Box body appliance for cleaning special gas nozzle of PECVD (Plasma Enhanced Chemical Vapor Deposition) machine

Abstract

The invention discloses a box body appliance for cleaning a special gas nozzle of a PECVD (Plasma Enhanced Chemical Vapor Deposition) machine, and belongs to the technical field of photovoltaic production. The device comprises a cleaning box body, a lifting mounting frame, a centrifugal assembly and a driving connecting assembly. The lifting mounting frame descends when the box body upper cover is closed, and the nozzle is clamped through the locking mechanism. The centrifugal assembly is combined with the driving motor and the self-centrifugal mechanism, and stable locking and rotary centrifugation in the nozzle cleaning process are achieved. The driving connecting assembly ensures automation of the locking and separating process, and the nozzle is prevented from being impacted and damaged during cleaning. The device solves the problems that in an existing cleaning mode, the nozzle is prone to being damaged, and the cleaning effect is poor, the cleaning efficiency and quality of the special gas nozzle are improved, and the device is suitable for regular maintenance of the special gas nozzle of the PECVD machine table.

Description

Technical Field

[0001] The invention relates to the field of photovoltaic technology, in particular to a box device for cleaning a special gas nozzle of a PECVD machine. Background Art

[0002] Solar cells convert solar energy directly into electrical energy and do not produce any harmful substances during use. They are environmentally friendly and pollution-free products. Therefore, solar cells are highly favored in solving energy and environmental problems and have excellent market prospects. When producing solar cells, PECVD is required for coating.

[0003] The PECVD machine works in a low-pressure environment, exciting the gas in the process chamber through radio frequency (RF) or other forms of electric field to produce low-temperature plasma. The high-energy electrons, ions and active groups in these plasmas collide with the molecules of the process gas introduced, thereby activating and promoting chemical reactions between the gas molecules. These reactions proceed on the surface of the sample, resulting in the deposition of the product and the formation of a solid film.

[0004] The nozzle plays a vital role in the PECVD machine. It is responsible for introducing process gases (such as silane SiH4, argon Ar, etc.) into the reaction chamber at a certain flow rate and pressure. By precisely controlling the opening and closing of the nozzle, as well as the flow rate and pressure of the gas, it is possible to ensure the formation of a stable plasma during the reaction process and promote chemical reactions between gas molecules, thereby depositing high-quality thin films on the sample surface.

[0005] At present, in the coating process of the solar cell production process, the special gas nozzle in the ALD process furnace tube often produces aluminum oxide residues after the TMA reaction, which blocks the air outlet of the special gas nozzle. Due to the limitation of common tools, only the surface of the nozzle outlet can be cleaned, and the inside of the nozzle cannot be cleaned with common tools. Long-term circulation will cause the internal pipe of the nozzle to be blocked, resulting in uneven special gas output or the inability to output special gas. The commonly used method is to place the nozzle in a cleaning box and then add potassium hydroxide to the box. Potassium hydroxide reacts with the aluminum oxide residues inside the nozzle and removes the aluminum oxide residues, so as to achieve the effect of cleaning the surface and inside of the special gas nozzle at the same time. In order to improve the cleaning effect of alkaline solution on the special gas nozzle, it is often achieved by accelerating the circulation of cleaning liquid in the cleaning box. The flowing cleaning liquid impacts the special gas nozzle, which will cause the special gas nozzle to collide with each other in the cleaning box, which may easily cause damage to the special gas nozzle and affect the subsequent use of the special gas nozzle.

[0006] Therefore, in order to solve the above technical problems, the present application proposes a box device for cleaning the special gas nozzle of a PECVD machine. Summary of the invention

[0007] The object of the present invention is to provide a box device for cleaning the special gas nozzle of a PECVD machine to solve the above-mentioned shortcomings in the prior art.

[0008] In order to achieve the above-mentioned object, the present invention provides the following technical solutions: a box apparatus for cleaning a special gas nozzle of a PECVD machine, comprising a cleaning box with a cavity formed therein, a box cover is rotatably arranged at the opening position of the cavity of the cleaning box, and a water outlet pipe is installed on the box cover close to one side of the cleaning box cavity, a drainage hand valve is installed at the bottom of the cleaning cavity, and further comprising:

[0009] A lifting mounting frame is slidably arranged on the inner wall surface of the cleaning box, and a pulling connecting rod is cooperatively arranged between the upper cover of the box and the lifting mounting frame. When the upper cover of the box is closed / opened, the pulling connecting rod is used to make the lifting mounting frame descend / rise;

