Carrying disc positioning device of multi-column high-precision polishing machine

Abstract

The invention discloses a carrying disc positioning device of a multi-column high-precision polishing machine, and particularly relates to the technical field of polishing machines, the carrying disc positioning device comprises a workbench, supporting legs, a driver and a control panel, a positioning assembly is arranged in the workbench, and an auxiliary assembly used for processing cooling liquid is arranged below the positioning assembly; the swing rod swings to drive the two sets of positioning clamping plates through the pin shaft to properly clamp a carrying disc, the carrying disc can be positioned, meanwhile, due to the fact that the multiple sets of sliding columns are arranged in the positioning clamping plates, the carrying disc can smoothly rotate while being clamped and limited, a workpiece can be stably polished, and the working efficiency is improved. And meanwhile, a sliding groove plate moves to drive a sliding column to move upwards through an inclined groove, the sliding column moves to drive an auxiliary plate to move upwards through two sets of top plates, the auxiliary plate moves to push a lower rotating disc to move upwards, the height position of the carrying disc can be adjusted, the position of the carrying disc can be accurately positioned, and grinding and polishing treatment can be conveniently conducted on the workpiece.

Description

Technical Field

[0001] The invention relates to the technical field of polishing machines, in particular to a carrier plate positioning device for a multi-column high-precision polishing machine. Background Art

[0002] A high-precision polishing machine is a mechanical device used to perform precision polishing on the surface of a workpiece. It can achieve extremely high polishing accuracy and surface quality. A multi-column high-precision polishing machine is a mechanical device specifically used for precision polishing operations. Its characteristic is that it has multiple polishing columns (columns or pillars), each of which can perform polishing operations independently, which allows the machine to process multiple workpieces at the same time and improve production efficiency.

[0003] The disc positioning device of the multi-column high-precision polishing machine is a key component to ensure the precise positioning of the disc (workpiece) during the polishing process. Its design and function directly affect the polishing quality, efficiency and stability. This type of disc positioning device of the multi-column high-precision polishing machine is widely used in semiconductor, precision machinery, optical components, cemented carbide, ceramics and other industries for processing various high-precision, high-surface quality workpieces.

[0004] When installing the existing carrier, it is usually installed on the workbench by fasteners such as bolts and screws. When polishing the workpiece on the carrier, long-term rotation will cause the bolts to loosen, thereby affecting the stability of the workpiece polishing. Polishing fluid is usually required when polishing the workpiece, and the polishing fluid after use cannot be effectively processed, which will not only affect the carrier positioning device and reduce the positioning accuracy when polishing the workpiece later, but also cannot effectively recycle the polishing fluid, which will increase the cost of use. Therefore, a carrier positioning device for a multi-column high-precision polishing machine is proposed. Summary of the invention

[0005] The object of the present invention is to provide a platen positioning device for a multi-column high-precision polishing machine to solve the problems raised by the above-mentioned background technology.

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a carrier positioning device for a multi-column high-precision polishing machine, comprising a workbench, legs, a driver, and a control panel, wherein the legs are arranged in four groups at four corners at the bottom of the workbench, the driver is arranged directly above the workbench, and the control panel is arranged on one side of the driver, a positioning component is arranged inside the workbench, and an auxiliary component for processing coolant is arranged below the positioning component;

[0007] The positioning assembly comprises a hydraulic cylinder and a carrier plate, and the positioning assembly is used to accurately position the carrier plate. One end of the hydraulic cylinder is fixedly connected to the workbench, and a hydraulic rod is slidably connected inside the hydraulic cylinder. One end of the hydraulic rod is fixedly connected to a push rod, and both ends of the push rod are rotatably connected to a swing rod through a pin shaft. The middle position of the swing rod is rotatably connected to a support plate through a pin shaft, and a shell is fixedly connected below the support plate, and the shell is fixedly connected to the workbench;

[0008] The auxiliary component includes a motor, which is fixedly connected to the housing, a rotating shaft is fixedly connected to the output end of the motor, a lower rotating disk is fixedly connected to the upper end of the rotating shaft, a push plate is fixedly connected to the surface of the rotating shaft, and a moving rod is provided on one side of the push plate.

