Socket-based mems gas sensor batch aging system and method

Abstract

The invention discloses a socket-based mems gas sensor batch aging system and method, the system comprises an aging bottom plate and a power supply module, the aging bottom plate is provided with a plurality of socket socket modules, a power supply voltage reduction module and a plurality of LDO modules; the power supply module is electrically connected with the input end of the power supply voltage reduction module, the input ends of the plurality of adjustable LDO modules are electrically connected with the output end of the power supply voltage reduction module, the output ends of the plurality of adjustable LDO modules are electrically connected with the input ends of the corresponding socket modules respectively, and the output ends of the socket modules are used for being electrically connected with the mems gas sensor to be aged. The invention solves the problem that the existing batch aging method of the semiconductor gas sensor is mainly suitable for TO-packaged gas sensors and is not completely suitable for mems gas sensors in structural characteristics.

Description

Technical Field

[0001] The invention relates to the technical field of MEMS gas sensor aging, and in particular to a socket-based MEMS gas sensor batch aging system and method. Background Art

[0002] MEMS gas sensor is a common gas detection device, which is widely used in various fields and application scenarios, such as indoor air quality monitoring, industrial safety monitoring, fire warning systems, and medical applications. In order to ensure the performance and reliability of MEMS gas sensors and effectively screen out superior and inferior products during the production process, they need to be aged comprehensively and accurately. At present, a patent discloses an aging method for semiconductor gas sensors, which realizes batch aging of multiple semiconductor gas sensors by setting an aging circuit board with plug-in pin interfaces integrated with multiple semiconductor gas sensors, and simultaneously connecting multiple semiconductor gas sensors to these plug-in pin interfaces for aging. However, this method is mainly suitable for TO-packaged gas sensors, and its structural characteristics are not completely suitable for MEMS gas sensors, resulting in insufficient accuracy in aging MEMS gas sensors. Summary of the invention

[0003] In view of the above-mentioned defects, the present invention proposes a socket-based batch aging system and method for mems gas sensors, which aims to solve the problem that the existing batch aging method of semiconductor gas sensors is achieved by setting an aging circuit board with integrated plug-in pin interfaces of multiple semiconductor gas sensors, but this method is mainly suitable for TO-packaged gas sensors, and its structural characteristics are not fully suitable for mems gas sensors.

[0004] To achieve this object, the present invention adopts the following technical solutions:

[0005] A socket-based batch aging system for mems gas sensors includes an aging baseboard and a power module, wherein the aging baseboard is provided with a plurality of socket modules, a power step-down module and a plurality of adjustable low-dropout linear regulator LDO modules;

[0006] The power supply module is electrically connected to the input end of the power supply step-down module, the input ends of several adjustable LDO modules are electrically connected to the output end of the power supply step-down module, the output ends of several adjustable LDO modules are respectively electrically connected to the input ends of the corresponding socket modules, and the output end of the socket module is used to be electrically connected to the MEMS gas sensor to be aged.

[0007] Preferably, a single-chip microcomputer main control module is also provided on the aging base plate, the single-chip microcomputer main control module is electrically connected to the power module, and the single-chip microcomputer main control module is used to control the aging time of the MEMS gas sensor to be aged.

[0008] Preferably, the single chip microcomputer main control module includes a generating submodule, and the generating submodule is used to generate performance results of the MEMS gas sensor.

[0009] Another aspect of the present application provides a socket-based batch aging method for MEMS gas sensors, the method comprising the following steps:

[0010] Step S1: Connecting a number of MEMS gas sensors to be aged to the output ends of the corresponding socket modules on the aging base plate respectively;

[0011] Step S2: starting the power module to enable the power module to output a first output voltage U1;

[0012] Step S3: inputting the first output voltage U1 into the power supply step-down module for step-down, and outputting a second output voltage U2;

[0013] Step S4: inputting the second output voltage U2 into a plurality of the adjustable LDO modules for voltage regulation, and outputting a corresponding third output voltage U3;

[0014] Step S5: inputting a plurality of third output voltages U3 into corresponding MEMS gas sensors to be aged for power supply, so as to complete the aging of the MEMS gas sensors to be aged.

[0015] Preferably, the method further comprises the following steps: setting the aging time of the MEMS gas sensor to be aged in the single chip main control module.

[0016] Preferably, in step S5, after the aging of the mems gas sensor to be aged is completed, the method further includes the following steps: generating performance results of the mems gas sensor.