[0010] A centrifugal assembly, the centrifugal assembly comprising a centrifugal frame mounted on the power output end of the driving motor, a locking mechanism being arranged on the centrifugal frame, the locking mechanism being used to clamp the special gas nozzle to be cleaned placed at the central position thereof, and the driving motor being slidably mounted on the inner wall surface of the cleaning box;

[0011] A driving connection assembly includes a locking drive mechanism, which is used to connect the locking mechanism and the lifting mounting frame. When the upper cover of the box is closed and the lifting mounting frame is lowered, the locking drive mechanism drives the locking mechanism to complete the locking action of the special gas nozzle. The locking drive mechanism also includes an adaptive connection part. When the locking mechanism completes the locking action of the special gas nozzle, the adaptive connection part is used to disconnect the locking mechanism from the locking drive mechanism and the lifting mounting frame.

[0012] Preferably, the locking mechanism comprises a first ring body rotatably arranged on the centrifugal frame and a second ring body rotatably arranged on the first ring body, the first ring body is provided with a plurality of limiting grooves in a circumferential array, the second ring body is provided with coupling pins having the same number as the plurality of limiting grooves and corresponding to each other, each coupling pin is rotatably arranged with a rotating lever; and one end portion of each rotating lever is slidably engaged in the corresponding limiting groove, and the other end portion is rotatably arranged with a locking rotating rod;

[0013] The centrifugal frame is provided with an insertion rod at the center position of the multiple groups of locking rotating rods, and the insertion rod is used to insert and place the special gas nozzle. The first ring body is connected to the lifting mounting frame through a locking drive mechanism. When the lifting mounting frame descends, the locking drive mechanism is used to rotate the first ring body. A limiting rod is fixedly provided on the second ring body, and the end of the limiting rod away from the second ring body abuts against the surface of the lifting mounting frame. When the first ring body rotates, the limiting rod is used to prevent the second ring body from rotating synchronously with the first ring body, so that the first ring body and the second ring body produce relative rotation.

[0014] Preferably, the locking drive mechanism comprises a first connecting rod and a second connecting rod plugged into each other, the end of the first connecting rod away from the second connecting rod is rotatably arranged on the centrifugal frame and connected to the first ring body, a rack is fixedly installed on the inner wall surface of the cleaning box, and a toothed disc is meshed on the rack, the toothed disc is slidably arranged on the inner wall surface of the cleaning box through a mounting slide, and the mounting slide is fixedly connected to the lifting mounting frame;

[0015] The adaptive connection part is arranged between the second connecting rod and the toothed disc. When the multiple groups of locking rotating rods complete the locking action on the special gas nozzle, the adaptive connection part is used to disconnect the second connecting rod and the toothed disc.

[0016] Preferably, the adaptive connection portion comprises a first end face gear and a second end face gear meshing with each other, wherein the second end face gear is fixedly arranged on the surface of the gear plate, and the first end face gear is fixedly connected to the second connecting rod via a second spring.

[0017] Preferably, the centrifugal assembly further comprises a self-centrifugal mechanism mounted on the centrifugal frame, and when the centrifugal frame and the locking mechanism are rotated as a whole by the driving motor, the self-centrifugal mechanism is used to make the locking rotating rod rotate synchronously;

[0018] The self-centrifugal mechanism includes a first bevel gear and a second bevel gear that mesh with each other, wherein the first bevel gear is fixedly arranged on the power output shaft of the driving motor, and the second bevel gear is installed with a rotating shaft rotatably arranged on the centrifugal frame through an anti-flip mechanism, and the anti-flip mechanism is used to maintain one-way transmission of power. The self-centrifugal mechanism also includes a mounting vertical plate fixedly arranged on the centrifugal frame and having a notch, and a mounting block is slidably arranged in the notch of the mounting vertical plate through a first spring, wherein a group of the locking rotating rod and the mounting block are respectively connected and installed with a pulling synchronous belt through a synchronous pulley. When the special gas nozzle is locked by the locking mechanism, the first spring is used to keep the pulling synchronous belt in tension.

[0019] Preferably, the drive connection assembly further comprises a separation drive mechanism, and when the lifting mounting frame is lowered into place, the separation drive mechanism is used to separate the locking mechanism from the locking drive mechanism, so as to realize the overall rotation action of the centrifugal frame through the self-centrifugal mechanism;

[0020] The separation drive mechanism includes a rotating joint sleeved on the second connecting rod and a separation adjustment plate fixedly arranged on the rotating joint, the separation adjustment plate is connected to the bottom surface of the cleaning box through a telescopic member, a roller is installed on the inner wall surface of the cleaning box through a bracket, and the roller is rotatably arranged on the bracket, when the lifting mounting frame descends into place to separate the gear disc and the rack, the roller abuts against the surface of the separation adjustment plate.

