Processing method of pot-shaped ceramic part for semiconductor CVD (Chemical Vapor Deposition) equipment

Abstract

The invention relates to the technical field of ceramic part processing, and particularly discloses a processing method of a pot-shaped ceramic part for semiconductor CVD (Chemical Vapor Deposition) equipment, which comprises the following steps: powder preparation and static pressure molding: putting a ceramic powder material into a mold, and uniformly applying pressure to the ceramic powder material in the mold through high-pressure liquid to obtain a ceramic body; comprising the steps that the powder humidity value of a current batch of ceramic powder materials is obtained, the ceramic powder materials are loaded into a ceramic static pressure mold, a static pressure value is obtained through calculation based on the powder humidity value, pressure is applied to the ceramic powder materials in the ceramic static pressure mold based on the static pressure value, and a ceramic blank is obtained; the method comprises the following steps: pre-sintering, fine grinding, detecting and testing, and detecting the blank density performance value and the strength performance value of the ceramic blank, so that the qualification rate of the ceramic blank obtained by static pressing is ensured, the stability of the ceramic blank in the subsequent processing process is ensured, the processing efficiency is improved, and the material consumption in the processing process is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of ceramic piece processing, and in particular to a method for processing a pot-shaped ceramic piece for semiconductor CVD equipment. Background Art

[0002] The pot-shaped ceramic parts for semiconductor CVD equipment are one of the key equipment parts in the semiconductor manufacturing process. They are widely used in the manufacturing process of semiconductor products such as integrated circuits, optoelectronic devices, sensors, etc. They are mainly used as a part of the substrate or reaction chamber during the bearing and reaction process. These ceramic parts are usually made of high-purity and high-stability ceramic materials, such as alumina, silicon nitride, etc., and have excellent high temperature resistance, corrosion resistance, wear resistance and other properties, and can adapt to the high temperature, high pressure and corrosive environment in the semiconductor CVD process.

[0003] The processing of pot-shaped ceramic parts requires steps such as forming, sintering, grinding and polishing. During the processing, the high strength, high precision and low defect rate of the ceramic parts need to be guaranteed; among them, the forming process of the ceramic green body is an important step that determines the subsequent processing of the ceramic parts; the existing static pressure forming cannot guarantee the density and strength of the formed ceramic green body when facing different batches of ceramic powder materials, which easily increases the defective rate of the ceramic green body in the subsequent processing process, resulting in waste of raw materials and reduced production efficiency. Summary of the invention

[0004] The object of the present invention is to provide a method for processing a pot-shaped ceramic member for a semiconductor CVD device to solve the above-mentioned background problems.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A method for processing a pot-shaped ceramic part for semiconductor CVD equipment comprises the following steps:

[0007] Step 1: Powder preparation: Select ceramic materials for powder preparation to obtain ceramic powder materials with uniform particles;

[0008] Step 2: static pressure molding: the ceramic powder material is loaded into the mold, and the ceramic powder material in the mold is evenly pressed by high-pressure liquid to obtain a ceramic body;

[0009] The following steps are involved:

[0010] Obtain the powder humidity value SF of the current batch of ceramic powder materials, determine whether the powder humidity value SF is within the static pressure humidity value range [Smin, Smax]; and obtain a static pressure signal;

[0011] Based on the static pressure signal, ceramic powder material is loaded into the ceramic static pressure mold, a static pressure value PJ is calculated based on the powder humidity value SF, and pressure is applied to the ceramic powder material in the ceramic static pressure mold based on the static pressure value PJ to obtain a ceramic green body;

[0012] Obtain the density value of the ceramic green body after static pressing by ultrasonic detection, and mark it as Mpb; and compare it with the qualified green body density value MH; obtain a qualified density signal;

[0013] Based on the density qualified signal, the strength performance value of the ceramic body is calculated and marked as JQZ; the strength performance value JQZ is compared with the strength performance threshold value JQyz; and a strength qualified signal is obtained;

[0014] Step 3: Pre-sintering: Pre-sinter the ceramic body at low temperature and then sinter at high temperature;

[0015] Step 4: Fine grinding: Place the sintered ceramic parts in the vertical grinding equipment and finely grind their inner and outer surfaces;

[0016] Step 5: Inspection and testing: Conduct surface inspection on ceramic parts and conduct simulated environmental tests on ceramic parts.

