Filtering monitoring system for electronic material production

Abstract

The invention provides a filtering monitoring system for electronic material production, which is characterized in that a pressure and pressure difference control unit performs pressure control and pressure difference control on a filtering module according to pressure data acquired by each first pressure sensor; a filtering pressure time curve of a monitoring point and a filtering pressure difference time curve corresponding to each stage of filter can be generated according to the pressure data collected by each first pressure sensor and the calculated pressure difference data of each stage of filter; by analyzing the filtering pressure time curve, the filtering pressure difference time curve, the pressure data and the pressure difference data, the pressure difference change of each stage of filter in the filtering module can be intuitively observed without manually observing a pressure gauge and then calculating, so that abnormal conditions such as blockage and damage of the filter can be found in time, an early warning signal is sent in advance, and the working efficiency is improved. Operation and maintenance personnel can take measures in time, fault expansion is avoided, and stable operation of the system is guaranteed.

Description

Technical Field

[0001] The present application relates to the field of electronic manufacturing technology, and in particular to a filtering monitoring system for electronic material production. Background Art

[0002] In the highly sophisticated electronics manufacturing industry, the quality of key electronic materials such as photoresists and polishing fluids is directly related to the yield and performance stability of the product. These electronic materials have extremely strict requirements on particle size distribution, and any tiny particle contamination may cause serious quality problems or even production accidents. Therefore, the use of efficient and stable multi-stage filtration systems to accurately control the type and quantity of particles in the materials has become a standard practice in the industry.

[0003] At present, the industry generally adopts the "three-stage filtration" system, which aims to effectively remove impurities and particulate matter in materials through gradually refined filtration accuracy. However, this system has the following problems in practical application:

[0004] (1) Unpredictable blockage problems: Due to the slight differences between material batches and the instability of the supply chain, multi-stage filtration systems often encounter unpredictable blockages. This blockage will not only cause a sharp increase in the filter pressure difference, but may also cause an "unloading" event, that is, large particle contaminants penetrate the filter and enter the downstream material, or the pneumatic diaphragm pump is forced to shut down due to excessive back pressure, thereby interrupting the filtration process. This not only affects production efficiency, but also poses a potential threat to product quality.

[0005] (2) Differences in filtration accuracy and efficiency: Filters of different brands and models have differences in interception accuracy and efficiency. This difference may result in different filtrate qualities from the same filtration system under different conditions. In addition, differences in filter selection may also cause the filtration process to stop midway, further exacerbating production instability.

[0006] (3) Limitations of traditional monitoring methods: At present, most filtration systems still rely on pointer-type damping pressure gauges for pressure differential monitoring, which has obvious lag. Manual timed monitoring and recording methods are not only inefficient, but also difficult to capture sudden high pressure differential events. Once a problem occurs, it is often discovered and remedied "after the fact", making it difficult to achieve immediate response and prevention.

[0007] (4) Shortcomings in data collection and analysis: Data collection during the production process is an important basis for evaluating system operation status and optimizing process parameters. However, the current data collection method relies on manual records and judges whether the operation is normal based on one's own experience. In many cases, only two points of data are observed or recorded on site, the initial and final stages of system operation. The data volume is limited and lacks continuity, making it difficult to fully reflect the dynamic changes of the entire filtration process. When problems occur, due to the lack of detailed data support, it is difficult to accurately trace the time and cause of the problem. Summary of the invention

[0008] In view of the shortcomings of the prior art mentioned above, the purpose of the present application is to provide a filtration monitoring system for the production of electronic materials, which is used to solve the problems in the prior art that blockage phenomena cannot be predicted, the inefficiency caused by manual timed monitoring and recording, the difficulty in capturing sudden high-pressure difference events, and the limited amount of recorded data and lack of continuity, making it difficult to fully reflect the dynamic changes of the entire filtration process and to accurately trace the time and cause of the problem.

