Self-adaptive flexible chip test seat
By introducing a movable support frame and spring structure into the chip test seat, the reference conversion and smooth fit of the upper and lower test seats are achieved, which solves the problem of uneven fitting and improves the consistency of test data and probe life.
Patent Information
- Application Number
- CN202310661566.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-06-06
- Publication Date
- 2024-12-13
AI Technical Summary
The existing chip test seats are prone to uneven fitting after the upper and lower test seats are closed, resulting in uneven contact resistance between the test probe and the chip test area, affecting the consistency of the test data and the life of the probe.
An adaptive flexible chip test seat is designed to achieve a flat fit through reference conversion between the upper and lower test seats. The movable support frame and spring structure absorb slight offsets in the mold-closed state to ensure the test. The contact resistance between the pin and the chip pad area is consistent.
Through reference conversion and the clamping pressure provided by the spring, the tight and flat fit of the upper and lower test seats is achieved, which improves the consistency of the test data and avoids ignition and pin ablation problems caused by poor contact.
Smart Images
Figure CN119125612A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to an adaptive flexible chip test seat, belonging to the technical field of semiconductor chip testing. Background Art
[0002] In the chip testing industry, the chip test socket is an indispensable tool for testing chips. It is mainly used to install chips and make the chip and the test device physically connect the electrical signals. Generally speaking, the chip test socket includes a base and a spring probe arranged on the base. The electrical connection of the chip can be achieved by contacting the spring probe with the chip to complete the relevant test screening.
[0003] In the prior art, after the upper and lower test sockets are molded together, uneven fitting easily occurs, resulting in uneven contact resistance between the test probes and the chip test area, affecting the consistency of the test data and the life of the test probes. Summary of the invention
[0004] The purpose of the present invention is to provide an adaptive flexible chip test seat, which realizes a smooth fit between the upper and lower test seats after mold closing through a reference conversion between the upper and lower test seats, thereby ensuring the consistency of the contact resistance of each test pin and improving the consistency of the test data.
[0005] To achieve the above-mentioned purpose, the technical solution adopted by the present invention is: an adaptive flexible chip test seat, comprising: an upper test seat and a lower test seat arranged directly below the upper test seat, the upper test seat and the lower test seat can move relative to each other in the vertical direction, a groove is provided on the lower surface of the upper test seat and / or the upper surface of the lower test seat, so that a accommodating chamber for placing the chip to be tested is formed between the upper test seat and the lower test seat in the mold closing state, the upper test seat is connected to a support frame that can move in the vertical direction through a mounting plate arranged above it, the upper surface of the support frame is provided with a strip through hole, the lower parts of the two opposite inner walls of the strip through hole each have a first convex strip, the upper parts of the two opposite side surfaces of the mounting plate each have a second convex strip correspondingly extending to directly above the first convex strip, and a strip block is provided above each of the second convex strips, one side of the strip block is fixedly connected to the upper surface of the support frame, and the other side extends to directly above the second convex strip and is connected to the second convex strip through at least two springs; When the upper test seat and the lower test seat are in the mold opening state, the lower surface of the second convex strip is in overlapping contact with the upper surface of the corresponding first convex strip; When the upper test seat and the lower test seat are in a mold closing test state, the lower surface of the upper test seat is tightly fitted with the upper surface of the lower test seat and a gap is formed between the lower surface of the second convex strip and the upper surface of the first convex strip.
[0006] The further improved scheme in the above technical scheme is as follows: 1. In the above solution, each of the second convex strips is connected to the strip block via 4 to 8 springs that are evenly spaced along the length direction thereof.
[0007] 2. In the above solution, a mounting groove for the end of the spring to be embedded is provided on the upper surface of the second convex strip and / or the lower surface of the strip block.
[0008] 3. In the above solution, the strip-shaped through hole is opened on the horizontal part of the support frame, and the vertical part of the support frame is installed on one side surface of a vertically arranged installation base plate through at least two sets of vertical guide rails and vertical sliders that cooperate with each other.
[0009] 4. In the above solution, the horizontal portion of the support frame is located at the upper end of the vertical portion and extends to the other side of the mounting substrate.