[0017] As a further solution of the present invention: determining whether the powder humidity value SF is within the static pressure humidity range [Smin, Smax];

[0018] If the powder humidity value is not within the static pressure humidity range, a humidity adjustment signal is generated;

[0019] If the powder humidity value is within the static pressure humidity range, a static pressure signal is generated.

[0020] As a further solution of the present invention: the humidity value abnormal signal includes a powder drying signal and a powder humidification signal;

[0021] If the powder humidity value is less than the minimum static pressure humidity value Smin, a powder humidification signal is generated;

[0022] If the powder humidity value is greater than the maximum static pressure humidity value Smax, a powder drying signal is generated.

[0023] As a further solution of the present invention: the calculation method of the static pressure value includes:

[0024] Obtain the powder moisture value SF of the ceramic powder material, and at the same time, obtain the static pressing qualified data based on the static pressing processing density and static pressing processing efficiency standards, including: static pressing efficiency time value TY and green body density qualified value MH;

[0025] Based on the static pressure qualified data, the green powder static pressure model The static pressure value PJ is obtained by calculation; a is the static pressure time coefficient, and b is the static pressure coefficient.

[0026] As a further solution of the present invention: comparing the green body density performance value Mpb with the green body density qualified value MH;

[0027] If the green body density performance value Mpb is greater than or equal to the green body density qualified value MH, a density qualified signal is generated;

[0028] If the green body density performance value Mpb is less than the green body density qualified value MH, a static pressure initial adjustment signal is generated.

[0029] As a further solution of the present invention: based on the static pressure initial adjustment signal, the static pressure value PJ is increased and adjusted by a unit adjustment increment TXp, and after each adjustment is completed, the ceramic powder material is statically pressed until the green body density performance value is equal to the green body density qualified value;

[0030] At this time, the increased static pressure adjustment value PJtz is obtained; then, based on the static pressure efficiency time value TY, the qualified value MH of the green body density and the powder humidity value SF, as well as the historical data value set, the static pressure time coefficient a and the static pressure coefficient b in the green body powder static pressure model are updated and calculated, and the updated green body powder static pressure model is obtained.

[0031] As a further solution of the present invention: the calculation method of the strength performance value of the ceramic body is:

[0032] The ceramic body is placed in a strength testing device, and the edge of the upper surface of the ceramic body is divided into three equal parts to obtain three equal points, which are marked as Don, Dtw and Dth respectively;

[0033] Perform vertical pressure tests on three equally divided points simultaneously in sequence until the ceramic body breaks;

[0034] At this time, the test pressure values ​​at three equally divided points are obtained and marked as Pdon, Pdtw and Pdth respectively;

[0035] Measure the distances between the three equally divided points and mark them as ZJL; at the same time, obtain the area of ​​the upper surface of the ceramic body and mark it as SBM;

[0036] pass The strength performance value JQZ of the ceramic body is obtained by calculation.

[0037] As a further solution of the present invention: comparing the intensity representation value JQZ with the intensity representation threshold value JQyz;

[0038] If the intensity performance value JQZ is greater than or equal to the intensity performance threshold JQyz; generate an intensity qualified signal;

[0039] If the intensity performance value JQZ is less than the intensity performance threshold value JQyz, a static pressure secondary adjustment signal is generated.

[0040] As a further solution of the present invention: based on the static pressure secondary adjustment signal, the static pressure value PJ is increased and adjusted by a unit adjustment increment TXp, and after each adjustment is completed, the ceramic powder material is statically pressed until the strength performance value is equal to the strength performance threshold value;

[0041] At this time, the increased static pressure adjustment value PJtz is obtained; then, based on the static pressure efficiency time value TY, the qualified value MH of the green body density and the powder humidity value SF, as well as the historical data value set, the static pressure time coefficient a and the static pressure coefficient b in the green body powder static pressure model are updated and calculated, and the updated green body powder static pressure model is obtained.

[0042] As a further solution of the present invention: the green body powder static pressure model is obtained by: obtaining a historical static pressure test data set, including a static pressure efficiency time value TY under a green body density qualified value MH, a historical powder humidity value SFs and a historical static pressure value PJs;

[0043] Then pass The static pressure time coefficient a and the static pressure coefficient b are calculated, and then the green body powder static pressure model is obtained.

