An EBL collaborative manipulator

Abstract

The present application relates to the field of automation equipment technology, and specifically discloses an EBL collaborative manipulator, including two multi-axis manipulators, multiple manipulator claws, a workbench and a flower basket transfer manipulator; the flower basket transfer manipulator is used to carry flower baskets; multiple manipulator claws include positioning claws, fastening claws, pulling claws, suction claws and tray claws; after the two multi-axis manipulators are respectively connected to different manipulator claws, the first collaborative operation and the second collaborative operation can be performed to achieve the fixation of wafers and silicon wafers. Therefore, the EBL collaborative manipulator provided by this solution can switch different manipulator claws according to different operation requirements, perform fine operations such as substrate placement and position adjustment, and perform heavy physical operations such as flower basket transfer, which can reduce the work intensity of the staff, while reducing the possibility of damage to the precision and expensive parts of the equipment and reducing the psychological burden of scientific researchers on the operation of ELB equipment.

Description

Technical Field

[0001] The present application relates to the technical field of automation equipment, and in particular to an EBL collaborative robot. Background Art

[0002] Electron beam lithography is a technology that uses electron beams to directly draw or project copy patterns on a wafer coated with an electron resist. Electron beam lithography equipment (EBL equipment) can expose specific materials by focusing electron beams. The electron beam is generated by an electron gun, focused by an electromagnetic lens, and irradiated to the sample surface with extremely high precision and resolution. When the electron beam interacts with the resist, the resist undergoes chemical or physical changes, thereby forming a specific pattern in the subsequent development process.

[0003] Since electron beam exposure equipment is a large-scale instrument for high-precision micro-nano processing, scientific research units or production units that have this equipment usually train professional staff to use it. During use, researchers need to adjust the position of the substrate (such as silicon wafers and wafers) sample stage, install and fix the substrate (such as silicon wafers and wafers), transport and place the tray (for placing substrates), and adjust the position of the optical mirror.

[0004] Among them, the position adjustment of the substrate sample stage and the position adjustment of the optical microscope require fine adjustments to the rocker, knobs and other structures on the equipment, which requires a lot of energy from scientific researchers. The installation and fixation of the substrate requires the use of tweezers and other tools to clamp the substrate, place the substrate on the sample stage, and then repeatedly and finely adjust the position of the substrate. Finally, the support structure of the substrate is fixed by tweezers, screws and other tools to fix the substrate. This requires high levels of carefulness and patience from the operator and consumes personnel energy. During the transportation and placement of the tray, the tray is generally stacked in multiples in the tray holder, so the tray holder is heavy; when transporting, researchers need to first steadily lift the tray holder from the placed equipment, and then steadily place the tray holder on the platform. The entire process must avoid damage to the tray holder, the tray and the substrate in the tray, which is physically demanding and requires a lot of energy.

[0005] In addition to the above-mentioned problems of consuming physical strength and energy, researchers also need to constantly worry about whether they will damage the equipment or the substrate during the operation, which puts a heavy psychological burden on researchers. Summary of the invention

[0006] In view of this, the purpose of this application is to provide an EBL collaborative robot to solve some or all of the above problems.

[0007] In order to achieve the above technical objectives, the present application provides an EBL collaborative manipulator, comprising: a plurality of manipulator claws, at least two multi-axis manipulator arms, a flower basket transfer manipulator and a workbench;

[0008] The multi-axis mechanical arm is arranged on the workbench, and a force sensor and a switching end seat arranged on the force sensor are arranged at the first end of the multi-axis mechanical arm;

[0009] The switching end seat is used to detachably connect any one of the mechanical grippers;

[0010] The multi-axis mechanical arm is used to drive the mechanical gripper to move in multiple axes;

[0011] The workbench is provided with a fixed workstation and a flower basket workstation;

[0012] The flower basket transfer robot is used to carry the flower basket so as to transfer the flower basket from the storage area to the flower basket station;

[0013] The plurality of mechanical grippers include: positioning grippers, fastening grippers, pulling grippers, suction grippers and tray grippers;

[0014] The pallet gripper is used to transfer the first pallet or the second pallet on the flower basket to the fixed station;

[0015] A pressing piece is provided on the positioning gripper, and a plurality of elastic pressing rods are provided at the bottom of the pressing piece;

[0016] The tightening gripper is provided with an electric operating member;

[0017] The pulling claw is provided with a pulling piece;

[0018] The suction gripper is used to suck the wafer;

[0019] The EBL collaborative manipulator is used to perform a first collaborative operation and a second collaborative operation on the fixed workstation;

[0020] In the first coordinated operation, one of the multi-axis robotic arms is connected to the positioning claw and moves the positioning claw to the plurality of elastic pressure rods to press and fix the pressure plate on the first pallet, and another multi-axis robotic arm is connected to the fastening claw and moves the fastening claw to the electric operating member to abut against the fastening screw on the pressure plate, so that the electric operating member can drive the fastening screw to rotate and adjust the tightness of the connection between the pressure plate and the first pallet;

[0021] In the second collaborative operation, one of the multi-axis robotic arms is connected to the suction gripper and moves the suction gripper to suck the wafer onto the second tray, and another multi-axis robotic arm is connected to the pulling gripper and moves the pulling gripper to move the pressing sheet on the second tray to be pressed onto the wafer.

[0022] Furthermore, the pressing member is provided with an escape opening penetrating in the vertical direction;

[0023] The avoidance opening is used for allowing the electric operating member to pass through;

[0024] A plurality of elastic pressure rods are arranged on both sides of the avoidance opening.

[0025] Furthermore, guard plates are provided on both sides of the pressing member;

[0026] The two guard plates are used to abut against two sides of the pressing plate;

[0027] When the two guard plates abut against the two sides of the pressing plate, the positioning claws move to drive the pressing plate to move synchronously;

[0028] A plurality of the elastic pressure rods are arranged between the two guard plates.

[0029] Furthermore, the plurality of said mechanical grippers further include: a pressing gripper;

[0030] The pressing claw is provided with a pressing block;

[0031] The pressing gripper is used to be driven by the multi-axis robotic arm to press the first tray or the second tray downward through the pressing block after being connected to the multi-axis robotic arm, so as to sink the first tray or the second tray.

[0032] Furthermore, the plurality of said mechanical grippers further include: a clamping gripper;

[0033] The clamping claw comprises two openable and closable clamping plates;

[0034] The clamping claw is used to clamp the silicon wafer through the two clamping plates after being connected to the multi-axis robotic arm and driven by the multi-axis robotic arm.

[0035] Furthermore, the plurality of said mechanical grippers further include: a rotary gripper;

[0036] The rotary dial claw is provided with a sleeve rod;

[0037] The rotary dial gripper is used to be driven by the multi-axis robotic arm to be sleeved on the locking rod of the first pallet or the second pallet after being connected to the multi-axis robotic arm, and drive the locking rod to rotate to lock or unlock the position of the first pallet or the second pallet.

[0038] Furthermore, it also includes: the pallet gripper includes two openable and closable grippers;

[0039] The clamping jaw is a J-shaped jaw;

[0040] The pallet gripper clamps the first pallet or the second pallet through the two clamping claws.

[0041] Furthermore, a plurality of storage cavities are provided in the flower basket;

[0042] The plurality of storage chambers are arranged in sequence along the vertical direction;

[0043] The side of the flower basket is provided with an opening communicating with a plurality of the storage cavities;

[0044] The first tray or the second tray is placed in the storage cavity.

[0045] Further, the plurality of said mechanical grippers further include: a push-pull gripper;

[0046] The push-pull gripper is used to, after being connected to the multi-axis robotic arm, be driven by the multi-axis robotic arm to hook the first pallet or the second pallet located in the storage cavity, and then drive the first pallet or the second pallet to slide out of the opening so that the pallet gripper can clamp the first pallet or the second pallet.

[0047] Furthermore, it also includes: a lifting platform;

[0048] The lifting platform comprises: a lifting cylinder and a carrier;

[0049] The carrier can be lifted and lowered on the workbench and is located beside the flower basket station;

[0050] The opening of the flower basket located on the flower basket station faces the carrier;

[0051] The output end of the lifting cylinder is connected to the carrier, and is used to drive the carrier to rise and fall so that the carrier is flush with the storage cavity;

[0052] The push-pull gripper is used to, after being connected to the multi-axis robot arm, be driven by the multi-axis robot arm to pull the first tray or the second tray in the storage cavity out to the carrier, or to push the first tray or the second tray on the carrier into the storage cavity.

[0053] Furthermore, the flower basket transfer robot is connected to a flower basket extraction gripper;

[0054] The flower basket extraction gripper comprises two opening and closing clamping plates;

[0055] A lifting rod is provided on the top of the flower basket;

[0056] The flower basket extraction gripper is used to clamp the lifting rod through the two clamping plates.

[0057] Further, it also includes: a flower basket storage table;

[0058] The flower basket storage table is provided with a flower basket storage cavity as the flower basket storage area;

[0059] The flower basket storage table is provided with an openable cover;

[0060] The cover body is used to control the opening and closing of the flower basket storage cavity.

[0061] Furthermore, the positioning plate is provided with a first notch and a second notch;

[0062] The depth of the first notch is greater than the depth of the second notch;

[0063] The cover body is provided with a connecting rod;

[0064] The first notch is used for the connecting rod to be inserted into;

[0065] The second notch is used for the lifting rod to be inserted into.

[0066] Furthermore, a flower basket bracket is provided on the workbench;

[0067] The flower basket support is provided with a strip groove opening upward;

[0068] A positioning block is provided on the side of the flower basket;

[0069] The flower basket support is used for placing the flower basket;

[0070] The strip groove is used for the positioning block to be inserted into, so as to limit the movement of the flower basket in the horizontal direction.

[0071] Further, it also includes: a height positioning component;

[0072] The height positioning component is arranged on the workbench;

[0073] The height positioning component includes: a positioning platform, a sliding fixture and a height positioning sensor;

[0074] The sliding fixture is arranged on the positioning platform and can slide between the positioning station and the placing station on the positioning platform;

[0075] The height positioning sensor is arranged on the positioning platform and is located above the positioning station;

[0076] The pallet gripper is further used to, after being connected to the multi-axis robot arm, be driven by the multi-axis robot arm to transfer the first pallet or the second pallet from the fixed station to the sliding fixture on the placement station;

[0077] The sliding fixture is used to drive the first tray or the second tray to slide from the placement station to the positioning station;

[0078] The height positioning sensor is used to perform height positioning on the silicon wafer on the first tray or the wafer on the second tray to determine whether the height of the silicon wafer or the wafer meets a preset height requirement.

