranged on a grinding liquid supply pipeline, wherein the mixing barrel is arranged to rotate axially when driven, and a protruding first stirring portion is provided on the inner side wall of the mixing barrel, which is used to provide stirring force to the grinding liquid in the mixing barrel during rotation, so that the grinding particles in the grinding liquid are in a uniformly dispersed state. Furthermore, the first stirring part includes a first spiral blade arranged along the circumference of the inner wall of the mixing barrel, and the first spiral blade is continuously distributed along the circumference of the inner wall of the mixing barrel for at least one circle, or the first spiral blade is discontinuously distributed along the circumference of the inner wall of the mixing barrel for at least one circle.

[0005] Furthermore, there are multiple first spiral blades, and the multiple first spiral blades are arranged in parallel in the same spiral direction, or at least one of the multiple first spiral blades is arranged in a spiral direction opposite to that of the other first spiral blades and intersect at the intersection.

[0006] Furthermore, a first filter portion is provided on the bottom surface of the mixing barrel, and the first filter portion is used to filter large particles or aggregated particles exceeding a certain size of the grinding liquid entering the first filter portion under stirring when the mixing barrel rotates.

[0007] Furthermore, the first filter part includes a first filter screen box, which is provided with an inlet on one end facing the center of the mixing barrel, and the inlet is provided with an inlet door which elastically opens in one direction toward the other end inside the first filter screen box. The first filter screen box blocks large particles or aggregated particles exceeding the mesh size in the grinding liquid which inertialy enter through the inlet and collects them inside the first filter screen box.

[0008] Furthermore, an elastic member is connected between the entrance door and the other end inside the first filter box.

[0009] Furthermore, the mixing barrel comprises an outer barrel and an inner barrel which are nested with each other, the outer barrel is fixedly arranged, the inner barrel is used to contain the grinding liquid, the inner barrel is arranged to rotate axially when driven, and the first stirring part is protruded on the inner wall of the inner barrel.

[0010] Furthermore, the liquid supply barrel is configured to rotate axially when driven, and a second stirring portion is protrudingly provided on the inner side wall of the liquid supply barrel. The second stirring portion is used to provide stirring force to the grinding liquid in the rotating liquid supply barrel, so that the grinding particles in the grinding liquid are in a uniformly dispersed state. A second filter portion is provided on the bottom surface of the liquid supply barrel. The second filter portion is used to filter large particles or aggregated particles exceeding a certain size in the grinding liquid entering the second filter portion under the stirring action when the liquid supply barrel rotates.

[0011] The present invention also provides a method for supplying a grinding liquid, using the above-mentioned grinding liquid supply device, comprising: When supplying the grinding liquid, the mixing barrel is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so that a first stirring portion protruding from the inner wall of the mixing barrel provides a variable centrifugal stirring force to the grinding liquid in the rotating mixing barrel, thereby breaking up the abrasive particles in the grinding liquid that are in an aggregated state; Alternatively, when supplying the grinding liquid, the mixing barrel is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so that a first stirring portion protruding from the inner wall of the mixing barrel can provide a variable centrifugal stirring force to the grinding liquid in the rotating mixing barrel, thereby breaking up the grinding particles in an aggregated state in the grinding liquid. The liquid supply barrel is also rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so that a second stirring portion protruding from the inner wall of the liquid supply barrel can provide a variable centrifugal stirring force to the grinding liquid in the rotating mixing barrel, thereby breaking up the grinding particles in an aggregated state in the grinding liquid.

[0012] Furthermore, it also includes: By utilizing the changing centrifugal stirring force generated by the rotation of the mixing barrel, the grinding liquid is caused to enter the first filter portion provided on the bottom surface of the mixing barrel under the impact force caused by the linear velocity difference between the mixing barrel and the grinding liquid therein, so as to filter and collect large particles or aggregated particles exceeding a certain size, and / or, by utilizing the changing centrifugal stirring force generated by the rotation of the liquid supply barrel, the grinding liquid is caused to enter the second filter portion provided on the bottom surface of the liquid supply barrel under the impact force caused by the linear velocity difference between the liquid supply barrel and the grinding liquid therein, so as to filter and collect large particles or aggregated particles exceeding a certain size.

[0013] It can be seen from the above technical solution that the present invention can provide a stronger stirring force to the grinding liquid in the mixing liquid barrel when the mixing liquid barrel rotates by at least setting the first stirring part (first spiral blade) on the inner wall of the mixing liquid barrel, which can greatly enhance the stirring ability of the grinding liquid, break up the grinding particles in the grinding liquid in a state of aggregation, and make the grinding particles in the grinding liquid in a uniformly dispersed state. In addition, by at least setting the first filtering part (first filter box) on the bottom surface of the mixing liquid barrel, large particles or aggregated particles in the grinding liquid that enter the first filtering part unidirectionally under the stirring action can be filtered and collected, further reducing the aggregation of particles in the grinding liquid, thereby effectively preventing the risk of clogging the grinding liquid supply pipeline and ensuring the stability of the flow rate when the grinding liquid is supplied. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The present invention is a schematic diagram of the structure of an existing grinding liquid supply device.

[0015] Figure 2 The figure is a schematic diagram of the structure of an existing stirring device.

[0016] Figure 3 The figure is a schematic diagram of the structure of an existing circulation device.

[0017] Figure 4-Figure 5 The figure is a schematic structural diagram of a grinding liquid supply device according to a preferred embodiment of the present invention.

[0018] Figure 6 The present invention is a schematic diagram of an inner and outer double barrel structure of a liquid mixing barrel or a liquid supply barrel according to a preferred embodiment of the present invention.

[0019] Figure 7 The present invention is a schematic diagram of the configuration of a spiral blade and a filter box in an inner barrel according to a preferred embodiment of the present invention.