[0044] Beneficial effects of the present invention:

[0045] In the present invention, by detecting the moisture value of the ceramic powder material of the current batch, it is determined whether the ceramic powder material meets the conditions for static pressing of the ceramic blank, thereby preventing the moisture value of the ceramic powder material from failing to meet the conditions for static pressing of the ceramic blank, and further ensuring the uniform fluidity and bonding stability of the ceramic blank during static pressing.

[0046] At the same time, during the static pressing process, based on the powder moisture value of the ceramic powder material and the standard data of static pressing qualification, the static pressure value of the batch of ceramic powder materials during the static pressing process is calculated, and the ceramic powder material is statically pressed to obtain a ceramic green body. At the same time, the green body density performance value and the strength performance value of the ceramic green body are tested to ensure the qualified rate of the ceramic green body obtained by static pressing, and further ensure the stability of the ceramic green body in the subsequent processing process;

[0047] The static pressure model of the green body powder is updated by the data of the ceramic green body obtained by static pressing the ceramic powder material each time, thereby improving the accuracy of the static pressure value calculated during the static pressing process of the ceramic powder material, improving the speed of subsequent production and processing, reducing the time spent on adjusting the static pressure value of the ceramic powder material during the production process, improving processing efficiency, and effectively reducing material consumption during the processing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0048] The present invention will be further described below in conjunction with the accompanying drawings.

[0049] Figure 1 It is a schematic diagram of the processing flow of the method of the present invention;

[0050] Figure 2 It is a schematic diagram of the process of static pressure forming in the present invention. DETAILED DESCRIPTION

[0051] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0052] Embodiment 1

[0053] See also Figure 1 and Figure 2 As shown, the present invention is a method for processing a pot-shaped ceramic part for semiconductor CVD equipment, comprising the following steps:

[0054] Step 1: Powder preparation: Select ceramic materials for powder preparation to obtain ceramic powder materials with uniform particles;

[0055] Step 2: static pressure molding: the ceramic powder material is loaded into the mold, and the ceramic powder material in the mold is evenly pressed by high-pressure liquid to obtain a ceramic body;

[0056] The following steps are involved:

[0057] 021: Obtain the powder humidity value SF of the current batch of ceramic powder materials, and determine whether the powder humidity value SF is within the static pressure humidity range [Smin, Smax];

[0058] If the powder humidity value is not within the static pressure humidity range, a humidity adjustment signal is generated;

[0059] Specifically, the humidity value abnormal signal includes a powder drying signal and a powder humidification signal;

[0060] If the powder humidity value is less than the minimum static pressure humidity value Smin, a powder humidification signal is generated;

[0061] If the powder humidity value is greater than the maximum static pressure humidity value Smax, a powder drying signal is generated;

[0062] Since the ceramic powder material needs to have a certain bonding force during the static pressing process to ensure that a high-strength green body is formed during the static pressing process and to avoid the occurrence of loose structure, the ceramic powder material needs to be humidified under the powder humidification signal to increase the powder humidity value of the ceramic powder material to ensure that the ceramic powder material obtains the mechanical strength of the ceramic green body by static pressing; in addition, during the static pressing of the ceramic powder material, if the powder humidity value is too high, the moisture between the powder materials will affect the forming stability and uniformity of the ceramic green body, easily causing pores or cracks in the internal structure, and affecting the subsequent sintering, and easily causing sintering cracking or abnormal dimensional accuracy. Therefore, under the powder drying signal, the ceramic powder material needs to be dried to reduce the powder humidity value of the ceramic powder material to ensure the stability of the green body formed by static pressing of the ceramic powder material, and further ensure the sintering pass rate;

[0063] If the powder humidity value is within the static pressure humidity range, a static pressure signal is generated;

[0064] 022: Based on the static pressure signal, ceramic powder material is loaded into the ceramic static pressure mold, a static pressure value PJ is calculated based on the powder humidity value SF, and pressure is applied to the ceramic powder material in the ceramic static pressure mold based on the static pressure value PJ to obtain a ceramic green body;

[0065] Specifically include:

[0066] Obtain the powder humidity value SF of the ceramic powder material, and at the same time, obtain the static pressing qualified data based on the static pressing processing density and static pressing processing efficiency standards, including: static pressing efficiency time value TY and green body density qualified value MH; It should be noted that the static pressing qualified data refers to the static pressing time efficiency that needs to be maintained during the static pressing process of the ceramic green body and the minimum qualified density requirement of the ceramic green body;