[0009] To achieve the above-mentioned purpose and other related purposes, the present application provides a filtration monitoring system for electronic material production, including: a filtration module, the filtration module includes a primary filter, a secondary filter and a tertiary filter, the primary filter, the secondary filter and the tertiary filter are sequentially connected to each other through pipelines; a pressure monitoring module, including four first pressure sensors, which are respectively arranged on the upstream pipeline of the primary filter and the primary filter, the secondary filter and the tertiary filter; an intelligent control module, the intelligent control module including a pressure differential control unit; the pressure differential control unit is respectively connected to each of the first pressure sensors for communication; the pressure differential control unit is used to control the first pressure sensors according to the pressure data collected by each of the first pressure sensors The filtering module performs pressure control and pressure difference control; the pressure control method includes: generating a filtration pressure time curve corresponding to each of the first pressure sensors according to the pressure data collected by each of the first pressure sensors, and comparing the pressure data with a preset pressure threshold to determine whether to issue a first type of alarm signal according to the comparison result; the pressure difference control method includes: calculating the pressure difference data of each level of filters according to the pressure data collected by each of the first pressure sensors; generating a filtration pressure difference time curve corresponding to each level of filters according to the pressure difference data of each level of filters; and comparing the pressure difference data of each level of filters with a preset pressure difference threshold to determine whether to issue a second type of alarm signal according to the comparison result.

[0010] As a more preferred manner, it further includes a driving module, which is connected to the filtering module and is used to drive the electronic material to be transmitted to the filtering module for filtering.

[0011] As a more preferred manner, it further includes a power source input module, which is connected to the driving module pipeline; a second pressure sensor is provided on the pipeline connecting the power source input module and the driving module, and the second pressure sensor is communicatively connected to the intelligent control module, and is used to collect the pressure data of the power source provided by the power source input module to the driving module, and send it to the intelligent control module; the intelligent control module controls the driving pressure of the driving module according to the preset driving pressure value and the pressure data of the power source.

[0012] As a more preferred manner, the intelligent control module also includes a driving pressure control unit, which is communicatively connected to the second pressure sensor; the driving pressure control unit is used to control the driving pressure of the driving module, and the manner includes: according to a preset driving pressure value and the pressure data of the power source, the driving pressure of the driving module is controlled by adjusting the pressure of the power source provided by the power source input module, so that the driving module drives the electronic material to be transmitted to the filtering module for filtering.

[0013] As a more preferred embodiment, the power source input module includes an air compressor or an air storage tank, which is used to provide compressed air as a power source for the driving module.

[0014] As a more preferred embodiment, the driving module includes a pneumatic pump.

[0015] As a more preferred embodiment, the filter module further comprises a fixed bracket, the primary filter, the secondary filter and the tertiary filter are all arranged on the fixed bracket, and movable wheels are arranged at the bottom of the fixed bracket.

[0016] As a more preferred manner, the intelligent control module is provided with a data transmission interface, through which the pressure data collected by each of the first pressure sensors, the pressure difference data of each level of filters and the pressure data of the power source are downloaded.

[0017] As a more preferred embodiment, the intelligent control module also includes a display unit, which is used to display process monitoring information of the filtration module, and the process monitoring information includes preset pressure thresholds and pressure data of each of the first pressure sensors, preset pressure difference thresholds and pressure difference data of each level of filters, preset driving pressure values, pressure data of the power source, filtration trend curve chart, product name, batch information, and filtration volume, or a combination of more.

[0018] As a more preferred method, the intelligent control module also includes a user management unit for recording and managing basic user information and equipment position identity, and performing user management operations; the user management operations include any one or more of the following operations: adding new users, editing user information, and assigning user authority operations.

[0019] As described above, the filtration monitoring system for electronic material production of the present application has the following beneficial effects: each of the first pressure sensors sends the collected pressure data to the pressure differential control unit, and the pressure differential data of the first-level filter, the second-level filter, and the third-level filter can be obtained after calculation, and the filtration pressure time curve of each monitoring point and the filtration pressure differential time curve corresponding to each level of filter are generated, and the pressure differential change of each level of filter in the filtration module can be observed intuitively without manually observing the pressure gauge and then calculating, and the data can be collected and processed in real time and accurately, which improves efficiency, avoids errors caused by human intervention, greatly improves the accuracy and real-time nature of the collected data, and can evaluate whether the current batch of filtration characteristics meets expectations based on the pressure data and the pressure differential data. The collected data includes the pressure data and the pressure differential data at each time point, and further analyzes the trend of the pressure and pressure differential changes, which can fully reflect the dynamic changes of the entire filtration process and provide a richer information basis for the operation and maintenance of the system. By analyzing the filtration pressure time curve, filtration pressure difference time curve, pressure data, and pressure difference data, the system can promptly detect abnormal conditions such as filter blockage and damage, and issue early warning signals, which helps operation and maintenance personnel take timely measures to avoid the expansion of faults and ensure the stable operation of the system. At the same time, historical data can also be used to diagnose the root cause of the fault, accurately trace the time and cause of the problem, and improve maintenance efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 Shown is a schematic diagram of the structure of a filtration monitoring system for electronic material production in one embodiment of the present application.