[0020] Figure 8 The figure is an enlarged structural schematic diagram of a filter box according to a preferred embodiment of the present invention. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0022] refer to Figure 1 The existing grinding liquid supply device generally includes a raw liquid tank 6, a mixing liquid tank 5, a liquid supply tank 4 and a filter 3 which are sequentially arranged on the grinding liquid supply pipeline 1, and the filter 3 is connected to the grinding machine table through a delivery pipeline.

[0023] For example, the chemical mechanical polishing process in the chip manufacturing process has the characteristics of high requirements for the surface morphology of the wafer and easy to produce defects. The grinding liquid is in direct contact with the wafer during the grinding process, and through chemical reactions and mechanical friction, the film to be removed is ground away, and it is required to be able to suppress polishing scratches and depressions during the process. The degree of particle aggregation of the grinding liquid will affect the grinding speed and the number of scratch defects during the chemical mechanical polishing process, so it is very necessary to ensure the stability of the grinding liquid state during the grinding process.

[0024] The current process conditions are as follows for configuring the grinding liquid: a variety of stock liquids are drawn from the stock liquid barrel 6 to the mixing liquid barrel 5 for mixing and adding additives, and then supplied to the liquid supply barrel 4 after mixing, and then supplied to the grinding machine after being drawn by the delivery pump 2 and filtered by the filter 3. However, the grinding liquid will be left standing for a certain period of time when it is from the mixing liquid barrel 5 to the liquid supply barrel 4, and when it is used in the liquid supply barrel 4, so that the grinding particles are easy to aggregate into large particles, causing scratches on the wafer surface and abnormal grinding speed during grinding. The method to reduce this particle aggregation is generally to set a stirring device including a stirring rod 7 in the mixing liquid barrel 5 to stir the grinding liquid in the mixing liquid barrel 5, such as Figure 2 As shown, a circulation device including a circulation pump 8 is provided in the liquid supply barrel 4, so that the grinding liquid in the liquid supply barrel 4 is in a flowing circulation state, as shown in FIG. Figure 3 As shown, during the liquid supply process, the liquid is filtered through the filter 3 to reduce the influence of large particles on the process.

[0025] However, due to the limited space of the mixing barrel 5 and the small size of the stirring rod 7, the stirring effect is weak and the grinding particles cannot be fully dispersed. The circulation speed of the circulating pump 8 also has certain limitations, and it takes a long time to achieve the effect of uniform dispersion of the grinding particles, which is inefficient. In addition, the filter 3 will also be blocked if used for a long time, which will increase the pipeline pressure and cause the flow rate of the grinding liquid to be unstable.

[0026] In view of the above problems, the present invention provides a grinding liquid supply device and method. By arranging a first stirring portion (first spiral blade) on at least the inner wall of a mixing barrel, and making the mixing barrel rotate alternately clockwise and counterclockwise at a constant speed or a variable speed when supplying the grinding liquid, a stronger stirring force can be formed on the grinding liquid therein, which can greatly enhance the stirring ability of the grinding liquid, break up the grinding particles in the grinding liquid in an aggregated state, and make the grinding particles in the grinding liquid in a uniformly dispersed state.

[0027] Furthermore, by arranging a first filter portion (first filter screen box) at least on the bottom surface of the mixing barrel, the changing centrifugal stirring force generated by the rotation of the mixing barrel is utilized, and under the impact force caused by the linear velocity difference between the mixing barrel and the grinding liquid therein, large particles or aggregated particles in the grinding liquid entering the first filter portion can be filtered and collected, thereby further reducing the aggregation of particles in the grinding liquid, thereby effectively preventing the risk of blockage of the grinding liquid supply pipeline and ensuring the stability of the flow rate during the grinding liquid supply.

[0028] The specific implementation modes of the present invention are further described in detail below in conjunction with the accompanying drawings.

[0029] refer to Figure 4 A grinding liquid supply device of the present invention comprises a liquid mixing barrel 15 and a liquid supply barrel 14 which are sequentially arranged on a grinding liquid supply pipeline 11 .

[0030] The mixing barrel 15 is configured to be able to rotate around its vertical axis when driven. A protruding first stirring portion 171 is provided on the inner side wall of the mixing barrel 15. The first stirring portion 171 is used to stir the grinding liquid in the rotating mixing barrel 15, so that the grinding particles in the grinding liquid are in a uniformly dispersed state through the stirring force provided by the first stirring portion 171. In some embodiments, the first stirring part 17 disposed in the mixing barrel 15 includes a first spiral blade 18 disposed along the circumference of the inner wall of the mixing barrel 15. The first spiral blade 181 protrudes from the inner wall of the mixing barrel 15 toward the inside of the mixing barrel 15. Figure 2Compared with the existing stirring rod 7 shown in the figure, the present invention forms a new stirring device of the present invention by arranging a first stirring portion 171 having a first spiral blade 181 structure on the inner side wall of the mixing barrel 15, and the first spiral blade 181 and the rotating barrel body of the mixing barrel 15. When the mixing barrel 15 is driven to rotate, the first spiral blade 181 will rotate accordingly, and it can generate a stronger stirring force on the grinding liquid in the mixing barrel 15, thereby greatly enhancing the stirring ability of the grinding liquid, so that large particles or aggregated particles in the grinding liquid can be broken up, so that the grinding particles in the grinding liquid are in a uniformly dispersed state.

[0031] In some embodiments, when the liquid mixing barrel 15 is driven accordingly, it can rotate at a constant speed or at a variable speed.

[0032] In some embodiments, when the liquid mixing barrel 15 is driven accordingly, it can rotate clockwise or counterclockwise.

[0033] In some embodiments, when the liquid mixing barrel 15 is driven accordingly, it can rotate alternately clockwise and counterclockwise at a constant speed or at a variable speed.

[0034] In some embodiments, the first spiral blades 181 are continuously distributed along the circumference of the inner wall of the liquid mixing barrel 15 in at least one circle.