[0067] Based on the static pressure qualified data, the green powder static pressure model The static pressure value PJ is obtained by calculation; a is the static pressure time coefficient, and b is the static pressure coefficient;

[0068] 023: Obtain the density value of the ceramic body after static pressing through ultrasonic detection and mark it as Mpb;

[0069] Compare the green body density performance value Mpb with the green body density qualified value MH;

[0070] If the green body density performance value Mpb is greater than or equal to the green body density qualified value MH, a density qualified signal is generated; at this time, it means that during the static pressing process, when the humidity value of the ceramic powder material is SF, when the static pressure value PJ is used for static pressing, the green body density performance value of the ceramic green body can meet the standard, and the static pressing efficiency is within the standard range of the static pressing requirements; then, the mechanical strength of the ceramic green body is tested;

[0071] If the green body density performance value Mpb is less than the green body density qualified value MH, a static pressure initial adjustment signal is generated; at this time, it means that when the ceramic powder material is statically pressed using the static pressure value PJ, the density of the ceramic green body does not meet the standard, so the static pressure value is adjusted to obtain a ceramic green body with a qualified green body density performance value;

[0072] 024: Based on the density qualified signal, the strength performance value of the ceramic body is calculated and marked as JQZ;

[0073] Specifically include:

[0074] 0241: Place the ceramic body in a strength testing device, divide the edge of the upper surface of the ceramic body into three equal parts, obtain three equal division points, and mark them as Don, Dtw and Dth respectively;

[0075] Perform vertical pressure tests on three equally divided points simultaneously in sequence until the ceramic body breaks;

[0076] At this time, the test pressure values ​​at three equally divided points are obtained and marked as Pdon, Pdtw and Pdth respectively;

[0077] 0242: Measure the distance between three equally divided points and mark them as ZJL; at the same time, obtain the area value of the upper surface of the ceramic body and mark it as SBM;

[0078] pass Calculate and obtain the strength performance value JQZ of the ceramic body;

[0079] 025: compare the intensity representation value JQZ with the intensity representation threshold value JQyz;

[0080] If the strength performance value JQZ is greater than or equal to the strength performance threshold value JQyz; a strength qualified signal is generated; at this time, it means that the ceramic powder material under the current batch is statically pressed using the static pressure value PJ, and the obtained ceramic blank meets the standard; at this time, the static pressure value PJ is maintained to statically press the ceramic powder material of the batch with the powder humidity value SF;

[0081] If the strength performance value JQZ is less than the strength performance threshold value JQyz, a static pressure secondary adjustment signal is generated. At this time, it means that when the ceramic powder material is statically pressed using the static pressure value PJ, the density of the ceramic body meets the standard, but the strength performance of the ceramic body does not meet the standard. Similarly, the static pressure value is adjusted to obtain a ceramic body with a qualified body strength performance value.

[0082] By testing the moisture value of the ceramic powder material of the current batch, it is determined whether the ceramic powder material meets the conditions for static pressing of the ceramic blank, so as to avoid the moisture value of the ceramic powder material failing to meet the conditions for static pressing of the ceramic blank, and further ensure the uniform fluidity and bonding stability of the ceramic blank during static pressing;

[0083] At the same time, during the static pressing process, based on the powder moisture value of the ceramic powder material and the standard data of static pressing qualification, the static pressure value of the batch of ceramic powder materials during the static pressing process is calculated, and the ceramic powder material is statically pressed to obtain a ceramic green body. At the same time, the green body density performance value and the strength performance value of the ceramic green body are tested to ensure the qualified rate of the ceramic green body obtained by static pressing, and further ensure the stability of the ceramic green body in the subsequent processing process;

[0084] Step 3: Pre-sintering: Pre-sinter the ceramic body at low temperature and then sinter at high temperature;

[0085] Step 4: Fine grinding: Place the sintered ceramic parts in the vertical grinding equipment and finely grind their inner and outer surfaces;

[0086] Step 5: Inspection and testing: Conduct surface inspection on ceramic parts and conduct simulated environmental tests on ceramic parts.

