Ion beam polishing device

Abstract

The invention relates to the technical field of ion beam polishing equipment, in particular to an ion beam polishing device which comprises a vacuum box, a first polishing mechanism, a second polishing mechanism and a clamping mechanism, an installation space is arranged in the vacuum box, and the second polishing mechanism and the first polishing mechanism are symmetrically arranged in the installation space. The clamping mechanism comprises a clamping assembly and a fixing assembly, the fixing assembly is arranged on the inner bottom face of the vacuum box, the clamping assembly comprises two lifting sleeves, two telescopic rods and two clamps, the lifting sleeves are in sliding connection with the fixing assembly so that the lifting sleeves can be adjusted up and down, the telescopic rods are connected with the lifting sleeves and the clamps, and the clamps are used for fixing the lens. According to the lens double-sided polishing device, double-sided polishing operation of a lens can be completed in a vacuum environment, the number of times of overturning the lens and re-vacuumizing is reduced, so that the polishing efficiency is remarkably improved, the clamping assembly and the fixing assembly are matched with each other, and the stability and repeatability of the whole clamping process are ensured.

Description

Technical Field

[0001] The invention relates to the technical field of ion beam polishing equipment, in particular to an ion beam polishing device. Background Art

[0002] In the manufacturing process of lenses, polishing is a crucial process that can significantly improve the surface accuracy, overall quality and optical performance of the lens. Ion beam polishing is an advanced non-contact polishing technology. Its working principle is to bombard the surface of the optical lens with a high-energy ion beam emitted by an ion source in a vacuum environment, and use the physical sputtering effect to achieve atomic-level material removal. This technology is known for its high precision, high certainty, excellent surface quality and wide range of applications.

[0003] However, during the ion source polishing process, the surface to be polished is firstly inspected in detail to determine the optimal ion source parameters and polishing path, and then the entire system is evacuated to ensure that the ion beam can perform polishing in an interference-free environment. After the first polishing, the system needs to be re-inflated, the lens is disassembled and flipped, and after the flipping is completed, the surface needs to be inspected again, vacuumed again, and the second polishing operation is performed. This series of operations is not only time-consuming, but also places extremely high demands on the operator's technical level and patience. Each step needs to be precisely controlled to ensure the final polishing result. Summary of the invention

[0004] The technical problem to be solved by the present invention is to solve one or more technical problems existing in the prior art and at least provide a beneficial choice or create conditions.

[0005] The solution of the present invention to its technical problem is: it includes a vacuum box, a first polishing mechanism, a second polishing mechanism and a clamping mechanism, the vacuum box is provided with an installation space, the first polishing mechanism is arranged at the upper part of the installation space, the second polishing mechanism is arranged at the lower part of the installation space, the second polishing mechanism is symmetrically arranged with the first polishing mechanism, the clamping mechanism includes a clamping assembly and a fixing assembly, the fixing assembly is arranged on the inner bottom surface of the vacuum box, the clamping assembly includes two lifting sleeves, two telescopic rods and two clamps, the lifting sleeves are slidably connected to the fixing assembly so that the lifting sleeves can be adjusted up and down, the fixed ends of the telescopic rods are fixedly connected to the lifting sleeves one by one, the movable ends of the telescopic rods are fixedly connected to the clamps one by one, and the clamps are used to fix the lenses.

[0006] The beneficial effect of the present invention is that by adopting the symmetrically arranged first polishing mechanism and the second polishing mechanism, the double-sided polishing operation of the lens can be completed in a vacuum environment, reducing the number of times of flipping the lens and re-vacuuming, thereby significantly improving the polishing efficiency. The fixing component is designed and installed on the inner bottom surface of the vacuum box, and the clamping component can effectively clamp and fix the workpiece to be polished, ensuring that the workpiece remains stable during the polishing process, thereby improving the polishing quality and accuracy. The clamping component is combined with the fixing component by a sliding connection, so that the clamping component can move up and down within a certain range, enhancing the convenience and reliability of its operation. Through the coordinated work of the lifting sleeve and the telescopic rod, the clamp can accurately position and clamp the workpiece, thereby ensuring the stability and repeatability of the entire clamping process.

[0007] As a further improvement of the above technical solution, the polishing device also includes a surface shape detection mechanism, which includes a first detection device and a second detection device. The first detection device is arranged at the top of the installation space, and the second detection device is arranged at the bottom of the installation space. The first detection device is used to detect the top surface of the lens placed on the clamping mechanism, and the second detection device is used to detect the bottom surface of the lens placed on the clamping mechanism.