[0017] The technical solution provided by the embodiments of the present application may have the following beneficial effects:

[0018] In this solution, several socket modules are set on the aging base plate, and several mems gas sensors to be aged are connected to the corresponding socket modules respectively, and with the cooperation of the power buck module, several LDO modules and the power module, the aging test of several mems gas sensors to be aged is realized at the same time. Compared with the existing plug-in pin interface suitable for TO packaged gas sensors, this solution adopts a socket module, which has structural characteristics that match various interfaces on the mems gas sensor chip, has higher compatibility and stability, can ensure that the mems gas sensor chip can be stably and reliably connected to the aging system, reduce the test error caused by interface mismatch or poor contact, and further improve the accuracy of mems gas sensor aging. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the socket-based batch aging system of MEMS gas sensors in the present invention.

[0020] Among them, 1. Aging baseboard; 2. Power module; 11. Socket module; 12. Power step-down module; 13. Adjustable LDO module; 14. MCU main control module. DETAILED DESCRIPTION

[0021] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0022] A socket-based batch aging system for mems gas sensors includes an aging baseboard 1 and a power module 2. The aging baseboard 1 is provided with a plurality of socket modules 11, a power supply step-down module 12 and a plurality of adjustable low-dropout linear regulator LDO modules 13;

[0023] The power module 2 is electrically connected to the input end of the power step-down module 12, the input ends of several adjustable LDO modules 13 are electrically connected to the output end of the power step-down module 12, and the output ends of several adjustable LDO modules 13 are respectively electrically connected to the input ends of the corresponding socket modules 11, and the output end of the socket module 11 is used to be electrically connected to the MEMS gas sensor to be aged.

[0024] In the present embodiment of the socket-based batch aging system for mems gas sensors, when 64 mems gas sensors need to be aged, 64 socket modules 11 are provided, and 64 adjustable LDO modules 13 are provided. Figure 1 As shown, first, 64 mems gas sensors to be aged are connected to the output ends of the corresponding socket modules 11 on the aging base plate 1, and then the power module 2 is started. The power module 2 outputs a 12V voltage, and the 12V voltage is stepped down to 5V by the power step-down module 12, so that it is convenient to supply power to the adjustable LDO module 13 later. Then, the 5V voltage passes through the 64 adjustable LDO modules 13 respectively, and outputs 64 2.5V-5V voltages. Finally, the 64 2.5V-5V voltages are respectively input to the corresponding mems gas sensors to be aged for power supply, thereby realizing the aging of the 64 mems gas sensors to be aged. Further explanation: when more than 64 mems gas sensors need to be aged, multiple aging base plates 1 can be set to simultaneously perform aging tests on these mems gas sensors to be aged.

[0025] In this solution, several socket modules 11 are arranged on the aging base plate 1, and several mems gas sensors to be aged are connected to the corresponding socket modules 11 respectively, and with the cooperation of the power step-down module 12, several LDO modules 13 and the power module 2, several mems gas sensors to be aged are aged simultaneously. Compared with the existing plug-in pin interface suitable for TO packaged gas sensors, this solution adopts a socket module, which has structural characteristics that match various interfaces on the mems gas sensor chip, has higher compatibility and stability, can ensure that the mems gas sensor chip can be stably and reliably connected to the aging system, reduce the test error caused by interface mismatch or poor contact, and further improve the accuracy of mems gas sensor aging.

[0026] Preferably, the aging base plate 1 is also provided with a single-chip microcomputer main control module 14, the single-chip microcomputer main control module 14 is electrically connected to the power module 2, and the single-chip microcomputer main control module 14 is used to control the aging time of the MEMS gas sensor to be aged. Figure 1 As shown, since the single-chip microcomputer main control module 14 is electrically connected to the power module 2, on the one hand, the power module 2 can supply power to the single-chip microcomputer main control module 14; on the other hand, the single-chip microcomputer main control module 14 can control the time when the power module 2 supplies power to the MEMS gas sensor to be aged, that is, control the aging time of the MEMS gas sensor to be aged.

[0027] In one embodiment, when the voltage supplied to the mems gas sensor to be aged is 3.5V, the single-chip main control module 14 controls the aging time of the mems gas sensor to be aged to be 8 hours; when the voltage supplied to the mems gas sensor to be aged is 3.4V, the single-chip main control module 14 controls the aging time of the mems gas sensor to be aged to be 14 hours.

[0028] Preferably, the single-chip main control module 14 includes a generation submodule (not shown in the figure), which is used to generate the performance results of the mems gas sensor. In this embodiment, by setting the generation submodule, it is beneficial to improve the mems gas sensor. For example, if the performance results show that the mems gas sensor has a performance degradation problem under specific environmental conditions, it can be considered to optimize the material, structure or manufacturing process of the mems gas sensor to improve its stability and durability.