[0021] Preferably, the anti-flip mechanism includes a centrifugal wheel rotatably set on the centrifugal frame and fixedly connected to the second bevel gear, and a connecting disk fixedly connected to the rotating shaft, and the connecting disk is provided with a latching tooth on the inner edge surface close to the centrifugal wheel, and the centrifugal wheel is rotatably provided with a plurality of rotating claws and a plurality of rotating heads corresponding to the plurality of rotating claws one by one, and the plurality of rotating heads are rotatably set on the surface of the centrifugal wheel and connected to the corresponding rotating claws through a return spring, and when the centrifugal wheel rotates and generates centrifugal force, the rotating claws abut against the latching teeth on the inner edge of the connecting disk.

[0022] Preferably, the cleaning box is made of acid and alkali resistant material.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] 1. Through the design of the locking mechanism, the special gas nozzle can be effectively clamped during the cleaning process, avoiding the special gas nozzle from colliding around or colliding with each other in the box when accelerating the circulation of the cleaning liquid, thereby protecting the special gas nozzle from damage and extending the service life of the nozzle.

[0025] 2. A centrifugal assembly is designed inside the box. After the special gas nozzle is locked and cleaned, the residual liquid inside and outside the nozzle can be thrown out through the overall centrifugal action and its own centrifugal action, thereby improving the cleaning efficiency.

[0026] 3. The locking mechanism adopts an adaptive connection design, which realizes the clamping of special gas nozzles of different calibers through the first end face gear, the second end face gear and the second spring, so that the box device has a wide range of applicability and can meet the cleaning needs of special gas nozzles of different models and specifications.

[0027] 4. The design of the box equipment fully considers the convenience of operation. The lifting and lowering of the lifting mounting frame and the locking / unlocking of the locking mechanism can be achieved through simple opening and closing operations of the box cover. No complicated operating steps and tools are required, which greatly improves the efficiency of cleaning work. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0029] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0030] Figure 2 It is a schematic diagram of the structure of the top view section of the present invention;

[0031] Figure 3 It is a schematic structural diagram of a side view section at one angle in the present invention;

[0032] Figure 4 For the present invention Figure 3 The enlarged structural diagram at A in the middle;

[0033] Figure 5 It is a structural schematic diagram of the locking mechanism in the present invention;

[0034] Figure 6 It is a schematic structural diagram of a side view section at another angle in the present invention;

[0035] Figure 7 It is a structural schematic diagram of a cross section of the front view in the present invention;

[0036] Figure 8 For the present invention Figure 7 The enlarged structural diagram at C in the middle;

[0037] Fig. 9 It is a schematic diagram of the structure of a part of the centrifugal assembly in the present invention;

[0038] Fig.10 For the present invention Fig. 9 The enlarged structural diagram at D in the middle;

[0039] Fig.11 It is a structural schematic diagram of the anti-flipping mechanism in the present invention;

[0040] Fig.12 It is a structural schematic diagram of the centrifugal wheel in the present invention;

[0041] Fig.13 For the present invention Figure 6 The enlarged structural diagram at B in the middle;

[0042] Fig.14 It is a schematic structural diagram of the first connecting rod and the second connecting rod in the present invention.

[0043] 1. Cleaning box; 2. Locking mechanism; 21. Limiting rod; 22. First ring body; 23. Second ring body; 24. Inserting rod; 25. Locking rotating rod; 26. Limiting groove; 28. Connecting pin; 29. ​​Rotating lever; 3. Pulling connecting rod; 4. Water outlet pipe; 5. Driving motor; 6. Box cover; 7. Centrifugal assembly; 71. Centrifugal frame; 72. Self-centrifugal mechanism; 721. Rotating shaft; 722. First spring; 723. Mounting block; 724. Mounting vertical plate; 725. Pulling synchronous belt; 726. First bevel gear; 727. Second bevel gear; 73. Anti-flipping mechanism; 731, centrifugal wheel; 732, connecting plate; 733, rotating claw; 734, return spring; 735, rotating head; 8, drainage hand valve; 9, drive connection assembly; 91, locking drive mechanism; 911, rack; 912, first connecting rod; 914, second connecting rod; 915, toothed plate; 916, mounting slide; 92, separation drive mechanism; 921, separation adjustment plate; 922, roller; 923, bracket; 924, rotating joint; 925, baffle; 93, first end face gear; 94, second end face gear; 95, second spring; 10, lifting mounting frame. DETAILED DESCRIPTION

[0044] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings.