[0035] In some embodiments, the first spiral blades 181 are intermittently distributed in at least one circle along the inner wall of the mixing barrel 15. That is, at least one notch exists on the first spiral blades 181 that are continuously distributed, so that the first spiral blades 181 form multiple independent blade segments along the spiral direction.

[0036] In some embodiments, there is at least one notch on the inner diameter of the continuously distributed first spiral blade 181, but the bottom of the notch facing the outer diameter of the first spiral blade 181 retains a certain distance greater than zero from the outer diameter of the first spiral blade 181 (i.e., the inner wall of the mixing barrel 15). That is, the first spiral blade 181 is still in a continuously distributed state on the inner wall of the mixing barrel 15, but has a notch on the inner edge along the inner diameter.

[0037] In some embodiments, the first spiral blade 181 has a smooth surface. Alternatively, along the direction of the first spiral blade 181, the surface of the first spiral blade 181 has a continuous corrugated morphology.

[0038] In some embodiments, the thickness of the first spiral blade 181 is equal or unequal along the direction of the first spiral blade 181 .

[0039] In some embodiments, the thickness of the first spiral blade 181 is equal or unequal along the direction between the outer diameter and the inner diameter of the first spiral blade 181 .

[0040] In some embodiments, the thickness of the first spiral blade 181 on the outer diameter side is greater than the thickness of the first spiral blade 181 on the inner diameter side. Alternatively, the thickness of the first spiral blade 181 on the outer diameter side is less than the thickness of the first spiral blade 181 on the inner diameter side.

[0041] In some embodiments, the thickness of the first spiral blade 181 between the outer diameter side and the inner diameter side is less than the thickness of the outer diameter side and the thickness of the inner diameter side. Alternatively, the thickness of the first spiral blade 181 between the outer diameter side and the inner diameter side is greater than the thickness of the outer diameter side and the thickness of the inner diameter side.

[0042] In some embodiments, along the direction of the first spiral blade 181 , the width (the distance between the outer diameter and the inner diameter) of each location of the first spiral blade 181 is equal or unequal.

[0043] In some embodiments, a plurality of protrusions are provided on the surface of the first spiral blade 181 along the direction of the first spiral blade 181 .

[0044] In some embodiments, a plurality of through holes are provided on the surface of the first spiral blade 181 along the direction of the first spiral blade 181 .

[0045] In some embodiments, along the direction of the first spiral blade 181 , a plurality of stirring heads are provided on the inner diameter edge of the first spiral blade 181 .

[0046] In some embodiments, there are multiple first spiral blades 181 , and the multiple first spiral blades 181 are arranged in parallel in the same spiral direction (the same forward direction or the same reverse direction).

[0047] In some embodiments, there are multiple first spiral blades 181, at least one of the multiple first spiral blades 181 is arranged in a spiral direction opposite to the other first spiral blades 181, and they intersect at the intersection. For example, there are two first spiral blades 181, one of which is protruding on the inner side wall of the mixing barrel 15 in a forward spiral direction, and the other first spiral blade 181 is protruding on the inner side wall of the mixing barrel 15 in a reverse spiral direction. The two first spiral blades 181 intersect on the inner side wall of the mixing barrel 15 and are arranged to intersect in an integrated manner at the intersection.

[0048] refer to Figure 4In some embodiments, a first filter 191 is further provided on the bottom surface of the mixing barrel 15. The first filter 191 is used to filter the large particles or aggregated particles exceeding a certain size of the grinding liquid entering the first filter 191 under stirring when the mixing barrel 15 rotates, and collect the filtered large particles or aggregated particles exceeding a certain size in the first filter 191. Therefore, during the rotating stirring process of the mixing barrel 15 and the first stirring section 171, the aggregation of particles in the grinding liquid can be further reduced, so that large particles or aggregated particles can be effectively prevented from entering the filter 13 through the supply line 11, causing blockage of the filter 13 during long-term use of the filter 13, increasing the pressure of the grinding liquid supply line 11, and causing the instability of the flow rate.

[0049] Combined with reference Figure 8 . In some embodiments, the first filter section 191 includes a first filter screen box 20. An inlet is provided on one end of the first filter screen box 20 facing the center of the mixing barrel 15, and an inlet door 23 is provided on the inlet that is elastically opened in one direction toward the other end inside the first filter screen box 20. A filter screen is covered on the side of the first filter screen box 20, and the mesh size (mesh size) of the filter screen limits the size of the abrasive particles in the grinding liquid that can pass through the filter screen. During the rotation of the mixing barrel 15, the first filter screen box 201 is used to block and collect large particles or aggregated particles exceeding the mesh size in the grinding liquid that enter the first filter screen box 201 by inertia through the inlet of the first filter screen box 201 inside the first filter screen box 201. The first filter screen box 201 forms an auxiliary filtering device (relative to the filter 13) provided in the mixing barrel 15.

[0050] In some embodiments, the first filter screen box 201 is disposed on the bottom surface of the liquid mixing barrel 15 along the radial direction of the liquid mixing barrel 15, and the end of the first filter screen box 201 having the inlet is at a distance greater than zero from the center of the liquid mixing barrel 15. In this way, when the liquid mixing barrel 15 rotates forward or reversely, the first filter screen box 201 can play a good filtering and collecting role. The other end of the first filter screen box 201 facing away from the inlet is close to (close to or in contact with) the inner wall of the liquid mixing barrel 15.

[0051] In some embodiments, the shape of the first filter cage 201 includes a polygonal cage, such as a rectangular cage (see Figure 8 ), triangular cages, etc.

