Corrosion-resistant optical measuring cell
By using a detachable press plate in the optical measurement cell to clamp the optical window sheet with the shell projection, combining quartz or sapphire materials and sealing rings, the surface surface type and optical path accuracy of the existing optical measurement cell in the semiconductor field detection is solved. The poor problem achieves high-quality, low-cost modular and corrosion-resistant optical measurement tanks.
Patent Information
- Application Number
- CN202411206347.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-30
- Publication Date
- 2024-12-13
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
In the detection of chemical liquids in the semiconductor field, existing optical measurement pools have problems such as poor surface surface type and optical path accuracy, low yield rate, high cost, limited processing materials, modularity and poor sealing, and are particularly difficult to achieve corrosion resistance. Sex and miniaturize.
The detachable press plate is used to clamp the optical window sheet with the housing projection to form a modular structure. Use quartz or sapphire materials to set up sealing rings and optical fibers. The sealing and corrosion resistance are improved through polytetrafluoroethylene material, and the Optical pathways and collimating components optimize optical paths.
It realizes high-quality processing of optical window sheets, shortens processing cycles, reduces costs, improves sealing and detection accuracy, avoids the problem of immature sintering and bonding processes of sapphire materials, and meets the needs of modularization and miniaturization. .
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Figure CN119124976A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a near-infrared analysis instrument, in particular to a corrosion-resistant optical measuring cell. Background Art
[0002] The description in this section merely provides background information related to the present disclosure and does not constitute prior art.
[0003] In the non-destructive real-time detection system of chemical liquids in the semiconductor field, there are strict requirements for ion precipitation and particle detection of the liquid system. Different process sections use different liquids, and the requirements for the corrosion resistance of the material in direct contact between the optical measuring cell and the liquid, the ion precipitation ratio, etc. vary greatly and are very strict.
[0004] In order to avoid affecting the accuracy and stability of optical detection, in theory, optical measuring cells have high requirements for the transmittance, use band, surface shape, smoothness, etc. of transparent components. However, existing optical measuring cells are generally one-piece structures. The surface shape and optical path accuracy of optical measuring cells with one-piece structures are poor, the yield rate is low, and the performance of different batches varies greatly. The processing cycle and cost are high, and the processing materials are limited, making it difficult to meet the use requirements. At the same time, there are also some special-shaped combination measuring cells, whose special-shaped glass processing and polishing are difficult, especially the concave surface is difficult to achieve optical polishing requirements. In particular, sapphire is required in some scenarios, and it is even more difficult to process due to the influence of hardness. The sintering and bonding process of sapphire is also immature. At the same time, the above two existing measuring cells are also difficult to achieve modularization and miniaturization, and the sealing is poor.
[0005] Currently, there is no corrosion-resistant optical measuring cell that can solve the above problems. Summary of the invention
[0006] The purpose of the present invention is to provide a corrosion-resistant optical measuring cell, which can clamp an optical window in a cavity of a shell through cooperation between a pressing plate and a raised portion of a shell, has modular characteristics and is easy to process.
[0007] In order to achieve the above object, the present invention discloses the following corrosion-resistant optical measuring cell; the corrosion-resistant optical measuring cell comprises:
[0008] a housing having a first end and a second end disposed opposite to each other;
[0009] A first pressing plate and a second pressing plate, wherein the first pressing plate is detachably connected to one side of the first end of the shell, and the second pressing plate is detachably connected to one side of the second end of the shell, and a through hole is provided in the middle of the first pressing plate and the second pressing plate;
[0010] A first optical window sheet and a second optical window sheet, the inner wall of the housing has a raised portion for embedding the first optical window sheet and the second optical window sheet; one side of the first optical window sheet abuts against the side of the raised portion of the housing toward the first end, and the other side is pressed by the first pressing plate located at the first end; one side of the second optical window sheet abuts against the side of the raised portion of the housing toward the second end, and the other side is pressed by the second pressing plate located at the second end, so that a sealed cavity is formed between the first optical window sheet and the second optical window sheet in the housing;
[0011] a first optical fiber and a second optical fiber, wherein the first optical fiber is connected to a through hole of the first pressing plate at a first end and inputs light toward a preset position of the cavity, and the second optical fiber is connected to a through hole of the second pressing plate at a second end and is used to receive light in the cavity and transmit it to an analyzer;
[0012] Wherein, a liquid inlet and a liquid outlet are provided at a position of the housing avoiding the first optical window sheet and the second optical window sheet.
