Heat dissipation device and heat dissipation system

Abstract

The invention provides a heat dissipation device and a heat dissipation system. The heat dissipation device comprises a seat body, a cover body and a piezoelectric vibrator. The seat body is provided with a valve groove and a flow outlet communicated with the valve groove. The cover body is provided with a flow inlet and a cover groove communicated with the flow inlet. A valve cavity is defined by the piezoelectric vibrator and the inner wall of the valve groove, and a cover cavity is defined by the piezoelectric vibrator and the inner wall of the cover groove. And the free end of the piezoelectric vibrator is matched with the seat body to form an active valve for communicating the valve cavity with the cover cavity. A first filling structure is arranged on the inner wall of the cover groove. A part of the cover cavity area is filled with the first filling structure, so that the distance between the free end of the piezoelectric vibrator and the bottom wall of the cover groove is not changed while the volume of the cover cavity is reduced, and therefore, when the free end deflects, the volume change rate of the cover cavity is increased, and the volume change rate of the piezoelectric vibrator is increased. In this way, larger positive pressure exists in the cover cavity to drive more fluid to flow towards the valve cavity, larger negative pressure exists in the cover cavity to suck more fluid from the outside, and the heat dissipation effect of the heat dissipation device is improved.

Description

Technical Field

[0001] The present invention relates to the field of heat dissipation technology, and in particular to a heat dissipation device and a heat dissipation system. Background Art

[0002] As electronic products are increasingly pursuing miniaturization and high integration, their performance is becoming more and more powerful, and the heat generated is also increasing, making the heat dissipation problem more and more a bottleneck restricting electronic products from achieving higher performance. However, the heat dissipation effect of the heat dissipation system in the prior art is poor and it is difficult to meet the heat dissipation requirements of electronic products. Summary of the invention

[0003] Based on this, it is necessary to provide a heat dissipation device and a heat dissipation system to address the problem that the heat dissipation effect of the heat dissipation system in the prior art is poor and it is difficult to meet the heat dissipation requirements of electronic products.

[0004] The technical solution is as follows:

[0005] In one aspect, a heat dissipation device is provided, comprising:

[0006] A seat body, which is provided with a valve slot and an outlet communicated with the valve slot;

[0007] A cover body, which is arranged on a side of the seat body provided with the valve groove and provided with an inlet, and a side of the cover body close to the seat body is provided with a cover groove communicating with the inlet;

[0008] A piezoelectric vibrator, whose two ends are respectively arranged as a fixed end and a free end, the fixed end is fixed to a side of the seat body provided with the valve slot, so that the piezoelectric vibrator and the inner wall of the valve slot are surrounded to form a valve cavity, the piezoelectric vibrator and the inner wall of the cover slot are surrounded to form a cover cavity, and the free end cooperates with the seat body to form an active valve for connecting the valve cavity and the cover cavity;

[0009] The inner wall of the cover groove is provided with a first filling structure, and the first filling structure is configured to be spaced apart from the piezoelectric vibrator when the piezoelectric vibrator vibrates toward the cover body to a certain amplitude.

[0010] The technical solution is further described below:

[0011] In one embodiment, the first filling structure includes a first filling protrusion, which is located on the bottom wall of the valve groove and divides the cover cavity into an inlet cavity connected to the inlet port and a buffer cavity connected to the active valve, and the first filling protrusion cooperates with the free end to form a control valve for connecting the inlet cavity and the buffer cavity.

[0012] In one embodiment, the control valve is located between the fixed end and the active valve.

[0013] In one of the embodiments, when the buffer chamber and the valve chamber are in a pressure balanced state, the top surface of the first filling protrusion is arranged parallel to the free end.

[0014] In one embodiment, the first filling structure includes a second filling protrusion, and the second filling protrusion is located on a side of the valve slot away from the active valve.

[0015] In one embodiment, the outer surface of the second filling protrusion is configured as a stepped surface, a sloped surface or a curved surface.

[0016] In one of the embodiments, a second filling structure is disposed on an inner wall of the valve slot, and the second filling structure is configured to be spaced apart from the piezoelectric vibrator when the piezoelectric vibrator vibrates toward the seat body to a certain amplitude.

[0017] In one embodiment, the second filling structure includes a third filling protrusion, and the third filling protrusion is located on a side of the valve slot away from the active valve.

[0018] In one embodiment, the number of the outlets, the number of the valve slots and the number of the piezoelectric vibrators are all at least one, and each of the fixed ends is fixed to a side of the seat body where the valve slot is provided, so that the inner wall of the cover slot and each of the piezoelectric vibrators are arranged to form the cover cavity, and each of the piezoelectric vibrators and the inner wall of each of the valve slots are correspondingly arranged to form each of the valve cavities, and each of the valve cavities is connected to at least one of the outlets, and each of the free ends cooperates with the seat body to form each of the active valves, and each of the active valves is connected to each of the valve cavities and to the cover cavity.

[0019] On the other hand, a heat dissipation system is provided, comprising at least one heat dissipation device as described above.

[0020] The heat dissipation device and heat dissipation system in the above embodiment, when in use, the piezoelectric vibrator vibrates at a high speed under an AC drive signal of a specific frequency, and the free end of the piezoelectric vibrator swings up and down accordingly, and the volume of the cover cavity and the valve cavity changes accordingly, resulting in a change in pressure. At the same time, the active valve is also constantly switched. Under the joint action of the two, the cooling fluid is driven to flow from the cover cavity to the valve cavity in one direction, and finally sprayed from the outlet to the heating element to achieve heat dissipation of the heating element. The first filling structure in the present application fills a part of the cover cavity area, so that the volume of the cover cavity is reduced while the distance between the free end of the piezoelectric vibrator and the bottom wall of the cover groove remains unchanged. When the free end deflects toward one side of the cover body, the resistance against the deflection of the free end remains basically unchanged, and the volume change rate of the cover cavity increases, and there will be a greater positive pressure in the cover cavity to drive more fluid to flow into the valve cavity. When the free end deflects toward one side of the seat body, the pulling force of the fluid in the cover cavity on the free end remains basically unchanged, and the cover cavity will have a higher negative pressure to draw more fluid from the outside, so that more fluid in the cover cavity flows into the valve cavity, and the flow rate of the outlet increases, thereby improving the heat dissipation performance of the heat dissipation device. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings constituting a part of the present application are used to provide a further understanding of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application.

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0023] Figure 1 This is a schematic structural diagram of the first heat dissipation device of the first embodiment when the free end is deflected downward.

[0024] Figure 2 for Figure 1 Schematic diagram of the structure of the heat dissipation device when the free end is deflected upward.

[0025] Figure 3 It is a schematic structural diagram of the second heat dissipation device of the first embodiment.

[0026] Figure 4 It is a schematic structural diagram of the third heat dissipation device of the first embodiment.

[0027] Figure 5 It is a schematic structural diagram of the heat dissipation device of the second embodiment when it is in a balanced state.

