Product sampling inspection method, computer equipment and computer readable storage medium

Through automated product sampling methods, sampling tasks and documents are generated, and the problems of low efficiency and poor accuracy of semiconductor products sampling in the existing technology are solved, systematic management and dynamic adjustment are realized, and product quality control and market competitiveness are improved.

CN119127943APending Publication Date: 2024-12-13BOE TECHNOLOGY GROUP CO LTD +1
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Patent Information

Application Number
CN202411161661.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-08-22
Publication Date
2024-12-13

AI Technical Summary

Technical Problem

The sampling methods of existing semiconductor products are inefficient, have poor accuracy and stability, and lack systematic and standardized management, so it is impossible to dynamically adjust the sampling rules based on product characteristics and process changes.

Method used

Provide a product sampling method. By obtaining product sampling plans, generating sampling tasks and sampling orders, and automatically completing sampling according to product specifications and sampling plans, supporting a variety of sampling rules and trigger conditions, including stations, equipment, work orders and shift dimensions , realize dynamic adjustment and comprehensive monitoring.

Benefits of technology

It improves the efficiency and accuracy of semiconductor product sampling, realizes systematic and standardized management, enhances the control of product quality, reduces production costs, and enhances market competitiveness.

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Abstract

The invention relates to the technical field of semiconductor product manufacturing, particularly provides a product sampling inspection method, computer equipment and a computer readable storage medium, and aims to solve the problem of improving the sampling inspection efficiency and accuracy of products. The method provided by the invention comprises the steps of obtaining a product sampling inspection plan of a to-be-sampled product, wherein the product sampling inspection plan comprises a first product batch sampling rule and a product sampling rule; generating a sampling inspection task according to the product sampling inspection plan and the product specification of the to-be-sampled product; generating a sampling inspection list according to the sampling inspection task, the sampling inspection list comprising a target batch number and a target product number, the target batch number being a number of a target batch obtained by sampling a product batch of the to-be-sampled product according to a first product batch sampling rule, the target product number is the number of a to-be-sampled product obtained by sampling products in a target batch according to a product sampling rule; and carrying out spot check on the to-be-spot-checked product according to the spot check sheet. Based on the method, the product sampling inspection efficiency and accuracy can be effectively improved.
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Description

Technical Field

[0001] The present application relates to the technical field of semiconductor product manufacturing, and in particular to a product sampling method, a computer device, and a computer-readable storage medium. Background Art

[0002] With the continuous development and progress of semiconductor manufacturing technology, the complexity and integration of semiconductor products are increasing, and the quality control requirements in the production process of semiconductor products are becoming more and more stringent. In the production process of semiconductor products, random inspections can be used to achieve product quality control, ensure the quality of semiconductor products, and reduce product defect rates.

[0003] At present, conventional sampling methods include manual sampling and sampling based on MES (Manufacturing Execution System). The manual sampling method is to manually select products for quality inspection based on experience. This method is relatively inefficient and the sampled products are greatly affected by human factors, resulting in poor accuracy and stability of the sampling results. In addition, this method lacks systematic and standardized management, and cannot fully monitor and trace the sampling process. The sampling method based on the MES system is to use the sampling module set in the MES system to extract products for quality inspection. However, the sampling module in the current MES system has a relatively simple function and can only perform fixed-cycle sampling according to the preset sampling rules. It cannot be dynamically adjusted according to factors such as product characteristics and process changes, which affects the efficiency and accuracy of product sampling.

[0004] Accordingly, the art needs a new technical solution to solve the above problems. Summary of the invention

[0005] In order to overcome the above-mentioned defects, the present application is proposed to solve or at least partially solve the technical problem of improving the sampling efficiency and accuracy of semiconductor products.

[0006] In a first aspect, a product sampling method is provided, the method comprising:

[0007] Obtaining a product sampling plan for the product to be sampled, the product sampling plan comprising a first product batch sampling rule and a product sampling rule, the first product batch sampling rule being used to indicate a method for sampling a product batch of the product to be sampled, and the product sampling rule being used to indicate a method for sampling products in the sampled product batch;

[0008] Generating a sampling inspection task for the product to be sampled according to the product sampling inspection plan and the product specifications of the product to be sampled;

[0009] Generate a sampling inspection sheet for the product to be sampled according to the sampling inspection task, the sampling inspection sheet including a target batch number and a target product number, the target batch number being the number of the target batch obtained by sampling the product batch of the product to be sampled according to the first product batch sampling rule, and the target product number being the number of the product to be sampled obtained by sampling the products in the target batch according to the product sampling rule;

[0010] The products to be inspected are inspected according to the inspection list.

[0011] In a technical solution of the above-mentioned product sampling method, the product sampling plan includes a product batch sampling type, and the product batch sampling type is used to indicate a trigger condition for sampling a product batch of the product to be sampled. The generating of the sampling sheet of the product to be sampled according to the sampling task includes:

[0012] In response to the product to be inspected meeting the trigger condition represented by the product batch sampling type, it is determined to trigger the inspection of the product to be inspected, the target batch number and the target product number are obtained according to the first product batch sampling rule and the product sampling rule, respectively, and the inspection order is generated according to the target batch number and the target product number.

[0013] In a technical solution of the above product sampling method, the product batch sampling type includes at least one of a workstation dimension type, an equipment dimension type, a work order dimension type, and a shift dimension type;

[0014] The workstation dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected arrives at a preset processing workstation;

[0015] The equipment dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected arrives at a preset processing equipment;

[0016] The work order dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected belongs to a preset work order;

[0017] The shift dimension type is to trigger a random inspection of the product to be inspected when the product to be inspected is processed by a preset shift.

[0018] In a technical solution of the above-mentioned product sampling inspection method, generating the sampling inspection task of the product to be sampled according to the product sampling inspection plan and the product specifications of the product to be sampled includes: obtaining the processing station of the product to be sampled, and generating the sampling inspection task according to the processing station, the product sampling inspection plan and the product specifications;

[0019] Or, obtain the measurement station of the product to be inspected, and generate the inspection task according to the measurement station, the product inspection plan and the product specifications.

[0020] In a technical solution of the above-mentioned product sampling method, sampling the products to be sampled according to the sampling sheet includes: if it is detected that the products to be sampled have arrived at the processing station or the measuring station, sampling the products to be sampled according to the sampling sheet.

[0021] In a technical solution of the above product sampling method, the first product batch sampling rule includes at least one of a first random number rule, a second random number rule, an odd number rule, an even number rule, an interval number rule, a batch naming rule, and an interval time rule;

[0022] The first random number rule is: randomly sampling the product batches after the preset batch;

[0023] The second random number rule is: random sampling of all product batches;

[0024] The odd number rule is: extract product batches with odd batch numbers;

[0025] The even number rule is: extract product batches with even batch numbers;

[0026] The interval number rule is: extract product batches according to the preset interval value of the batch number;

[0027] The batch naming rule is: extract product batches whose batch names meet the preset conditions;

[0028] The interval time rule is: for each product batch, if the production time interval between the product batch and the previous product batch is greater than a preset time threshold, the product batch is extracted.

[0029] In a technical solution of the above-mentioned product sampling method, the product sampling plan includes a second product batch sampling rule, and the second product batch sampling rule is used to adjust the sampling parameters of the first random number rule or the second random number rule according to the sampling results of the product to be sampled when sampling is performed according to the first random number rule or the second random number rule;

[0030] in,

[0031] The sampling results include qualified quality and unqualified quality, and the sampling parameters include the total number of samples and the sampling number. The total number of samples is the total number of products to be sampled participating in each sampling, and the sampling number is the number of products to be sampled to be drawn for each sampling.