[0013] Furthermore, it also includes an optical path device, which is arranged in the inner cavity and is arranged in contact with the inner wall surface of the shell.
[0014] Furthermore, the optical path member is made of the same material as the first optical window sheet and the second optical window sheet, and is clamped and fixed by the first optical window sheet and the second optical window sheet.
[0015] Furthermore, the material of the first optical window, the second optical window and the optical path tool is set to be quartz or sapphire.
[0016] Furthermore, it also includes a first collimation assembly and a second collimation assembly, wherein the first collimation assembly is connected to a through hole of the first pressing plate located at one side of the first end, and the second collimation assembly is connected to a through hole of the second pressing plate located at one side of the second end, and the first collimation assembly and the second collimation assembly are arranged opposite to each other;
[0017] When the first optical fiber located at the first end side inputs light, the light passes through the collimating component located at the first end side and is collimated, so that the light passes through the cavity in parallel, and then passes through the collimating component located at the second end side and converges to the second optical fiber located at the second end side;
[0018] Alternatively, when the first optical fiber located on the first end side inputs light, the light passes through the collimating component located on the first end side and is converged, so that the focus of the light is located at the center point of the cavity, and then passes through the collimating component located on the second end side and is converged to the second optical fiber located on the second end side.
[0019] Furthermore, the shell is made of polytetrafluoroethylene.
[0020] Furthermore, the first pressing plate has a first boss protruding along the direction of the first optical window piece, and the top surface of the first boss is in conflict with the first optical window piece, so that an annular space for setting a sealing ring is left between the first pressing plate and the first optical window piece; the second pressing plate has a second boss protruding along the direction of the second optical window piece, and the top surface of the second boss is in conflict with the second optical window piece, so that an annular space for setting a sealing ring is left between the second pressing plate and the second optical window piece.
[0021] Furthermore, the side walls of the first boss and the second boss are inclined walls.
[0022] Furthermore, the sealing ring is made of polytetrafluoroethylene.
[0023] Furthermore, the liquid inlet and the liquid outlet are connected to a peristaltic pump, and when the light passes through the cavity, the peristaltic pump updates the liquid to be tested in the cavity in real time.
[0024] By means of the above technical solution, the beneficial effects of the present invention are as follows:
[0025] 1. The corrosion-resistant optical measuring cell of the present invention can clamp the optical window in the cavity of the shell by cooperating with the protrusion of the shell through a detachable pressing plate, so that the optical windows before and after the optical path are modular and detachable structures, and the optical windows can be processed separately, which indirectly ensures the processing quality of the optical window itself, and at the same time reduces the performance difference between multiple optical windows in the same batch, shortens the processing cycle, and reduces the cost. Since it is processed separately, the optical window will not be limited by the processing material, avoiding the negative impact caused by the immature sintering and bonding process when materials such as sapphire are used as the substrate.
[0026] 2. The corrosion-resistant optical measuring cell of the present invention further includes a sealing ring between the pressing plate and the optical window, and the sealing ring is arranged on the inclined wall of the pressing plate boss, so that the pressing plate and the optical window are completely isolated, and the sealing of the cavity is significantly improved. BRIEF DESCRIPTION OF THE DRAWINGS
[0027] In order to more clearly illustrate the embodiments of this specification or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this specification. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.
[0028] Figure 1It is an axonometric exploded schematic diagram of a corrosion-resistant optical measuring cell provided in an embodiment of this specification;
[0029] Figure 2 It is a vertical cross-sectional schematic diagram of a corrosion-resistant optical measurement cell provided in an embodiment of this specification;
[0030] Figure 3 It is a horizontal cross-sectional schematic diagram of a corrosion-resistant optical measuring cell provided in an embodiment of this specification;
[0031] In the figure: 1. outer shell; 11. raised portion; 12. liquid inlet; 13. liquid outlet; 21. first pressure plate; 211. first boss; 22. second pressure plate; 221. second boss; 31. first optical window; 32. second optical window; 41. first optical fiber; 42. second optical fiber; 5. optical path device; 61. first collimation component; 62. second collimation component; 7. sealing ring. DETAILED DESCRIPTION
[0032] In order to enable those skilled in the art to better understand the technical solutions in this specification, the technical solutions in the embodiments of this specification will be clearly and completely described below in conjunction with the drawings in the embodiments of this specification. Obviously, the described embodiments are only part of the embodiments of this specification, not all of the embodiments. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of this specification.