[0028] Figure 6 for Figure 5Schematic diagram of the structure of the heat dissipation device when the free end is deflected downward.

[0029] Figure 7 for Figure 5 Schematic diagram of the structure of the heat dissipation device when the free end is deflected upward.

[0030] Figure 8 It is a schematic structural diagram of the heat dissipation device of the third embodiment when it is in a balanced state.

[0031] Fig. 9 for Figure 8 Schematic diagram of the structure of the heat dissipation device when the free end is deflected downward.

[0032] Fig.10 for Figure 8 Schematic diagram of the structure of the heat dissipation device when the free end is deflected upward.

[0033] Fig.11 It is a structural schematic diagram of the heat dissipation device of the fourth embodiment when it is in a balanced state.

[0034] Fig.12 for Fig.11 Schematic diagram of the structure of the heat dissipation device when the free end is deflected downward.

[0035] Fig.13 for Fig.11 Schematic diagram of the structure of the heat dissipation device when the free end is deflected upward.

[0036] Fig.14 Schematic diagram of the structure of the heat dissipation device of the fifth embodiment.

[0037] Fig.15 Schematic diagram of the structure of the heat dissipation device of the sixth embodiment.

[0038] Fig.16 It is a schematic structural diagram of the first heat dissipation device of the seventh embodiment.

[0039] Fig.17 It is a schematic structural diagram of the second heat dissipation device of the seventh embodiment.

[0040] Fig.18 It is a schematic structural diagram of the third heat dissipation device of the seventh embodiment.

[0041] Fig.19 for Fig.18 Schematic diagram of the structure of the heat dissipation device when the free end is deflected downward.

[0042] Fig. 20 Schematic diagram of the structure of the heat dissipation device of the eighth embodiment.

[0043] FIG. 21 is a schematic structural diagram of a heat dissipation system according to an embodiment.

[0044] FIG. 22 is a cross-sectional view of the heat dissipation system of FIG. 21 .

[0045] Description of reference numerals:

[0046] 1. Heat dissipation system; 10. Heat dissipation device; 100. Seat; 101. Outlet; 102. Valve cavity; 103. First groove; 104. First protrusion; 105. Second groove; 106. Second protrusion; 107. Third groove; 108. Third protrusion; 109. Annular groove; 110. First protrusion; 111. Valve groove; 120. Flow blocking part; 121. Flow blocking groove; 122. Flow blocking surface; 130. Second filling Structure; 131, third filling protrusion; 200, cover body; 201, inlet; 202, cover cavity; 203, cover groove; 204, inlet cavity; 205, buffer cavity; 220, first filling structure; 221, first filling protrusion; 222, second filling protrusion; 300, piezoelectric vibrator; 301, fixed end; 302, free end; 401, active valve; 402, flow blocking channel; 403, control valve; 20, heating element. DETAILED DESCRIPTION

[0047] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0048] like Figure 1 , Figure 2 and Figure 3As shown, in the first embodiment, a heat dissipation device 10 is provided, including a seat body 100, a cover body 200 and a piezoelectric vibrator 300. The seat body 100 is provided with a valve slot 111 and an outlet 101 connected to the valve slot 111. The cover body 200 is arranged on a side of the seat body 100 provided with the valve slot 111, and is provided with an inlet 201. A cover slot 203 connected to the inlet 201 is provided on a side of the cover body 200 close to the seat body 100. The two ends of the piezoelectric vibrator 300 are respectively arranged as a fixed end 301 and a free end 302. The fixed end 301 is fixed to a side of the seat body 100 provided with the valve slot 111, so that the piezoelectric vibrator 300 and the inner wall of the valve slot 111 enclose a valve cavity 102, and the piezoelectric vibrator 300 and the inner wall of the cover slot 203 enclose a cover cavity 202. The free end 302 cooperates with the seat body 100 to form an active valve 401 for connecting the valve cavity 102 and the cover cavity 202. The inner wall of the cover groove 203 is provided with a first filling structure 220, which is configured to be spaced apart from the piezoelectric vibrator 300 when the piezoelectric vibrator 300 vibrates toward the cover body 200 to the amplitude.

[0049] In the heat dissipation device 10 in the first embodiment, the first filling structure 220 fills a part of the cover cavity 202 area, so that while the volume of the cover cavity 202 is reduced, the distance between the free end 302 of the piezoelectric vibrator 300 and the bottom wall of the cover groove 203 remains unchanged. When the free end 302 deflects toward one side of the cover body 200, the resistance against the deflection of the free end 302 remains basically unchanged, and the volume change rate of the cover cavity 202 increases, and there will be a greater positive pressure in the cover cavity 202 to drive more fluid to flow into the valve cavity 102. When the free end 302 deflects toward one side of the seat body 100, the pulling force of the fluid in the cover cavity 202 on the free end 302 remains basically unchanged, and the cover cavity 202 will have a higher negative pressure to draw more fluid from the outside, so that more fluid in the cover cavity 202 flows into the valve cavity 102, and the flow rate of the outlet 101 increases, thereby improving the heat dissipation performance of the heat dissipation device 10.

[0050] Specifically in this embodiment, the volume of the cover cavity 202 is greater than the volume of the valve cavity 102 .

[0051] like Figure 1 and Figure 2 As shown, optionally, the first filling structure 220 includes a first filling protrusion 221, which is located on the bottom wall of the valve groove 111 and divides the cover cavity 202 into an inlet cavity 204 connected to the inlet port 201 and a buffer cavity 205 connected to the active valve 401, and the first filling protrusion 221 cooperates with the free end 302 to form a control valve 403 for connecting the inlet cavity 204 and the buffer cavity 205.

[0052] like Figure 1As shown, when the free end 302 deflects toward one side of the seat body 100, the volume of the inlet cavity 204 and the volume of the buffer cavity 205 both increase, and the internal pressures thereof both decrease, the control valve 403 opens, and the fluid enters the inlet cavity 204 from the outside unimpeded, and then flows to the buffer cavity 205. The volume of the valve cavity 102 decreases, and the internal pressure thereof increases, and at the same time the active valve 401 closes, preventing the compressed fluid in the valve cavity 102 from flowing to the buffer cavity 205, and more compressed gas in the valve cavity 102 is ejected outward through the outlet 101.

[0053] It should be noted that the closing of the active valve 401 means that the free end 302 tends to fit the base 100 , but there is always a gap between the free end 302 and the base 100 .

[0054] like Figure 2 As shown, when the free end 302 is deflected toward one side of the cover body 200, the volume of the buffer chamber 205 decreases, and its internal pressure increases, the flow cross-section area of ​​the control valve 403 also decreases, and its flow resistance increases, while the volume of the valve chamber 102 increases, and its internal pressure decreases, the active valve 401 opens, and more compressed fluid in the buffer chamber 205 enters the valve chamber 102 through the active valve 401, and the flow rate at the outlet 101 increases, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0055] like Figure 1 As shown, specifically, the control valve 403 is located between the fixed end 301 and the active valve 401. In this way, it is ensured that the first protrusion 104 can cooperate with the free end 302 to form the control valve 403, and the flow cross-section area of ​​the control valve 403 is maintained within a preset range, thereby improving the reliability of the heat dissipation device 10.