[0032] In a technical solution of the above product sampling method, the second product batch sampling rule includes at least one of a first tightened rule, a second tightened rule, a first relaxed rule, and a second relaxed rule;

[0033] The first tightening rule is: when sampling the first product batch, if the number of consecutive unqualified products is greater than the first number, then when sampling the second product batch, the ratio of the sampling number to the total sampling number is increased, the consecutive unqualified number is the number of unqualified products to be sampled that are continuously sampled, the first product batch is any one of the target batches, and the second product batch is the next target batch after the first product batch;

[0034] The second tightening rule is: when the first batch of products is sampled, if the cumulative number of unqualified products is greater than the second number, then when the second batch of products is sampled, the ratio of the sampling number to the total number of samples is increased, and the cumulative number of unqualified products is the total number of unqualified products to be sampled in the first batch of products;

[0035] The first relaxation rule is: when the first product batch is sampled, if the number of consecutive unqualified products is less than the third number, then when the second product batch is sampled, the ratio of the number of samples to the total number of samples is reduced;

[0036] The second relaxation rule is: when spot checking the first product batch, if the cumulative number of unqualified products is less than the fourth number, then when spot checking the second product batch, the ratio of the sampling number to the total number of samples is reduced.

[0037] In a technical solution of the above product sampling method, the product to be sampled is placed in a slot of a carrier, the carrier includes a plurality of slots and the slots are numbered in ascending order;

[0038] The product sampling rules include a first sampling rule, and the first sampling rule is to sample the products to be inspected in the carrier according to the slot numbers in the carrier.

[0039] In a technical solution of the above product sampling method, the target product number is the first number of the slot where the product to be sampled is located according to the first sampling rule;

[0040] The product sampling rule includes a second sampling rule, wherein when the product to be inspected is inspected according to the inspection form, if the product to be inspected is not detected in the slot with the first number, the slots with the second number are sequentially checked for the product to be inspected, and the first detected product to be inspected is inspected;

[0041] The second number is the slot number remaining in the carrier except the first number.

[0042] In a technical solution of the above product sampling method, the second sampling rule includes at least one of an upward sampling rule, a downward sampling rule, an up-first-down-later sampling rule, a down-first-up-later sampling rule, an up-first-down-later alternating sampling rule, and a down-first-up-later alternating sampling rule;

[0043] The upward sampling rule is: sequentially detect whether there are products to be sampled in the slots with the third number, and sample the first product to be sampled that is detected, and the third number is the slot number in the second number that is arranged after the first number;

[0044] The downward sampling rule is: sequentially detect whether there are products to be sampled in the slots with the fourth number, and sample the first product to be sampled that is detected, and the fourth number is the slot number in the second number that is arranged before the first number;

[0045] The sampling rule of top-to-bottom sampling is: sequentially checking whether there are products to be sampled in the slots with the third and fourth numbers, and sampling the first product to be sampled that is detected;

[0046] The bottom-up sampling rule is: sequentially check whether there are products to be sampled in the slots with the fourth number and the third number, and sample the first product to be sampled that is detected;

[0047] The first up and then down alternating sampling rule is: alternately detect whether there are products to be sampled in the slots with the third number and the fourth number respectively, and sample the first product to be sampled that is detected, wherein the third number is detected first and then the fourth number during the alternating detection;

[0048] The bottom-to-top alternating sampling rule is: alternately check whether there are products to be inspected in the slots with the fourth number and the third number, and inspect the first product to be inspected that is detected, wherein the fourth number is detected first and then the third number during the alternating detection.

[0049] In a second aspect, a computer device is provided, comprising at least one processor; and a memory communicatively connected to the at least one processor; wherein a computer program is stored in the memory, and when the computer program is executed by the at least one processor, the method described in any one of the technical solutions of the above-mentioned product sampling method is implemented.

[0050] In a third aspect, a computer-readable storage medium is provided, wherein a plurality of program codes are stored therein, wherein the program codes are suitable for being loaded and run by a processor to execute the method described in any one of the technical solutions of the above-mentioned product sampling method.

[0051] The above one or more technical solutions of the present application have at least one or more of the following beneficial effects:

[0052] In the technical solution of a product sampling method provided by the present application, a product sampling plan for the product to be sampled can be obtained, the product sampling plan including a first product batch sampling rule and a product sampling rule, the first product batch sampling rule is used to indicate a method for sampling a product batch of the product to be sampled, and the product sampling rule is used to indicate a method for sampling products in the sampled product batch; a sampling task for the product to be sampled is generated according to the product sampling plan and the product specifications of the product to be sampled; a sampling sheet for the product to be sampled is generated according to the sampling task, the sampling sheet including a target batch number and a target product number, the target batch number being the number of the target batch obtained by sampling the product batch of the product to be sampled according to the first product batch sampling rule, and the target product number being the number of the product to be sampled obtained by sampling the products in the target batch according to the product sampling rule; the product to be sampled is sampled according to the sampling sheet.

[0053] Based on the above implementation plan, sampling tasks and sampling orders can be automatically generated, and product sampling can be automatically completed according to the sampling order. There is no need for manual sampling of products for quality inspection based on experience, which overcomes the problems of low efficiency, poor accuracy and stability caused by manual sampling. At the same time, it also realizes systematic and standardized management, which is conducive to comprehensive monitoring and traceability of the sampling process; the sampling tasks and sampling orders can be changed by adjusting the product sampling plan, which realizes dynamic adjustment of product sampling, has high flexibility, and further improves the efficiency and accuracy of product sampling. Based on the above implementation plan, it is helpful for product manufacturing companies to achieve comprehensive control of product quality, improve product yield, reduce production costs, and improve market competitiveness. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] The disclosure of the present application will become easier to understand with reference to the accompanying drawings. It is easy for those skilled in the art to understand that these drawings are only for illustrative purposes and are not intended to limit the scope of protection of the present application. Among them:

[0055] Figure 1 This is a flowchart of the main steps of a product sampling inspection method according to an embodiment of the present application;

[0056] Figure 2 is a schematic diagram of a first product batch sampling rule according to an embodiment of the present application;

[0057] Figure 3 is a schematic diagram of the main process of setting product sampling rules according to an embodiment of the present application;

[0058] Figure 4 is a schematic diagram of sampling products according to an upward sampling rule according to an embodiment of the present application;

[0059] Figure 5 is a schematic diagram of sampling products according to a downward sampling rule according to an embodiment of the present application;

[0060] Figure 6 is a schematic diagram of sampling products according to the top-first-bottom sampling rule according to an embodiment of the present application;

[0061] Figure 7 is a schematic diagram of sampling products according to a bottom-first-upward sampling rule according to an embodiment of the present application;

[0062] Figure 8 is a schematic diagram of sampling products according to an upper-first-lower-later alternating sampling rule according to an embodiment of the present application;

[0063] Fig. 9 is a schematic diagram of sampling products according to a bottom-up-then-top alternating sampling rule according to an embodiment of the present application;

[0064] Fig.10 is a schematic diagram of a product batch sampling type according to an embodiment of the present application;

[0065] Fig.11 It is a schematic diagram of the main process of product sampling inspection according to an embodiment of the present application;

[0066] Fig.12 It is a schematic diagram of the main process of constructing a product sampling inspection plan according to an embodiment of the present application;

[0067] Fig.13 It is a main flow chart of constructing a second product batch sampling rule according to an embodiment of the present application;

[0068] Fig.14 It is a schematic diagram of the main process of activating a product sampling inspection plan according to an embodiment of the present application;

[0069] Fig.15 It is a schematic diagram of the main process of generating a sampling inspection task according to an embodiment of the present application;

[0070] Fig.16 It is a schematic diagram of the main process of activating a random inspection task according to an embodiment of the present application;

[0071] Fig.17 It is a schematic diagram of the main process of triggering random inspection according to an embodiment of the present application;

[0072] Fig.18 This is a schematic diagram of the main process of generating a random inspection form according to an embodiment of the present application;

[0073] Fig.19 This is a schematic diagram of the main process of generating a random inspection form and conducting random inspections based on the random inspection form according to an embodiment of the present application;

[0074] Fig. 20 It is a main structural diagram of a computer device according to an embodiment of the present application.