[0009] Preferably, one end of the swing rod is rotatably connected to a positioning clamp via a pin shaft, the inner side surface of the positioning clamp is rotatably connected to multiple groups of sliding columns, the surface of the hydraulic rod is fixedly connected to a fixing rod, one side of the fixing rod is fixedly connected to a slide plate, and an inclined groove is opened inside the slide plate.

[0010] Preferably, the slide plate is provided with a slide column sliding through an internal inclined groove, both ends of the slide column are fixedly connected to a top plate, the upper end of the top plate is fixedly connected to an auxiliary plate, the upper surface of the auxiliary plate is rotatably connected to the bottom surface of the lower rotating disk, and a gap is provided between the lower rotating disk and the outer shell.

[0011] Preferably, one end of the moving rod is fixedly connected to an upper wiping plate, the moving rod is slidably connected to the outer shell, and a reset element is arranged on the surface of the moving rod, the upper wiping plate is slidably connected to the outer shell, a connecting rod is also fixedly connected to the surface of the moving rod, and the lower end of the connecting rod is fixedly connected to a lower wiping plate.

[0012] Preferably, a collecting box is provided below the lower wiping plate, a filter screen is detachably connected to the interior of the collecting box, a plurality of filter holes are provided on the surface of the filter screen, a brush is provided at the contact position between the lower wiping plate and the filter screen, two groups of delivery pipes are fixedly connected to the surface of the collecting box, and valves are provided inside the delivery pipes.

[0013] Preferably, the lower end of the shell is fixedly connected to multiple groups of drainage columns, the lower ends of the drainage columns are connected to the interior of the collection box, and the collection box is provided with four groups distributed at four corners below the shell. The upper wiping plate and the sliding position of the shell are provided with wiping strips, which are made of harder material.

[0014] Preferably, two groups of positioning clamps on both sides of the carrier are arranged above the lower rotating disk, the outer shell is fixedly connected to the workbench, a limiting disk is also arranged above the lower rotating disk, and the bottom surface of the limiting disk is arranged in a trapezoidal shape, a limiting rod is detachably connected to the top of the limiting disk, and the upper end of the limiting rod is fixedly connected to the driver.

[0015] Preferably, a polishing column is provided under the driver, an upper rotating disk is installed under the polishing column, the upper rotating disk is located directly above multiple groups of carrier plates, the limit plate is located in the center of four groups of carrier plates, and the limit plate and the positioning clamp are made of wear-resistant materials.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] 1. The present invention drives the hydraulic rod to move through the movement of the hydraulic cylinder in the positioning assembly, and the movement of the hydraulic rod can drive the push rod to move, and the movement of the push rod can drive the swing rod to swing around the pin shaft through the pin shaft, and the swing of the swing rod can drive the two sets of positioning clamping plates to properly clamp the carrier plate through the pin shaft, so that the carrier plate can be positioned. At the same time, because multiple sets of sliding columns are arranged inside the positioning clamping plate, the carrier plate can be clamped and limited while rotating smoothly, so that the workpiece can be polished stably. At the same time, the movement of the hydraulic rod can also drive the slide plate to move through the fixed rod, and the movement of the slide plate will drive the sliding column to move upward through the inclined groove. The movement of the sliding column can drive the auxiliary plate to move upward through the two sets of top plates, and the movement of the auxiliary plate can push the lower rotating disk to move upward, so that the height position of the carrier plate can be adjusted, and the position of the carrier plate can be accurately positioned, which is convenient for grinding and polishing the workpiece.

[0018] 2. The present invention drives the rotating shaft to rotate through the motor in the auxiliary component, and the rotating shaft drives the push plate to rotate. The rotation of the push plate can push the moving rod to move back and forth. The movement of the moving rod can drive the two sets of upper wiping plates to slide inside the shell, and can push the used waste liquid and debris to the top of the drainage column for discharge, so as to prevent the debris and waste liquid from accumulating inside the shell, which will corrode the equipment over a long period of time and affect the accuracy of subsequent positioning of the carrier plate. The movement of the moving rod drives the lower wiping plate to slide on the surface of the filter screen, and the lower wiping plate can scrape the waste liquid discharged from the drainage column to prevent it from clogging the filter holes of the filter screen and affecting the subsequent filtering effect of the waste liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the workbench and the driver of the present invention;