[0008] As a further improvement of the above technical solution, the double-sided detection mechanism enables the polishing device to simultaneously obtain detailed surface information of the upper and lower surfaces of the lens, thereby providing more comprehensive and accurate data support for the polishing process. Based on these data, the two ion sources can flexibly set different ion source parameters according to the different surface shapes of the upper and lower surfaces of the lens. The two ion sources can plan their own polishing paths respectively, and calculate the optimal residence time according to the specific conditions of the lens surface, thereby generating two independent processing codes. Through this improvement, the polishing device can not only improve the processing accuracy of the optical lens, but also significantly improve production efficiency, ultimately providing users with higher quality optical products.

[0009] As a further improvement of the above technical solution, the vacuum box includes a box body and a door panel, a first opening is provided on the front of the box body, the first opening is connected to the installation space, the door panel is used to open or close the first opening, and an observation window is provided on the door panel.

[0010] As a further improvement of the above technical solution, when it is necessary to operate or observe the inside of the box, the user can open the door panel to open the first opening; when it is not necessary to operate or observe, the user can close the door panel to close the first opening, thereby ensuring that the vacuum environment inside the box is not disturbed by the outside world; the user can intuitively understand the situation inside the box through the observation window, thereby operating more accurately and avoiding the risks that may be caused by blind operation. At the same time, the design of the door panel also further improves the sealing performance of the box, ensuring the stability and durability of the vacuum environment.

[0011] As a further improvement of the above technical solution, the first polishing mechanism includes a first guide rail, a first moving device, a second guide rail, a second moving device, a third guide rail, a third moving device and a first base, the first guide rail is arranged on the inner top surface of the box body, the first moving device is slidably connected to the first guide rail, the second guide rail is vertically fixed on the first moving device, the second moving device is slidably connected to the second guide rail, the third guide rail is arranged on the second moving device, the third guide rail is vertically arranged with the second guide rail, the third moving device is slidably connected to the third guide rail, the first base is arranged on the third moving device, and the first base is used to fix the first ion source.

[0012] As a further improved beneficial effect of the above technical solution, multiple devices work together to achieve three-axis processing of the top surface of the lens. The first moving device slides along the first guide rail, the second guide rail is vertically fixed on the first moving device to ensure that it is perpendicular to the first guide rail, the second moving device is slidably connected to the second guide rail, so that the second moving device can move freely on the second guide rail, the third guide rail is arranged on the second moving device, and is arranged vertically with the second guide rail. The third moving device is slidably connected to the third guide rail to ensure that the third moving device moves in a direction perpendicular to the first two guide rails, thereby achieving precise control in three-dimensional space; the first base is arranged on the third moving device for fixing the first ion source, and the base ensures the stability and precise position of the ion source, thereby providing a uniform and consistent ion beam during the polishing process. The processing accuracy is improved, the processing range is expanded, and the top surface of the lens is finely and complexly processed in three axes. Through the multi-axis linkage polishing mechanism, the details of the polishing process can be better controlled to obtain a smoother and more precise lens surface.

[0013] As a further improvement of the above technical solution, the second polishing mechanism includes a fourth guide rail, a fourth moving device, a fifth guide rail, a fifth moving device, a sixth guide rail, a sixth moving device and a second base, the fourth guide rail is arranged on the inner bottom surface of the box body, the fourth moving device is slidably connected to the fourth guide rail, the fifth guide rail is vertically fixed on the fourth moving device, the fifth moving device is slidably connected to the fifth guide rail, the sixth guide rail is arranged on the fifth moving device, the fifth guide rail is vertically arranged with the fourth guide rail, the sixth moving device is slidably connected to the sixth guide rail, the second base is arranged on the sixth moving device, and the second base is used to fix the second ion source.

[0014] As a further improved beneficial effect of the above technical solution, multiple devices work together to achieve six-axis processing of the top surface of the lens. The fourth moving device slides along the fourth guide rail, the fifth guide rail is vertically fixed on the fourth moving device to ensure that it is perpendicular to the fourth guide rail, the fifth moving device is slidably connected to the fifth guide rail, so that the fifth moving device can move freely on the fifth guide rail, the sixth guide rail is set on the fifth moving device, and is set vertically with the fifth guide rail. The sixth moving device is slidably connected to the sixth guide rail to ensure that the sixth moving device moves in a direction perpendicular to the first two guide rails, thereby achieving precise control in six-dimensional space; the second base is set on the sixth moving device for fixing the second ion source, and the base ensures the stability and precise position of the ion source, thereby providing a uniform and detailed ion beam during the polishing process. The processing accuracy is improved, the processing range is expanded, and the bottom surface of the lens is finely and complexly processed in three axes. Through the multi-axis linkage polishing mechanism, the details in the polishing process can be better controlled, thereby obtaining a smoother and more precise bottom surface of the lens.