[0075] Reference numerals:

[0076] 11: memory; 12: processor. DETAILED DESCRIPTION

[0077] Some embodiments of the present application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present application and are not intended to limit the protection scope of the present application.

[0078] In the description of this application, "processor" may include hardware, software or a combination of the two. The processor may be a central processing unit, a microprocessor, an image processor, a digital signal processor or any other suitable processor. The processor has data and / or signal processing functions. The processor may be implemented in software, hardware or a combination of the two. Computer-readable storage media include any suitable medium that can store program code, such as a disk, a hard disk, an optical disk, a flash memory, a read-only memory, a random access memory, etc.

[0079] The following is a description of an embodiment of the product sampling method provided in this application.

[0080] See attached Figure 1 , Figure 1 1 is a flow chart of the main steps of a product sampling inspection method according to an embodiment of the present application. Figure 1 As shown, the product sampling method in the embodiment of the present application mainly includes the following steps S101 to S104.

[0081] Step S101: obtaining a product sampling plan for a product to be sampled, wherein the product sampling plan includes a first product batch sampling rule and a product sampling rule.

[0082] The product to be inspected may be a semiconductor product, for example, a wafer. In the product production process, the product is produced in batches. In this embodiment, the product inspection includes two dimensions of product sampling, one dimension is sampling of product batches, and the other dimension is sampling of products in a product batch. The first product batch sampling rule is used to indicate the method of sampling the product batch of the product to be inspected, and the product sampling rule is used to indicate the method of sampling the products in the sampled product batch.

[0083] Step S102: Generate sampling tasks for the products to be sampled according to the product sampling plan and the product specifications of the products to be sampled.

[0084] Product specifications may include product volume, size, and model, etc. For example, if the product to be sampled is a wafer, the product specification may be the diameter of the wafer, which may be 150 mm, 200 mm, etc. The task information of the sampling task may include the product sampling plan and product specifications. Based on the product specifications, it is possible to accurately determine which product is to be sampled, and based on the product sampling plan, the product can be accurately sampled.

[0085] Step S103: Generate a sampling inspection form for the product to be sampled according to the sampling inspection task, where the sampling inspection form includes a target batch number and a target product number.

[0086] The target batch number is the number of the target batch obtained by sampling the product batch of the product to be sampled according to the first product batch sampling rule. The target product number is the number of the product to be sampled obtained by sampling the products in the above target batch according to the product sampling rule.

[0087] Step S104: Perform random inspection on the products to be inspected according to the random inspection form.

[0088] According to the sampling sheet, the target batch to be sampled and the products to be sampled from this target batch can be determined. Based on this, when conducting sampling according to the sampling sheet, the products can be sampled according to the information recorded in the sampling sheet, and then the sampled products can be quality inspected.

[0089] Based on the method described in the above steps S101 to S104, sampling tasks and sampling orders can be automatically generated, and product sampling can be automatically completed according to the sampling order. There is no need for manual sampling of products to be inspected for quality inspection based on experience, which overcomes the problems of low efficiency, poor accuracy and stability caused by manual sampling. At the same time, it also realizes systematic and standardized management, which is conducive to comprehensive monitoring and tracing of the sampling process. In addition, the sampling tasks and sampling orders can be changed by adjusting the product sampling plan, which realizes the dynamic adjustment of product sampling, has high flexibility, and further improves the efficiency and accuracy of product sampling. For example, the product sampling plan can be adjusted according to factors such as product characteristics and process changes.

[0090] The above steps S101 to S104 are described below.

[0091] 1. Explain step S101.

[0092] In some implementations of the above step S101, Figure 2 As shown, the first product batch sampling rule may include at least one of a first random number rule, a second random number rule, an odd number rule, an even number rule, an interval number rule, a batch naming rule, and an interval time rule.

[0093] These rules are described below.

[0094] 1. Explain the first random number rule.

[0095] The first random number rule is to randomly sample the product batches after the preset batches. Specifically, the product batches have numbers, and the numbers can be arranged in order from small to large. The preset batch can be a product batch with a preset number, and the product batch after the preset batch can be a product batch with a number arranged after the preset number. The specific value of the preset number can be set by the user. For example, the numbers include 1 to 10, and the user can select which number from 1 to 10 as the preset number.

[0096] In this embodiment, a conventional random sampling method may be used to randomly sample product batches after a preset batch, and this embodiment does not specifically limit this.

[0097] The first random number rule allows users to set a fixed starting position (i.e., a preset batch), and from this starting position, the product batch is randomly selected. This rule combines a fixed starting position with a random selection method to ensure that each sampling has a certain starting position, but the selected batch is random, avoiding the deviation that may be caused by regular sampling.

[0098] 2. Explain the second random number rule.

[0099] The second random number rule is to randomly sample all product batches. In this embodiment, a conventional random sampling method can be used to randomly sample all product batches, and this embodiment does not specifically limit this. The main difference between the second random number rule and the first random number rule is the sampling range. The sampling range of the first random number rule is the product batch after the preset batch, and the sampling range of the second random number rule is all product batches.

[0100] The second random number rule is the most direct random sampling method. It does not consider any fixed starting position or pattern, and selects product batches completely according to the random algorithm. The second random number rule is suitable for sampling scenarios where there are no special requirements for product batches and human intervention is minimized as much as possible.

[0101] 3. Explain the odd number rule and the even number rule.

[0102] The odd number rule is to select product batches with odd batch numbers, and the even number rule is to select product batches with even batch numbers. For example, the numbers include 1 to 10. According to the odd number rule, product batches with numbers 1, 3, 5, 7, and 9 can be selected, and according to the even number rule, product batches with numbers 2, 4, 6, 8, and 10 can be selected.

[0103] The odd number rule and the even number rule are applicable to situations where sampling needs to be carried out according to a specific sequence or pattern, which can ensure the uniformity and representativeness of the sampling.

[0104] 4. Explain the interval number rule.

[0105] The interval number rule is to extract product batches according to the preset batch number interval value.

[0106] The interval number rule allows users to set a fixed interval value and extract product batches according to the interval value. The interval number rule is suitable for scenarios where the frequency and quantity of sampling need to be controlled to ensure the efficiency and uniformity of sampling. For example, if the numbers range from 1 to 10 and the interval value is 3, then according to the interval number rule, product batches with numbers 1, 4, 7, and 10 can be extracted.

[0107] 5. Explain the batch naming rules.

[0108] The batch naming rule is to extract product batches whose batch names meet the preset conditions.

[0109] The preset condition can be any one or more of the following conditions:

[0110] Condition 1: The batch name includes specific characters.

[0111] Condition 2: The batch name includes a specific number.

[0112] Condition 3: The batch name must be in a specific format.

[0113] The above-mentioned specific characters, specific numbers, and specific formats can be set by the user.

[0114] Batch naming rules are applicable to situations where batch naming has a specific pattern or meaning, and product batches that need to be inspected can be accurately selected based on the naming information.

[0115] 6. Explain the interval time rules.

[0116] The interval time rule is: for each product batch, if the production time interval between the product batch and the previous product batch is greater than the preset time threshold, then the product batch is selected; otherwise, the current product batch is not selected. The preset time threshold can be set by the user.

[0117] The interval time rule is applicable to the situation where the batch production time on the production line is uneven. It can ensure the timeliness and pertinence of random inspections and promptly detect abnormal situations in the production process.