[0079] Further, the plurality of said mechanical grippers further include: a height adjustment gripper;

[0080] The height adjustment gripper is provided with a second electric operating member;

[0081] A plurality of sample stages are arranged on the first tray or the second tray;

[0082] A plurality of height adjustment knobs for adjusting the height of the sample stage are arranged around the sample stage;

[0083] When the height positioning sensor determines that the height of the silicon wafer or the wafer does not meet the preset height requirement, the height adjustment gripper is used to be driven by the multi-axis robotic arm to abut against the height adjustment knob on the first tray after being connected to the multi-axis robotic arm, so that the second electric operating part can drive the height adjustment knob to rotate until the height of the silicon wafer or the wafer meets the preset height requirement.

[0084] Furthermore, it also includes: an optical mirror operation component;

[0085] The optical microscope operation component includes: an optical microscope transfer manipulator and an optical microscope operation manipulator;

[0086] The optical microscope transfer manipulator is used to transfer the first tray or the second tray after height positioning to the optical microscope operating table;

[0087] The optical microscope operating table is provided with a coarse adjustment knob and a fine adjustment knob connected to the optical microscope;

[0088] The optical mirror operating manipulator comprises: a knob sleeve and a knob motor;

[0089] The knob sleeve is used for sleeve-mounting the coarse adjustment knob or the fine adjustment knob;

[0090] The knob motor is transmission-connected to the knob sleeve and is used to drive the knob sleeve to rotate.

[0091] Furthermore, the optical mirror operation manipulators include two, which correspond to the coarse adjustment knob and the fine adjustment knob respectively.

[0092] Furthermore, the optical mirror operation manipulator also includes: a Z-axis module, a Y-axis module and an X-axis module;

[0093] The Z-axis module is vertically arranged on the optical microscope operating table;

[0094] The Y-axis module is movably arranged on the Z-axis module along the Z-axis direction;

[0095] The X-axis module is movably disposed on the Y-axis module along the Y-axis direction;

[0096] The knob sleeve and the knob motor are movably arranged on the X-axis module along the X-axis direction.

[0097] Furthermore, a buffer layer is provided on the inner periphery of the knob sleeve.

[0098] Further, the knob sleeve is connected to the transmission wheel via a spring;

[0099] The transmission wheel is in transmission connection with the knob motor.

[0100] Furthermore, the optical microscope operation assembly also includes: an XY automatic adjustment platform;

[0101] The XY automatic adjustment platform is arranged on the optical microscope operating table for placing the sample rack;

[0102] The XY automatic adjustment platform is movably arranged along an X-axis and a Y-axis in a horizontal direction.

[0103] Furthermore, the optical mirror operation assembly further comprises: a tray docking assembly;

[0104] The tray docking assembly comprises: a docking platform support seat and a docking platform;

[0105] The docking platform is movably arranged on the docking platform support seat along the X-axis direction;

[0106] The docking platform support seat can be raised and lowered;

[0107] The docking platform support seat is arranged at the front end of the optical microscope operating table along the X-axis direction, and is used to place the first tray or the second tray transferred by the optical microscope operating robot, and then transport the first tray or the second tray to the XY automatic adjustment platform.

[0108] Furthermore, the electric operating member is elastically connected to the fastening claw along the vertical direction.

[0109] Furthermore, a visual recognition component is provided on the fastening gripper;

[0110] The visual recognition component is used to identify whether a silicon wafer is placed on the first tray and to identify whether a placement angle of the silicon wafer meets a preset angle requirement.

[0111] Furthermore, the plurality of said mechanical grippers further include: an angle adjustment gripper;

[0112] The angle adjustment gripper is provided with an angle rotating rod;

[0113] A plurality of sample stages are arranged on the first tray or the second tray;

[0114] The side of the sample stage is provided with an angle adjustment knob for adjusting the angle of the sample stage;

[0115] The side of the angle adjustment knob is provided with an insertion hole;

[0116] When the placement angle of the silicon wafer does not meet the preset angle requirement, the angle adjustment gripper is used to, after being connected to the multi-axis robotic arm, be driven by the multi-axis robotic arm to install the angle rotary rod into the insertion hole, and drive the angle adjustment knob to rotate until the placement angle of the silicon wafer meets the preset angle requirement.

[0117] Furthermore, the visual recognition component is also used to identify the flattening angle of the fastening screw, and use the flattening angle as the initial angle, and then identify whether the static angle of the electric operating part before operation is the initial angle. If not, the controller controls the electric operating part to rotate to the initial angle.

[0118] Furthermore, each of the mechanical grippers is connected with a quick connector;

[0119] The quick connector is used for detachable connection with the switching end seat.

[0120] Furthermore, a plurality of sample stages are provided on the first tray;

[0121] The sample stage is provided with a step;

[0122] The step is used for abutment of one side of the silicon wafer;

[0123] The pressing plate is used to abut against the other side of the silicon wafer.

[0124] Furthermore, a side of the pressing plate facing the step is an inclined surface facing normally downward.

[0125] Furthermore, the pressing plate is provided with a strip-shaped hollow groove;

[0126] The sample stage is provided with a plurality of threaded holes;

[0127] The fastening screw passes through the strip-shaped hollow groove and is threadedly connected to the threaded hole;

[0128] When the fastening screw is loosened, the pressing plate can slide relative to the fastening screw;

[0129] When the fastening screw is tightened, the pressing plate is pressed by the fastening screw and fixed on the sample stage.

[0130] Furthermore, the pressing sheet is provided with a through hole;

[0131] The end of the pulling piece is in an inverted T shape, so that the pulling piece can pass through the through hole and be clamped with the pressing sheet.

[0132] Furthermore, a manipulator placement seat is provided on the workbench;

[0133] The robot placement seat is used for placing multiple robot claws.

[0134] Furthermore, the workbench is provided with an XY moving platform on the fixed station;

[0135] The XY moving platform is used for placing the first tray or the second tray.

[0136] It can be seen from the above technical scheme that the present application provides an EBL collaborative robot, comprising at least two multi-axis robotic arms, multiple robotic claws, a workbench and a flower basket transfer robot; the flower basket transfer robot is used to carry flower baskets; multiple robotic claws include positioning claws for fixing the pressure plate, fastening claws for tightening screws, pulling claws for pulling the pressure plate, suction claws for sucking wafers and tray claws for clamping trays; after the two multi-axis robotic arms are respectively connected to different robotic claws, a first collaborative operation for fixing the silicon wafer and a second collaborative operation for fixing the wafer can be performed to achieve the fixation of the wafer and silicon wafer.

[0137] The EBL collaborative robot provided by this solution can switch different robotic claws according to different operation requirements through the cooperation of multiple robotic arms and multiple robotic claws, so as to perform fine operations such as tray placement, substrate placement and substrate position adjustment, as well as heavy physical operations such as tray transfer and flower basket transfer. It can effectively reduce the work intensity of staff and improve work efficiency, while reducing the possibility of damage to precision and expensive parts on the equipment and reducing the psychological burden of scientific researchers on the operation of ELB equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0138] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0139] Figure 1 A connection diagram of a multi-axis robot arm and a robot gripper of an EBL collaborative robot provided in an embodiment of the present application;

[0140] Figure 2 A schematic diagram of the overall structure of an EBL collaborative manipulator provided in an embodiment of the present application after being arranged on a workbench;

[0141] Figure 3 A schematic diagram of a positioning claw of an EBL collaborative robot provided in an embodiment of the present application after pressing a silicon wafer on a first tray;

[0142] Figure 4 A partial enlarged view of the second tray of an EBL collaborative robot provided in an embodiment of the present application;

[0143] Figure 5 A schematic diagram of a pulling claw of an EBL collaborative manipulator provided in an embodiment of the present application;

[0144] Figure 6 A schematic diagram of a suction gripper of an EBL collaborative manipulator provided in an embodiment of the present application;

[0145] Figure 7 A schematic diagram of an EBL collaborative manipulator performing a first collaborative operation provided in an embodiment of the present application;

[0146] Figure 8 An enlarged view of a positioning claw of an EBL collaborative robot provided in an embodiment of the present application after pressing a silicon wafer on a first tray;

[0147] Fig. 9 A schematic diagram of a sample holder of an EBL collaborative manipulator provided in an embodiment of the present application after being placed on an XY moving platform;

[0148] Fig.10 A diagram of a tightening gripper operation of an EBL collaborative manipulator provided in an embodiment of the present application;

[0149] Fig.11 A schematic diagram of placing a wafer into a sample rack of an EBL collaborative robot provided in an embodiment of the present application;

[0150] Fig.12A mask and mask plate rack positioning diagram of an EBL collaborative manipulator provided in an embodiment of the present application;

[0151] Fig.13 A schematic diagram of a manipulator placement seat for an EBL collaborative manipulator provided in an embodiment of the present application;

[0152] Fig.14 A schematic diagram of a rotary dial gripper of an EBL collaborative manipulator provided in an embodiment of the present application;

[0153] Fig.15 A partial view of a second tray of an EBL collaborative robot provided in an embodiment of the present application;

[0154] Fig.16 A three-dimensional diagram of the overall layout of an EBL collaborative manipulator provided in an embodiment of the present application;

[0155] Fig.17 A schematic diagram of a flower basket and a lifting platform of an EBL collaborative manipulator provided in an embodiment of the present application;

[0156] Fig.18 A schematic diagram of an EBL collaborative robot provided in an embodiment of the present application pulling a tray out of a flower basket and onto a lifting platform;

[0157] Fig.19 A schematic diagram of an EBL collaborative robot provided in an embodiment of the present application clamping a tray from a lifting platform;

[0158] Fig. 20 A schematic diagram of a flower basket transfer manipulator and a flower basket extraction gripper of an EBL collaborative manipulator provided in an embodiment of the present application;

[0159] Fig.21 A schematic diagram of a flower basket extraction gripper of an EBL collaborative manipulator provided in an embodiment of the present application after gripping a connecting rod;

[0160] Fig. 22 A schematic diagram of a height positioning component of an EBL collaborative manipulator provided in an embodiment of the present application;

[0161] Fig.23 A schematic diagram of a height adjustment gripper of an EBL collaborative manipulator provided in an embodiment of the present application;

[0162] Fig.24 A schematic diagram of a sample stage on a first tray of an EBL collaborative manipulator provided in an embodiment of the present application;