[0021] Figure 2 Shown is a schematic diagram of a filtration pressure-time curve of a filtration module in one embodiment of the present application.

[0022] Figure 3 Shown is a schematic diagram of a filtration pressure difference time curve of a filtration module in one embodiment of the present application.

[0023] Figure 4 Shown is a schematic diagram of an interface of process monitoring information displayed by a display unit in one embodiment of the present application.

[0024] Figure 5 Shown is a schematic diagram of the structure of a filtering module in one embodiment of the present application.

[0025] Figure 6Shown is a scene schematic diagram of a filtration monitoring system for electronic material production in one embodiment of the present application.

[0026] Figure 7 Shown is a schematic block diagram of an intelligent control module in one embodiment of the present application.

[0027] Component number description

[0028] 1 Filter module

[0029] 11. Primary filter

[0030] 12 Secondary filter

[0031] 13. Three-stage filter

[0032] 14 Fixing bracket

[0033] 141 Moving wheels

[0034] 142 Liquid collection tray

[0035] 15. Drain valve

[0036] 2. First pressure sensor

[0037] 3 Intelligent control module

[0038] 31 Pressure differential control unit

[0039] 32 Drive pressure control unit

[0040] 33 Display unit

[0041] 34 User Management Unit

[0042] 4 Driver Module

[0043] 5 Power source input module

[0044] 6 Second pressure sensor DETAILED DESCRIPTION

[0045] The following describes the embodiments of the present application through specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. The present application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0046] Before further describing the present invention in detail, the nouns and terms involved in the embodiments of the present invention are explained. The nouns and terms involved in the embodiments of the present invention are applicable to the following interpretations:

[0047] <1> Photoresist: A key material in semiconductor manufacturing, used to transfer the pattern on the mask to the silicon wafer, which is an important step in the integrated circuit manufacturing process.

[0048] <2> Polishing liquid: It is a chemical solution used for surface treatment. Through the combined action of chemistry and mechanics, it can achieve highly flattened and precise processing of the material surface.

[0049] The technical solution of the embodiment of the present application can be applied to the field of microelectronic chemical preparation and processing technology. In the process of microelectronic chemical preparation, in order to ensure the purity and particle size distribution of the material, the industry generally adopts a "three-stage filtration" system, which aims to effectively remove impurities and particulate matter in the material through the step-by-step refinement of the filtration accuracy. However, due to the slight differences between batches of materials and the instability of the supply chain, the multi-stage filtration system often encounters unpredictable blockage. Secondly, most filtration systems still rely on pointer-type damping pressure gauges for pressure difference monitoring, and this monitoring method has obvious lag. The manual timed monitoring and recording method is not only inefficient, but also difficult to capture sudden high pressure difference events. Once a problem occurs, it is often discovered and remedied "after the fact", and it is difficult to achieve immediate response and prevention. Finally, the current data collection method relies on manual recording and judges whether the operation is normal based on one's own experience. In many cases, only the data at two time points are observed or recorded on site, and the data records at the initial and end stages of the system operation are limited in data volume and lack continuity, which makes it difficult to fully reflect the dynamic changes of the entire filtration process. When a problem occurs, due to the lack of detailed data support, it is difficult to accurately trace the time and cause of the problem.

[0050] In order to solve the problems in the above-mentioned background technology, the present invention provides a filtration monitoring system for the production of electronic materials, aiming to solve the problems in the prior art that blockage phenomena cannot be predicted, the efficiency caused by manual timed monitoring and data recording, the difficulty in capturing sudden high-voltage difference events, and the limited amount of recorded data and lack of continuity, making it difficult to fully reflect the dynamic changes of the entire filtration process and to accurately trace the time and cause of the problem.