[0118] In some implementations of the above step S101, the product sampling plan includes a second product batch sampling rule, and the second product batch sampling rule is used to adjust the sampling parameters of the first random number rule or the second random number rule according to the sampling results of the products to be sampled when sampling is performed according to the first random number rule or the second random number rule. The sampling results include qualified quality and unqualified quality, and the sampling parameters include the total number of samples A and the number of samples B. The total number of samples A is the total number of products to be sampled participating in each sampling, and the number of samples B is the number of products to be sampled to be sampled in each sampling, and the number of samples A is less than the total number of samples B. For example, the total number of samples A = 10, and the number of samples B = 5, that is, 5 product batches are randomly selected from 10 product batches.

[0119] The larger the ratio of the sampling number B to the total sampling number A, the larger the proportion of the product batches to be sampled, and the stricter the random inspection; conversely, the smaller the proportion of the product batches to be sampled, the looser the random inspection. If there are many unqualified products, the ratio of the sampling number B to the total sampling number A can be increased to improve the strictness of the random inspection; if the number of unqualified products is small, the ratio of the sampling number B to the total sampling number A can be reduced to improve the looseness of the random inspection.

[0120] In some embodiments, the second product lot sampling rule includes at least one of a first tightened rule, a second tightened rule, a first relaxed rule, and a second relaxed rule.

[0121] These rules are described below.

[0122] 1. Explain the first tightening rule.

[0123] The first tightening rule is: when sampling the first product batch, if the number of consecutive unqualified products is greater than the first number, then when sampling the second product batch, the ratio of the sampling number B to the total sampling number A is increased, the consecutive unqualified number is the number of unqualified products to be sampled that are continuously sampled, the first product batch is any target batch, and the second product batch is the next target batch after the first product batch. When setting the specific value of the first number, those skilled in the art can set it according to the quality inspection requirements of the product; the higher the quality inspection requirements, the smaller the value of the first number can be, and vice versa.

[0124] In some embodiments, multiple priorities can be set, each priority corresponds to a set of sampling number B and total sampling number A, and the higher the priority, the greater the ratio of the sampling number B to the total sampling number A corresponding to the priority. In addition, in this embodiment, a priority can be set for each target batch, and when the target batch is sampled, the priority of the target batch is first determined, and then the sampling is performed according to the sampling number B and the total sampling number A corresponding to the priority. Based on this, the first tightening rule can be: when the first product batch is sampled according to the first priority of the first product batch, if the number of consecutive unqualified products is greater than the first number, the first priority is increased by one level to obtain the second priority, and the second priority is used as the priority of the second product batch, and the second product batch is sampled according to the second priority.

[0125] The first tightening rule is explained below using two target batches as an example.

[0126] First, the priority of the first target batch is set to priority 2, the total number of samples A = 15, and the number of samples B = 10, that is, 10 out of 15. Then, the first target batch is sampled according to priority 2. Since the number of consecutive unqualified products is greater than the first number, the priority of the second target batch is set to priority 3, the total number of samples A = 15, and the number of samples B = 12, that is, 12 out of 15.

[0127] 2. Explain the second stricter rule.

[0128] The second tightening rule is: when the first product batch is sampled, if the cumulative number of unqualified products is greater than the second number, then when the second product batch is sampled, the ratio of the sampling number B to the total number of samples A is increased, and the cumulative number of unqualified products is the total number of unqualified products to be sampled in the first product batch. The meanings of the first and second product batches are the same as those of the first and second product batches in the first tightening rule. When setting the specific value of the second number, those skilled in the art can set it according to the quality inspection requirements of the product; the higher the quality inspection requirements, the smaller the value of the second number can be, and vice versa.

[0129] In some implementations, multiple priorities can also be set, and the meaning of the priorities is the same as that of the priorities in the first tightening rule. Based on this, the second tightening rule can be: when the first product batch is sampled according to the first priority of the first product batch, if the cumulative number of unqualified products is greater than the second number, the first priority is increased by one level to obtain the second priority, the second priority is used as the priority of the second product batch, and the second product batch is sampled according to the second priority.

[0130] 3. Explain the first relaxation rule.

[0131] The first relaxed rule is: when sampling the first product batch, if the number of consecutive unqualified products is less than the third number, then when sampling the second product batch, the ratio of the number of samples to the total number of samples is reduced. The meanings of the first and second product batches are the same as those of the first and second product batches in the first tightened rule. When setting the specific value of the third number, those skilled in the art can set it according to the quality inspection requirements of the product; the higher the quality inspection requirements, the smaller the value of the third number can be, and vice versa.

[0132] In some implementations, multiple priorities can also be set, and the meaning of the priorities is the same as that of the priorities in the first tightening rule. Based on this, the first relaxation rule can be: when the first product batch is sampled according to the first priority of the first product batch, if the number of consecutive unqualified products is less than the third number, the first priority is reduced by one level to obtain the third priority, the third priority is used as the priority of the second product batch, and the second product batch is sampled according to the third priority.

[0133] The first relaxation rule is explained below using two target batches as an example.

[0134] First, the priority of the first target batch is set to priority 2, the total number of samples A = 15, and the number of samples B = 10, that is, 10 out of 15. Then, the first target batch is sampled according to priority 2. Since the number of consecutive unqualified products is less than the third number, the priority of the second target batch is set to priority 1, the total number of samples A = 15, and the number of samples B = 5, that is, 5 out of 15.

[0135] 4. Explain the second relaxation rule.

[0136] The second relaxed rule is: when sampling the first batch of products, if the cumulative number of unqualified products is less than the fourth number, then when sampling the second batch of products, the ratio of the number of samples to the total number of samples is reduced. The meanings of the first and second batches of products are the same as those of the first and second batches of products in the first tightened rule. When setting the specific value of the fourth number, those skilled in the art can set it according to the quality inspection requirements of the product; the higher the quality inspection requirements, the smaller the value of the fourth number can be, and vice versa.

[0137] In some implementations, multiple priorities can also be set, and the meaning of the priorities is the same as that of the priorities in the first tightening rule. Based on this, the second relaxation rule is: when the first product batch is sampled according to the first priority of the first product batch, if the cumulative number of unqualified products is less than the fourth number, the first priority is reduced by one level to obtain a third priority, and the third priority is used as the priority of the second product batch, and the second product batch is sampled according to the third priority.

[0138] In some implementations of the above step S101, the product to be inspected is placed in a slot of a carrier, and the carrier includes multiple slots and the numbers of the multiple slots are arranged in order from small to large, and one slot can hold one product to be inspected. The product sampling rules in the product sampling plan include a first sampling rule, and the first sampling rule is to sample the products to be inspected in the carrier according to the slot numbers in the carrier. The number of the product sampled according to the product sampling rule may be the slot number for placing the product, that is, the target product number is the first number of the slot where the product to be inspected is located, which is sampled according to the first sampling rule. Based on this implementation, there is no need to number the products separately, and product sampling can be completed by reusing the slot numbers where the products are placed.

[0139] In some embodiments, the product sampling rule further includes a second sampling rule, and the second sampling rule is that when the product to be inspected is inspected according to the inspection form (i.e., when step S104 is executed), if the product to be inspected is not detected in the slot with the first number, the slots with the second number are sequentially detected to see if there are products to be inspected, and the first detected product to be inspected is inspected. The second number is the number of the remaining slots in the carrier other than the first number. Based on this embodiment, when the product to be inspected is not placed in the slot with the first number, the products to be inspected placed in other slots can be inspected.

[0140] like Figure 3As shown, in this embodiment, the product sampling rules can be set in the following manner: sequentially execute the creation of new product sampling rules, select the carrier capacity, select the slot sequence, set the rule name, set the upward query range, and set the downward query range. Creating a new product sampling rule is to start or initiate the establishment of the product sampling rule; selecting the carrier capacity is to set the number of slots included in the carrier (such as 25); selecting the slot sequence is to set the number of each slot in the carrier, such as the slot numbers can be numbers arranged in order from small to large (i.e., in ascending order); setting the rule name is to set the name of the currently created product sampling rule as the second sampling rule; setting the upward query range is to set the range of the second number arranged after the first number; setting the downward query range is to set the range of the second number arranged before the first number. For example: setting the upward query range is the 5 second numbers after the first number, and setting the downward query range is the 5 second numbers before the first number.