[0045] like Figure 1-14 As shown, the present invention provides a box device for cleaning the special gas nozzle of a PECVD machine, comprising a cleaning box 1 with a cavity formed therein, a box upper cover 6 is rotatably arranged at the cavity opening position of the cleaning box 1, and a water outlet pipe 4 is installed on the box upper cover 6 close to the side of the cavity of the cleaning box 1, and a drainage hand valve 8 is installed at the bottom of the cleaning cavity. When the special gas nozzle needs to be cleaned, the special gas nozzle to be cleaned needs to be placed in the cleaning box 1, and then alkali solution is poured into the cleaning box 1, and the alkali solution reacts with the aluminum oxide residue inside the special gas nozzle and removes the aluminum oxide residue, so as to achieve the effect that the surface and the inside of the special gas nozzle can be cleaned at the same time, wherein the alkali solution can be potassium hydroxide, or an alkaline solution such as sodium hydroxide. After the special gas nozzle in the cleaning box 1 is cleaned, the external water is sprayed on the cleaned special gas nozzle and the waste liquid residue inside the box through the water outlet pipe 4, so that the pH reaches a safe neutral value, and then the drainage hand valve 8 is opened to discharge the waste liquid in the cleaning box 1;

[0046] When the upper cover 6 of the box is closed or opened, since the lifting mounting frame 10 slidably arranged on the inner wall surface of the cleaning box 1 is connected to the upper cover 6 of the box by pulling the connecting rod 3, the upper cover 6 of the box can lower or raise the lifting mounting frame 10 by pulling the connecting rod 3 when the upper cover 6 of the box is closed or opened;

[0047] A box apparatus for cleaning a special gas nozzle of a PECVD machine also includes a centrifugal assembly 7, which includes a centrifugal frame 71 installed on the power output end of a driving motor 5, and the driving motor 5 is slidably installed on the inner wall surface of a cleaning box 1. When the special gas nozzle needs to be placed in the cleaning box 1, the special gas nozzle needs to be clamped and locked by a locking mechanism 2 arranged on the centrifugal frame 71. In this way, even if the cleaning effect of the special gas nozzle is improved by accelerating the circulation of the cleaning liquid, the special gas nozzle will not collide with each other in the cleaning box 1, which effectively protects the special gas nozzle.

[0048] In one embodiment of the present invention, the locking mechanism 2 includes a first ring body 22 rotatably arranged on the centrifugal frame 71 and a second ring body 23 rotatably arranged on the first ring body 22, the first ring body 22 is provided with a plurality of limiting grooves 26 in a circumferential array, the second ring body 23 is provided with coupling pins 28 having the same number and one-to-one corresponding to the plurality of limiting grooves 26, each coupling pin 28 is rotatably arranged with a rotating lever 29; and one side end of each rotating lever 29 is slidably engaged in the corresponding limiting groove 26, and the other side end is rotatably arranged with a locking rotating rod 25, and the first ring body 22 is connected to the lifting mounting frame 10 through the locking driving mechanism 91 in the driving connection assembly 9, and when the lifting mounting frame 10 descends, the locking driving mechanism 91 drives the first ring body 22 to rotate, and At this time, since the second ring body 23 is provided with a limiting rod 21 whose end abuts against the surface of the lifting mounting frame 10, when the first ring body 22 rotates, the limiting rod 21 prevents the second ring body 23 from rotating, so that the first ring body 22 and the second ring body 23 rotate relative to each other. At this time, since the rotating lever 29 is limited by the connecting pin 28, it can only rotate through the connecting pin 28. When the first ring body 22 and the second ring body 23 rotate relative to each other, the end of each rotating lever 29 slides in the limiting groove 26, and each limiting groove 26 is arc-shaped. In this way, restricted by the arc-shaped limiting groove 26 and the connecting pin 28, each rotating lever 29 can only move in two directions, either approaching each other in the axial direction of the second ring body 23, or moving away from each other in the opposite direction of the axis.

[0049] When it is necessary to clamp the special gas nozzle, since the centrifugal frame 71 is provided with an insertion rod 24 at the center position of the multiple groups of locking rotating rods 25, and most of the nozzles are through structures, the insertion rod 24 with a smaller diameter is passed through each special gas nozzle that needs to be cleaned, so that the preliminary placement of the special gas nozzle can be completed. At this time, the upper cover 6 of the box body is closed to lower the lifting mounting frame 10, and the locking driving mechanism 91 in the driving connection assembly 9 is used to rotate the first ring body 22, so that each rotating lever 29 rotates toward the axial direction close to the second ring body 23 until each rotating lever 29 hits the surface of the special gas nozzle. At this time, the clamping operation of the special gas nozzle is completed, preventing the special gas nozzle from colliding with each other due to the lack of clamping when the special gas nozzle is placed in the cleaning box 1;