[0056] like Figure 1 As shown, specifically, when the buffer cavity 205 and the valve cavity 102 are in a pressure balance state, the top surface of the first filling protrusion 221 is arranged parallel to the free end 302. In this way, when the free end 302 deflects toward one side of the seat body 100, the flow cross-section area of ​​the control valve 403 gradually increases in the direction of flowing from the inlet cavity 204 to the buffer cavity 205, and its flow resistance decreases, thereby ensuring that the flow in the inlet cavity 204 can flow smoothly into the buffer cavity 205, thereby improving the reliability of the heat dissipation device 10.

[0057] In other embodiments, the top surface of the first filling protrusion 221 may also be configured as an inclined surface or a curved surface.

[0058] like Figure 3As shown, optionally, the first filling structure 220 includes a second filling protrusion 222, and the second filling protrusion 222 is located on the side of the valve slot 111 away from the active valve 401. In this way, without increasing the height of the cover cavity 202, the volume of the second filling protrusion 222 can be made larger to fill more of the cover cavity 202, so that the volume change rate of the cover cavity 202 is further increased, the cover cavity 202 will have a higher pressure, and the fluid flow to the valve cavity 102 is further increased, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0059] The first filling structure 220 may be integrally formed with the cover body 200. The outer surface of the second filling protrusion 222 may be configured as a stepped surface, an inclined surface, or a curved surface.

[0060] like Figure 4 As shown, optionally, the inner wall of the valve slot 111 is provided with a second filling structure 130, and the second filling structure 130 is configured to be spaced apart from the piezoelectric vibrator 300 when the piezoelectric vibrator 300 vibrates toward the seat body 100 to the amplitude. In this way, the second filling structure 130 fills a part of the valve cavity 102 area, and the volume of the valve cavity 102 is reduced, so that when the free end 302 is deflected, the volume change rate of the valve cavity 102 increases, and there will be a greater positive pressure in the valve cavity 102 to drive more fluid to spray out from the outlet 101, and there will be a greater negative pressure in the valve cavity 102 to suck more fluid from the cover cavity 202, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0061] Specifically, the second filling structure 130 includes a third filling protrusion 131, and the third filling protrusion 131 is located on a side of the valve slot 111 away from the active valve 401. In this way, without increasing the height of the valve cavity 102, the volume of the third filling protrusion 131 can be made larger to fill more of the valve cavity 102, so that the volume change rate of the valve cavity 102 is further increased, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0062] The second filling structure 130 may be integrally formed with the cover body 200. The outer surface of the third filling protrusion 131 may be configured as a stepped surface, an inclined surface or a curved surface.

[0063] Optionally, the number of outlets 101, the number of valve slots 111, and the number of piezoelectric vibrators 300 are all at least one. Each fixed end 301 is fixed to a side of the seat body 100 where the valve slot 111 is provided, so that the inner wall of the cover slot 203 and each piezoelectric vibrator 300 are surrounded to form a cover cavity 202. Each piezoelectric vibrator 300 and the inner wall of each valve slot 111 are correspondingly surrounded to form each valve cavity 102. Each valve cavity 102 is connected to at least one outlet 101. Each free end 302 is correspondingly matched with the seat body 100 to form each active valve 401. Each active valve 401 is correspondingly connected to each valve cavity 102, and is also connected to the cover cavity 202. In this way, the heat dissipation effect of the heat dissipation device 10 is improved by increasing the number of piezoelectric vibrators 300.

[0064] Specifically in this embodiment, there are two piezoelectric vibrators 300 and two first filling protrusions 221. When the assembly relationship between the two piezoelectric vibrators 300 and the base body 100 is the same as that in the first embodiment, the two first filling protrusions 221 are arranged at intervals on the bottom wall of the cover groove 203, and the cover cavity 202 is divided into a buffer cavity 205 and two inlet cavities 204. The two first filling protrusions 221 and the two free ends 302 are matched to form two control valves 403, and the buffer cavity 205 is connected to the two inlet cavities 204 through the two control valves 403. When the assembly relationship between the two piezoelectric vibrators 300 and the seat body 100 is the same as that of the third embodiment, the two first filling protrusions 221 are spaced apart on the bottom wall of the cover groove 203, and divide the cover cavity 202 into two buffer cavities 205 and an inlet cavity 204, and the two first filling protrusions 221 correspond to the two free ends 302 to form two control valves 403, and the inlet cavity 204 is connected to the two buffer cavities 205 through the two control valves 403.

[0065] like Figure 5 As shown, in one embodiment, a heat dissipation device 10 is also provided, including a seat body 100, a cover body 200 and a piezoelectric vibrator 300. The seat body 100 is provided with an outlet 101. The cover body 200 is arranged on one side of the seat body 100 and is provided with an inlet 201. The two ends of the piezoelectric vibrator 300 are respectively arranged as a fixed end 301 and a free end 302. The fixed end 301 is fixed to a side of the seat body 100 close to the cover body 200, so that the seat body 100 and the piezoelectric vibrator 300 are surrounded to form a valve cavity 102 connected to the outlet 101, and the cover body 200 and the piezoelectric vibrator 300 are surrounded to form a cover cavity 202 connected to the inlet 201. The free end 302 cooperates with the seat body 100 to form an active valve 401 for connecting the valve cavity 102 and the cover cavity 202. The active valve 401 is arranged at a distance from the outlet 101.

[0066] like Figure 5As shown, when the heat dissipation device 10 is in a balanced state, the piezoelectric vibrator 300 is in a middle position (ie, the piezoelectric vibrator 300 is in a flat state), and the cover cavity 202 and the valve cavity 102 are in a pressure balanced state.

[0067] It should be noted that when the cover cavity 202 and the valve cavity 102 are in a pressure balance state, the height of the cover cavity 202 (eg Figure 5 The height indicated by h2 in the figure should be greater than the maximum vibration height of the free end 302 toward the cover body 200; at the same time, the height of the cover cavity 202 also determines the pressure in the cover cavity 202, that is, if the height of the cover cavity 202 is too large, the pressure change in the cover cavity 202 will be small, and the effect of the cover cavity 202 sucking the external cooling fluid from the inlet 201 cannot be guaranteed, so the height of the cover cavity 202 should not be too high. Specifically in this embodiment, when the cover cavity 202 and the valve cavity 102 are in a pressure balance state, the height of the cover cavity 202 is 20μm to 1000μm.

[0068] It should be noted that when the cover cavity 202 and the valve cavity 102 are in a pressure balance state, the height of the flow cross section of the active valve 401 (eg Figure 5 The height indicated by h1 in the figure should be greater than the maximum vibration height of the free end 302 toward the seat body 100; at the same time, in order to ensure a good flow blocking effect of the active valve 401, the height of the flow cross section of the active valve 401 cannot be too large. Specifically in this embodiment, when the heat dissipation device 10 is in a balanced state, the height of the flow cross section of the active valve 401 is 10 μm to 150 μm.