[0052] In some embodiments, an elastic member 24 is connected between the entrance door 23 and the other end in the first filter screen box 201. The elastic member 24 is set to a certain pre-pressure state, so that when the mixing barrel 15 is in a stationary state, the entrance door 23 is pressed against the entrance of the first filter screen box 201 under the elastic force of the elastic member 24, and the entrance is closed. When the mixing barrel 15 rotates, the entrance door 23 is elastically opened unidirectionally toward the inside of the first filter screen box 201 due to the impact of the grinding liquid under the impact of the linear speed difference between the rotation speed of the mixing barrel 15 and the follow-up rotation speed of the grinding liquid therein, so that the grinding liquid can enter the first filter screen box 201 through the opened entrance, and then continue to flow out of the first filter screen box 201 through the filter screen under the action of inertia. In this process, large particles or aggregated particles exceeding the mesh size of the filter screen are blocked in the first filter screen box 201 by the mesh number of the set filter screen. At the same time, if the grinding liquid in the first filter box 201 flows toward the inlet, or the impact force of the grinding liquid outside the inlet of the first filter box 201 on the inlet door 23 is smaller than the restoring elastic force of the elastic member 24, the elastic force of the elastic member 24 will have a positive effect on the elastic extension, so that the inlet door 23 can be closed, thereby filtering and collecting large particles or aggregated particles.

[0053] In some embodiments, the elastic member 24 includes a spring.

[0054] By setting up the first filter box 201, during the rotation of the mixing barrel 15, the grinding liquid continuously flowing into and out of the first filter box 201 can also produce a significant oscillating and flushing effect on the aggregated particles collected in the first filter box 201, which not only prevents the aggregated particles from continuing to accumulate, but also helps to disintegrate the aggregated particles and return them to a monomer state, thereby playing a role of secondary auxiliary stirring (relative to the first stirring part 171).

[0055] In some other embodiments, a first inlet is provided on one end of the first filter screen box 201 facing the center of the liquid mixing barrel 15, and a first inlet door is provided on the first inlet that is elastically opened in one direction toward the other end in the first filter screen box 201. At the same time, a second inlet is provided on the other end of the first filter screen box 201 facing away from the first inlet, and a second inlet door is provided on the second inlet that is opened in one direction toward the first inlet. The elastic member is connected to the inner side of the first inlet door and the second inlet door through two ends, respectively. The first inlet is at a distance greater than zero from the center of the liquid mixing barrel 15, and the second inlet is close to the inner side wall of the liquid mixing barrel 15 and has a distance greater than zero.

[0056] During the rotation of the mixing barrel 15, the grinding liquid can enter the first filter box 201 from either the first inlet or the second inlet. However, since the first inlet door and the second inlet door can only be opened one-way toward the first filter box 201, the grinding liquid entering the first filter box 201 can no longer leave the first filter box 201 from either the first inlet or the second inlet, but can only be filtered through the filter, so that large particles and aggregated particles blocked by the filter are collected in the first filter box 201 because they cannot pass through the filter.

[0057] Among them, the distance between the first inlet and the center of the mixing barrel 15 generally needs to be greater than the distance between the second inlet and the inner wall of the mixing barrel 15, so as to increase the length of the first filter box 201 when it is radially arranged along the mixing barrel 15 as much as possible, increase the internal volume of the first filter box 201, and allow the grinding liquid entering the first filter box 201 to produce sufficient oscillation, which is beneficial to prevent further accumulation of aggregated particles.

[0058] refer to Figure 6 and Figure 7 In some embodiments, the mixing barrel 15 includes an outer barrel 21 and an inner barrel 22 which are axially sleeved together, the inner diameter of the outer barrel 21 is larger than the outer diameter of the inner barrel 22, and a spacing greater than zero is required between the inner diameter of the outer barrel 21 and the outer diameter of the inner barrel 22. Preferably, the outer barrel 21 and the inner barrel 22 are coaxially sleeved together to form an inner and outer double barrel structure of the mixing barrel 15.

[0059] The outer barrel 21 is fixed, the inner barrel 22 is used to contain the grinding liquid, and the inner barrel 22 is configured to rotate axially when driven, and the first stirring portion 171 (first spiral blade 181) is protrudingly disposed on the inner side wall of the inner barrel 22. The first filter portion 191 (first filter screen box 201) is disposed on the bottom surface of the inner barrel 22.

[0060] refer to Figure 5 In some embodiments, the liquid supply barrel 14 is also configured to be able to rotate around its vertical axis when driven, and a second stirring portion 172 is protruding from the inner wall of the liquid supply barrel 14. The second stirring portion 172 is used to stir the grinding liquid in the rotating liquid supply barrel 14, so that the grinding particles in the grinding liquid are in a uniformly dispersed state through the stirring force provided by the second stirring portion 172.

[0061] In some embodiments, the second stirring portion 172 disposed in the liquid supply barrel 14 includes a second spiral blade 182 disposed along the circumference of the inner side wall of the liquid supply barrel 14. The second spiral blade 182 protrudes from the inner side wall of the liquid supply barrel 14 toward the inside of the liquid supply barrel 14. Figure 2Compared with the existing stirring rod 7 shown in the figure, the present invention forms a new stirring device of the present invention by arranging a second filter part 19 having a second spiral blade 182 structure on the inner side wall of the liquid supply barrel 14, and the second spiral blade 182 and the rotating barrel body of the liquid supply barrel 14. When the liquid supply barrel 14 is driven to rotate, the second spiral blade 182 will rotate accordingly, and it can generate a stronger stirring force on the grinding liquid in the liquid supply barrel 14, thereby greatly enhancing the stirring ability of the grinding liquid, so that large particles or aggregated particles in the grinding liquid can be broken up, so that the grinding particles in the grinding liquid are in a uniformly dispersed state.

[0062] In some embodiments, when the liquid supply barrel 14 is driven accordingly, it can rotate at a constant speed or at a variable speed.

[0063] In some embodiments, when the liquid supply barrel 14 is driven accordingly, it can rotate clockwise or counterclockwise.

[0064] In some embodiments, when the liquid supply barrel 14 is driven accordingly, it can rotate alternately clockwise and counterclockwise at a constant speed or at a variable speed.