[0050] It is worth noting here that the locking drive mechanism 91 also includes an adaptive connection part. When the locking mechanism 2 completes the locking action of the special gas nozzle, the adaptive connection part is used to disconnect the locking mechanism 2 from the locking drive mechanism 91 and the lifting mounting frame 10. In this way, even if the lifting mounting frame 10 is still descending, the first ring body 22 in the locking mechanism 2 will not be rotated by the locking drive mechanism 91. In other words, when clamping a special gas nozzle with a larger diameter, even if each rotating lever 29 has already abutted against the surface of the special gas nozzle, the lifting mounting frame 10 is still descending, and the first ring body 22 will not rotate, so that the locking mechanism has a certain elastic space for locking and clamping the special gas nozzle, which can meet the locking and clamping requirements for special gas nozzles of different diameters, thereby improving the universal effect of the present invention.

[0051] In another embodiment of the present invention, the locking drive mechanism 91 includes a first connecting rod 912 and a second connecting rod 914 that are plugged into each other, the end of the first connecting rod 912 away from the second connecting rod 914 is rotatably set on the centrifugal frame 71 and connected to the first ring body 22, a rack 911 is fixedly installed on the inner wall surface of the cleaning box 1, and a toothed disc 915 is meshed on the rack 911, and the toothed disc 915 is slidably set on the inner wall surface of the cleaning box 1 through a mounting slide 916, and the mounting slide 916 is fixedly connected to the lifting mounting frame 10, and in the closed state, the cleaning box 1 is fixedly mounted on the inner wall surface of the cleaning box 1. When the upper cover 6 of the box body is closed, the lifting mounting frame 10 moves downward, so that the mounting slide plate 916 and the toothed disc 915 move downward together. At this time, the toothed disc 915 rotates through the meshing structure with the rack 911, and the adaptive connecting part is arranged between the second connecting rod 914 and the toothed disc 915. In this way, the first connecting rod 912 and the second connecting rod 914 can be rotated by the rotation of the toothed disc 915 through the adaptive connecting part, so that the first ring body 22 rotates, and the locking and clamping of the special gas nozzle is realized by the locking mechanism 2, thereby improving the stability of the immersion cleaning of the special gas nozzle;

[0052] In another embodiment of the present invention, the adaptive connection portion includes a first end face gear 93 and a second end face gear 94 that mesh with each other, wherein the second end face gear 94 is fixedly arranged on the surface of the toothed disc 915, and the first end face gear 93 is fixedly connected to the second connecting rod 914 through a second spring 95. When each rotating lever 29 is in contact with the outer peripheral surface of the special gas nozzle by the descending of the lifting mounting frame 10, since the rotating lever 29 can no longer continue to approach each other in the axial direction, this indirectly causes the first ring body 22 to be unable to continue to rotate. At this time, the first end face gear 93 and the second end face gear 94 produce a tooth-beating phenomenon by compressing and deforming the second spring 95, thereby realizing an adaptive clamping operation, which can meet the clamping operation of special gas nozzles of different calibers and is more convenient to use.

[0053] After the cleaning of the special gas nozzle in the cleaning box 1 is completed and the spraying is completed, the centrifugal frame 71 is rotated as a whole by starting the driving motor 5. At this time, the locking mechanism 2 is rotated along the driving axis direction of the driving motor 5 by the centrifugal frame 71. This rotation direction can throw out the residual liquid inside the nozzle of the special gas nozzle through centrifugal force, so as to prevent the residual liquid from being unable to be evaporated and dried in time due to the internal caliber effect of the special gas nozzle, thereby affecting the subsequent use;

[0054] It should be noted here that in order to enable the driving motor 5 to rotate the centrifugal frame 71 and the locking mechanism, the first connecting rod 912 and the second connecting rod 914 are separated by driving the separation driving mechanism 92 in the connecting assembly 9. At this time, the locking driving mechanism 91 is disconnected by the separation driving mechanism 92, so that the centrifugal frame 71 and the locking mechanism 2 will not cause position limitation when rotating;

[0055] In another embodiment of the present invention, the separation drive mechanism 92 includes a rotary joint 924 sleeved on the second connecting rod 914 and a separation adjustment plate 921 fixedly arranged on the rotary joint 924. The inner wall surface of the cleaning box 1 is installed with a roller 922 through a bracket 923, and the roller 922 is rotatably arranged on the bracket 923. When the lifting mounting frame 10 descends and the toothed disc 915 on the lifting slide is separated from the rack 911, the roller 922 is against the separation adjustment plate 921. Since the separation adjustment plate 921 is an inclined device When the roller 922 is set, the separation adjustment plate 921 will form a pulling effect, and the separation adjustment plate 921 drives the rotary joint 924 to contact the baffle 925, and the first connecting rod 912 and the second connecting rod 914 are separated by pushing the baffle 925. At this time, the locking drive mechanism 91 is separated, and the separation adjustment plate 921 is connected to the bottom surface of the cleaning box 1 through the telescopic member to prevent the rotary joint 924 from rotating with the second connecting rod 914 when the second connecting rod 914 rotates. The telescopic member can be a hydraulic telescopic rod or a telescopic column.