[0163] Fig.25 A schematic diagram of an optical microscope operation component area of ​​an EBL collaborative manipulator provided in an embodiment of the present application;

[0164] Fig.26 A schematic diagram of components on an optical microscope operating table in an optical microscope operating assembly of an EBL collaborative manipulator provided in an embodiment of the present application;

[0165] Fig. 27 A partial enlarged view of an optical microscope operation component of an EBL collaborative manipulator provided in an embodiment of the present application;

[0166] Fig.28 A schematic diagram of an X-axis adjustment component of an EBL collaborative manipulator provided in an embodiment of the present application;

[0167] Fig.29 A schematic diagram of a Y-axis adjustment component of an EBL collaborative manipulator provided in an embodiment of the present application;

[0168] Fig.30 A schematic diagram of some components of an optical microscope manipulation manipulator of an EBL collaborative manipulator provided in an embodiment of the present application;

[0169] Fig.31 A schematic diagram of a wafer placement fixture for an EBL collaborative robot provided in an embodiment of the present application;

[0170] In the figure:

[0171] 100. Multi-axis robotic arm; 110. Force sensor; 120. Switching end seat;

[0172] 200, mechanical gripper; 201, quick connector; 210, positioning gripper; 211, pressing member; 212, elastic pressure rod; 213, guard plate; 214, avoidance; 220, fastening gripper; 221, electric operating member; 222, visual recognition component; 223, light source; 230, pulling gripper; 231, pulling member; 240, suction gripper; 250, pressing gripper; 251, pressing block; 260, clamping gripper; 261, clamping plate; 270, rotary gripper; 271, sleeve rod; 280, tray gripper; 281, gripper; 290, height adjustment gripper; 291, second electric operating member; 2100, angle adjustment gripper; 2101, angle rotary rod; 2110, push-pull gripper; 2120, push gripper;

[0173] 310, pressing plate; 311, strip-shaped hollow groove; 320, first tray; 330, fastening screw; 340, second tray; 341, T-shaped block; 342, snap-in groove; 350, pressing sheet; 351, through hole; 360, locking rod; 370, sample table; 371, step; 372, threaded hole; 373, rack; 380, height adjustment knob; 381, height adjustment table; 390, angle adjustment knob; 391, insertion hole;

[0174] 410, wafer; 420, silicon wafer;

[0175] 500, storage and retrieval assembly; 510, flower basket; 511, storage cavity; 512, opening; 513, lifting rod; 514, positioning block; 520, lifting platform; 521, lifting cylinder; 522, carrier; 530, flower basket storage platform; 531, flower basket storage cavity; 532, cover; 533, connecting rod;

[0176] 600, height positioning component; 610, positioning platform; 620, sliding fixture; 630, height positioning sensor;

[0177] 700, flower basket transfer robot; 710, flower basket extraction gripper; 711, positioning plate; 712, first notch; 713, second notch;

[0178] 800, workbench; 810, fixed workstation; 820, flower basket workstation; 830, manipulator placement seat; 840, XY moving platform; 850, wafer placement fixture; 851, wafer placement table; 852, silicon wafer placement table; 860, total visual assembly; 870, flower basket support; 871, strip groove; 880, sample rack; 881, transparent support; 882, mask; 883, J-shaped buckle; 884, mask plate rack;

[0179] 900. Optical mirror operation assembly; 910. Optical mirror transfer manipulator; 920. Optical mirror operation manipulator; 921. Knob sleeve; 922. Knob motor; 923. Z-axis module; 924. Y-axis module; 925. X-axis module; 926. Buffer layer; 927. Spring; 928. Transmission wheel; 930. Optical mirror operation table; 940. Optical mirror; 941. Coarse adjustment knob; 942. Fine adjustment knob; 950. XY automatic adjustment platform; 951. X-axis adjustment assembly; 952. Y-axis adjustment assembly; 953. Piezoelectric preload actuator; 960. Tray docking assembly; 961. Docking platform support seat; 962. Docking platform. DETAILED DESCRIPTION

[0180] The technical solutions of the embodiments of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the specification of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection requested by the present application.

[0181] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0182] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a replaceable connection, or an integral connection, it can be a mechanical connection, it can be an electrical connection, it can be a direct connection, it can be indirectly connected through an intermediate medium, and it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0183] See also Figure 1 and Figure 2 In the first aspect of the embodiment of the present application, an EBL collaborative manipulator is provided, comprising: a plurality of manipulator claws 200, at least two multi-axis manipulator arms 100 and a workbench 800. The workbench 800 is provided with a fixed station 810 and a flower basket station 820; the flower basket station 820 is used to place a flower basket 510; and the flower basket 510 is used to place a first tray 320 or a second tray 340.

[0184] The EBL collaborative robot can be set on the workbench 800 and operate the wafer 410 and the silicon chip 420 on the workbench 800. Figure 3 and Figure 4 In application, the number of the multi-axis robot arms 100 may be greater than two; in the embodiment shown in the present application, the multi-axis robot arms 100 are illustrated as including two.

[0185] The first end of the multi-axis robot arm 100 is provided with a force sensor 110 and a switching end seat 120 provided on the force sensor 110; the switching end seat 120 is used to detachably connect the robot gripper 200. During operation, the reaction force received by the robot gripper 200 will act on the force sensor 110. The multi-axis robot arm 100, the force sensor 110 and the robot gripper 200 are all electrically connected to the controller, and the controller controls the movement of the multi-axis robot arm 100 and the action of the robot gripper 200; through the force sensor 110, the controller can accurately control the magnitude of the force applied by the robot gripper 200 to the wafer 410 and the silicon wafer 420 when operating, so as to avoid damaging the wafer 410 and the silicon wafer 420 and improve the accuracy of the operation.

[0186] In this embodiment, the multi-axis robot arm 100 is used to drive the multi-axis movement of the robot gripper 200. The multi-axis robot arm 100 is composed of multiple joints and connecting rods. The way in which it drives the multi-axis movement of the robot gripper 200 is a prior art and will not be described in detail in this solution. It should be noted that multi-axis movement means that the robot gripper 200 connected to the multi-axis robot arm 100 can move in at least two directions; in this embodiment, the robot gripper 200 connected to the multi-axis robot arm 100 can move along the X-axis, Y-axis and Z-axis so that the robot gripper 200 can move to any position within a certain space.

[0187] See also Figures 3 to 8 The plurality of mechanical grippers 200 include: a positioning gripper 210, a fastening gripper 220, a pulling gripper 230 and a suction gripper 240. The positioning gripper 210 is provided with a pressing member 211, and a plurality of elastic pressure rods 212 are provided at the bottom of the pressing member 211; the fastening gripper 220 is provided with an electric operating member 221; the pulling gripper 230 is provided with a pulling member 231; and the suction gripper 240 is used to suck the wafer 410. Among them, the suction gripper 240 may be provided with a flexible suction member, which can suck the wafer 410 without damaging the wafer 410.

[0188] The EBL collaborative robot is used to perform a first collaborative operation and a second collaborative operation on a fixed workstation 810 .

[0189] The first collaborative operation is Figure 7 and Figure 8 As shown, a multi-axis robot arm 100 is connected to the positioning claw 210 and moves the positioning claw 210 to a plurality of elastic pressure rods 212 to press and fix the pressure plate 310 on the first pallet 320, and another multi-axis robot arm 100 is connected to the fastening claw 220 and moves the fastening claw 220 to the electric operating part 221 to abut the fastening screw 330 on the pressure plate 310, so that the electric operating part 221 can drive the fastening screw 330 to rotate and adjust the tightness of the connection between the pressure plate 310 and the first pallet 320.

[0190] Among them, the electric operating part 221 can be an electric screwdriver head, which is driven and controlled by the servo motor on the fastening claw 220. The servo motor can control the rotation stroke of the electric operating part 221 to prevent the fastening screw 330 from being over-tightened and damaging the pressure plate 310. The servo motor can be set with upper and lower torque limits and a screw height detector; the screw height detector can be used to determine whether the screw is screwed in place and whether the torque meets the requirements. In addition, the pressure plate 310 and the fastening screw 330 can be preset on the first tray 320, or they can be placed by the robot after the first tray 320 is placed on the fixed station 810.

[0191] As an embodiment, the electric operating member 221 is elastically connected to the fastening claw 220 in the vertical direction, so that the electric operating member 221 can float in the vertical direction. On the premise that the electric operating member 221 can turn the fastening screw 330, the electric operating member 221 is prevented from damaging the pressure plate 310 due to excessive pressure from the fastening screw 330.

[0192] In this embodiment, the top of the elastic pressure rod 212 can be connected to the pressing member 211 through an elastic buffer, so that the elastic pressure rod 212 has an elastic buffer effect, and can achieve precise force control in conjunction with the force sensor 110 to avoid damaging the pressure plate 310. In addition, the bottom of the elastic pressure rod 212 can be made of a soft material such as silicone to further protect the pressure plate 310, and can increase the friction between the two when the elastic pressure rod 212 presses the pressure plate 310, thereby preventing the pressure plate 310 from twisting.

[0193] like Figure 8 As shown, in this embodiment, the pressing plate 310 is a plate member used to abut against the side of the silicon wafer 420 to cooperate with the step 371 to fix the silicon wafer 420.

[0194] After the positioning claw 210 is removed, the pressing plate 310 will loosen; therefore, in this embodiment, a fastening screw 330 is provided on the pressing plate 310; when the fastening screw 330 is loosened, the pressing plate 310 can slide relative to the fastening screw 330 to adjust the position of the pressing plate 310 relative to the silicon wafer 420; after the pressing plate 310 abuts against the silicon wafer 420, the fastening screw 330 is tightened, so that the pressing plate 310 is pressed by the fastening screw 330 and fixed on the sample stage 370.

[0195] The improved EBL collaborative robot in this embodiment can realize automated collaborative operation to fix the silicon wafer 420 on the first tray 320. In the process of fixing the silicon wafer 420, the controller will sense the pressure of the elastic pressure rod 212 on the pressure plate 310 in real time through the force sensor 110. The elastic buffer at the top of the elastic pressure rod 212 and the silicone at the bottom can avoid damage to the pressure plate 310, thereby realizing precise and damage-free automated collaborative operation.

[0196] The second collaborative operation is as follows Figure 4 As shown, one multi-axis robot arm 100 is connected to the suction gripper 240 and moves the suction gripper 240 to suck the wafer 410 onto the second tray 340 , and another multi-axis robot arm 100 is connected to the pulling gripper 230 and moves the pulling gripper 230 to move the pressing sheet 350 on the second tray 340 to be pressed onto the wafer 410 .