[0051] To facilitate understanding of the embodiments of the present application, first Figure 1 Detailed description. Figure 1 The schematic diagram of the structure of the filtration monitoring system for electronic material production in an embodiment of the present invention is shown. The filtration monitoring system for electronic material production includes:

[0052] The filter module 1 comprises a primary filter 11, a secondary filter 12 and a tertiary filter 13, wherein the primary filter 11, the secondary filter 12 and the tertiary filter 13 are sequentially connected to each other through pipelines.

[0053] The pressure monitoring module includes four first pressure sensors 2 , which are respectively arranged on the upstream pipeline of the primary filter 11 and on the primary filter 11 , the secondary filter 12 , and the tertiary filter 13 .

[0054] The intelligent control module 3 includes a pressure differential control unit 31; the pressure differential control unit 31 is respectively connected to communicate with each of the first pressure sensors 2; the pressure differential control unit 31 is used to perform pressure control and pressure differential control on the filter module 1 according to the pressure data collected by each of the first pressure sensors 2.

[0055] The pressure control method includes: generating a filtered pressure time curve corresponding to each of the first pressure sensors 2 according to the pressure data collected by each of the first pressure sensors 2, and comparing the pressure data with a preset pressure threshold to determine whether to issue a first type alarm signal based on the comparison result.

[0056] The pressure difference control method includes: calculating the pressure difference data of each filter level based on the pressure data collected by each first pressure sensor 2; generating the filtration pressure difference time curve corresponding to each filter level based on the pressure difference data of each filter level; and comparing the pressure difference data of each filter level with the preset pressure difference threshold value to determine whether to issue a second type alarm signal based on the comparison result.

[0057] In this embodiment, the traditional filtration system usually uses three pressure gauges to display the pressure between two levels. The three pressure gauges are installed on three filters respectively, and the pressure difference of two filters can only be calculated manually. However, the present application uses four first pressure sensors 2, which are installed on the upstream pipeline of the first filter 11 and the first filter 11, the second filter 12, and the third filter 13 respectively. Each of the first pressure sensors 2 sends the collected pressure data to the pressure differential control unit 31. After calculation, the pressure differential data of the first filter 11, the second filter 12, and the third filter 13 can be obtained, and the filtration pressure time curve of each monitoring point and the filtration pressure differential time curve corresponding to each level of filter are generated. The pressure differential changes of each level of filter in the filtration module 1 can be observed intuitively without manually observing the pressure gauge and then calculating. The data can be collected and processed in real time and accurately, which improves efficiency, avoids errors caused by human intervention, greatly improves the accuracy and real-time performance of the collected data, and can evaluate whether the current batch filtration characteristics meet expectations based on the pressure data and the pressure differential data. The collected data includes pressure data and differential pressure data at each time point, and further analyzes the trend of pressure and differential pressure changes, which can fully reflect the dynamic changes of the entire filtration process and provide a richer information basis for the operation and maintenance of the system. Through the analysis of the filtration pressure time curve, the filtration differential pressure time curve, and the pressure data and differential pressure data, the system can promptly detect abnormal conditions such as filter blockage and damage, and issue early warning signals, which helps operation and maintenance personnel take timely measures to avoid the expansion of faults and ensure the stable operation of the system. At the same time, historical data can also be used to diagnose the root cause of the fault, accurately trace the time and cause of the problem, and improve maintenance efficiency.

[0058] In this embodiment, the intelligent control module 3 also includes a display unit 33, which is used to display process monitoring information of the filtration module. The process monitoring information includes preset pressure thresholds and pressure data of each of the first pressure sensors 2, preset pressure difference thresholds and pressure difference data of each level of filters, preset driving pressure values, pressure data of the power source, filtration trend curve chart, product name, batch information, and filtration volume, or a combination of more.

[0059] In this embodiment, if Figure 2 As shown in FIG. 1 , a schematic diagram of the filtration pressure-time curve of the filtration module in an embodiment of the present invention is shown. Figure 3 As shown, a schematic diagram of the filtration pressure difference time curve of the filtration module in an embodiment of the present invention is shown. Figure 2-3The displayed curve graph is only one embodiment of the present invention, which is mainly used for explanation and description, rather than for limiting the scope of protection of the present invention. In actual application, the filtering trend curve graph has different forms. According to the filtering pressure time curve and the filtering pressure difference time curve, the change of the internal pressure or pressure difference of the filtering module can be intuitively reflected, so as to timely discover the abnormal conditions of the filtering module, such as blockage, leakage, etc., so as to avoid adverse effects on production. According to the changing trend and law of the curve, the maintenance cycle and replacement time of the filtering module can be predicted, preventive maintenance can be achieved, and downtime and maintenance costs caused by sudden failures can be reduced. By analyzing the curve data, the performance of the filtering module under different working conditions can be understood, so as to optimize the operating parameters, such as adjusting the filtering flow, pressure, etc., to improve the filtering efficiency and extend the service life.