[0020] Figure 2 It is a schematic diagram of the internal structure of the workbench of the present invention;

[0021] Figure 3 This is a schematic diagram of the positioning assembly structure of the present invention;

[0022] Figure 4 It is a structural schematic diagram of the positioning splint and the sliding column of the present invention;

[0023] Figure 5 It is a structural schematic diagram of the sliding column and the top plate of the present invention;

[0024] Figure 6 This is a schematic diagram of the auxiliary component structure of the present invention;

[0025] Figure 7 It is a cross-sectional view of the present invention;

[0026] In the figure: 1, workbench; 2, support leg; 3, driver; 4, control panel; 5, polishing column; 6, limit rod; 7, limit plate; 8, upper rotating plate; 9, lower rotating plate; 10, shell; 100, positioning assembly; 101, hydraulic cylinder; 102, hydraulic rod; 103, push rod; 104, swing rod; 105, support plate; 106, positioning clamping plate; 107, carrier plate; 108, fixing rod; 109, slide plate; 110, sliding column; 111, top plate; 112, auxiliary plate; 113, sliding column; 200, auxiliary assembly; 201, motor; 202, rotating shaft; 203, push plate; 204, moving rod; 205, upper wiping plate; 206, drainage column; 207, connecting rod; 208, lower wiping plate; 209, collecting box; 210, conveying pipe; 211, filter screen. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents the selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present invention.

[0028] See also Figures 1 to 7 The present invention provides a technical solution: a carrier positioning device for a multi-column high-precision polishing machine, comprising a workbench 1, legs 2, a driver 3, and a control panel 4, wherein the legs 2 are distributed at four corners at the bottom of the workbench 1 and are arranged in four groups, the driver 3 is arranged just above the workbench 1, and the control panel 4 is arranged on one side of the driver 3, a positioning component 100 is arranged inside the workbench 1, and an auxiliary component 200 for processing a coolant is arranged below the positioning component 100;

[0029] Furthermore, the carrier 107 can be accurately positioned, and the carrier 107 can be prevented from shaking during operation, which can improve the stability of the carrier 107 during use. The positioning assembly 100 includes a hydraulic cylinder 101 and a carrier 107. The positioning assembly 100 is used to accurately position the carrier 107. One end of the hydraulic cylinder 101 is fixedly connected to the workbench 1. The hydraulic cylinder 101 is internally slidably connected with a hydraulic rod 102. One end of the hydraulic rod 102 is fixedly connected with a push rod 103. Both ends of the push rod 103 are rotatably connected with a swing rod 104 through a pin shaft. The middle position of the swing rod 104 is rotatably connected with a support plate 105 through a pin shaft. The support plate 105 is fixedly connected with a housing 10 below, and the housing 10 is fixedly connected to the workbench 1.

[0030] Furthermore, the used coolant can be processed, which can not only reduce the use cost, but also avoid the damage to the equipment caused by the long-term accumulation of waste liquid, and can improve the accuracy of the positioning of the subsequent carrier 107. The auxiliary component 200 includes a motor 201, and the motor 201 is fixedly connected to the housing 10. The output end of the motor 201 is fixedly connected to the rotating shaft 202, and the upper end of the rotating shaft 202 is fixedly connected to the lower rotating disk 9. The surface of the rotating shaft 202 is fixedly connected to the push plate 203, and a moving rod 204 is provided on one side of the push plate 203.

[0031] Furthermore, the carrier plate 107 can be effectively clamped and limited, and the stability of the carrier plate 107 during use can be improved. One end of the swing rod 104 is rotatably connected to the positioning clamp plate 106 through a pin shaft, and the inner side surface of the positioning clamp plate 106 is rotatably connected to multiple sets of sliding columns 113. The surface of the hydraulic rod 102 is fixedly connected to the fixing rod 108, and one side of the fixing rod 108 is fixedly connected to the slide plate 109, and the slide plate 109 is provided with an inclined groove inside.

[0032] Furthermore, the height of the carrier 107 can be effectively adjusted to improve the accuracy of workpiece polishing. The slide plate 109 is provided with a slide column 110 through an internal inclined groove sliding. Both ends of the slide column 110 are fixedly connected to a top plate 111. The upper end of the top plate 111 is fixedly connected to an auxiliary plate 112. The upper surface of the auxiliary plate 112 is rotatably connected to the bottom surface of the lower rotating disk 9. A gap is provided between the lower rotating disk 9 and the outer shell 10.