[0197] Specifically, in this embodiment, the first tray 320 is used to place and fix the silicon wafer 420; the second tray 340 is used to place and fix the wafer 410. A plurality of rotatable pressing plates 350 are provided on the first tray 320; the pressing plates 350 may be thin metal plates that can be elastically deformed in the vertical direction while rotating; so that after the wafer 410 is placed on the first tray 320, the pressing plates 350 can be first driven to rise and rotate to above the wafer 410, and then the pressing plates 350 are released so that the pressing plates 350 are elastically pressed downward to press the wafer 410 tightly against the first tray 320.

[0198] As an implementation manner, a through hole 351 is provided on the pressing sheet 350 ; the end of the pulling member 231 is in an inverted T-shape, so that the pulling member 231 can pass through the through hole 351 and be engaged with the pressing sheet 350 .

[0199] Specifically, when the pulling member 231 is aligned with the center of the through hole 351, the pulling member 231 can pass through the through hole 351, and then the pulling member 231 moves in the horizontal direction, so that its inverted T-shaped end can be clamped with the pressing plate 350, and then when the pulling member 231 rises and moves horizontally, it can drive the pressing plate 350 to rise and move horizontally; similarly, when it is necessary to leave the pressing plate 350, move the pulling member 231 downward, and then move the pulling member 231 horizontally until the pulling member 231 is aligned with the center of the through hole 351, and then move the pulling member 231 upward again.

[0200] Through the first coordinated operation and the second coordinated operation, the wafer 410 and the silicon chip 420 can be automatically placed and fixed, which reduces the technical requirements for the staff and the work intensity of the staff.

[0201] The process of fixing the wafer 410 or the silicon chip 420 can be performed on the fixing station 810 on the workbench 800. The fixing station 810 is provided with a sample rack 880 for the first tray 320 and the second tray 340 to be placed.

[0202] As an embodiment, the sample rack 880 can be fixedly arranged. Accordingly, in the fixed operation, the first tray 320 and the second tray 340 are located at fixed positions. Therefore, each time the silicon wafer 420 and the wafer 410 are moved for placement, it is only necessary to place the silicon wafer 420 and the wafer 410 at fixed positions.

[0203] In another embodiment, see Fig. 9 The sample holder 880 is disposed on the XY moving platform 840 ; the XY moving platform 840 can drive the sample holder 880 to move along the X-axis direction and the Y-axis direction in the horizontal direction to adjust the position of the first tray 320 or the second tray 340 .

[0204] Based on the above embodiment, a visual recognition component 222 is provided on the fastening gripper 220; the visual recognition component 222 is used to identify whether a silicon wafer 420 is placed on the first tray 320 and whether the placement angle of the silicon wafer 420 meets the preset angle requirement.

[0205] Correspondingly, the pulling gripper 230 may also be provided with a visual recognition component 222 .

[0206] The visual recognition component 222 can be a camera, and the visual recognition component 222 can be connected to a light source 223; the visual recognition component 222 can automatically identify whether the silicon wafer 420 and the wafer 410 exist, identify the positions of the silicon wafer 420 and the wafer 410, and identify the placement angles of the silicon wafer 420 and the wafer 410 and other fixed pre-operation information; and the visual recognition component 222 is electrically connected to the above-mentioned controller, so that the controller can control the multi-axis robot arm 100 and the robot gripper 200 through the above-mentioned fixed pre-operation information to achieve precise fixation of the silicon wafer 420 and the wafer 410.

[0207] Corresponding to the electric operating part 221 being a screwdriver head, the visual recognition component 222 is also used to identify whether the static angle of the electric operating part 221 is the initial angle. If not, the controller controls the servo motor to rotate so that the electric operating part 221 rotates to the initial angle, ensuring that before each fixing operation, the blade angle of the electric operating part 221 is consistent with the angle of the fastening screw 330. The initial angle is the flat position angle of the fastening screw 330 after the pressure plate 310 is pressed and fixed by the pressing part 211; the flat position of the fastening screw 330 refers to the recessed area on the fastening screw 330 for cooperating with the screwdriver head. In order to facilitate identification by the visual recognition component 222, in this embodiment, the fastening screw 330 can be a flat-head screw; correspondingly, the electric operating part 221 is a flat-head screwdriver.

[0208] As a further improvement, a general visual component 860 may be provided on the workbench 800; the general visual component 860 is electrically connected to the controller for visually monitoring the entire workbench 800 to further improve the accuracy of the operation.

[0209] In one embodiment, see Fig.11When the second tray 340 is placed on the sample rack 880 , a transparent bracket 881 may be provided on the sample rack 880 , and the transparent bracket 881 may be made of glass.

[0210] In an embodiment in which a transparent support 881 is provided, the wafer 410 can be sucked by the suction gripper 240, and then the pushing gripper 2120 cooperates to push the wafer 410 into the interlayer between the transparent support 881 and the sample rack 880; wherein, one end of the pushing gripper 2120 used to push the wafer 410 can be an arc shape adapted to the wafer 410, and a flexible layer is provided on the end face to avoid damage to the wafer.

[0211] In application, the process of wafer installation by the pushing gripper 2120 cooperating with the suction gripper 240 can be: after a multi-axis robot arm 100 drives the suction gripper 240 to suck the wafer 410, it drives the wafer 410 to move to the upper side of the sample rack 880, and then lowers the suction gripper 240 to drive one side end of the wafer 410 to be placed on the sample rack 880; then another multi-axis robot arm 100 moves the pushing gripper 2120 so that the flexible layer of the pushing gripper 2120 abuts against the other side end of the wafer 410. After the suction gripper 240 releases the adsorption of the wafer 410, the pushing gripper 2120 can be moved to push the wafer 410 into the bottom of the transparent bracket 881.

[0212] The transparent support 881 is a detachable structure; after the transparent support 881 is detached, the suction gripper 240 can directly suck the wafer 410 and place it on the sample holder 880 .

[0213] In another embodiment, see Fig.12 , this solution also includes a mask plate rack 884; the mask 882 can be clamped on the mask plate rack 884 through a J-shaped buckle 883; correspondingly, the multiple robot grippers 200 can also include tweezer grippers (not shown in the figure); when the multi-axis robot arm 100 is connected to the tweezer grippers, the J-shaped buckle 883 can be clamped by the tweezer grippers to clamp the mask 882 on the mask plate rack 884.

[0214] Specifically, when a structure composed of multiple complex graphics is to be produced, the mask 882 can decompose these complex graphics into different levels and expose them separately. By using multiple masks 882, the wafer 410 or the silicon chip 420 is exposed in sequence, and a complex graphic structure can be gradually constructed. During the exposure process, the mask 882 can be set between the electron beam source and the wafer 410 or the silicon chip 420 through the mask plate frame 884.

[0215] As can be seen from the above, during the operation, in addition to the first coordinated operation and the second coordinated operation, the multi-axis robot arm 100 needs to replace the robot claw 200 to perform different operations such as clamping the silicon wafer 420, sucking the wafer 410, pressing the pressure plate 310, tightening the screws, and pushing the wafer 410. To this end, in one embodiment, refer to Figure 1 and Fig.13 A manipulator placement seat 830 may be provided on the workbench 800; the manipulator placement seat 830 is used to place a plurality of manipulator grippers 200. The multi-axis manipulator 100 is provided beside the manipulator placement seat 830, so that the multi-axis manipulator 100 can replace different manipulator grippers 200.

[0216] In one embodiment, see Fig.15 , a snap-in slot 342 may be provided on the side of the sample table 370 on the second tray 340; a movable T-shaped block 341 is provided on the snap-in slot 342; the T-shaped block 341 may be pulled and pushed by the tweezers gripper so that the T-shaped block 341 leaves the snap-in slot 342 or enters the snap-in slot 342; after the T-shaped block 341 enters the snap-in slot 342, the T-shaped block 341 is locked and engaged with the snap-in slot 342 to fix the edge of the wafer 410, and cooperates with the pressing piece 350 to better fix the wafer 410.

[0217] As a further improvement, Figure 3 As shown, each mechanical gripper 200 is connected to a quick connector 201; the quick connector 201 is used to be detachably connected to the switching end seat 120. The quick connector 201 can be an existing quick connector structure, and its specific structure is not shown in this application. In actual application, the existing quick connector can be used as a reference, which does not affect the implementation of the solution.

[0218] The quick connector 201 can be quickly disconnected from the switch end seat 120. The quick disconnection method between the quick connector 201 and the switch end seat 120 can be, for example, a bayonet type, an electromagnetic type, an inflatable type, etc., and after the robot gripper 200 is connected to the multi-axis robot arm 100, the robot gripper 200 is powered on, so that the controller can control the robot gripper 200. The quick disconnection and power-on after connection between the robot gripper 200 and the multi-axis robot arm 100 are prior arts and will not be described in detail in this solution.

[0219] In a more specific embodiment, see Figure 3 and Figure 8 The pressing member 211 is provided with an escape opening 214 penetrating in the vertical direction; the escape opening 214 is used for the electric operating member 221 to pass through; and a plurality of elastic pressure rods 212 are provided on both sides of the escape opening 214 .

[0220] Specifically, see Figure 8The pressing plate 310 is provided with a strip hollow groove 311; the sample stage 370 is provided with a plurality of threaded holes 372; the fastening screw 330 passes through the strip hollow groove 311 and is threadedly connected with the threaded hole 372. When the pressing member 211 presses the pressing plate 310, the position of the avoidance opening 214 corresponds to the position of the strip hollow groove 311 on the pressing plate 310, so that the plurality of elastic pressing rods 212 can at least press the two sides of the strip hollow groove 311 on the pressing plate 310, ensuring that the pressing plate 310 is fixed.

[0221] That is, in this solution, the avoidance opening 214 is provided on the pressing member 211, so that in addition to the strip hollow groove 311, elastic pressure rods 212 can be provided at various positions on the pressing member 211 corresponding to the pressure plate 310, thereby ensuring the clamping effect of the pressure plate 310.

[0222] In one embodiment, guard plates 213 are disposed on both sides of the pressing member 211 ; the two guard plates 213 are used to abut against both sides of the pressing plate 310 ; and a plurality of elastic pressing rods 212 are disposed between the two guard plates 213 .

[0223] When the two guard plates 213 abut against the two sides of the pressing plate 310 , the movement of the pressing member 211 can drive the pressing plate 310 to move synchronously, so that the positioning gripper 210 can drive the pressing plate 310 to move and adjust the pressing plate 310 to abut against the silicon wafer 420 .