[0065] In some embodiments, the second spiral blades 182 are continuously distributed along the circumference of the inner wall of the liquid supply barrel 14 in at least one circle.

[0066] In some embodiments, the second spiral blades 182 are intermittently distributed in at least one circle along the inner wall of the liquid supply barrel 14. That is, at least one notch exists on the continuously distributed second spiral blades 182, so that the second spiral blades 182 form multiple independent blade segments along the spiral direction.

[0067] In some embodiments, at least one notch is present on the inner diameter of the continuously distributed second spiral blade 182, but a certain distance greater than zero is maintained between the bottom of the notch facing the outer diameter of the second spiral blade 182 and the outer diameter of the second spiral blade 182 (i.e., the inner side wall of the liquid supply barrel 14). That is, the second spiral blade 182 is still in a continuously distributed state on the inner side wall of the liquid supply barrel 14, but has a notch on the inner edge along the inner diameter.

[0068] In some embodiments, the second spiral blade 182 has a smooth surface. Alternatively, along the direction of the second spiral blade 182, the surface of the second spiral blade 182 has a continuous corrugated morphology.

[0069] In some embodiments, the thickness of the second spiral blade 182 is equal or unequal along the direction of the second spiral blade 182 .

[0070] In some embodiments, the thickness of the second spiral blade 182 is equal or unequal along the path between the outer diameter and the inner diameter of the second spiral blade 182 .

[0071] In some embodiments, the thickness of the second spiral blade 182 on the outer diameter side is greater than the thickness of the second spiral blade 182 on the inner diameter side. Alternatively, the thickness of the second spiral blade 182 on the outer diameter side is less than the thickness of the second spiral blade 182 on the inner diameter side.

[0072] In some embodiments, the thickness of the second spiral blade 182 between the outer diameter side and the inner diameter side is less than the thickness of the outer diameter side and the thickness of the inner diameter side. Alternatively, the thickness of the second spiral blade 182 between the outer diameter side and the inner diameter side is greater than the thickness of the outer diameter side and the thickness of the inner diameter side.

[0073] In some embodiments, along the direction of the second spiral blade 182 , the width (the distance between the outer diameter and the inner diameter) of the second spiral blade 182 at various locations is equal or unequal.

[0074] In some embodiments, a plurality of protrusions are provided on the surface of the second spiral blade 182 along the direction of the second spiral blade 182 .

[0075] In some embodiments, a plurality of through holes are provided on the surface of the second spiral blade 182 along the direction of the second spiral blade 182 .

[0076] In some embodiments, a plurality of stirring heads are provided on the inner diameter edge of the second spiral blade 182 along the direction of the second spiral blade 182 .

[0077] In some embodiments, the second spiral blade 182 is multiple (strips), and the multiple second spiral blades 182 are arranged in parallel in the same spiral direction (the same forward rotation direction or the same reverse rotation direction).

[0078] In some embodiments, there are multiple second spiral blades 182, at least one of the multiple second spiral blades 182 is arranged in a spiral direction opposite to the other second spiral blades 182, and they intersect at the intersection. For example, there are two second spiral blades 182, one of which is protruding on the inner side wall of the liquid supply barrel 14 in a forward spiral direction, and the other second spiral blade 182 is protruding on the inner side wall of the liquid supply barrel 14 in a reverse spiral direction. The two second spiral blades 182 intersect on the inner side wall of the liquid supply barrel 14 and are arranged to intersect in an integrated manner at the intersection.

[0079] refer to Figure 5In some embodiments, a second filter 192 is provided on the bottom surface of the liquid supply barrel 14. The second filter 192 is used to filter the large particles or aggregated particles exceeding a certain size of the grinding liquid entering the second filter 192 under the stirring action when the liquid supply barrel 14 rotates, and collect the filtered large particles or aggregated particles exceeding a certain size in the second filter 192. Therefore, during the rotation and stirring process of the liquid supply barrel 14 and the second filter 192, the aggregation of particles in the grinding liquid can be further reduced, so that large particles or aggregated particles can be effectively prevented from entering the filter 13 through the supply line 11, causing blockage of the filter 13 during long-term use of the filter 13, increasing the pressure of the grinding liquid supply line 11, and causing the instability of the flow rate.

[0080] Combined with reference Figure 8 . In some embodiments, the second filter section 192 includes a second filter screen box 202. An inlet is provided on one end of the second filter screen box 202 facing the center of the liquid supply barrel 14, and an inlet door 23 is provided on the inlet that elastically opens in one direction toward the other end inside the second filter screen box 202. A filter screen is covered on the side of the second filter screen box 202, and the mesh size (mesh size) of the filter screen limits the size of the abrasive particles in the grinding liquid that can pass through the filter screen. During the rotation of the liquid supply barrel 14, the second filter screen box 202 is used to block and collect large particles or aggregated particles that exceed the mesh size in the grinding liquid that enter the second filter screen box 202 by inertia through the inlet of the second filter screen box 202 inside the second filter screen box 202. The second filter screen box 202 forms an auxiliary filtering device (relative to the filter 13) provided in the liquid supply barrel 14.

[0081] In some embodiments, the second filter screen box 202 is disposed on the bottom surface of the liquid supply barrel 14 along the radial direction of the liquid supply barrel 14, and the distance between the end of the second filter screen box 202 with the inlet and the center of the liquid supply barrel 14 is greater than zero. In this way, when the liquid supply barrel 14 rotates forward or reverse, the second filter screen box 202 can play a good filtering and collecting role. The other end of the second filter screen box 202 facing away from the inlet is close to (close to or in contact with) the inner wall of the liquid supply barrel 14.

[0082] In some embodiments, the shape of the second filter cage 202 includes a polygonal cage, such as a rectangular cage (see Figure 8 ), triangular cages, etc.