[0033] Furthermore, it is possible to scrape off the impurities, debris, etc. after filtration, so as to avoid affecting the efficiency of subsequent waste liquid treatment. An upper wiping plate 205 is fixedly connected to one end of the moving rod 204, and the moving rod 204 is slidably connected to the outer shell 10. A reset element is provided on the surface of the moving rod 204, and the upper wiping plate 205 is slidably connected to the outer shell 10. The surface of the moving rod 204 is also fixedly connected to a connecting rod 207, and the lower end of the connecting rod 207 is fixedly connected to a lower wiping plate 208.

[0034] Furthermore, the debris filtered through the filter holes can be moved to avoid clogging of the filter screen 211, which would affect the subsequent waste liquid treatment effect. A collecting box 209 is provided below the lower wiping plate 208, and the interior of the collecting box 209 is detachably connected to the filter screen 211, and the surface of the filter screen 211 is provided with a plurality of groups of filter holes, and a brush is provided at the contact position between the lower wiping plate 208 and the filter screen 211, and the surface of the collecting box 209 is fixedly connected with two groups of delivery pipes 210, and the interior of the delivery pipes 210 is provided with a valve.

[0035] Furthermore, in order to facilitate the discharge of waste liquid, the lower end of the outer shell 10 is fixedly connected to multiple groups of drainage columns 206, and the lower ends of the drainage columns 206 are connected to the interior of the collecting box 209. Four groups of collecting boxes 209 are distributed at four corners below the outer shell 10, and wiping strips are provided at the sliding position of the upper wiping plate 205 and the outer shell 10. The wiping strips are made of a harder material.

[0036] Furthermore, in order to facilitate the grinding and polishing of the workpiece placed on the carrier 107, two groups of positioning clamps 106 on both sides of the carrier 107 are arranged above the lower rotating disk 9, the outer shell 10 is fixedly connected to the workbench 1, and a limit plate 7 is also arranged above the lower rotating disk 9, and the bottom surface of the limit plate 7 is set in a trapezoidal shape. A limit rod 6 is detachably connected to the top of the limit plate 7, and the upper end of the limit rod 6 is fixedly connected to the driver 3.

[0037] Furthermore, in order to facilitate the positioning of the carrier 107 and enable it to rotate stably on the surface of the lower rotating disk, which can effectively improve the effect of grinding the workpiece, a polishing column 5 is provided below the driver 3, and an upper rotating disk 8 is installed below the polishing column 5. The upper rotating disk 8 is located directly above the multiple groups of carriers 107, and the limit plate 7 is located at the center of the four groups of carriers 107. The limit plate 7 and the positioning clamp 106 are made of wear-resistant materials.

[0038] Working principle: After the present invention is installed, the workpiece to be processed is first installed under the carrier 107, and then the carrier 107 is placed above the lower rotating disk 9. At this time, the lower rotating disk 9 is located in the middle position of the two sets of positioning clamps 106, and then the hydraulic cylinder 101 is started to drive the hydraulic rod 102 to move in the direction away from the limiting rod 6. The movement of the limiting rod 6 will drive the push rod 103 to move, and the movement of the push rod 103 will drive the swing rod 104 to swing around the pin shaft through the pin shaft. When the swing rod 104 swings, it will drive the two sets of positioning clamps 106 to clamp and limit the carrier 107 through the pin shaft, so that the carrier 107 is stably located above the lower rotating disk 9, which is convenient for the subsequent processing of the workpiece below the carrier 107;

[0039] When the carrier 107 is clamped and limited, the control panel 4 controls the driver 3 to drive the polishing column 5 to move, so that the upper rotating disk 8 is pressed above the multiple groups of carriers 107. At this time, starting the upper rotating disk 8 to rotate can drive the carrier 107 to rotate, so as to polish the workpiece under the carrier 107. Since the sliding columns 113 are installed inside the two groups of positioning clamps 106, the carrier 107 can rotate smoothly at this time. At the same time, the positioning clamps 106 can stably clamp and limit the carrier 107, which can effectively improve the stability of the workpiece during grinding and polishing.