[0015] As a further improvement of the above technical solution, the clamp includes an arc-shaped plate and an anti-slip rubber strip. The outer side of the arc-shaped plate is fixedly connected to the movable end of the telescopic rod. The inner side of the arc-shaped plate is provided with a slot, which matches the anti-slip rubber strip, and the anti-slip rubber strip is clamped in the slot.

[0016] As a further improvement of the above technical solution, the anti-slip rubber strip can effectively prevent the clamp from sliding during use and can also provide additional buffering effect. This buffering effect can absorb part of the impact force when clamping an object, thereby reducing damage to the clamped object. A better clamping effect can be achieved during use. The combination of uniform distribution of clamping force and buffering effect significantly improves the stability and reliability of the clamp.

[0017] As a further improvement of the above technical solution, the fixing assembly includes two driving devices, each of the driving devices includes a motor, a screw, a seventh guide rail, a slider and a support rod, the seventh guide rail is arranged on the inner bottom surface of the box body along the depth direction of the box body, the support rod is vertically fixed on the slider, the lifting sleeve is sleeved on the support rod one by one, the lifting sleeve is slidably connected to the support rod, the slider is slidably connected to the seventh guide rail, the slider is provided with a first threaded hole, the screw is threadedly connected to the first threaded hole, the output shaft of the motor is fixedly connected to the screw, and the slider is driven by the motor to reciprocate along the seventh guide rail.

[0018] As a further improved beneficial effect of the above technical solution, the support rod is vertically fixed on the slider, providing the necessary support and guidance for the slider. The lifting sleeve is mounted one-to-one with each support rod, so that the slider can slide up and down along the support rod, thereby realizing the lifting function. The slider is connected to the seventh guide rail through a sliding connection, ensuring the smooth movement of the slider on the guide rail. The slider is provided with a first threaded hole, and the screw rod is threadedly connected to the first threaded hole, so that the slider can rotate along the screw rod and achieve precise positioning. The output shaft of the motor is fixedly connected to the screw rod. Driven by the motor, the slider can reciprocate along the seventh guide rail. The reciprocating motion of the slider makes the movement of the device in the front and rear directions more flexible and efficient.

[0019] As a further improvement of the above technical solution, a second threaded hole is provided on the side wall of the lifting sleeve, a locking screw is provided on the second threaded hole, and one end of the locking screw passes through the second threaded hole and abuts against the support rod.

[0020] As a further improvement of the above technical solution, the second threaded hole is installed in conjunction with a locking screw, and one end of the locking screw passes through the second threaded hole and is in close contact with the support rod. This design enables the lifting sleeve to be more stably positioned during the up and down movement, thereby improving the reliability of the overall equipment and the accuracy of operation. In this way, the lifting sleeve can effectively prevent displacement caused by vibration or external force when performing its function, ensuring the stable operation of the equipment in various working environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the structure of the present invention; Figure 2 It is a structural schematic diagram of the first polishing mechanism in the present invention; Figure 3 is a schematic structural diagram of the second polishing mechanism in the present invention; Figure 4 It is a structural schematic diagram of the clamping mechanism in the present invention.

[0022] In the accompanying drawings: 1-vacuum box, 101-box, 102-door panel, 103-observation window, 2-first polishing mechanism, 201-first guide rail, 202-first moving device, 203-second guide rail, 204-second moving device, 205-third guide rail, 206-third moving device, 207-first base, 3-second polishing mechanism, 301-fourth guide rail, 302-fourth moving device, 303-fifth guide rail, 304-fifth moving device, 305-sixth guide rail Rail, 306-sixth moving device, 307-second base, 4-clamping mechanism, 401-clamping assembly, 402-fixing assembly, 403-lifting sleeve, 404-telescopic rod, 405-clamp, 406-arc plate, 407-anti-slip rubber strip, 408-motor, 409-screw, 410-seventh guide rail, 411-slider, 412-support rod, 413-locking screw, 5-surface detection mechanism, 501-first detection device, 502-second detection device. DETAILED DESCRIPTION

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the above briefly describes the drawings required for use in the description of the embodiments. Obviously, the drawings described are only part of the embodiments of the present invention, not all of the embodiments, and those skilled in the art can also obtain other design solutions and drawings based on these drawings without creative work.