[0224] It should be noted that a plurality of sample stages 370 are disposed on the first tray 320 or the second tray 340. In this embodiment, four sample stages 370 are disposed on the first tray 320, and one sample stage 370 is disposed on the second tray 340. The sample stage 370 on the first tray 320 may have a different structure from the sample stage on the second tray 340.

[0225] On the first tray 320, the sample stage 370 is provided with a step 371 and a plurality of threaded holes 372; the step 371 is used to abut against one side end of the silicon wafer 420; the pressing plate 310 is used to abut against the other side end of the silicon wafer 420 to fix the silicon wafer 420. Since the step 371 is in a long strip shape, the silicon wafer 420 can abut against different positions of the step 371; correspondingly, the positioning gripper 210 can drive the pressing plate 310 to move to different positions to correspond to the position of the silicon wafer 420. Among them, when the fastening screw 330 is completely loosened, the positioning gripper 210 can drive the pressing plate 310 and the fastening screw 330 to move synchronously.

[0226] An elastic support member is provided at the bottom of the sample stage 370; when the silicon wafer 420 and the wafer 410 need to be placed, the sample stage 370 can be pressed down first to facilitate the placement of the silicon wafer 420 and the wafer 410, and then the sample stage 370 is gradually reset by the elastic force of the elastic support member.

[0227] Correspondingly, in one embodiment, the multiple robotic grippers 200 also include: a pressing gripper 250; a pressing block 251 is provided on the pressing gripper 250; the pressing gripper 250 is used to be driven by the multi-axis robotic arm 100 to press the first pallet 320 or the second pallet 340 downward through the pressing block 251 after being connected to the multi-axis robotic arm 100, so as to sink the first pallet 320 or the second pallet 340.

[0228] That is, in this embodiment, the sample stage 370 can be pressed down by the multi-axis robot arm 100 in cooperation with the pressing claw 250, thereby achieving a pressing action.

[0229] In one embodiment, the action of clamping the silicon wafer 420 can be completed by the clamping claw 260. Specifically, the clamping claw 260 includes two openable clamping plates 261; the clamping claw 260 is used to clamp the silicon wafer 420 through the two clamping plates 261 after being connected to the multi-axis robot arm 100 and driven by the multi-axis robot arm 100.

[0230] A flexible pad made of a material such as silicone may be disposed on the inner side of the clamping plate 261 to avoid damaging the silicon wafer 420 .

[0231] In one embodiment, see Figure 2 , Fig.14 and Fig. 27 The multiple robot grippers 200 also include: a rotary gripper 270; a sleeve rod 271 is provided on the rotary gripper 270; the rotary gripper 270 is used to be driven by the multi-axis robot arm 100 to be sleeved on the locking rod 360 of the first pallet 320 or the second pallet 340 after being connected to the multi-axis robot arm 100, and drive the locking rod 360 to rotate to lock or unlock the position of the first pallet 320 or the second pallet 340.

[0232] The locking rod 360 can be disposed on the sample rack 880 ; the sample rack 880 is provided with a clamping cavity for placing the first tray 320 or the second tray 340 ; after the locking rod 360 is rotated, the space of the clamping cavity is reduced to clamp the first tray 320 or the second tray 340 .

[0233] It should be noted that the technical means of adjusting the size of the clamping cavity by rotating the locking rod 360 belongs to the existing technology and will not be elaborated in this scheme; this scheme mainly integrates the operating means of rotating the locking rod 360 into the rotary dial claw 270, so that after the rotary dial claw 270 is connected to the multi-axis robot arm 100, it can be controlled by the multi-axis robot arm 100 to sleeve the sleeve rod 271 onto the locking rod 360, so as to realize mechanized and automatic control of the locking rod 360.

[0234] In application, the locking rod 360 can be adapted so that after being locked, the XY movable platform 840 is also in a locked state and cannot move the sample rack 880; the implementation method here can be, for example, to set an induction switch at the end of the locking stroke of the locking rod 360 to control the start and stop of the XY movable platform 840 through the induction switch; or to set a physical switch at the end of the locking stroke of the locking rod 360, and when the locking rod 360 abuts the physical switch, the XY movable platform 840 is powered off.

[0235] In other embodiments, see Figure 2 , Figures 16 to 19 The EBL collaborative robot provided in this embodiment further includes: a storage and retrieval component 500. The storage and retrieval component 500 includes: the above-mentioned flower basket 510; the flower basket 510 is used to store the first tray 320 and / or the second tray 340.

[0236] like Fig.13 As shown, the plurality of mechanical grippers 200 in this embodiment further include: a pallet gripper 280; the pallet gripper 280 includes two openable and closable clamping claws 281. The clamping claws 281 may be J-shaped and can clamp and hook the pallet.

[0237] The tray gripper 280 is used to be driven by the multi-axis robot arm 100 to take out the first tray 320 or the second tray 340 from the flower basket 510 and transfer it to the fixed station 810 after being connected to the multi-axis robot arm 100 .

[0238] In this embodiment, before positioning, the tray gripper 280 can take the tray out of the basket 510, and after positioning the wafer 410 or silicon wafer 420, the tray is clamped and placed back into the basket 510, thereby realizing the automated operation of taking and placing the tray, further reducing the workload of scientific researchers.

[0239] In a more specific embodiment, in order to ensure that the trays in the flower basket 510 are placed regularly as a whole, a plurality of storage cavities 511 are provided in the flower basket 510; the plurality of storage cavities 511 are arranged in sequence along the vertical direction; an opening 512 connecting the plurality of storage cavities 511 is provided on the side of the flower basket 510; and the first tray 320 or the second tray 340 is placed in the storage cavity 511.

[0240] Therefore, the plurality of trays placed in the flower basket 510 are evenly spaced in the vertical direction. In this case, in order to facilitate the placement of the trays in the flower basket 510, please refer to Fig.13 and Fig.18 The multiple mechanical grippers 200 also include: a push-pull gripper 2110; the push-pull gripper 2110 is connected to a push-pull rod and can push or pull the tray.

[0241] The push-pull gripper 2110 is used to be driven by the multi-axis robot arm 100 to hook the first tray 320 or the second tray 340 located in the storage cavity 511 after being connected to the multi-axis robot arm 100, and then drive the first tray 320 or the second tray 340 to slide out of the opening 512, so that the tray gripper 280 can clamp the first tray 320 or the second tray 340.

[0242] That is, in this embodiment, the push-pull gripper 2110 can drive the tray in the storage cavity 511 to slide, so as to push the tray into the storage cavity 511 or take it out from the storage cavity 511; after the push-pull gripper 2110 pulls the tray out of the storage cavity 511, the tray gripper 280 can clamp the tray.

[0243] In order to improve the stability during the process of taking and placing the tray, in one embodiment, the storage and retrieval assembly 500 further includes: a lifting platform 520 .

[0244] The lifting platform 520 includes: a lifting cylinder 521 and a carrier 522; the carrier 522 can be lifted and lowered on the workbench 800; a flower basket station 820 for placing a flower basket 510 is provided on the workbench 800; the opening 512 of the flower basket 510 located on the flower basket station 820 faces the carrier 522; the output end of the lifting cylinder 521 is connected to the carrier 522, which is used to drive the carrier 522 to lift and lower so that the carrier 522 is flush with the storage cavity 511; the push-pull gripper 2110 is used to be driven by the multi-axis robot arm 100 after being connected to the multi-axis robot arm 100 to pull the first tray 320 or the second tray 340 in the storage cavity 511 out to the carrier 522, or to push the first tray 320 or the second tray 340 on the carrier 522 into the storage cavity 511.

[0245] In this embodiment, the lifting cylinder 521 can drive the carrier 522 to be flush with the storage cavity 511 at any height, thereby achieving smooth pallet placement.

[0246] Taking the removal of the pallet in the storage cavity 511 of the second layer as an example, the specific picking and placing process can be: the lifting cylinder 521 drives the carrier 522 to rise to be flush with the storage cavity 511 of the second layer, and then the push-pull gripper 2110 pulls the pallet in the storage cavity 511 of the second layer onto the carrier 522. After the pallet is completely separated from the flower basket 510, the pallet gripper 280 clamps the pallet to complete the separation of the pallet and the carrier 522.

[0247] from Figure 2 It can be seen that in application, a flower basket bracket 870 can be provided on the workbench 800; the lifting platform 520 can be provided in front of the flower basket bracket 870, and after the flower basket 510 is placed on the flower basket bracket 870, the opening 512 of the flower basket 510 faces the lifting platform 520.

[0248] As an implementation, see Fig.17 The flower basket support 870 is provided with a groove 871; the side of the flower basket 510 is provided with a plurality of positioning blocks 514; the groove 871 is open upward. When the flower basket 510 is placed, the positioning blocks 514 are inserted into the groove 871, so that the flower basket 510 is fixed and limited in the horizontal direction after being placed.

[0249] In existing EBL equipment, the pallet picking and placing operations are generally completed manually by workers, that is, the workers are required to manually take the pallet rack out of the host machine. The taking-out process requires the workers to keep the pallet horizontal and place it gently and steadily, which consumes a lot of physical energy for the workers and has a high risk of damaging the pallet.

[0250] To this end, in one embodiment, see Fig.16 The EBL collaborative robot also includes: a flower basket transfer robot 700; the storage and retrieval component 500 also includes: a flower basket storage table 530; the flower basket transfer robot 700 is used to transfer the flower basket 510 in the flower basket storage table 530 to the flower basket station 820.

[0251] The flower basket station 820 is disposed on the workbench 800. In the above embodiment with the flower basket support 870, the flower basket support 870 is disposed on the flower basket station 820. The flower basket transfer robot 700 can reduce the physical exertion of the researchers and reduce the damage to the flower basket 510 and the tray inside the flower basket 510.

[0252] In one embodiment, see Fig.16 , Fig. 20 and Fig.21 The flower basket transfer robot 700 takes and places the flower basket 510 through the flower basket extraction gripper 710 .

[0253] The flower basket extraction gripper 710 includes two openable and closable clamping plates 711; a lifting rod 513 is provided on the top of the flower basket 510; the flower basket extraction gripper 710 is used to clamp the lifting rod 513 through the two clamping plates 711. A second notch 713 may be provided on the clamping plate 711; the two second notches 713 of the two clamping plates 711 can cooperate to clamp the lifting rod 513.