[0087] Embodiment 2

[0088] Based on the above embodiment, this embodiment adjusts the static pressure value PJ according to the static pressure initial adjustment signal to obtain a ceramic body with a qualified body density performance value;

[0089] Specific:

[0090] The static pressure value PJ is adjusted by increasing the unit adjustment increment TXp, and the ceramic powder material is statically pressed after each adjustment is completed until the green body density performance value is equal to the green body density qualified value;

[0091] At this time, the increased static pressure adjustment value PJtz is obtained; then, based on the static pressure efficiency time value TY, the green body density qualified value MH and the powder humidity value SF, as well as the historical data value set, the static pressure time coefficient a and the static pressure coefficient b in the green body powder static pressure model are updated and calculated, and the updated green body powder static pressure model is obtained;

[0092] Similarly, based on the static pressure secondary adjustment signal, the static pressure value PJ is adjusted to obtain a ceramic body with a qualified strength performance value;

[0093] Specific:

[0094] The static pressure value PJ is adjusted by increasing the unit adjustment increment TXp, and after each adjustment, the ceramic powder material is statically pressed until the strength performance value is equal to the strength performance threshold value;

[0095] At this time, the increased static pressure adjustment value PJtz is obtained; then, based on the static pressure efficiency time value TY, the qualified value MH of the green body density and the powder humidity value SF, as well as the historical data value set, the static pressure time coefficient a and the static pressure coefficient b in the green body powder static pressure model are updated and calculated, and the updated green body powder static pressure model is obtained.

[0096] The static pressure model of the green body powder is updated by the data of the ceramic green body obtained by static pressing the ceramic powder material each time, thereby improving the accuracy of the static pressure value calculated during the static pressing process of the ceramic powder material, improving the speed of subsequent production and processing, reducing the time spent on adjusting the static pressure value of the ceramic powder material during the production process, improving processing efficiency, and effectively reducing material consumption during the processing process.

[0097] Embodiment 3

[0098] Based on the above embodiment, this embodiment provides the following acquisition method for obtaining the static pressure model of the green body powder:

[0099] Obtain historical static pressure test data sets, including static pressure efficiency time value TY under qualified green body density value MH, historical powder humidity value SFs and historical static pressure value PJs;

[0100] Then pass The static pressure time coefficient a and the static pressure coefficient b are calculated, and then the green body powder static pressure model is obtained;

[0101] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A method for processing a pot-shaped ceramic part for semiconductor CVD equipment, characterized in that: The following steps are involved: Step 1: Powder preparation: Select ceramic materials for powder preparation to obtain ceramic powder materials with uniform particles; Step 2: static pressure molding: the ceramic powder material is loaded into the mold, and the ceramic powder material in the mold is evenly pressed by high-pressure liquid to obtain a ceramic body; The following steps are involved: Obtain the powder humidity value SF of the current batch of ceramic powder materials, determine whether the powder humidity value SF is within the static pressure humidity value range [Smin, Smax]; and obtain a static pressure signal; Based on the static pressure signal, ceramic powder material is loaded into the ceramic static pressure mold, a static pressure value PJ is calculated based on the powder humidity value SF, and pressure is applied to the ceramic powder material in the ceramic static pressure mold based on the static pressure value PJ to obtain a ceramic green body; Obtain the density value of the ceramic green body after static pressing by ultrasonic detection, and mark it as Mpb; and compare it with the qualified green body density value MH; obtain a qualified density signal; Based on the density qualified signal, the strength performance value of the ceramic body is calculated and marked as JQZ; the strength performance value JQZ is compared with the strength performance threshold value JQyz; and a strength qualified signal is obtained; Step 3: Pre-sintering: Pre-sinter the ceramic body at low temperature and then sinter at high temperature; Step 4: Fine grinding: Place the sintered ceramic parts in the vertical grinding equipment and finely grind their inner and outer surfaces; Step 5: Inspection and testing: Conduct surface inspection on ceramic parts and conduct simulated environmental tests on ceramic parts.

2. The method for processing a pot-shaped ceramic part for semiconductor CVD equipment according to claim 1, characterized in that: Determine whether the powder humidity value SF is within the static pressure humidity range [Smin, Smax]; If the powder humidity value is not within the static pressure humidity range, a humidity adjustment signal is generated; If the powder humidity value is within the static pressure humidity range, a static pressure signal is generated.