[0083] In some embodiments, an elastic member 24 is connected between the entrance door 23 and the other end in the second filter screen box 202. The elastic member 24 is set to a certain pre-pressure state, so that when the liquid supply barrel 14 is in a stationary state, the entrance door 23 is pressed against the entrance of the second filter screen box 202 under the elastic force of the elastic member 24, and the entrance is closed. When the liquid supply barrel 14 rotates, the entrance door 23 is elastically opened unidirectionally toward the inside of the second filter screen box 202 due to the impact of the grinding liquid under the impact of the linear speed difference between the rotation speed of the liquid supply barrel 14 and the follow-up rotation speed of the grinding liquid therein, so that the grinding liquid can enter the second filter screen box 202 through the opened entrance, and then continue to flow out of the second filter screen box 202 through the filter screen under the action of inertia. In this process, large particles or aggregated particles exceeding the mesh size of the filter screen are blocked in the second filter screen box 202 by the mesh number of the set filter screen. At the same time, if the grinding liquid in the second filter box 202 flows toward the inlet, or the impact force of the grinding liquid outside the inlet of the second filter box 202 on the inlet door 23 is smaller than the restoring elastic force of the elastic member 24, the elastic force of the elastic member 24 will have a positive effect on the elastic extension, so that the inlet door 23 can be closed, thereby filtering and collecting large particles or aggregated particles.

[0084] In some embodiments, the elastic member 24 includes a spring.

[0085] By setting up the second filter box 202, during the rotation of the liquid supply barrel 14, the grinding liquid continuously flowing into and out of the second filter box 202 can also produce a significant oscillating and flushing effect on the aggregated particles collected in the second filter box 202, which not only prevents the aggregated particles from continuing to accumulate, but also helps to disintegrate the aggregated particles and return them to a monomer state, thereby playing a role of secondary auxiliary stirring (relative to the second stirring part 172).

[0086] In some other embodiments, a first inlet is provided on one end of the second filter screen box 202 facing the center of the liquid supply barrel 14, and a first inlet door is provided on the first inlet that is elastically opened in one direction toward the other end in the second filter screen box 202. At the same time, a second inlet is provided on the other end of the second filter screen box 202 facing away from the first inlet, and a second inlet door is provided on the second inlet that is opened in one direction toward the first inlet. The elastic member is connected to the inner side of the first inlet door and the second inlet door through two ends, respectively. The first inlet is at a distance greater than zero from the center of the liquid supply barrel 14, and the second inlet is close to the inner side wall of the liquid supply barrel 14 and has a distance greater than zero.

[0087] During the rotation of the liquid supply barrel 14, the grinding liquid can enter the second filter box 202 from either the first inlet or the second inlet. However, since the first inlet door and the second inlet door can only be opened one-way into the second filter box 202, the grinding liquid entering the second filter box 202 can no longer leave the second filter box 202 from either the first inlet or the second inlet, but can only be filtered through the filter, so that large particles and aggregated particles blocked by the filter are unable to pass through the filter and are collected in the second filter box 202.

[0088] Among them, the distance between the first inlet and the center of the liquid supply barrel 14 generally needs to be greater than the distance between the second inlet and the inner wall of the liquid supply barrel 14, so as to increase the length of the second filter box 202 when it is radially arranged along the liquid supply barrel 14 as much as possible, increase the internal volume of the second filter box 202, and allow the grinding liquid entering the second filter box 202 to produce sufficient oscillation, which is beneficial to prevent further accumulation of aggregated particles.

[0089] refer to Figure 6 and Figure 7 In some embodiments, the liquid supply barrel 14 includes an outer barrel 21 and an inner barrel 22 which are axially sleeved together, the inner diameter of the outer barrel 21 is larger than the outer diameter of the inner barrel 22, and a spacing greater than zero is required between the inner diameter of the outer barrel 21 and the outer diameter of the inner barrel 22. Preferably, the outer barrel 21 and the inner barrel 22 are coaxially sleeved together to form an inner and outer double barrel structure of the liquid supply barrel 14.

[0090] The outer barrel 21 is fixedly arranged, the inner barrel 22 is used to contain the grinding liquid, and the inner barrel 22 is arranged to rotate axially when driven, and the second stirring part 172 (second spiral blade 182) is protrudingly arranged on the inner side wall of the inner barrel 22. The second filter part 192 (second filter box 202) is arranged on the bottom surface of the inner barrel 22.

[0091] refer to Figure 4 or Figure 5 In some embodiments, the grinding liquid supply device of the present invention comprises a raw liquid tank 16, a mixing liquid tank 15, a liquid supply tank 14, a delivery pump 12 and a filter 13 which are sequentially arranged on the grinding liquid supply pipeline 11, and the filter 13 is connected to the grinding machine table through a delivery pipeline.

[0092] The grinding liquid supply device of the present invention can be provided with a first stirring portion 171 and a first filtering portion 191 separately in the mixing barrel 15, and the first stirring portion 171 and the first filtering portion 191 can be driven by the mixing barrel 15 to rotate, so as to stir and filter the grinding liquid in the mixing barrel 15. The second stirring portion 172 and the second filtering portion 192 can also be provided in the liquid supply barrel 14 at the same time, and the second stirring portion 172 and the second filtering portion 192 can be driven by the liquid supply barrel 14 to rotate, so as to stir and filter the grinding liquid in the liquid supply barrel 14.

[0093] Among them, on the basis of the first line of defense of driving the first stirring part 171 and the first filtering part 191 provided therein to rotate with the mixing barrel 15 to stir and filter the grinding liquid in the mixing barrel 15, the second stirring part 172 and the second filtering part 192 provided therein are further driven to rotate with the liquid supply barrel 14 to stir and filter the grinding liquid in the liquid supply barrel 14, which plays a role as the second line of defense in preventing the aggregation of grinding liquid particles in the grinding liquid supply pipeline 11, effectively preventing the grinding liquid supply pipeline 11 from being blocked, and ensuring the stability of the flow rate of the grinding liquid during supply, thereby well controlling the overall macro performance of the grinding liquid during supply.