[0141] In some embodiments, the second sampling rule includes at least one of an upward sampling rule, a downward sampling rule, an up-then-down sampling rule, a down-then-up sampling rule, an up-then-down alternating sampling rule, and a down-then-up alternating sampling rule.

[0142] The following is combined with Figure 4 To Attachment Fig. 9 These rules are explained.

[0143] 1. Explain the upward sampling rules.

[0144] The upward sampling rule is: sequentially check whether there are products to be sampled in the slots with the third number, and sample the first product to be sampled that is detected. The third number is the slot number that is arranged after the first number in the second number. The third number is also the slot number within the upward query range in the above implementation.

[0145] See attached Figure 4 , Figure 4 This is a schematic diagram of sampling products according to the upward sampling rule. Figure 4 The circles in the figure represent the slots of the vehicle. Figure 4 There are 6 slots in the carrier, and the slots are numbered from 1 to 6. The product to be sampled placed in slot 1 is the starting product, and the product to be sampled placed in slot 6 is the ending product. The target product is the product to be sampled drawn according to the first sampling rule in the product sampling rule. The target product number of this product to be sampled is the number of slot 3, and the sampling form will record the target product number. The number of slot 3 is also the first number, and the third number includes the numbers of slots 4, 5, and 6.

[0146] When the sampling is carried out according to the sampling list, slot 3 is empty and no product to be sampled is placed. In this regard, according to the upward sampling rule, first check whether the product to be sampled is placed in slot 4. If it is placed, sample the product in slot 4; if not, continue to check whether the product to be sampled is placed in slot 5. If it is placed, sample the product in slot 5; if not, continue to check whether the product to be sampled is placed in slot 6. If it is placed, sample the product in slot 6; if not, stop the inspection of the carrier.

[0147] 2. Explain the downward sampling rules.

[0148] The downward sampling rule is: sequentially check whether there are products to be sampled in the slots with the fourth number, and sample the first product to be sampled that is detected. The fourth number is the slot number that is arranged before the first number in the second number. The fourth number is the slot number within the downward query range in the above implementation.

[0149] See attached Figure 5 , Figure 5 The figure is a schematic diagram of sampling products according to the downward sampling rule. The target product number is the number of slot 4, which is the first number, and the fourth number includes the numbers of slots 1, 2, and 3. When sampling according to the sampling list, slot 4 is empty and no product to be sampled is placed. In this regard, according to the downward sampling rule, first check whether the product to be sampled is placed in slot 3. If it is placed, sample the product in slot 3; if not, continue to check whether the product to be sampled is placed in slot 2. If it is placed, sample the product in slot 2; if not, continue to check whether the product to be sampled is placed in slot 1. If it is placed, sample the product in slot 1; if not, stop testing the carrier.

[0150] 3. Explain the up-first-down sampling rule.

[0151] The sampling rule of up-first and down-last is: check whether there are products to be inspected in the slots with the third and fourth numbers in turn, and inspect the first product to be inspected that is detected. The sampling rule of up-first and down-last can also be understood as first inspecting according to the aforementioned upward sampling rule, and if no product to be inspected is detected, then inspecting according to the aforementioned downward sampling rule.

[0152] See attached Figure 6 , Figure 6 This is a schematic diagram of sampling products according to the top-down sampling rule. The target product number is the number of slot 3, which is also the first number. The third number includes the numbers of slots 4, 5, and 6, and the fourth number includes the numbers of slots 1 and 2.

[0153] When the sampling is carried out according to the sampling list, slot 3 is empty and no product to be sampled is placed. In this case, slots 4, 5, and 6 are first checked in sequence to see if there are products to be sampled, and the first product to be sampled that is detected is sampled; if there are no products to be sampled in slots 4, 5, and 6, slots 2 and 1 are checked in sequence to see if there are products to be sampled, and the first product to be sampled that is detected is sampled; if there are no products to be sampled in slots 2 and 1, the carrier inspection is stopped.

[0154] 4. Explain the bottom-up sampling rule.

[0155] The first down and then up sampling rule is: check whether there are products to be sampled in the fourth and third slots in turn, and sample the first product to be sampled that is detected. The first down and then up sampling rule can also be understood as first sampling according to the aforementioned downward sampling rule, and if no product to be sampled is detected, then sampling according to the aforementioned upward sampling rule.

[0156] See attached Figure 7 , Figure 7 This is a schematic diagram of sampling products according to the bottom-first-up sampling rule. The target product number is the number of slot 3, which is also the first number. The third number includes the numbers of slots 4, 5, and 6, and the fourth number includes the numbers of slots 1 and 2.

[0157] When the sampling is carried out according to the sampling list, slot 3 is empty and no product to be sampled is placed. In this case, slots 2 and 1 are first checked in turn to see if there are products to be sampled, and the first product to be sampled that is detected is sampled; if there are no products to be sampled in slots 2 and 1, slots 4, 5, and 6 are checked in turn to see if there are products to be sampled, and the first product to be sampled that is detected is sampled; if there are no products to be sampled in slots 4, 5, and 6, the carrier inspection is stopped.

[0158] 5. Explain the rules of alternating sampling from top to bottom.

[0159] The first up and then down alternating sampling rule is: alternately detect whether there are products to be sampled in the third and fourth numbered slots, and sample the first detected product to be sampled, wherein the third number is detected first and then the fourth number during the alternating detection. The first up and then down alternating sampling rule can also be understood as sampling alternately according to the aforementioned upward sampling rule and the aforementioned downward sampling rule.

[0160] See attached Figure 8 , Figure 8 This is a schematic diagram of sampling products according to the upper-first-lower-later alternating sampling rule. The target product number is the number of slot 3, which is also the first number. The third number includes the numbers of slots 4, 5, and 6, and the fourth number includes the numbers of slots 1 and 2.

[0161] When the sampling inspection is carried out according to the sampling inspection form, slot 3 is empty and no product to be inspected is placed. In this regard, first check whether there is a product to be inspected in slot 4, if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 2, if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 5, if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 1, if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 6, if so, inspect the product to be inspected; if not, stop the inspection of the carrier.

[0162] 6. Explain the alternating sampling rule of first down and then up.

[0163] The first down and then up alternating sampling rule is: alternately detect whether there are products to be sampled in the slots with the fourth number and the third number, and sample the first product to be sampled that is detected, wherein the fourth number is detected first and then the third number during the alternating detection. The first up and then down alternating sampling rule can also be understood as sampling alternately according to the aforementioned downward sampling rule and the aforementioned upward sampling rule.

[0164] See attached Fig. 9 , Fig. 9 This is a schematic diagram of sampling products according to the alternating sampling rule of first down and then up. The target product number is the number of slot 4, the number of slot 4 is also the first number, the third number includes the numbers of slots 5 and 6, and the fourth number includes the numbers of slots 1, 2, and 3.

[0165] When the sampling inspection is carried out according to the sampling inspection form, slot 4 is empty and no product to be inspected is placed. In this regard, first check whether there is a product to be inspected in slot 3, and if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 5, and if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 2, and if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 6, and if so, inspect the product to be inspected; if not, check whether there is a product to be inspected in slot 1, and if so, inspect the product to be inspected; if not, stop the inspection of the carrier.

[0166] In some implementations of the above step S101, the product sampling plan includes a product batch sampling type, and the product batch sampling type is used to indicate the triggering condition for sampling the product batch of the product to be sampled. Based on the product batch sampling type, the product can be sampled when the product to be sampled meets or satisfies the triggering condition indicated by the product batch sampling type, that is, the product batch sampling type determines under which dimensions or conditions the action of product sampling is triggered.