[0060] In this embodiment, the intelligent control module 3 also includes a buzzer, which is electrically connected to the pressure differential control unit 31. When the pressure data collected by the first pressure sensor 2 exceeds the preset pressure threshold, the pressure differential control unit 31 controls the buzzer to send a first type of alarm signal. The display unit displays the connecting pipe in the filter module 1 in red. By observing the pressure data of each of the first pressure sensors 2 displayed on the display unit, it is intuitively determined which part of the pipeline has abnormal pressure, so that the staff can handle the abnormality in time.

[0061] In this embodiment, when the pressure difference data of each level of filters exceeds the preset pressure difference threshold, the pressure difference control unit 31 controls the buzzer to send out a second type of alarm signal, and the display unit displays the connecting pipe in the filter module 1 in red. By observing the pressure difference data of each level of filters displayed on the display unit, it is intuitively determined which level of filter has an abnormal pressure difference phenomenon, so that the staff can handle the abnormality in time.

[0062] In this embodiment, a driving module 4 is further included, and the driving module 4 is connected to the filtering module 1 and is used to drive the electronic material to be transmitted to the filtering module 1 for filtering. The driving module 4 includes a pneumatic pump.

[0063] In this embodiment, it also includes a power source input module 5, which is connected to the driving module 4 through a pipeline; a second pressure sensor 6 is provided on the pipeline connecting the power source input module 5 and the driving module 4, and the second pressure sensor 6 is communicatively connected to the intelligent control module 3, and is used to collect the pressure data of the power source provided by the power source input module 5 to the driving module 4, and send it to the intelligent control module 3; the intelligent control module 3 controls the driving pressure of the driving module 4 according to the preset driving pressure value and the pressure data of the power source.

[0064] In this embodiment, the intelligent control module 3 also includes a driving pressure control unit 32, and the driving pressure control unit 32 is communicatively connected to the second pressure sensor 6; the driving pressure control unit 32 is used to control the driving pressure of the driving module 4, and the method includes: according to the preset driving pressure value and the pressure data of the power source, by adjusting the pressure of the power source provided by the power source input module 5 to control the driving pressure of the driving module 4, so that the driving module 4 drives the electronic material to be transmitted to the filtering module 1 for filtering.

[0065] In this embodiment, the power source input module 5 includes an air compressor or an air storage tank, which is used to provide compressed air as a power source for the driving module 4 .

[0066] In this embodiment, the power source input module 5 provides a power source for the driving module 4, so that the driving module 4 drives the electronic material to be transmitted to the filtering module 1 for filtering. The second pressure sensor 6 monitors the pressure data of the power source output by the power source input module 5 in real time, and the driving pressure control unit 32 controls the driving pressure of the driving module 4 by controlling the pressure data of the power source output by the power source input module 5. Taking the example that the power source input module 5 adopts an air compressor and the driving module 4 adopts a pneumatic pump, the driving pressure control unit 32 controls the air compressor to deliver compressed air to the pneumatic pump, and the compressed air serves as the power source of the pneumatic pump. According to the preset driving pressure value, the driving pressure control unit 32 controls the speed of the pneumatic pump by controlling the pressure of the compressed air output by the air compressor, thereby achieving control of the driving pressure.

[0067] In this embodiment, the driving pressure control unit 32 is used to control the driving pressure of the driving module 4, and the method also includes: comparing the pressure data of the power source with the preset driving pressure alarm threshold, so as to determine whether to issue a third type of alarm signal according to the comparison result. When the pressure of the power source provided by the power source input module 5 to the driving module 4 is too large and exceeds the preset driving pressure alarm threshold, the driving pressure control unit 32 controls the buzzer to issue a third type of alarm signal, and according to the preset decompression coefficient and downward gradient, reduces the driving pressure of the driving module 4 by controlling the pressure of the power source provided by the power source input module 5, so as to avoid overpressure, which may cause the filter to penetrate and contaminate the downstream fluid.