[0056] It should be noted that teeth are provided on the surfaces where the first connecting rod 912 and the second connecting rod 914 contact each other, so that the first connecting rod 912 and the second connecting rod 914 can be meshed with each other and the first ring body 22 can be rotated through the locking drive mechanism 91, and a notch is provided at the bottom of the first connecting rod 912 to facilitate the insertion of the second connecting rod 914, and the stroke of the rack 911 is set so that when the toothed disc 915 is separated from the rack 911, the notch provided on the first connecting rod 912 is at the bottom, and the teeth provided correspond to the direction of the notch;

[0057] In order to improve the drying effect of the special gas nozzle after cleaning, the centrifugal assembly 7 also includes a self-centrifugal mechanism 72 installed on the centrifugal frame 71. When the centrifugal frame 71 and the locking mechanism 2 are rotated as a whole by the driving motor 5, the self-centrifugal mechanism 72 is used to make the locking rotating rod 25 rotate synchronously, so that the special gas nozzle can be rotated as a whole in the direction of the rotation axis of the driving motor 5 to achieve centrifugal drying of the inside of the nozzle, and the special gas nozzle can also rotate along its own axis direction to complete the centrifugal drying of the surface of the special gas nozzle;

[0058] In one embodiment of the present invention, the self-centrifugal mechanism 72 includes a first bevel gear 726 and a second bevel gear 727 that mesh with each other, wherein the first bevel gear 726 is fixedly arranged on the power output shaft of the drive motor 5, and the second bevel gear 727 is installed with a rotating shaft 721 rotatably arranged on the centrifugal frame 71 through an anti-flip mechanism 73, and the second bevel gear 727 is installed with a rotating shaft 721 rotatably arranged on the centrifugal frame 71 through an anti-flip mechanism 73. When the centrifugal frame 71 is driven to rotate by the drive motor 5, the rotating shaft 721 can be rotated synchronously through the first bevel gear 726, the second bevel gear 727 and the anti-flip mechanism 73. The self-centrifugal mechanism 72 also includes The mounting vertical plate 724 is fixedly arranged on the centrifugal frame 71 and has a notch. A mounting block 723 is slidably arranged in the notch of the mounting vertical plate 724 through a first spring 722. A set of the locking rotating rod 25 and the mounting block 723 are respectively connected with the rotating shaft 721 through a synchronous belt pulley to install a pulling synchronous belt 725. In this way, when the rotating shaft 721 rotates, the rotating lever 29 can be rotated by pulling the synchronous belt 725, so that the special gas nozzle can be directly rotated in the direction of its own axis through the rotation of the rotating lever 29, so as to realize the centrifugal drying and cleaning of the inside and the surface of the special gas nozzle nozzle at the same time, thereby improving the overall practicality.

[0059] It should be noted that, in one of the cases, when the plurality of rotating levers 29 are close to each other to clamp the special gas nozzle, the rotating levers 29 form a pulling effect on the pulling synchronous belt 725, and the first spring 722 is pulled up and deformed. Then, after the cleaning is completed and the upper cover 6 of the box body is opened, the plurality of rotating levers 29 are moved away from each other, and the first spring 722 recovers its deformation, maintaining the pulling state of the pulling synchronous belt 725, so that the pulling synchronous belt 725 is always kept in a tensioned state.