[0024] The following will clearly and completely describe the concept, specific structure and technical effects of the present invention in combination with the embodiments and drawings, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by technicians in this field without creative work are all within the scope of protection of the present invention. In addition, all the connection / connection relationships mentioned in the text do not refer to the direct connection of components, but refer to the formation of a better connection structure by adding or reducing connection accessories according to the specific implementation situation. The various technical features in the present invention can be combined interchangeably without conflicting with each other.

[0025] In the manufacturing process of lenses, polishing is a crucial process that can significantly improve the surface accuracy, overall quality and optical performance of the lens. Ion beam polishing is an advanced non-contact polishing technology. Its working principle is to bombard the surface of the optical lens with a high-energy ion beam emitted by an ion source in a vacuum environment, and use the physical sputtering effect to achieve atomic-level material removal. This technology is known for its high precision, high certainty, excellent surface quality and wide range of applications.

[0026] However, during the ion source polishing process, the surface to be polished is firstly inspected in detail to determine the optimal ion source parameters and polishing path, and then the entire system is evacuated to ensure that the ion beam can perform polishing in an interference-free environment. After the first polishing, the system needs to be re-inflated, the lens is disassembled and flipped, and after the flipping is completed, the surface needs to be inspected again, vacuumed again, and the second polishing operation is performed. This series of operations is not only time-consuming, but also places extremely high demands on the operator's technical level and patience. Each step needs to be precisely controlled to ensure the final polishing result.

[0027] To this end, an ion beam polishing device, referring to Figure 1 to Figure 4 , which includes a vacuum box 1, a first polishing mechanism 2, a second polishing mechanism 3 and a clamping mechanism 4, wherein an installation space is provided in the vacuum box 1, wherein the first polishing mechanism 2 is arranged at the upper part of the installation space, wherein the second polishing mechanism 3 is arranged at the lower part of the installation space, wherein the second polishing mechanism 3 is arranged symmetrically with the first polishing mechanism 2, wherein the clamping mechanism 4 includes a clamping assembly 401 and a fixing assembly 402, wherein the fixing assembly 402 is arranged on the inner bottom surface of the vacuum box 1, wherein the clamping assembly 401 includes two lifting sleeves 403, two telescopic rods 404 and two clamps 405, wherein the lifting sleeves 403 are slidably connected to the fixing assembly 402 so that the lifting sleeves 403 are adjusted up and down, wherein the fixed ends of the telescopic rods 404 are fixedly connected to the lifting sleeves 403 in a one-to-one correspondence, wherein the movable ends of the telescopic rods 404 are fixedly connected to the clamps 405 in a one-to-one correspondence, and wherein the clamps 405 are used to fix the lens.

[0028] By adopting the symmetrically arranged first polishing mechanism 2 and second polishing mechanism 3, the double-sided polishing operation of the lens can be completed in a vacuum environment, reducing the number of times the lens is flipped and the vacuum is re-drawn, thereby significantly improving the polishing efficiency. The fixing component 402 is designed and installed on the inner bottom surface of the vacuum box 1. The clamping component 401 can effectively clamp and fix the workpiece to be polished, ensuring that the workpiece remains stable during the polishing process, thereby improving the polishing quality and accuracy. The clamping component 401 is combined with the fixing component 402 by a sliding connection, so that the clamping component 401 can move up and down within a certain range, enhancing the convenience and reliability of its operation. Through the coordinated work of the lifting sleeve 403 and the telescopic rod 404, the clamp 405 can accurately position and clamp the workpiece, thereby ensuring the stability and repeatability of the entire clamping process.