[0068] In this embodiment, if Figure 4As shown, a schematic diagram of the interface of the process monitoring information displayed on the display unit in an embodiment of the present invention is shown. Wherein P1-H represents the preset upper limit pressure threshold of the first pressure sensor 2 located in the upstream pipeline of the first-stage filter 11. When the first pressure sensor 2 at this position detects that the pressure value of the pipeline reaches this preset upper limit pressure threshold, the pressure differential control unit 31 controls the buzzer to send out a first type of alarm signal and displays the reason on the display unit. The alarm sound can be turned off by sliding the mute key on the display unit, but the prompt on the display unit will not disappear. This warning can only be reset when the problem of overpressure is actually solved during the operation (such as reducing the filtration flow rate).

[0069] In this embodiment, P1-HH represents the preset limit pressure threshold of the first pressure sensor 2 located in the upstream pipeline of the first-stage filter 11. When the first pressure sensor 2 at this position detects that the pressure value of the pipeline reaches this preset limit pressure threshold, the pressure differential control unit 31 not only controls the buzzer to send out the first type of alarm signal, but also controls the monitoring system to shut down to avoid safety accidents. P2-H and P2-HH respectively represent the preset upper limit pressure threshold and the preset limit pressure threshold of the first pressure sensor 2 located on the first-stage filter 11. P3-H and P3-HH respectively represent the preset upper limit pressure threshold and the preset limit pressure threshold of the first pressure sensor 2 located on the second-stage filter 12. P4-H and P4-HH respectively represent the preset upper limit pressure threshold and the preset limit pressure threshold of the first pressure sensor 2 located on the third-stage filter 13. The control principle is similar to the above and will not be repeated here.

[0070] In this embodiment, the pressure difference -H represents the preset pressure difference threshold between two adjacent filter stages. When the pressure difference data between any two filter stages reaches the preset pressure difference threshold, the pressure difference control unit 31 controls the buzzer to send out a second type of alarm signal and displays the reason on the display unit.

[0071] In this embodiment, air source-L represents the minimum pressure of the power source required by the driving module. If the pressure of the power source is lower than this value, an alarm will be generated.

[0072] In this embodiment, if during the filtering process, the pressure of the power source provided by the power source input module 5 to the driving module 4 is too high and an alarm is issued, the driving pressure control unit 32 can trigger the gradient decompression once per second by presetting the decompression coefficient and the downward gradient when the system operating pressure is higher than the "driving pressure x decompression coefficient", thereby realizing the automatic pressure reduction function. Exemplarily, the upper limit of the pressure triggered by P1-H is 2bar, the driving pressure of the pneumatic pump is set to 5Bar, the decompression coefficient is 0.9, and the downward gradient is 0.01bar. When the "automatic pressure reduction mode" is turned on during the filtering process, when the P1 pressure upstream of the first-stage filter reaches ≥2*0.9=1.8bar, the system automatically reduces the driving pressure of the pneumatic pump by 0.01bar, reducing it to 5-0.01=4.99bar. If this condition still exists in the next second, the driving pressure of the pneumatic pump will be reduced by another 0.01 bar to 4.99-0.01=4.98 bar, until the pressure of P1 no longer continuously triggers the set high pressure warning line, so as to avoid alarm or system termination caused by excessive pressure.

[0073] In this embodiment, if Figure 5 As shown, it is a schematic diagram of the structure of the filter module in the embodiment of the present invention. The filter module 1 also includes a fixed bracket 14, and the primary filter 11, the secondary filter 12 and the tertiary filter 13 are all arranged on the fixed bracket 14. The bottom of the fixed bracket 14 is provided with moving wheels 141, which facilitates the movement of the filter module 1, and the movement can be achieved without disassembling the components on the filter module (such as the pneumatic pump, the filter, the pipeline, the pressure sensor).

[0074] In this embodiment, if Figure 5 As shown, the primary filter 11, the secondary filter 12 and the tertiary filter 13 are all provided with a drain valve 15. The primary filter 11 is used for coarse filtration of the electronic material liquid, the secondary filter 12 is used for fine filtration of the electronic material liquid, and the tertiary filter 13 is used for fine filtration of the electronic material liquid. The drain valve 15 is used to discharge the filtered impurities or waste liquid. A liquid receiving tray 142 is also provided at the bottom of the fixed bracket 14. The impurities or waste liquid filtered by the filters at each level are discharged into the liquid receiving tray 142 through the drain valve 15, and then collected through the output pipe on the liquid receiving tray 142 to avoid pollution.