[0033] In the description of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "upper", "middle", "lower", "inner", "outer", "front", "back", etc. are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. The terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. The following describes an implementation method of the present invention based on its overall structure.
[0034] See also Figure 1-3 , is a corrosion-resistant optical measuring cell of this embodiment; wherein the corrosion-resistant optical measuring cell comprises:
[0035] A housing 1 having a first end and a second end oppositely disposed;
[0036] A first pressing plate 21 and a second pressing plate 22, wherein the first pressing plate 21 is detachably connected to one side of the first end of the housing 1, and the second pressing plate 22 is detachably connected to one side of the second end of the housing 1, and a through hole is provided in the middle of the first pressing plate 21 and the second pressing plate 22;
[0037] The first optical window sheet 31 and the second optical window sheet 32 are provided on the inner wall of the housing 1 with a raised portion 11 for embedding the first optical window sheet 31 and the second optical window sheet 32; one side of the first optical window sheet 31 contacts one side of the first end of the raised portion 11 of the housing 1, and the other side is pressed by the first pressing plate 21 located at the first end; one side of the second optical window sheet 32 contacts one side of the second end of the raised portion 11 of the housing, and the other side is pressed by the pressing plate 22 located at the second end, so that a sealed cavity is formed between the first optical window sheet 31 and the second optical window sheet 32 in the housing 1;
[0038] A first optical fiber 41 and a second optical fiber 42, wherein the first optical fiber 41 is connected to the through hole 21 of the pressing plate 21 at the first end and inputs light toward a preset position of the cavity, and the second optical fiber 42 is connected to the through hole of the second pressing plate 22 at the second end and is used to receive light in the cavity and transmit it to the analyzer;
[0039] The housing 1 is provided with a liquid inlet 12 and a liquid outlet 13 at a position avoiding the first optical window sheet 31 and the second optical window sheet 32 .
[0040] For the above structure, during installation, first prepare a shell 1 of a preset size, wherein the shell 1 is similar to a hollow tubular structure, the second end and the first end of the shell 1 have an open and interlinked inner cavity, the outer shell 1 is a solid body that can be used for sealing, and the outer shell is also provided with a liquid inlet 12 and a liquid outlet 13. Then, the first optical window 31 and the second optical window 32 are inserted into the inner cavity of the center of the shell 1 along the first end and the second end of the shell 1, respectively, so that the first optical window 31 and the second optical window 32 are in contact with the raised portion 11 in the inner cavity of the shell 1 from the first end and the second end, respectively. Then, in the same way, the first pressing plate 21 and the second pressing plate 22 are respectively covered along the first end and the second end of the shell 1 toward the inner cavity direction of the center of the shell 1, and the first pressing plate 21 and the second pressing plate 22 are respectively fixed, so that the two sides of the shell 1 are detachably fixed to the first pressing plate 21 and the second pressing plate 22, wherein the first pressing plate 21, the second pressing plate 22, the first optical window sheet 31, and the second optical window sheet 32 have a preset thickness, so that the first optical window sheet 31 and the second optical window sheet 32 are just clamped between the first pressing plate 21 or the second pressing plate 22 at the corresponding position and the raised portion 11 of the shell 1, so that a completely sealed cavity is formed between the first optical window sheet 31 and the second optical window sheet 32 with the help of the shell 1. Finally, the first optical fiber 41 for inputting light is connected to one side of the first pressing plate 21 installed at the first end of the housing 1, so that the output port of the first optical fiber 41 here is connected to the through hole of the first pressing plate 21 and is set toward the corresponding position of the cavity. At the same time, the second optical fiber 42 for outputting light to the detection device is connected to one side of the second pressing plate 22 installed at the second end of the housing 1, so that the input port of the second optical fiber 42 here is connected to the through hole of the second pressing plate 22, and the end of the second optical fiber 42 here away from the cavity is connected to the corresponding device. At this point, the installation is completed.
[0041] Through the above structure, when in use, first connect the liquid inlet 12 and the liquid outlet 13 of the housing 1 to the external pump body, and pour the liquid to be tested into the cavity of the housing 1 through the pump body through the liquid inlet 12. After the liquid to be tested is filled, part of the liquid to be tested flows back to the pump body from the liquid outlet 13 of the cavity, and continues to circulate, so that in the subsequent test process, the liquid to be tested in the cavity of the housing 1 is always in a state of circulating flow. Then, the operator only needs to input light from the first optical fiber 41 located on one side of the first end to the housing 1, and the light starts from the first optical fiber 41 and passes through the through hole of the first pressing plate 21 located on one side of the first end, and irradiates to the designated position in the cavity of the housing 1. After the guided light passes through the liquid to be tested in the inner cavity, it is emitted to the second optical fiber 42 located on one side of the second end, so that the light filtered by the liquid to be tested in the housing 1 is transmitted by the second optical fiber 42 located on one side of the second end to the test equipment for testing the filtered light far away from the side of the housing 1, and is analyzed by the above equipment. At this point, the entire practical process of this embodiment is completed.