[0029] Another aspect of the present application provides a socket-based batch aging method for MEMS gas sensors, the method comprising the following steps:

[0030] Step S1: Connect several MEMS gas sensors to be aged to the output ends of the corresponding socket modules 11 on the aging base plate 1 respectively;

[0031] Step S2: starting the power module 2 to enable the power module 2 to output a first output voltage U1;

[0032] Step S3: inputting the first output voltage U1 into the power supply step-down module 12 for stepping down, and outputting a second output voltage U2;

[0033] Step S4: inputting the second output voltage U2 into a plurality of the adjustable LDO modules 13 for voltage regulation, and outputting a corresponding third output voltage U3;

[0034] Step S5: inputting a plurality of third output voltages U3 into corresponding MEMS gas sensors to be aged for power supply, so as to complete the aging of the MEMS gas sensors to be aged.

[0035] The present solution is a socket-based batch aging method for mems gas sensors. In this embodiment, when 64 mems gas sensors need to be aged, the first output voltage U1 is 12V, the second output voltage U2 is 5V, and the third output voltage U3 is 2.5-5V. The present solution connects several mems gas sensors to be aged to the corresponding socket modules 11 on the aging base plate 1, and with the cooperation of the power supply step-down module 12, several LDO modules 13 and the power supply module 2, the aging of several mems gas sensors to be aged is achieved at the same time. Compared with the existing plug-in pin interface suitable for TO packaged gas sensors, the present solution adopts a socket module, which has structural characteristics that match various interfaces on the mems gas sensor chip, has higher compatibility and stability, can ensure that the mems gas sensor chip can be stably and reliably connected to the aging system, reduce the test error caused by interface mismatch or poor contact, and further improve the accuracy of mems gas sensor aging.

[0036] Preferably, the following steps are further included: setting the aging time of the mems gas sensor to be aged in the single-chip main control module 14. In this embodiment, by setting the aging time of the mems gas sensor to be aged, it is convenient for the single-chip main control module 14 to control the time for the power module 2 to supply power to the mems gas sensor to be aged according to the aging time of the mems gas sensor to be aged.

[0037] Preferably, in step S5, after the aging of the mems gas sensor to be aged is completed, the following step is further included: generating a performance result of the mems gas sensor. In this embodiment, obtaining the performance result of the mems gas sensor is conducive to improving the mems gas sensor.

[0038] In addition, each functional unit in each embodiment of the present invention may be integrated into a processing module, or each unit may exist physically separately, or two or more units may be integrated into one module. The above-mentioned integrated module may be implemented in the form of hardware or in the form of a software functional module. If the integrated module is implemented in the form of a software functional module and sold or used as an independent product, it may also be stored in a computer-readable storage medium.

[0039] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A socket-based batch aging system for mems gas sensors, characterized by: It includes an aging baseboard and a power module, wherein the aging baseboard is provided with a plurality of socket modules, a power step-down module and a plurality of adjustable low-dropout linear regulator LDO modules; The power supply module is electrically connected to the input end of the power supply step-down module, the input ends of several adjustable LDO modules are electrically connected to the output end of the power supply step-down module, the output ends of several adjustable LDO modules are respectively electrically connected to the input ends of the corresponding socket modules, and the output end of the socket module is used to be electrically connected to the MEMS gas sensor to be aged.

2. The socket-based MEMS gas sensor batch aging system according to claim 1 is characterized in that: The aging bottom plate is also provided with a single-chip microcomputer main control module, which is electrically connected to the power supply module and is used to control the aging time of the MEMS gas sensor to be aged.

3. The socket-based MEMS gas sensor batch aging system according to claim 2 is characterized in that: The single chip microcomputer main control module includes a generating submodule, and the generating submodule is used to generate the performance result of the mems gas sensor.

4. A socket-based batch aging method for mems gas sensors, applied to a socket-based batch system for mems gas sensors as claimed in any one of claims 1 to 3, characterized in that: The method comprises the following steps: Step S1: Connecting a number of MEMS gas sensors to be aged to the output ends of the corresponding socket modules on the aging base plate respectively; Step S2: starting the power module to enable the power module to output a first output voltage U1; Step S3: inputting the first output voltage U1 into the power supply step-down module for step-down, and outputting a second output voltage U2; Step S4: inputting the second output voltage U2 into a plurality of the adjustable LDO modules for voltage regulation, and outputting a corresponding third output voltage U3; Step S5: inputting a plurality of third output voltages U3 into corresponding MEMS gas sensors to be aged for power supply, so as to complete the aging of the MEMS gas sensors to be aged.

5. The socket-based batch aging method for MEMS gas sensors according to claim 4 is characterized in that: The following steps are also included: The aging time of the MEMS gas sensor to be aged is set in the single-chip main control module.

6. The socket-based batch aging method for MEMS gas sensors according to claim 4 is characterized in that: In step S5, after the aging of the mems gas sensor to be aged is completed, the following step is also included: generating a performance result of the mems gas sensor.

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