[0010] 5. In the above scheme, a horizontal base is installed on the other side surface of the mounting substrate and below the horizontal part of the support frame, and two horizontal guide rails are installed in parallel and at intervals on the upper surface of the horizontal base. The lower surface of a movable plate is connected to each horizontal guide rail through at least two horizontal sliders, and the lower test seat is installed on the movable plate.
[0011] 6. In the above solution, a bidirectional slide is installed on the upper surface of the movable plate, and the lower test seat is installed on the movable part of the bidirectional slide on the side opposite to the movable plate.
[0012] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art: The present invention provides an adaptive flexible chip test seat, wherein the upper test seat is connected to a support frame movable in a vertical direction through a mounting plate arranged above the upper test seat, a strip through hole is provided on the upper surface of the support frame, and the lower parts of the two opposite inner walls of the strip through hole each have a first convex strip, and the upper parts of the two opposite side surfaces of the mounting plate each have a second convex strip correspondingly extending to the top of the first convex strip, and a strip block is provided above each second convex strip, one side of the strip block is fixedly connected to the upper surface of the support frame, and the other side extends to the top of the second convex strip and is connected to the second convex strip through at least two springs, when the upper test seat and the lower test seat are in a mold opening state, The lower surface of the second convex strip is in overlapping contact with the upper surface of the corresponding first convex strip. When the upper test seat and the lower test seat are in a mold closing test state, the lower surface of the upper test seat is tightly attached to the upper surface of the lower test seat and a gap is formed between the lower surface of the second convex strip and the upper surface of the first convex strip. After the upper and lower test seats are molded, the horizontal plane reference of the upper test seat can be transferred to the lower test seat, and the spring can absorb a small offset while continuously providing mold closing pressure, thereby ensuring a smooth fit between the upper and lower test seats, and ensuring the consistency of the contact resistance between each test pin and the corresponding pad area on the chip, thereby improving the consistency of the test data. BRIEF DESCRIPTION OF THE DRAWINGS
[0013] Attached Figure 1 It is a schematic diagram of the overall structure of the adaptive flexible chip test seat of the present invention; Attached Figure 2 The local structure of the adaptive flexible chip test seat of the present invention is shown in FIG. Figure 1 ; Attached Figure 3 For attachment Figure 2 The enlarged schematic diagram of point A in the middle; Attached Figure 4 For attachment Figure 2 Schematic diagram of the cross section along BB; Attached Figure 5 For attachment Figure 4 The enlarged schematic diagram of the center C; Attached Figure 6 The local structure of the adaptive flexible chip test seat of the present invention is shown in FIG. Figure 2 ; Attached Figure 7 It is a schematic diagram of an upper test socket of the adaptive flexible chip test socket of the present invention; Attached Figure 8 The local structure of the adaptive flexible chip test seat of the present invention is shown in FIG. Figure 3 ; Attached Fig. 9 For attachment Figure 8 Schematic diagram of the cross section along DD; Attached Fig.10It is a schematic diagram of the film-closed state of the adaptive flexible chip test seat of the present invention; Attached Fig.11 For attachment Fig.10 Enlarged schematic diagram of point E in the middle.
[0014] In the above drawings: 100, chip to be tested; 1, support frame; 101, vertical part; 102, horizontal part; 2, movable plate; 3, upper test seat; 4, lower test seat; 5, mounting plate; 6, strip through hole; 71, first convex strip; 72, second convex strip; 8, strip block; 9, spring; 10, gap; 11, mounting groove; 12, accommodating compartment; 13, mounting base plate; 14, vertical guide rail; 15, vertical slider; 16, groove; 171, limit convex block; 172, avoidance groove; 18, horizontal base; 19, horizontal guide rail; 20, horizontal slider; 21, bidirectional slide. Implementation
[0015] The present invention can be further understood through the specific embodiments given below, but they are not intended to limit the present invention.