3. The method for processing a pot-shaped ceramic member for semiconductor CVD equipment according to claim 2, characterized in that: The humidity value abnormal signal includes a powder drying signal and a powder humidification signal; If the powder humidity value is less than the minimum static pressure humidity value Smin, a powder humidification signal is generated; If the powder humidity value is greater than the maximum static pressure humidity value Smax, a powder drying signal is generated.

4. The method for processing a pot-shaped ceramic part for semiconductor CVD equipment according to claim 1, characterized in that: The calculation method of the static pressure value includes: Obtain the powder moisture value SF of the ceramic powder material, and at the same time, obtain the static pressing qualified data based on the static pressing processing density and static pressing processing efficiency standards, including: static pressing efficiency time value TY and green body density qualified value MH; Based on the static pressure qualified data, the green powder static pressure model The static pressure value PJ is obtained by calculation; a is the static pressure time coefficient, and b is the static pressure coefficient.

5. The method for processing a pot-shaped ceramic part for semiconductor CVD equipment according to claim 1, characterized in that: Compare the green body density performance value Mpb with the green body density qualified value MH; If the green body density performance value Mpb is greater than or equal to the green body density qualified value MH, a density qualified signal is generated; If the green body density performance value Mpb is less than the green body density qualified value MH, a static pressure initial adjustment signal is generated.

6. The method for processing a pot-shaped ceramic member for semiconductor CVD equipment according to claim 5, characterized in that: Based on the static pressure initial adjustment signal, the static pressure value PJ is adjusted by increasing the unit adjustment increment TXp, and the ceramic powder material is statically pressed after each adjustment is completed until the green body density performance value is equal to the green body density qualified value; At this time, the increased static pressure adjustment value PJtz is obtained; then, based on the static pressure efficiency time value TY, the qualified value MH of the green body density and the powder humidity value SF, as well as the historical data value set, the static pressure time coefficient a and the static pressure coefficient b in the green body powder static pressure model are updated and calculated, and the updated green body powder static pressure model is obtained.

7. The method for processing a pot-shaped ceramic member for semiconductor CVD equipment according to claim 1, characterized in that: The calculation method of the strength performance value of the ceramic body is: The ceramic body is placed in a strength testing device, and the edge of the upper surface of the ceramic body is divided into three equal parts to obtain three equal points, which are marked as Don, Dtw and Dth respectively; Perform vertical pressure tests on three equally divided points simultaneously in sequence until the ceramic body breaks; At this time, the test pressure values ​​at three equally divided points are obtained and marked as Pdon, Pdtw and Pdth respectively; Measure the distances between the three equally divided points and mark them as ZJL; at the same time, obtain the area of ​​the upper surface of the ceramic body and mark it as SBM; pass The strength performance value JQZ of the ceramic body is obtained by calculation.

8. The method for processing a pot-shaped ceramic member for semiconductor CVD equipment according to claim 1, characterized in that: Compare the intensity representation value JQZ with the intensity representation threshold JQyz; If the intensity performance value JQZ is greater than or equal to the intensity performance threshold JQyz; generate an intensity qualified signal; If the intensity performance value JQZ is less than the intensity performance threshold value JQyz, a static pressure secondary adjustment signal is generated.

9. The method for processing a pot-shaped ceramic member for semiconductor CVD equipment according to claim 8, characterized in that: Based on the static pressure secondary adjustment signal, the static pressure value PJ is increased and adjusted by a unit adjustment increment TXp, and after each adjustment is completed, the ceramic powder material is statically pressed until the strength performance value is equal to the strength performance threshold value; At this time, the increased static pressure adjustment value PJtz is obtained; then, based on the static pressure efficiency time value TY, the qualified value MH of the green body density and the powder humidity value SF, as well as the historical data value set, the static pressure time coefficient a and the static pressure coefficient b in the green body powder static pressure model are updated and calculated, and the updated green body powder static pressure model is obtained.

10. The method for processing a pot-shaped ceramic member for semiconductor CVD equipment according to claim 1, characterized in that: The green body powder static pressure model is obtained by: obtaining a historical static pressure test data set, including a static pressure efficiency time value TY under a green body density qualified value MH, a historical powder humidity value SFs, and a historical static pressure value PJs; Then, by MH = a × S T F Y s+b×PJs, the static pressure time coefficient a and the static pressure coefficient b are calculated, and then the green body powder static pressure model is obtained.

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