Continuous coating equipment and coating method

Abstract

The invention discloses continuous coating equipment and a coating method, belongs to the technical field of coating, and solves the problem of inconsistent distribution of coating materials due to non-uniform temperature distribution of a heating source when the heating source of the existing equipment performs thermal radiation evaporation on the coating materials, the equipment comprises an equipment main body, a continuous coating mechanism and a base material placing mechanism, the equipment main body comprises an equipment base, a coating chamber, an access door body and a lofting door body; the continuous coating mechanism comprises a target material assembly, a heating disc group and an auxiliary coating assembly; the device is provided with the auxiliary film coating assembly, the auxiliary film coating assembly is composed of the auxiliary motor and the synchronous linkage part, the technical means that the rotating tubular target material and the reciprocating heating disc set cooperate with each other is adopted, stable shearing force is formed on the released film coating material, and therefore the film coating material evaporated on the base material can be evenly dispersed on the surface of the base material; and therefore, a tight film layer is formed by combining with the base material, and the coating quality of the base material is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of film coating, and in particular relates to a continuous film coating device and a film coating method. Background Art

[0002] Coating refers to the deposition of one or more layers of materials with specific functions on the surface of a substrate to improve its physical, chemical or mechanical properties. According to different deposition methods, coating processes can be divided into physical vapor deposition (PVD), chemical vapor deposition (CVD), electroplating, solution deposition and spraying.

[0003] The basic principle of vacuum coating equipment is to use physical means to heat the surface of the target material (material to be plated) in a high vacuum environment or use electron bombardment to sputter it out in the form of atomic groups or ions, and settle on the surface of the substrate (i.e., substrate), forming a thin film through the film-forming process.

[0004] Chinese patent CN117660896A discloses an evaporation device and vacuum coating equipment, wherein the evaporation device includes a heating source, an evaporation tank and a heat insulation structure, wherein the heating source is arranged in the evaporation tank and opposite to the notch of the evaporation tank; the heat insulation structure includes a cooling shield arranged on the notch side of the heating source facing the evaporation tank, and a medium flow channel is provided on the cooling shield for the cooling medium to enter from one end and flow out from the other end. In addition, the vacuum coating equipment also includes coating rollers arranged in pairs with the evaporation notch, and the paired coating rollers are eccentrically arranged at the notch of the evaporation tank, and the film material bypasses the two coating rollers in turn; however, when the heating source of the existing equipment performs thermal radiation evaporation on the coating material, the uneven temperature distribution of the heating source causes inconsistent distribution of the coating material, and also causes excessive consumption of local coating material / target material, which is not conducive to the requirements of continuous coating operation. In the long run, the quality of the coating product is poor. In view of the above problems, we propose a continuous coating device and a coating method. Summary of the invention

[0005] The purpose of the present invention is to address the deficiencies in the prior art and provide a continuous coating device and a coating method, which solves the problem that when the heating source of the prior equipment performs thermal radiation evaporation on the coating material, the temperature distribution of the heating source is uneven, resulting in inconsistent distribution of the coating material, and also causes excessive consumption of local coating material / target material, which is not conducive to the requirements of continuous coating operations.

[0006] The present invention is implemented as follows: a continuous coating device, the continuous coating device comprising:

[0007] The equipment body includes an equipment base, a coating chamber, an inspection door, and a layout door. The coating chamber is fixedly mounted on the equipment base, and the inspection door and the layout door are rotatably mounted on both sides of the coating chamber;

[0008] A continuous coating mechanism, which is disposed in the coating chamber and is used for continuously coating the substrate;

[0009] A substrate placing mechanism corresponding to the continuous coating mechanism is provided, wherein the substrate placing mechanism is provided on the layout door body, and the substrate layout mechanism is used to support the coating substrate and assist in the continuous coating operation on both sides of the substrate;

[0010] Wherein, the continuous coating mechanism comprises:

[0011] A target assembly, the target assembly is arranged in the coating chamber, the target assembly is used to provide coating evaporation material, and the target assembly includes at least one group of hollow tubular targets;

[0012] A heating plate assembly, the heating plate assembly is used to evaporate and heat the target assembly;

[0013] An auxiliary coating assembly, the auxiliary coating assembly is arranged in the coating chamber, and is used to synchronously drive the target assembly and the heating plate assembly to assist the target assembly and the heating plate assembly in coating the substrate;

[0014] Among them, the auxiliary coating component includes a component support bracket, an auxiliary motor, and a synchronous linkage part. The component support bracket is fixedly mounted on the side wall of the coating chamber, and the auxiliary motor is fixedly mounted on the component support bracket. The driving shaft of the auxiliary motor is fixedly connected with the synchronous linkage part, and the synchronous linkage part is respectively connected to the heating disk group and the tubular target material. The synchronous linkage part is used to drive the tubular target material to rotate and adjust the position of the heating disk group within a variable range.

[0015] Preferably, the synchronous linkage unit includes:

[0016] A linkage swing arm, one end of which is fixedly connected to the driving shaft of the auxiliary motor, and the other end of which is detachably fixedly connected to a linkage hinge block;

[0017] A swing hinge seat is slidably sleeved on the outside of the linkage hinge block, and one end of the swing hinge seat is rotatably connected to the component support bracket;

[0018] An arc-shaped rack fixedly connected to the other end of the swing hinge seat;

[0019] A first gear, which is disposed on one side of the arc-shaped rack and is meshed with the arc-shaped rack for transmission;

[0020] A second gear, the second gear is arranged at the lower side of the first gear, the first gear and the second gear are fixedly connected via a gear connecting shaft, and the gear connecting shaft is also rotatably connected to the component support bracket;

[0021] The first tooth seat is arranged on the outer side of the second gear, and the first tooth seat and the second gear are meshed and transmitted, the first tooth seat is slidably connected to the component support bracket, and the first tooth seat is also fixedly connected to the heating plate group.

[0022] Preferably, the synchronous linkage unit further includes:

[0023] At least one set of third gears, the third gears are arranged on the inner side of the first gears, the third gears are meshed with the first gears for transmission, and the third gears are also rotatably connected to the component support bracket, and a target material adapting part is fixedly connected below the third gears, and the target material adapting part is used to adapt to and fix tubular targets of different specifications;

[0024] Wherein, the target material adaptation part comprises:

[0025] A supporting linkage shaft, wherein the supporting linkage shaft is fixedly mounted on the third gear;

[0026] An adaptive linkage disk fixedly mounted on the end of the supporting linkage shaft, wherein at least one set of adaptive limit grooves is provided in the adaptive linkage disk;

[0027] An adaptive tube support rod slidably mounted on the adaptive limiting groove, the adaptive tube support rod being used to support tubular targets of different specifications;

[0028] An adjusting threaded sleeve, the adjusting threaded sleeve being rotatably mounted in the adaptive linkage disk;

[0029] An external threaded sleeve penetrating the inner cavity of the adjusting threaded sleeve, the external threaded sleeve being slidably sleeved on the outer wall of the supporting linkage shaft, and the outer wall of the external threaded sleeve being threadedly connected with the inner wall of the adjusting threaded sleeve;

[0030] At least one set of adaptive hinged rods, wherein the adaptive hinged rods are arranged between the external thread sleeve and the adaptive limiting groove, one end of the adaptive hinged rods is rotatably connected to the external thread sleeve, and the other end of the adaptive hinged rods is hinged to the adaptive support pipe rod;

[0031] At least one set of sleeve locking grooves is provided, wherein the sleeve locking grooves are arranged on the outer wall of the adjusting threaded sleeve, and sleeve locking pins for cooperating with the sleeve locking grooves are installed on the adaptive linkage disk.