[0254] In one embodiment, a flower basket storage cavity 531 is provided inside the flower basket storage platform 530; an openable cover 532 is provided on the flower basket storage platform 530; the cover 532 is used to control the opening and closing of the flower basket storage cavity 531. The cover 532 can also protect the flower basket 510 in the flower basket storage cavity 531.

[0255] In order to facilitate the flower basket transfer robot 700 to automatically extract the flower basket 510, the flower basket transfer robot 700 can be adapted to a structure that can open the cover body 532, so that the flower basket transfer robot 700 can open the cover body 532 and then take out the flower basket 510, thereby realizing the full automation of the flower basket transfer.

[0256] As an implementation method of opening the cover body 532 by the flower basket transfer robot 700, a first notch 712 is further provided on the positioning plate 711; a connecting rod 533 is provided on the cover body 532; and the first notch 712 is used for the connecting rod 533 to be inserted.

[0257] Through the first notch 712 and the second notch 713 , the flower basket transfer robot 700 can control the clamping of the lifting rod 513 and the clamping of the connecting rod 533 at the same time, thereby having both the opening function of the cover body 532 and the extraction function of the flower basket 510 .

[0258] In practical applications, the depth of the first notch 712 is greater than the depth of the second notch 713 .

[0259] In another embodiment provided in this application, please refer to Figure 2 and Fig. 22 , this embodiment also includes: a height positioning component 600;

[0260] The height positioning assembly 600 includes: a positioning platform 610, a sliding fixture 620 and a height positioning sensor 630. The sliding fixture 620 is disposed on the positioning platform 610 and can slide between a positioning station and a placement station on the positioning platform 610.

[0261] Specifically, the sliding jig 620 may be a linear module arranged along the y-axis direction; the area near one end of the sliding jig 620 is a placement station for placing the sample holder 880; the area near the other end of the sliding jig 620 is a positioning platform 610 for positioning the silicon chip 420 or the wafer 410 on the sample holder 880. The sliding jig 620 may be provided with a carrier for placing the sample holder 880.

[0262] The sliding jig 620 is used to drive the first pallet 320 or the second pallet 340 to slide from the placement station to the positioning station; the height positioning sensor 630 is arranged on the positioning platform 610 and is located above the positioning station; the pallet gripper 280 is also used to be driven by the multi-axis robot arm 100 to transfer the first pallet 320 or the second pallet 340 from the fixed station to the sliding jig 620 on the placement station after being connected to the multi-axis robot arm 100.

[0263] In this embodiment, the height positioning sensor 630 is used to perform height positioning on the silicon wafer 420 on the first tray 320 or the wafer 410 on the second tray 340 to determine whether the height of the silicon wafer 420 or the wafer 410 meets the preset height requirement.

[0264] As an implementation method, the height positioning sensor 630 can be a laser displacement sensor; taking the height positioning of the silicon wafer 420 as an example, the height positioning sensor 630 can be positioned in the following manner: the silicon wafer 420 is moved to the bottom of the laser sensor by the sliding fixture 620, and the laser sensor feeds back the coordinates to the controller; the controller drives the robotic gripper 200 to twist the height adjustment fixture on the first tray 320 to adjust the height of the silicon wafer 420, so that the upper surface of the silicon wafer coincides with the surface of the Faraday cup.

[0265] As a method of adjusting the height of the silicon wafer 420, refer to Fig.23 and Fig.24 The multiple robotic grippers 200 also include: a height adjustment gripper 290; a second electric operating component 291 is arranged on the height adjustment gripper 290; a plurality of height adjustment knobs 380 for adjusting the height of the sample stage 370 are arranged around the sample stage 370; when the height positioning sensor 630 determines that the height of the silicon wafer 420 or the wafer 410 does not meet the preset height requirement, the height adjustment gripper 290 is used to be driven by the multi-axis robotic arm 100 to abut against the height adjustment knob 380 on the first tray 320 after being connected to the multi-axis robotic arm 100, so that the second electric operating component 291 can drive the height adjustment knob 380 to rotate until the height of the silicon wafer 420 or the wafer 410 meets the preset height requirement. Among them, the height adjustment knob 380 can be an existing cross or flat-head bolt; correspondingly, the second electric operating component 291 can be an existing cross or flat-head screwdriver head, so that the second electric operating component 291 can be connected to the quick connector 201 to form a height adjustment claw 290 and drive the height adjustment knob 380 to rotate.

[0266] As a method of adjusting the height of the sample stage 370, please refer to Fig.24 ; The height adjustment knob 380 can be a bolt; The height adjustment knob 380 is arranged on the height adjustment platform 381; When the height adjustment knob 380 is turned, the height of the height adjustment platform 381 can be adjusted. Since the sample stage 370 and the first tray 320 are elastically connected, as the height adjustment platform 381 rises, the sample stage 370 can rise due to the elastic force; correspondingly, when the height adjustment platform 381 is pressed down, the sample stage 370 is pressed down accordingly. In application, the height adjustment platform 381 can include a plurality of height adjustment platforms 381 that are evenly distributed around the sample stage 370, so that by adjusting the height adjustment knobs 380 on different height adjustment platforms 381, the levelness of the sample stage 370 can also be adjusted.

[0267] In this embodiment, the height adjustment knob 380 is a cross-shaped bolt, so there is a difference in the rotation structure between the height adjustment knob 380 and the fastening screw 330, so the height adjustment claw 290 and the fastening claw 220 can be provided separately. In application, when the height adjustment knob 380 and the fastening screw 330 adopt the same structure, the height adjustment claw 290 can be the fastening claw 220.

[0268] See also Figure 4 The height adjustment platform 381 can be arranged inside the sample platform 370, and specifically, an opening can be arranged on the sample platform 370 for the height adjustment platform 381 to pass through. In application, by arranging the opening on the sample platform 370, the tray can be adapted to sample platforms 370 of different sizes, thereby improving the applicability of the overall device.

[0269] In one embodiment, see Fig.13 and Fig.24 The plurality of mechanical grippers 200 further include: an angle adjustment gripper 2100; and an angle rotation rod 2101 is disposed on the angle adjustment gripper 2100. The angle rotation rod 2101 may be a straight rod.

[0270] An angle adjustment knob 390 for adjusting the angle of the sample stage 370 is provided on the side of the sample stage 370; an insertion hole 391 is provided on the side of the angle adjustment knob 390; when the placement angle of the silicon wafer 420 does not meet the preset angle requirement, the angle adjustment gripper 2100 is used to, after connecting to the multi-axis robot arm 100, drive the multi-axis robot arm 100 to install the angle rotation rod 2101 into the insertion hole 391, and drive the angle adjustment knob 390 to rotate until the placement angle of the silicon wafer 420 meets the preset angle requirement.

[0271] As an embodiment, a rack 373 can be provided on the sample stage 370; the angle adjustment knob 390 is provided on the side of the sample stage 370 and is meshed with the rack 373; when the angle adjustment knob 390 is rotated, the engagement of the rack can drive the sample stage 370 to rotate to achieve the angle adjustment of the silicon wafer 420 on the sample stage 370.

[0272] In one embodiment, see Figure 25 to Figure 29 The EBL collaborative manipulator further includes: an optical mirror operation assembly 900. The optical mirror operation assembly 900 includes: an optical mirror transfer manipulator 910 and an optical mirror operation manipulator 920. The optical mirror operation manipulator 920 can be arranged on an optical mirror operation table 930. An optical mirror 940 is arranged on the optical mirror operation table 930, and a coarse adjustment knob 941 and a fine adjustment knob 942 connected to the optical mirror 940 are arranged on the optical mirror operation table 930.

[0273] The optical microscope transfer robot 910 is used to transfer the first tray 320 or the second tray 340 after height positioning to the optical microscope operation table 930. Therefore, the optical microscope transfer robot 910 can be arranged between the height positioning component 600 and the optical microscope operation table 930. The optical microscope transfer robot 910 can have a robot gripper structure similar to the tray gripper 280 for gripping the tray.

[0274] The optical mirror operation manipulator 920 includes: a knob sleeve 921 and a knob motor 922; the knob sleeve 921 is used to sleeve the coarse adjustment knob 941 or the fine adjustment knob 942; the knob motor 922 is transmission-connected to the knob sleeve 921 to drive the knob sleeve 921 to rotate.

[0275] In this solution, the knob motor 922 can drive the knob sleeve 921 to rotate, thereby realizing mechanized automatic control of the coarse adjustment knob 941 and the fine adjustment knob 942 on the aiming mirror 940, thereby improving the accuracy of the adjustment of the aiming mirror.

[0276] In application, the optical mirror operation robot 920 may include only one; the optical mirror operation robot 920 is movably arranged to control the coarse adjustment knob 941 and the fine adjustment knob 942 respectively by moving its position.

[0277] In one embodiment, the optical mirror manipulator 920 includes two, which correspond to the coarse adjustment knob 941 and the fine adjustment knob 942. In addition, the optical mirror 940 is a movable structure corresponding to the different positions of the silicon wafer 420 on the first tray 320. Accordingly, the optical mirror manipulator 920 is a movable structure.

[0278] As an embodiment, the optical mirror operating robot 920 also includes: a Z-axis module 923, a Y-axis module 924 and an X-axis module 925; the Z-axis module 923 is vertically arranged on the optical mirror operating table 930; the Y-axis module 924 is movably arranged on the Z-axis module 923 along the Z-axis direction; the X-axis module 925 is movably arranged on the Y-axis module 924 along the Y-axis direction; the knob sleeve 921 and the knob motor 922 are movably arranged on the X-axis module 925 along the X-axis direction.

[0279] Through the cooperation between the Z-axis module 923 , the Y-axis module 924 and the X-axis module 925 , the knob sleeve 921 and the knob motor 922 can move along the X-axis, Y-axis and Z-axis directions to adapt to the position of the optical mirror 940 .

[0280] Optionally, a buffer layer 926 is provided on the inner circumference of the knob sleeve 921 , which can increase the friction force when the knob sleeve 921 is connected to the coarse adjustment knob 941 or the fine adjustment knob 942 .

[0281] Optionally, the knob sleeve 921 is connected to the transmission wheel 928 via a spring 927; the transmission wheel 928 is in transmission connection with the knob motor 922. The transmission wheel 928 and the output end of the knob motor 922 may be connected via a conveyor belt.

[0282] The knob sleeve 921 can have a certain buffering capacity by providing the spring 927 to prevent the knob from being damaged by over-torque. Meanwhile, in application, the knob motor 922 can monitor its torque in real time.