[0042] After the above use, if the test conditions need to be changed, that is, if the travel of the light in the inner cavity of the housing 1 or the optical filtering conditions need to be changed, it is only necessary to disassemble the first optical fiber 41 and the second optical fiber 42, and then disassemble the first pressing plate 21 and the second pressing plate 22 on both sides of the second end and the first end of the housing 1, so as to further replace the first optical window 31 and the second optical window 32, or even the entire housing 1 body, to meet the corresponding test environment requirements. That is to say, through the modular design in this embodiment, compared with the prior art, only the independent first optical window 31 and the second optical window 32 can be replaced, which is more efficient, and the test cost can be significantly reduced under the condition of multi-scenario use or long-term use, and only the first optical window 31 and the second optical window 32 with lower cost, smaller volume and easier processing need to be replaced. Similarly, due to the detachable structure of the first optical window 31 and the second optical window 32, the first optical window 31 and the second optical window 32 bodies can be made to a more unified standard to meet a higher degree of standardization under conditions of long-term use, thereby avoiding the disadvantages of the optical measuring cell with an integrated structure in the prior art that before and after replacement, the production process requirements are higher and the standards are difficult to unify, which affects the test results.
[0043] Furthermore, if Figure 1 As shown, in this embodiment, the shell 1 is set as a regular rectangular body made of polytetrafluoroethylene, and a cylindrical cavity is set in the middle position of the rectangular body, which can also be processed into a special-shaped functional cavity to reduce the generation of bubbles and turbulence in the cavity. The four corners of the cavity are provided with first fixing holes for fixing the first pressing plate 21 and the second pressing plate 22. Specifically, the first fixing hole can be an internal threaded hole or a buckle, and the first pressing plate 21 and the second pressing plate 22 are provided with a second fixing hole that matches the position and size of the first fixing hole. In addition, it also includes a fastener matching the first fixing hole and the second fixing hole, and one end of the fastener has an external thread structure or a buckle structure matching the first fixing hole, and the fastener is fastened. The other end of the component has a nut whose size is larger than the second fixing hole. After the first pressing plate 21 and the second pressing plate 22 are placed at corresponding positions on both sides of the shell 1, the first fixing hole position and the second fixing hole are aligned, and the fastener is passed through the first fixing hole position and the second fixing hole, so that the fastener is threaded or clamped with the first fixing hole. The first pressing plate 21 and the second pressing plate 22 are tightly fixed on both sides of the shell 1 at corresponding positions. The first pressing plate 21 and the second pressing plate 22 are tightly in conflict with the first optical window sheet 31 or the second optical window sheet 32 at the corresponding position, and with the cooperation of the inner side protrusion 11 of the shell 1, the first optical window sheet 31 and the second optical window sheet 32 are clamped.
[0044] The raised portion 11 is configured as a ring-shaped structure raised in the middle of the cavity of the housing 1, and as shown in FIG. Figure 2 As shown, there are two depressions at the connection between the protrusion 11 and the inner wall of the housing 1, so that the protrusion 11 is easy to be formed by turning.
[0045] Furthermore, if Figure 1 and Figure 3 As shown, an optical path device 5 is also included, which is arranged in the inner cavity and is arranged in contact with the inner wall surface of the housing 1. At the same time, the material of the optical path device 5 is the same as that of the first optical window 31 and the second optical window 32, and is clamped and fixed by the first optical window 31 and the second optical window 32. Specifically, in the present embodiment, the outer shell is configured to be made of polytetrafluoroethylene (PTFE) material, which has strong corrosion resistance to most chemicals, is resistant to acids, alkalis, strong oxidants and various organic solvents, and has strong insulation properties, and is suitable for the detection environment of the optical measurement cell of the present embodiment. However, polytetrafluoroethylene is susceptible to thermal expansion under the influence of temperature. The purpose of the optical path device 5 is to clamp itself tightly between the first optical window 31 and the second optical window 32, and the material is the same as the first optical window 31 and the second optical window 32, both of which are configured to be quartz or sapphire materials that are not easily affected by temperature, and the number of the optical path devices 5 is configured to be a plurality of directions that are not parallel to the first optical window 31 and the second optical window 32, so that an inner cavity for accommodating the liquid to be measured that is not easily affected by the thermal expansion of the outer shell 1 is formed between the first optical window 31 and the second optical window 32 and the optical path device 5, thereby avoiding the influence of the thermal expansion of the outer shell 1 itself made of polytetrafluoroethylene on the detection accuracy.