[0029] When in use, first move the clamping assembly 401 to a position close to the door panel 102 through the fixing assembly 402 to facilitate the installation of the optical lens, place the lens between the two clamps 405, and adjust the distance between the two clamps 405 through the telescopic rod 404 to ensure that the lens is firmly clamped; after clamping the lens, adjust the relative position of the lifting sleeve 403 on the telescopic rod 404 through the locking screw 413 to move the lens to a suitable height, thereby ensuring the accuracy of subsequent operations; next, the motor 408 in the device drives the screw 409 to rotate so that the slider 411 moves on the seventh guide rail 410, thereby driving the lens to move between the first detection device 501 and the second detection device 502. The two detection devices simultaneously perform surface shape detection on the top and bottom surfaces of the lens to obtain detailed surface shape data of the top and bottom surfaces of the lens, which will then be transmitted to the control system. After calculation and analysis, the system will derive the best polishing route to ensure that the surface of the lens reaches the expected accuracy and smoothness; after obtaining the best polishing route, the slider 411 continues to move on the seventh guide rail 410, driving the lens to continue to move between the first polishing mechanism 2 and the second polishing mechanism 3; the vacuum box 1 begins to evacuate to ensure that the lens remains stable during the polishing process, and then the first polishing mechanism 2 and the second polishing mechanism 3 perform synchronous polishing processing on the top and bottom surfaces of the lens, and drive the ion source to move through the three-axis drive device to obtain precise control; after the polishing process is completed, the vacuum box 1 will complete the inflation operation to restore it to a normal pressure state; the motor 408 is started again to drive the slider 411 to move, so that the optical lens moves along the seventh guide rail 410 to a position close to the door panel 102 for easy disassembly, and the telescopic rod 404 retracts outward to contact and release the clamping of the lens, completing the entire disassembly process.

[0030] Before polishing the lens, it is necessary to detect the surface of the lens to obtain the most reasonable polishing route. Therefore, in one embodiment, the polishing device also includes a surface shape detection mechanism 5, and the surface shape detection mechanism 5 includes a first detection device 501 and a second detection device 502, wherein the first detection device 501 is arranged at the top of the installation space, and the second detection device 502 is arranged at the bottom of the installation space, and the first detection device 501 is used to detect the top surface of the lens placed on the clamping mechanism 4, and the second detection device 502 is used to detect the bottom surface of the lens placed on the clamping mechanism 4. The double-sided detection mechanism enables the polishing device to simultaneously obtain detailed surface shape information of the upper and lower surfaces of the lens, thereby providing more comprehensive and accurate data support for the polishing process. Based on these data, the two ion sources can flexibly set different ion source parameters according to the different surface shapes of the upper and lower surfaces of the lens, and the two ion sources can plan their respective polishing paths respectively, and calculate the optimal residence time according to the specific conditions of the lens surface, thereby generating two independent processing codes. Through this improvement, the polishing device can not only improve the processing accuracy of the optical lens, but also significantly improve the production efficiency, and ultimately provide users with higher quality optical products.

[0031] Before lens polishing, the surface of the lens must be fully and carefully inspected to develop the most reasonable polishing route to ensure that the polishing process can be carried out efficiently and accurately. Therefore, in one embodiment, the vacuum box 1 includes a box body 101 and a door panel 102. The front of the box body 101 is provided with a first opening, the first opening is connected to the installation space, the door panel 102 is used to open or close the first opening, and the door panel 102 is provided with an observation window 103. When it is necessary to operate or observe the inside of the box body 101, the user can open the door panel 102 to put the first opening in an open state; when it is not necessary to operate or observe, the user can close the door panel 102 to put the first opening in a closed state, thereby ensuring that the vacuum environment inside the box body 101 is not disturbed by the outside world; the situation inside the box body 101 can be intuitively understood through the observation window 103, so that the operation can be performed more accurately, avoiding the risks that may be caused by blind operation. At the same time, the design of the door panel 102 further improves the sealing performance of the box body 101, ensuring the stability and durability of the vacuum environment.

[0032] In order to achieve high-precision three-axis machining of the top surface of the lens. Therefore, in one embodiment, the first polishing mechanism 2 includes a first guide rail 201, a first moving device 202, a second guide rail 203, a second moving device 204, a third guide rail 205, a third moving device 206 and a first base 207, wherein the first guide rail 201 is arranged on the inner top surface of the housing 101, the first moving device 202 is slidably connected to the first guide rail 201, the second guide rail 203 is vertically fixed on the first moving device 202, the second moving device 204 is slidably connected to the second guide rail 203, the third guide rail 205 is arranged on the second moving device 204, the third guide rail 205 is vertically arranged with the second guide rail 203, the third moving device 206 is slidably connected to the third guide rail 205, the first base 207 is arranged on the third moving device 206, and the first base 207 is used to fix the first ion source. Multiple devices work together to achieve three-axis machining of the top surface of the lens. The first moving device 202 slides along the first guide rail 201, the second guide rail 203 is vertically fixed on the first moving device 202 to ensure that it is perpendicular to the first guide rail 201, the second moving device 204 is slidably connected to the second guide rail 203, so that the second moving device 204 can move freely on the second guide rail 203, the third guide rail 205 is arranged on the second moving device 204, and is arranged perpendicular to the second guide rail 203, and the third moving device 206 is slidably connected to the third guide rail 205 to ensure that the third moving device 206 moves in a direction perpendicular to the first two guide rails, thereby achieving precise control in three-dimensional space; the first base 207 is arranged on the third moving device 206 to fix the first ion source, and the base ensures the stability and precise position of the ion source, thereby providing a uniform and consistent ion beam during the polishing process. The processing accuracy is improved, the processing range is expanded, and the top surface of the lens is finely and complexly processed in three axes. Through the multi-axis linkage polishing mechanism, the details of the polishing process can be better controlled to obtain a smoother and more precise lens surface.