[0060] When the rotating lever 29 is rotated by the self-centrifugal mechanism 72, the anti-flip mechanism 73 is used to maintain the unidirectional transmission of power. The anti-flip mechanism 73 includes a centrifugal wheel 731 rotatably arranged on the centrifugal frame 71 and fixedly connected to the second bevel gear 727, and a connecting disk 732 fixedly connected to the rotating shaft 721, and the connecting disk 732 is provided with a latching tooth on the inner edge surface close to the centrifugal wheel 731, and the centrifugal wheel 731 is rotatably provided with a plurality of rotating claws 733 and a plurality of rotating heads 735 corresponding to the plurality of rotating claws 733 one by one, and the plurality of rotating heads 735 are all rotatably arranged on the surface of the centrifugal wheel 731 and connected to the corresponding rotating claws 733 by a return spring 734. When the centrifugal wheel 731 rotates and generates centrifugal force, the rotating claws 733 are against the latching teeth on the inner edge of the connecting disk 732. In this way, when the anti-flip mechanism 73 is rotated by the driving motor 5, due to the fast speed of the motor, the centrifugal wheel 73 in the anti-flip mechanism 73 is The centrifugal force generated by 31 will swing the rotating claw 733 outward, and the rotating claw 733 will abut against the teeth on the inner surface of the connecting disk 732 after rotating outward, thereby rotating the connecting disk 732. On the contrary, if the locking mechanism 2 is adjusted to lock or unlock the special gas nozzle, the locking rod 25 on the locking mechanism 2 will also rotate, but its rotation amplitude is much less than that of the driving motor 5, and the diameter of the connecting disk 732 is also larger than the centrifugal wheel 731. In this way, no matter how the locking rod 25 rotates, the centrifugal wheel 731 will not rotate, thereby preventing the rotating shaft 721 of the driving motor 5 from performing passive movement, effectively protecting the driving motor 5, and also effectively preventing the locking rod 25 from rotating, causing the centrifugal frame 71 to deflect as a whole, thereby causing the second connecting rod 914 to be unable to be accurately inserted into the first connecting rod 912 so that the corresponding teeth can accurately correspond to each other.

[0061] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A box device for cleaning a special gas nozzle of a PECVD machine, comprising a cleaning box (1) with a cavity formed therein, a box upper cover (6) being rotatably arranged at the cavity opening position of the cleaning box (1), and a water outlet pipe (4) being installed on the box upper cover (6) close to the cavity side of the cleaning box (1), and a drainage hand valve (8) being installed at the bottom of the cleaning cavity, characterized in that: Also includes: A lifting and lowering mounting frame (10) is slidably arranged on the inner wall surface of the cleaning box (1), and a pulling and connecting rod (3) is arranged between the box upper cover (6) and the lifting and lowering mounting frame (10). When the box upper cover (6) is closed / opened, the pulling and connecting rod (3) is used to make the lifting and lowering mounting frame (10) descend / rise; A centrifugal assembly (7), the centrifugal assembly (7) comprising a centrifugal frame (71) mounted on a power output end of a driving motor (5), a locking mechanism (2) being arranged on the centrifugal frame (71), the locking mechanism (2) being used to clamp a special gas nozzle to be cleaned placed at a central position thereof, and the driving motor (5) being slidably mounted on an inner wall surface of a cleaning box (1); A drive connection assembly (9) comprises a locking drive mechanism (91), the locking drive mechanism (91) being used to connect the locking mechanism (2) and the lifting mounting frame (10), and when the upper cover (6) of the box body is closed and the lifting mounting frame (10) is lowered, the locking drive mechanism (91) drives the locking mechanism (2) to complete the locking action of the special gas nozzle, and the locking drive mechanism (91) also comprises an adaptive connection part, and when the locking mechanism (2) completes the locking action of the special gas nozzle, the adaptive connection part is used to disconnect the locking mechanism (2) from the locking drive mechanism (91) and the lifting mounting frame (10).

2. A box device for cleaning a special gas nozzle of a PECVD machine according to claim, characterized in that: The locking mechanism (2) comprises a first ring body (22) rotatably arranged on a centrifugal frame (71) and a second ring body (23) rotatably arranged on the first ring body (22); the first ring body (22) is provided with a plurality of limiting grooves (26) in a circumferential array; the second ring body (23) is provided with coupling pins (28) which are the same in number and correspond to the plurality of limiting grooves (26); a rotating lever (29) is rotatably arranged on each coupling pin (28); and one end of each rotating lever (29) is slidably engaged in the corresponding limiting groove (26), and the other end is rotatably arranged with a locking rotating rod (25); The centrifugal frame (71) is provided with an insertion rod (24) at the center position of the multiple groups of locking rotating rods (25), and the insertion rod (24) is used for inserting and placing the special gas nozzle. The first ring body (22) is connected to the lifting installation frame (10) through a locking drive mechanism (91). When the lifting installation frame (10) descends, the locking drive mechanism (91) is used to rotate the first ring body (22). A limiting rod (21) is fixedly arranged on the second ring body (23), and the end of the limiting rod (21) away from the second ring body (23) contacts the surface of the lifting installation frame (10). When the first ring body (22) rotates, the limiting rod (21) is used to prevent the second ring body (23) from rotating synchronously with the first ring body (22), so that the first ring body (22) and the second ring body (23) generate relative rotation.