[0046] It is worth noting that in this embodiment, Figure 1 As shown, the optical path device 5 is configured as two sheet structures that are mirror images of each other, configured as a regular rectangular geometric body, and the two optical path devices 5 are arranged in a direction that avoids the liquid inlet 12 and the liquid outlet 13. When installing the optical path device 5, the optical path device 5 is first bonded to the top position of the raised portion 11 inside the housing 1, and then the first optical window 31 and the second optical window 32 are installed, and the optical path device 5 is clamped by fixing the first optical window 31 and the second optical window 32.
[0047] Furthermore, it also includes a first collimation component 61 and a second collimation component 62, wherein the first collimation component 61 is connected to the through hole of the first pressure plate 21 located at one side of the first end, and the second collimation component 2 is connected to the through hole of the second pressure plate 22 located at one side of the second end, and the first collimation component 61 and the second collimation component 62 are arranged opposite to each other; wherein, when the first optical fiber 41 located at one side of the first end inputs light, the light penetrates the first collimation component 61 located at one side of the first end and is collimated, so that the light passes through the cavity in parallel, and then penetrates the second collimation component 62 located at one side of the second end and converges to the second optical fiber 42 located at one side of the second end. In the above process, the liquid to be tested is collimated by the first collimation component 61 from one side of the first end and then enters the parallel pipeline that crosses the cavity of the housing 1, and then the parallel light is coupled into the second optical fiber 42 at the second end, forming a complete collection optical path system.
[0048] In another embodiment, when the first optical fiber 41 located at one side of the first end inputs light, the light passes through the first collimating component 61 located at one side of the first end and is converged, so that the light converges to the center point of the cavity, and then passes through the second collimating component 62 located at one side of the second end and converges to the second optical fiber 42 located at one side of the second end. In the above process, a pair of converging mirrors are formed between the first collimating component 61 and the second collimating component 62, forming a symmetrical liquid measurement optical path.
[0049] To switch between the above two optical path modes, it is only necessary to directly replace the first collimation component 61 or the second collimation component 62 installed outside the first pressure plate 21 or the second pressure plate 22. The fixing method of the first collimation component 61 or the second collimation component 62 can be selectively embedded in the through hole of the first pressure plate 21 or the second pressure plate 22, which is achieved by the modular design of the present invention, and has a simple structure and is easy to maintain.
[0050] Furthermore, if Figure 2 As shown, the first pressing plate 21 has a first boss 211 protruding in the direction of the first optical window sheet 31, and the top surface of the first boss 211 conflicts with the first optical window sheet 31, so that an annular space is given between the first pressing plate 21 and the first optical window sheet 31, and a sealing ring 7 is provided in the annular space. Similarly, the second pressing plate 22 and the second optical window sheet 32 are also provided with the same second boss 221 and sealing ring 7 structure. At the same time, the side walls of the first boss 211 and the second boss 221 are inclined walls, and the two sealing rings 7 conflict with the inclined walls of the first boss 211 or the second boss 221 respectively. Specifically, the sealing ring 7 is set to the same polytetrafluoroethylene material as the housing 1, and its purpose is to achieve a better sealing effect through the better insulation and certain elasticity of the polytetrafluoroethylene material itself, so as to prevent the liquid to be tested between the first optical window sheet 31 and the second optical window sheet 32 of the cavity from flowing out to the outside of the housing 1, and to avoid accidental structural damage caused by liquid seepage.
[0051] Furthermore, the liquid inlet 12 and the liquid outlet 13 are connected to a peristaltic pump. When the light passes through the cavity, the peristaltic pump updates the test liquid in the cavity in real time. Through the above structure, the peristaltic pump is connected to a flexible pipe structure, which can provide accurate and repeatable flow control and improve the accuracy of quantitative analysis and experiments.