[0033] In order to achieve high-precision three-axis machining of the bottom surface of the lens. Therefore, in one embodiment, the second polishing mechanism 3 includes a fourth guide rail 301, a fourth moving device 302, a fifth guide rail 303, a fifth moving device 304, a sixth guide rail 305, a sixth moving device 306 and a second base 307, wherein the fourth guide rail 301 is arranged on the inner bottom surface of the box 101, the fourth moving device 302 is slidably connected to the fourth guide rail 301, the fifth guide rail 303 is vertically fixed on the fourth moving device 302, the fifth moving device 304 is slidably connected to the fifth guide rail 303, the sixth guide rail 305 is arranged on the fifth moving device 304, the fifth guide rail 303 is vertically arranged with the fourth guide rail 301, the sixth moving device 306 is slidably connected to the sixth guide rail 305, the second base 307 is arranged on the sixth moving device 306, and the second base 307 is used to fix the second ion source. Multiple devices work together to achieve six-axis machining of the top surface of the lens. The fourth moving device 302 slides along the fourth guide rail 301, the fifth guide rail 303 is vertically fixed on the fourth moving device 302 to ensure that it is perpendicular to the fourth guide rail 301, the fifth moving device 304 is slidably connected to the fifth guide rail 303, so that the fifth moving device 304 can move freely on the fifth guide rail 303, the sixth guide rail 305 is arranged on the fifth moving device 304, and is arranged perpendicular to the fifth guide rail 303, and the sixth moving device 306 is slidably connected to the sixth guide rail 305 to ensure that the sixth moving device 306 moves in a direction perpendicular to the first two guide rails, thereby achieving precise control in six-dimensional space; the second base is arranged on the sixth moving device 306 for fixing the second ion source, and the base ensures the stability and precise position of the ion source, thereby providing a uniform and detailed ion beam during the polishing process. The processing accuracy is improved, the processing range is expanded, and the bottom surface of the lens is finely and complexly processed in three axes. Through the multi-axis linkage polishing mechanism, the details in the polishing process can be better controlled, thereby obtaining a smoother and more precise bottom surface of the lens.

[0034] In order to achieve high-precision three-axis machining of the bottom surface of the lens. Therefore, in one embodiment, the clamping mechanism 4 includes a clamping component 401 and a fixing component 402, the fixing component 402 is arranged on the inner bottom surface of the box 101, the clamping component 401 is slidably connected with the fixing component 402, and the clamping component 401 is arranged between the first polishing mechanism 2 and the second polishing mechanism 3. The fixing component 402 is designed and installed on the inner bottom surface of the box 101 to ensure its stability and reliability, and the clamping component 401 is combined with the fixing component 402 by sliding connection, so that the clamping component 401 can be flexibly moved within a certain range, and the clamping component 401 is arranged between the first polishing mechanism 2 and the second polishing mechanism 3, which can effectively clamp and fix the workpiece to be polished, ensuring that the workpiece remains stable during the polishing process, thereby improving the polishing quality and accuracy. It has mobility, is convenient for clamping the workpiece, and can also improve the polishing efficiency and accuracy, making the entire polishing process more efficient and stable.

[0035] The size of the lens is varied, and there are various specifications and sizes. Therefore, in one embodiment, the clamping assembly 401 includes two lifting sleeves 403, two telescopic rods 404 and two clamps 405, the lifting sleeves 403 are slidably connected to the fixed assembly 402, the fixed ends of the telescopic rods 404 are fixedly connected to the lifting sleeves 403 in a one-to-one correspondence, and the movable ends of the telescopic rods 404 are fixedly connected to the clamps 405 in a one-to-one correspondence. The clamping assembly 401 can move up and down more flexibly in actual application, thereby realizing rapid clamping and loosening of the workpiece. This improvement not only improves the working efficiency of the clamping assembly 401, but also enhances the convenience and reliability of its operation. Through the coordinated work of the lifting sleeve 403 and the telescopic rod 404, the clamp 405 can more accurately locate and clamp the workpiece, thereby ensuring the stability and repeatability of the entire clamping process.