[0016] Embodiment 1: A chip test seat, comprising: an upper test seat 3 and a lower test seat 4 arranged directly below the upper test seat 3, wherein the upper test seat 3 and the lower test seat 4 can move relative to each other in the vertical direction, and a groove 16 is provided on the lower surface of the upper test seat 3 and the upper surface of the lower test seat 4, so that a receiving chamber 12 for placing a chip to be tested 100 is formed between the upper test seat 3 and the lower test seat 4 in the mold closing state, and the upper test seat 3 is connected to the upper test seat 3 by a mounting plate 5 arranged above it and a support frame that can move in the vertical direction. 1, a strip through hole 6 is opened on the upper surface of the support frame 1, and the lower parts of the two opposite inner walls of the strip through hole 6 each have a first convex strip 71, and the upper parts of the two opposite side surfaces of the mounting plate 5 each have a second convex strip 72 correspondingly extending to the top of the first convex strip 71, and a strip block 8 is arranged above each of the second convex strips 72, one side of the strip block 8 is fixedly connected to the upper surface of the support frame 1, and the other side extends to the top of the second convex strip 72 and is connected to the second convex strip 72 through at least two springs 9; When the upper test seat 3 and the lower test seat 4 are in the mold opening state, the lower surface of the second convex strip 72 overlaps and contacts with the upper surface of the corresponding first convex strip 71; When the upper test seat 3 and the lower test seat 4 are in the mold closing test state, the lower surface of the upper test seat 3 and the upper surface of the lower test seat 4 are tightly fitted and a gap 10 is formed between the lower surface of the second convex strip 72 and the upper surface of the first convex strip 71; The upper test seat installed on the mounting plate continues to move downward with the support frame and is subjected to an upward reaction force from the lower test seat. Under the action of the reaction force, the two second convex strips on the mounting plate separate upward from the first convex strips on the support frame, thereby forming a gap between the second convex strips and the first convex strips, and the spring continuously applies a downward pressure to the two second convex strips on the mounting plate as a mold closing pressure. At this time, the upper test seat installed on the mounting plate is in a floating state.
[0017] Each of the second convex strips 72 is connected to the strip block 8 via five springs 9 which are arranged at equal intervals along the length direction thereof.
[0018] The upper surface of the second protruding strip 72 and the lower surface of the strip block 8 are each provided with a mounting groove 11 for the end of the spring 9 to be embedded.
[0019] The strip-shaped through hole 6 is opened on the horizontal portion 102 of the support frame 1 , and the vertical portion 101 of the support frame 1 is installed on a side surface of a vertically arranged mounting base plate 31 through at least two sets of vertical guide rails 32 and vertical sliders 33 that cooperate with each other.
[0020] A horizontal base 34 is installed on the other side surface of the mounting substrate 31 and below the horizontal portion 102 of the support frame 1. Two horizontal guide rails 35 are installed in parallel and at intervals on the upper surface of the horizontal base 34. The lower surface of a movable plate 2 is connected to each horizontal guide rail 35 via at least two horizontal sliders 36. The lower test seat 4 is installed on the movable plate 2. Move the movable plate to the loading and unloading station at one end of the horizontal base away from the mounting substrate to facilitate the placement and loading of the chip; The chip to be tested is placed in a designated area on the lower test seat above the movable plate, that is, above the test pins, through the loading mechanism, and multiple test pins are made to correspond one by one to the pad areas on the chip to be tested; Then, the movable plate is pushed to move along the horizontal guide rail toward the mounting base plate by a horizontal driving component (such as a motor, a lead screw or a cylinder) until the lower test seat is moved to the test station directly below the upper test seat.
[0021] A bidirectional slide 39 is installed on the upper surface of the movable plate 2 , and the lower test seat 4 is installed on the movable portion of the bidirectional slide 39 opposite to the movable plate 2 .