[0032] Preferably, the heating plate assembly comprises:

[0033] A disc assembly mounting seat, wherein the disc assembly mounting seat is detachably connected to the first gear seat;

[0034] An electric heating plate disposed on one side of the plate mounting seat, the electric heating plate being rotatably mounted on the plate assembly mounting seat;

[0035] At least one group of heating resistance wires, the heating resistance wires are circumferentially arranged in the electric heating disk, and the heating resistance wires are used to heat and evaporate the tubular target material;

[0036] A heating rotating shaft, the heating rotating shaft is fixedly mounted on the electric heating plate, and one end of the heating rotating shaft away from the electric heating plate passes through the plate assembly mounting seat and is fixedly connected to the fourth gear;

[0037] The second gear seat is fixedly mounted on the component support frame, and the second gear seat is meshed with the fourth gear for transmission.

[0038] Preferably, the substrate placement mechanism comprises:

[0039] A driving motor, wherein the driving motor is fixedly mounted on the lofting door body;

[0040] A drive connecting shaft fixedly connected to the output end of the drive motor, wherein one end of the drive connecting shaft away from the drive motor is fixedly connected to a substrate supporting ring;

[0041] At least one set of substrate fixing components, wherein the substrate fixing components are used to fix substrates of different specifications;

[0042] A continuous turning portion is arranged in the substrate supporting ring and is used to connect the driving connecting shaft and the substrate fixing assembly.

[0043] Preferably, the continuous turning portion comprises:

[0044] A fifth gear, the fifth gear being fixedly mounted on the lofting door body;

[0045] At least one set of flip connection shafts, one end of each flip connection shaft is rotatably connected to the end of the driving connection shaft, and the other end of each flip connection shaft is connected to the substrate fixing assembly;

[0046] A sixth gear is fixedly sleeved on the flip connection shaft, and the sixth gear is meshed with the fifth gear for transmission.

[0047] Preferably, the substrate fixing assembly comprises:

[0048] A fixed limiting ring, the fixed limiting ring is fixedly connected to the end of the flip connection shaft, the fixed limiting ring is also rotatably connected to the inner wall of the substrate supporting ring, and at least one set of ring limiting grooves is opened in the fixed limiting ring;

[0049] A rotating swing rod rotatably mounted in the ring limiting groove, wherein the end of the rotating swing rod is detachably connected to a substrate fixing roller;

[0050] A seventh gear, the seventh gear is rotatably mounted on the side wall of the fixed limiting ring, and the seventh gear is fixedly connected to the rotating swing rod;

[0051] The adjusting gear ring is rotatably sleeved in the gear ring limiting seat, the adjusting gear ring is meshed with the seventh gear for transmission, and an auxiliary shifting seat is fixedly installed on one side of the adjusting gear ring.

[0052] The present invention also provides a continuous coating method, which comprises:

[0053] Step S10, when loading the substrate, pull the layout door body, and then manually rotate the auxiliary toggle seat, the auxiliary toggle seat drives the adjusting ring gear to rotate, so that the adjusting ring gear drives the seventh gear to rotate, and the seventh gear drives the rotating rocker arm and the substrate fixing roller to rotate, thereby realizing the clamping and fixing of substrates of different specifications. After the layout is completed, close the layout door body.

[0054] Step S20, turn on the drive motor. The start of the drive motor can drive the drive connecting shaft to rotate. The drive connecting shaft drives the substrate supporting ring, the fixed limiting ring, and the substrate fixing roller to rotate. When the fixed limiting ring rotates, the fifth gear acts on the sixth gear, so that the sixth gear drives the rotating rocker and the substrate fixing roller to flip, thereby realizing the continuous synchronous operation of driving the substrate to rotate and flip.

[0055] Step S30, when it is necessary to replace or fix tubular targets of different specifications, place the tubular target in the coating chamber and sleeve it on the outer surface of the spiral guide tube, then manually rotate the adjusting threaded sleeve, the adjusting threaded sleeve drives the external threaded sleeve to move up and down, so that the external threaded sleeve drives the adaptive hinged rod to swing, and the adaptive hinged rod can synchronously push the adaptive support rod to move along the adaptive limit groove, so that the adaptive support rod locks the inner wall of the tubular target.

[0056] Step S40, when the tubular target is updated, the auxiliary motor is turned on. The auxiliary motor can drive the linkage swing arm to rotate, the linkage swing arm drives the linkage hinge block to rotate, the linkage hinge block drives the arc rack to swing back and forth, and then the arc rack drives the first gear to rotate forward and reverse, the first gear drives the third gear to rotate, and the third gear drives the support linkage shaft, the adaptive linkage disk and the tubular target to rotate.

[0057] In step S50, the rotation of the first gear can drive the rotation of the second gear, so that the second gear drives the first gear seat and the disk group mounting seat to move, and the disk group mounting seat drives the electric heating disk and the heating resistance wire to move, so as to adjust the radiation range of the heat source. When the electric heating disk and the heating resistance wire move, the second gear seat acts on the fourth gear, thereby driving the fourth gear, the heating rotating shaft, the electric heating disk, and the heating resistance wire to rotate, so that the evaporated coating material can be sheared by turbulence when the electric heating disk rotates, thereby further avoiding the coating material from being adsorbed on a local position of the substrate.

[0058] Compared with the prior art, the embodiments of the present application have the following beneficial effects:

[0059] In an embodiment of the present invention, an auxiliary coating component is provided, which is composed of an auxiliary motor and a synchronous linkage part. The synchronous linkage part can synchronously start the tubular target and the heating disk group, and adopts technical means of coordinated cooperation of the rotating tubular target and the reciprocating heating disk group to form a stable shear force on the released coating material, so that the coating material evaporated from the substrate can be evenly dispersed on the surface of the substrate, thereby combining with the substrate to form a tight film layer, thereby improving the coating quality of the substrate, and overcoming the problem that when the heating source in the prior art performs thermal radiation evaporation on the coating material, the temperature distribution of the heating source is uneven, resulting in inconsistent distribution of the coating material, and at the same time, it will also cause excessive consumption of local coating material / target material, which is not conducive to the requirement of continuous coating operation.

[0060] In the embodiment of the present invention, a synchronous linkage part is provided, which is composed of a linkage swing arm, a swing articulated seat, a first gear, a second gear, a third gear and a first gear seat. The linkage swing arm, the swing articulated seat, the first gear, the second gear, the third gear and the first gear seat are coordinated and linked to achieve the function of synchronously driving the heating plate group and the tubular target material. Compared with the prior art, the transmission method and control principle are simple and easy to operate, which is conducive to forming a uniform and stable coating system in the coating chamber, and can meet the continuous and stable coating of the substrate.

[0061] In an embodiment of the present invention, a heating disk group is provided, and the heating disk group is composed of an electric heating disk, a heating resistance wire, a heating rotating shaft, and a second gear seat. The electric heating disk, the heating resistance wire, the heating rotating shaft, and the second gear seat cooperate with each other to achieve linkage with the tubular target material, thereby improving the adsorption efficiency of the target coating material on the surface of the substrate. The disk group mounting seat drives the electric heating disk and the heating resistance wire to move, thereby achieving adjustment of the radiation range of the heat source, and can also perform turbulent shear on the evaporated coating material when the electric heating disk rotates, thereby further avoiding adsorption of the coating material on a local position of the substrate.

