YSZ coating spraying method for plasma spraying equipment

Abstract

The invention discloses a method for spraying a YSZ coating for plasma spraying equipment. The method comprises the steps of degreasing, sand blasting, cleaning, plasma spraying, cleaning and drying. And by adjusting process parameters, the chemical stability of the coating is improved, and the problems of cracking, falling and the like at the temperature of 500 DEG C or below are solved.

Description

Technical Field

[0001] The invention relates to a method for spraying YSZ coating using plasma spraying equipment. Background Art

[0002] At present, it is widely used in the internal protection parts of the etching machine. The use of hard anodizing technology to treat the surface of aluminum-based parts can effectively meet the protection requirements of low-power and low plasma density processes. However, as the etching power increases, the parts are bombarded by the plasma more, and the heat generated by ionization is greater, resulting in higher actual working temperatures. High temperatures can easily cause high-temperature cracking of the anodized film on the surface of the parts. The generation and further expansion of cracks will cause the protection of the parts to fail. Therefore, the thermal cracking reliability and corrosion resistance of the component coating are crucial to the quality and service life of the protective parts. Summary of the invention

[0003] The object of the present invention is to provide a method for spraying YSZ coating using plasma spraying equipment to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solution: a method for spraying YSZ coating with plasma spraying equipment, characterized in that it comprises the following steps:

[0005] Step 1: Degrease and clean the equipment parts by placing them in a 60±5℃ degreasing soaking tank for 10-20 minutes to remove processing grease and contamination on the surface of the parts;

[0006] Step 2: Soak the components in pure water, place the components in a pure water soaking tank, soak for 60-120 seconds to remove residual chemical degreasing liquid;

[0007] Step 3: sandblasting the equipment components to improve coating adhesion;

[0008] Step 4: Rinse the components with a soda gun to remove residual dust on the surface;

[0009] Step 5: Perform ultrasonic vibration treatment on the equipment parts to remove some residual dust in the grooves and further improve the adhesion of the coating.

[0010] Step 6: Dry the components to prevent moisture from remaining and causing the coating to fall off;

[0011] Step 7: Select the same process parameters: current 550-600A, power 32-36KW, argon 35-45NLPM, hydrogen 6-8NLPM, spraying distance 130-150mm, powder feeding 18-22g / min;

[0012] Step 8: Use the orthogonal test L8(41 X2 4 ) Test 8 groups of experimental comparison data and select the best process parameters: current 550-600, argon 35-40, hydrogen 8-12, powder feeding 15-20g / min, distance 130-160mm, HCL5% 2.3;

[0013] Step nine: ultrasonically clean the components by placing them in an ultrasonic pure water cleaning tank for 10-30 minutes;

[0014] Step 10: Dry the components by placing them in a dust-free oven and drying them at 120±5°C for 2 hours.

[0015] Compared with the prior art, the invention has the following beneficial effects: a method for preparing a coating by plasma spraying, comprising the steps of degreasing, sandblasting, cleaning, plasma spraying, cleaning, and drying. By adjusting the process parameters, the chemical stability of the coating is improved, and no cracks or falling off will occur below 500°C. DETAILED DESCRIPTION

[0016] The following will be combined with the technical solutions in the embodiments of the present invention to clearly and completely describe. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] The present invention provides a technical solution:

[0018] A method for spraying a YSZ coating with a plasma spraying device comprises the following steps:

[0019] Step 1: Degrease and clean the equipment parts by placing them in a 60±5℃ degreasing soaking tank for 10-20 minutes to remove processing grease and contamination on the surface of the parts;

[0020] Step 2: Soak the components in pure water, place the components in a pure water soaking tank, soak for 60-120 seconds to remove residual chemical degreasing liquid;

[0021] Step 3: sandblasting the equipment components to improve coating adhesion;

[0022] Step 4: Rinse the components with a soda gun to remove residual dust on the surface.

[0023] Step 5: Perform ultrasonic vibration treatment on the equipment parts to remove some residual dust in the grooves and further improve the adhesion of the coating.

[0024] Step 6: Dry the parts to prevent moisture from remaining and causing the coating to fall off.

[0025] Step 7: Select the same process parameters: current 550-600A, power 32-36KW, argon 35-45NLPM, hydrogen 6-8NLPM, spray distance 130-150mm, powder feeding 18-22g / min. Comparing the performance of Y element powder coatings with different proportions, it is found that for targets below 500℃, the coating with 20% Y ratio is more resistant to chemical corrosion than the coating with 8% ratio. Considering the use environment of the chamber, it is better to choose a 20% ratio.

[0026]

[0027] Step 8: Use the orthogonal test L8(4 1 X2 4 ) Test 8 groups of experimental comparison data and select the 5th group of process parameters;

[0028]

[0029]

[0030] Step nine: ultrasonically clean the components by placing them in an ultrasonic pure water cleaning tank for 10-30 minutes;

[0031] Step 10: Dry the components by placing them in a dust-free oven and drying them at 120±5°C for 2 hours.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for spraying YSZ coating using plasma spraying equipment, characterized in that: The following steps are involved: Step 1: Degrease and clean the equipment parts by placing them in a 60±5℃ degreasing soaking tank for 10-20 minutes to remove processing grease and contamination on the surface of the parts; Step 2: Soak the components in pure water, place the components in a pure water soaking tank, soak for 60-120 seconds to remove residual chemical degreasing liquid; Step 3: sandblasting the equipment components to improve coating adhesion; Step 4: Rinse the components with a soda gun to remove residual dust on the surface; Step 5: Perform ultrasonic vibration treatment on the equipment parts to remove some residual dust in the grooves and further improve the adhesion of the coating. Step 6: Dry the components to prevent moisture from remaining and causing the coating to fall off; Step 7: Select the same process parameters: current 550-600A, power 32-36KW, argon 35-45NLPM, hydrogen 6-8NLPM, spraying distance 130-150mm, powder feeding 18-22g / min; Step 8: Use the orthogonal test L8(4 1 X2 4 ) Test 8 groups of experimental comparison data and select the best process parameters: current 550-600, argon 35-40, hydrogen 8-12, powder feeding 15-20g / min, distance 130-160mm, HCL5% 2.3; Step nine: ultrasonically clean the components by placing them in an ultrasonic pure water cleaning tank for 10-30 minutes; Step 10: Dry the components by placing them in a dust-free oven and drying them at 120±5°C for 2 hours.

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