[0283] In practical applications, the optical mirror 940 is a precision device and is not suitable for large-scale movement; therefore, in this solution, please refer to Fig. 27 The optical microscope operation component 900 also includes: an XY automatic adjustment platform 950; the XY automatic adjustment platform 950 is set on the optical microscope operation table 930, for placing the sample rack 880; the XY automatic adjustment platform 950 is movably set along the X-axis and Y-axis in the horizontal direction.

[0284] That is, after the sample holder 880 is placed on the XY automatic adjustment platform 950 , the XY automatic adjustment platform 950 can adjust the position of the sample holder 880 on the X-axis and the Y-axis.

[0285] In this embodiment, the XY automatic adjustment platform 950 can be connected to an X-axis adjustment component 951 and a Y-axis adjustment component 952. Fig.28 and Fig.29 As shown, the X-axis adjustment component 951 and the Y-axis adjustment component 952 are both provided with multiple groups of piezoelectric preload actuators 953, which can utilize the characteristics of piezoelectric materials to achieve precise displacement.

[0286] See also Fig.25 and Fig.26 In this embodiment, in order to avoid interference between the optical mirror operating robot 920 and the optical mirror 940 when placing the tray, the optical mirror operating component 900 can also include: a tray docking component 960; the tray docking component 960 includes: a docking platform support seat 961 and a docking platform 962; the docking platform 962 is movably arranged on the docking platform support seat 961 along the X-axis direction; the docking platform support seat 961 can be raised and lowered; the docking platform support seat 961 is arranged at the front end of the optical mirror operating table 930 along the X-axis direction, and is used to place the first tray 320 or the second tray 340 transferred by the optical mirror operating robot 920, and then transport the first tray 320 or the second tray 340 to the XY automatic adjustment platform 950.

[0287] The EBL collaborative manipulator provided by the above embodiment can effectively reduce the difficulty of operating the EBL equipment, lower the operating threshold, save the time of scientific researchers practicing simple repetitive movements, and save the physical strength of scientific researchers in carrying objects such as flower baskets 510. In addition, there is no need to bear the psychological pressure of damaging the substrate or equipment during the operation of the EBL equipment, thereby reducing the pressure on scientific researchers.

[0288] Based on the above examples, please refer to Figures 1 to 30 In an EBL collaborative robot provided in the present application, a first tray 320 is used for placing silicon wafers 420, and a pressing plate 310 for pressing the silicon wafers 420 is provided on the first tray 320; a second tray 340 is used for placing wafers 410, and a movable pressing plate 350 is provided on the second tray 340.

[0289] Specifically, the workbench 800 may be provided with a fixed workstation 810, a flower basket workstation 820, multiple robot placement seats 830, a wafer placement fixture 850, and a general vision assembly 860; the fixed workstation 810 is used to place the XY moving platform 840; the flower basket workstation 820 is used to place the flower basket bracket 870; the robot placement seat 830 is used to place multiple robot claws 200, so as to facilitate the rapid switching of the end of the multi-axis robot 100.

[0290] The XY moving platform 840 is used to place the first tray 320 or the second tray 340, and can drive the first tray 320 or the second tray 340 to move along the X-axis direction and the Y-axis direction on the horizontal plane. In this embodiment, the XY moving platform 840 can adopt an existing translation structure, so it is not described in detail in this embodiment.

[0291] See also Fig.31 The wafer placement fixture 850 is provided with a wafer placement table 851, a silicon wafer placement table 852 and a mask plate placement table (not shown in the figure), which can be used for placing a variety of materials for material preparation.

[0292] In one embodiment, the side of the pressure plate 310 facing the step 371 is a normal downward inclined surface, so that the contact position between the pressure plate 310 and the silicon wafer 420 is the side edge of the top surface of the silicon wafer 420. On the one hand, the contact area between the pressure plate 310 and the silicon wafer 420 can be reduced to avoid large-area damage to the silicon wafer 420. On the other hand, when the pressure plate 310 presses the silicon wafer 420, it can provide a downward pressing force to the silicon wafer 420 to ensure the pressing effect on the silicon wafer 420.

[0293] In combination with the above embodiments, it can be seen that the EBL collaborative robot provided by the present solution can integrate the above-mentioned multi-axis robot arm 100, multiple robot claws 200, access components 500, height positioning components 600, basket transfer robot 700 and workbench 800, and realize the automation of multiple fine processes such as substrate (silicon wafer 420 and wafer 410) placement, transportation, fixation, height positioning, angle positioning, etc., while also being able to realize multiple heavy physical operations such as tray transfer, flower basket 510 handling and cover 532 opening, thereby saving the energy and physical strength of scientific researchers, reducing the risk of damage to expensive precision components on the equipment and reducing the psychological burden of staff, while improving the accuracy of the above operations.

[0294] The above are only preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to the examples, those skilled in the art can still modify the technical solutions recorded in the aforementioned examples or make equivalent substitutions for some of the technical features therein. However, any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. An EBL collaborative manipulator, characterized in that: include: A plurality of robot claws (200), at least two multi-axis robot arms (100), a flower basket transfer robot (700) and a workbench (800); The multi-axis mechanical arm (100) is arranged on the workbench (800), and a force sensor (110) and a switching end seat (120) arranged on the force sensor (110) are arranged at the first end of the multi-axis mechanical arm (100); The switching end seat (120) is used to be detachably connected to any one of the mechanical grippers (200); The multi-axis mechanical arm (100) is used to drive the mechanical gripper (200) to move in multiple axes; The workbench (800) is provided with a fixed workstation (810) and a flower basket workstation (820); The flower basket transfer robot (700) is used to carry the flower basket (510) so as to transfer the flower basket (510) from the storage area to the flower basket workstation (820); The plurality of mechanical grippers (200) include: a positioning gripper (210), a fastening gripper (220), a pulling gripper (230), a suction gripper (240), and a tray gripper (280); The pallet gripper (280) is used to transfer the first pallet (320) or the second pallet (340) on the flower basket (510) to the fixed workstation (810); A pressing piece (211) is provided on the positioning gripper (210), and a plurality of elastic pressing rods (212) are provided at the bottom of the pressing piece (211); The tightening claw (220) is provided with an electric operating member (221); The pulling claw (230) is provided with a pulling piece (231); The suction gripper (240) is used to suck the wafer (410); The EBL collaborative manipulator is used to perform a first collaborative operation and a second collaborative operation on the fixed workstation (810); In the first coordinated operation, one of the multi-axis robotic arms (100) is connected to the positioning claw (210) and moves the positioning claw (210) to the plurality of elastic pressure rods (212) to press and fix the pressure plate (310) on the first pallet (320), and another of the multi-axis robotic arms (100) is connected to the fastening claw (220) and moves the fastening claw (220) to the electric operating member (221) to abut against the fastening screw (330) on the pressure plate (310), so that the electric operating member (221) can drive the fastening screw (330) to rotate to adjust the tightness of the connection between the pressure plate (310) and the first pallet (320); In the second coordinated operation, one of the multi-axis robotic arms (100) is connected to the suction gripper (240) and moves the suction gripper (240) to suck the wafer (410) onto the second tray (340), and another of the multi-axis robotic arms (100) is connected to the pulling gripper (230) and moves the pulling gripper (230) to move the pressing sheet (350) on the second tray (340) to be pressed onto the wafer (410).

2. The EBL collaborative robot according to claim 1, characterized in that: The pressing member (211) is provided with an escape opening (214) penetrating in the vertical direction; The avoidance opening (214) is used for allowing the electric operating member (221) to pass through; The plurality of elastic pressure rods (212) are arranged on both sides of the avoidance opening (214).

3. The EBL collaborative robot according to claim 2, characterized in that: Guard plates (213) are provided on both sides of the pressing member (211); The two guard plates (213) are used to abut against two sides of the pressing plate (310); When the two guard plates (213) abut against two sides of the pressing plate (310), the positioning claw (210) moves, driving the pressing plate (310) to move synchronously; The plurality of elastic pressure rods (212) are arranged between the two guard plates (213).

4. The EBL collaborative robot according to claim 1, characterized in that: The plurality of mechanical grippers (200) further include: a pressing gripper (250); The pressing claw (250) is provided with a pressing block (251); The pressing claw (250) is used to, after being connected to the multi-axis robot arm (100), be driven by the multi-axis robot arm (100) to press the first tray (320) or the second tray (340) downwards through the pressing block (251) so as to cause the first tray (320) or the second tray (340) to sink.

5. The EBL collaborative robot according to claim 1, characterized in that: The plurality of mechanical grippers (200) further include: a clamping gripper (260); The clamping claw (260) comprises two openable and closable clamping plates (261); The clamping claw (260) is used to clamp the silicon wafer (420) through the two clamping plates (261) after being connected to the multi-axis mechanical arm (100) and driven by the multi-axis mechanical arm (100).

6. The EBL collaborative robot according to claim 1, characterized in that: The plurality of mechanical grippers (200) further include: a rotary gripper (270); The rotary dial claw (270) is provided with a sleeve rod (271); The rotary handle (270) is used to be driven by the multi-axis robotic arm (100) to be sleeved on the locking rod (360) of the first pallet (320) or the second pallet (340) after being connected to the multi-axis robotic arm (100), and to drive the locking rod (360) to rotate to lock or unlock the position of the first pallet (320) or the second pallet (340).

7. The EBL collaborative robot according to claim 1, characterized in that: Also includes: The pallet gripper (280) comprises two opening and closing grippers (281); The clamping claw (281) is a J-shaped claw; The pallet gripper (280) grips the first pallet (320) or the second pallet (340) via the two gripping claws (281).

8. The EBL collaborative robot according to claim 7, characterized in that: A plurality of storage cavities (511) are provided in the flower basket (510); The plurality of storage cavities (511) are arranged in sequence along the vertical direction; The side of the flower basket (510) is provided with an opening (512) communicating with the plurality of storage cavities (511); The first tray (320) or the second tray (340) is placed in the storage cavity (511).

9. The EBL collaborative robot according to claim 8, characterized in that: The plurality of mechanical grippers (200) further include: a push-pull gripper (2110); The push-pull gripper (2110) is used to, after being connected to the multi-axis robotic arm (100), be driven by the multi-axis robotic arm (100) to hook the first tray (320) or the second tray (340) located in the storage cavity (511), and then drive the first tray (320) or the second tray (340) to slide out of the opening (512), so that the tray gripper (280) can clamp the first tray (320) or the second tray (340).