[0062] In an embodiment of the present invention, a substrate placing mechanism is provided, in which a substrate fixing component can meet the fixing requirements of substrates of different specifications, and the substrate fixing component will not interfere with the coating on the surfaces of both sides of the substrate. The continuous flipping part in the substrate placing mechanism ensures the continuous flipping of the substrate during coating, thereby facilitating the stably and evenly adsorbing coating materials on the surfaces of both sides of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0063] Figure 1 It is a schematic structural diagram of the continuous coating equipment provided by the present invention.

[0064] Figure 2 It is a schematic diagram of the three-dimensional structure of the continuous coating equipment provided by the present invention.

[0065] Figure 3It is a front view of the continuous coating equipment provided by the present invention.

[0066] Figure 4 yes Figure 3 AA section view.

[0067] Figure 5 It is a schematic diagram of the internal structure of the coating chamber provided by the present invention.

[0068] Figure 6 It is an internal axonometric diagram of the coating chamber provided by the present invention.

[0069] Figure 7 It is a structural schematic diagram of the continuous coating mechanism provided by the present invention.

[0070] Figure 8 It is a three-dimensional structural schematic diagram of the continuous coating mechanism provided by the present invention.

[0071] Fig. 9 It is a side view of the continuous coating mechanism provided by the present invention.

[0072] Fig.10 It is a structural schematic diagram of the target material adaptation part provided by the present invention.

[0073] Fig.11 It is an axonometric view of the target material adaptation portion provided by the present invention.

[0074] Fig.12 It is a structural schematic diagram of the substrate placement mechanism provided by the present invention.

[0075] Fig.13 It is a structural schematic diagram of the continuous turning part provided by the present invention.

[0076] Fig.14 It is a structural schematic diagram of the substrate fixing assembly provided by the present invention.

[0077] Fig.15 It is a front view of the substrate fixing assembly provided by the present invention.

[0078] In the figure: 1-equipment body, 11-equipment base, 12-coating chamber, 13-inspection door, 14-layout door, 15-observation window, 2-heating disc group, 21-disc group mounting seat, 22-electric heating disc, 23-heating resistance wire, 24-heating rotating shaft, 25-fourth gear, 26-second gear seat, 3-substrate placement mechanism, 31-drive motor, 32-drive connecting shaft, 33-substrate supporting ring, 34-substrate fixing assembly, 341-sixth gear, 342-ring limiting groove, 343-seventh gear, 344-rotating swing rod, 345-substrate fixing roller, 346-adjusting gear ring, 347-gear ring limiting seat, 348-auxiliary toggle seat, 35-continuous turning part, 351-fifth gear, 352-sixth gear, 353 - flip connecting shaft, 4- auxiliary coating component, 41- auxiliary motor, 42- component support bracket, 43- synchronous linkage part, 431- linkage swing arm, 432- linkage hinge block, 433- swing hinge seat, 434- arc rack, 435- first gear, 436- gear connecting shaft, 437- second gear, 438- third gear, 439- first gear seat, 44- target material adaptation part, 441- support linkage shaft, 442- adaptive linkage disk, 443- adaptive limit groove, 444- adjusting threaded sleeve, 445- external threaded sleeve, 446- adaptive hinge rod, 447- adaptive support pipe rod, 448- set locking groove, 449- set locking pin, 5- target material assembly, 51- tubular target, 52- spiral guide pipe, 53- cooling reflux pipe. DETAILED DESCRIPTION

[0079] When the heating source of the existing equipment performs thermal radiation evaporation on the coating material, the coating material distribution is inconsistent due to the uneven temperature distribution of the heating source. At the same time, it will also cause excessive consumption of local coating material / target material, which is not conducive to the requirements of continuous coating operation. In the long run, it will cause poor quality of the coating product. In view of the above problems, we have proposed a continuous coating equipment and a coating method. In short, the continuous coating equipment consists of an equipment body 1, a continuous coating mechanism, and a substrate placement mechanism 3 corresponding to the continuous coating mechanism. The continuous coating mechanism includes a target material assembly 5, a heating plate group 2, and an auxiliary coating assembly 4, and the auxiliary coating assembly 4 includes an assembly support bracket 42, an auxiliary motor 41, and a synchronous linkage part 43. During the coating operation, the sample door 14 is opened, and substrates of different specifications are fixed by the substrate placement mechanism 3, and then the heating disk group 2 and the auxiliary motor 41 are turned on. The auxiliary motor 41 is started to drive the synchronous linkage part 43 to move, so that the synchronous linkage part 43 drives the tubular target 51 and the heating disk group 2 to move synchronously. The heating disk group 2 heats and evaporates the rotating tubular target 51, so that the evaporated material is adsorbed on the surface of the substrate, thereby realizing the double-sided continuous coating operation of the substrate. In the embodiment of the present invention, an auxiliary coating component 4 is provided, and the auxiliary coating component 4 is composed of an auxiliary motor 41 and a synchronous linkage part 43. The synchronous linkage part 43 can synchronously start the tubular target 51 and the heating disk group 2, and adopts technical means of coordinated cooperation between the rotating tubular target 51 and the reciprocating heating disk group 2 to form a stable shear force on the released coating material, so that the coating material evaporated from the substrate can be evenly dispersed on the surface of the substrate, thereby combining with the substrate to form a tight film layer, thereby improving the coating quality of the substrate, and overcoming the problem that when the heating source in the prior art performs thermal radiation evaporation on the coating material, the temperature distribution of the heating source is uneven, resulting in inconsistent distribution of the coating material, and at the same time, it will also cause excessive consumption of local coating material / target material, which is not conducive to the requirements of continuous coating operations.

[0080] It should be noted that in the embodiments of the present invention, the substrate may be a rectangular, annular, sector-shaped or circular substrate made of metal, plastic, glass or ceramic, and the target may be a metal, non-metal or ceramic target.

[0081] The embodiment of the present invention provides a continuous coating device, such as Figure 1-Figure 4 As shown, the continuous coating equipment includes:

[0082] The equipment body 1 includes an equipment base 11, a coating chamber 12, an inspection door 13, and a layout door 14. The coating chamber 12 is fixedly mounted on the equipment base 11, and the inspection door 13 and the layout door 14 are rotatably mounted on both sides of the coating chamber 12;

[0083] In this embodiment, the top of the coating chamber 12 is detachably provided with an observation window 15, which is used to observe the coating status, and the coating chamber 12 can be a rectangular seat or a round seat with a hollow interior. The coating chamber 12 is also provided with an existing exhaust system, an electromagnetic system, and an inert gas vacuum system that meet the requirements of vacuum coating, which will not be elaborated here.

[0084] Continuous coating mechanism, such as Figure 5-Figure 6 As shown, the continuous coating mechanism is disposed in the coating chamber 12, and the continuous coating mechanism is used to continuously coat the substrate;

[0085] A substrate placing mechanism 3 is provided corresponding to the continuous coating mechanism, and the substrate placing mechanism 3 is provided on the layout door body 14. The substrate layout mechanism is used to support the coating substrate and assist in the continuous coating operation on both sides of the substrate;

[0086] Among them, Figure 7-Figure 9 As shown, the continuous coating mechanism comprises:

[0087] A target assembly 5, the target assembly 5 is arranged in the coating chamber 12, the target assembly 5 is used to provide coating evaporation material, and the target assembly 5 includes at least one group of hollow tubular targets 51;

[0088] In this embodiment, the number of tubular targets 51 can be two groups, and the tubular targets 51 are in the shape of a hollow circular tube or a circular ring. At the same time, in order to meet the cooling demand of the tubular targets 51, a spiral guide tube 52 and a cooling return pipe 53 are arranged inside the tubular targets 51. One end of the spiral guide tube 52 is connected to a cooling medium delivery pump through a flange, and the other end of the spiral guide tube 52 is connected to the cooling return pipe 53. The other end of the cooling return pipe 53 is connected to a circulating water pump. The setting of the spiral guide tube 52 can meet the cooling demand of the tubular target 51 on the one hand, and on the other hand, it has a higher cooling efficiency than the prior art, thereby avoiding the shortening of the service life of the tubular target 51 and facilitating continuous coating operations.