[0022] Embodiment 2: An adaptive flexible chip test seat, comprising: an upper test seat 3 and a lower test seat 4 arranged directly below the upper test seat 3, wherein the upper test seat 3 and the lower test seat 4 can move relative to each other in the vertical direction, and a groove 16 is provided on the upper surface of the lower test seat 4, so that a receiving chamber 12 for placing a chip to be tested 100 is formed between the upper test seat 3 and the lower test seat 4 in the mold closing state, and the upper test seat 3 is connected to a support frame 1 that can move in the vertical direction through a mounting plate 5 arranged above it. Next, a strip through hole 6 is opened on the upper surface of the support frame 1, and the lower parts of the two opposite inner walls of the strip through hole 6 each have a first convex strip 71, and the upper parts of the two opposite side surfaces of the mounting plate 5 each have a second convex strip 72 correspondingly extending to the top of the first convex strip 71, and a strip block 8 is arranged above each of the second convex strips 72, one side of the strip block 8 is fixedly connected to the upper surface of the support frame 1, and the other side extends to the top of the second convex strip 72 and is connected to the second convex strip 72 through at least two springs 9; The lower surface of the upper test seat that moves downward with the support frame first contacts the upper surface of the lower test seat, but there is still a slight deviation, so that the upper and lower test seats cannot be completely fitted together, thus realizing the conversion of the plane reference of the upper test seat from the support frame to the lower test seat, and the slight deviation on the horizontal plane can be absorbed and balanced by the spring, thereby realizing a tight and flat fit between the upper and lower test seats; When the upper test seat 3 and the lower test seat 4 are in the mold opening state, the lower surface of the second convex strip 72 overlaps and contacts with the upper surface of the corresponding first convex strip 71; When the upper test seat 3 and the lower test seat 4 are in the mold closing test state, the lower surface of the upper test seat 3 and the upper surface of the lower test seat 4 are tightly fitted and a gap 10 is formed between the lower surface of the second convex strip 72 and the upper surface of the first convex strip 71 .
[0023] Each of the second convex strips 72 is connected to the strip block 8 via six springs 9 which are arranged at equal intervals along the length direction thereof.
[0024] The upper surface of the second convex strip 72 is provided with a mounting groove 11 for the end of the spring 9 to be embedded.
[0025] The strip-shaped through hole 6 is opened on the horizontal portion 102 of the support frame 1 , and the vertical portion 101 of the support frame 1 is installed on a side surface of a vertically arranged mounting base plate 31 through at least two sets of vertical guide rails 32 and vertical sliders 33 that cooperate with each other.
[0026] The horizontal portion 102 of the support frame 1 is located at the upper end of the vertical portion 101 and extends toward the other side of the mounting substrate 31 .
[0027] The groove 16 is formed on the lower surface of the upper test seat 3 .
[0028] A limiting protrusion 171 is disposed on the upper surface of the lower test seat 4 and directly below the four corners of the groove 16 , and a avoiding groove 172 for the limiting protrusion 171 to be embedded in is formed on the lower surface of the upper test seat 3 .
[0029] The limiting protrusion 171 is an L-shaped protrusion.
[0030] The four corners of the groove 16 are respectively connected to a avoiding groove 172 .
[0031] The working principle of the present invention is as follows: Move the movable plate to the loading and unloading station at one end of the horizontal base away from the mounting substrate to facilitate the placement and loading of the chip; The chip to be tested is placed on the designated area on the lower test seat above the movable plate through the loading mechanism (i.e., above the test pins, and multiple test pins correspond to the pad areas on the chip to be tested one by one); The movable plate is pushed to move along the horizontal guide rail toward the mounting base plate by a horizontal driving component (such as a motor, a lead screw or a cylinder) until the lower test seat is moved to the test station directly below the upper test seat; The support frame is driven downward by a vertical drive component (such as a motor, a lead screw or a cylinder). During this process: First, the lower surface of the upper test seat that moves downward with the support frame first contacts the upper surface of the lower test seat, but there is still a slight deviation so that the upper and lower test seats cannot be completely fitted together; Next, the upper test seat installed on the mounting plate continues to move downward with the support frame and is subjected to an upward reaction force from the lower test seat. Under the action of the reaction force, the two second convex strips on the mounting plate are separated from the first convex strips on the support frame upward, thereby forming a gap between the second convex strips and the first convex strips, and the spring continuously applies a downward pressure to the two second convex strips on the mounting plate as a mold clamping pressure. At this time, the upper test seat installed on the mounting plate is in a floating state, and the conversion of the upper test seat plane reference from the support frame to the lower test seat is realized, and the slight deviation on the horizontal plane is balanced by the spring, thereby achieving a tight and flat fit between the upper and lower test seats, which can ensure the consistency of the contact resistance of each test pin needle and the corresponding pad area on the chip, thereby improving the consistency of the test data and avoiding sparking and pin needle ablation caused by poor contact under high-voltage environment; After the test is completed, the mold is opened, and the movable plate drives the lower test seat to move back to the loading and unloading station. The chip that has completed the test is then taken away by the unloading mechanism, and the loading mechanism re-inserts the next chip to be tested.