10. The EBL collaborative robot according to claim 9, characterized in that: Also includes: Lifting platform (520); The lifting platform (520) comprises: a lifting cylinder (521) and a carrier (522); The carrier (522) is movably disposed on the workbench (800) and is located beside the flower basket station (820); The opening (512) of the flower basket (510) located on the flower basket station (820) faces the carrier (522); The output end of the lifting cylinder (521) is connected to the carrier (522) and is used to drive the carrier (522) to rise and fall so that the carrier (522) is flush with the storage cavity (511); The push-pull gripper (2110) is used to, after being connected to the multi-axis robot arm (100), be driven by the multi-axis robot arm (100) to pull the first tray (320) or the second tray (340) in the storage cavity (511) out to the carrier (522), or to push the first tray (320) or the second tray (340) on the carrier (522) into the storage cavity (511).

11. The EBL collaborative robot according to claim 1, characterized in that: The flower basket transfer robot (700) is connected to a flower basket extraction gripper (710); The flower basket extraction gripper (710) comprises two openable and closable latching plates (711); A lifting rod (513) is provided on the top of the flower basket (510); The flower basket extraction claw (710) is used to clamp the lifting rod (513) via the two clamping plates (711).

12. The EBL collaborative robot according to claim 11, characterized in that: Also includes: Flower basket storage table (530); A flower basket storage cavity (531) serving as a storage area for the flower basket (510) is provided inside the flower basket storage table (530); The flower basket storage table (530) is provided with an openable cover (532); The cover body (532) is used to control the opening and closing of the flower basket storage cavity (531).

13. The EBL collaborative robot according to claim 12, characterized in that: The locking plate (711) is provided with a first notch (712) and a second notch (713); The depth of the first notch (712) is greater than the depth of the second notch (713); The cover body (532) is provided with a connecting rod (533); The first notch (712) is used for the connecting rod (533) to be inserted into; The second notch (713) is used for the lifting rod (513) to be inserted into.

14. The EBL collaborative robot according to claim 1, characterized in that: A flower basket support (870) is provided on the workbench (800); The flower basket support (870) is provided with a strip groove (871) with an opening facing upwards; A positioning block (514) is provided on the side of the flower basket (510); The flower basket support (870) is used for receiving the flower basket (510); The strip groove (871) is used for the positioning block (514) to be inserted into, so as to limit the movement of the flower basket (510) in the horizontal direction.

15. The EBL collaborative robot according to claim 1, characterized in that: Also includes: Height Positioning Component (600); The height positioning component (600) is arranged on the workbench (800); The height positioning component (600) comprises: a positioning platform (610), a sliding fixture (620) and a height positioning sensor (630); The sliding jig (620) is arranged on the positioning platform (610) and is slidable between a positioning station and a placement station on the positioning platform (610); The height positioning sensor (630) is arranged on the positioning platform (610) and is located above the positioning station; The pallet gripper (280) is also used to, after being connected to the multi-axis robot arm (100), be driven by the multi-axis robot arm (100) to transfer the first pallet (320) or the second pallet (340) from the fixed station (810) to the sliding fixture (620) on the placement station; The sliding jig (620) is used to drive the first tray (320) or the second tray (340) to slide from the placement station to the positioning station; The height positioning sensor (630) is used to perform height positioning on the silicon wafer (420) on the first tray (320) or the wafer (410) on the second tray (340) to determine whether the height of the silicon wafer (420) or the wafer (410) meets a preset height requirement.

16. The EBL collaborative robot according to claim 15, characterized in that: The plurality of mechanical grippers (200) further include: a height adjustment gripper (290); The height adjustment gripper (290) is provided with a second electric operating member (291); A plurality of sample tables (370) are disposed on the first tray (320) or the second tray (340); A plurality of height adjustment knobs (380) for adjusting the height of the sample stage (370) are arranged around the sample stage (370); When the height positioning sensor (630) determines that the height of the silicon wafer (420) or the wafer (410) does not meet the preset height requirement, the height adjustment gripper (290) is used to be driven by the multi-axis robotic arm (100) to abut against the height adjustment knob (380) on the first tray (320) after being connected to the multi-axis robotic arm (100), so that the second electric operating member (291) can drive the height adjustment knob (380) to rotate until the height of the silicon wafer (420) or the wafer (410) meets the preset height requirement.

17. The EBL collaborative robot according to claim 16, characterized in that: Also includes: Light mirror operation assembly (900); The optical mirror operation assembly (900) comprises: an optical mirror transport manipulator (910) and an optical mirror operation manipulator (920); The optical microscope transfer robot (910) is used to transfer the first tray (320) or the second tray (340) after height positioning to the optical microscope operating table (930); The optical mirror operating table (930) is provided with a coarse adjustment knob (941) and a fine adjustment knob (942) connected to the optical mirror (940); The optical mirror operating manipulator (920) comprises: a knob sleeve (921) and a knob motor (922); The knob sleeve (921) is used to sleeve the coarse adjustment knob (941) or the fine adjustment knob (942); The knob motor (922) is drivingly connected to the knob sleeve (921) and is used to drive the knob sleeve (921) to rotate.

18. The EBL collaborative robot according to claim 17, characterized in that: The optical mirror operating manipulators (920) include two, which correspond to the coarse adjustment knob (941) and the fine adjustment knob (942) respectively.

19. The EBL collaborative robot according to claim 17, characterized in that: The optical mirror operating manipulator (920) further comprises: a Z-axis module (923), a Y-axis module (924) and an X-axis module (925); The Z-axis module (923) is vertically arranged on the optical microscope operating table (930); The Y-axis module (924) is movably arranged on the Z-axis module (923) along the Z-axis direction; The X-axis module (925) is movably arranged on the Y-axis module (924) along the Y-axis direction; The knob sleeve (921) and the knob motor (922) are movably arranged on the X-axis module (925) along the X-axis direction.

20. The EBL collaborative robot according to claim 17, characterized in that: A buffer layer (926) is provided on the inner periphery of the knob sleeve (921).

21. The EBL collaborative robot according to claim 20, characterized in that: The knob sleeve (921) is connected to the transmission wheel (928) via a spring (927); The transmission wheel (928) is in transmission connection with the knob motor (922).

22. The EBL collaborative robot according to claim 17, characterized in that: The optical mirror operation assembly (900) further comprises: an XY automatic adjustment platform (950); The XY automatic adjustment platform (950) is arranged on the optical microscope operating table (930) and is used for placing the sample rack (880); The XY automatic adjustment platform (950) is movably arranged along the X-axis and the Y-axis in the horizontal direction.

23. The EBL collaborative robot according to claim 22, characterized in that: The optical mirror operation assembly (900) further comprises: a tray docking assembly (960); The tray docking assembly (960) comprises: a docking platform support seat (961) and a docking platform (962); The docking platform (962) is movably arranged on the docking platform support seat (961) along the X-axis direction; The docking platform support seat (961) can be raised and lowered; The docking platform support seat (961) is arranged at the front end of the optical mirror operating table (930) along the X-axis direction, and is used to place the first tray (320) or the second tray (340) transferred by the optical mirror operating robot (920), and then transport the first tray (320) or the second tray (340) to the XY automatic adjustment platform (950).

24. The EBL collaborative robot according to claim 1, characterized in that: The electric operating member (221) is elastically connected to the fastening claw (220) along the vertical direction.

25. The EBL collaborative robot according to claim 1, characterized in that: The fastening gripper (220) is provided with a visual recognition component (222); The visual recognition component (222) is used to identify whether a silicon wafer (420) is placed on the first tray (320) and to identify whether a placement angle of the silicon wafer (420) meets a preset angle requirement.

26. The EBL collaborative robot according to claim 25, characterized in that: The plurality of mechanical grippers (200) further include: an angle adjustment gripper (2100); The angle adjustment gripper (2100) is provided with an angle rotating rod (2101); A plurality of sample tables (370) are disposed on the first tray (320) or the second tray (340); An angle adjustment knob (390) for adjusting the angle of the sample stage (370) is provided on the side of the sample stage (370); The side of the angle adjustment knob (390) is provided with an insertion hole (391); When the placement angle of the silicon wafer (420) does not meet the preset angle requirement, the angle adjustment gripper (2100) is used to, after being connected to the multi-axis robotic arm (100), be driven by the multi-axis robotic arm (100) to install the angle rotary rod (2101) into the insertion hole (391) and drive the angle adjustment knob (390) to rotate until the placement angle of the silicon wafer (420) meets the preset angle requirement.

27. The EBL collaborative robot according to claim 25, characterized in that: The visual recognition component (222) is also used to identify the flattening angle of the fastening screw (330), and use the flattening angle as the initial angle, and then identify whether the static angle of the electric operating member (221) before operation is the initial angle. If not, the controller controls the electric operating member (221) to rotate to the initial angle.

28. The EBL collaborative robot according to any one of claims 1 to 27, characterized in that: Each of the mechanical grippers (200) is connected to a quick connector (201); The quick connector (201) is used for detachable connection with the switching end seat (120).

29. The EBL collaborative robot according to claim 1, characterized in that: A plurality of sample tables (370) are arranged on the first tray (320); The sample stage (370) is provided with a step (371); The step (371) is used for abutting one side of the silicon wafer (420); The pressing plate (310) is used to abut against the other side of the silicon wafer (420).

30. The EBL collaborative robot according to claim 29, characterized in that: The side of the pressing plate (310) facing the step (371) is a normal downward inclined surface.

31. The EBL collaborative robot according to claim 29, characterized in that: The pressing plate (310) is provided with a strip-shaped hollow groove (311); The sample stage (370) is provided with a plurality of threaded holes (372); The fastening screw (330) passes through the strip-shaped hollow groove (311) and is threadedly connected to the threaded hole (372); When the fastening screw (330) is loosened, the pressing plate (310) is slidable relative to the fastening screw (330); When the fastening screw (330) is in a tightened state, the pressing plate (310) is pressed by the fastening screw (330) and fixed on the sample stage (370).

32. The EBL collaborative robot according to claim 29, characterized in that: The pressing sheet (350) is provided with a through hole (351); The end of the pulling piece (231) is in an inverted T shape, so that the pulling piece (231) can pass through the through hole (351) and be clamped with the pressing sheet (350).

33. The EBL collaborative robot according to claim 29, characterized in that: The workbench (800) is provided with a robot placement seat (830); The robot placement seat (830) is used for placing a plurality of robot grippers (200).

34. The EBL collaborative robot according to claim 29, characterized in that: The workbench (800) is provided with an XY moving platform (840) on the fixed workstation (810); The XY moving platform (840) is used for placing the first tray (320) or the second tray (340).

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