[0089] A heating plate assembly 2, wherein the heating plate assembly 2 is used to evaporate and heat the target assembly 5;

[0090] An auxiliary coating assembly 4, the auxiliary coating assembly 4 is arranged in the coating chamber 12, and the auxiliary coating assembly 4 is used to synchronously drive the target assembly 5 and the heating plate assembly 2 to assist the target assembly 5 and the heating plate assembly 2 in coating the substrate;

[0091] Among them, the auxiliary coating component 4 includes a component support bracket 42, an auxiliary motor 41, and a synchronous linkage part 43. The component support bracket 42 is fixedly mounted on the side wall of the coating chamber 12, and the auxiliary motor 41 is fixedly mounted on the component support bracket 42. The driving shaft of the auxiliary motor 41 is fixedly connected with the synchronous linkage part 43, and the synchronous linkage part 43 is respectively connected to the heating disk group 2 and the tubular target material 51. The synchronous linkage part 43 is used to drive the tubular target material 51 to rotate and adjust the position of the heating disk group 2 within a variable range.

[0092] It should be noted that the component support bracket 42 is fixedly installed on the side wall of the coating chamber 12 by means of bolts and clips. The outer wall of the auxiliary motor 41 is provided with a heat insulation cover. The auxiliary motor 41 can be a single-phase asynchronous motor or a three-phase asynchronous motor. At the same time, a PLC controller can be arranged on the surface of the equipment base 11, and the PLC controller is electrically connected to the auxiliary motor 41.

[0093] In this embodiment, during the coating operation, the sample door 14 is opened, substrates of different specifications are fixed by the substrate placement mechanism 3, and then the heating disk group 2 and the auxiliary motor 41 are turned on. The auxiliary motor 41 is started to drive the synchronous linkage part 43 to move, so that the synchronous linkage part 43 drives the tubular target 51 and the heating disk group 2 to move synchronously. The heating disk group 2 heats and evaporates the rotating tubular target 51, so that the evaporated material is adsorbed on the surface of the substrate, thereby realizing double-sided continuous coating operation on the substrate.

[0094] In the embodiment of the present invention, an auxiliary coating component 4 is provided, and the auxiliary coating component 4 is composed of an auxiliary motor 41 and a synchronous linkage part 43. The synchronous linkage part 43 can synchronously start the tubular target 51 and the heating disk group 2, and adopts technical means of coordinated cooperation between the rotating tubular target 51 and the reciprocating heating disk group 2 to form a stable shear force on the released coating material, so that the coating material evaporated from the substrate can be evenly dispersed on the surface of the substrate, thereby combining with the substrate to form a tight film layer, thereby improving the coating quality of the substrate, and overcoming the problem that when the heating source in the prior art performs thermal radiation evaporation on the coating material, the temperature distribution of the heating source is uneven, resulting in inconsistent distribution of the coating material, and at the same time, it will also cause excessive consumption of local coating material / target material, which is not conducive to the requirements of continuous coating operations.

[0095] In a further preferred embodiment of the present invention, Figure 7-Figure 8 As shown, the synchronous linkage unit 43 includes:

[0096] A linkage swing arm 431, one end of which is fixedly connected to the driving shaft of the auxiliary motor 41, and the other end of which is detachably fixedly connected to a linkage hinge block 432. One end of the linkage swing arm 431 and the driving shaft of the auxiliary motor 41 can be fixedly connected by riveting or interference fit, and the auxiliary motor 41 is fixedly mounted on the component support bracket 42 by means of a buckle or rivet;

[0097] A swing hinge seat 433 is slidably sleeved on the outside of the linkage hinge block 432, one end of the swing hinge seat 433 is rotatably connected to the component support bracket 42, and the swing hinge seat 433 can be a rectangular seat with a hollow interior, one end of the swing hinge seat 433 is rotatably connected to the component support bracket 42 through a bearing or a roller, and the other end of the swing hinge seat 433 is fixedly connected to the arc rack 434 by welding or riveting;

[0098] An arc-shaped rack 434 fixedly connected to the other end of the swing hinge seat 433;

[0099] A first gear 435, which is disposed on one side of the arc-shaped rack 434, and the first gear 435 and the arc-shaped rack 434 are meshed and transmitted;

[0100] The second gear 437 is arranged at the lower side of the first gear 435. The first gear 435 and the second gear 437 are fixedly connected via a gear connecting shaft 436. The gear connecting shaft 436 is also rotatably connected to the component support bracket 42. The two ends of the gear connecting shaft 436 can be respectively fixedly connected to the first gear 435 and the second gear 437 by plugging / welding. The middle part of the gear connecting shaft 436 is rotatably connected to the component support bracket 42 via a bearing.

[0101] The first tooth seat 439 is arranged on the outer side of the second gear 437, and the first tooth seat 439 and the second gear 437 are meshed and transmitted. The first tooth seat 439 is slidably connected to the component support bracket 42, and the first tooth seat 439 is also fixedly connected to the heating plate group 2.

[0102] In this embodiment, the first gear seat 439 can be slidably connected to the component support bracket 42 via a “U”-shaped or “T”-shaped slide rail.

[0103] At least one set of third gears 438, wherein the third gears 438 are arranged on the inner side of the first gear 435, and the third gears 438 are meshed with the first gear 435 for transmission, and the third gears 438 are also rotatably connected to the component support bracket 42, and a target material adaptation part 44 is fixedly connected below the third gears 438, and the target material adaptation part 44 is used to adapt to and fix tubular targets 51 of different specifications.

[0104] In this embodiment, the third gears 438 are symmetrically arranged in two groups, and the third gears 438 are rotatably connected to the component support bracket 42 through bearings.

[0105] In the embodiment of the present invention, a synchronous linkage part 43 is provided, and the synchronous linkage part 43 is composed of a linkage swing arm 431, a swing hinge seat 433, a first gear 435, a second gear 437, a third gear 438 and a first gear seat 439. The linkage swing arm 431, the swing hinge seat 433, the first gear 435, the second gear 437, the third gear 438 and the first gear seat 439 are coordinated and linked to achieve the function of synchronously driving the heating plate group 2 and the tubular target material 51. Compared with the prior art, the transmission method and control principle are simple and easy to operate, which is conducive to forming a uniform and stable coating system in the coating chamber, and can meet the continuous and stable coating of the substrate.

[0106] In a further preferred embodiment of the present invention, Figure 10-11 As shown, the target material adaptation portion 44 includes:

[0107] A support linkage shaft 441, wherein the support linkage shaft 441 is fixedly mounted on the third gear 438, wherein the support linkage shaft 441 is fixed to the third gear 438 by plugging or riveting, and the other end of the support linkage shaft 441 is connected to the adaptive linkage disk 442 by riveting or bolting;

[0108] An adaptive linkage disk 442 fixedly mounted on the end of the supporting linkage shaft 441, wherein at least one set of adaptive limiting grooves 443 is formed in the adaptive linkage disk 442;

[0109] It should be noted that the adaptive linkage disk 442 can be a disk or a circular plate, the adaptive limit grooves 443 are circumferentially arranged in the adaptive linkage disk 442, the number of the adaptive limit grooves 443 can be 3-6 groups, and the shape of the adaptive limit grooves 443 can be a rectangular groove or an arc groove.