[0069] It should be noted that the length of the active valve 401 along the fluid flow direction (eg Figure 5 The larger the length (indicated by w in the figure), the greater the pressure loss of the compressed fluid therein, and the smaller the flow rate from the cover cavity 202 to the valve cavity 102 will be; however, the smaller the length of the active valve 401 along the fluid flow direction, the greater the flow rate of the compressed fluid flowing back from the valve cavity 102 to the cover cavity 202 will be. Specifically in this embodiment, when the heat dissipation device 10 is in a balanced state, the length of the active valve 401 along the fluid flow direction is 10 μm to 1500 μm.

[0070] Specifically in this embodiment, the outlet 101 is disposed on a side of the base 100 away from the cover 200. When the heat dissipation device 10 is in a balanced state, the distance between the active valve 401 and the outlet 101 along the direction perpendicular to the axis of the outlet 101 (eg Figure 5 The spacing shown in a) is 50μm to 3000μm.

[0071] like Figure 6As shown, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the seat body 100, the volume of the cover cavity 202 increases, and its internal pressure decreases accordingly, while the volume of the valve cavity 102 decreases, and its internal pressure increases accordingly. At the same time, the flow cross-sectional area of ​​the active valve 401 is reduced to prevent the compressed fluid in the valve cavity 102 from flowing into the cover cavity 202, ensuring that the external cooling fluid enters the cover cavity 202 from the inlet 201, and the compressed fluid in the valve cavity 102 is ejected from the outlet 101.

[0072] like Figure 7 As shown, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the cover body 200, the volume of the cover cavity 202 decreases, and its internal pressure increases accordingly, while the volume of the valve cavity 102 increases, and its internal pressure decreases accordingly, and at the same time, the flow cross-sectional area of ​​the active valve 401 increases, ensuring that the compressed fluid in the cover cavity 202 will enter the valve cavity 102 through the active valve 401. In this process, part of the compressed fluid will flow back from the outlet 101 to the valve cavity 102, and the present application reduces the reflux amount of the compressed fluid at the outlet 101 and increases the net outflow amount of the compressed fluid at the outlet 101 by spacing the outlet 101 and the active valve 401 in a direction perpendicular to the axis of the outlet 101.

[0073] Specifically in this embodiment, the free end 302 is configured to be spaced apart from the base 100 when the piezoelectric vibrator 300 vibrates toward the base 100 to the amplitude, and to be spaced apart from the cover 200 when the piezoelectric vibrator 300 vibrates toward the cover 200 to the amplitude. In this way, it is ensured that the free end 302 will not collide with the base 100 and the cover 200 to generate noise, and the service life of the piezoelectric vibrator 300 is extended, thereby improving the reliability of the heat dissipation device 10.

[0074] It should be noted that the piezoelectric vibrator 300 vibrates toward the base 100 to an amplitude that means that the piezoelectric vibrator 300 vibrates toward the base 100 to a maximum displacement value. The piezoelectric vibrator 300 vibrates toward the cover 200 to an amplitude that means that the piezoelectric vibrator 300 vibrates toward the cover 200 to a maximum displacement value. The piezoelectric vibrator 300 operates at its resonant frequency, at which time the piezoelectric vibrator 300 has a maximum displacement value.

[0075] The piezoelectric vibrator 300 vibrates under control to repeat the above process continuously, so that the external cooling fluid is continuously drawn into the cover cavity 202 from the inlet 201, then enters the valve cavity 102 through the active valve 401, and finally sprayed onto the heating element 20 from the outlet 101, thereby achieving continuous heat dissipation of the heating element 20.

[0076] When the heat dissipation device 10 in the above embodiment is used, the piezoelectric vibrator 300 vibrates at a high speed under an AC driving signal of a specific frequency, and the free end 302 of the piezoelectric vibrator 300 swings up and down accordingly, and the volume of the cover cavity 202 and the valve cavity 102 changes accordingly, resulting in a change in pressure. At the same time, the active valve 401 is also constantly opening and closing. Under the joint action of the two, the cooling fluid is driven to flow unidirectionally from the cover cavity 202 to the valve cavity 102, and finally sprayed from the outlet 101 onto the heating element 20 to achieve heat dissipation of the heating element 20. Compared with the passive heat dissipation system in the prior art, the heat dissipation device 10 in the present application has at least the following advantages: 1. The heat dissipation device 10 is formed by assembling the cover body 200, the piezoelectric vibrator 300 and the seat body 100, and has a simple structure, without the movable fan blade structure of a traditional fan, and can provide a specific air volume while being easy to miniaturize, which can meet the heat dissipation requirements and miniaturization trend of electronic products. 2. The high-speed vibrating piezoelectric vibrator 300 drives the fluid flow, which can make it work in the ultrasonic frequency band above 20kHz, without generating noise audible to the human ear, thus improving the user experience. 3. Without increasing the complexity of the heat dissipation device 10, an active valve 401 structure is added inside it to improve the working efficiency of the heat dissipation device 10. 4. The active valve 401 is directly controlled to open and close by an electrical signal, and there is no problem of fatigue damage. The opening and closing of the active valve 401 is synchronized with the change of chamber pressure, with a fast response speed, no lag effect, and higher working efficiency. At the same time, the piezoelectric vibrator 300 and the active valve 401 are combined into one, without adding a separate one-way valve structure, with a simple structure and easy miniaturization. 5. By spacing the outlet 101 and the active valve 401, the flow path between the outlet 101 and the active valve 401 is increased. When the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the cover body 200, the reflux amount of the compressed fluid at the outlet 101 is reduced, and the net outflow amount of the compressed fluid at the outlet 101 is increased, thereby improving the heat dissipation performance of the heat dissipation device 10.

[0077] The piezoelectric vibrator 300 may be of any structural shape, for example, the piezoelectric vibrator 300 may be of a rectangular, circular, annular, semicircular, etc. Specifically in this embodiment, the piezoelectric vibrator 300 is arranged in a rectangular shape, and the two long sides of the piezoelectric vibrator 300 are respectively arranged as a fixed end 301 and a free end 302, or the two short sides of the piezoelectric vibrator 300 are respectively arranged as a fixed end 301 and a free end 302.

[0078] Optionally, the piezoelectric vibrator 300 includes an elastic substrate and a piezoelectric crystal, and the piezoelectric crystal is attached to at least one side of the elastic substrate.

[0079] The elastic substrate may be made of stainless steel, copper alloy, aluminum alloy, titanium alloy, etc. The piezoelectric crystal may be a multilayer ceramic or a single-layer ceramic.