[0040] At the same time, when the hydraulic cylinder 101 drives the hydraulic rod 102 to move, the hydraulic rod 102 will drive the fixed rod 108 to move, and the movement of the fixed rod 108 will drive the slide plate 109 to move. Since the slide plate 109 is provided with an inclined groove inside, when the slide plate 109 moves, it will drive the internal slide column 110 to move upward through the inclined groove, and the movement of the slide column 110 will drive the two groups of top plates 111 to move. Since the lower rotating disk 9 and the rotating shaft 202 are splined, when the top plate 111 moves, it can drive the auxiliary plate 112 to move upward to lift the lower rotating disk 9 upward. At this time, after the two groups of positioning clamping plates 106 completely limit the carrying plate 107, the height of the lower rotating disk 9 can also be fully adjusted. The movement of the lower rotating disk 9 can drive multiple groups of carrying plates 107 to move upward, which can effectively locate the position of the carrying plate 107, making it convenient for the upper rotating disk 8 to drive the carrying plate 107 to rotate to polish the workpiece;

[0041] When the position adjustment of the carrier plate 107 is completed, the motor 201 is started to rotate to drive the rotating shaft 202 to rotate. The rotation of the rotating shaft 202 will drive the lower rotating disk 9 to rotate inside the housing 10. At the same time, the valve of the coolant is opened to assist in grinding the workpiece below the carrier plate 107. At this time, the used waste liquid will flow into the inside of the housing 10, and flow to the inside of the collection box 209 through the multiple groups of drainage columns 206 below the housing 10 for collection and filtration. The waste liquid can be filtered and processed, which can reduce the use cost;

[0042] When the waste liquid falls into the shell 10, in order to prevent the debris left after polishing from sticking to the inner surface of the shell 10 and affecting the subsequent discharge of the waste liquid, the long-term accumulation of the waste liquid is likely to affect the positioning component 100, and the long-term erosion is likely to reduce the two sets of positioning clamping plates 106 for the subsequent precise positioning of the carrier plate 107. At this time, the rotation of the rotating shaft 202 will also drive the push plate 203 to rotate, and the rotation of the push plate 203 will push the moving rod 204 to move. The movement of the moving rod 204 can drive the upper wiper plate 205 to slide inside the shell 10, and can scrape the debris and the waste liquid together to the top of the drainage column 206 for discharge, which can effectively avoid the accumulation of waste liquid or debris and affect the normal operation of the equipment;

[0043] At the same time, the movement of the moving rod 204 will also drive the connecting rod 207 to move, and the movement of the connecting rod 207 will drive the lower wiper plate 208 to slide on the surface of the filter screen 211. When the waste liquid is discharged into the collection box 209 through the drainage column 206, the filter screen 211 will filter the debris, and the reciprocating movement of the lower wiper plate 208 can keep the debris in a moving state, which can prevent the debris from clogging the filter holes on the surface of the filter screen 211, and can improve the effect of subsequent waste liquid filtration. The filtered waste liquid can be discharged through two sets of delivery pipes 210 for recycling, which can not only avoid the long-term accumulation of waste liquid and erosion of the equipment, but also improve the accuracy of the positioning of the subsequent connecting rod 207, and also allow the coolant to be recycled, which can reduce the cost of use.

[0044] While embodiments of the present invention have been shown and described, those skilled in the art will appreciate that numerous changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and scope of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A carrier plate positioning device for a multi-column high-precision polishing machine, comprising a workbench (1), legs (2), a driver (3), and a control panel (4), characterized in that: The legs (2) are arranged in four groups at four corners at the bottom of the workbench (1); the driver (3) is arranged directly above the workbench (1), and the control panel (4) is arranged on one side of the driver (3); a positioning component (100) is arranged inside the workbench (1), and an auxiliary component (200) for processing coolant is arranged below the positioning component (100); The positioning assembly (100) comprises a hydraulic cylinder (101) and a carrier (107). The positioning assembly (100) is used to accurately position the carrier (107). One end of the hydraulic cylinder (101) is fixedly connected to the workbench (1). The hydraulic cylinder (101) is internally slidably connected to a hydraulic rod (102). One end of the hydraulic rod (102) is fixedly connected to a push rod (103). Both ends of the push rod (103) are rotatably connected to a swing rod (104) via a pin. The middle position of the swing rod (104) is rotatably connected to a support plate (105) via a pin. A housing (10) is fixedly connected below the support plate (105). The housing (10) is fixedly connected to the workbench (1). The auxiliary component (200) comprises a motor (201), wherein the motor (201) is fixedly connected to the housing (10), the output end of the motor (201) is fixedly connected to a rotating shaft (202), the upper end of the rotating shaft (202) is fixedly connected to a lower rotating disk (9), the surface of the rotating shaft (202) is fixedly connected to a push disk (203), and a moving rod (204) is provided on one side of the push disk (203).