[0075] In this embodiment, the inlet and outlet of the upstream pipeline and the downstream pipeline of the filter module are maintained at the same level, the pipeline is simple and clear, and the connection of each component is completed at one time through a customized joint, reducing the risk of leakage and pressure loss.

[0076] In this embodiment, if Figure 6As shown, a scene schematic diagram of a filtration monitoring system for electronic material production in an embodiment of the present invention is shown. The intelligent control module is also provided with movable wheels for easy movement. The pressure monitoring module is connected to the intelligent control module via a quick-connect cable, which can be conveniently moved to the point of use by the customer.

[0077] In this embodiment, a data transmission interface is provided on the intelligent control module, through which the pressure data collected by each of the first pressure sensors, the pressure difference data of each level of filters and the pressure data of the power source are downloaded. At the same time, the system supports screenshots and can also provide screenshot pictures.

[0078] In this embodiment, if Figure 7 As shown, it is a schematic block diagram of the intelligent control module in an embodiment of the present invention. The intelligent control module also includes a user management unit 34, which is used to record and manage basic user information and equipment position identity, and perform user management operations; the user management operations include any one or more of the following operations: adding a new user, editing user information, and assigning user permissions. By assigning permissions to users, production operators cannot change settings at will, avoiding illegal operations.

[0079] In this embodiment, the upstream pipeline of the filtration module 1 is connected to a stirring tank, and the downstream pipeline is connected to a storage tank. The stirring tank is used to stir the electronic material liquid, and the stirred electronic material liquid is transported to the filtration module 1 for filtration, and the filtered electronic material liquid is transported to the storage tank for storage and standby. A flow meter is provided on the pipeline connecting the storage tank and the filtration module 1 to monitor the filtration volume.

[0080] In the embodiments of the present application, words such as "first" and "second" are used to distinguish the same or similar items with substantially the same functions and effects. For example, the first pressure sensor and the second pressure sensor are only used to distinguish different pressure sensors, and their order is not limited. Those skilled in the art can understand that words such as "first" and "second" do not limit the quantity and execution order, and words such as "first" and "second" do not necessarily limit them to be different.

[0081] It should be noted that in the embodiments of the present application, words such as "exemplary" or "for example" represent examples, illustrations or descriptions. Any embodiment or design described as "exemplary" or "for example" in the present application should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of words such as "exemplary" or "for example" is intended to present related concepts in a specific way.

[0082] In the embodiments of the present application, "at least one" refers to one or more, and "plurality" refers to two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone, where A and B can be singular or plural. The character " / " generally indicates that the previous and next associated objects are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b or c can represent: a, b, c, ab, ac, bc or abc, where a, b, c can be single or multiple.

[0083] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application. Therefore, the protection scope of the present application should be based on the protection scope of the claims.

[0084] In summary, the present application provides a filtration monitoring system for electronic material production, using four first pressure sensors 2, which are respectively installed on the upstream pipeline of the first filter 11 and the first filter 11, the second filter 12, and the third filter 13. Each of the first pressure sensors 2 sends the collected pressure data to the pressure differential control unit 31, and the pressure differential data of the first filter 11, the second filter 12, and the third filter 13 can be obtained after calculation, and the filtration pressure time curve of each monitoring point and the filtration pressure differential time curve corresponding to each level of filter are generated. The pressure differential changes of filters at all levels in the filtration module 1 can be observed intuitively without manually observing the pressure gauge and then calculating. Data can be collected and processed in real time and accurately, which improves efficiency, avoids errors caused by human intervention, greatly improves the accuracy and real-time performance of the collected data, and can evaluate whether the current batch filtration characteristics meet expectations based on pressure data and pressure differential data. The collected data includes pressure data and pressure differential data at each time point, and further analyzes the trend of pressure and pressure differential changes, which can fully reflect the dynamic changes of the entire filtration process and provide a richer information basis for the operation and maintenance of the system. By analyzing the filtration pressure time curve, filtration pressure difference time curve, pressure data, and pressure difference data, the system can promptly detect abnormal conditions such as filter blockage and damage, and issue early warning signals, which helps operation and maintenance personnel take timely measures to avoid the expansion of faults and ensure the stable operation of the system. At the same time, historical data can also be used to diagnose the root cause of the fault, accurately trace the time and cause of the problem, and improve maintenance efficiency. Therefore, this application effectively overcomes the various shortcomings of the prior art and has a high industrial utilization value.