[0080] In one embodiment, the number of outlets 101 and the number of piezoelectric vibrators 300 are at least one, and each fixed end 301 is fixed to a side of the seat body 100 close to the cover body 200, so that the cover body 200 and each piezoelectric vibrator 300 are surrounded by a cover cavity 202, and each piezoelectric vibrator 300 is correspondingly surrounded by the seat body 100 to form a valve cavity 102, and each valve cavity 102 is connected to at least one outlet 101, and each free end 302 is correspondingly matched with the seat body 100 to form each active valve 401, and each active valve 401 is correspondingly connected to each valve cavity 102 and is connected to the cover cavity 202.

[0081] The volume of the valve cavity 102 is smaller than the volume of the cover cavity 202. The cover body 200 and each piezoelectric vibrator 300 are arranged to form the cover cavity 202. The cover body 200 and each piezoelectric vibrator 300 may be arranged together to form the cover cavity 202, or each piezoelectric vibrator 300 may be arranged correspondingly with the cover body 200 to form the cover cavity 202.

[0082] In order to further understand the working principle of the heat dissipation device 10 in this embodiment, several embodiments are described in detail below.

[0083] like Figure 5 , Figure 6 and Figure 7 As shown, in the second embodiment, two second grooves 105 are provided at intervals on one side of the seat body 100 close to the cover body 200, and a second protrusion 106 is provided on the seat body 100 between the two second grooves 105. There are two piezoelectric vibrators 300, and the two piezoelectric vibrators 300 are arranged side by side on one side of the seat body 100 close to the cover body 200. The two fixed ends 301 are far away from each other and are fixed between the seat body 100 and the cover body 200, and the two free ends 302 are respectively matched with the second protrusions 106 to form two active valves 401.

[0084] like Figure 5 As shown, when the heat dissipation device 10 is in a balanced state, the two piezoelectric vibrators 300 are both in a middle position, and the cover cavity 202 and the valve cavity 102 are in a pressure balanced state.

[0085] like Figure 6 As shown, when the free ends 302 of the two piezoelectric vibrators 300 are controlled to deflect toward the side close to the second protrusion 106, the volume of the cover cavity 202 increases, and its internal pressure decreases accordingly, while the volume of the valve cavity 102 decreases, and its internal pressure increases accordingly. At the same time, the active valve 401 is closed to prevent the compressed fluid in the valve cavity 102 from flowing into the cover cavity 202, ensuring that the external cooling fluid enters the cover cavity 202 from the inlet 201, and the compressed fluid in the valve cavity 102 is ejected from the outlet 101.

[0086] like Figure 7As shown, when the free ends 302 of the two piezoelectric vibrators 300 are controlled to deflect toward the side away from the second protrusion 106, the volume of the cover cavity 202 decreases and its internal pressure increases accordingly, while the volume of the valve cavity 102 increases and its internal pressure decreases accordingly. At the same time, the active valve 401 opens to ensure that the compressed fluid in the cover cavity 202 enters the valve cavity 102 through the active valve 401.

[0087] The piezoelectric vibrator 300 vibrates under control to repeat the above process continuously, so that the external cooling fluid is continuously drawn into the cover cavity 202 from the inlet 201, and then diverted into the two valve cavities 102 through the two active valves 401, and finally sprayed onto the heating element 20 from the outlet 101, thereby achieving continuous heat dissipation of the heating element 20.

[0088] The heat dissipation device 10 in the second embodiment adopts dual piezoelectric vibrators, and the distance between the active valve 401 and the outlet 101 along the axial direction perpendicular to the outlet 101 is adjustable, so that the reflux amount of the compressed fluid at the outlet 101 is reduced, thereby maximizing the net flow at the outlet 101 and improving the heat dissipation performance of the heat dissipation device 10.

[0089] like Figure 8 , Fig. 9 and Fig.10 As shown, in the third embodiment, a first groove 103 is provided on one side of the seat body 100 close to the cover body 200, a first protrusion 104 is provided on one side of the first groove 103, the number of the piezoelectric vibrator 300 is one, the fixed end 301 is fixed between the seat body 100 and the cover body 200, and the free end 302 cooperates with the first protrusion 104 to form an active valve 401.

[0090] like Figure 8 As shown, when the heat dissipation device 10 is in a balanced state, the piezoelectric vibrator 300 is in a middle position, and the cover cavity 202 and the valve cavity 102 are in a pressure balanced state.

[0091] like Fig. 9 As shown, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the first protrusion 104, the volume of the cover cavity 202 increases, and its internal pressure decreases accordingly, while the volume of the valve cavity 102 decreases, and its internal pressure increases accordingly. At the same time, the active valve 401 is closed to prevent the compressed fluid in the valve cavity 102 from flowing into the cover cavity 202, ensuring that the external cooling fluid enters the cover cavity 202 from the inlet 201, and the compressed fluid in the valve cavity 102 is ejected from the outlet 101.

[0092] like Fig.10As shown, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side away from the first protrusion 104, the volume of the cover cavity 202 decreases and its pressure increases accordingly, while the volume of the valve cavity 102 increases and its pressure decreases accordingly. At the same time, the active valve 401 opens to ensure that the compressed fluid in the cover cavity 202 enters the valve cavity 102 through the active valve 401.

[0093] The piezoelectric vibrator 300 vibrates under control to repeat the above process continuously, so that the external cooling fluid is continuously drawn into the cover cavity 202 from the inlet 201, then enters the valve cavity 102 through the active valve 401, and finally sprayed onto the heating element 20 from the outlet 101, thereby achieving continuous heat dissipation of the heating element 20.

[0094] The heat dissipation device 10 in the third embodiment adopts a single piezoelectric vibrator, and its valve chamber 102 is also correspondingly one, so that its overall size can be made smaller. At the same time, the flow rate at the outlet 101 will be reduced accordingly, which can be applied to some occasions with higher requirements for miniaturization.

[0095] like Fig.11 , Fig.12 and Fig.13 As shown, in the fourth embodiment, two third grooves 107 are provided at intervals on the side of the seat body 100 close to the cover body 200, and third protrusions 108 are provided on the sides of the two third grooves 107 away from each other. There are two piezoelectric vibrators 300, and the two piezoelectric vibrators 300 are arranged side by side on the side of the seat body 100 close to the cover body 200. The two fixed ends 301 are close to each other and are fixed on the seat body 100 between the two third grooves 107, and the two free ends 302 correspond to the two third protrusions 108 to form two active valves 401.

[0096] The working principle of the heat sink 10 in the fourth embodiment is the same as that of the heat sink 10 in the first embodiment, and will not be described in detail here. Compared with the heat sink 10 in the first embodiment, the difference of the heat sink 10 in the third embodiment is that the fixed ends 301 of the two piezoelectric vibrators 300 are close together, and the two free ends 302 are far away from each other, so that the positions of the outlets 101 of the two valve cavities 102 are also different (that is, the spacing between the outlets 101 of the two valve cavities 102 is different), which can be applied to some occasions with special requirements for the position of the outlet 101.