2. The platen positioning device of a multi-column high-precision polishing machine according to claim 1, characterized in that: One end of the swing rod (104) is rotatably connected to a positioning clamp (106) via a pin shaft, and the inner side surface of the positioning clamp (106) is rotatably connected to multiple groups of sliding columns (113). The surface of the hydraulic rod (102) is fixedly connected to a fixed rod (108), and one side of the fixed rod (108) is fixedly connected to a slide plate (109), and an inclined groove is opened inside the slide plate (109).

3. The platen positioning device of a multi-column high-precision polishing machine according to claim 2, characterized in that: The slide plate (109) is provided with a slide column (110) which is slidably arranged through an internal inclined groove, and both ends of the slide column (110) are fixedly connected to a top plate (111), and the upper end of the top plate (111) is fixedly connected to an auxiliary plate (112), and the upper surface of the auxiliary plate (112) is rotatably connected to the bottom surface of the lower rotating disk (9), and a gap is arranged between the lower rotating disk (9) and the outer shell (10).

4. The platen positioning device of a multi-column high-precision polishing machine according to claim 3, characterized in that: One end of the moving rod (204) is fixedly connected to an upper wiping plate (205), the moving rod (204) is slidably connected to the outer shell (10), and a reset element is arranged on the surface of the moving rod (204), the upper wiping plate (205) is slidably connected to the outer shell (10), the surface of the moving rod (204) is also fixedly connected to a connecting rod (207), and the lower end of the connecting rod (207) is fixedly connected to a lower wiping plate (208).

5. The platen positioning device of a multi-column high-precision polishing machine according to claim 4, characterized in that: A collecting box (209) is arranged below the lower wiping plate (208), a filter screen (211) is detachably connected to the interior of the collecting box (209), a plurality of filter holes are provided on the surface of the filter screen (211), a brush is arranged at the contact position between the lower wiping plate (208) and the filter screen (211), two groups of delivery pipes (210) are fixedly connected to the surface of the collecting box (209), and a valve is arranged inside the delivery pipe (210).

6. The platen positioning device of a multi-column high-precision polishing machine according to claim 5, characterized in that: The lower end of the shell (10) is fixedly connected to a plurality of groups of drainage columns (206), the lower ends of the drainage columns (206) are connected to the interior of a collection box (209), and four groups of collection boxes (209) are arranged at four corners below the shell (10), and a wiping strip is arranged at a sliding position between the upper wiping plate (205) and the shell (10), and the wiping strip is made of a harder material.

7. The platen positioning device of a multi-column high-precision polishing machine according to claim 6, characterized in that: Two groups of positioning clamps (106) on both sides of the carrier plate (107) are arranged above the lower rotating plate (9); the housing (10) is fixedly connected to the workbench (1); a limiting plate (7) is also arranged above the lower rotating plate (9); and the bottom surface of the limiting plate (7) is arranged in a trapezoidal shape; a limiting rod (6) is detachably connected to the top of the limiting plate (7); and the upper end of the limiting rod (6) is fixedly connected to the driver (3).

8. The platen positioning device of a multi-column high-precision polishing machine according to claim 7, characterized in that: A polishing column (5) is arranged below the driver (3), an upper rotating disk (8) is installed below the polishing column (5), the upper rotating disk (8) is located directly above the multiple groups of carrier disks (107), the limiting disk (7) is located at the center of the four groups of carrier disks (107), and the limiting disk (7) and the positioning clamping plate (106) are made of wear-resistant materials.

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