[0032] When the above-mentioned adaptive flexible chip test seat is used, after the upper and lower test seats are molded, the horizontal plane reference of the upper test seat can be transferred to the lower test seat, and the spring can absorb slight offsets while continuously providing mold pressure, thereby ensuring a smooth fit between the upper and lower test seats, and ensuring the consistency of the contact resistance between each test pin and the corresponding pad area on the chip, thereby improving the consistency of the test data.
[0033] The above embodiments are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with the technology to understand the content of the present invention and implement it accordingly, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.
Claims
1. An adaptive flexible chip test socket, comprising: An upper test seat (3) and a lower test seat (4) arranged directly below the upper test seat (3), the upper test seat (3) and the lower test seat (4) being movable relative to each other in the vertical direction, a groove (16) being provided on the lower surface of the upper test seat (3) and / or the upper surface of the lower test seat (4), so that a receiving chamber (12) for placing a chip to be tested (100) is formed between the upper test seat (3) and the lower test seat (4) in a mold-clamped state, and characterized in that: the upper test seat (3) is connected to a support frame (1) movable in the vertical direction via a mounting plate (5) arranged above the upper test seat (3) The upper surface of the support frame (1) is provided with a strip through hole (6), the lower parts of the two opposite inner walls of the strip through hole (6) each have a first convex strip (71), the upper parts of the two opposite side surfaces of the mounting plate (5) each have a second convex strip (72) correspondingly extending to the top of the first convex strip (71), and a strip block (8) is arranged above each of the second convex strips (72), one side of the strip block (8) is fixedly connected to the upper surface of the support frame (1), and the other side extends to the top of the second convex strip (72) and is connected to the second convex strip (72) through at least two springs (9); When the upper test seat (3) and the lower test seat (4) are in an open mold state, the lower surface of the second convex strip (72) is in overlapping contact with the upper surface of the corresponding first convex strip (71); When the upper test seat (3) and the lower test seat (4) are in a mold-clamping test state, the lower surface of the upper test seat (3) and the upper surface of the lower test seat (4) are tightly fitted, and a gap (10) is formed between the lower surface of the second convex strip (72) and the upper surface of the first convex strip (71).
2. The adaptive flexible chip test socket according to claim 1, characterized in that: Each of the second convex strips (72) is connected to the strip-shaped block (8) via 4 to 8 springs (9) arranged at equal intervals along the length direction thereof.
3. The adaptive flexible chip test socket according to claim 1 or 2, characterized in that: An installation groove (11) for the end of the spring (9) to be embedded is provided on the upper surface of the second convex strip (72) and / or the lower surface of the strip block (8).
4. The adaptive flexible chip test socket according to claim 1, characterized in that: The strip-shaped through hole (6) is opened on the horizontal portion (102) of the support frame (1), and the vertical portion (101) of the support frame (1) is mounted on a side surface of a vertically arranged mounting base plate (31) via at least two sets of mutually cooperating vertical guide rails (32) and vertical slide blocks (33).
5. The adaptive flexible chip test socket according to claim 4, characterized in that: The horizontal portion (102) of the support frame (1) is located at the upper end of the vertical portion (101) and extends towards the other side of the mounting base plate (31).
6. The adaptive flexible chip test socket according to claim 4, characterized in that: A horizontal base (34) is installed on the other side surface of the mounting substrate (31) and below the horizontal portion (102) of the support frame (1); two horizontal guide rails (35) are installed in parallel and at intervals on the upper surface of the horizontal base (34); the lower surface of a movable plate (2) is connected to each horizontal guide rail (35) via at least two horizontal sliders (36); and the lower test seat (4) is installed on the movable plate (2).
7. The adaptive flexible chip test socket according to claim 6, characterized in that: A bidirectional slide table (39) is installed on the upper surface of the movable plate (2), and the lower test seat (4) is installed on a movable portion of the bidirectional slide table (39) on a side opposite to the movable plate (2).