[0097] like Fig.14As shown, in the fifth embodiment, the number of the outlets 101 and the number of the piezoelectric vibrators 300 are both multiple, and the multiple piezoelectric vibrators 300 are arranged in an array on the side of the seat body 100 close to the cover body 200, and are enclosed together with the cover body 200 to form a cover cavity 202. Each piezoelectric vibrator 300 is enclosed with the seat body 100 to form a separate valve cavity 102, and each valve seat is connected to at least one outlet 101. Each free end 302 is enclosed with the seat body 100 to form a separate active valve 401. Each active valve 401 is correspondingly connected to each valve cavity 102, and is also connected to the cover cavity 202.

[0098] The heat sink 10 in the fifth embodiment integrates a plurality of piezoelectric vibrators 300 in a limited pump cavity, thereby improving the efficiency of the heat sink 10 and the flow rate output per unit volume.

[0099] The number of the piezoelectric vibrators 300 can be flexibly adjusted according to actual use requirements. Specifically, the number of the piezoelectric vibrators 300 can be four, six, or eight.

[0100] like Fig.15 As shown, in the sixth embodiment, a heat dissipation device 10 is provided, including a seat body 100, a cover body 200 and a piezoelectric vibrator 300. The seat body 100 is provided with an annular groove 109 and an outlet 101 connected to the annular groove 109. The cover body 200 is arranged on the side of the seat body 100 provided with the annular groove 109, and is provided with an inlet 201. The piezoelectric vibrator 300 is installed on the side of the seat body 100 provided with the annular groove 109, so that the piezoelectric vibrator 300 and the inner wall of the annular groove 109 are surrounded to form a valve cavity 102, the piezoelectric vibrator 300 and the cover body 200 are surrounded to form a cover cavity 202 connected to the inlet 201, and the piezoelectric vibrator 300 and the seat body 100 cooperate to form a ring-shaped active valve 401. The active valve 401 is used to connect the valve cavity 102 and the cover cavity 202.

[0101] The heat dissipation device 10 in the sixth embodiment arranges the active valve 401 in a ring shape so that the resonance frequency of the piezoelectric vibrator 300 is the same on all four sides, thereby reducing the energy wasted on useless vibration modes when the piezoelectric vibrator 300 is working. More vibration energy of the piezoelectric vibrator 300 is used to drive the airflow to flow along a preset path, thereby improving the heat dissipation performance of the heat dissipation device 10.

[0102] like Fig.15 As shown, optionally, the valve seat located on the inner side of the annular groove 109 is set as a first protrusion 110, the piezoelectric vibrator 300 is set in a ring shape, the outer end of the piezoelectric vibrator 300 is fixed between the seat body 100 and the cover body 200, and the inner end of the piezoelectric vibrator 300 cooperates with the first protrusion 110 to form an active valve 401.

[0103] When the heat dissipation device 10 is in a balanced state, the piezoelectric vibrator 300 is in a middle position, and the cover cavity 202 and the valve cavity 102 are in a pressure balanced state.

[0104] When the inner end of the piezoelectric vibrator 300 is controlled to arch toward the side close to the first protrusion 110, the volume of the cover cavity 202 increases and its internal pressure decreases accordingly, while the volume of the valve cavity 102 decreases and its internal pressure increases accordingly. At the same time, the active valve 401 is closed to prevent the compressed fluid in the valve cavity 102 from flowing into the cover cavity 202, ensuring that the external cooling fluid enters the cover cavity 202 from the inlet 201, and the compressed fluid in the valve cavity 102 is ejected from the outlet 101.

[0105] When the inner end of the piezoelectric vibrator 300 is controlled to arch toward the side close to the cover body 200, the volume of the cover cavity 202 decreases and its internal pressure increases accordingly, while the volume of the valve cavity 102 increases and its internal pressure decreases accordingly. At the same time, the active valve 401 opens to ensure that the compressed fluid in the cover cavity 202 enters the valve cavity 102 through the active valve 401.

[0106] The piezoelectric vibrator 300 vibrates under control to repeat the above process continuously, so that the external cooling fluid is continuously drawn into the cover cavity 202 from the inlet 201, then enters the valve cavity 102 through the active valve 401, and finally sprayed onto the heating element 20 from the outlet 101, thereby achieving continuous heat dissipation of the heating element 20.

[0107] Specifically, the vibration height when the inner end of the piezoelectric vibrator 300 vibrates toward the first convex portion 110 to the amplitude is set to a first height, and when the cover cavity 202 and the valve cavity 102 are in a pressure balance state, the height of the flow cross section of the active valve 401 is set to a second height, and the second height is greater than or equal to the first height. In this way, the inner end of the piezoelectric vibrator 300 can smoothly vibrate toward the first convex portion 110 to the maximum displacement position, ensuring that there is no interference between the piezoelectric vibrator 300 and the seat body 100, thereby improving the reliability of the heat dissipation device 10.

[0108] Specifically, the vibration height of the piezoelectric vibrator 300 when vibrating toward the cover body 200 to the amplitude is set to the third height, and when the cover cavity 202 and the valve cavity 102 are in a pressure balance state, the height of the cover cavity 202 is set to the fourth height, and the fourth height is greater than or equal to the third height. In this way, the inner end of the piezoelectric vibrator 300 can smoothly vibrate toward the cover body 200 to the maximum displacement position, ensuring that there is no interference between the piezoelectric vibrator 300 and the cover body 200, thereby improving the reliability of the heat dissipation device 10.

[0109] Optionally, a second convex portion is provided on the outer side of the second annular groove 109, the piezoelectric vibrator 300 is provided in an annular shape, the inner end of the piezoelectric vibrator 300 is fixed on a valve seat located on the inner side of the annular groove 109, and the outer end of the piezoelectric vibrator 300 cooperates with the second convex portion to form an active valve 401. The working principle of the heat dissipation device 10 in this embodiment is the same as or similar to the working principle of the heat dissipation device 10 in the above-mentioned embodiment, and will not be described in detail here.

[0110] like Fig.15 As shown, optionally, the axis of the annular groove 109 and the axis of the piezoelectric vibrator 300 are both located on the same straight line. In this way, the length of the active valve 401 along the fluid flow direction is evenly distributed, so that the pressure in the valve cavity 102 is also more evenly distributed, and the flow at each outlet 101 is also more even, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0111] like Fig.15 As shown, optionally, the number of the outlet 101 is at least one, and each outlet 101 is arranged at intervals around the axis of the annular groove 109 and is connected to the annular groove 109. In this way, by increasing the number of the outlets 101, the jet heat dissipation area of ​​the heat dissipation device 10 is increased, thereby improving the practicality of the heat dissipation device 10.

[0112] The number of each valve cavity 102 connected to the outlet 101 can be flexibly adjusted according to the actual use needs. The outlet 101 can be set in the middle area of ​​the side of the seat body 100 away from the cover body 200, or in the non-middle area of ​​the side of the seat body 100 away from the cover body 200. The outlet 101 can be set in a rectangular, circular, conical, Y-shaped, or even a special-shaped structure.