[0085] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A filtration monitoring system for electronic material production, characterized in that: include: A filter module, wherein the filter module comprises a primary filter, a secondary filter and a tertiary filter, wherein the primary filter, the secondary filter and the tertiary filter are sequentially connected to each other through pipelines; The pressure monitoring module includes four first pressure sensors, which are respectively arranged on the upstream pipeline of the primary filter and the primary filter, the secondary filter, and the tertiary filter; An intelligent control module, the intelligent control module comprising a pressure differential control unit; the pressure differential control unit is respectively connected to each of the first pressure sensors for communication; the pressure differential control unit is used to perform pressure control and pressure differential control on the filter module according to the pressure data collected by each of the first pressure sensors; The pressure control method includes: generating a filtered pressure time curve corresponding to each of the first pressure sensors according to the pressure data collected by each of the first pressure sensors, and comparing the pressure data with a preset pressure threshold to determine whether to issue a first type alarm signal according to the comparison result; The pressure difference control method includes: calculating the pressure difference data of each level of filters based on the pressure data collected by each of the first pressure sensors; generating the filtration pressure difference time curve corresponding to each level of filters based on the pressure difference data of each level of filters; and comparing the pressure difference data of each level of filters with the preset pressure difference threshold value to determine whether to issue a second type of alarm signal based on the comparison result.

2. The filtration monitoring system for electronic material production according to claim 1, characterized in that: It also includes a driving module, which is connected to the filtering module and is used to drive the electronic material to be transmitted to the filtering module for filtering.

3. The filtration monitoring system for electronic material production according to claim 2, characterized in that: It also includes a power source input module, which is connected to the driving module pipeline; a second pressure sensor is provided on the pipeline connecting the power source input module and the driving module, and the second pressure sensor is communicatively connected to the intelligent control module for collecting the pressure data of the power source provided by the power source input module to the driving module, and sending it to the intelligent control module; the intelligent control module controls the driving pressure of the driving module according to the preset driving pressure value and the pressure data of the power source.

4. The filtration monitoring system for electronic material production according to claim 3, characterized in that: The intelligent control module also includes a driving pressure control unit, which is communicatively connected to the second pressure sensor; the driving pressure control unit is used to control the driving pressure of the driving module, and the method includes: according to a preset driving pressure value and the pressure data of the power source, the driving pressure of the driving module is controlled by adjusting the pressure of the power source provided by the power source input module, so that the driving module drives the electronic material to be transmitted to the filtering module for filtering.

5. The filtering monitoring system for electronic material production according to claim 3, characterized in that: The power source input module includes an air compressor or an air storage tank, which is used to provide compressed air as a power source for the driving module.

6. The filtration monitoring system for electronic material production according to claim 2, characterized in that: The drive module includes a pneumatic pump.

7. The filtration monitoring system for electronic material production according to claim 1, characterized in that: The filter module further comprises a fixed bracket, the primary filter, the secondary filter and the tertiary filter are all arranged on the fixed bracket, and movable wheels are arranged at the bottom of the fixed bracket.

8. The filtering monitoring system for electronic material production according to claim 3, characterized in that: The intelligent control module is provided with a data transmission interface, through which the pressure data collected by each of the first pressure sensors, the pressure difference data of each level of filters and the pressure data of the power source are downloaded.

9. The filtering monitoring system for electronic material production according to claim 3, characterized in that: The intelligent control module also includes a display unit, which is used to display process monitoring information of the filtration module, wherein the process monitoring information includes preset pressure thresholds and pressure data of each of the first pressure sensors, preset pressure difference thresholds and pressure difference data of each level of filters, preset driving pressure values, pressure data of the power source, filtration trend curve graph, product name, batch information, and filtration volume, or a combination of more.

10. The filtration monitoring system for electronic material production according to claim 1, characterized in that: The intelligent control module also includes a user management unit for recording and managing basic user information and device position identity, and performing user management operations; the user management operations include any one or more of the following operations: adding a new user, editing user information, and assigning user authority operations.

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