[0094] A grinding liquid supply method of the present invention is further described in detail below through specific implementation modes and in conjunction with the accompanying drawings.

[0095] In some embodiments, a method for supplying a polishing liquid according to the present invention uses the above-mentioned Figure 4 (Also refer to Figure 6-Figure 8 ) a grinding liquid supply device, comprising: When the grinding liquid is supplied to the grinding machine table through the grinding liquid supply pipeline 11, the mixing barrel 15 is rotated so that the first stirring portion 171 (first spiral blade 181) protruding from the inner wall of the mixing barrel 15 rotates accordingly, and the grinding liquid in the rotating mixing barrel 15 is stirred by the rotating first stirring portion 171, so that the grinding particles in the grinding liquid that are in a gathered state are broken up by the stirring force provided by the first stirring portion 171, so that the grinding particles in the grinding liquid are in a uniformly dispersed state.

[0096] In some embodiments, while waiting for liquid supply, the mixing barrel 15 is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so as to provide a variable centrifugal stirring force to the grinding liquid in the rotating mixing barrel 15 through the first stirring part 171, thereby providing a stronger stirring capacity to better break up the abrasive particles in an aggregated state in the grinding liquid.

[0097] Furthermore, by utilizing the changing centrifugal stirring force generated by the rotation of the mixing barrel 15, the grinding liquid is caused to enter the first filter part 191 (first filter box 201) provided on the bottom surface of the mixing barrel 15 under the impact force caused by the linear velocity difference between the mixing barrel 15 and the grinding liquid therein, so as to filter and collect large particles or aggregated particles exceeding a certain size.

[0098] Moreover, during the rotation of the mixing barrel 15, the grinding liquid continuously flowing in and out of the first filter box 201 produces a significant oscillating and flushing effect on the aggregated particles collected in the first filter box 201, so as to avoid the continued accumulation of the aggregated particles, and is also beneficial to the disintegration of the aggregated particles and their return to a monomer state, thereby playing a role of secondary auxiliary stirring.

[0099] In some embodiments, a method for supplying a polishing liquid according to the present invention uses the above-mentioned Figure 5 (Also refer to Figure 6-Figure 8 ) a grinding liquid supply device, comprising: When the grinding liquid is supplied to the grinding machine table through the grinding liquid supply pipeline 11, the mixing barrel 15 is rotated so that the first stirring portion 171 (first spiral blade 181) protruding from the inner wall of the mixing barrel 15 rotates accordingly, and the grinding liquid in the rotating mixing barrel 15 is stirred by the rotating first stirring portion 171, so that the grinding particles in the grinding liquid that are in a gathered state are broken up by the stirring force provided by the first stirring portion 171, so that the grinding particles in the grinding liquid are in a uniformly dispersed state.

[0100] At the same time, the liquid supply barrel 14 is also rotated so that the second stirring portion 172 (second spiral blade 182) protruding from the inner wall of the liquid supply barrel 14 rotates accordingly, and the grinding liquid in the rotating liquid supply barrel 14 is stirred by the rotating second stirring portion 172, so that the grinding particles in the grinding liquid that are in an aggregated state are broken up by the stirring force provided by the second stirring portion 172, so that the grinding particles in the grinding liquid are in a uniformly dispersed state.

[0101] In some embodiments, during the waiting process for liquid supply, the liquid mixing barrel 15 is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so as to provide a variable centrifugal stirring force to the grinding liquid in the rotating liquid mixing barrel 15 through the first stirring part 171, thereby providing a stronger stirring ability to better disperse the grinding particles in the grinding liquid in a state of aggregation. In addition, the liquid supply barrel 14 is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so as to provide a variable centrifugal stirring force to the grinding liquid in the rotating liquid supply barrel 14 through the second stirring part 172, thereby providing a stronger stirring ability to better disperse the grinding particles in the grinding liquid in a state of aggregation.

[0102] Furthermore, the changing centrifugal stirring force generated by the rotation of the mixing barrel 15 is used to make the grinding liquid enter the first filter 191 (first filter screen box 201) provided on the bottom surface of the mixing barrel 15 under the impact force caused by the linear velocity difference between the mixing barrel 15 and the grinding liquid therein, and filter and collect large particles or aggregated particles exceeding a certain size. Also, the changing centrifugal stirring force generated by the rotation of the liquid supply barrel 14 is used to make the grinding liquid enter the second filter 192 (second filter screen box 202) provided on the bottom surface of the liquid supply barrel 14 under the impact force caused by the linear velocity difference between the liquid supply barrel 14 and the grinding liquid therein, and filter and collect large particles or aggregated particles exceeding a certain size.

[0103] Furthermore, during the rotation of the liquid mixing barrel 15, the grinding liquid continuously flowing in and out of the first filter screen box 201 produces a significant oscillating and flushing effect on the aggregated particles collected in the first filter screen box 201, so as to avoid the continued accumulation of the aggregated particles, and is also conducive to the disintegration of the aggregated particles and returning to the monomer state, thereby playing a role of secondary auxiliary stirring. At the same time, during the rotation of the liquid supply barrel 14, the grinding liquid continuously flowing in and out of the second filter screen box 202 produces a significant oscillating and flushing effect on the aggregated particles collected in the second filter screen box 202, so as to avoid the continued accumulation of the aggregated particles, and is also conducive to the disintegration of the aggregated particles and returning to the monomer state, thereby playing a role of secondary auxiliary stirring.

[0104] In addition, by rotating the mixing barrel 15 / supply barrel 14 alternately clockwise and counterclockwise at a constant speed or at a variable speed, a non-constant centrifugal force can be generated, thereby preventing the grinding liquid in the mixing barrel 15 / supply barrel 14 from being stratified.