[0113] like Fig.15 As shown, optionally, the number of the inlet 201 is at least one, and each inlet 201 is arranged at intervals around the axis of the annular groove 109, and is connected to the cover cavity 202. In this way, the distribution of the cooling airflow in the cover cavity 202 is more uniform, and the pressure in the cover cavity 202 is also more uniform, ensuring that the cooling fluid in the cover cavity 202 can evenly pass through the active valve 401 and flow into the valve cavity 102, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0114] The number of each cover cavity 202 connected to the inlet 201 can be flexibly adjusted according to the actual use needs. The inlet 201 can be set in the middle area of ​​the side of the cover body 200 away from the base body 100, or in the non-middle area of ​​the side of the cover body 200 away from the base body 100, or even on the side wall of the cover body 200. The inlet 201 can be set in a rectangular, circular, conical, Y-shaped, or even a special-shaped structure.

[0115] Optionally, the number of outlets 101, the number of annular grooves 109 and the number of piezoelectric vibrators 300 are all at least one, and each piezoelectric vibrator 300 is installed on the side of the seat body 100 where the annular groove 109 is provided, so that the cover body 200 and each piezoelectric vibrator 300 are jointly arranged to form a cover cavity 202, and each piezoelectric vibrator 300 and the inner wall of each annular groove 109 are correspondingly arranged to form each valve cavity 102, and each valve cavity 102 is connected with at least one outlet 101, and each piezoelectric vibrator 300 cooperates with the seat body 100 to form each active valve 401, and each active valve 401 is correspondingly connected with each valve cavity 102, and is also connected with the cover cavity 202. In this way, the cover cavity 202 can cooperate with a piezoelectric vibrator 300, an active valve 401 and a valve cavity 102 to form a heat dissipation micropump. By increasing the number of piezoelectric vibrators 300, active valves 401 and valve cavities 102, the integrated number of heat dissipation micropumps is increased, thereby improving the heat dissipation efficiency of the heat dissipation device 10 and the flow rate output per unit volume.

[0116] like Fig.16 As shown, in the seventh embodiment, a heat dissipation device 10 is provided, including a seat body 100, a cover body 200 and a piezoelectric vibrator 300. The seat body 100 is provided with a valve slot 111 and an outlet 101 connected to the valve slot 111. The cover body 200 is arranged on a side of the seat body 100 provided with the valve slot 111, and is provided with an inlet 201. The two ends of the piezoelectric vibrator 300 are respectively arranged as a fixed end 301 and a free end 302, and the fixed end 301 is fixed to the side of the seat body 100 provided with the valve slot 111, so that the piezoelectric vibrator 300 and the inner wall of the valve slot 111 are surrounded to form a valve cavity 102, and the piezoelectric vibrator 300 and the cover body 200 are surrounded to form a cover cavity 202 connected to the inlet 201. The free end 302 cooperates with the seat body 100 to form an active valve 401 for connecting the valve cavity 102 and the cover cavity 202. A flow blocking portion 120 is provided on a side wall of the valve slot 111 close to the active valve 401 . The flow blocking portion 120 is used to prevent the fluid in the valve cavity 102 from flowing back to the active valve 401 .

[0117] In the seventh embodiment of the heat dissipation device 10, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the cover body 200, the volume of the valve cavity 102 increases and the internal pressure thereof decreases accordingly. Part of the fluid will flow back from the outlet 101 and flow toward the active valve 401, and the flow blocking portion 120 will prevent this part of the fluid from flowing into the active valve 401, thereby reducing the reflux amount of the fluid at the active valve 401 and increasing the net outflow amount of the fluid at the outlet 101, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0118] like Fig.16 and Fig.17As shown, optionally, the blocking portion 120 is configured as a blocking groove 121, and the inner wall of the blocking groove 121 is configured to collide with the reflux fluid when the reflux fluid in the valve cavity 102 flows toward the active valve 401, so as to reverse the flow direction of the reflux fluid. In this way, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the cover body 200, the volume of the valve cavity 102 increases, and its internal pressure decreases accordingly, and part of the fluid will flow back from the outlet 101 and flow toward the active valve 401, and the inner wall of the blocking groove 121 will collide with the part of the reflux fluid, so that the part of the fluid reverses its flow direction before flowing into the active valve 401 and flows back to the outlet 101, thereby reducing the reflux amount of the fluid at the active valve 401 and increasing the net outflow amount of the fluid at the outlet 101, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0119] like Fig.16 As shown, specifically in this embodiment, the choke groove 121 is arranged in a rectangular shape along a cross section perpendicular to its own extension direction, and the side wall of the choke groove 121 away from the active valve 401 and the bottom wall of the valve groove 111 are located in the same plane.

[0120] like Fig.17 As shown, specifically in this embodiment, the choke groove 121 is triangular in cross section along a direction perpendicular to its own extension direction, the bottom wall of the choke groove 121 is inclined, and the side wall of the choke groove 121 away from the active valve 401 and the bottom wall of the valve groove 111 are located in the same plane.

[0121] It should be noted that the cross section of the choke groove 121 perpendicular to its extension direction can also be set to other shapes, as long as the inner wall of the choke groove 121 can collide with the fluid flowing back from the outlet 101 to reverse the flow direction of this part of the fluid.

[0122] like Fig.18As shown, optionally, the blocking portion 120 is set as a blocking surface 122, and the blocking surface 122 cooperates with the free end 302 to form a blocking channel 402 for connecting the valve cavity 102 and the active valve 401, and the flow cross-section area of ​​the blocking channel 402 gradually decreases along the direction close to the active valve 401. In this way, when the fluid flows back to the active valve 401, along the flow direction of the fluid, the flow cross-section area of ​​the blocking channel 402 gradually decreases, and its flow resistance also gradually increases accordingly, so that the reflux amount of the fluid at the active valve 401 is reduced; and when the fluid in the cover cavity 202 flows to the valve cavity 102, along the flow direction of the fluid, the flow cross-section area of ​​the blocking channel 402 gradually increases, and its flow resistance also gradually decreases accordingly, so that more fluid flows from the cover cavity 202 into the valve cavity 102, and the net outflow amount of the fluid at the outlet 101 is increased. In addition, due to the existence of the flow-blocking surface 122, the space between the free end 302 and the base is smaller, and the stored fluid is also less. When the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the cover body 200, the part of the refluxed fluid is reduced accordingly, so that more fluid flows from the cover cavity 202 into the valve cavity 102, which increases the outflow of fluid at the outlet 101, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0123] like Fig.19 As shown, specifically in this embodiment, the flow blocking surface 122 is tilted. In this way, when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the seat body 100, the fluid below the free end 302 flows toward the flow blocking surface 122 and hits the flow blocking surface 122, generating a velocity component in the direction close to the outlet 101, driving the fluid to flow toward the outlet 101, so that the outflow of the fluid at the outlet 101 increases, thereby improving the heat dissipation effect of the heat dissipation device 10.

[0124] In other embodiments, the flow blocking surface 122 may also be configured as an arc surface or a parabolic surface.