[0167] In some embodiments, Fig.10As shown, the product batch sampling type includes at least one of a workstation dimension type, an equipment dimension type, a work order dimension type, and a shift dimension type.

[0168] These types are described below.

[0169] 1. Explain the workstation dimension type.

[0170] The station dimension type triggers sampling inspection on the products to be sampled when they arrive at the preset processing station. The production process of a product usually includes multiple production links, and different processing stations can be used for production at different production links. The preset processing station can be one or more of these processing stations, and users can set which processing stations to use as preset processing stations.

[0171] The workstation dimension type is suitable for situations where the quality of a specific production link needs to be monitored to ensure that the batch of products produced in this link meets the quality standards. By setting the workstation dimension type, you can achieve precise control of key links in the production process, discover potential problems in a timely manner, and improve the overall production quality.

[0172] 2. Explain the device dimension type.

[0173] The equipment dimension type is to trigger sampling inspection on the product to be sampled when the product to be sampled arrives at the preset processing equipment. A processing station can include multiple processing equipment, and the preset processing equipment is one or more of these processing equipment. Users can set which station equipment is used as the preset processing equipment.

[0174] The equipment dimension type is used when you need to pay attention to the product quality under the operating status of a specific device. For example, some processing equipment may have a high failure rate or defective rate during the production process. By setting the equipment dimension type to trigger product sampling, you can focus on monitoring these processing equipment to ensure that product quality is not affected by equipment factors.

[0175] 3. Explain the work order dimension types.

[0176] The work order dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected belongs to the preset work order. When the product is produced, the work order can be generated through the MES (Manufacturing Execution System) system and the production is carried out according to the work order. The work order can record the production plan of the product, such as the production time, product batch, product specifications, etc. For the same product, multiple work orders can be generated through the MES system, for example, the production time in different work orders is different. The preset work order can be one or more of these work orders, and the user can set which work orders to use as preset work orders.

[0177] Work order dimension types are suitable for situations where specific orders or product batches need to be monitored. By setting work order dimension types, you can ensure that the quality department conducts comprehensive quality checks on specific work orders to meet special customer requirements or meet specific quality standards.

[0178] 4. Explain the shift dimension types.

[0179] The shift dimension type triggers sampling inspection on the product to be sampled when it is processed by the preset shift. During product production, multiple shifts can be used for production and processing, and the status of operators, production processes, and processing equipment involved in each shift may be different. The preset shift processing can be one or more of these shifts, and users can set which shifts to use as preset shifts.

[0180] The shift dimension type is suitable for situations where you need to monitor product quality in different shifts. By setting the shift dimension type, you can make independent sampling plans for each shift to ensure that the product quality of each shift meets the requirements.

[0181] Based on the above four dimension types, it can be applied to different production scenarios and quality control requirements. By flexibly selecting and configuring these dimension types, comprehensive monitoring and precise control of the production process can be achieved, improving product quality and customer satisfaction.

[0182] 2. Explain step S102.

[0183] In some implementations of the above step S102, the processing station of the product to be sampled can be obtained, and the sampling inspection task is generated according to the processing station, the product sampling inspection plan and the product specifications. If multiple processing stations are involved in the production of the product to be sampled, the sampling inspection task can be generated according to all the processing stations and the above product sampling inspection plan and product specifications. In this case, the task information of the sampling inspection task includes the processing station, the product sampling inspection plan and the product specifications.

[0184] In some implementations of the above step S102, the measurement station of the product to be sampled can be obtained, and the sampling inspection task is generated according to the measurement station, the product sampling inspection plan and the product specifications. The measurement station is a station for sampling and quality inspection of the product to be sampled. In this case, the task information of the sampling inspection task includes the measurement station, the product sampling inspection plan and the product specifications.

[0185] In some implementations of the above step S102, the sampling task may be generated simultaneously according to the processing station, the measuring station, the product sampling plan and the product specifications of the product to be sampled.

[0186] 3. Explain step S103.

[0187] In some implementations of the above step S103, the product batch sampling type in the above implementation can be used to generate a sampling inspection form. Specifically, in response to the product to be sampled meeting the triggering condition represented by the product batch sampling type, it is determined that the sampling inspection is triggered for the product to be sampled, and the target batch number and the target product number are obtained according to the first product batch sampling rule and the product sampling rule, respectively, and the sampling inspection form is generated according to the target batch number and the target product number. Based on this implementation, the timing or working conditions for triggering the sampling inspection of the product to be sampled can be adjusted by adjusting the triggering condition, thereby realizing the personalized configuration of product sampling inspection, which is conducive to improving the effectiveness and efficiency of product sampling inspection.

[0188] In some embodiments, when it is detected that the product to be inspected arrives at the processing station set in the inspection task (i.e., the processing station in the aforementioned task information) and the product to be inspected meets the triggering condition represented by the product batch sampling type, it is determined that the inspection is triggered for the product to be inspected. When there are multiple processing stations in the task information, when the product to be inspected arrives at any processing station, if the product to be inspected meets the triggering condition represented by the product batch sampling type, it can be determined that the inspection is triggered for the product to be inspected. Based on this embodiment, it can be determined that the inspection is triggered at any one or more production links in the entire production process of the product to be inspected, further improving the effectiveness and efficiency of product inspection.

[0189] 4. Explain step S104.

[0190] In some implementations of the above-mentioned step S104, it can be detected whether the products to be inspected have arrived at the measurement station set in the inspection task (i.e., the measurement station in the aforementioned task information). If it is detected that the products to be inspected have arrived at the measurement station, the products to be inspected are inspected according to the inspection order, that is, sampling and quality inspection are performed on the products to be inspected in the measurement station.

[0191] The following is combined with Fig.11 To Attachment Fig.19 The embodiment of the product sampling inspection method provided by the present application is described. In some application scenarios according to the embodiment of the present application, the product sampling inspection method provided by the present application can be executed by the MES system. The MES system can be provided with a sampling inspection module, and the product sampling inspection method is executed by the sampling inspection module.

[0192] First, refer to the attached Fig.11 , Fig.11 The following is an example of the main process of product sampling inspection. Fig.11 As shown, it is possible to obtain the established system documents, obtain the product sampling technology of the products to be sampled, and generate the sampling tasks of the products to be sampled. Fig.11In the batch process in the process, if the sampling task determines that the sampling inspection is triggered for the product to be sampled, a sampling inspection order is generated according to the sampling inspection task, and the sampling inspection is carried out when the product to be sampled arrives at the measurement station (i.e. Fig.11 System documents can be documents that guarantee the production quality of the products to be sampled. System documents can include inspection methods for the products to be sampled, methods for assessing whether the quality is qualified, etc.

[0193] See attached Fig.12 , Fig.12 The following is an example of the main process of building a product sampling plan. Fig.12 As shown, you can sequentially create a new product sampling plan, set the first product batch sampling rule, set the product batch sampling type, set other parameters, set product sampling rules, set the second product batch sampling rule, and activate the product sampling plan. Creating a new product sampling plan is to start or initiate the establishment of a product sampling plan.

[0194] See attached Fig.13 , Fig.13 The main process of constructing the second product batch sampling rules is shown as an example. Fig.13 As shown, you can sequentially create a new second product batch sampling rule, set priority, set the total number of samples, set the number of samples, select relaxation indicators, set relaxation rules, select tightening indicators, and set tightening rules. Creating a new second product batch sampling rule is to start or initiate the establishment of the second product batch sampling rule. Setting priority is to set the priority of the second product batch sampling rule, setting the total number of samples is to set multiple different total number of samples, setting the number of samples is to set multiple different number of samples, selecting relaxation indicators is to set the corresponding total number of samples and number of samples for each priority, setting relaxation rules is to generate relaxation rules according to the corresponding total number of samples and number of samples for each priority, selecting tightening indicators is to set the corresponding total number of samples and number of samples for each priority, and setting tightening rules is to generate tightening rules according to the corresponding total number of samples and number of samples for each priority.