[0036] The lens itself has a certain fragility, so during the processing, careful protection measures must be taken. Therefore, in one embodiment, the clamp 405 includes a curved plate 406 and an anti-skid rubber strip 407, the outer side of the curved plate 406 is fixedly connected to the movable end of the telescopic rod 404, and the inner side of the curved plate 406 is provided with a card slot, the card slot matches the anti-skid rubber strip 407, and the anti-skid rubber strip 407 is clamped in the card slot. The anti-skid rubber strip 407 can effectively prevent the clamp 405 from sliding during use, and can also provide additional buffering. This buffering effect can absorb part of the impact force when clamping an object, thereby reducing damage to the clamped object. A better clamping effect can be achieved during use. The combination of uniform distribution of clamping force and buffering effect significantly improves the stability and reliability of the clamp 405.

[0037] During the production process, the lens needs to pass through the inspection station first, and then enter the polishing station after obtaining a reasonable polishing route. Therefore, in one embodiment, the fixing assembly 402 includes two driving devices, each of which includes a motor 408, a screw 409, a seventh guide rail 410, a slider 411 and a support rod 412. The seventh guide rail 410 is arranged on the inner bottom surface of the box body 101 along the depth direction of the box body 101, and the support rod 412 is vertically fixed on the slider 411. The lifting sleeve 403 is sleeved on the support rod 412 in a one-to-one correspondence. The lifting sleeve 403 is slidably connected to the support rod 412, and the slider 411 is slidably connected to the seventh guide rail 410. The slider 411 is provided with a first threaded hole, and the screw 409 is threadedly connected to the first threaded hole. The output shaft of the motor 408 is fixedly connected to the screw 409, and the slider 411 is driven by the motor 408 to reciprocate along the seventh guide rail 410. The support rod 412 is vertically fixed on the slider 411, providing the necessary support and guidance for the slider 411. The lifting sleeve 403 is sleeved one by one with each support rod 412, so that the slider 411 can slide up and down along the support rod 412, thereby realizing the lifting function. The slider 411 is connected to the seventh guide rail 410 by sliding, ensuring the smooth movement of the slider 411 on the guide rail. The slider 411 is provided with a first threaded hole, and the screw 409 is threadedly connected to the first threaded hole, so that the slider 411 can rotate along the screw 409 and achieve precise positioning. The output shaft of the motor 408 is fixedly connected to the screw 409. Driven by the motor 408, the slider 411 can reciprocate along the seventh guide rail 410. The reciprocating motion of the slider 411 makes the movement of the device in the front and rear directions more flexible and efficient.

[0038] The displacement of the lens position has an adverse effect on the processing effect. Therefore, in one embodiment, a second threaded hole is provided on the side wall of the lifting sleeve 403, and a locking screw 413 is provided on the second threaded hole, and one end of the locking screw 413 passes through the second threaded hole and abuts against the support rod 412. The second threaded hole is installed in conjunction with the locking screw 413, and one end of the locking screw 413 passes through the second threaded hole and is in close contact with the support rod 412. Such a design enables the lifting sleeve 403 to be positioned more stably during the up and down movement, thereby improving the reliability of the overall equipment and the accuracy of operation. In this way, the lifting sleeve 403 can effectively prevent displacement caused by vibration or external force when performing its function, ensuring the stable operation of the equipment in various working environments.

[0039] The preferred embodiments of the present invention are described in detail above, but the present invention is not limited to the embodiments. Those skilled in the art may make various equivalent modifications or substitutions without violating the spirit of the present invention. These equivalent modifications or substitutions are all included in the scope defined by the claims of this application.

Claims

1. An ion beam polishing device, characterized in that: include: A vacuum box (1), wherein an installation space is provided in the vacuum box (1); A first polishing mechanism (2), the first polishing mechanism (2) being arranged at an upper part of the installation space; a second polishing mechanism (3), the second polishing mechanism (3) being arranged at the lower part of the installation space, the second polishing mechanism (3) being arranged symmetrically with the first polishing mechanism (2); A clamping mechanism (4), the clamping mechanism (4) comprising a clamping assembly (401) and a fixing assembly (402), the fixing assembly (402) being arranged on the inner bottom surface of the vacuum box (1), the clamping assembly (401) comprising two lifting sleeves (403), two telescopic rods (404) and two clamps (405), the lifting sleeves (403) being slidably connected to the fixing assembly (402) so that the lifting sleeves (403) can be adjusted up and down, the fixed ends of the telescopic rods (404) being fixedly connected to the lifting sleeves (403) in a one-to-one correspondence, the movable ends of the telescopic rods (404) being fixedly connected to the clamps (405) in a one-to-one correspondence, and the clamps (405) being used to fix the lenses.