[0125] Optionally, the number of the outlets 101, the number of the valve slots 111 and the number of the piezoelectric vibrators 300 are at least one, and each fixed end 301 is fixed to the side of the seat body 100 where the valve slot 111 is provided, so that the cover body 200 and each piezoelectric vibrator 300 are surrounded to form a cover cavity 202, and each piezoelectric vibrator 300 and the inner wall of each valve slot 111 are correspondingly surrounded to form each valve cavity 102. Each valve cavity 102 is connected to at least one outlet 101. Each free end 302 is matched with the seat body 100 to form each active valve 401, and each active valve 401 is correspondingly connected to each valve cavity 102 and is connected to the cover cavity 202. The side wall of each valve slot 111 corresponding to the side close to each active valve 401 is provided with a flow blocking portion 120. In this way, by increasing the number of the piezoelectric vibrators 300 , the valve slots 111 and the flow blocking parts 120 , the heat dissipation efficiency of the heat dissipation device 10 and the flow rate output per unit volume thereof are improved.

[0126] like Fig. 20 As shown, in the eighth embodiment, a heat dissipation device 10 is provided, including a base 100, a cover 200 and a piezoelectric vibrator 300. The base 100 is provided with an outlet 101. The outlet 101 is configured to generate a flow resistance difference when the fluid enters and exits the outlet 101, so as to prevent the fluid from flowing back at the outlet 101. The cover 200 is arranged on one side of the base 100, and is provided with an inlet 201. The inlet 201 is configured to generate a flow resistance difference when the fluid enters and exits the inlet 201, so as to prevent the fluid from flowing back at the inlet 201. The two ends of the piezoelectric vibrator 300 are respectively arranged as a fixed end 301 and a free end 302. The fixed end 301 is fixed to a side of the seat 100 close to the cover 200, so that the seat 100 and the piezoelectric vibrator 300 enclose a valve cavity 102 communicating with the outlet 101, and the cover 200 and the piezoelectric vibrator 300 enclose a cover cavity 202 communicating with the inlet 201. The free end 302 cooperates with the seat 100 to form an active valve 401 for connecting the valve cavity 102 and the cover cavity 202.

[0127] In the heat dissipation device 10 in the eighth embodiment, the inlet 201 can reduce the amount of fluid reflux at the inlet 201, and the outlet 101 can reduce the amount of fluid reflux at the outlet 101, so that when the free end 302 of the piezoelectric vibrator 300 is controlled to deflect toward the side close to the cover body 200, more fluid in the cover cavity 202 flows into the valve cavity 102, and less fluid ejected from the outlet 101 flows back into the valve cavity 102, thereby increasing the net outflow of the fluid at the outlet 101 and improving the heat dissipation effect of the heat dissipation device 10.

[0128] Specifically in this embodiment, the inlet 201 and the outlet 101 are both configured as one of a Y-shaped hole, a tapered hole, and a Tesla valve structure hole. In other embodiments, the inlet 201 and the outlet 101 can also be configured as holes of other shapes, as long as a flow resistance difference between the inlet and outlet of the fluid can be formed to reduce backflow.

[0129] As shown in FIG. 21 and FIG. 22, in one embodiment, a heat dissipation system 1 is provided, comprising at least one heat dissipation device 10 as in any of the above embodiments. In this way, the flow rate of the heat dissipation system 1 is the superposition of the flow rates of each heat dissipation device 10, that is, the flow rate of the heat dissipation system 1 can be flexibly adjusted according to the actual use needs, so as to be applicable to the scene requiring a large flow rate, thereby improving the applicability of the heat dissipation system 1.

[0130] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0131] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0132] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0133] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0134] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0135] It should also be understood that when explaining the connection relationship or positional relationship of elements, although not explicitly described, the connection relationship and positional relationship are interpreted as including an error range, which should be within the acceptable deviation range of a specific value determined by those skilled in the art. For example, "approximately", "approximately" or "substantially" may mean within one or more standard deviations, which are not limited here.

[0136] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0137] The above embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A heat dissipation device, characterized in that: include: A seat body, which is provided with a valve slot and an outlet communicated with the valve slot; A cover body, which is arranged on a side of the seat body provided with the valve groove and provided with an inlet, and a side of the cover body close to the seat body is provided with a cover groove communicating with the inlet; A piezoelectric vibrator, whose two ends are respectively arranged as a fixed end and a free end, the fixed end is fixed to a side of the seat body provided with the valve slot, so that the piezoelectric vibrator and the inner wall of the valve slot are surrounded to form a valve cavity, the piezoelectric vibrator and the inner wall of the cover slot are surrounded to form a cover cavity, and the free end cooperates with the seat body to form an active valve for connecting the valve cavity and the cover cavity; The inner wall of the cover groove is provided with a first filling structure, and the first filling structure is configured to be spaced apart from the piezoelectric vibrator when the piezoelectric vibrator vibrates toward the cover body to a certain amplitude.

2. The heat dissipation device according to claim 1, characterized in that: The first filling structure includes a first filling protrusion, which is located on the bottom wall of the valve groove and divides the cover cavity into an inlet cavity connected to the inlet port and a buffer cavity connected to the active valve. The first filling protrusion cooperates with the free end to form a control valve for connecting the inlet cavity and the buffer cavity.

3. The heat dissipation device according to claim 2, characterized in that: The control valve is located between the fixed end and the active valve.

4. The heat dissipation device according to claim 2, characterized in that: When the buffer cavity and the valve cavity are in a pressure balanced state, the top surface of the first filling protrusion is arranged parallel to the free end.

5. The heat dissipation device according to claim 1, characterized in that: The first filling structure includes a second filling protrusion, and the second filling protrusion is located on a side of the valve slot away from the active valve.

6. The heat dissipation device according to claim 5, characterized in that: The outer surface of the second filling protrusion is configured as a stepped surface, an inclined surface or a curved surface.

7. The heat dissipation device according to claim 1, characterized in that: A second filling structure is disposed on the inner wall of the valve groove, and the second filling structure is configured to be spaced apart from the piezoelectric vibrator when the piezoelectric vibrator vibrates toward the seat body to a certain amplitude.

8. The heat dissipation device according to claim 7, characterized in that: The second filling structure includes a third filling protrusion, and the third filling protrusion is located at a side of the valve slot away from the active valve.

9. The handle structure according to any one of claims 1 to 8, characterized in that: The number of the outlets, the number of the valve slots and the number of the piezoelectric vibrators are all at least one, and each of the fixed ends is fixed to a side of the seat body where the valve slot is provided, so that the inner wall of the cover slot and each of the piezoelectric vibrators are arranged to form the cover cavity, and each of the piezoelectric vibrators and the inner wall of each of the valve slots are correspondingly arranged to form each of the valve cavities, and each of the valve cavities is connected to at least one of the outlets, and each of the free ends cooperates with the seat body to form each of the active valves, and each of the active valves is correspondingly connected to each of the valve cavities and to the cover cavity.

10. A heat dissipation system, characterized in that: The method comprises at least one heat dissipation device according to any one of claims 1 to 9.

Images