[0110] An adaptive tube support rod 447 is slidably mounted on the adaptive limit groove 443. The adaptive tube support rod 447 is used to support tubular targets 51 of different specifications. The adaptive tube support rod 447 can be a spiral round rod structure. The adaptive tube support rod 447 can not only achieve stable support for the tubular target 51, but also avoid damage to the outer wall of the tubular target 51, thereby ensuring the coating quality.

[0111] An adjusting thread sleeve 444, wherein the adjusting thread sleeve 444 is rotatably mounted in the adaptive linkage disk 442, wherein the inner wall of the adjusting thread sleeve 444 is provided with an internal thread, and the outer wall or bottom of the adjusting thread sleeve 444 can be rotatably connected to the adaptive linkage disk 442 via a bearing or a roller;

[0112] An external threaded sleeve 445 that penetrates the inner cavity of the adjusting threaded sleeve 444, the external threaded sleeve 445 is slidably sleeved on the outer wall of the supporting linkage shaft 441, the outer wall of the external threaded sleeve 445 is threadedly connected with the inner wall of the adjusting threaded sleeve 444, and the outer wall of the external threaded sleeve 445 is provided with an external thread that meshes with the internal thread;

[0113] At least one set of adaptive hinged rods 446, wherein the adaptive hinged rods 446 are arranged between the external threaded sleeve 445 and the adaptive limiting groove 443, wherein one end of the adaptive hinged rod 446 is rotatably connected to the external threaded sleeve 445, and the other end of the adaptive hinged rod 446 is hinged to the adaptive support tube rod 447, wherein the adaptive hinged rod 446 is circumferentially inclinedly arranged on the outer wall of the external threaded sleeve 445, and the number of the adaptive hinged rods 446 is consistent with that of the adaptive support tube rod 447;

[0114] At least one set of sleeve locking grooves 448, wherein the sleeve locking grooves 448 are arranged on the outer wall of the adjusting threaded sleeve 444, and a sleeve locking pin 449 for cooperating with the sleeve locking grooves 448 is installed on the adaptive linkage disk 442. The setting of the sleeve locking grooves 448 and the sleeve locking pin 449 realizes the locking of the position of the adjusting threaded sleeve 444, thereby ensuring the stability of the tubular target 51 when releasing the coating material. The sleeve locking grooves 448 can be threaded grooves or card slots, and the sleeve locking pin 449 can be threaded rods or card pins.

[0115] When it is necessary to replace or fix the tubular target 51 of different specifications, the tubular target 51 is placed in the coating chamber 12 and sleeved on the outer surface of the spiral guide tube 52, and then the adjusting threaded sleeve 444 is manually rotated, and the adjusting threaded sleeve 444 drives the external threaded sleeve 445 to move up and down, so that the external threaded sleeve 445 drives the adaptive hinged rod 446 to swing, and the adaptive hinged rod 446 can synchronously push the adaptive support rod 447 to move along the adaptive limit groove 443, so that the adaptive support rod 447 locks the inner wall of the tubular target 51.

[0116] When the tubular target 51 is updated, the auxiliary motor 41 is turned on. The auxiliary motor 41 can drive the linkage swing arm 431 to rotate, and the linkage swing arm 431 drives the linkage hinge block 432 to rotate. The linkage hinge block 432 drives the arc rack 434 to swing back and forth, so that the arc rack 434 drives the first gear 435 to rotate forward and reversely, and the first gear 435 drives the third gear 438 to rotate, so that the third gear 438 drives the support linkage shaft 441, the adaptive linkage disk 442 and the tubular target 51 to rotate.

[0117] In a further preferred embodiment of the present invention, Figure 7 and Figure 8 As shown, the heating plate group 2 includes:

[0118] The disk assembly mounting seat 21 is detachably connected to the first tooth seat 439. The disk assembly mounting seat 21 may be a rectangular seat or a round seat structure made of a heat-insulating material. The top of the disk assembly mounting seat 21 is fixedly connected to the first tooth seat 439 by means of a buckle or a fastening bolt;

[0119] An electric heating disc 22 is arranged on one side of the disc mounting seat, and the electric heating disc 22 is rotatably mounted on the disc assembly mounting seat 21. The electric heating disc 22 is a circular plate or a round seat structure with a hollow interior, and the electric heating disc 22 is filled with a heat-conducting medium. The electric heating disc 22 is rotatably connected to the disc mounting seat through a bearing or a roller;

[0120] At least one group of heating resistance wires 23 , wherein the heating resistance wires 23 are circumferentially arranged in the electric heating disk 22 , and the heating resistance wires 23 are used to heat and evaporate the tubular target material 51 .

[0121] In this embodiment, the heating resistance wire 23 can be arranged in a counterclockwise circumferential direction in the electric heating disk 22. In order to ensure the evaporation efficiency of the coating material, the heating resistance wire 23 can be in a spiral or arc-shaped shape. It should be noted that the counterclockwise arrangement with the arc-shaped structure can perform turbulent shear on the evaporated coating material when the electric heating disk 22 rotates, further avoiding the coating material from being adsorbed on a local position of the substrate, thereby improving the coating efficiency and quality.

[0122] A heating rotating shaft 24, wherein the heating rotating shaft 24 is fixedly mounted on the electric heating disk 22, and one end of the heating rotating shaft 24 away from the electric heating disk 22 passes through the disk assembly mounting seat 21 and is fixedly connected to the fourth gear 25, one end of the heating rotating shaft 24 is fixedly connected to the electric heating disk 22 by plugging or riveting, and the other end of the heating rotating shaft 24 is welded to the fourth gear 25, and the fourth gear 25 can be a half, a third or a quarter incomplete gear;

[0123] The second tooth seat 26 is fixedly mounted on the component support bracket 42, and the second tooth seat 26 is meshed with the fourth gear 25 for transmission. The second tooth seat 26 is a rectangular seat structure with a hollow interior, and the teeth of the second tooth seat 26 are arranged on one side of the inner wall.

[0124] In this embodiment, when working, the rotation of the first gear 435 can drive the second gear 437 to rotate, so that the second gear 437 drives the first tooth seat 439 and the disk group mounting seat 21 to move, and the disk group mounting seat 21 drives the electric heating disk 22 and the heating resistance wire 23 to move, so as to adjust the radiation range of the heat source. When the electric heating disk 22 and the heating resistance wire 23 move, the second tooth seat 26 acts on the fourth gear 25, thereby driving the fourth gear 25, the heating rotating shaft 24, the electric heating disk 22, and the heating resistance wire 23 to rotate, so that the evaporated coating material can be turbulently sheared when the electric heating disk 22 rotates, thereby further avoiding the coating material from being adsorbed on a local position of the substrate.

[0125] In the embodiment of the present invention, a heating disk group 2 is provided, and the heating disk group 2 is composed of an electric heating disk 22, a heating resistor wire 23, a heating rotating shaft 24, and a second tooth seat 26. The electric heating disk 22, the heating resistor wire 23, the heating rotating shaft 24, and the second tooth seat 26 cooperate with each other to achieve linkage with the tubular target material 51, thereby improving the adsorption efficiency of the target coating material on the surface of the substrate. The disk group mounting seat 21 drives the electric heating disk 22 and the heating resistor wire 23 to move, thereby achieving the adjustment of the radiation range of the heat source, and can also perform turbulent shear on the evaporated coating material when the electric heating disk 22 rotates, thereby further avoiding the coating material from being adsorbed on a local position of the substrate.