[0195] See attached Fig.14 , Fig.14 The following is an example of the main process of activating a product sampling plan. Fig.14 As shown, you can submit an application for activating a product sampling plan to the quality department, which will sign and approve the product sampling plan. After approval, the product sampling plan will be activated, and sampling tasks will be created or generated based on the activated product sampling plan.

[0196] See attached Fig.15 , Fig.15 The main process of generating sampling tasks is shown as an example. Fig.15As shown, you can sequentially create a new sampling task, set a product sampling plan, set the main process, set sub-processes and processing stations, set measurement sub-processes and measurement stations, set the information of the sampled products, and activate the sampling task. Creating a new sampling task is to start or initiate the creation or generation of a sampling task. Setting a product sampling plan is to select an already activated product sampling plan, bind the activated product sampling plan to the sampling task, so that the task information can include the activated product sampling plan. Setting the main process is to set the main process of the entire production process of the product to be sampled. There are multiple main processes, each of which can include one or more sub-processes, and the main process can also include a measurement sub-process. Setting sub-processes and processing stations is to set the sub-processes of each main process and the processing stations corresponding to each sub-process. Setting measurement sub-processes and measurement stations is to set the measurement sub-processes in the main process and their corresponding measurement stations. Setting the information of the sampled product can be to set the product specifications of the product to be sampled. The task information of the sampling task generated based on the above steps may include product sampling plan, product specifications, processing stations and measurement stations. The processing stations carry the process information of their sub-processes, and the measurement stations carry the process information of their measurement sub-processes.

[0197] Since the process flow has been determined in advance before the product production process, and each main process contains many sub-processes, the sub-process contains processing stations that meet production needs. Different processing stations can complete different processing processes, but the semiconductor product processing process is relatively complicated. The processing stations in the process may process the same product in different steps. Therefore, when configuring the processing station and the measurement station in the sampling task, you can bring their sub-processes. In this way, the sampling inspection is triggered when the product arrives at the processing station corresponding to the sub-process, and the sampling inspection is carried out when it arrives at the measurement station corresponding to the sub-process.

[0198] See attached Fig.16 , Fig.16 The following example shows the main process of activating the sampling task. Fig.16 As shown, you can submit an application for activating a sampling inspection task to the quality department, which will sign and approve it. After approval, the sampling inspection task will be activated and the sampling inspection will be carried out according to the activated sampling inspection task.

[0199] See attached Fig.17 , Fig.17 The main process of triggering random inspection is shown as an example. Fig.17 As shown in the figure, when the product to be sampled is processed at the processing station (i.e. Fig.17 According to the product batch sampling type in the sampling task, determine whether to trigger sampling inspection for the product to be sampled (i.e. Fig.17If the sampling inspection is triggered, a sampling inspection form is generated, and the sampling inspection is carried out according to the sampling inspection form when the product to be sampled arrives at the measurement station; if the sampling inspection is not triggered, the product to be sampled leaves the processing station and enters the next processing link. Fig.17 Whether to trigger the random inspection is determined after the product to be inspected has completed processing at the processing station. However, in some implementations, whether to trigger the random inspection can also be determined when the product to be inspected arrives at the processing station.

[0200] See attached Fig.18 , Fig.18 The main process of generating a sampling inspection form is shown as an example. Fig.18 As shown, if the product batch sampling type is the equipment dimension type, determine whether the task information of the sampling task includes the processing station; if the task information includes or is configured with the processing station, continue to determine whether the product to be sampled has arrived at the preset processing equipment, if it has arrived, determine whether to trigger the sampling inspection, if it has not arrived, the product to be sampled will immediately enter the next processing link at the processing station normally; if the task information does not include or is not configured with the processing station, the sampling inspection will be triggered when the product to be sampled arrives at the station before the measurement station.

[0201] If the product batch sampling type is the work station dimension type, the work order dimension type and the shift dimension type, it is determined whether the product to be sampled has arrived at the preset processing equipment. If it has arrived, it is determined whether to trigger the sampling inspection. If it has not arrived, the product to be sampled will immediately enter the next processing link at the processing station normally.

[0202] In addition, after confirming the triggering of random inspection, it is also necessary to determine whether the random inspection task has started, that is, whether the product to be inspected has arrived at the measurement station for random inspection. If the task has started, the random inspection is carried out by executing the random inspection sub-process; if the task has not started, a random inspection form is generated.

[0203] See attached Fig.19 , Fig.19 The following is an example of the process of generating a sampling inspection form and conducting sampling inspections. Fig.19 As shown, if the product batch sampling type is the work order dimension type, then determine whether there is a sampling order for the work order to which the current product batch belongs; if there is no sampling order, generate a sampling order; if there is a sampling order, obtain the batch number of the current product batch and determine whether the batch number is in the pre-extracted number. If it is in the pre-extracted number, it indicates that the batch number is selected, otherwise it indicates that the batch number is not selected. The pre-extracted number is the target batch number in the sampling order. Further, determine whether the total capacity of the sampling order has been reached at this time. If it has been reached, it indicates that the sampling has been completed according to the sampling order (i.e. Fig.19 The current sampling list in is completed).

[0204] If the product batch sampling type is the shift dimension type, determine whether there is a sampling order for the current shift; if there is no sampling order, generate a sampling order; if there is a sampling order, the processing method is the same as when there is a sampling order for the above work order dimension type.

[0205] If the product batch sampling type is the workstation dimension type or the equipment dimension type, the processing method is the same as when the sampling order exists in the above work order dimension type.

[0206] It should be pointed out that although the various steps in the above embodiments are described in a specific order, those skilled in the art can understand that in order to achieve the effect of the present application, different steps do not have to be executed in such an order. They can be executed simultaneously (in parallel) or in other orders. These adjusted schemes are equivalent to the technical schemes described in this application, and therefore will also fall within the scope of protection of this application.

[0207] It is understood by those skilled in the art that all or part of the processes in the method for implementing the above-mentioned embodiment of the present application can also be completed by instructing the relevant hardware through a computer program, and the computer program can be stored in a computer-readable storage medium, and the computer program can implement the steps of the above-mentioned various method embodiments when executed by the processor. Among them, the computer program includes computer program code, and the computer program code can be in source code form, object code form, executable file or some intermediate form. The computer-readable storage medium may include: any entity or device, medium, U disk, mobile hard disk, disk, optical disk, computer memory, read-only memory, random access memory, electrical carrier signal, telecommunication signal and software distribution medium, etc. that can carry the computer program code.

[0208] Another aspect of the present application also provides a computer-readable storage medium.

[0209] In an embodiment of a computer-readable storage medium according to the present application, the computer-readable storage medium may be configured to store a program for executing the product sampling method of the above method embodiment, and the program may be loaded and run by a processor to implement the above product sampling method. For ease of explanation, only the parts related to the embodiment of the present application are shown. For specific technical details not disclosed, please refer to the method part of the embodiment of the present application. The computer-readable storage medium may be a storage device formed by various electronic devices. Optionally, the computer-readable storage medium in the embodiment of the present application is a non-temporary computer-readable storage medium.

[0210] Another aspect of the present application provides a computer device.

[0211] In an embodiment of a computer device according to the present application, the computer device may include at least one processor; and a memory connected to the at least one processor in communication; wherein a computer program is stored in the memory, and when the computer program is executed by the at least one processor, the method described in any of the above embodiments is implemented. Fig. 20 , Fig. 20 FIG. 4 exemplarily shows that the memory 11 and the processor 12 are communicatively connected via a bus.

[0212] The computer device described in the present application may be, but is not limited to, a desktop, a laptop, a handheld computer, a notebook computer, a vehicle-mounted device, an ultra-mobile personal computer (UMPC), a netbook, a personal digital assistant (PDA), etc., and the embodiments of the present application are not limited to this.