[0105] The present invention is applicable to a chemical mechanical polishing process for a wafer surface in chip manufacturing, can ensure the stability of the polishing liquid state in the polishing process, suppress polishing scratches and concave defects, and improve the polishing efficiency.

[0106] The present invention is also applicable to the scenario of performing mirror finishing on the surface of a product through a chemical mechanical polishing process.

[0107] In summary, the present invention can provide a stronger stirring force to the grinding liquid in the mixing liquid barrel 15 when the mixing liquid barrel 15 rotates by setting the first stirring part 171 (first spiral blade 181) at least on the inner wall of the mixing liquid barrel 15, which can greatly enhance the stirring ability of the grinding liquid, break up the grinding particles in the grinding liquid in a state of aggregation, and make the grinding particles in the grinding liquid in a uniformly dispersed state. In addition, by setting the first filter part 191 (first filter box 201) at least on the bottom surface of the mixing liquid barrel 15, large particles or aggregated particles in the grinding liquid that enter the first filter part 191 in one direction under the stirring action can be filtered and collected, further reducing the aggregation of particles in the grinding liquid, thereby effectively preventing the risk of clogging the grinding liquid supply pipeline 11 and ensuring the stability of the flow rate when the grinding liquid is supplied.

[0108] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A grinding liquid supply device, comprising a mixing tank and a liquid supply tank sequentially arranged on a grinding liquid supply pipeline, characterized in that: The mixing barrel is configured to rotate axially when driven, and a protruding first stirring portion is provided on the inner side wall of the mixing barrel for providing stirring force to the grinding liquid in the mixing barrel during rotation, so that the grinding particles in the grinding liquid are in a uniformly dispersed state.

2. The polishing liquid supply device according to claim 1, characterized in that: The first stirring part includes a first spiral blade arranged along the circumference of the inner wall of the mixing barrel. The first spiral blade is continuously distributed along the circumference of the inner wall of the mixing barrel for at least one circle, or the first spiral blade is discontinuously distributed along the circumference of the inner wall of the mixing barrel for at least one circle.

3. The polishing liquid supply device according to claim 2, characterized in that: There are multiple first spiral blades, and the multiple first spiral blades are arranged in parallel in the same spiral direction, or at least one of the multiple first spiral blades is arranged in a spiral direction opposite to that of the other first spiral blades and intersect at the intersection.

4. The polishing liquid supply device according to claim 1, characterized in that: A first filter portion is provided on the bottom surface of the mixing barrel. The first filter portion is used to filter the grinding liquid entering the first filter portion under stirring when the mixing barrel rotates, targeting large particles or aggregated particles exceeding a certain size.

5. The polishing liquid supply device according to claim 4, characterized in that: The first filter part includes a first filter box, which is provided with an inlet on one end of the first filter box facing the center of the mixing barrel, and the inlet is provided with an inlet door that elastically opens one-way toward the other end inside the first filter box. The first filter box blocks large particles or aggregated particles exceeding the mesh size in the grinding liquid that inertally enters through the inlet and collects them inside the first filter box.

6. The polishing liquid supply device according to claim 5, characterized in that: An elastic member is connected between the entrance door and the other end inside the first filter box.

7. The polishing liquid supply device according to claim 1, characterized in that: The mixing barrel includes an outer barrel and an inner barrel which are nested together. The outer barrel is fixed, and the inner barrel is used to contain the grinding liquid. The inner barrel is configured to rotate axially when driven, and the first stirring part is protruded on the inner side wall of the inner barrel.

8. The polishing liquid supply device according to claim 4, characterized in that: The liquid supply barrel is configured to rotate axially when driven, and a second stirring portion is protruding from the inner side wall of the liquid supply barrel. The second stirring portion is used to provide stirring force to the grinding liquid in the rotating liquid supply barrel, so that the grinding particles in the grinding liquid are in a uniformly dispersed state. A second filter portion is provided on the bottom surface of the liquid supply barrel. The second filter portion is used to filter large particles or aggregated particles exceeding a certain size in the grinding liquid entering the second filter portion under the stirring action when the liquid supply barrel rotates.

9. A method for supplying a polishing liquid, using the polishing liquid supply device according to any one of claims 1 to 8, characterized in that: include: When supplying the polishing liquid, the mixing barrel is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so that a first stirring portion protruding from the inner wall of the mixing barrel provides a varying centrifugal stirring force to the polishing liquid in the rotating mixing barrel, thereby breaking up agglomerated polishing particles in the polishing liquid; Alternatively, when supplying the grinding liquid, the mixing barrel is rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so as to provide a variable centrifugal stirring force to the grinding liquid in the mixing barrel during rotation through a first stirring portion protruding from the inner wall of the mixing barrel, thereby breaking up the grinding particles in an aggregated state in the grinding liquid. The liquid supply barrel is also rotated alternately clockwise and counterclockwise at a constant speed or a variable speed, so as to provide a variable centrifugal stirring force to the grinding liquid in the grinding liquid during rotation through a second stirring portion protruding from the inner wall of the liquid supply barrel, thereby breaking up the grinding particles in an aggregated state in the grinding liquid.

10. The polishing liquid supply method according to claim 9, characterized in that: Also includes: By utilizing the changing centrifugal stirring force generated by the rotation of the mixing barrel, the grinding liquid is caused to enter the first filter portion provided on the bottom surface of the mixing barrel under the impact force caused by the linear velocity difference between the mixing barrel and the grinding liquid therein, and filter and collect large particles or aggregated particles exceeding a certain size; and / or, by utilizing the changing centrifugal stirring force generated by the rotation of the liquid supply barrel, the grinding liquid is caused to enter the second filter portion provided on the bottom surface of the liquid supply barrel under the impact force caused by the linear velocity difference between the liquid supply barrel and the grinding liquid therein, and filter and collect large particles or aggregated particles exceeding a certain size.

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