[0126] In a further preferred embodiment of the present invention, Figure 5 and Fig.12 As shown, the substrate placement mechanism 3 includes:

[0127] A driving motor 31, wherein the driving motor 31 is fixedly mounted on the lofted door body 14, wherein the driving motor 31 is fixedly mounted on the lofted door body 14 by welding or riveting, wherein the driving motor 31 is electrically connected to the PLC controller, and at the same time, the output end of the driving motor 31 is fixedly connected to the driving connecting shaft 32 by interference fit;

[0128] A driving connecting shaft 32 fixedly connected to the output end of the driving motor 31, wherein one end of the driving connecting shaft 32 away from the driving motor 31 is fixedly connected to a substrate supporting ring 33, and the substrate supporting ring 33 can be fixedly connected to the end of the driving connecting shaft 32 through a connecting rod, and the substrate supporting ring 33 can be a round seat, a circular ring or a circular frame with a hollow interior;

[0129] At least one set of substrate fixing components 34, wherein the substrate fixing components 34 are used to fix substrates of different specifications;

[0130] The continuous turning portion 35 is disposed in the substrate supporting ring 33 , and is used to connect the driving connecting shaft 32 and the substrate fixing assembly 34 .

[0131] In the embodiment of the present invention, a substrate placing mechanism 3 is provided. The substrate fixing component 34 in the substrate placing mechanism 3 can meet the fixing requirements of substrates of different specifications, and the substrate fixing component 34 will not interfere with the coating on the surfaces of both sides of the substrate. The continuous flipping part 35 in the substrate placing mechanism 3 ensures the continuous flipping of the substrate during coating, which helps to stably and evenly adsorb the coating material on the surfaces of both sides of the substrate.

[0132] In a further preferred embodiment of the present invention, Fig.13 As shown, the continuous turning portion 35 includes:

[0133] A fifth gear 351, wherein the fifth gear 351 is fixedly mounted on the lofting door body 14, and the fifth gear 351 is fixedly mounted on the inner wall of the lofting door body 14 by means of a buckle or a bolt;

[0134] At least one set of flip connection shafts 353, one end of each flip connection shaft 353 is rotatably connected to the end of the driving connection shaft 32, and the other end of each flip connection shaft 353 is connected to the substrate fixing assembly 34;

[0135] The sixth gear 352 is fixedly sleeved on the flip connection shaft 353 , and the sixth gear 352 is meshed with the fifth gear 351 for transmission.

[0136] In this embodiment, one end of the flip connection shaft 353 is rotatably connected to the end of the driving connection shaft 32 through a bearing, and the other end of the flip connection shaft 353 is fixedly connected to the fixed limiting ring 341 by plugging or riveting.

[0137] In a further preferred embodiment of the present invention, Figure 14-15 As shown, the substrate fixing assembly 34 includes:

[0138] A fixed limiting ring 341, wherein the fixed limiting ring 341 is fixedly connected to the end of the flip connection shaft 353, and the fixed limiting ring 341 is also rotatably connected to the inner wall of the substrate support ring 33. At least one group of ring limiting grooves 342 is provided in the fixed limiting ring 341. The fixed limiting ring 341 is a round seat or a circular ring with a hollow interior, and the fixed limiting rings 341 are all circumferentially arranged in the substrate support ring 33. The number of fixed limiting rings 341 can be 3-6 groups. One end of the fixed limiting ring 341 away from the flip connection shaft 353 can be rotatably connected to the inner wall of the substrate support ring 33 through a bearing, and the number of the ring limiting grooves 342 can be 3 groups;

[0139] A rotating swing rod 344 is rotatably installed in the ring limiting groove 342, and the end of the rotating swing rod 344 is detachably connected to a substrate fixing roller 345. The end of the rotating swing rod 344 is connected to the substrate fixing roller 345 by a thread or a buckle, and the substrate fixing roller 345 is a round rod or a round roller with an elastic anti-skid layer on the outer wall. The rotating swing rod 344 can be a round rod or a rectangular rod, and both ends of the rotating swing rod 344 pass through the ring limiting groove 342. The middle part of the rotating swing rod 344 is riveted or clamped to the seventh gear 343;

[0140] The seventh gear 343 is rotatably mounted on the side wall of the fixed limiting ring 341. The seventh gear 343 is rotatably connected to the side wall of the fixed limiting ring 341 through a bearing or a roller. The seventh gear 343 is fixedly connected to the rotating swing rod 344.

[0141] The adjusting ring gear 346 is rotatably sleeved in the ring gear limit seat 347, and the adjusting ring gear 346 is meshed with the seventh gear 343 for transmission. An auxiliary toggle seat 348 is fixedly installed on one side of the adjusting ring gear 346. The ring gear limit seat 347 is connected to the fixed limit ring 341 by riveting or snapping a support rod, and the auxiliary toggle seat 348 is riveted or welded to the side wall of the adjusting ring gear 346. The auxiliary toggle seat 348 can be an arc seat structure. In order to fix the adjusting ring gear 346, a plurality of sets of fixing grooves are circumferentially arranged on the side wall of the ring gear limit seat 347. A fixing rod can be arranged in the ring gear limit seat 347, and the fixing groove and the fixing rod can be connected by threads.

[0142] In this embodiment, during operation, when loading the substrate, the lofting door 14 is pulled, and then the auxiliary toggle seat 348 is manually rotated, the auxiliary toggle seat 348 drives the adjusting ring gear 346 to rotate, so that the adjusting ring gear 346 drives the seventh gear 343 to rotate, and the seventh gear 343 drives the rotating swing rod 344 and the substrate fixing roller 345 to rotate, thereby achieving the clamping and fixing of substrates of different specifications. After the lofting is completed, the lofting door 14 is closed, and then the driving motor 31 is turned on. The driving motor 31 is started to drive the driving connecting shaft 32 to rotate, and the driving connecting shaft 32 drives the substrate supporting ring 33, the fixed limiting ring 341, and the substrate fixing roller 345 to rotate. When the fixed limiting ring 341 rotates, the fifth gear 351 acts on the sixth gear 352, so that the sixth gear 352 drives the rotating swing rod 344 and the substrate fixing roller 345 to flip, thereby achieving the continuous synchronous operation of driving the substrate to rotate and flip.

[0143] On the other hand, an embodiment of the present invention further provides a continuous coating method, which comprises:

[0144] Step S10, when loading the substrate, pull the layout door 14, and then manually rotate the auxiliary toggle seat 348, the auxiliary toggle seat 348 drives the adjusting ring gear 346 to rotate, so that the adjusting ring gear 346 drives the seventh gear 343 to rotate, and the seventh gear 343 drives the rotating rocker 344 and the substrate fixing roller 345 to rotate, thereby achieving the clamping and fixing of substrates of different specifications. After the layout is completed, close the layout door 14.

[0145] Step S20, turn on the drive motor 31. When the drive motor 31 is started, it can drive the drive connecting shaft 32 to rotate. The drive connecting shaft 32 drives the substrate supporting ring 33, the fixed limiting ring 341, and the substrate fixing roller 345 to rotate. When the fixed limiting ring 341 rotates, the fifth gear 351 acts on the sixth gear 352, so that the sixth gear 352 drives the rotating rocker 344 and the substrate fixing roller 345 to flip, thereby realizing the continuous and synchronous operation of driving the substrate to rotate and flip.

[0146] Step S30, when it is necessary to replace or fix the tubular target 51 of different specifications, place the tubular target 51 in the coating chamber 12, and sleeve it on the outer surface of the spiral guide tube 52, and then manually rotate the adjusting threaded sleeve 444, the adjusting threaded sleeve 444 drives the external threaded sleeve 445 to move up and down, so that the external threaded sleeve 445 drives the adaptive hinged rod 446 to swing, and the adaptive hinged rod 446 can synchronously push the adaptive support rod 447 to move along the adaptive limit groove 443, so that the adaptive support rod 447 locks the inner wall of the tubular target 51.