3. A box device for cleaning a special gas nozzle of a PECVD machine according to claim, characterized in that: The locking drive mechanism (91) comprises a first connecting rod (912) and a second connecting rod (914) which are plugged into each other, the end of the first connecting rod (912) away from the second connecting rod (914) is rotatably arranged on the centrifugal frame (71) and connected to the first ring body (22), a rack (911) is fixedly installed on the inner wall surface of the cleaning box (1), and a toothed disc (915) is meshed on the rack (911), and the toothed disc (915) is slidably arranged on the inner wall surface of the cleaning box (1) through a mounting slide (916), and the mounting slide (916) is fixedly connected to the lifting mounting frame (10); The adaptive connection part is arranged between the second connecting rod (914) and the toothed disc (915). When the plurality of locking rotating rods (25) complete the locking action on the special gas nozzle, the adaptive connection part is used to disconnect the second connecting rod (914) and the toothed disc (915).

4. A box apparatus for cleaning a special gas nozzle of a PECVD machine according to claim, characterized in that: The adaptive connection part comprises a first end face gear (93) and a second end face gear (94) meshing with each other, wherein the second end face gear (94) is fixedly arranged on the surface of the toothed disc (915), and the first end face gear (93) is fixedly connected to the second connecting rod (914) via a second spring (95).

5. A box apparatus for cleaning a special gas nozzle of a PECVD machine according to claim, characterized in that: The centrifugal assembly (7) further comprises a self-centrifugal mechanism (72) mounted on the centrifugal frame (71), and when the centrifugal frame (71) and the locking mechanism (2) are rotated as a whole by the driving motor (5), the self-centrifugal mechanism (72) is used to make the locking rotating rod (25) rotate synchronously; The self-centrifugal mechanism (72) comprises a first bevel gear (726) and a second bevel gear (727) meshing with each other, wherein the first bevel gear (726) is fixedly arranged on the power output shaft of the driving motor (5), and the second bevel gear (727) is installed with a rotating shaft (721) rotatably arranged on the centrifugal frame (71) through an anti-turnover mechanism (73), and the anti-turnover mechanism (73) is used to maintain unidirectional transmission of power. The self-centrifugal mechanism (72) also includes a first bevel gear (726) fixedly arranged on the centrifugal frame (71) A mounting vertical plate (724) is provided with a slot, and a mounting block (723) is slidably arranged in the slot of the mounting vertical plate (724) via a first spring (722), wherein a group of the locking rotating rod (25) and the mounting block (723) are respectively connected with the rotating shaft (721) to install a pulling synchronous belt (725) via a synchronous belt pulley, and when the special gas nozzle is locked by the locking mechanism (2), the first spring (722) is used to keep the pulling synchronous belt (725) in tension.

6. A box apparatus for cleaning a special gas nozzle of a PECVD machine according to claim, characterized in that: The drive connection assembly (9) further comprises a separation drive mechanism (92), and when the lifting mounting frame (10) is lowered into position, the separation drive mechanism (92) is used to separate the locking mechanism (2) from the locking drive mechanism (91), so as to realize the overall rotation action of the centrifugal frame (71) through the centrifugal mechanism (72); The separation drive mechanism (92) comprises a rotary joint (924) sleeved on the second connecting rod (914) and a separation adjustment plate (921) fixedly arranged on the rotary joint (924); the separation adjustment plate (921) is connected to the bottom surface of the cleaning box (1) via a telescopic member; a roller (922) is installed on the inner wall surface of the cleaning box (1) via a bracket (923); and the roller (922) is rotatably arranged on the bracket (923); when the lifting mounting frame (10) is lowered into position to separate the toothed disc (915) from the rack (911), the roller (922) abuts against the surface of the separation adjustment plate (921).

7. A box apparatus for cleaning a special gas nozzle of a PECVD machine according to claim, characterized in that: The anti-turnover mechanism (73) comprises a centrifugal wheel (731) rotatably arranged on the centrifugal frame (71) and fixedly connected to the second bevel gear (727), and a connecting disk (732) fixedly connected to the rotating shaft (721), and the connecting disk (732) is provided with latching teeth on the inner edge surface close to the centrifugal wheel (731), and the centrifugal wheel (731) is rotatably arranged with a plurality of rotating claws (733) and a plurality of rotating heads (735) corresponding to the plurality of rotating claws (733) one by one, and the plurality of rotating heads (735) are all rotatably arranged on the surface of the centrifugal wheel (731) and connected to the corresponding rotating claws (733) through a return spring (734), and when the centrifugal wheel (731) rotates and generates centrifugal force, the rotating claws (733) abut against the latching teeth on the inner edge of the connecting disk (732).

8. The box apparatus for cleaning the special gas nozzle of a PECVD machine according to claim, characterized in that: The cleaning box (1) is made of acid and alkali resistant material.

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