[0052] Although different specific embodiments are mentioned in the content of this application, this application is not limited to the situations described in the industry standards or embodiments, etc. Some industry standards or slightly modified implementation plans based on the implementation of the custom methods or embodiments can also achieve the same, equivalent or similar, or predictable implementation effects after deformation of the above embodiments. The embodiments of data acquisition, processing, output, judgment methods, etc. after these modifications or deformations can still fall within the scope of the optional implementation plans of this application.
[0053] Although the present application has been described through embodiments, those skilled in the art will appreciate that there are many modifications and changes to the present application without departing from the spirit of the present application. It is intended that the attached embodiments include these modifications and changes without departing from the present application.
Claims
1. A corrosion-resistant optical measuring cell; characterized in that, The corrosion-resistant optical measuring cell comprises: a housing having a first end and a second end disposed opposite to each other; A first pressing plate and a second pressing plate, wherein the first pressing plate is detachably connected to one side of the first end of the shell, and the second pressing plate is detachably connected to one side of the second end of the shell, and a through hole is provided in the middle of the first pressing plate and the second pressing plate; A first optical window sheet and a second optical window sheet, the inner wall of the housing has a raised portion for embedding the first optical window sheet and the second optical window sheet; one side of the first optical window sheet abuts against the side of the raised portion of the housing toward the first end, and the other side is pressed by the first pressing plate located at the first end; one side of the second optical window sheet abuts against the side of the raised portion of the housing toward the second end, and the other side is pressed by the second pressing plate located at the second end, so that a sealed cavity is formed between the first optical window sheet and the second optical window sheet in the housing; a first optical fiber and a second optical fiber, wherein the first optical fiber is connected to a through hole of the first pressing plate at a first end and inputs light toward a preset position of the cavity, and the second optical fiber is connected to a through hole of the second pressing plate at a second end and is used to receive light in the cavity and transmit it to an analyzer; Wherein, a liquid inlet and a liquid outlet are provided at a position of the housing avoiding the first optical window sheet and the second optical window sheet.
2. The corrosion-resistant optical measuring cell according to claim 1, characterized in that: It also includes an optical path device, which is arranged in the inner cavity and is arranged in contact with the inner wall surface of the shell.
3. The corrosion-resistant optical measuring cell according to claim 2, characterized in that: The optical path member is made of the same material as the first optical window sheet and the second optical window sheet, and is clamped and fixed by the first optical window sheet and the second optical window sheet.
4. The corrosion-resistant optical measuring cell according to claim 3, characterized in that: The first optical window, the second optical window and the optical path are made of quartz or sapphire.
5. The corrosion-resistant optical measuring cell according to claim 1, characterized in that: Also includes a first collimation assembly and a second collimation assembly, wherein the first collimation assembly is connected to a through hole of the first pressing plate located at one side of the first end, and the second collimation assembly is connected to a through hole of the second pressing plate located at one side of the second end, and the first collimation assembly and the second collimation assembly are arranged opposite to each other; When the first optical fiber located at the first end side inputs light, the light passes through the collimating component located at the first end side and is collimated, so that the light passes through the cavity in parallel, and then passes through the collimating component located at the second end side and converges to the second optical fiber located at the second end side; Alternatively, when the first optical fiber located on the first end side inputs light, the light passes through the collimating component located on the first end side and is converged, so that the focus of the light is located at the center point of the cavity, and then passes through the collimating component located on the second end side and is converged to the second optical fiber located on the second end side.
6. The corrosion-resistant optical measuring cell according to claim 1, characterized in that: The shell is made of polytetrafluoroethylene.
7. The corrosion-resistant optical measuring cell according to claim 1, characterized in that: The first pressing plate has a first boss protruding along the direction of the first optical window piece, and the top surface of the first boss is in conflict with the first optical window piece, so that an annular space for setting a sealing ring is left between the first pressing plate and the first optical window piece; the second pressing plate has a second boss protruding along the direction of the second optical window piece, and the top surface of the second boss is in conflict with the second optical window piece, so that an annular space for setting a sealing ring is left between the second pressing plate and the second optical window piece.
8. The corrosion-resistant optical measuring cell according to claim 7, characterized in that: The side walls of the first boss and the second boss are inclined walls.
9. The corrosion-resistant optical measuring cell according to claim 8, characterized in that: The sealing ring is made of polytetrafluoroethylene.
10. The corrosion-resistant optical measuring cell according to claim 1, characterized in that: The liquid inlet and the liquid outlet are connected to a peristaltic pump. When the light passes through the cavity, the peristaltic pump updates the liquid to be tested in the cavity in real time.
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