[0147] Step S40, when the tubular target 51 is updated, the auxiliary motor 41 is turned on. The auxiliary motor 41 can drive the linkage swing arm 431 to rotate, the linkage swing arm 431 drives the linkage hinge block 432 to rotate, and the linkage hinge block 432 drives the arc rack 434 to swing back and forth, so that the arc rack 434 drives the first gear 435 to rotate forward and reverse, and the first gear 435 drives the third gear 438 to rotate, so that the third gear 438 drives the support linkage shaft 441, the adaptive linkage disk 442 and the tubular target 51 to rotate.

[0148] In step S50, the rotation of the first gear 435 can drive the second gear 437 to rotate, so that the second gear 437 drives the first tooth seat 439 and the disk group mounting seat 21 to move, and the disk group mounting seat 21 drives the electric heating disk 22 and the heating resistance wire 23 to move, so as to adjust the radiation range of the heat source. When the electric heating disk 22 and the heating resistance wire 23 move, the second tooth seat 26 acts on the fourth gear 25, thereby driving the fourth gear 25, the heating rotating shaft 24, the electric heating disk 22, and the heating resistance wire 23 to rotate, so that the evaporated coating material can be turbulently sheared when the electric heating disk 22 rotates, thereby further avoiding the coating material from being adsorbed on a local position of the substrate.

[0149] In summary, the present invention provides a continuous coating device and a coating method. During the coating operation, the sample door 14 is opened, and substrates of different specifications are fixed by the substrate placement mechanism 3, and then the heating disk group 2 and the auxiliary motor 41 are turned on. The auxiliary motor 41 is started to drive the synchronous linkage part 43 to move, so that the synchronous linkage part 43 drives the tubular target material 51 and the heating disk group 2 to move synchronously. The heating disk group 2 heats and evaporates the rotating tubular target material 51, so that the evaporated material is adsorbed on the surface of the substrate, thereby realizing the double-sided continuous coating operation of the substrate.

[0150] In the embodiment of the present invention, an auxiliary coating component 4 is provided, and the auxiliary coating component 4 is composed of an auxiliary motor 41 and a synchronous linkage part 43. The synchronous linkage part 43 can synchronously start the tubular target 51 and the heating disk group 2, and adopts technical means of coordinated cooperation between the rotating tubular target 51 and the reciprocating heating disk group 2 to form a stable shear force on the released coating material, so that the coating material evaporated from the substrate can be evenly dispersed on the surface of the substrate, thereby combining with the substrate to form a tight film layer, thereby improving the coating quality of the substrate, and overcoming the problem that when the heating source in the prior art performs thermal radiation evaporation on the coating material, the temperature distribution of the heating source is uneven, resulting in inconsistent distribution of the coating material, and at the same time, it will also cause excessive consumption of local coating material / target material, which is not conducive to the requirements of continuous coating operations.

[0151] The above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit the scope of protection of the invention. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on these embodiments, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in this field can still combine, add, delete or make other adjustments to the features in the various embodiments of the present invention according to the circumstances without conflict, without making creative work, so as to obtain different other technical solutions that do not deviate from the concept of the present invention in essence, and these technical solutions also belong to the scope of protection of the present invention.

Claims

1. A continuous coating device, comprising: An equipment body (1), the equipment body (1) comprising an equipment base (11), a coating chamber (12), an inspection door (13), and a layout door (14); the coating chamber (12) is fixedly mounted on the equipment base (11), and the inspection door (13) and the layout door (14) are rotatably mounted on two sides of the coating chamber (12); A continuous coating mechanism, the continuous coating mechanism being arranged in the coating chamber (12), and being used for continuously coating a substrate; A substrate placing mechanism (3) arranged corresponding to the continuous coating mechanism, characterized in that the substrate placing mechanism (3) is arranged on a layout door (14), and the substrate layout mechanism is used to support the coating substrate and assist in the continuous coating operation on both sides of the substrate; Wherein, the continuous coating mechanism comprises: A target material assembly (5), the target material assembly (5) is arranged in the coating chamber (12), the target material assembly (5) is used to provide coating evaporation material, and the target material assembly (5) comprises at least one group of hollow tubular targets (51); A heating plate assembly (2), the heating plate assembly (2) being used to perform evaporation heating on the target material assembly (5); An auxiliary coating assembly (4), the auxiliary coating assembly (4) being arranged in the coating chamber (12), and the auxiliary coating assembly (4) being used to synchronously drive the target assembly (5) and the heating disk assembly (2), so as to assist the target assembly (5) and the heating disk assembly (2) in coating the substrate; The auxiliary coating component (4) comprises a component support frame (42), an auxiliary motor (41), and a synchronous linkage part (43); the component support frame (42) is fixedly mounted on the side wall of the coating chamber (12); the auxiliary motor (41) is fixedly mounted on the component support frame (42); the driving shaft of the auxiliary motor (41) is fixedly connected with the synchronous linkage part (43); the synchronous linkage part (43) is respectively connected to the heating disk group (2) and the tubular target material (51); the synchronous linkage part (43) is used to drive the tubular target material (51) to rotate and adjust the position of the heating disk group (2) within a variable range.

2. The continuous coating device according to claim 1, characterized in that: The synchronous linkage unit (43) comprises: A linkage swing arm (431), one end of the linkage swing arm (431) is fixedly connected to the drive shaft of the auxiliary motor (41), and the other end of the linkage swing arm (431) is detachably fixedly connected to a linkage hinge block (432); A swing hinge seat (433) is slidably sleeved on the outside of the linkage hinge block (432), and one end of the swing hinge seat (433) is rotatably connected to the component support bracket (42); An arc-shaped rack (434) fixedly connected to the other end of the swing hinge seat (433); A first gear (435), the first gear (435) being arranged on one side of the arc-shaped rack (434), and the first gear (435) and the arc-shaped rack (434) being meshed and transmitted; A second gear (437), wherein the second gear (437) is disposed on the lower side of the first gear (435), and the first gear (435) and the second gear (437) are fixedly connected via a gear connecting shaft (436), and the gear connecting shaft (436) is also rotatably connected to the component support bracket (42); A first tooth seat (439), wherein the first tooth seat (439) is arranged on the outer side of the second gear (437), and the first tooth seat (439) and the second gear (437) are meshed and transmitted with each other, the first tooth seat (439) is slidably connected to the component support bracket (42), and the first tooth seat (439) is also fixedly connected to the heating plate group (2).

3. The continuous coating device according to claim 2, characterized in that: The synchronous linkage unit (43) further includes: At least one set of third gears (438), the third gears (438) being arranged on the inner side of the first gear (435), the third gears (438) being meshed with the first gear (435) for transmission, and the third gears (438) being rotatably connected to the component support frame (42), a target material adapting portion (44) being fixedly connected below the third gears (438), the target material adapting portion (44) being used to adapt to and fix tubular targets (51) of different specifications; Wherein, the target material adapting part (44) comprises: A supporting linkage shaft (441), wherein the supporting linkage shaft (441) is fixedly mounted on the third gear (438); An adaptive linkage disk (442) fixedly mounted on the end of the supporting linkage shaft (441), wherein at least one set of adaptive limiting grooves (443) is provided in the adaptive linkage disk (442); An adaptive tube support rod (447) is slidably mounted on the adaptive limiting groove (443), and the adaptive tube support rod (447) is used to support tubular targets (51) of different specifications.