2. An ion beam polishing device according to claim 1, characterized in that: The polishing device further comprises a surface shape detection mechanism (5), the surface shape detection mechanism (5) comprising a first detection device (501) and a second detection device (502), the first detection device (501) being arranged at the top of the installation space, the second detection device (502) being arranged at the bottom of the installation space, the first detection device (501) being used to detect the top surface of the lens placed on the clamping mechanism (4), and the second detection device (502) being used to detect the bottom surface of the lens placed on the clamping mechanism (4).

3. An ion beam polishing device according to claim 1, characterized in that: The vacuum box (1) comprises a box body (101) and a door panel (102); a first opening is provided on the front of the box body (101), the first opening is connected to the installation space, the door panel (102) is used to open or close the first opening, and an observation window (103) is provided on the door panel (102).

4. An ion beam polishing device according to claim 3, characterized in that: The first polishing mechanism (2) comprises a first guide rail (201), a first moving device (202), a second guide rail (203), a second moving device (204), a third guide rail (205), a third moving device (206) and a first base (207); the first guide rail (201) is arranged on the inner top surface of the housing (101); the first moving device (202) is slidably connected to the first guide rail (201); the second guide rail (203) is vertically fixed on the first moving device (202); the second moving device (204) is slidably connected to the second guide rail (203); the third guide rail (205) is arranged on the second moving device (204); the third guide rail (205) is vertically arranged with the second guide rail (203); the third moving device (206) is slidably connected to the third guide rail (205); the first base (207) is arranged on the third moving device (206); and the first base (207) is used to fix a first ion source.

5. An ion beam polishing device according to claim 3, characterized in that: The second polishing mechanism (3) comprises a fourth guide rail (301), a fourth moving device (302), a fifth guide rail (303), a fifth moving device (304), a sixth guide rail (305), a sixth moving device (306) and a second base (307), wherein the fourth guide rail (301) is arranged on the inner bottom surface of the box body (101), the fourth moving device (302) is slidably connected to the fourth guide rail (301), and the fifth guide rail (303) is vertically fixed to the fourth moving device ( The fifth movable device (304) is slidably connected to the fifth guide rail (303), the sixth guide rail (305) is arranged on the fifth movable device (304), the fifth guide rail (303) is vertically arranged with the fourth guide rail (301), the sixth movable device (306) is slidably connected to the sixth guide rail (305), the second base (307) is arranged on the sixth movable device (306), and the second base (307) is used to fix the second ion source.

6. An ion beam polishing device according to claim 1, characterized in that: The clamp (405) comprises an arc-shaped plate (406) and an anti-slip rubber strip (407); the outer side of the arc-shaped plate (406) is fixedly connected to the movable end of the telescopic rod (404); the inner side of the arc-shaped plate (406) is provided with a slot, the slot matches the anti-slip rubber strip (407), and the anti-slip rubber strip (407) is clamped in the slot.

7. An ion beam polishing device according to claim 6, characterized in that: The fixing assembly (402) includes two driving devices, each of which includes a motor (408), a screw rod (409), a seventh guide rail (410), a slider (411) and a support rod (412). The seventh guide rail (410) is arranged on the inner bottom surface of the box body (101) along the depth direction of the box body (101). The support rod (412) is vertically fixed on the slider (411). The lifting sleeves (403) are sleeved on the support rods in a one-to-one correspondence. (412), the lifting sleeve (403) is slidably connected to the support rod (412), the sliding block (411) is slidably connected to the seventh guide rail (410), a first threaded hole is provided on the sliding block (411), the screw rod (409) is threadedly connected to the first threaded hole, the output shaft of the motor (408) is fixedly connected to the screw rod (409), and the sliding block (411) is driven by the motor (408) to reciprocate along the seventh guide rail (410).

8. An ion beam polishing device according to claim 7, characterized in that: A second threaded hole is provided on the side wall of the lifting sleeve (403), a locking screw (413) is provided on the second threaded hole, and one end of the locking screw (413) passes through the second threaded hole and abuts against the support rod (412).

Images