[0213] So far, the technical solution of the present application has been described in conjunction with an embodiment shown in the accompanying drawings, but it is easy for those skilled in the art to understand that the protection scope of the present application is obviously not limited to these specific embodiments. Without departing from the principles of the present application, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will fall within the protection scope of the present application.

Claims

1. A product sampling method, characterized in that: The method comprises: Obtaining a product sampling plan for the product to be sampled, the product sampling plan comprising a first product batch sampling rule and a product sampling rule, the first product batch sampling rule being used to indicate a method for sampling a product batch of the product to be sampled, and the product sampling rule being used to indicate a method for sampling products in the sampled product batch; Generating a sampling inspection task for the product to be sampled according to the product sampling inspection plan and the product specifications of the product to be sampled; Generate a sampling inspection sheet for the product to be sampled according to the sampling inspection task, the sampling inspection sheet including a target batch number and a target product number, the target batch number being the number of the target batch obtained by sampling the product batch of the product to be sampled according to the first product batch sampling rule, and the target product number being the number of the product to be sampled obtained by sampling the products in the target batch according to the product sampling rule; The products to be inspected are inspected according to the inspection list.

2. The method according to claim 1, characterized in that The product sampling plan includes a product batch sampling type, and the product batch sampling type is used to indicate a trigger condition for sampling a product batch of the product to be sampled. The generating of the sampling sheet of the product to be sampled according to the sampling task includes: In response to the product to be inspected meeting the trigger condition represented by the product batch sampling type, it is determined to trigger the inspection of the product to be inspected, the target batch number and the target product number are obtained according to the first product batch sampling rule and the product sampling rule, respectively, and the inspection order is generated according to the target batch number and the target product number.

3. The method according to claim 2, characterized in that The product batch sampling type includes at least one of a workstation dimension type, an equipment dimension type, a work order dimension type, and a shift dimension type; The workstation dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected arrives at a preset processing workstation; The equipment dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected arrives at a preset processing equipment; The work order dimension type is to trigger a random inspection on the product to be inspected when the product to be inspected belongs to a preset work order; The shift dimension type is to trigger a random inspection of the product to be inspected when the product to be inspected is processed by a preset shift.

4. The method according to claim 1, characterized in that: The generating of the sampling inspection task of the product to be sampled according to the product sampling inspection plan and the product specifications of the product to be sampled includes: Obtaining the processing station of the product to be sampled, and generating the sampling task according to the processing station, the product sampling plan and the product specifications; Or, obtain the measurement station of the product to be inspected, and generate the inspection task according to the measurement station, the product inspection plan and the product specifications.

5. The method according to claim 4, characterized in that The sampling inspection of the product to be sampled according to the sampling inspection list includes: If it is detected that the product to be inspected has arrived at the processing station or the measuring station, the product to be inspected is inspected according to the inspection form.

6. The method according to claim 1, characterized in that The first product batch sampling rule includes at least one of a first random number rule, a second random number rule, an odd number rule, an even number rule, an interval number rule, a batch naming rule, and an interval time rule; The first random number rule is: randomly sampling the product batches after the preset batch; The second random number rule is: random sampling of all product batches; The odd number rule is: extract product batches with odd batch numbers; The even number rule is: extract product batches with even batch numbers; The interval number rule is: extract product batches according to the preset interval value of the batch number; The batch naming rule is: extract product batches whose batch names meet the preset conditions; The interval time rule is: for each product batch, if the production time interval between the product batch and the previous product batch is greater than a preset time threshold, the product batch is extracted.

7. The method according to claim 6, characterized in that The product sampling plan includes a second product batch sampling rule, and the second product batch sampling rule is used to adjust the sampling parameters of the first random number rule or the second random number rule according to the sampling results of the product to be sampled when sampling is performed according to the first random number rule or the second random number rule; in, The sampling results include qualified quality and unqualified quality, and the sampling parameters include the total number of samples and the sampling number. The total number of samples is the total number of products to be sampled participating in each sampling, and the sampling number is the number of products to be sampled to be drawn for each sampling.

8. The method according to claim 7, characterized in that The second product batch sampling rule includes at least one of a first tightened rule, a second tightened rule, a first relaxed rule, and a second relaxed rule; The first tightening rule is: when sampling the first product batch, if the number of consecutive unqualified products is greater than the first number, then when sampling the second product batch, the ratio of the sampling number to the total sampling number is increased, the consecutive unqualified number is the number of unqualified products to be sampled that are continuously sampled, the first product batch is any one of the target batches, and the second product batch is the next target batch after the first product batch; The second tightening rule is: when the first batch of products is sampled, if the cumulative number of unqualified products is greater than the second number, then when the second batch of products is sampled, the ratio of the sampling number to the total number of samples is increased, and the cumulative number of unqualified products is the total number of unqualified products to be sampled in the first batch of products; The first relaxation rule is: when the first product batch is sampled, if the number of consecutive unqualified products is less than the third number, then when the second product batch is sampled, the ratio of the number of samples to the total number of samples is reduced; The second relaxation rule is: when spot checking the first product batch, if the cumulative number of unqualified products is less than the fourth number, then when spot checking the second product batch, the ratio of the sampling number to the total number of samples is reduced.

9. The method according to claim 1, characterized in that: The product to be sampled is placed in a slot of a carrier, the carrier comprises a plurality of slots and the slots are numbered in ascending order; The product sampling rules include a first sampling rule, and the first sampling rule is to sample the products to be inspected in the carrier according to the slot numbers in the carrier.

10. The method according to claim 9, characterized in that The target product number is the first number of the slot where the product to be sampled is located according to the first sampling rule; The product sampling rule includes a second sampling rule, wherein when the product to be inspected is inspected according to the inspection form, if the product to be inspected is not detected in the slot with the first number, the slots with the second number are sequentially checked for the product to be inspected, and the first detected product to be inspected is inspected; The second number is the slot number remaining in the carrier except the first number.

11. The method according to claim 10, characterized in that The second sampling rule includes at least one of an upward sampling rule, a downward sampling rule, an up-first-down-later sampling rule, a down-first-up-later sampling rule, an up-first-down-later alternating sampling rule, and a down-first-up-later alternating sampling rule; The upward sampling rule is: sequentially detect whether there are products to be sampled in the slots with the third number, and sample the first product to be sampled that is detected, and the third number is the slot number in the second number that is arranged after the first number; The downward sampling rule is: sequentially detect whether there are products to be sampled in the slots with the fourth number, and sample the first product to be sampled that is detected, and the fourth number is the slot number in the second number that is arranged before the first number; The sampling rule of top-to-bottom sampling is: sequentially checking whether there are products to be sampled in the slots with the third and fourth numbers, and sampling the first product to be sampled that is detected; The bottom-up sampling rule is: sequentially check whether there are products to be sampled in the slots with the fourth number and the third number, and sample the first product to be sampled that is detected; The first up and then down alternating sampling rule is: alternately detect whether there are products to be sampled in the slots with the third number and the fourth number respectively, and sample the first product to be sampled that is detected, wherein the third number is detected first and then the fourth number during the alternating detection; The bottom-to-top alternating sampling rule is: alternately check whether there are products to be inspected in the slots with the fourth number and the third number, and inspect the first product to be inspected that is detected, wherein the fourth number is detected first and then the third number during the alternating detection.

12. A computer device, characterized in that: include: at least one processor; and, a memory communicatively coupled to the at least one processor; Wherein, a computer program is stored in the memory, and when the computer program is executed by the at least one processor, the product sampling inspection method according to any one of claims 1 to 11 is implemented.

13. A computer-readable storage medium storing a plurality of program codes, characterized in that: The program code is suitable for being loaded and run by a processor to execute the product sampling inspection method according to any one of claims 1 to 11.