4. The continuous coating device according to claim 3, characterized in that: The target material adapting part (44) further comprises: An adjusting threaded sleeve (444), the adjusting threaded sleeve (444) being rotatably mounted in the adaptive linkage disk (442); An external threaded sleeve (445) passes through the inner cavity of the adjusting threaded sleeve (444), the external threaded sleeve (445) is slidably sleeved on the outer wall of the supporting linkage shaft (441), and the outer wall of the external threaded sleeve (445) is threadedly connected to the inner wall of the adjusting threaded sleeve (444); At least one set of adaptive hinged rods (446), wherein the adaptive hinged rods (446) are arranged between the external threaded sleeve (445) and the adaptive limiting groove (443), one end of the adaptive hinged rod (446) is rotatably connected to the external threaded sleeve (445), and the other end of the adaptive hinged rod (446) is hinged to the adaptive support pipe rod (447); At least one set of sleeve locking grooves (448) is provided, wherein the sleeve locking grooves (448) are provided on the outer wall of the adjusting threaded sleeve (444), and a sleeve locking pin (449) for cooperating with the sleeve locking grooves (448) is installed on the adaptive linkage disk (442).

5. The continuous coating device according to any one of claims 2 to 4, characterized in that: The heating plate assembly (2) comprises: a disk assembly mounting seat (21), wherein the disk assembly mounting seat (21) is detachably connected to the first gear seat (439); An electric heating plate (22) disposed on one side of the plate mounting seat, the electric heating plate (22) being rotatably mounted on the plate assembly mounting seat (21); At least one group of heating resistance wires (23), wherein the heating resistance wires (23) are circumferentially arranged in the electric heating disk (22), and the heating resistance wires (23) are used to heat and evaporate the tubular target material (51).

6. The continuous coating device according to claim 5, characterized in that: The heating plate assembly (2) further comprises: A heating rotating shaft (24), the heating rotating shaft (24) being fixedly mounted on the electric heating disk (22), and one end of the heating rotating shaft (24) away from the electric heating disk (22) passes through the disk assembly mounting seat (21) and is fixedly connected to the fourth gear (25); A second gear seat (26), wherein the second gear seat (26) is fixedly mounted on the component support bracket (42), and the second gear seat (26) is meshed with the fourth gear (25) for transmission.

7. The continuous coating device according to claim 2, characterized in that: The substrate placement mechanism (3) comprises: A driving motor (31), wherein the driving motor (31) is fixedly mounted on the lofting door body (14); A drive connecting shaft (32) fixedly connected to the output end of the drive motor (31), wherein one end of the drive connecting shaft (32) away from the drive motor (31) is fixedly connected to a substrate supporting ring (33); At least one set of substrate fixing components (34), wherein the substrate fixing components (34) are used to fix substrates of different specifications; A continuous turning portion (35), the continuous turning portion (35) is arranged in the substrate supporting ring (33), and the continuous turning portion (35) is used to connect the driving connecting shaft (32) and the substrate fixing assembly (34).

8. The continuous coating device according to claim 7, characterized in that: The continuous turning section (35) comprises: A fifth gear (351), wherein the fifth gear (351) is fixedly mounted on the lofting door body (14); At least one set of flip connection shafts (353), one end of the flip connection shaft (353) is rotatably connected to the end of the driving connection shaft (32), and the other end of the flip connection shaft (353) is connected to the substrate fixing assembly (34); A sixth gear (352) is fixedly sleeved on the flip connection shaft (353), and the sixth gear (352) is meshed with the fifth gear (351) for transmission.

9. The continuous coating device according to claim 8, characterized in that: The substrate fixing assembly (34) comprises: A fixed limiting ring (341), wherein the fixed limiting ring (341) is fixedly connected to the end of the flip connection shaft (353), and the fixed limiting ring (341) is also rotatably connected to the inner wall of the substrate supporting ring (33), and at least one set of ring limiting grooves (342) is provided in the fixed limiting ring (341); A rotating swing rod (344) is rotatably mounted in the ring limiting groove (342), wherein the end of the rotating swing rod (344) is detachably connected to a substrate fixing roller (345); A seventh gear (343), the seventh gear (343) is rotatably mounted on the side wall of the fixed limiting ring (341), and the seventh gear (343) is fixedly connected to the rotating swing rod (344); An adjusting ring gear (346) is rotatably sleeved in a ring gear limiting seat (347), the adjusting ring gear (346) is meshed with the seventh gear (343) for transmission, and an auxiliary shifting seat (348) is fixedly mounted on one side of the adjusting ring gear (346).

10. A continuous coating method, implemented by using the continuous coating device according to any one of claims 1 to 9, characterized in that: It includes: Step S10, when loading the substrate, pull the layout door (14), then manually rotate the auxiliary toggle seat (348), the auxiliary toggle seat (348) drives the adjustment ring gear (346) to rotate, so that the adjustment ring gear (346) drives the seventh gear (343) to rotate, and the seventh gear (343) drives the rotating swing rod (344) and the substrate fixing roller (345) to rotate, so as to achieve the clamping and fixing of substrates of different specifications. After the layout is completed, close the layout door (14); Step S20, turning on the driving motor (31), the driving motor (31) can drive the driving connecting shaft (32) to rotate, the driving connecting shaft (32) drives the substrate supporting ring (33), the fixed limiting ring (341), and the substrate fixing roller (345) to rotate, when the fixed limiting ring (341) rotates, the fifth gear (351) acts on the sixth gear (352), so that the sixth gear (352) drives the rotating swing rod (344) and the substrate fixing roller (345) to flip, thereby realizing the continuous synchronous operation of driving the substrate to rotate and flip; Step S30, when it is necessary to replace or fix a tubular target (51) of different specifications, the tubular target (51) is placed in the coating chamber (12) and sleeved on the outer surface of the spiral guide tube (52), and then the adjusting threaded sleeve (444) is manually rotated, and the adjusting threaded sleeve (444) drives the external threaded sleeve (445) to move up and down, so that the external threaded sleeve (445) drives the adaptive hinged rod (446) to swing, and the adaptive hinged rod (446) can synchronously push the adaptive support rod (447) to move along the adaptive limit groove (443), so that the adaptive support rod (447) locks the inner wall of the tubular target (51); Step S40, when the tubular target (51) is updated, the auxiliary motor (41) is turned on, and the auxiliary motor (41) is started to drive the linkage swing arm (431) to rotate, the linkage swing arm (431) drives the linkage hinge block (432) to rotate, and the linkage hinge block (432) drives the arc-shaped rack (434) to swing back and forth, so that the arc-shaped rack (434) drives the first gear (435) to rotate forward and reverse, and the first gear (435) drives the third gear (438) to rotate, so that the third gear (438) drives the support linkage shaft (441), the adaptive linkage disk (442) and the tubular target (51) to rotate; Step S50, the rotation of the first gear (435) can drive the second gear (437) to rotate, so that the second gear (437) drives the first gear seat (439) and the disk assembly mounting seat (21) to move, and the disk assembly mounting seat (21) drives the electric heating disk (22) and the heating resistance wire (23) to move, so as to adjust the radiation range of the heat source. When the electric heating disk (22) and the heating resistance wire (23) move, the second gear seat (26) acts on the fourth gear (25), thereby driving the fourth gear (25), the heating rotating shaft (24), the electric heating disk (22), and the heating resistance wire (23) to rotate, so that when the electric heating disk (22) rotates, the evaporated coating material can be turbulently sheared, thereby further preventing the coating material from being adsorbed on a local position of the substrate.

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